WO2008151972A3 - Capacitative and piezoresistive differential pressure sensor - Google Patents
Capacitative and piezoresistive differential pressure sensor Download PDFInfo
- Publication number
- WO2008151972A3 WO2008151972A3 PCT/EP2008/056900 EP2008056900W WO2008151972A3 WO 2008151972 A3 WO2008151972 A3 WO 2008151972A3 EP 2008056900 W EP2008056900 W EP 2008056900W WO 2008151972 A3 WO2008151972 A3 WO 2008151972A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- support
- measuring diaphragm
- differential pressure
- interior
- diaphragm
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention relates to a differential pressure sensor, comprising a first measuring diaphragm (5a), arranged on a first support (3a), on the exterior of which facing the support (3a) a first pressure (p1) acts, on the interior of which facing away from the first support (3a) at least one electrode (E1, E1') and at least one piezoresistive sensor element (R) for detecting a differential pressure-dependent deflection of the first measuring diaphragm (5a) are arranged, a second measuring diaphragm (5b), arranged on a second support (3b), which extends in parallel to the first measuring diaphragm (5a), on the exterior of which facing the support (3b) a second pressure (p2) acts, on the interior of which facing away from the second support (3b) at least one second electrode (E2, E2') is arranged which together with a dedicated first electrode (E1, E1') arranged on the first measuring diaphragm (5a) forms a capacitative sensor element, the first and the second measuring diaphragm (5a, 5b) being arranged in parallel and being firmly interconnected via a mechanical connection (P) that connects an outer edge (21) of the interior of the first measuring diaphragm (5a) to an outer edge (21) of the interior of the second measuring diaphragm (5b) and a spacer (7) of the same height connected to the diaphragm centers of the two measuring diaphragms (5a, 5b).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007027274A DE102007027274A1 (en) | 2007-06-11 | 2007-06-11 | Differential Pressure Sensor |
DE102007027274.1 | 2007-06-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008151972A2 WO2008151972A2 (en) | 2008-12-18 |
WO2008151972A3 true WO2008151972A3 (en) | 2009-02-12 |
Family
ID=39885067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/056900 WO2008151972A2 (en) | 2007-06-11 | 2008-06-04 | Capacitative and piezoresistive differential pressure sensor |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102007027274A1 (en) |
WO (1) | WO2008151972A2 (en) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011008346A1 (en) | 2011-01-12 | 2012-07-12 | Hydac Electronic Gmbh | Device for converting a force or a pressure into an electrical signal and method for producing such a device |
US8171800B1 (en) * | 2011-01-25 | 2012-05-08 | Continental Automotive Systems, Inc. | Differential pressure sensor using dual backside absolute pressure sensing |
US8466523B2 (en) | 2011-10-07 | 2013-06-18 | Continental Automotive Systems, Inc. | Differential pressure sensor device |
US9021887B2 (en) | 2011-12-19 | 2015-05-05 | Infineon Technologies Ag | Micromechanical semiconductor sensing device |
DE102012205878A1 (en) * | 2012-04-11 | 2013-10-17 | Robert Bosch Gmbh | Micromechanical pressure sensor |
DE102013113171A1 (en) * | 2013-11-28 | 2015-05-28 | Endress + Hauser Gmbh + Co. Kg | Piezoresistive silicon differential pressure cell and method for its production |
DE102013113843A1 (en) | 2013-12-11 | 2015-06-11 | Endress + Hauser Gmbh + Co. Kg | pressure sensor |
DE202014103355U1 (en) * | 2014-07-22 | 2014-08-19 | Infineon Technologies Ag | An apparatus and a system for detecting a physical quantity |
DE102014118850A1 (en) * | 2014-12-17 | 2016-06-23 | Endress + Hauser Gmbh + Co. Kg | Pressure sensor for measuring a differential pressure and a system pressure |
DE102014119398A1 (en) * | 2014-12-22 | 2016-06-23 | Endress + Hauser Gmbh + Co. Kg | Differential pressure transducer and a method of operating such |
DE102014119400A1 (en) * | 2014-12-22 | 2016-06-23 | Endress + Hauser Gmbh + Co. Kg | Pressure transducer and method of operating such |
US11414607B2 (en) | 2015-09-22 | 2022-08-16 | Hydrocarbon Technology & Innovation, Llc | Upgraded ebullated bed reactor with increased production rate of converted products |
US11414608B2 (en) | 2015-09-22 | 2022-08-16 | Hydrocarbon Technology & Innovation, Llc | Upgraded ebullated bed reactor used with opportunity feedstocks |
US11421164B2 (en) | 2016-06-08 | 2022-08-23 | Hydrocarbon Technology & Innovation, Llc | Dual catalyst system for ebullated bed upgrading to produce improved quality vacuum residue product |
US11732203B2 (en) | 2017-03-02 | 2023-08-22 | Hydrocarbon Technology & Innovation, Llc | Ebullated bed reactor upgraded to produce sediment that causes less equipment fouling |
JP7336831B2 (en) | 2017-03-02 | 2023-09-01 | ハイドロカーボン テクノロジー アンド イノベーション、エルエルシー | Improved ebullated bed reactor with low fouling deposits |
DE102017214846A1 (en) * | 2017-08-24 | 2019-02-28 | Infineon Technologies Ag | Cased MEMS component with disturbance compensation |
CA3057131C (en) | 2018-10-17 | 2024-04-23 | Hydrocarbon Technology And Innovation, Llc | Upgraded ebullated bed reactor with no recycle buildup of asphaltenes in vacuum bottoms |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3748571A (en) * | 1972-09-07 | 1973-07-24 | Kulite Semiconductors Products | Pressure sensitive transducers employing capacitive and resistive variations |
US4262532A (en) * | 1979-09-13 | 1981-04-21 | General Electric Company | Pressure and temperature sensor |
EP0490486A2 (en) * | 1990-12-07 | 1992-06-17 | Wisconsin Alumni Research Foundation | Micromachined differential pressure transducers and method of producing the same |
DE4309206C1 (en) * | 1993-03-22 | 1994-09-15 | Texas Instruments Deutschland | Semiconductor device having a force and/or acceleration sensor |
DE19601080A1 (en) * | 1996-01-13 | 1997-07-24 | Bosch Gmbh Robert | Force sensor esp. pressure sensor with at least one measuring diaphragm |
US20010032515A1 (en) * | 2000-02-11 | 2001-10-25 | Willcox Charles R. | Oil-less differential pressure sensor |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH680392A5 (en) * | 1991-07-17 | 1992-08-14 | Landis & Gyr Betriebs Ag | Capacitive differential pressure transducer - has central electrode between two membranes each with applied electrode layer |
DE4333753A1 (en) * | 1993-10-04 | 1994-05-11 | Bosch Gmbh Robert | Capacitive difference pressure sensor - has carrier supporting counter-electrodes between facing membranes carrying capacitor electrodes |
DE19617696C2 (en) | 1996-05-03 | 1998-04-09 | Thomas Bilger | Micromechanical pressure and force sensor |
US20010001550A1 (en) * | 1998-11-12 | 2001-05-24 | Janusz Bryzek | Integral stress isolation apparatus and technique for semiconductor devices |
DE10130375B4 (en) * | 2001-06-23 | 2009-01-29 | Abb Ag | Differential Pressure Sensor |
US6952042B2 (en) * | 2002-06-17 | 2005-10-04 | Honeywell International, Inc. | Microelectromechanical device with integrated conductive shield |
DE102004030231A1 (en) * | 2004-06-23 | 2006-01-12 | Abb Patent Gmbh | Differential pressure sensor, has measuring chambers with diaphragm plate that is formed as measuring diaphragm, where difference between pressure at diaphragm and pressure in chamber causes deflection of testing diaphragm |
JP2006208225A (en) * | 2005-01-28 | 2006-08-10 | Nippon M K S Kk | Differential pressure sensor |
US7622782B2 (en) * | 2005-08-24 | 2009-11-24 | General Electric Company | Pressure sensors and methods of making the same |
-
2007
- 2007-06-11 DE DE102007027274A patent/DE102007027274A1/en not_active Withdrawn
-
2008
- 2008-06-04 WO PCT/EP2008/056900 patent/WO2008151972A2/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3748571A (en) * | 1972-09-07 | 1973-07-24 | Kulite Semiconductors Products | Pressure sensitive transducers employing capacitive and resistive variations |
US4262532A (en) * | 1979-09-13 | 1981-04-21 | General Electric Company | Pressure and temperature sensor |
EP0490486A2 (en) * | 1990-12-07 | 1992-06-17 | Wisconsin Alumni Research Foundation | Micromachined differential pressure transducers and method of producing the same |
DE4309206C1 (en) * | 1993-03-22 | 1994-09-15 | Texas Instruments Deutschland | Semiconductor device having a force and/or acceleration sensor |
DE19601080A1 (en) * | 1996-01-13 | 1997-07-24 | Bosch Gmbh Robert | Force sensor esp. pressure sensor with at least one measuring diaphragm |
US20010032515A1 (en) * | 2000-02-11 | 2001-10-25 | Willcox Charles R. | Oil-less differential pressure sensor |
Also Published As
Publication number | Publication date |
---|---|
WO2008151972A2 (en) | 2008-12-18 |
DE102007027274A1 (en) | 2008-12-18 |
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