WO2008139379A3 - Spectrum detector for uv radiation and manufacturing method therefore - Google Patents

Spectrum detector for uv radiation and manufacturing method therefore Download PDF

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Publication number
WO2008139379A3
WO2008139379A3 PCT/IB2008/051796 IB2008051796W WO2008139379A3 WO 2008139379 A3 WO2008139379 A3 WO 2008139379A3 IB 2008051796 W IB2008051796 W IB 2008051796W WO 2008139379 A3 WO2008139379 A3 WO 2008139379A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical filter
light
wavelength
converting plate
spectrum detector
Prior art date
Application number
PCT/IB2008/051796
Other languages
French (fr)
Other versions
WO2008139379A2 (en
Inventor
Eduard J Meijer
Original Assignee
Koninkl Philips Electronics Nv
Eduard J Meijer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv, Eduard J Meijer filed Critical Koninkl Philips Electronics Nv
Publication of WO2008139379A2 publication Critical patent/WO2008139379A2/en
Publication of WO2008139379A3 publication Critical patent/WO2008139379A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/1446—Devices controlled by radiation in a repetitive configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/58—Photometry, e.g. photographic exposure meter using luminescence generated by light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H01L31/02322—Optical elements or arrangements associated with the device comprising luminescent members, e.g. fluorescent sheets upon the device

Abstract

A spectrum detector (1; 32; 45; 50), for enabling determination of a spectral distribution in the UV-range, comprising a semiconductor substrate (6) having first (2a; 35 a) and second (2b; 35b) light-sensing structures formed therein. A first part of a wavelength converting plate (3) covers the first light-sensing structure (2a; 35a), and a first optical filter (4a; 38a) is provided on the first part of the wavelength converting plate (3), and a second part of a wavelength converting plate (3) covers the second light-sensing structure (2b; 35b), and a second optical filter (4b; 38b) is provided on the second part of the wavelength converting plate (3). The first optical filter (4a; 38a) is configured to selectively transmit light in a first wavelength range (11), and the second optical filter (4b; 38b) is configured to selectively transmit light in a second wavelength range (12), the second wavelength range (12) being different from the first wavelength range (11).
PCT/IB2008/051796 2007-05-10 2008-05-08 Spectrum detector for uv radiation and manufacturing method therefore WO2008139379A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07107928 2007-05-10
EP07107928.9 2007-05-10

Publications (2)

Publication Number Publication Date
WO2008139379A2 WO2008139379A2 (en) 2008-11-20
WO2008139379A3 true WO2008139379A3 (en) 2009-01-08

Family

ID=39791466

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2008/051796 WO2008139379A2 (en) 2007-05-10 2008-05-08 Spectrum detector for uv radiation and manufacturing method therefore

Country Status (2)

Country Link
TW (1) TW200915551A (en)
WO (1) WO2008139379A2 (en)

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US9343490B2 (en) 2013-08-09 2016-05-17 Zena Technologies, Inc. Nanowire structured color filter arrays and fabrication method of the same
US8519379B2 (en) 2009-12-08 2013-08-27 Zena Technologies, Inc. Nanowire structured photodiode with a surrounding epitaxially grown P or N layer
US8269985B2 (en) 2009-05-26 2012-09-18 Zena Technologies, Inc. Determination of optimal diameters for nanowires
US8889455B2 (en) 2009-12-08 2014-11-18 Zena Technologies, Inc. Manufacturing nanowire photo-detector grown on a back-side illuminated image sensor
US9082673B2 (en) 2009-10-05 2015-07-14 Zena Technologies, Inc. Passivated upstanding nanostructures and methods of making the same
US9478685B2 (en) 2014-06-23 2016-10-25 Zena Technologies, Inc. Vertical pillar structured infrared detector and fabrication method for the same
US8866065B2 (en) 2010-12-13 2014-10-21 Zena Technologies, Inc. Nanowire arrays comprising fluorescent nanowires
US8229255B2 (en) 2008-09-04 2012-07-24 Zena Technologies, Inc. Optical waveguides in image sensors
US9515218B2 (en) 2008-09-04 2016-12-06 Zena Technologies, Inc. Vertical pillar structured photovoltaic devices with mirrors and optical claddings
US8748799B2 (en) 2010-12-14 2014-06-10 Zena Technologies, Inc. Full color single pixel including doublet or quadruplet si nanowires for image sensors
US8546742B2 (en) 2009-06-04 2013-10-01 Zena Technologies, Inc. Array of nanowires in a single cavity with anti-reflective coating on substrate
US9000353B2 (en) 2010-06-22 2015-04-07 President And Fellows Of Harvard College Light absorption and filtering properties of vertically oriented semiconductor nano wires
US9299866B2 (en) 2010-12-30 2016-03-29 Zena Technologies, Inc. Nanowire array based solar energy harvesting device
US8890271B2 (en) 2010-06-30 2014-11-18 Zena Technologies, Inc. Silicon nitride light pipes for image sensors
US8835831B2 (en) 2010-06-22 2014-09-16 Zena Technologies, Inc. Polarized light detecting device and fabrication methods of the same
US8299472B2 (en) 2009-12-08 2012-10-30 Young-June Yu Active pixel sensor with nanowire structured photodetectors
US8735797B2 (en) 2009-12-08 2014-05-27 Zena Technologies, Inc. Nanowire photo-detector grown on a back-side illuminated image sensor
US8791470B2 (en) 2009-10-05 2014-07-29 Zena Technologies, Inc. Nano structured LEDs
US8274039B2 (en) 2008-11-13 2012-09-25 Zena Technologies, Inc. Vertical waveguides with various functionality on integrated circuits
US9406709B2 (en) 2010-06-22 2016-08-02 President And Fellows Of Harvard College Methods for fabricating and using nanowires

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4822998A (en) * 1986-05-15 1989-04-18 Minolta Camera Kabushiki Kaisha Spectral sensor with interference filter
US5001532A (en) * 1989-09-06 1991-03-19 Rockwell International Corporation Impurity band conduction detector having photoluminescent layer
US5227648A (en) * 1991-12-03 1993-07-13 Woo Jong Chun Resonance cavity photodiode array resolving wavelength and spectrum
FR2697352A1 (en) * 1992-10-26 1994-04-29 Physique Rayon Lumie Lab Electromagnetic energy concentrator with frequency shift - uses dopant that responds to electromagnetic excitation by emitting light at different frequency
US5574286A (en) * 1995-06-30 1996-11-12 Huston; Alan L. Solar-blind radiation detector
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
DE19723234A1 (en) * 1997-06-03 1998-12-10 Siemens Ag Filters for filtering out spectral ranges and optical system for combustion analysis
FR2765970A1 (en) * 1997-07-11 1999-01-15 Commissariat Energie Atomique METHOD FOR MANUFACTURING AN OPTICAL FILTER MATRIX, OPTICAL FILTER MATRIX AND SPECTROMETRY DEVICE USING SUCH A MATRIX
US6005252A (en) * 1996-01-11 1999-12-21 The Trustees Of Princeton University Method and apparatus for measuring film spectral properties
WO2000074140A1 (en) * 1999-06-02 2000-12-07 Intel Corporation Image sensor response enhancement using fluorescent phosphors
EP1239270A1 (en) * 2001-02-21 2002-09-11 Horiba, Ltd. Optical detector
US20040239939A1 (en) * 2003-05-28 2004-12-02 Onera Stationary fourier transform spectrometer
US20070145236A1 (en) * 2005-12-22 2007-06-28 Palo Alto Research Center Incorporated Photosensing throughout energy range and in subranges
DE102006039071A1 (en) * 2006-08-09 2008-02-21 Universität Kassel Making optical filter array with two distributed Bragg reflectors and intervening Fabry Perot filter elements, employs nano-imprint procedure to form differentiated filter cavities

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4822998A (en) * 1986-05-15 1989-04-18 Minolta Camera Kabushiki Kaisha Spectral sensor with interference filter
US5001532A (en) * 1989-09-06 1991-03-19 Rockwell International Corporation Impurity band conduction detector having photoluminescent layer
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
US5227648A (en) * 1991-12-03 1993-07-13 Woo Jong Chun Resonance cavity photodiode array resolving wavelength and spectrum
FR2697352A1 (en) * 1992-10-26 1994-04-29 Physique Rayon Lumie Lab Electromagnetic energy concentrator with frequency shift - uses dopant that responds to electromagnetic excitation by emitting light at different frequency
US5574286A (en) * 1995-06-30 1996-11-12 Huston; Alan L. Solar-blind radiation detector
US6005252A (en) * 1996-01-11 1999-12-21 The Trustees Of Princeton University Method and apparatus for measuring film spectral properties
DE19723234A1 (en) * 1997-06-03 1998-12-10 Siemens Ag Filters for filtering out spectral ranges and optical system for combustion analysis
FR2765970A1 (en) * 1997-07-11 1999-01-15 Commissariat Energie Atomique METHOD FOR MANUFACTURING AN OPTICAL FILTER MATRIX, OPTICAL FILTER MATRIX AND SPECTROMETRY DEVICE USING SUCH A MATRIX
WO2000074140A1 (en) * 1999-06-02 2000-12-07 Intel Corporation Image sensor response enhancement using fluorescent phosphors
EP1239270A1 (en) * 2001-02-21 2002-09-11 Horiba, Ltd. Optical detector
US20040239939A1 (en) * 2003-05-28 2004-12-02 Onera Stationary fourier transform spectrometer
US20070145236A1 (en) * 2005-12-22 2007-06-28 Palo Alto Research Center Incorporated Photosensing throughout energy range and in subranges
DE102006039071A1 (en) * 2006-08-09 2008-02-21 Universität Kassel Making optical filter array with two distributed Bragg reflectors and intervening Fabry Perot filter elements, employs nano-imprint procedure to form differentiated filter cavities

Also Published As

Publication number Publication date
WO2008139379A2 (en) 2008-11-20
TW200915551A (en) 2009-04-01

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