WO2008146337A1 - ガルバノ型スキャナの駆動制御方法 - Google Patents

ガルバノ型スキャナの駆動制御方法 Download PDF

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Publication number
WO2008146337A1
WO2008146337A1 PCT/JP2007/000586 JP2007000586W WO2008146337A1 WO 2008146337 A1 WO2008146337 A1 WO 2008146337A1 JP 2007000586 W JP2007000586 W JP 2007000586W WO 2008146337 A1 WO2008146337 A1 WO 2008146337A1
Authority
WO
WIPO (PCT)
Prior art keywords
galvanic scanner
scanner
galvanic
address
command
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/000586
Other languages
English (en)
French (fr)
Inventor
Nozomu Tanioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harmonic Drive Systems Inc
Original Assignee
Harmonic Drive Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harmonic Drive Systems Inc filed Critical Harmonic Drive Systems Inc
Priority to PCT/JP2007/000586 priority Critical patent/WO2008146337A1/ja
Priority to US12/297,936 priority patent/US7982933B2/en
Priority to JP2008548382A priority patent/JP5153646B2/ja
Publication of WO2008146337A1 publication Critical patent/WO2008146337A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/101Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00Optical: systems and elements
    • Y10S359/90Methods

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Processing (AREA)
  • Facsimile Scanning Arrangements (AREA)

Abstract

 ガルバノ型スキャナシステム(1)は、ガルバノ型スキャナ(2)のスキャナドライバ(3)に搭載されている位置制御用マイクロコンピュータ(31)において、ガルバノ型スキャナの位置センサ(14)から出力される位置検出信号をサンプリングし、サンプリング結果に基づきガルバノ型スキャナ(2)の現在位置アドレスを更新し、移動量指令データが入力されると、当該移動量指令データをガルバノ型スキャナ(2)のアドレス変化量に変換し、このアドレス変化量を現在位置アドレスに加算して移動先アドレスを求め、この移動先アドレスをアナログ位置指令に変換して駆動回路(33)に供給する。駆動回路(33)は、アナログ位置指令に対応する位置指令電圧を生成して、ガルバノ型スキャナ(2)を移動量分だけ移動させる。ガルバノ型スキャナ(2)を任意の位置に移動させるための制御を簡単に行うことができる。
PCT/JP2007/000586 2007-05-30 2007-05-30 ガルバノ型スキャナの駆動制御方法 Ceased WO2008146337A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2007/000586 WO2008146337A1 (ja) 2007-05-30 2007-05-30 ガルバノ型スキャナの駆動制御方法
US12/297,936 US7982933B2 (en) 2007-05-30 2007-05-30 Drive control method for galvano-scanner
JP2008548382A JP5153646B2 (ja) 2007-05-30 2007-05-30 ガルバノ型スキャナの駆動制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/000586 WO2008146337A1 (ja) 2007-05-30 2007-05-30 ガルバノ型スキャナの駆動制御方法

Publications (1)

Publication Number Publication Date
WO2008146337A1 true WO2008146337A1 (ja) 2008-12-04

Family

ID=40074625

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/000586 Ceased WO2008146337A1 (ja) 2007-05-30 2007-05-30 ガルバノ型スキャナの駆動制御方法

Country Status (3)

Country Link
US (1) US7982933B2 (ja)
JP (1) JP5153646B2 (ja)
WO (1) WO2008146337A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102422195A (zh) * 2009-04-23 2012-04-18 剑桥技术股份有限公司 提供耦合至受限旋转的马达的改进性能的扫描镜的系统与方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0357489U (ja) * 1989-10-12 1991-06-03
JP2000069344A (ja) * 1998-08-19 2000-03-03 Fuji Photo Optical Co Ltd レンズ駆動装置
JP2002292483A (ja) * 2001-03-30 2002-10-08 Sunx Ltd レーザマーキング装置
JP2003220485A (ja) * 2002-01-25 2003-08-05 Sunx Ltd レーザマーキング装置、及びそのガイド像の投射位置調整方法
JP3513489B2 (ja) * 2000-12-26 2004-03-31 住友重機械工業株式会社 ガルバノスキャナの制御方法及び装置
JP2005338450A (ja) * 2004-05-27 2005-12-08 Harmonic Drive Syst Ind Co Ltd ガルバノ型スキャナの駆動方法およびシステム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3335200B2 (ja) 1991-11-21 2002-10-15 株式会社ハーモニック・ドライブ・システムズ 電磁式有限回転型電動機
DE19939117B4 (de) 1998-08-19 2011-02-03 Fujinon Corp. Fernsehobjektivsteuereinrichtung

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0357489U (ja) * 1989-10-12 1991-06-03
JP2000069344A (ja) * 1998-08-19 2000-03-03 Fuji Photo Optical Co Ltd レンズ駆動装置
JP3513489B2 (ja) * 2000-12-26 2004-03-31 住友重機械工業株式会社 ガルバノスキャナの制御方法及び装置
JP2002292483A (ja) * 2001-03-30 2002-10-08 Sunx Ltd レーザマーキング装置
JP2003220485A (ja) * 2002-01-25 2003-08-05 Sunx Ltd レーザマーキング装置、及びそのガイド像の投射位置調整方法
JP2005338450A (ja) * 2004-05-27 2005-12-08 Harmonic Drive Syst Ind Co Ltd ガルバノ型スキャナの駆動方法およびシステム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102422195A (zh) * 2009-04-23 2012-04-18 剑桥技术股份有限公司 提供耦合至受限旋转的马达的改进性能的扫描镜的系统与方法
JP2012524915A (ja) * 2009-04-23 2012-10-18 ケンブリッジ テクノロジー インコーポレイテッド 有限回転モータに連結された走査ミラーの性能向上をもたらすシステムおよび方法

Also Published As

Publication number Publication date
US7982933B2 (en) 2011-07-19
JPWO2008146337A1 (ja) 2010-08-12
JP5153646B2 (ja) 2013-02-27
US20100172004A1 (en) 2010-07-08

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