WO2008142941A1 - 熱流量計 - Google Patents
熱流量計 Download PDFInfo
- Publication number
- WO2008142941A1 WO2008142941A1 PCT/JP2008/057767 JP2008057767W WO2008142941A1 WO 2008142941 A1 WO2008142941 A1 WO 2008142941A1 JP 2008057767 W JP2008057767 W JP 2008057767W WO 2008142941 A1 WO2008142941 A1 WO 2008142941A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- flow rate
- temperature
- operating means
- fluid
- determined
- Prior art date
Links
- 239000012530 fluid Substances 0.000 abstract 4
- 238000010438 heat treatment Methods 0.000 abstract 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
本発明は、定常流量域での流体流量を高精度に計測すると共に、定常流量域を外れた過大流量についても計測することのできる簡易な構成の熱式流量計を提供することを目的とする。 一対の感温素子(Ru,Rd)を備えたセンサチップ(1)の上記感温素子の近傍温度を該センサチップに沿って通流する流体の温度よりも一定温度だけ高める加熱手段(Rh)と、前記一対の感温素子により検出される温度差から前記流体の流量を求める第1の流量演算手段(6)と、前記前記加熱手段の駆動エネルギから前記流体の流量を求める第2の流量演算手段(7)と、前記第1の流量演算手段が求めた流量が流量閾値を超えるとき、前記第1の流量演算手段が求めた流量に代えて前記第2の流量演算手段が求めた流量を出力する出力制御手段(5)とを備える。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/599,950 US8225652B2 (en) | 2007-05-24 | 2008-04-22 | Thermal flow meter measuring flow rate based on temperature difference measurement and driving energy of the heater |
EP08740757A EP2154489A4 (en) | 2007-05-24 | 2008-04-22 | THERMAL FLOWMETER |
CN200880017202XA CN101680788B (zh) | 2007-05-24 | 2008-04-22 | 热式流量计 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-137906 | 2007-05-24 | ||
JP2007137906A JP5209232B2 (ja) | 2007-05-24 | 2007-05-24 | 熱式流量計 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008142941A1 true WO2008142941A1 (ja) | 2008-11-27 |
Family
ID=40031657
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/057767 WO2008142941A1 (ja) | 2007-05-24 | 2008-04-22 | 熱流量計 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8225652B2 (ja) |
EP (1) | EP2154489A4 (ja) |
JP (1) | JP5209232B2 (ja) |
CN (1) | CN101680788B (ja) |
WO (1) | WO2008142941A1 (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8504311B2 (en) | 2010-04-09 | 2013-08-06 | Hitachi Metals, Ltd. | Method and mass flow controller for enhanced operating range |
US8499786B2 (en) * | 2010-04-09 | 2013-08-06 | Hitachi Metals, Ltd | Mass flow controller with enhanced operating range |
KR100994537B1 (ko) * | 2010-06-28 | 2010-11-15 | 금양산업(주) | 선박용 내연기관의 피스톤 냉각 오일의 유량감지를 위한 열량식 유량감지 시스템 |
DE102010030952B4 (de) * | 2010-07-05 | 2022-05-25 | Innovative Sensor Technology Ist Ag | Vorrichtung zur Bestimmung und/oder Überwachung eines Volumendurchflusses und/oder einer Durchflussgeschwindigkeit |
WO2013063262A1 (en) * | 2011-10-25 | 2013-05-02 | Hydrotech, Inc | Pump monitoring device |
JP5645880B2 (ja) * | 2012-06-15 | 2014-12-24 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
JP5523528B2 (ja) * | 2012-09-20 | 2014-06-18 | 三菱電機株式会社 | 熱式流量センサおよび熱式流量センサによる流量検出信号生成方法 |
WO2014127251A1 (en) * | 2013-02-15 | 2014-08-21 | Eaton Corporation | Two-wire temperature and fluid level limit switch |
US9207109B2 (en) * | 2013-04-09 | 2015-12-08 | Honeywell International Inc. | Flow sensor with improved linear output |
JP5961592B2 (ja) * | 2013-08-06 | 2016-08-02 | 日立オートモティブシステムズ株式会社 | 熱式質量流量計 |
US9612146B2 (en) | 2014-02-07 | 2017-04-04 | Honeywell International, Inc. | Airflow sensor with dust reduction |
GB2533936B (en) | 2015-01-07 | 2017-10-25 | Homeserve Plc | Flow detection device |
GB201501935D0 (en) | 2015-02-05 | 2015-03-25 | Tooms Moore Consulting Ltd And Trow Consulting Ltd | Water flow analysis |
CN105910662A (zh) * | 2016-05-23 | 2016-08-31 | 东南大学 | 具有环境温度补偿功能的热式空气流量变送器 |
US10466135B2 (en) | 2016-11-08 | 2019-11-05 | Iot Diagnostics Llc | Pump efficiency of a fluid pump |
US10458828B2 (en) * | 2017-02-07 | 2019-10-29 | Honeywell International Inc. | Flow sensor heater circuit calibration |
US10650931B2 (en) | 2017-03-27 | 2020-05-12 | Ge-Hitachi Nuclear Energy Americas Llc | Acoustic flowmeters and methods of using the same |
DE102017112622A1 (de) * | 2017-06-08 | 2018-12-13 | Endress + Hauser Flowtec Ag | Thermisches Durchflussmessgerät |
CN108051610B (zh) * | 2017-10-16 | 2022-04-12 | 东南大学 | 一种智能双检测模式的风速风向传感器及测量方法 |
JP7034852B2 (ja) * | 2018-07-04 | 2022-03-14 | アズビル株式会社 | 熱式流量計 |
CN109297553B (zh) * | 2018-11-15 | 2020-07-07 | 中国电子科技集团公司第十三研究所 | Mems热膜式流量传感器恒温差控制电路 |
DE102019110876A1 (de) * | 2019-04-26 | 2020-10-29 | Endress+Hauser Flowtec Ag | Verfahren zum Betreiben einer Sonde eines thermischen Durchflussmessgeräts und ein thermisches Durchflussmessgerät mit einer solchen Sonde |
JP7487501B2 (ja) * | 2020-03-13 | 2024-05-21 | オムロン株式会社 | 流量測定装置 |
CN115031793B (zh) * | 2022-08-11 | 2022-12-09 | 成都国光电子仪表有限责任公司 | 一种总线数字式流量计量系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02259527A (ja) * | 1989-03-31 | 1990-10-22 | Yamatake Honeywell Co Ltd | 流体の流量検出センサー |
JPH04230808A (ja) * | 1990-04-13 | 1992-08-19 | Yamatake Honeywell Co Ltd | ダイアフラムセンサ |
JP2003247876A (ja) | 2002-02-22 | 2003-09-05 | Yamatake Corp | 熱式流量計 |
JP2003279437A (ja) * | 2002-03-25 | 2003-10-02 | Mitsui Mining & Smelting Co Ltd | 配管の漏洩検査装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4706061A (en) * | 1986-08-28 | 1987-11-10 | Honeywell Inc. | Composition sensor with minimal non-linear thermal gradients |
DE3638138A1 (de) * | 1986-11-08 | 1988-05-11 | Bosch Gmbh Robert | Vorrichtung zur bestimmung der masse eines stroemenden mediums |
DE69112251T2 (de) * | 1990-04-13 | 1996-02-22 | Yamatake Honeywell Co Ltd | Membransensor. |
JP3513041B2 (ja) * | 1999-01-25 | 2004-03-31 | 三菱電機株式会社 | 流量センサ |
CH695166A5 (de) * | 2000-04-25 | 2005-12-30 | Sensirion Ag | Verfahren und Vorrichtung zum Messen des Flusses einer Flüssigkeit. |
JP3752962B2 (ja) * | 2000-05-15 | 2006-03-08 | 株式会社日立製作所 | 熱式空気流量測定装置及びそれを用いた内燃機関並びに熱式空気流量測定方法 |
EP1491866A4 (en) * | 2002-03-20 | 2006-06-07 | Mitsui Mining & Smelting Co | FLOW SPEED MEASURING METHOD AND FLOWMETER, FLOW SPEED MEASUREMENT CIRCUIT HOUSING USED, AND FLOW SPEED MEASURING UNIT THEREFOR AND FLUSH TESTING DEVICE WITH FLOWMETER |
JP4130877B2 (ja) * | 2002-06-19 | 2008-08-06 | 株式会社日立製作所 | 流量計及び流量計システム |
US6868723B2 (en) * | 2003-05-16 | 2005-03-22 | Mks Instruments, Inc. | Thermal anemometry mass flow measurement apparatus and method |
CN1793791A (zh) * | 2006-01-09 | 2006-06-28 | 胡修泰 | 温差流量计及热表 |
-
2007
- 2007-05-24 JP JP2007137906A patent/JP5209232B2/ja active Active
-
2008
- 2008-04-22 US US12/599,950 patent/US8225652B2/en active Active
- 2008-04-22 EP EP08740757A patent/EP2154489A4/en not_active Withdrawn
- 2008-04-22 WO PCT/JP2008/057767 patent/WO2008142941A1/ja active Application Filing
- 2008-04-22 CN CN200880017202XA patent/CN101680788B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02259527A (ja) * | 1989-03-31 | 1990-10-22 | Yamatake Honeywell Co Ltd | 流体の流量検出センサー |
JPH04230808A (ja) * | 1990-04-13 | 1992-08-19 | Yamatake Honeywell Co Ltd | ダイアフラムセンサ |
JP2003247876A (ja) | 2002-02-22 | 2003-09-05 | Yamatake Corp | 熱式流量計 |
JP2003279437A (ja) * | 2002-03-25 | 2003-10-02 | Mitsui Mining & Smelting Co Ltd | 配管の漏洩検査装置 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2154489A4 |
Also Published As
Publication number | Publication date |
---|---|
US8225652B2 (en) | 2012-07-24 |
EP2154489A1 (en) | 2010-02-17 |
CN101680788B (zh) | 2012-01-04 |
US20100223991A1 (en) | 2010-09-09 |
EP2154489A4 (en) | 2011-05-25 |
CN101680788A (zh) | 2010-03-24 |
JP2008292286A (ja) | 2008-12-04 |
JP5209232B2 (ja) | 2013-06-12 |
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