WO2008151972A3 - Capacitative and piezoresistive differential pressure sensor - Google Patents

Capacitative and piezoresistive differential pressure sensor Download PDF

Info

Publication number
WO2008151972A3
WO2008151972A3 PCT/EP2008/056900 EP2008056900W WO2008151972A3 WO 2008151972 A3 WO2008151972 A3 WO 2008151972A3 EP 2008056900 W EP2008056900 W EP 2008056900W WO 2008151972 A3 WO2008151972 A3 WO 2008151972A3
Authority
WO
WIPO (PCT)
Prior art keywords
support
measuring diaphragm
differential pressure
interior
diaphragm
Prior art date
Application number
PCT/EP2008/056900
Other languages
German (de)
French (fr)
Other versions
WO2008151972A2 (en
Inventor
Dieter Stolze
Anh Tuan Tham
Friedrich Schwabe
Original Assignee
Endress & Hauser Gmbh & Co Kg
Dieter Stolze
Anh Tuan Tham
Friedrich Schwabe
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress & Hauser Gmbh & Co Kg, Dieter Stolze, Anh Tuan Tham, Friedrich Schwabe filed Critical Endress & Hauser Gmbh & Co Kg
Publication of WO2008151972A2 publication Critical patent/WO2008151972A2/en
Publication of WO2008151972A3 publication Critical patent/WO2008151972A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention relates to a differential pressure sensor, comprising a first measuring diaphragm (5a), arranged on a first support (3a), on the exterior of which facing the support (3a) a first pressure (p1) acts, on the interior of which facing away from the first support (3a) at least one electrode (E1, E1') and at least one piezoresistive sensor element (R) for detecting a differential pressure-dependent deflection of the first measuring diaphragm (5a) are arranged, a second measuring diaphragm (5b), arranged on a second support (3b), which extends in parallel to the first measuring diaphragm (5a), on the exterior of which facing the support (3b) a second pressure (p2) acts, on the interior of which facing away from the second support (3b) at least one second electrode (E2, E2') is arranged which together with a dedicated first electrode (E1, E1') arranged on the first measuring diaphragm (5a) forms a capacitative sensor element, the first and the second measuring diaphragm (5a, 5b) being arranged in parallel and being firmly interconnected via a mechanical connection (P) that connects an outer edge (21) of the interior of the first measuring diaphragm (5a) to an outer edge (21) of the interior of the second measuring diaphragm (5b) and a spacer (7) of the same height connected to the diaphragm centers of the two measuring diaphragms (5a, 5b).
PCT/EP2008/056900 2007-06-11 2008-06-04 Capacitative and piezoresistive differential pressure sensor WO2008151972A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007027274A DE102007027274A1 (en) 2007-06-11 2007-06-11 Differential Pressure Sensor
DE102007027274.1 2007-06-11

Publications (2)

Publication Number Publication Date
WO2008151972A2 WO2008151972A2 (en) 2008-12-18
WO2008151972A3 true WO2008151972A3 (en) 2009-02-12

Family

ID=39885067

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/056900 WO2008151972A2 (en) 2007-06-11 2008-06-04 Capacitative and piezoresistive differential pressure sensor

Country Status (2)

Country Link
DE (1) DE102007027274A1 (en)
WO (1) WO2008151972A2 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011008346A1 (en) 2011-01-12 2012-07-12 Hydac Electronic Gmbh Device for converting a force or a pressure into an electrical signal and method for producing such a device
US8171800B1 (en) * 2011-01-25 2012-05-08 Continental Automotive Systems, Inc. Differential pressure sensor using dual backside absolute pressure sensing
US8466523B2 (en) 2011-10-07 2013-06-18 Continental Automotive Systems, Inc. Differential pressure sensor device
US9021887B2 (en) 2011-12-19 2015-05-05 Infineon Technologies Ag Micromechanical semiconductor sensing device
DE102012205878A1 (en) * 2012-04-11 2013-10-17 Robert Bosch Gmbh Micromechanical pressure sensor
DE102013113171A1 (en) * 2013-11-28 2015-05-28 Endress + Hauser Gmbh + Co. Kg Piezoresistive silicon differential pressure cell and method for its production
DE102013113843A1 (en) 2013-12-11 2015-06-11 Endress + Hauser Gmbh + Co. Kg pressure sensor
DE202014103355U1 (en) * 2014-07-22 2014-08-19 Infineon Technologies Ag An apparatus and a system for detecting a physical quantity
DE102014118850A1 (en) * 2014-12-17 2016-06-23 Endress + Hauser Gmbh + Co. Kg Pressure sensor for measuring a differential pressure and a system pressure
DE102014119398A1 (en) * 2014-12-22 2016-06-23 Endress + Hauser Gmbh + Co. Kg Differential pressure transducer and a method of operating such
DE102014119400A1 (en) * 2014-12-22 2016-06-23 Endress + Hauser Gmbh + Co. Kg Pressure transducer and method of operating such
US11414607B2 (en) 2015-09-22 2022-08-16 Hydrocarbon Technology & Innovation, Llc Upgraded ebullated bed reactor with increased production rate of converted products
US11414608B2 (en) 2015-09-22 2022-08-16 Hydrocarbon Technology & Innovation, Llc Upgraded ebullated bed reactor used with opportunity feedstocks
US11421164B2 (en) 2016-06-08 2022-08-23 Hydrocarbon Technology & Innovation, Llc Dual catalyst system for ebullated bed upgrading to produce improved quality vacuum residue product
US11732203B2 (en) 2017-03-02 2023-08-22 Hydrocarbon Technology & Innovation, Llc Ebullated bed reactor upgraded to produce sediment that causes less equipment fouling
JP7336831B2 (en) 2017-03-02 2023-09-01 ハイドロカーボン テクノロジー アンド イノベーション、エルエルシー Improved ebullated bed reactor with low fouling deposits
DE102017214846A1 (en) * 2017-08-24 2019-02-28 Infineon Technologies Ag Cased MEMS component with disturbance compensation
CA3057131C (en) 2018-10-17 2024-04-23 Hydrocarbon Technology And Innovation, Llc Upgraded ebullated bed reactor with no recycle buildup of asphaltenes in vacuum bottoms

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748571A (en) * 1972-09-07 1973-07-24 Kulite Semiconductors Products Pressure sensitive transducers employing capacitive and resistive variations
US4262532A (en) * 1979-09-13 1981-04-21 General Electric Company Pressure and temperature sensor
EP0490486A2 (en) * 1990-12-07 1992-06-17 Wisconsin Alumni Research Foundation Micromachined differential pressure transducers and method of producing the same
DE4309206C1 (en) * 1993-03-22 1994-09-15 Texas Instruments Deutschland Semiconductor device having a force and/or acceleration sensor
DE19601080A1 (en) * 1996-01-13 1997-07-24 Bosch Gmbh Robert Force sensor esp. pressure sensor with at least one measuring diaphragm
US20010032515A1 (en) * 2000-02-11 2001-10-25 Willcox Charles R. Oil-less differential pressure sensor

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH680392A5 (en) * 1991-07-17 1992-08-14 Landis & Gyr Betriebs Ag Capacitive differential pressure transducer - has central electrode between two membranes each with applied electrode layer
DE4333753A1 (en) * 1993-10-04 1994-05-11 Bosch Gmbh Robert Capacitive difference pressure sensor - has carrier supporting counter-electrodes between facing membranes carrying capacitor electrodes
DE19617696C2 (en) 1996-05-03 1998-04-09 Thomas Bilger Micromechanical pressure and force sensor
US20010001550A1 (en) * 1998-11-12 2001-05-24 Janusz Bryzek Integral stress isolation apparatus and technique for semiconductor devices
DE10130375B4 (en) * 2001-06-23 2009-01-29 Abb Ag Differential Pressure Sensor
US6952042B2 (en) * 2002-06-17 2005-10-04 Honeywell International, Inc. Microelectromechanical device with integrated conductive shield
DE102004030231A1 (en) * 2004-06-23 2006-01-12 Abb Patent Gmbh Differential pressure sensor, has measuring chambers with diaphragm plate that is formed as measuring diaphragm, where difference between pressure at diaphragm and pressure in chamber causes deflection of testing diaphragm
JP2006208225A (en) * 2005-01-28 2006-08-10 Nippon M K S Kk Differential pressure sensor
US7622782B2 (en) * 2005-08-24 2009-11-24 General Electric Company Pressure sensors and methods of making the same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748571A (en) * 1972-09-07 1973-07-24 Kulite Semiconductors Products Pressure sensitive transducers employing capacitive and resistive variations
US4262532A (en) * 1979-09-13 1981-04-21 General Electric Company Pressure and temperature sensor
EP0490486A2 (en) * 1990-12-07 1992-06-17 Wisconsin Alumni Research Foundation Micromachined differential pressure transducers and method of producing the same
DE4309206C1 (en) * 1993-03-22 1994-09-15 Texas Instruments Deutschland Semiconductor device having a force and/or acceleration sensor
DE19601080A1 (en) * 1996-01-13 1997-07-24 Bosch Gmbh Robert Force sensor esp. pressure sensor with at least one measuring diaphragm
US20010032515A1 (en) * 2000-02-11 2001-10-25 Willcox Charles R. Oil-less differential pressure sensor

Also Published As

Publication number Publication date
WO2008151972A2 (en) 2008-12-18
DE102007027274A1 (en) 2008-12-18

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