WO2008145662A1 - Magnetic field sensor for measuring direction of a magnetic field in a plane - Google Patents

Magnetic field sensor for measuring direction of a magnetic field in a plane Download PDF

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Publication number
WO2008145662A1
WO2008145662A1 PCT/EP2008/056517 EP2008056517W WO2008145662A1 WO 2008145662 A1 WO2008145662 A1 WO 2008145662A1 EP 2008056517 W EP2008056517 W EP 2008056517W WO 2008145662 A1 WO2008145662 A1 WO 2008145662A1
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WO
WIPO (PCT)
Prior art keywords
contacts
ring
measuring
hall element
vertical hall
Prior art date
Application number
PCT/EP2008/056517
Other languages
French (fr)
Inventor
Radivoje Popovic
Pavel Kejik
Serge Reymond
Original Assignee
Ecole Polytechnique Federale De Lausanne
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecole Polytechnique Federale De Lausanne filed Critical Ecole Polytechnique Federale De Lausanne
Priority to CN200880017607.3A priority Critical patent/CN101688902B/en
Priority to US12/601,818 priority patent/US8324891B2/en
Priority to JP2010509809A priority patent/JP5187781B2/en
Priority to EP08760113A priority patent/EP2153241B1/en
Publication of WO2008145662A1 publication Critical patent/WO2008145662A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G01R33/077—Vertical Hall-effect devices

Definitions

  • the invention concerns a magnetic field sensor for measuring a direction of a magnetic field in a plane.
  • Such a magnetic field sensor may be used in a wide range of applications, namely everywhere where the direction of a magnetic field in a plane needs to be measured.
  • Such applications include angular position measurement in an angle encoder that contains a magnet that is rotatable on an axis, use in a compass and others.
  • Angular position microsystems based on the magnetostatic principle mostly derive benefit from a Hall-effect sensor. They are composed of a two-dimensional sensing part combined with a rotating permanent magnet.
  • One technique using a magnetic field concentrator is known from EP 1182461.
  • Another technique is known from WO 9810302.
  • Yet another technique uses a special vertical Hall sensor as described in an article available on the Internet http://www.novotechnik.com/pdfs/Vert-X.pdf.
  • a drawback of the known techniques consists in that complex mathematical calculations have to be performed to derive the information on the direction of the magnetic field from the output signals of the Hall-effect sensor.
  • the object of the invention is to develop a magnetic field sensor for measuring a direction of a magnetic field in a plane that renders complex mathematical calculations unnecessary.
  • the present invention uses a sensing structure that measures the spatial information on the direction of the in-plane magnetic field B.
  • An electronic circuit operates the sensing structure in such a way that this information is transformed into a time signal.
  • the sensing structure comprises a ring- shaped, electrically conductive well and a plurality of at least eight contacts of equal size placed at equal distance from each other along the ring-shaped well and contacting the ring-shaped well.
  • the electronic circuit selects a predetermined number of the contacts according to a predetermined scheme to form a moving vertical Hall element. Moving is done by changing the selected contacts step by step so that the vertical Hall element moves along the ring-shaped well and completes one turn after the other.
  • the information on the direction of the in-plane magnetic field B is contained in a phase shift between the output signal of the moving vertical Hall element and a reference signal.
  • the reference signal has a frequency that is equivalent to the frequency of the turns of the moving vertical Hall element and it has a phase that is related to the position of a predetermined contact in the ring-shaped well.
  • Fig. 1 shows a schematic view of the sensing principle
  • Fig. 2 shows a perspective view of a sensing structure
  • Figs. 3 and 4 illustrate the operation of the sensing structure as a moving vertical Hall element having five contacts
  • Fig. 5 shows an electronic circuit for the operation of the sensing structure
  • Fig. 6 shows different signals
  • Figs. 7 to 9 show the operation of the sensing structure for vertical Hall elements having three, four or six contacts.
  • Fig. 1 shows a schematic view of the sensing principle according to the invention.
  • the axes of a Cartesian coordinate system are designated with x, y and z.
  • a permanent magnet 1 that is rotatable on a rotational axis 2 produces a magnetic field B.
  • a sensor 3 comprising a sensing structure 4 and an electronic circuit 5 (Fig. 5) produces an output signal that represents the direction of the magnetic field B in the xy-plane.
  • the sensor 3 may produce a second output signal that is proportional to the strength of the magnetic field B.
  • the sensor 3 consists of a semiconductor chip with an active surface, i.e. the sensing structure 4 and the electronic circuit 5 are embedded in the active surface.
  • the sensing structure 4 defines the position of the x and y axes.
  • the rotational axis 2 of the permanent magnet defines the position of the z-axis.
  • the sensing structure 4 has a circular symmetry with a center 6. Apart from mounting tolerances the rotational axis 2 of the permanent magnet 1 runs through the center 6 and is oriented orthogonally to the active surface of the semiconductor chip.
  • the reference number 7 designates the radial component of the magnetic field lying in the xy-plane.
  • FIG. 2 shows a perspective view of the sensing structure 4 of the semiconductor chip 8 of the sensor 3 according to an embodiment of the invention.
  • the semiconductor chip 8 comprises an area 9 of a first conductivity type and a ring-shaped well 10 of a second conductivity type that is embedded in said area 9.
  • the ring-shaped well 10 preferably forms a circular channel that runs around the center 6.
  • the angular position of contact #k is k/n * 360° where k is an integer running from 1 to n.
  • the ring-shaped well 10 does not need to be bounded by two concentric circles as shown in the figures.
  • the ring-shaped well 10 may for example be bounded by two regular polygons or any other suitable form.
  • the semiconductor chip 8 is preferably fabricated in CMOS technology.
  • the sensing structure 4 measures the strength of the magnetic field 7 based on the Hall effect. Because in Silicon the mobility of the electrons is higher than the mobility of the holes, the area 9 is preferably p-type Silicon and the well 10 therefore n-type Silicon.
  • the electronic switches 12 are for example MOS transmission gates.
  • the area 9 does not have to consist of an electrically conductive material, the area 9 might also consist of an electrically isolating material.
  • the well-known basic Hall element has four contacts: in operation, two contacts are connected to a current source and two contacts are connected to a voltage measuring device.
  • any set of four neighboring contacts of the plurality of contacts 11 placed in the well 10 forms a Hall element, namely a so-called vertical Hall element that is sensitive to the component of the magnetic field that runs parallel to the active surface of the semiconductor chip 8 and perpendicularly to the ring-shaped well 10 at the location of the vertical Hall element.
  • the vertical Hall element is sensitive to the radial component of the magnetic field 7 of the permanent magnet that lies in the xy-plane and runs through its center.
  • vertical Hall elements with three contacts, five contacts, six contacts and even eight contacts are also known.
  • the sensing structure 4 may be operated as any of these vertical Hall elements or even a vertical Hall element with any other number of contacts.
  • a major problem of a vertical Hall element formed from three, four, five or six contacts is the so-called offset.
  • the offset is the voltage present between the two voltage contacts when no magnetic field is present.
  • the sensing structure 4 is operated as a moving vertical Hall element as will be explained below with regard to Figs. 3 and 4. As the sensing structure 4 contains a number of n contacts, n vertical Hall elements labeled from #1 to #n may be temporarily formed. The operation is explained in detail on the basis of the five contact vertical Hall element as this configuration is well suited to minimize the offset problems.
  • Five electronic switches 12 are associated with each individual contact 11 so that each contact 11 may be temporarily connected to either a first current source 13, a second current source 14, a constant voltage potential, like for example ground 15, a first input or a second input of a voltage measuring means which is preferably a differential difference amplifier 16.
  • the voltage measuring means may optionally comprise a band-pass filter 17 (Fig. 5) for outputting a filtered difference signal.
  • the current sources 13, 14 are mirrored current sources and deliver the same current 1/2.
  • Step 1 With step 1, the first five contact vertical Hall element #1 is temporarily formed and its Hall voltage measured and amplified:
  • the differential difference amplifier 16 delivers an output signal which is proportional to the Hall voltage appearing between the contacts #2 and #4.
  • step 2 the second five contact vertical Hall element #2 is temporarily formed and its Hall voltage measured and amplified:
  • the differential difference amplifier 16 delivers an output signal which is proportional to the Hall voltage appearing between the contacts #3 and #5.
  • step k the position of the active vertical Hall element is moved for one position along the ring-shaped well 10 and step k can be generally described as:
  • step k the five contact vertical Hall element #k is temporarily formed and its Hall voltage measured and amplified: k.l
  • Five electronic switches 12 of the twentyfive electronic switches belonging to the five neighboring contacts with label k, k+1, k+2, k+3 and k+4 are closed so that he contact #k is connected to the first current source 13, the contact k+1 is connected to the first input of the differential difference amplifier 16, the contact k+2 is connected to ground m, the contact k+3 is connected to the second input of the differential difference amplifier 16 and the contact k+4 is connected to the second current source 14.
  • the remaining electronic switches 12 are all open so that the remaining contacts 11 are disconnected.
  • the differential difference amplifier 16 delivers an output signal which is proportional to the Hall voltage appearing between the contacts k+1 and k+3.
  • k.3 The five respective closed electronic switches 12 are opened.
  • step n the sequence begins again because step n+1 is the same as step 1, step n+2 is the same as step 2, and so on. So one turn after the other is performed.
  • the turns occur with a certain frequency f which is first of all selected according to the needs of the application. However, if allowed by the application, the frequency f is preferably selected so high that the 1/f noise of the vertical Hall element is of no significance.
  • the frequency f may be about 10 kHz although any other value might be selected too.
  • the output signal of the differential difference amplifier 16 is a staircase signal.
  • the band-pass filter 17 filters the output signal of the differential difference amplifier 16.
  • Fig. 5 shows an embodiment of the electronic circuit 5 that is suitable for the operation of the sensing structure 4.
  • the electronic switches 12 are arranged in blocks around the ring-shaped well 10 of the sensing structure 4.
  • the electronic circuit 5 comprises a logic block 18 for controlling the electronic switches 12, a bias circuit 19 comprising the current sources 13 and 14 and other circuits for providing the necessary supply of energy to the individual components of the electronic circuit 5, the voltage measuring means comprising the differential difference amplifier 16 and the band-pass filter 17, the timing circuit that comprises an oscillator 20, a first frequency divider 21 and a second frequency divider 22, a comparator 23, a counter 24 and an output buffer 25.
  • the output signal of the differential difference amplifier 16 refers to a reference voltage V ref .
  • the band-pass filter 17 is designed for the throughput of frequencies centered around the frequency f.
  • the band-pass filter 17 may be formed of any known type, it may for example be an analog switched capacitor filter controlled by a clock signal delivered by the timing circuit.
  • the comparator 23 converts the output signal of the band-pass filter 17 into a binary LS signal by comparing it with the reference voltage V r e f .
  • the oscillator 20 delivers the basic clock signal which is divided by the first frequency divider 21 into a clock signal for controlling the switching of the electronic switches 12 and which is divided by the second frequency divider 22 into a binary reference signal RS.
  • the frequency of the reference signal RS is equal to the frequency of the turns of the moving vertical Hall element.
  • the direction of the magnetic field B of the permanent magnet 1 in the xy plane with regard to a selected contact, eg. contact #1, may be characterized by an in-plane angle ⁇ .
  • the phase shift ⁇ between the signal LS and the reference signal RS is directly proportional to the in-plane angle ⁇ .
  • the counter 24 converts the phase shift ⁇ to a digital word, e.g. a digital word with a length of 12 bits (This is indicated in the figure by the number 12 shown right next to the counter 24 and the output buffer 25, respectively).
  • the clock signal of the oscillator 20 is fed to a clock input of the counter 24, the signal RS is fed to a reset input of the counter 24 and the signal LS is fed to an enable input of the counter 24.
  • the counter 24 is reset and starts counting the pulses coming from the oscillator 20 signal at the rising edge of the signal RS, i.e. when the signal RS changes its state from 0 to 1.
  • the counter 24 stops counting at the rising edge of the signal LS, i.e. when the signal LS changes its state from 0 to 1.
  • the output of the counter 24 is transferred to the output buffer 25 at the rising edge of the signal RS.
  • the output buffer 25 provides a first output signal of the sensor in digital form.
  • Fig. 6 shows the clock signal 26 of the first frequency divider 21 (Fig. 5), the reference signal RS derived from the clock signal 26, the output signal 27 of the differential difference amplifier 16 and the output signal 28 of the band-pass filter 17.
  • This figure also illustrates the phase shift ⁇ between the output signal 28 of the band-pass filter 17 (or equivalently the signal LS derived from the output signal 28 of the band-pass filter 17) and the reference signal RS.
  • the abscissa represents on the one hand side the time t and on the other hand side also the position of the vertical Hall element along the ring-shaped well 10.
  • the value OS of the output signal 27 does not disappear when the magnetic field disappears, but has a so-called offset value OSo.
  • this offset value OSo may be measured in a calibration step.
  • the difference signal OS - OSo is then offset compensated and directly proportional to the in-plane angle ⁇ of the magnetic field B.
  • the amplitude of the output signal 28 of the band-pass filter 17 contains the information on the strength of the radial component 7 of the magnetic field lying in the xy-plane and an A/D converter or other suitable circuit may be added to the electronic circuit 5 to digitize this information and output it in digital form.
  • Figs. 7 to 9 show schematically the contacts 11 of the sensing structure 4 and the electrical connections between the vertical Hall element and the current source(s), the differential difference amplifier 16 and ground 15 at a certain step k as follows:
  • Fig. 7 illustrates the operation of the sensing structure 4 as two vertical Hall elements each having three contacts.
  • the two vertical Hall elements lie diagonally opposite each other with regard to the center 6 of the ring-shaped well 10.
  • the switches necessary for the temporary connection of the contacts forming the vertical Hall element to the electronic circuit 5 are not shown.
  • the connections are: contacts #k and #(k+n/2) are connected to ground 15, contact #(k+l) is connected to the first input of the differential difference amplifier 16, contact #(k+l+n/2) is connected to the second input of the differential difference amplifier 16, contact #(k+2) is connected to the first current source 13 and contact #(k+2+n/2) is connected to the second current source 14.
  • Figs. 8 and 9 illustrate the operation of the sensing structure 4 as a vertical Hall element with four contacts or six contacts, respectively.
  • the connections are: contact #k is connected to ground 15, contacts #(k+l) and #(k+3) are connected to the first or second input of the differential difference amplifier 16 and contact #(k+4) is connected to a current source 13.
  • the contacts #(k-l) and #(k+5) are connected with each other.
  • the number of electronic switches 12 associated with each of the contacts 11 depends on the number of connections that are necessary to operate the formed Hall element: With the embodiments shown in Figs. 7 and 9, five electronic switches 12 are associated with each of the contacts 11. With the embodiment shown in Fig. 9, four electronic switches 12 are associated with each of the contacts 11.
  • each step k is divided in at least two, preferably four, sub steps in which the contacts forming the actual vertical Hall #k element are commutated.
  • a second vertical Hall element may be formed and connected to the current source(s) and the voltage measuring means, wherein the contacts of the second vertical Hall element lie diagonally opposite the contact of the first vertical Hall element with regard to the center 6 of the ring-shaped well 10.
  • This second vertical Hall element measures the same magnetic field as the first vertical Hall element, but with the opposite sign.
  • the differential difference amplifier 16 is a preferred voltage measuring means, but other voltage measuring means may be used too.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

A magnetic field sensor for measuring a direction of a magnetic field in a plane comprises a sensing structure (4) comprising a ring-shaped well (10), a plurality of contacts (11) of equal size placed at equal distance from each other along the ring-shaped well, and an electronic circuit (5) comprising a plurality of electronic switches (12) associated with the contacts (11) of the sensing structure (4), a logic block (18) for controlling the electronic switches (12), at least one current source (13; 14), a means for measuring a difference between a first voltage and a second voltage, a timing circuit providing a control signal for controlling the logic block (18) and providing a reference signal, wherein the logic block is adapted to close and open the electronic switches under the control of the control signal according to a predetermined scheme such that a predetermined number of contacts of the plurality of contacts form a vertical Hall element that is supplied with current from the at least one current source and that has two contacts connected to the means for measuring, and such that the vertical Hall element is moved in steps along the ring-shaped well, and a means for measuring a phase shift between the reference signal and an output signal of the voltage measuring means.

Description

Magnetic field sensor for measuring a direction of a magnetic field in a plane
FIELD OF THE INVENTION
[0001] The invention concerns a magnetic field sensor for measuring a direction of a magnetic field in a plane.
BACKGROUND OF THE INVENTION
[0002] Such a magnetic field sensor may be used in a wide range of applications, namely everywhere where the direction of a magnetic field in a plane needs to be measured. Such applications include angular position measurement in an angle encoder that contains a magnet that is rotatable on an axis, use in a compass and others.
[0003] Angular position microsystems based on the magnetostatic principle mostly derive benefit from a Hall-effect sensor. They are composed of a two-dimensional sensing part combined with a rotating permanent magnet. One technique using a magnetic field concentrator is known from EP 1182461. Another technique is known from WO 9810302. Yet another technique uses a special vertical Hall sensor as described in an article available on the Internet http://www.novotechnik.com/pdfs/Vert-X.pdf. A drawback of the known techniques consists in that complex mathematical calculations have to be performed to derive the information on the direction of the magnetic field from the output signals of the Hall-effect sensor.
DISCLOSURE OF THE INVENTION
[0004] The object of the invention is to develop a magnetic field sensor for measuring a direction of a magnetic field in a plane that renders complex mathematical calculations unnecessary.
[0005] The named task is solved by the features of claims 1 and 3.
[0006] The present invention uses a sensing structure that measures the spatial information on the direction of the in-plane magnetic field B. An electronic circuit operates the sensing structure in such a way that this information is transformed into a time signal. The sensing structure comprises a ring- shaped, electrically conductive well and a plurality of at least eight contacts of equal size placed at equal distance from each other along the ring-shaped well and contacting the ring-shaped well. The electronic circuit selects a predetermined number of the contacts according to a predetermined scheme to form a moving vertical Hall element. Moving is done by changing the selected contacts step by step so that the vertical Hall element moves along the ring-shaped well and completes one turn after the other. The information on the direction of the in-plane magnetic field B is contained in a phase shift between the output signal of the moving vertical Hall element and a reference signal. The reference signal has a frequency that is equivalent to the frequency of the turns of the moving vertical Hall element and it has a phase that is related to the position of a predetermined contact in the ring-shaped well.
BRIEF DESCRIPTION OF THE DRAWINGS
[0007] The accompanying drawings, which are incorporated into and constitute a part of this specification, illustrate one or more embodiments of the present invention and, together with the detailed description, serve to explain the principles and implementations of the invention. The figures are not to scale. In the drawings:
Fig. 1 shows a schematic view of the sensing principle,
Fig. 2 shows a perspective view of a sensing structure,
Figs. 3 and 4 illustrate the operation of the sensing structure as a moving vertical Hall element having five contacts,
Fig. 5 shows an electronic circuit for the operation of the sensing structure,
Fig. 6 shows different signals,
Figs. 7 to 9 show the operation of the sensing structure for vertical Hall elements having three, four or six contacts.
DETAILED DESCRIPTION OF THE INVENTION
[0008] Fig. 1 shows a schematic view of the sensing principle according to the invention. The axes of a Cartesian coordinate system are designated with x, y and z. With this embodiment a permanent magnet 1 that is rotatable on a rotational axis 2 produces a magnetic field B. A sensor 3 comprising a sensing structure 4 and an electronic circuit 5 (Fig. 5) produces an output signal that represents the direction of the magnetic field B in the xy-plane. Optionally, the sensor 3 may produce a second output signal that is proportional to the strength of the magnetic field B. The sensor 3 consists of a semiconductor chip with an active surface, i.e. the sensing structure 4 and the electronic circuit 5 are embedded in the active surface. The sensing structure 4 defines the position of the x and y axes. The rotational axis 2 of the permanent magnet defines the position of the z-axis. The sensing structure 4 has a circular symmetry with a center 6. Apart from mounting tolerances the rotational axis 2 of the permanent magnet 1 runs through the center 6 and is oriented orthogonally to the active surface of the semiconductor chip. The reference number 7 designates the radial component of the magnetic field lying in the xy-plane.
[0009] Fig. 2 shows a perspective view of the sensing structure 4 of the semiconductor chip 8 of the sensor 3 according to an embodiment of the invention. The semiconductor chip 8 comprises an area 9 of a first conductivity type and a ring-shaped well 10 of a second conductivity type that is embedded in said area 9. The ring-shaped well 10 preferably forms a circular channel that runs around the center 6. A plurality of at least n = 8 contacts 11 of equal size is placed at equal distance from each other along the ring-shaped well 10 that contact the ring-shaped well 10. Each contact 11 is located at an angular position and the angular distance between two contacts 11 is equal to 360°/n. The angular position of contact #k is k/n * 360° where k is an integer running from 1 to n. Preferably, the number of contacts 11 amounts to n = 2m, where the number m is an integer and has a value of at least 3. Good results were achieved with n = 64. The ring-shaped well 10 does not need to be bounded by two concentric circles as shown in the figures. The ring-shaped well 10 may for example be bounded by two regular polygons or any other suitable form.
[0010] The semiconductor chip 8 is preferably fabricated in CMOS technology. The sensing structure 4 measures the strength of the magnetic field 7 based on the Hall effect. Because in Silicon the mobility of the electrons is higher than the mobility of the holes, the area 9 is preferably p-type Silicon and the well 10 therefore n-type Silicon. The electronic switches 12 are for example MOS transmission gates. The area 9 does not have to consist of an electrically conductive material, the area 9 might also consist of an electrically isolating material.
[0011] The well-known basic Hall element has four contacts: in operation, two contacts are connected to a current source and two contacts are connected to a voltage measuring device. Thus any set of four neighboring contacts of the plurality of contacts 11 placed in the well 10 forms a Hall element, namely a so-called vertical Hall element that is sensitive to the component of the magnetic field that runs parallel to the active surface of the semiconductor chip 8 and perpendicularly to the ring-shaped well 10 at the location of the vertical Hall element. In the example, the vertical Hall element is sensitive to the radial component of the magnetic field 7 of the permanent magnet that lies in the xy-plane and runs through its center. However, vertical Hall elements with three contacts, five contacts, six contacts and even eight contacts are also known. The sensing structure 4 may be operated as any of these vertical Hall elements or even a vertical Hall element with any other number of contacts. A major problem of a vertical Hall element formed from three, four, five or six contacts is the so-called offset. The offset is the voltage present between the two voltage contacts when no magnetic field is present.
[0012] The sensing structure 4 is operated as a moving vertical Hall element as will be explained below with regard to Figs. 3 and 4. As the sensing structure 4 contains a number of n contacts, n vertical Hall elements labeled from #1 to #n may be temporarily formed. The operation is explained in detail on the basis of the five contact vertical Hall element as this configuration is well suited to minimize the offset problems. Five electronic switches 12 are associated with each individual contact 11 so that each contact 11 may be temporarily connected to either a first current source 13, a second current source 14, a constant voltage potential, like for example ground 15, a first input or a second input of a voltage measuring means which is preferably a differential difference amplifier 16. The voltage measuring means may optionally comprise a band-pass filter 17 (Fig. 5) for outputting a filtered difference signal. The current sources 13, 14 are mirrored current sources and deliver the same current 1/2. The sensing structure 3 is operated in a number of k = 1 to n steps as follows:
[0013] Step 1 With step 1, the first five contact vertical Hall element #1 is temporarily formed and its Hall voltage measured and amplified:
1.1 Five electronic switches 12 of the twentyfive electronic switches belonging to the five neighboring contacts with label 1, 2, 3, 4 and 5 are closed so that these contacts are connected to the two current sources 13, 14, ground m and the differential difference amplifier 16 as shown in Fig. 3: The contact #1 is connected to the first current source 13, the contact #2 is connected to the first input of the differential difference amplifier 16, the contact #3 is connected to ground m, the contact #4 is connected to the second input of the differential difference amplifier 16 and the contact #5 is connected to the second current source 14. So a current 1/2 flows into the contact #1, a current of the same strength 1/2 flows into the contact #5 and a current I flows out of the contact #3. The remaining electronic switches 12 are all open so that the remaining contacts 11 are disconnected.
1.2 The differential difference amplifier 16 delivers an output signal which is proportional to the Hall voltage appearing between the contacts #2 and #4.
1.3 The five respective closed electronic switches 12 are opened.
[0014] Step 2
With step 2, the second five contact vertical Hall element #2 is temporarily formed and its Hall voltage measured and amplified:
2.1 Five electronic switches 12 of the twentyfive electronic switches belonging to the five neighboring contacts with label 2, 3, 4, 5 and 6 are closed so that these contacts are connected to the two current sources 13, 14, ground m and the differential difference amplifier 16 as shown in Fig. 4: The contact #2 is connected to the first current source 13, the contact #3 is connected to the first input of the differential difference amplifier 16, the contact #4 is connected to ground m, the contact #5 is connected to the second input of the differential difference amplifier 16 and the contact #6 is connected to the second current source 14. The remaining electronic switches 12 are all open so that the remaining contacts 11 are disconnected.
2.2 The differential difference amplifier 16 delivers an output signal which is proportional to the Hall voltage appearing between the contacts #3 and #5.
2.3 The five respective closed electronic switches 12 are opened.
[0015] So with each further step the position of the active vertical Hall element is moved for one position along the ring-shaped well 10 and step k can be generally described as:
[0016] Step k
With step k, the five contact vertical Hall element #k is temporarily formed and its Hall voltage measured and amplified: k.l Five electronic switches 12 of the twentyfive electronic switches belonging to the five neighboring contacts with label k, k+1, k+2, k+3 and k+4 are closed so that he contact #k is connected to the first current source 13, the contact k+1 is connected to the first input of the differential difference amplifier 16, the contact k+2 is connected to ground m, the contact k+3 is connected to the second input of the differential difference amplifier 16 and the contact k+4 is connected to the second current source 14. The remaining electronic switches 12 are all open so that the remaining contacts 11 are disconnected. k.2 The differential difference amplifier 16 delivers an output signal which is proportional to the Hall voltage appearing between the contacts k+1 and k+3. k.3 The five respective closed electronic switches 12 are opened.
[0017] It has to be noted that the calculation of the label of the contacts has always to be done modulo n according to the well-known mathematical modulo operation, so that each contact label lies in the range between 1 and n.
[0018] So under operation, only one segment formed of five neighboring contacts is active at any time and this segment performs like a vertical Hall element with five contacts. The steps #1 to #n are performed one after the other under the control of a timing circuit so that the active vertical Hall element moves along the ring-shaped well 10. After step n has been finished, the sequence begins again because step n+1 is the same as step 1, step n+2 is the same as step 2, and so on. So one turn after the other is performed. The turns occur with a certain frequency f which is first of all selected according to the needs of the application. However, if allowed by the application, the frequency f is preferably selected so high that the 1/f noise of the vertical Hall element is of no significance. The frequency f may be about 10 kHz although any other value might be selected too.
[0019] The output signal of the differential difference amplifier 16 is a staircase signal. The band-pass filter 17 filters the output signal of the differential difference amplifier 16.
[0020] Fig. 5 shows an embodiment of the electronic circuit 5 that is suitable for the operation of the sensing structure 4. The electronic switches 12 are arranged in blocks around the ring-shaped well 10 of the sensing structure 4. The electronic circuit 5 comprises a logic block 18 for controlling the electronic switches 12, a bias circuit 19 comprising the current sources 13 and 14 and other circuits for providing the necessary supply of energy to the individual components of the electronic circuit 5, the voltage measuring means comprising the differential difference amplifier 16 and the band-pass filter 17, the timing circuit that comprises an oscillator 20, a first frequency divider 21 and a second frequency divider 22, a comparator 23, a counter 24 and an output buffer 25.
[0021] The output signal of the differential difference amplifier 16 refers to a reference voltage Vref. The band-pass filter 17 is designed for the throughput of frequencies centered around the frequency f. The band-pass filter 17 may be formed of any known type, it may for example be an analog switched capacitor filter controlled by a clock signal delivered by the timing circuit. The comparator 23 converts the output signal of the band-pass filter 17 into a binary LS signal by comparing it with the reference voltage Vref. The oscillator 20 delivers the basic clock signal which is divided by the first frequency divider 21 into a clock signal for controlling the switching of the electronic switches 12 and which is divided by the second frequency divider 22 into a binary reference signal RS. The frequency of the reference signal RS is equal to the frequency of the turns of the moving vertical Hall element. The direction of the magnetic field B of the permanent magnet 1 in the xy plane with regard to a selected contact, eg. contact #1, may be characterized by an in-plane angle φ. The phase shift Φ between the signal LS and the reference signal RS is directly proportional to the in-plane angle φ. The counter 24 converts the phase shift Φ to a digital word, e.g. a digital word with a length of 12 bits (This is indicated in the figure by the number 12 shown right next to the counter 24 and the output buffer 25, respectively). The clock signal of the oscillator 20 is fed to a clock input of the counter 24, the signal RS is fed to a reset input of the counter 24 and the signal LS is fed to an enable input of the counter 24. The counter 24 is reset and starts counting the pulses coming from the oscillator 20 signal at the rising edge of the signal RS, i.e. when the signal RS changes its state from 0 to 1. The counter 24 stops counting at the rising edge of the signal LS, i.e. when the signal LS changes its state from 0 to 1. The output of the counter 24 is transferred to the output buffer 25 at the rising edge of the signal RS. The output buffer 25 provides a first output signal of the sensor in digital form. Those of ordinary skill may easily recognize that there exist many more possibilities to extract the information on the in-plane angle φ from the output signal of the differential difference amplifier 16.
[0022] Fig. 6 shows the clock signal 26 of the first frequency divider 21 (Fig. 5), the reference signal RS derived from the clock signal 26, the output signal 27 of the differential difference amplifier 16 and the output signal 28 of the band-pass filter 17. This figure also illustrates the phase shift Φ between the output signal 28 of the band-pass filter 17 (or equivalently the signal LS derived from the output signal 28 of the band-pass filter 17) and the reference signal RS. The abscissa represents on the one hand side the time t and on the other hand side also the position of the vertical Hall element along the ring-shaped well 10. The numbers shown below the abscissa denote the contacts 11 for the embodiment with n = 64 contacts. So Fig. 6 illustrates the course of the signals as a function of time t and their relation to the angular position of the contacts 11.
[0023] Usually, the value OS of the output signal 27 does not disappear when the magnetic field disappears, but has a so-called offset value OSo. However, this offset value OSo may be measured in a calibration step. The difference signal OS - OSo is then offset compensated and directly proportional to the in-plane angle φ of the magnetic field B.
[0024] The amplitude of the output signal 28 of the band-pass filter 17 contains the information on the strength of the radial component 7 of the magnetic field lying in the xy-plane and an A/D converter or other suitable circuit may be added to the electronic circuit 5 to digitize this information and output it in digital form.
[0025] Figs. 7 to 9 show schematically the contacts 11 of the sensing structure 4 and the electrical connections between the vertical Hall element and the current source(s), the differential difference amplifier 16 and ground 15 at a certain step k as follows: Fig. 7 illustrates the operation of the sensing structure 4 as two vertical Hall elements each having three contacts. The two vertical Hall elements lie diagonally opposite each other with regard to the center 6 of the ring-shaped well 10. The sensing structure 3 is operated in a number of k = 1 to n steps, which are repeated many times so that the vertical Hall element moves along the ring-shaped well 10 and completes one turn after the other. For the sake of clarity the switches necessary for the temporary connection of the contacts forming the vertical Hall element to the electronic circuit 5 are not shown. At step k the connections are: contacts #k and #(k+n/2) are connected to ground 15, contact #(k+l) is connected to the first input of the differential difference amplifier 16, contact #(k+l+n/2) is connected to the second input of the differential difference amplifier 16, contact #(k+2) is connected to the first current source 13 and contact #(k+2+n/2) is connected to the second current source 14. Figs. 8 and 9 illustrate the operation of the sensing structure 4 as a vertical Hall element with four contacts or six contacts, respectively. At step k the connections are: contact #k is connected to ground 15, contacts #(k+l) and #(k+3) are connected to the first or second input of the differential difference amplifier 16 and contact #(k+4) is connected to a current source 13. With the vertical Hall element with six contacts shown in Fig. 9, the contacts #(k-l) and #(k+5) are connected with each other. The number of electronic switches 12 associated with each of the contacts 11 depends on the number of connections that are necessary to operate the formed Hall element: With the embodiments shown in Figs. 7 and 9, five electronic switches 12 are associated with each of the contacts 11. With the embodiment shown in Fig. 9, four electronic switches 12 are associated with each of the contacts 11.
[0026] In order to further reduce the offset, the well-known spinning technology may be applied. The spinning technology is a switching technique that alternately exchanges the current and voltage terminals of the Hall element. Switching schemes are for example known from DT 2333080 and WO 2006074989. When the spinning technology is applied to the moving vertical Hall element of the present invention, each step k is divided in at least two, preferably four, sub steps in which the contacts forming the actual vertical Hall #k element are commutated.
[0027] If the vertical Hall element has four, five or six contacts, then a second vertical Hall element may be formed and connected to the current source(s) and the voltage measuring means, wherein the contacts of the second vertical Hall element lie diagonally opposite the contact of the first vertical Hall element with regard to the center 6 of the ring-shaped well 10. This second vertical Hall element measures the same magnetic field as the first vertical Hall element, but with the opposite sign. This application is similar to the application shown in Fig. 7 with the difference that the first and second vertical Hall elements are each complete Hall elements.
[0028] The differential difference amplifier 16 is a preferred voltage measuring means, but other voltage measuring means may be used too.
[0029] While embodiments and applications of this invention have been shown and described, it would be apparent to those skilled in the art having the benefit of this disclosure that many more modifications than mentioned above are possible without departing from the inventive concepts herein. The invention, therefore, is not to be restricted except by the appended claims and their equivalents.

Claims

1. Magnetic field sensor for measuring a direction of a magnetic field in a plane, comprising: a sensing structure (4) comprising a ring-shaped, electrically conductive well (10), and a plurality of at least eight contacts (11) of equal size placed at equal distance from each other along the ring-shaped well and contacting the ring-shaped well, and an electronic circuit (5) comprising at least one current source (13; 14), a means for measuring a difference between a first voltage and a second voltage, a plurality of electronic switches (12) associated with the contacts of the sensing structure, wherein at least four electronic switches are associated with each of the contacts, a logic block (18) for controlling the electronic switches, a timing circuit providing a control signal for controlling the logic block and providing a reference signal, wherein the logic block is adapted to close and open the electronic switches under the control of the control signal according to a predetermined scheme such that a predetermined number of contacts of the plurality of contacts form a vertical Hall element that is supplied with current from the at least one current source and that has two contacts connected to the means for measuring, and such that the vertical Hall element is moved in steps along the ring-shaped well, and a means for measuring a phase shift between the reference signal and an output signal of the means for measuring a difference between a first voltage and a second voltage.
2. Magnetic field sensor according to claim 1, wherein the means for measuring a difference between a first voltage and a second voltage comprises a band-pass filter (17).
3. Method for measuring a direction of a magnetic field in a plane by means of a sensing structure comprising a ring-shaped, electrically conductive well (10) and a number n of contacts (11) of equal size placed at equal distance from each other along the ring-shaped well and contacting the ring-shaped well, the number n being at least eight, the method comprising moving a vertical Hall element successively in steps along the ring-shaped well from its current position to an adjacent next position, so that the vertical Hall element completes one turn after the other, wherein with each step the vertical Hall element is formed from a predetermined number of contacts which are selected from said n contacts, connecting the selected contacts with at least one current source and with a voltage measuring means so as to operate the selected contacts as a vertical Hall element, providing a reference signal representing the position of the vertical Hall element along the ring- shaped well, and determining a phase shift between the reference signal and an output signal of the voltage measuring means.
PCT/EP2008/056517 2007-05-29 2008-05-28 Magnetic field sensor for measuring direction of a magnetic field in a plane WO2008145662A1 (en)

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JP2010509809A JP5187781B2 (en) 2007-05-29 2008-05-28 Magnetic field sensor that measures the direction of the in-plane magnetic field
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Cited By (92)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7965076B2 (en) 2007-06-04 2011-06-21 Melexis Nv, Microelectronic Integrated Systems Magnetic field orientation sensor
WO2012115787A1 (en) 2011-02-25 2012-08-30 Allegro Microsystems, Inc. Circular vertical hall magnetic field sensing element and method with a plurality of continuous output signals
WO2012115788A1 (en) 2011-02-25 2012-08-30 Allegro Microsystems, Inc. Circuit and method for processing signals generated by a plurality of sensors
WO2012141950A2 (en) 2011-04-12 2012-10-18 Allegro Microsystems, Inc. A magnetic field sensor that provides an output signal representative of an angle of rotation and a speed of rotation of a target object
WO2012151707A1 (en) 2011-05-11 2012-11-15 Serge Reymond Hall-effect-based angular orientation sensor and corresponding method
WO2012161912A2 (en) 2011-05-23 2012-11-29 Allegro Microsystems, Inc. Circuits and methods for processing a signal generated by a plurality of measuring devices
WO2012170126A1 (en) 2011-06-08 2012-12-13 Allegro Microsystems, Inc. Arrangements for self-testing a circular vertical hall (cvh) sensing element and/or for self-testing a magnetic field sensor that uses a circular vertical hall (cvh) sensing element
WO2013028355A1 (en) 2011-08-19 2013-02-28 Allegro Microsystems, Inc. Circuits and methods for automatically adjusting a magnetic field sensor in accordance with a speed of rotation sensed by the magnetic field sensor
WO2013036345A2 (en) 2011-09-07 2013-03-14 Allegro Microsystems, Inc. Magnetic field sensing element combining a circular vertical hall magnetic field sensing element with a planar hall element
WO2013048652A2 (en) 2011-09-28 2013-04-04 Allegro Microsystems, Inc. Circuits and methods for processing signals generated by a plurality of magnetic field sensing elements
WO2013103478A1 (en) 2012-01-06 2013-07-11 Allegro Microsystems, LLC. Magnetic field sensor and associated method that can establish a measured threshold value and that can store the measured threshold value in a memory device
WO2013106151A2 (en) 2012-01-09 2013-07-18 Allegro Microsystems, Llc Systems and methods that use magnetic field sensors to identify positions of a gear shift lever
WO2013133908A1 (en) * 2012-03-06 2013-09-12 Allegro Microsystems, Llc Magnetic field sensor for sensing rotation of an object
WO2013191891A1 (en) 2012-06-18 2013-12-27 Allegro Microsystems, Llc Magnetic field sensors and related techniques that can provide self-test information in a formatted output signal
WO2013191862A1 (en) 2012-06-18 2013-12-27 Allegro Microsystems, Llc Magnetic field sensors and related techniques that can provide self-test information
WO2014036664A1 (en) 2012-09-07 2014-03-13 Sensima Technology Sa Hall-effect-based angular orientation sensor and corresponding methods and devices
US8749005B1 (en) 2012-12-21 2014-06-10 Allegro Microsystems, Llc Magnetic field sensor and method of fabricating a magnetic field sensor having a plurality of vertical hall elements arranged in at least a portion of a polygonal shape
WO2014099280A2 (en) 2012-12-21 2014-06-26 Allegro Microsystems, Llc Circuits and methods for processing signals generated by a circular vertical hall (cvh) sensing element in the presence of a multi-pole magnet
WO2014126669A1 (en) 2013-02-13 2014-08-21 Allegro Microsystems, Llc Magnetic field sensor and related techniques that provide varying current spinning phase sequences of a magnetic field sensing element
WO2014143404A1 (en) 2013-03-15 2014-09-18 Allegro Microsystems, Llc A vertical hall effect element with structures to improve sensitivity
WO2014149238A1 (en) 2013-03-15 2014-09-25 Allegro Microsystems, Llc Magnetic field sensor and associated method that can store a measured threshold value in a memory device during a time when the magnetic field sensor is powered off
US8860404B2 (en) 2012-06-18 2014-10-14 Allegro Microsystems, Llc Magnetic field sensors and related techniques that can provide a self-test using signals and related thresholds
WO2015003283A1 (en) 2013-07-11 2015-01-15 Sensima Technology Sa Angular orientation sensor and corresponding methods and devices
WO2015009532A1 (en) 2013-07-19 2015-01-22 Allegro Microsystems, Llc Magnet with opposing directions of magnetization for a magnetic sensor
WO2015012988A1 (en) 2013-07-22 2015-01-29 Allegro Microsystems, Llc Magnetic field sensor and related techniques that provide an angle correction module
US8988072B2 (en) 2011-07-21 2015-03-24 Infineon Technologies Ag Vertical hall sensor with high electrical symmetry
US9007060B2 (en) 2011-07-21 2015-04-14 Infineon Technologies Ag Electronic device with ring-connected hall effect regions
US9068859B2 (en) 2012-06-18 2015-06-30 Allegro Microsystems, Llc Magnetic field sensors and related techniques provide a self-test by communicating selected analog or digital samples of a proximity signal
WO2015100021A1 (en) 2013-12-23 2015-07-02 Allegro Microsystems, Llc Magnetic field sensor and related techniques that inject an error correction signal into a signal channel to result in reduced error
US20150198677A1 (en) * 2014-01-14 2015-07-16 Allegro Microsystems, Llc Circuit and Method for Reducing an Offset Component of a Plurality of Vertical Hall Elements Arranged in a Circle
WO2015171331A1 (en) 2014-05-05 2015-11-12 Allegro Microsystems, Llc Magnetic field sensors and associated methods with reduced offset and improved accuracy
US9222990B2 (en) 2012-06-18 2015-12-29 Allegro Microsystems, Llc Magnetic field sensors and related techniques that can communicate at least one of three or more potential categories in which one or more characteristic values of a proximity signal responsive to a proximity of a sensed object are categorized
US9268001B2 (en) 2013-07-17 2016-02-23 Infineon Technologies Ag Differential perpendicular on-axis angle sensor
US9312472B2 (en) 2012-02-20 2016-04-12 Infineon Technologies Ag Vertical hall device with electrical 180 degree symmetry
US9312473B2 (en) 2013-09-30 2016-04-12 Allegro Microsystems, Llc Vertical hall effect sensor
US9389060B2 (en) 2013-02-13 2016-07-12 Allegro Microsystems, Llc Magnetic field sensor and related techniques that provide an angle error correction module
US9448288B2 (en) 2014-05-20 2016-09-20 Allegro Microsystems, Llc Magnetic field sensor with improved accuracy resulting from a digital potentiometer
US9548443B2 (en) 2013-01-29 2017-01-17 Allegro Microsystems, Llc Vertical Hall Effect element with improved sensitivity
US9606190B2 (en) 2012-12-21 2017-03-28 Allegro Microsystems, Llc Magnetic field sensor arrangements and associated methods
US9638766B2 (en) 2014-11-24 2017-05-02 Allegro Microsystems, Llc Magnetic field sensor with improved accuracy resulting from a variable potentiometer and a gain circuit
US9684042B2 (en) 2015-02-27 2017-06-20 Allegro Microsystems, Llc Magnetic field sensor with improved accuracy and method of obtaining improved accuracy with a magnetic field sensor
US9719806B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a ferromagnetic target object
US9720054B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
WO2017136145A1 (en) 2016-02-01 2017-08-10 Allegro Microsystems, Llc Circular vertical hall (cvh) sensing element with signal processing and arctangent function
WO2017136148A1 (en) 2016-02-01 2017-08-10 Allegro Microsystems, Llc Circular vertical hall (cvh) sensing element with signal processing
US9739848B1 (en) 2016-02-01 2017-08-22 Allegro Microsystems, Llc Circular vertical hall (CVH) sensing element with sliding integration
US9810519B2 (en) 2013-07-19 2017-11-07 Allegro Microsystems, Llc Arrangements for magnetic field sensors that act as tooth detectors
US9817078B2 (en) 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
US9823090B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a target object
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
WO2017218157A1 (en) 2016-06-14 2017-12-21 Allegro Microsystems, Llc Magnetic field sensor having error correction
US10012518B2 (en) 2016-06-08 2018-07-03 Allegro Microsystems, Llc Magnetic field sensor for sensing a proximity of an object
US10041810B2 (en) 2016-06-08 2018-08-07 Allegro Microsystems, Llc Arrangements for magnetic field sensors that act as movement detectors
US10120042B2 (en) 2013-12-23 2018-11-06 Allegro Microsystems, Llc Magnetic field sensor and related techniques that inject a synthesized error correction signal into a signal channel to result in reduced error
JP2018179644A (en) * 2017-04-07 2018-11-15 日本精工株式会社 Revolution angle detector for electrically-driven power steering device, torque angle sensor therefor, torque sensor therefor, and motor actuation control device, electrically-driven power steering device, and vehicle
US10145908B2 (en) 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US10215590B2 (en) 2016-06-08 2019-02-26 Allegro Microsystems, Llc Magnetic field sensor for sensing a proximity and/or a location of an object
US10215550B2 (en) 2012-05-01 2019-02-26 Allegro Microsystems, Llc Methods and apparatus for magnetic sensors having highly uniform magnetic fields
US10260905B2 (en) 2016-06-08 2019-04-16 Allegro Microsystems, Llc Arrangements for magnetic field sensors to cancel offset variations
US10310028B2 (en) 2017-05-26 2019-06-04 Allegro Microsystems, Llc Coil actuated pressure sensor
US10324141B2 (en) 2017-05-26 2019-06-18 Allegro Microsystems, Llc Packages for coil actuated position sensors
US10386427B1 (en) 2018-02-09 2019-08-20 Allegro Microsystems, Llc Magnetic field sensor having at least two CVH elements and method of operating same
US10385964B2 (en) 2016-06-08 2019-08-20 Allegro Microsystems, Llc Enhanced neutral gear sensor
US10430296B2 (en) 2017-09-29 2019-10-01 Allegro Microsystems, Llc Circuit and method for storing information in non-volatile memory during a loss of power event
US10495485B2 (en) 2016-05-17 2019-12-03 Allegro Microsystems, Llc Magnetic field sensors and output signal formats for a magnetic field sensor
US10495699B2 (en) 2013-07-19 2019-12-03 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target
US10495701B2 (en) 2017-03-02 2019-12-03 Allegro Microsystems, Llc Circular vertical hall (CVH) sensing element with DC offset removal
US10495700B2 (en) 2016-01-29 2019-12-03 Allegro Microsystems, Llc Method and system for providing information about a target object in a formatted output signal
US10641842B2 (en) 2017-05-26 2020-05-05 Allegro Microsystems, Llc Targets for coil actuated position sensors
US10656170B2 (en) 2018-05-17 2020-05-19 Allegro Microsystems, Llc Magnetic field sensors and output signal formats for a magnetic field sensor
US10712403B2 (en) 2014-10-31 2020-07-14 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US10739164B2 (en) 2017-01-27 2020-08-11 Allegro Microsystems, Llc Circuit for detecting motion of an object
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US10839920B2 (en) 2017-09-29 2020-11-17 Allegro Microsystems, Llc Circuit having a low power charge pump for storing information in non-volatile memory during a loss of power event
US10845434B2 (en) 2012-01-06 2020-11-24 Allegro Microsystems, Llc Magnetic field sensor having a temperature compensated threshold on power up
US10866117B2 (en) 2018-03-01 2020-12-15 Allegro Microsystems, Llc Magnetic field influence during rotation movement of magnetic target
US10955306B2 (en) 2019-04-22 2021-03-23 Allegro Microsystems, Llc Coil actuated pressure sensor and deformable substrate
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
US11061084B2 (en) 2019-03-07 2021-07-13 Allegro Microsystems, Llc Coil actuated pressure sensor and deflectable substrate
EP3745239A4 (en) * 2018-01-23 2021-10-20 Hanvon Ugee Technology Co., Ltd. Magnetic roller device and rotation information calculating method thereof
US11163022B2 (en) 2015-06-12 2021-11-02 Allegro Microsystems, Llc Magnetic field sensor for angle detection with a phase-locked loop
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
US11255700B2 (en) 2018-08-06 2022-02-22 Allegro Microsystems, Llc Magnetic field sensor
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
EP4030177A1 (en) 2021-01-13 2022-07-20 Allegro MicroSystems, LLC Circuit for reducing an offset component of a plurality of vertical hall elements arranged in one or more circles
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US11473935B1 (en) 2021-04-16 2022-10-18 Allegro Microsystems, Llc System and related techniques that provide an angle sensor for sensing an angle of rotation of a ferromagnetic screw
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents
US11714099B2 (en) 2018-01-23 2023-08-01 Hanvon Ugee Technology Co., Ltd. Magnetic roller device and rotation information calculating method thereof

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7714570B2 (en) 2006-06-21 2010-05-11 Allegro Microsystems, Inc. Methods and apparatus for an analog rotational sensor having magnetic sensor elements
CN101918796B (en) 2008-01-04 2012-09-05 阿莱戈微系统公司 Methods and apparatus for an angle sensor
EP2108966A1 (en) 2008-04-08 2009-10-14 Ecole Polytechnique Fédérale de Lausanne (EPFL) Current sensor and assembly group for current measurement
CN103081110B (en) * 2010-07-23 2015-09-09 马克西姆综合产品公司 Multiple-sensor integration circuit arrangement
DE102011107711A1 (en) * 2011-07-14 2013-01-17 Micronas Gmbh Magnetic field sensor and method for determining the offset voltage of a magnetic field sensor
US9291478B2 (en) * 2012-05-31 2016-03-22 Allegro Microsystems, Llc Magnetic field sensor with improved sensitivity to magnetic fields
US20140300349A1 (en) * 2013-03-12 2014-10-09 GMW Associates Incorporated Coreless current probe and a method of measuring direct current
GB201315964D0 (en) * 2013-09-06 2013-10-23 Melexis Technologies Nv Magnetic field orientation sensor and angular position sensor using same
DE102014010547B4 (en) 2014-07-14 2023-06-07 Albert-Ludwigs-Universität Freiburg Hall sensor
US10008928B2 (en) 2015-08-14 2018-06-26 Intersil Americas LLC Enhanced switched capacitor filter (SCF) compensation in DC-DC converters
EP3144639A1 (en) 2015-09-16 2017-03-22 Monolithic Power Systems, Inc. Magnetic angular sensing system with side-shaft mounted sensor and method thereof
JP6833204B2 (en) 2016-02-25 2021-02-24 セニス エージー Angle sensors and methods for measuring the angle of a magnetic field
DE102016110611B4 (en) * 2016-06-09 2024-05-02 Elmos Semiconductor Se Device with a Hall structure with an increased signal amplitude
DE102016110612B4 (en) 2016-06-09 2024-05-02 Elmos Semiconductor Se Method for operating a Hall structure with increased signal amplitude
DE102016110613B4 (en) 2016-06-09 2024-05-02 Elmos Semiconductor Se Device and method for controlling a Hall structure with increased signal amplitude
US10511223B2 (en) 2016-12-09 2019-12-17 Allegro Microsystems, Llc Voltage regulator having boost and charge pump functionality
DE102017128869B3 (en) * 2017-12-05 2019-05-29 Infineon Technologies Ag Magnetic angle sensor arrangement and method for estimating a rotation angle
CN110376537B (en) * 2017-12-19 2020-07-24 大连理工大学 Manufacturing method of semiconductor three-dimensional Hall sensor suitable for high-temperature working environment
CN112985246B (en) 2021-01-25 2023-03-31 成都芯源系统有限公司 Position sensing system and position sensing method
US11733024B2 (en) 2021-06-30 2023-08-22 Allegro Microsystems, Llc Use of channel information to generate redundant angle measurements on safety critical applications
US11448713B1 (en) * 2021-07-13 2022-09-20 Allegro Microsystems, Llc Angle sensor

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998010302A2 (en) * 1996-09-09 1998-03-12 Physical Electronics Laboratory Method for reducing the offset voltage of a hall device
EP0954085A1 (en) * 1998-04-27 1999-11-03 Roulements Miniatures S.A. Vertical hall sensor and brushless electric motor with a vertical hall sensor
US6064202A (en) * 1997-09-09 2000-05-16 Physical Electronics Laboratory Spinning current method of reducing the offset voltage of a hall device
EP1182461A2 (en) * 2000-08-21 2002-02-27 Sentron Ag Sensor for the detection of the direction of a magnetic field
EP1260825A1 (en) * 2001-05-25 2002-11-27 Sentron Ag Magnetic field probe
WO2004013645A1 (en) * 2002-08-01 2004-02-12 Sentron Ag Magnetic field sensor and method for operating said magnetic field sensor
WO2004025742A1 (en) * 2002-09-10 2004-03-25 Sentron Ag Magnetic field sensor comprising a hall element
WO2005029106A1 (en) * 2003-08-22 2005-03-31 Sentron Ag Sensor for detecting the direction of a magnetic field in a plane

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117165A (en) * 1983-11-30 1985-06-24 Nippon Kokan Kk <Nkk> Detection of vector magnetic field by two-dimensional magnetic sensor
JPS6298215A (en) * 1985-10-25 1987-05-07 Toshiba Corp Displacement detector
JPH06288770A (en) * 1993-03-31 1994-10-18 Sony Corp Earth magnetism azimuth sensor
JP3588926B2 (en) * 1996-07-26 2004-11-17 富士電機デバイステクノロジー株式会社 Semiconductor magnetic sensor
JP2004138558A (en) * 2002-10-18 2004-05-13 Sony Corp Magnetic direction measuring apparatus
EP1679524A1 (en) 2005-01-11 2006-07-12 Ecole Polytechnique Federale De Lausanne Epfl - Sti - Imm - Lmis3 Hall sensor and method of operating a Hall sensor
EP2000814B1 (en) * 2007-06-04 2011-10-26 Melexis NV Magnetic field orientation sensor

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998010302A2 (en) * 1996-09-09 1998-03-12 Physical Electronics Laboratory Method for reducing the offset voltage of a hall device
US6064202A (en) * 1997-09-09 2000-05-16 Physical Electronics Laboratory Spinning current method of reducing the offset voltage of a hall device
EP0954085A1 (en) * 1998-04-27 1999-11-03 Roulements Miniatures S.A. Vertical hall sensor and brushless electric motor with a vertical hall sensor
EP1182461A2 (en) * 2000-08-21 2002-02-27 Sentron Ag Sensor for the detection of the direction of a magnetic field
EP1260825A1 (en) * 2001-05-25 2002-11-27 Sentron Ag Magnetic field probe
WO2004013645A1 (en) * 2002-08-01 2004-02-12 Sentron Ag Magnetic field sensor and method for operating said magnetic field sensor
WO2004025742A1 (en) * 2002-09-10 2004-03-25 Sentron Ag Magnetic field sensor comprising a hall element
WO2005029106A1 (en) * 2003-08-22 2005-03-31 Sentron Ag Sensor for detecting the direction of a magnetic field in a plane

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
BURGER F ET AL: "New fully integrated 3-D silicon Hall sensor for precise angular-position measurements", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 67, no. 1-3, 15 May 1998 (1998-05-15), pages 72 - 76, XP004130114, ISSN: 0924-4247 *
CHAVDAR ROUMENIN ET AL: "Vertical Hall Effect Devices in the Basis of Smart Silicon Sensors", THE THIRD WORKSHOP 2005 IEEE INTELLIGENT DATA ACQUISITION AND ADVANCED COMPUTING SYSTEMS: TECHNOLOGY AND APPLICATIONS, PROCEEDINGS OF, IEEE, PI, 1 September 2005 (2005-09-01), pages 55 - 58, XP031009280, ISBN: 978-0-7803-9445-2 *
HILIGSMANN V ET AL: "Monolithic 360 degrees rotary position sensor IC", SENSORS, 2004. PROCEEDINGS OF IEEE VIENNA, AUSTRIA OCT. 24 - 27, 2004, PISCATAWAY, NJ, USA,IEEE, 24 October 2004 (2004-10-24), pages 1137 - 1142, XP010793612, ISBN: 978-0-7803-8692-1 *
NOVOTECHNIK US: "Vert-X Technology", NOVOTECHNIK, December 2001 (2001-12-01) - 2002, pages 1, XP002479645 *
PARANJAPE M ET AL: "A CMOS-compatible 2-D vertical Hall magnetic-field sensor using active carrier confinement and post-process micromachining", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 53, no. 1, 1 May 1996 (1996-05-01), pages 278 - 283, XP004018159, ISSN: 0924-4247 *
POPOVIC R S: "Not-plate-like Hall magnetic sensors and their applications", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 85, no. 1-3, 25 August 2000 (2000-08-25), pages 9 - 17, XP004214441, ISSN: 0924-4247 *
ROUMENIN C S: "Magnetic sensors continue to advance towards perfection", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 46, no. 1-3, 1 January 1995 (1995-01-01), pages 273 - 279, XP004303495, ISSN: 0924-4247 *

Cited By (155)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7965076B2 (en) 2007-06-04 2011-06-21 Melexis Nv, Microelectronic Integrated Systems Magnetic field orientation sensor
WO2012115787A1 (en) 2011-02-25 2012-08-30 Allegro Microsystems, Inc. Circular vertical hall magnetic field sensing element and method with a plurality of continuous output signals
WO2012115788A1 (en) 2011-02-25 2012-08-30 Allegro Microsystems, Inc. Circuit and method for processing signals generated by a plurality of sensors
US9062990B2 (en) 2011-02-25 2015-06-23 Allegro Microsystems, Llc Circular vertical hall magnetic field sensing element and method with a plurality of continuous output signals
US9182250B2 (en) 2011-02-25 2015-11-10 Allegro Microsystems, Llc Circular vertical hall magnetic field sensing element and method with a plurality of continuous output signals
US8786279B2 (en) 2011-02-25 2014-07-22 Allegro Microsystems, Llc Circuit and method for processing signals generated by a plurality of sensors
DE112012001676B8 (en) 2011-04-12 2018-11-29 Allegro Microsystems, Llc A magnetic field sensor which provides an output signal representing a rotation angle and a rotation speed of a target object
WO2012141950A2 (en) 2011-04-12 2012-10-18 Allegro Microsystems, Inc. A magnetic field sensor that provides an output signal representative of an angle of rotation and a speed of rotation of a target object
US8729890B2 (en) 2011-04-12 2014-05-20 Allegro Microsystems, Llc Magnetic angle and rotation speed sensor with continuous and discontinuous modes of operation based on rotation speed of a target object
DE112012001676B4 (en) 2011-04-12 2018-09-27 Allegro Microsystems, Inc. A magnetic field sensor which provides an output signal representing a rotation angle and a rotation speed of a target object
WO2012151707A1 (en) 2011-05-11 2012-11-15 Serge Reymond Hall-effect-based angular orientation sensor and corresponding method
US8508218B2 (en) 2011-05-11 2013-08-13 Sensima Technology Sa Hall-effect-based angular orientation sensor and corresponding method
DE112012002239B4 (en) * 2011-05-23 2020-09-03 Allegro Microsystems, Llc Circuits and methods for processing a signal generated by a plurality of measuring devices
US8860410B2 (en) 2011-05-23 2014-10-14 Allegro Microsystems, Llc Circuits and methods for processing a signal generated by a plurality of measuring devices
WO2012161912A2 (en) 2011-05-23 2012-11-29 Allegro Microsystems, Inc. Circuits and methods for processing a signal generated by a plurality of measuring devices
US8890518B2 (en) 2011-06-08 2014-11-18 Allegro Microsystems, Llc Arrangements for self-testing a circular vertical hall (CVH) sensing element and/or for self-testing a magnetic field sensor that uses a circular vertical hall (CVH) sensing element
WO2012170126A1 (en) 2011-06-08 2012-12-13 Allegro Microsystems, Inc. Arrangements for self-testing a circular vertical hall (cvh) sensing element and/or for self-testing a magnetic field sensor that uses a circular vertical hall (cvh) sensing element
US9425386B2 (en) 2011-07-21 2016-08-23 Infineon Technologies Ag Electronic device with ring-connected hall effect regions
US20150153425A1 (en) * 2011-07-21 2015-06-04 Infineon Technologies Ag Vertical hall sensor with high electrical symmetry
US9784801B2 (en) * 2011-07-21 2017-10-10 Infineon Technologies Ag Vertical hall sensor with high electrical symmetry
US8988072B2 (en) 2011-07-21 2015-03-24 Infineon Technologies Ag Vertical hall sensor with high electrical symmetry
US9007060B2 (en) 2011-07-21 2015-04-14 Infineon Technologies Ag Electronic device with ring-connected hall effect regions
US8793085B2 (en) 2011-08-19 2014-07-29 Allegro Microsystems, Llc Circuits and methods for automatically adjusting a magnetic field sensor in accordance with a speed of rotation sensed by the magnetic field sensor
WO2013028355A1 (en) 2011-08-19 2013-02-28 Allegro Microsystems, Inc. Circuits and methods for automatically adjusting a magnetic field sensor in accordance with a speed of rotation sensed by the magnetic field sensor
EP2726890B1 (en) * 2011-09-07 2018-10-17 Allegro MicroSystems, LLC Magnetic field sensing element combining a circular vertical hall magnetic field sensing element with a planar hall element
US8922206B2 (en) 2011-09-07 2014-12-30 Allegro Microsystems, Llc Magnetic field sensing element combining a circular vertical hall magnetic field sensing element with a planar hall element
US9411023B2 (en) 2011-09-07 2016-08-09 Allegro Microsystems, Llc Magnetic field sensing element combining a circular vertical hall magnetic field sensing element with a planar hall element
WO2013036345A2 (en) 2011-09-07 2013-03-14 Allegro Microsystems, Inc. Magnetic field sensing element combining a circular vertical hall magnetic field sensing element with a planar hall element
WO2013048652A2 (en) 2011-09-28 2013-04-04 Allegro Microsystems, Inc. Circuits and methods for processing signals generated by a plurality of magnetic field sensing elements
US9285438B2 (en) 2011-09-28 2016-03-15 Allegro Microsystems, Llc Circuits and methods for processing signals generated by a plurality of magnetic field sensing elements
WO2013048652A3 (en) * 2011-09-28 2013-07-11 Allegro Microsystems, Llc Circuits and methods for processing signals generated by a plurality of magnetic field sensing elements
EP3483566A1 (en) 2012-01-06 2019-05-15 Allegro MicroSystems, LLC Magnetic field sensor using a calculated threshold and corresponding method
US10845434B2 (en) 2012-01-06 2020-11-24 Allegro Microsystems, Llc Magnetic field sensor having a temperature compensated threshold on power up
US10066965B2 (en) 2012-01-06 2018-09-04 Allegro Microsystems, Llc Magnetic field sensor and associated method that can establish a measured threshold value and that can store the measured threshold value in a memory device
WO2013103478A1 (en) 2012-01-06 2013-07-11 Allegro Microsystems, LLC. Magnetic field sensor and associated method that can establish a measured threshold value and that can store the measured threshold value in a memory device
WO2013106151A3 (en) * 2012-01-09 2014-01-03 Allegro Microsystems, Llc Systems and methods that use magnetic field sensors to identify positions of a gear shift lever
WO2013106151A2 (en) 2012-01-09 2013-07-18 Allegro Microsystems, Llc Systems and methods that use magnetic field sensors to identify positions of a gear shift lever
US9046383B2 (en) 2012-01-09 2015-06-02 Allegro Microsystems, Llc Systems and methods that use magnetic field sensors to identify positions of a gear shift lever
US9312472B2 (en) 2012-02-20 2016-04-12 Infineon Technologies Ag Vertical hall device with electrical 180 degree symmetry
TWI471580B (en) * 2012-03-06 2015-02-01 Allegro Microsystems Llc Magnetic field sensor for sensing a position of an object and a method used in the magnetic field sensor
WO2013133908A1 (en) * 2012-03-06 2013-09-12 Allegro Microsystems, Llc Magnetic field sensor for sensing rotation of an object
US9182456B2 (en) 2012-03-06 2015-11-10 Allegro Microsystems, Llc Magnetic field sensor for sensing rotation of an object
US10215550B2 (en) 2012-05-01 2019-02-26 Allegro Microsystems, Llc Methods and apparatus for magnetic sensors having highly uniform magnetic fields
US11680996B2 (en) 2012-05-10 2023-06-20 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having integrated coil
US9817078B2 (en) 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
US8754640B2 (en) 2012-06-18 2014-06-17 Allegro Microsystems, Llc Magnetic field sensors and related techniques that can provide self-test information in a formatted output signal
US9068859B2 (en) 2012-06-18 2015-06-30 Allegro Microsystems, Llc Magnetic field sensors and related techniques provide a self-test by communicating selected analog or digital samples of a proximity signal
WO2013191891A1 (en) 2012-06-18 2013-12-27 Allegro Microsystems, Llc Magnetic field sensors and related techniques that can provide self-test information in a formatted output signal
US8860404B2 (en) 2012-06-18 2014-10-14 Allegro Microsystems, Llc Magnetic field sensors and related techniques that can provide a self-test using signals and related thresholds
WO2013191862A1 (en) 2012-06-18 2013-12-27 Allegro Microsystems, Llc Magnetic field sensors and related techniques that can provide self-test information
US9222990B2 (en) 2012-06-18 2015-12-29 Allegro Microsystems, Llc Magnetic field sensors and related techniques that can communicate at least one of three or more potential categories in which one or more characteristic values of a proximity signal responsive to a proximity of a sensed object are categorized
WO2014036664A1 (en) 2012-09-07 2014-03-13 Sensima Technology Sa Hall-effect-based angular orientation sensor and corresponding methods and devices
US8749005B1 (en) 2012-12-21 2014-06-10 Allegro Microsystems, Llc Magnetic field sensor and method of fabricating a magnetic field sensor having a plurality of vertical hall elements arranged in at least a portion of a polygonal shape
US9541424B2 (en) 2012-12-21 2017-01-10 Allegro Microsystems, Llc Circuits and methods for processing signals generated by a circular vertical hall (CVH) sensing element in the presence of a multi-pole magnet
US9606190B2 (en) 2012-12-21 2017-03-28 Allegro Microsystems, Llc Magnetic field sensor arrangements and associated methods
US9417295B2 (en) 2012-12-21 2016-08-16 Allegro Microsystems, Llc Circuits and methods for processing signals generated by a circular vertical hall (CVH) sensing element in the presence of a multi-pole magnet
WO2014099280A2 (en) 2012-12-21 2014-06-26 Allegro Microsystems, Llc Circuits and methods for processing signals generated by a circular vertical hall (cvh) sensing element in the presence of a multi-pole magnet
WO2014099283A2 (en) 2012-12-21 2014-06-26 Allegro Microsystems, Llc A magnetic field sensor and method of fabricating a magnetic field sensor having a plurality of vertical hall elements arranged in at least a portion of a polygonal shape
US10205093B2 (en) 2013-01-29 2019-02-12 Allegro Microsystems, Llc Vertical hall effect element with improved sensitivity
US9548443B2 (en) 2013-01-29 2017-01-17 Allegro Microsystems, Llc Vertical Hall Effect element with improved sensitivity
EP3828572A1 (en) 2013-02-13 2021-06-02 Allegro MicroSystems, LLC Magnetic field sensor comprising angle correction module
WO2014126669A1 (en) 2013-02-13 2014-08-21 Allegro Microsystems, Llc Magnetic field sensor and related techniques that provide varying current spinning phase sequences of a magnetic field sensing element
US9377285B2 (en) 2013-02-13 2016-06-28 Allegro Microsystems, Llc Magnetic field sensor and related techniques that provide varying current spinning phase sequences of a magnetic field sensing element
US9389060B2 (en) 2013-02-13 2016-07-12 Allegro Microsystems, Llc Magnetic field sensor and related techniques that provide an angle error correction module
EP3696513A1 (en) 2013-03-15 2020-08-19 Allegro MicroSystems, LLC Magnetic field sensor and associated method that can store a measured threshold value in a memory device during a time when the magnetic field sensor is powered off
WO2014143404A1 (en) 2013-03-15 2014-09-18 Allegro Microsystems, Llc A vertical hall effect element with structures to improve sensitivity
WO2014149238A1 (en) 2013-03-15 2014-09-25 Allegro Microsystems, Llc Magnetic field sensor and associated method that can store a measured threshold value in a memory device during a time when the magnetic field sensor is powered off
US9099638B2 (en) 2013-03-15 2015-08-04 Allegro Microsystems, Llc Vertical hall effect element with structures to improve sensitivity
US11009565B2 (en) 2013-03-15 2021-05-18 Allegro Microsystems, Llc Magnetic field sensor and associated method that can store a measured threshold value in a memory device during a time when the magnetic field sensor is powered off
US9880025B2 (en) 2013-07-11 2018-01-30 Mps Tech Switzerland Sarl Angular orientation sensor and corresponding methods and devices
WO2015003283A1 (en) 2013-07-11 2015-01-15 Sensima Technology Sa Angular orientation sensor and corresponding methods and devices
US9268001B2 (en) 2013-07-17 2016-02-23 Infineon Technologies Ag Differential perpendicular on-axis angle sensor
US9810519B2 (en) 2013-07-19 2017-11-07 Allegro Microsystems, Llc Arrangements for magnetic field sensors that act as tooth detectors
US10495699B2 (en) 2013-07-19 2019-12-03 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target
US12061246B2 (en) 2013-07-19 2024-08-13 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US10145908B2 (en) 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US10254103B2 (en) 2013-07-19 2019-04-09 Allegro Microsystems, Llc Arrangements for magnetic field sensors that act as tooth detectors
WO2015009532A1 (en) 2013-07-19 2015-01-22 Allegro Microsystems, Llc Magnet with opposing directions of magnetization for a magnetic sensor
US11313924B2 (en) 2013-07-19 2022-04-26 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US10670672B2 (en) 2013-07-19 2020-06-02 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
WO2015012988A1 (en) 2013-07-22 2015-01-29 Allegro Microsystems, Llc Magnetic field sensor and related techniques that provide an angle correction module
US9400164B2 (en) 2013-07-22 2016-07-26 Allegro Microsystems, Llc Magnetic field sensor and related techniques that provide an angle correction module
US9312473B2 (en) 2013-09-30 2016-04-12 Allegro Microsystems, Llc Vertical hall effect sensor
US9735345B2 (en) 2013-09-30 2017-08-15 Allegro Microsystems, Llc Vertical hall effect sensor
WO2015100021A1 (en) 2013-12-23 2015-07-02 Allegro Microsystems, Llc Magnetic field sensor and related techniques that inject an error correction signal into a signal channel to result in reduced error
US10120042B2 (en) 2013-12-23 2018-11-06 Allegro Microsystems, Llc Magnetic field sensor and related techniques that inject a synthesized error correction signal into a signal channel to result in reduced error
US9574867B2 (en) 2013-12-23 2017-02-21 Allegro Microsystems, Llc Magnetic field sensor and related techniques that inject an error correction signal into a signal channel to result in reduced error
US20150198677A1 (en) * 2014-01-14 2015-07-16 Allegro Microsystems, Llc Circuit and Method for Reducing an Offset Component of a Plurality of Vertical Hall Elements Arranged in a Circle
US9547048B2 (en) 2014-01-14 2017-01-17 Allegro Micosystems, LLC Circuit and method for reducing an offset component of a plurality of vertical hall elements arranged in a circle
WO2015171331A1 (en) 2014-05-05 2015-11-12 Allegro Microsystems, Llc Magnetic field sensors and associated methods with reduced offset and improved accuracy
US9753097B2 (en) 2014-05-05 2017-09-05 Allegro Microsystems, Llc Magnetic field sensors and associated methods with reduced offset and improved accuracy
US9448288B2 (en) 2014-05-20 2016-09-20 Allegro Microsystems, Llc Magnetic field sensor with improved accuracy resulting from a digital potentiometer
US10712403B2 (en) 2014-10-31 2020-07-14 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9719806B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a ferromagnetic target object
US10753768B2 (en) 2014-10-31 2020-08-25 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US9720054B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US10753769B2 (en) 2014-10-31 2020-08-25 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US11307054B2 (en) 2014-10-31 2022-04-19 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US9823090B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a target object
US9638766B2 (en) 2014-11-24 2017-05-02 Allegro Microsystems, Llc Magnetic field sensor with improved accuracy resulting from a variable potentiometer and a gain circuit
US9684042B2 (en) 2015-02-27 2017-06-20 Allegro Microsystems, Llc Magnetic field sensor with improved accuracy and method of obtaining improved accuracy with a magnetic field sensor
US11287489B2 (en) 2015-06-12 2022-03-29 Allegro Microsystems, Llc Magnetic field sensor for angle detection with a phase-locked loop
US11163022B2 (en) 2015-06-12 2021-11-02 Allegro Microsystems, Llc Magnetic field sensor for angle detection with a phase-locked loop
US10495700B2 (en) 2016-01-29 2019-12-03 Allegro Microsystems, Llc Method and system for providing information about a target object in a formatted output signal
WO2017136145A1 (en) 2016-02-01 2017-08-10 Allegro Microsystems, Llc Circular vertical hall (cvh) sensing element with signal processing and arctangent function
US10481220B2 (en) 2016-02-01 2019-11-19 Allegro Microsystems, Llc Circular vertical hall (CVH) sensing element with signal processing and arctangent function
WO2017136148A1 (en) 2016-02-01 2017-08-10 Allegro Microsystems, Llc Circular vertical hall (cvh) sensing element with signal processing
US9739848B1 (en) 2016-02-01 2017-08-22 Allegro Microsystems, Llc Circular vertical hall (CVH) sensing element with sliding integration
US9739847B1 (en) 2016-02-01 2017-08-22 Allegro Microsystems, Llc Circular vertical hall (CVH) sensing element with signal processing
US10495485B2 (en) 2016-05-17 2019-12-03 Allegro Microsystems, Llc Magnetic field sensors and output signal formats for a magnetic field sensor
US10215590B2 (en) 2016-06-08 2019-02-26 Allegro Microsystems, Llc Magnetic field sensor for sensing a proximity and/or a location of an object
US10385964B2 (en) 2016-06-08 2019-08-20 Allegro Microsystems, Llc Enhanced neutral gear sensor
US10837800B2 (en) 2016-06-08 2020-11-17 Allegro Microsystems, Llc Arrangements for magnetic field sensors that act as movement detectors
US10041810B2 (en) 2016-06-08 2018-08-07 Allegro Microsystems, Llc Arrangements for magnetic field sensors that act as movement detectors
US10260905B2 (en) 2016-06-08 2019-04-16 Allegro Microsystems, Llc Arrangements for magnetic field sensors to cancel offset variations
US10012518B2 (en) 2016-06-08 2018-07-03 Allegro Microsystems, Llc Magnetic field sensor for sensing a proximity of an object
US10585147B2 (en) 2016-06-14 2020-03-10 Allegro Microsystems, Llc Magnetic field sensor having error correction
WO2017218157A1 (en) 2016-06-14 2017-12-21 Allegro Microsystems, Llc Magnetic field sensor having error correction
US10739164B2 (en) 2017-01-27 2020-08-11 Allegro Microsystems, Llc Circuit for detecting motion of an object
US10495701B2 (en) 2017-03-02 2019-12-03 Allegro Microsystems, Llc Circular vertical hall (CVH) sensing element with DC offset removal
JP2018179644A (en) * 2017-04-07 2018-11-15 日本精工株式会社 Revolution angle detector for electrically-driven power steering device, torque angle sensor therefor, torque sensor therefor, and motor actuation control device, electrically-driven power steering device, and vehicle
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US10310028B2 (en) 2017-05-26 2019-06-04 Allegro Microsystems, Llc Coil actuated pressure sensor
US11768256B2 (en) 2017-05-26 2023-09-26 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US11320496B2 (en) 2017-05-26 2022-05-03 Allegro Microsystems, Llc Targets for coil actuated position sensors
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
US10649042B2 (en) 2017-05-26 2020-05-12 Allegro Microsystems, Llc Packages for coil actuated position sensors
US10641842B2 (en) 2017-05-26 2020-05-05 Allegro Microsystems, Llc Targets for coil actuated position sensors
US10324141B2 (en) 2017-05-26 2019-06-18 Allegro Microsystems, Llc Packages for coil actuated position sensors
US11073573B2 (en) 2017-05-26 2021-07-27 Allegro Microsystems, Llc Packages for coil actuated position sensors
US11467928B2 (en) 2017-09-29 2022-10-11 Allegro Microsystems, Llc Circuit and method for storing information in non-volatile memory during a loss of power event
US10839920B2 (en) 2017-09-29 2020-11-17 Allegro Microsystems, Llc Circuit having a low power charge pump for storing information in non-volatile memory during a loss of power event
US10929252B2 (en) 2017-09-29 2021-02-23 Allegro Microsystems, Llc Circuit and method for storing information in non-volatile memory during a loss of power event
US10430296B2 (en) 2017-09-29 2019-10-01 Allegro Microsystems, Llc Circuit and method for storing information in non-volatile memory during a loss of power event
US11714099B2 (en) 2018-01-23 2023-08-01 Hanvon Ugee Technology Co., Ltd. Magnetic roller device and rotation information calculating method thereof
EP3745239A4 (en) * 2018-01-23 2021-10-20 Hanvon Ugee Technology Co., Ltd. Magnetic roller device and rotation information calculating method thereof
US10386427B1 (en) 2018-02-09 2019-08-20 Allegro Microsystems, Llc Magnetic field sensor having at least two CVH elements and method of operating same
US10866117B2 (en) 2018-03-01 2020-12-15 Allegro Microsystems, Llc Magnetic field influence during rotation movement of magnetic target
US11313700B2 (en) 2018-03-01 2022-04-26 Allegro Microsystems, Llc Magnetic field influence during rotation movement of magnetic target
US10656170B2 (en) 2018-05-17 2020-05-19 Allegro Microsystems, Llc Magnetic field sensors and output signal formats for a magnetic field sensor
US11686599B2 (en) 2018-08-06 2023-06-27 Allegro Microsystems, Llc Magnetic field sensor
US11255700B2 (en) 2018-08-06 2022-02-22 Allegro Microsystems, Llc Magnetic field sensor
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
US11061084B2 (en) 2019-03-07 2021-07-13 Allegro Microsystems, Llc Coil actuated pressure sensor and deflectable substrate
US10955306B2 (en) 2019-04-22 2021-03-23 Allegro Microsystems, Llc Coil actuated pressure sensor and deformable substrate
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
EP4030177A1 (en) 2021-01-13 2022-07-20 Allegro MicroSystems, LLC Circuit for reducing an offset component of a plurality of vertical hall elements arranged in one or more circles
US11802922B2 (en) 2021-01-13 2023-10-31 Allegro Microsystems, Llc Circuit for reducing an offset component of a plurality of vertical hall elements arranged in one or more circles
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11473935B1 (en) 2021-04-16 2022-10-18 Allegro Microsystems, Llc System and related techniques that provide an angle sensor for sensing an angle of rotation of a ferromagnetic screw
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents

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