WO2008142941A1 - 熱流量計 - Google Patents

熱流量計 Download PDF

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Publication number
WO2008142941A1
WO2008142941A1 PCT/JP2008/057767 JP2008057767W WO2008142941A1 WO 2008142941 A1 WO2008142941 A1 WO 2008142941A1 JP 2008057767 W JP2008057767 W JP 2008057767W WO 2008142941 A1 WO2008142941 A1 WO 2008142941A1
Authority
WO
WIPO (PCT)
Prior art keywords
flow rate
temperature
operating means
fluid
determined
Prior art date
Application number
PCT/JP2008/057767
Other languages
English (en)
French (fr)
Inventor
Manabu Muraoka
Masaki Seo
Junichi Matsuda
Masanori Anzai
Original Assignee
Yamatake Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamatake Corporation filed Critical Yamatake Corporation
Priority to US12/599,950 priority Critical patent/US8225652B2/en
Priority to CN200880017202XA priority patent/CN101680788B/zh
Priority to EP08740757A priority patent/EP2154489A4/en
Publication of WO2008142941A1 publication Critical patent/WO2008142941A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)

Abstract

本発明は、定常流量域での流体流量を高精度に計測すると共に、定常流量域を外れた過大流量についても計測することのできる簡易な構成の熱式流量計を提供することを目的とする。 一対の感温素子（Ｒｕ，Ｒｄ）を備えたセンサチップ（１）の上記感温素子の近傍温度を該センサチップに沿って通流する流体の温度よりも一定温度だけ高める加熱手段（Ｒｈ）と、前記一対の感温素子により検出される温度差から前記流体の流量を求める第１の流量演算手段（６）と、前記前記加熱手段の駆動エネルギから前記流体の流量を求める第２の流量演算手段（７）と、前記第１の流量演算手段が求めた流量が流量閾値を超えるとき、前記第１の流量演算手段が求めた流量に代えて前記第２の流量演算手段が求めた流量を出力する出力制御手段（５）とを備える。
PCT/JP2008/057767 2007-05-24 2008-04-22 熱流量計 WO2008142941A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/599,950 US8225652B2 (en) 2007-05-24 2008-04-22 Thermal flow meter measuring flow rate based on temperature difference measurement and driving energy of the heater
CN200880017202XA CN101680788B (zh) 2007-05-24 2008-04-22 热式流量计
EP08740757A EP2154489A4 (en) 2007-05-24 2008-04-22 THERMAL FLOWMETER

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007137906A JP5209232B2 (ja) 2007-05-24 2007-05-24 熱式流量計
JP2007-137906 2007-05-24

Publications (1)

Publication Number Publication Date
WO2008142941A1 true WO2008142941A1 (ja) 2008-11-27

Family

ID=40031657

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057767 WO2008142941A1 (ja) 2007-05-24 2008-04-22 熱流量計

Country Status (5)

Country Link
US (1) US8225652B2 (ja)
EP (1) EP2154489A4 (ja)
JP (1) JP5209232B2 (ja)
CN (1) CN101680788B (ja)
WO (1) WO2008142941A1 (ja)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8499786B2 (en) * 2010-04-09 2013-08-06 Hitachi Metals, Ltd Mass flow controller with enhanced operating range
US8504311B2 (en) 2010-04-09 2013-08-06 Hitachi Metals, Ltd. Method and mass flow controller for enhanced operating range
KR100994537B1 (ko) * 2010-06-28 2010-11-15 금양산업(주) 선박용 내연기관의 피스톤 냉각 오일의 유량감지를 위한 열량식 유량감지 시스템
DE102010030952B4 (de) * 2010-07-05 2022-05-25 Innovative Sensor Technology Ist Ag Vorrichtung zur Bestimmung und/oder Überwachung eines Volumendurchflusses und/oder einer Durchflussgeschwindigkeit
WO2013063262A1 (en) 2011-10-25 2013-05-02 Hydrotech, Inc Pump monitoring device
JP5645880B2 (ja) * 2012-06-15 2014-12-24 日立オートモティブシステムズ株式会社 熱式流量計
JP5523528B2 (ja) * 2012-09-20 2014-06-18 三菱電機株式会社 熱式流量センサおよび熱式流量センサによる流量検出信号生成方法
US9389115B2 (en) * 2013-02-15 2016-07-12 Eaton Corporation Two wire temperature and fluid level limit switch
US9207109B2 (en) * 2013-04-09 2015-12-08 Honeywell International Inc. Flow sensor with improved linear output
JP5961592B2 (ja) * 2013-08-06 2016-08-02 日立オートモティブシステムズ株式会社 熱式質量流量計
US9612146B2 (en) 2014-02-07 2017-04-04 Honeywell International, Inc. Airflow sensor with dust reduction
GB2553681B (en) 2015-01-07 2019-06-26 Homeserve Plc Flow detection device
GB201501935D0 (en) 2015-02-05 2015-03-25 Tooms Moore Consulting Ltd And Trow Consulting Ltd Water flow analysis
CN105910662A (zh) * 2016-05-23 2016-08-31 东南大学 具有环境温度补偿功能的热式空气流量变送器
US10466135B2 (en) 2016-11-08 2019-11-05 Iot Diagnostics Llc Pump efficiency of a fluid pump
US10458828B2 (en) * 2017-02-07 2019-10-29 Honeywell International Inc. Flow sensor heater circuit calibration
US10650931B2 (en) 2017-03-27 2020-05-12 Ge-Hitachi Nuclear Energy Americas Llc Acoustic flowmeters and methods of using the same
DE102017112622A1 (de) * 2017-06-08 2018-12-13 Endress + Hauser Flowtec Ag Thermisches Durchflussmessgerät
CN108051610B (zh) * 2017-10-16 2022-04-12 东南大学 一种智能双检测模式的风速风向传感器及测量方法
JP7034852B2 (ja) * 2018-07-04 2022-03-14 アズビル株式会社 熱式流量計
CN109297553B (zh) * 2018-11-15 2020-07-07 中国电子科技集团公司第十三研究所 Mems热膜式流量传感器恒温差控制电路
DE102019110876A1 (de) * 2019-04-26 2020-10-29 Endress+Hauser Flowtec Ag Verfahren zum Betreiben einer Sonde eines thermischen Durchflussmessgeräts und ein thermisches Durchflussmessgerät mit einer solchen Sonde
JP7487501B2 (ja) * 2020-03-13 2024-05-21 オムロン株式会社 流量測定装置
CN115031793B (zh) * 2022-08-11 2022-12-09 成都国光电子仪表有限责任公司 一种总线数字式流量计量系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259527A (ja) * 1989-03-31 1990-10-22 Yamatake Honeywell Co Ltd 流体の流量検出センサー
JPH04230808A (ja) * 1990-04-13 1992-08-19 Yamatake Honeywell Co Ltd ダイアフラムセンサ
JP2003247876A (ja) 2002-02-22 2003-09-05 Yamatake Corp 熱式流量計
JP2003279437A (ja) * 2002-03-25 2003-10-02 Mitsui Mining & Smelting Co Ltd 配管の漏洩検査装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4706061A (en) * 1986-08-28 1987-11-10 Honeywell Inc. Composition sensor with minimal non-linear thermal gradients
DE3638138A1 (de) * 1986-11-08 1988-05-11 Bosch Gmbh Robert Vorrichtung zur bestimmung der masse eines stroemenden mediums
EP0452134B1 (en) 1990-04-13 1995-08-23 Yamatake-Honeywell Co. Ltd. Diaphragm-type sensor
JP3513041B2 (ja) * 1999-01-25 2004-03-31 三菱電機株式会社 流量センサ
CH695166A5 (de) * 2000-04-25 2005-12-30 Sensirion Ag Verfahren und Vorrichtung zum Messen des Flusses einer Flüssigkeit.
JP3752962B2 (ja) * 2000-05-15 2006-03-08 株式会社日立製作所 熱式空気流量測定装置及びそれを用いた内燃機関並びに熱式空気流量測定方法
WO2003078934A1 (fr) * 2002-03-20 2003-09-25 Mitsui Mining & Smelting Co., Ltd. Procede de mesure de debit et debitmetre, ensemble section de mesure de debit utilise pour ceux-ci et unite de mesure de debit les utilisant, et dispositif d'inspection de fuite de canalisations utilisant un debitmetre
JP4130877B2 (ja) * 2002-06-19 2008-08-06 株式会社日立製作所 流量計及び流量計システム
US6868723B2 (en) * 2003-05-16 2005-03-22 Mks Instruments, Inc. Thermal anemometry mass flow measurement apparatus and method
CN1793791A (zh) * 2006-01-09 2006-06-28 胡修泰 温差流量计及热表

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259527A (ja) * 1989-03-31 1990-10-22 Yamatake Honeywell Co Ltd 流体の流量検出センサー
JPH04230808A (ja) * 1990-04-13 1992-08-19 Yamatake Honeywell Co Ltd ダイアフラムセンサ
JP2003247876A (ja) 2002-02-22 2003-09-05 Yamatake Corp 熱式流量計
JP2003279437A (ja) * 2002-03-25 2003-10-02 Mitsui Mining & Smelting Co Ltd 配管の漏洩検査装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2154489A4

Also Published As

Publication number Publication date
CN101680788B (zh) 2012-01-04
JP5209232B2 (ja) 2013-06-12
CN101680788A (zh) 2010-03-24
US8225652B2 (en) 2012-07-24
JP2008292286A (ja) 2008-12-04
EP2154489A4 (en) 2011-05-25
EP2154489A1 (en) 2010-02-17
US20100223991A1 (en) 2010-09-09

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