WO2008136084A1 - Turbo-molecular pump - Google Patents

Turbo-molecular pump Download PDF

Info

Publication number
WO2008136084A1
WO2008136084A1 PCT/JP2007/058740 JP2007058740W WO2008136084A1 WO 2008136084 A1 WO2008136084 A1 WO 2008136084A1 JP 2007058740 W JP2007058740 W JP 2007058740W WO 2008136084 A1 WO2008136084 A1 WO 2008136084A1
Authority
WO
WIPO (PCT)
Prior art keywords
turbo
molecular pump
rotation axis
vane
rotary
Prior art date
Application number
PCT/JP2007/058740
Other languages
French (fr)
Japanese (ja)
Inventor
Kouta Oishi
Original Assignee
Shimadzu Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corporation filed Critical Shimadzu Corporation
Priority to JP2009512818A priority Critical patent/JP5141684B2/en
Priority to PCT/JP2007/058740 priority patent/WO2008136084A1/en
Publication of WO2008136084A1 publication Critical patent/WO2008136084A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

A turbo-molecular pump comprises plural stages of a rotary vane with blades extending radially from a rotating body and a fixed vane with blades arranged radially relative to the rotation axis of the rotary body, which are arranged alternately to each other. The height of the blade installed on the rotary vane in the direction of the rotation axis becomes smaller toward the outer periphery of the rotor.
PCT/JP2007/058740 2007-04-23 2007-04-23 Turbo-molecular pump WO2008136084A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009512818A JP5141684B2 (en) 2007-04-23 2007-04-23 Turbo molecular pump
PCT/JP2007/058740 WO2008136084A1 (en) 2007-04-23 2007-04-23 Turbo-molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/058740 WO2008136084A1 (en) 2007-04-23 2007-04-23 Turbo-molecular pump

Publications (1)

Publication Number Publication Date
WO2008136084A1 true WO2008136084A1 (en) 2008-11-13

Family

ID=39943207

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/058740 WO2008136084A1 (en) 2007-04-23 2007-04-23 Turbo-molecular pump

Country Status (2)

Country Link
JP (1) JP5141684B2 (en)
WO (1) WO2008136084A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010025002A (en) * 2008-07-22 2010-02-04 Osaka Vacuum Ltd Turbo molecular pump
JP2020122429A (en) * 2019-01-30 2020-08-13 株式会社島津製作所 Turbomolecular pump
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades
GB2618348A (en) * 2022-05-04 2023-11-08 Edwards Ltd Rotor blade for a turbomolecular vacuum pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01195992A (en) * 1988-01-30 1989-08-07 Naoto Ibarada Moving blade of turbo molecular pump
JPH0261387A (en) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd Turbomolecular pump
JPH1089284A (en) * 1996-09-12 1998-04-07 Seiko Seiki Co Ltd Turbo-molecular pump

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941699A (en) * 1982-08-31 1984-03-07 Shimadzu Corp Improved turbo-type vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01195992A (en) * 1988-01-30 1989-08-07 Naoto Ibarada Moving blade of turbo molecular pump
JPH0261387A (en) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd Turbomolecular pump
JPH1089284A (en) * 1996-09-12 1998-04-07 Seiko Seiki Co Ltd Turbo-molecular pump

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010025002A (en) * 2008-07-22 2010-02-04 Osaka Vacuum Ltd Turbo molecular pump
JP4519185B2 (en) * 2008-07-22 2010-08-04 株式会社大阪真空機器製作所 Turbo molecular pump
JP2020122429A (en) * 2019-01-30 2020-08-13 株式会社島津製作所 Turbomolecular pump
JP7052752B2 (en) 2019-01-30 2022-04-12 株式会社島津製作所 Turbo molecular pump
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades
GB2618348A (en) * 2022-05-04 2023-11-08 Edwards Ltd Rotor blade for a turbomolecular vacuum pump
WO2023214169A1 (en) * 2022-05-04 2023-11-09 Edwards Limited Rotor blade for a turbomolecular vacuum pump
GB2618348B (en) * 2022-05-04 2024-05-29 Edwards Ltd Rotor blade for a turbomolecular vacuum pump

Also Published As

Publication number Publication date
JPWO2008136084A1 (en) 2010-07-29
JP5141684B2 (en) 2013-02-13

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