WO2008135069A1 - Spiegel, gehäuse und infrarotgerät sowie verfahren zum herstellen derselben - Google Patents
Spiegel, gehäuse und infrarotgerät sowie verfahren zum herstellen derselben Download PDFInfo
- Publication number
- WO2008135069A1 WO2008135069A1 PCT/EP2007/004062 EP2007004062W WO2008135069A1 WO 2008135069 A1 WO2008135069 A1 WO 2008135069A1 EP 2007004062 W EP2007004062 W EP 2007004062W WO 2008135069 A1 WO2008135069 A1 WO 2008135069A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mirror
- housing
- infrared
- side wall
- pressing
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/10—Mirrors with curved faces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0808—Mirrors having a single reflecting layer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/30—Transforming light or analogous information into electric information
- H04N5/33—Transforming infrared radiation
Definitions
- the present invention relates to a mirror, a housing and an infrared device as well as a method for manufacturing the mirror and a method for producing a housing with such a mirror.
- Infrared or thermal imaging cameras are becoming more widespread, for example, to locate leaks in the heat insulation of a building.
- lenses made of special materials are used, since glasses for the visible range of light absorb the long-wave infrared radiation.
- infrared optics for wavelengths of 8 .mu.m to 14 .mu.m zinc-selenium, germanium or silicon compounds are often used.
- germanium such as Amtir® or Gasir®
- Amtir® or Gasir® have been used to produce the optics for the infrared cameras. Due to the use of these materials or glasses, the lenses can indeed be pressed, so that the manufacturing process is less expensive than with the use of zinc selenium, germanium or silicon compounds, but the required starting materials such. B. germanium, still relatively expensive.
- Another way to reduce the manufacturing cost of infrared or thermal imaging cameras instead of a refractive optics, w. for example, a lens, a reflective optics, such. For example, gel to use in the infrared optics.
- mirror optics for such systems used in the infrared range are produced by machining a surface by means of grinding or turning, diamonds being used for this purpose be used as a tool.
- These production processes are therefore very expensive due to the tools required for this, so that the production costs for such mirrors or mirror optics are high.
- the object of the present invention is to provide a mirror, a housing with a mirror and an infrared device, which is cheaper to manufacture, and a method for producing the same.
- the present invention provides a mirror with a double curved surface formed by pressing or casting.
- the present invention provides a housing with a mirror having a double-curved surface formed by pressing or casting.
- the present invention provides an infrared device with an infrared sensor or an infrared source and a mirror with a double-curved surface formed by pressing or casting.
- the present invention provides a method of manufacturing a mirror with a dual curved surface comprising pressing or molding a molding or molding material into a mold.
- the present invention provides a method for manufacturing a housing having a mirror with a double-curved surface, which is located in an interior of the housing
- Housing is formed, wherein the method comprises pressing or pouring a molding or potting material into a mold, so that forms in the interior of the housing, the two-fold curved surface.
- the present invention is based on the finding that a mirror with a doubly curved surface, the z. B. is suitable for use in an infrared system, may have a higher surface roughness than a conventional mirror, so that this mirror can be formed by pressing or casting. In this way, the production costs for such mirrors can be reduced, whereby the production costs for infrared or thermal imaging cameras can be reduced.
- the roughness or surface roughness indicates the extent to which the shape of the surface can deviate from the ideal shape.
- Such infrared systems have an optical system which has at least one mirror with a doubly curved surface.
- two or even more mirrors are arranged, since they allow an additional degree of freedom in the construction of the optics, which is accompanied by increased flexibility in designing the structure of the optics.
- the fact that two or more mirrors are used in such embodiments of infrared systems, the cost of the mirror is increased in such infrared systems.
- the manufacturing costs can be lowered even in such infrared systems by the mirrors are formed with the doubly curved surface by means of a pressing or casting, which reduces the reduction of the costs to an even greater extent proportionally to the total manufacturing cost.
- the manufacturing costs for such infrared systems can be reduced even more in percentage terms.
- free-form surfaces can be used to correct or correct higher-order aberrations in order to form the mirrors, wherein Body can be formed with such free-form surfaces in a simple manner by pressing or casting and only the production of such a mold or mold is associated with increased effort, while produced with the mold or mold thus produced a plurality of suitably constructed mirror with corresponding free-form surfaces can be.
- the manufacturing costs for such infrared systems can be reduced significantly. This fact results from the fact that a conventional production of the mirror by means of a turning or grinding is very complicated and expensive, while the production costs can be reduced by the use of a corresponding mold or press in the manufacture that they of mirrors whose Form is described by a simple curve, or simply curved mirrors correspond.
- FIG. 1 is a cross-sectional view of an infrared optical system according to a first embodiment of the present invention
- FIG. 2 is a cross-sectional view of an infrared optical system according to a second embodiment of the present invention
- FIG. 3 is a cross-sectional view of an infrared optical system according to a third embodiment of the present invention.
- 4 is a cross-sectional view of an infrared optical system according to a fourth embodiment of the present invention.
- Fig. 5 shows a mold for producing a housing for the infrared optics and a structure of the infrared optics produced therewith.
- FIG. 1 shows a cross-sectional view of an infrared optical system or an infrared device 11 according to a first exemplary embodiment of the present invention.
- the infrared optics 11 are arranged in a housing 13, whose first side wall has a recess at an opening 13a, and whose second side wall opposite the first side wall has a second opening 13b.
- a transparent or infrared-transparent cover 15 is fastened to the first side wall of the housing 13, which completely covers the opening 13a and closes an interior of the housing 13.
- the lid 15 can also be designed as a correction plate as in a Schmidt telescope, the structure will be explained later in more detail.
- the lid 15 can also serve as a lens, and can be designed as a Fresnel lens.
- An infrared sensor 17 is arranged on the second side wall in which the second opening 13b is formed which serves to detect an incident infrared radiation or heat To detect radiation in its intensity or its position.
- a surface of the housing 13 facing the interior of the infrared optics 11 forms a first mirror 19, which is characterized by a doubly curved surface, wherein the surface is curved to two mutually perpendicularly arranged axes. Furthermore, the surface of the housing 13 facing the interior of the infrared optics 11 is characterized by a double curvature in a further area, so that a second mirror 21 is formed in the wider area of the surface.
- the double curvature of the surface or the inner surface of the housing 13 in the region of the mirrors 19, 21 is also characterized by a curvature or a linear curve to two mutually perpendicular axes.
- the infrared sensor 17 detects and detects the incident first infrared ray Ll.
- a second infrared ray L2 from the first mirror 19 and the second mirror 21 entering through the transparent lid 15 is deflected toward the infrared sensor 17, so that the sensor 17 also detects the second infrared ray L2.
- the infrared optical system 11 shown in FIG. 1 is therefore in the Position by the deflection of the infrared rays, which is explained here by way of example on the basis of the deflection of the first infrared beam Ll and the second infrared beam L2, a heat image of an arranged in front of the transparent cover 15 infrared source not shown here on the infrared sensor 17 to project.
- a heat image of an arranged in front of the transparent cover 15 infrared source not shown here on the infrared sensor 17 to project.
- the infrared optics according to a first embodiment of the present invention that the mirror 19, 21, in contrast to a telescope structure, which will be explained later in one embodiment of infrared optics, not opposite, so that the non-opposing mirror surfaces can be made by casting or pressing a suitable material into an appropriate shape. Since the mirror surfaces are not facing each other, simple shapes can be used to realize the twofold curvature of the surfaces. In connection with the mutually offset mirrors 19, 21, one also speaks of offset mirrors.
- the structure of the infrared optics 11 is particularly advantageous in that the first mirror 19 is opposite the first opening 13a and the second mirror 21 is opposite the second opening 13b.
- the infrared optics 11 can be produced in a simple manner by, for example, pressing or casting a plastic material into a prefabricated mold, and then through the first opening 13a or the second opening 13b a metal, such as a metal.
- a metal such as a metal.
- aluminum on a the inside of the housing This facing surface is vapor-deposited, so that forms a reflective layer of the aluminum material in a region of the first mirror 19 and a region of the second mirror 21 on the housing surface.
- FIG. 31 A cross-sectional view of another infrared optical system 31 according to a second embodiment of the present invention is illustrated in FIG.
- the same or equivalent elements to the infrared optics 11 shown in FIG. 1 are given the same reference numerals in accordance with a first embodiment of the present invention.
- the description of the infrared optical system shown in FIG. 2 according to a second embodiment of the present invention is limited to a description of the differences from the infrared optical system shown in FIG. 1 according to a first embodiment of the present invention.
- a shutter cover 33 is fixed to the second side wall of the housing 13 so as to cover the second opening 13b. Furthermore, a recess is formed in a wall of the housing 13, in which a shutter 35a is arranged. A surface or outer surface of the third side wall is arranged perpendicular to the surface of the first housing side wall or the surface of the second housing side wall.
- Attached to the shutter 35a is a shutter 35b whose position can be changed by the shutter 35a such that the shutter 35b has a portion of a third opening 37 in the casing 13 extending from the inside of the casing to the surface of the third side wall extends, covers or exposes.
- the infrared sensor 17 is fastened to the third side wall such that the sensor 17 completely covers the third opening 37 in the housing 13.
- the second mirror 21 is modified to adapt the incident infrared rays L 1, L 2 to the deflected at the third opening 37 arranged infrared sensor 17.
- the infrared optics 31 according to a second exemplary embodiment of the present invention are also characterized by a bent beam path resulting from a modified surface shape of the second mirror 21 in the case of the infrared optics 31 according to a second exemplary embodiment present invention.
- the inner housing surface or the surface of the second mirror 21 is shaped such that the infrared rays L1, L2 are not deflected to the second opening 13b but to the third opening 37.
- Fig. 3 shows a cross-sectional view of an infrared optics, but an infrared optics 51 according to a third embodiment of the present invention.
- the same or similar reference numerals to those of the optical system 11 shown in Fig. 1 according to a first embodiment of the present invention are given the same reference numerals.
- a description of the structure and operation of the elements is limited to a description of the differences from the infrared optical system 11 shown in FIG.
- the infrared optics 51 have a first transparent cap 53 a and a second transparent cap 53 b, which are arranged in a recess in a front wall of the housing 13.
- the infrared sensor 17 is attached to the rear wall so that it completely covers the rear wall opening 55 of the housing 13.
- the rear wall opening 55 extends from the outer upper surface of the rear wall into the interior of the housing 13.
- a rear wall mirror 57 is applied on a surface of the rear wall facing the interior of the housing.
- the rear wall mirror 57 has a first region 57a and a second region 57b, which are at least partially separated from one another by the opening 55.
- the first region 57a faces the first transparent cap 53a
- the second region 57b faces the second transparent cap 53b.
- the rear wall mirror 57 is z. B. by means of a reflective layer, which is applied to a housing interior facing surface of the back wall of the housing 13, or the rear wall 13 is itself made of a reflective material.
- the surface of the rear wall mirror 57 has a double curvature or a curvature to two mutually perpendicular axes, wherein the surface can be produced in a simple manner by pressing or casting the material of the rear wall in a mold.
- an inner mirror 59 is arranged, whose surface also has a double curvature.
- the infrared rays L1, L2 are incident on the inside of the housing 13 through the first transparent cap 53a and the second transparent cap 53b, and are incident on the surface of the rear wall mirror 57. They are deflected from there to the surface of the interior mirror 59, and in turn are influenced or deflected by the latter in their course in such a way that they impinge on the infrared sensor 17 arranged above the rear wall opening 55.
- the infrared optics shown in Fig. 3 thus has an arrangement as in a Schmidt telescope.
- the first transparent cap 53a and the second transparent cap 53b which may also be designed to influence a course of the infrared rays L1, L2 penetrating them, at the same time form a protective window of the infrared optics 51.
- the caps 53a, 53b may advantageously be cost-effective. tig made of silicon, and by means of processing steps, which are known from microelectronics, structured. It would also be conceivable embodiment of the caps 53 a, 53 b made of plastic, such. As transparent transparent polyimides, wherein the caps 53a, 53b could also be pressed. This leads to a reduction in the manufacturing cost of the transparent caps 53a, 53b, whereby the manufacturing cost of the infrared optical system 51 can be further reduced.
- FIG. 4 shows a cross-sectional view of an infrared optical system 71 according to a fourth exemplary embodiment of the present invention.
- identical or uniform elements to the infrared optical system 11 according to a first embodiment of the present invention will be given the same reference numerals.
- a description of the construction and operation of the elements in the infrared optical system 71 according to a fourth embodiment of the present invention is limited to a description of the differences from the infrared optical system 11 shown in FIG.
- the infrared optics 71 has a window 73 which is fixed in a recess of the front side wall of the housing 13, and a mirror 75, which is applied to a housing interior facing surface of the rear side wall of the housing 13.
- one surface of the mirror region 75 is curved twice or has a curvature relative to two axes arranged perpendicular to one another, the mirror region, similar to the mirrors 19, 21, 57, 59, being produced by applying a reflective layer on the rear housing wall is, or is formed by a reflective material such.
- the surface of the mirror region 75 is shaped in such a way that the infrared rays L 1, L 2 incident through the incidence region or the window 73 impinge on the surface of the mirror region 75 facing the interior of the housing, and are deflected or reflected by the latter in such a way that they impinge on the sensitive area of the infrared sensor 17.
- the arrangement of the infrared optical system 71 shown in FIG. 4 has a configuration which is referred to as a Ritchey-Chretien configuration.
- the mold 80 consists of a first piece 81 and a second piece 83 which are fastened to each other to form a continuous shape. From the first piece 81 projects a first portion 85 which extends into an interior of the mold 80 and from the second piece 83 projects a second portion 87 which extends into the interior of the mold 80.
- the protruding portions 85, 87 are disposed on the first piece 81 and the second piece 83 so that when the first piece 81 and the second piece 83 are joined together, the side surface of the first protruding portion 85 facing the second protruding portion 87 coincides with the first protruding portion 85 the second protruding portion 87 facing side surface of the first protruding portion 85 is arranged coplanar.
- a coplanar arrangement is understood to mean an arrangement of the two side surfaces relative to one another so that they are arranged coplanar with each other within a tolerance of 2 mm or even 0.1 mm, that is to say a distance between the mutually facing side surfaces of the sections 85, 87 in one region less than 2 mm.
- the surfaces or inner surfaces of the mold 80 have a twofold curvature, so that a doubly curved surface is created or formed in a subsequent molding or casting.
- the infrared optics 11 To produce the infrared optics 11 while a potting material such. As plastic, poured or pressed into the mold 80 serving as a tool, so that the structure shown, the infrared optics 11 forms. Depending on the material, the surfaces serving as a mirror are subsequently metallized after being pressed or cast. The metallization takes place z. Example by means of a sputtering of the surface with aluminum. However, if the housing itself is made of a reflective material, such. As aluminum is executed, this step is no longer necessary.
- the infrared sensor 17 or the image sensor or the transparent cover 15 or the protective cover 15 is fastened to the housing 13 and thus connected thereto.
- the infrared sensor 17 or the lid 15 can be fastened by means of a pressing, gluing or clipping in a cost effective manner to the housing 13.
- one or two mirrors 19, 21, 57, 59, 75 are arranged in an interior of the housing 13.
- any number of mirrors serving to deflect the infrared rays L1, L2 are alternatives thereto.
- the mirrors 19, 21, 57, 59, 75 in this case have a doubly curved surface, wherein a ratio of the radii of curvature to mutually perpendicular axes may be, for example, in a range of 0.1 to 10.
- a reflectivity of the mirror 19, 21, 57, 59, 75 can be z. B. are in a range above 0.9 or in a range above 90%.
- any ratios of the radii of curvature are other and any values of the reflectivity in further embodiments of the mirror conceivable. It is also conceivable that the mirrors 19, 21, 57, 59, 75 have a curvature of their surface to two mutually different non-mutually perpendicular axes.
- the mirrors 19, 21, 57, 59, 75 can be embodied such that they reflect or reflect an infrared radiation having a wavelength in a range of 3 ⁇ m to 5 ⁇ m or of 8 ⁇ m to 14 ⁇ m, that is to say the reflectivity for infrared rays has a value greater than 0.9 in these wavelength ranges, wherein the value of the degree of reflection for a light beam with a wavelength of less than 0.7 ⁇ m may also be in a range below 0.5, for example.
- any characteristics of the mirrors 19, 21, 57, 59, 75 as a function of a wavelength of the infrared radiation or of the light are alternatives for this purpose.
- a roughness of the surface of the mirror 19, 21, 57, 59, 75 is for example in a range of 0.3 .mu.m to 3 .mu.m or a 0.125-fold to 0.25-times a wavelength of a reflected infrared beam current whose wavelength z. B. in a range of 3 microns to 5 microns or a range of 8 microns to 14 microns, however, any values of the roughness of the mirror surface are alternatives.
- the mirrors 19, 21, 57, 59, 75 are manufactured so that they z. B. are integrally formed with the housing 13 by the housing 13 z. B.
- any methods of making the mirrors 19, 21, 57, 59, 75, or the housing 13 with said mirrors having a pressing or pouring step are alternatives thereto.
- any steps of manufacturing the mirrors wherein the mirrors are not deposited on an inner surface of a housing but are formed on any two-fold curved surface by any step of application such as sticking or vapor deposition. This could be z.
- a reflective film may be adhered to the doubly curved surface of a base body, the reflective layer may be applied by means of sputtering, or a reflective material may be applied to the doubly curved surface by means of a galva- nization. It would even be conceivable to produce the mirror by applying a dye to the curved surface.
- the lid 15, the transparent caps 53 a, 53 b or the window 73 are made of a translucent or infrared ray-permeable material, which may for example also differ from a material of the housing 13. It is conceivable any materials from which the lid 15, the transparent caps 53 a, 53 b and the window 73 may be performed.
- the first side wall and the second side wall are arranged to be parallel with each other, or their surfaces enclose an angle in a range of 170 to 190 degrees. The same also applies to an alignment of the front wall and the rear wall in the infrared optics 51 or the front side wall and the rear side wall in the infrared optics 71.
- any arrangements of said walls to each other are conceivable.
- the third side wall is disposed perpendicular to the first side wall or the second side wall so that the surface of the third side wall and the first side wall or the second side wall subtends an angle of 80 ° to 100 °.
- any arrangements of the third side wall are too the first side wall or the second side wall in further embodiments of the infrared optics 11, 31 conceivable.
- the covers 15, 33, 53a, 53b, 73 are fastened to the side wall of the housing 13 by means of press-fitting, gluing or clipping, but any methods of attaching the covers to the housing 13 are conceivable ,
- the infrared optics 11, 31, 51, 71 of the infrared sensor 17 may be completely fixed in the interior of the housing 13, in a recess in the housing wall or on the side wall of the housing 13.
- the mirrors 13, 19 are arranged in the infrared optics 11, 31 so that they are offset from one another, but any arrangements of the mirrors 19, 21 for this purpose are alternatives. Also, the mirrors 19, 21 are arranged at the infrared optics 11, 31 so as to be opposed to the openings 13a, 13b and overlap with them in a viewing direction perpendicular to the side wall of the housing 13, however, any arrangement of the mirrors 19 is 21 in the housing 13 for this purpose alternatives.
- the housing 13 or the mirrors 19, 21, 57, 75 are produced, for example, by pressing or casting a molding material or a casting material into the mold 80.
- the mold 80 consists of the two parts or pieces 81, 83 which have the protruding portions 85, 87.
- the windows or the covers 15, 73 or the caps 53a, 53b in the case of the infrared optics 11, 31, 51, 71 such that they can influence the beam path of the infrared rays L1, L2 and can thus be used as correcting plates.
- the window could be made of silicon, a plastic material or any transparent to the infrared radiation material.
- This could also cover 15, 73 as a lens, such. B. as a Fresnel lens, be executed.
- a portion of the surface inside the case may be structured such that a reflectance for an infrared ray current impinging on the surface in the patterned region is smaller than that on the mirror 19, 21, 57, 59, 75 incident infrared beam current, wherein in the region of the structured surface z. B. grooves could be arranged.
- a ratio of the reflectance of the surface in the structured region to a reflectance in the region of the mirror 19, 21, 57, 59, 75 at an incident infrared beam current whose wavelength z. B. in a range of 3 microns to 5 microns or a range of 8 microns to 14 microns, are between 0.1 and 0.7.
- any embodiments of the surface inside the housing 13 are alternatives.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Lenses (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/599,031 US20130182121A1 (en) | 2007-05-08 | 2007-05-08 | Mirror, casing and infrared device and method of manufacturing same |
DE112007003491T DE112007003491A5 (de) | 2007-05-08 | 2007-05-08 | Spiegel, Gehäuse und Infrarotgerät sowie Verfahren zum Herstellen derselben |
PCT/EP2007/004062 WO2008135069A1 (de) | 2007-05-08 | 2007-05-08 | Spiegel, gehäuse und infrarotgerät sowie verfahren zum herstellen derselben |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2007/004062 WO2008135069A1 (de) | 2007-05-08 | 2007-05-08 | Spiegel, gehäuse und infrarotgerät sowie verfahren zum herstellen derselben |
Publications (1)
Publication Number | Publication Date |
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WO2008135069A1 true WO2008135069A1 (de) | 2008-11-13 |
Family
ID=38935929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2007/004062 WO2008135069A1 (de) | 2007-05-08 | 2007-05-08 | Spiegel, gehäuse und infrarotgerät sowie verfahren zum herstellen derselben |
Country Status (3)
Country | Link |
---|---|
US (1) | US20130182121A1 (de) |
DE (1) | DE112007003491A5 (de) |
WO (1) | WO2008135069A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130055952A1 (en) * | 2011-03-11 | 2013-03-07 | Applied Materials, Inc. | Reflective deposition rings and substrate processing chambers incorporting same |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10582095B2 (en) | 2016-10-14 | 2020-03-03 | MP High Tech Solutions Pty Ltd | Imaging apparatuses and enclosures |
US11765323B2 (en) | 2017-05-26 | 2023-09-19 | Calumino Pty Ltd. | Apparatus and method of location determination in a thermal imaging system |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU456053B2 (en) * | 1971-04-28 | 1974-11-21 | Combined Optical Industries Limited | Improvements in and relating to mirrors |
US4623228A (en) * | 1984-10-25 | 1986-11-18 | United Technologies Corporation | Composite mirror substrate |
US5864434A (en) * | 1995-01-13 | 1999-01-26 | Raytheon Company | Plastic mirrors having enhanced thermal stability |
EP1154289A1 (de) * | 2000-05-09 | 2001-11-14 | Alcan Technology & Management AG | Reflektor |
-
2007
- 2007-05-08 US US12/599,031 patent/US20130182121A1/en not_active Abandoned
- 2007-05-08 WO PCT/EP2007/004062 patent/WO2008135069A1/de active Application Filing
- 2007-05-08 DE DE112007003491T patent/DE112007003491A5/de not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU456053B2 (en) * | 1971-04-28 | 1974-11-21 | Combined Optical Industries Limited | Improvements in and relating to mirrors |
US4623228A (en) * | 1984-10-25 | 1986-11-18 | United Technologies Corporation | Composite mirror substrate |
US5864434A (en) * | 1995-01-13 | 1999-01-26 | Raytheon Company | Plastic mirrors having enhanced thermal stability |
EP1154289A1 (de) * | 2000-05-09 | 2001-11-14 | Alcan Technology & Management AG | Reflektor |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130055952A1 (en) * | 2011-03-11 | 2013-03-07 | Applied Materials, Inc. | Reflective deposition rings and substrate processing chambers incorporting same |
US9905443B2 (en) * | 2011-03-11 | 2018-02-27 | Applied Materials, Inc. | Reflective deposition rings and substrate processing chambers incorporating same |
Also Published As
Publication number | Publication date |
---|---|
DE112007003491A5 (de) | 2010-04-08 |
US20130182121A1 (en) | 2013-07-18 |
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