WO2008133183A1 - Capteur d'accélération du type à capacitance - Google Patents

Capteur d'accélération du type à capacitance Download PDF

Info

Publication number
WO2008133183A1
WO2008133183A1 PCT/JP2008/057519 JP2008057519W WO2008133183A1 WO 2008133183 A1 WO2008133183 A1 WO 2008133183A1 JP 2008057519 W JP2008057519 W JP 2008057519W WO 2008133183 A1 WO2008133183 A1 WO 2008133183A1
Authority
WO
WIPO (PCT)
Prior art keywords
pair
glass substrate
weight section
acceleration sensor
capacitance type
Prior art date
Application number
PCT/JP2008/057519
Other languages
English (en)
Japanese (ja)
Inventor
Manabu Tamura
Tsuyoshi Sugawara
Chisato Iwasaki
Original Assignee
Alps Electric Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co., Ltd. filed Critical Alps Electric Co., Ltd.
Publication of WO2008133183A1 publication Critical patent/WO2008133183A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Pressure Sensors (AREA)

Abstract

Le capteur d'accélération du type à capacitance selon l'invention a une sensibilité d'une excellente linéarité et présente une structure simple. Une paire d'électrodes fixes (12) est formée sur une surface principale d'un substrat en verre (11). Les électrodes fixes (12) de la paire sont agencées à des positions faisant face à une électrode mobile. Un substrat en silicium (13) est joint à la surface principale du substrat en verre (11), et le substrat en silicium (13) a une section de poids (13a), qui est l'électrode mobile, et une paire de sections de poutre (13b) pour supporter les extrémités opposées de la section de poids (13a). Les sections de poutre (13b) sont agencées à des positions qui sont proches de la surface inférieure de la section de poids (13a) et qui sont éloignées du centre ou d'une extrémité de la section de poids (13a). En outre, la paire d'électrodes fixes (12) est placée, en vue plane, à une position symétrique par rapport aux sections de poutre (13b). Un substrat en verre (14) est joint au substrat en silicium (13) du côté opposé au substrat en verre (11).
PCT/JP2008/057519 2007-04-20 2008-04-17 Capteur d'accélération du type à capacitance WO2008133183A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007111311 2007-04-20
JP2007-111311 2007-04-20
JP2007230698 2007-09-05
JP2007-230698 2007-09-05

Publications (1)

Publication Number Publication Date
WO2008133183A1 true WO2008133183A1 (fr) 2008-11-06

Family

ID=39925639

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057519 WO2008133183A1 (fr) 2007-04-20 2008-04-17 Capteur d'accélération du type à capacitance

Country Status (1)

Country Link
WO (1) WO2008133183A1 (fr)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010055716A1 (fr) * 2008-11-13 2010-05-20 三菱電機株式会社 Capteur d'accélération
EP2479579A1 (fr) * 2011-01-24 2012-07-25 Freescale Semiconductor, Inc. Are Capteur MEMS avec double masses sismiques
JP2014510932A (ja) * 2011-04-13 2014-05-01 ノースロップ グラマン ガイダンス アンド エレクトロニクス カンパニー インコーポレイテッド 加速度計システムおよび方法
JP2014174165A (ja) * 2013-03-05 2014-09-22 Analog Devices Inc 改善されたオフセットおよびノイズ性能を有する傾斜モード加速度計
WO2014156119A1 (fr) * 2013-03-27 2014-10-02 株式会社デンソー Capteur de quantité physique
JP2014190808A (ja) * 2013-03-27 2014-10-06 Denso Corp 加速度センサ
JP2014190806A (ja) * 2013-03-27 2014-10-06 Denso Corp 容量式物理量センサ
JP2014209082A (ja) * 2013-03-27 2014-11-06 株式会社デンソー 加速度センサ
CN104459200A (zh) * 2013-09-18 2015-03-25 上海矽睿科技有限公司 三轴加速度计
US9470709B2 (en) 2013-01-28 2016-10-18 Analog Devices, Inc. Teeter totter accelerometer with unbalanced mass
US10073113B2 (en) 2014-12-22 2018-09-11 Analog Devices, Inc. Silicon-based MEMS devices including wells embedded with high density metal
US10078098B2 (en) 2015-06-23 2018-09-18 Analog Devices, Inc. Z axis accelerometer design with offset compensation

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09189716A (ja) * 1995-11-07 1997-07-22 Temic Telefunken Microelectron Gmbh 超小型機械的加速度センサ
JP2005529336A (ja) * 2002-06-11 2005-09-29 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 多軸モノリシック加速度センサ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09189716A (ja) * 1995-11-07 1997-07-22 Temic Telefunken Microelectron Gmbh 超小型機械的加速度センサ
JP2005529336A (ja) * 2002-06-11 2005-09-29 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 多軸モノリシック加速度センサ

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010055716A1 (fr) * 2008-11-13 2010-05-20 三菱電機株式会社 Capteur d'accélération
EP2479579A1 (fr) * 2011-01-24 2012-07-25 Freescale Semiconductor, Inc. Are Capteur MEMS avec double masses sismiques
CN102608354A (zh) * 2011-01-24 2012-07-25 飞思卡尔半导体公司 具有双检验块的mems传感器
JP2012154919A (ja) * 2011-01-24 2012-08-16 Freescale Semiconductor Inc デュアルプルーフマスを有するｍｅｍｓセンサ
US8539836B2 (en) 2011-01-24 2013-09-24 Freescale Semiconductor, Inc. MEMS sensor with dual proof masses
JP2014510932A (ja) * 2011-04-13 2014-05-01 ノースロップ グラマン ガイダンス アンド エレクトロニクス カンパニー インコーポレイテッド 加速度計システムおよび方法
US9470709B2 (en) 2013-01-28 2016-10-18 Analog Devices, Inc. Teeter totter accelerometer with unbalanced mass
US9297825B2 (en) 2013-03-05 2016-03-29 Analog Devices, Inc. Tilt mode accelerometer with improved offset and noise performance
JP2014174165A (ja) * 2013-03-05 2014-09-22 Analog Devices Inc 改善されたオフセットおよびノイズ性能を有する傾斜モード加速度計
JP2014190808A (ja) * 2013-03-27 2014-10-06 Denso Corp 加速度センサ
JP2014190806A (ja) * 2013-03-27 2014-10-06 Denso Corp 容量式物理量センサ
JP2014209082A (ja) * 2013-03-27 2014-11-06 株式会社デンソー 加速度センサ
WO2014156119A1 (fr) * 2013-03-27 2014-10-02 株式会社デンソー Capteur de quantité physique
CN104459200A (zh) * 2013-09-18 2015-03-25 上海矽睿科技有限公司 三轴加速度计
US10073113B2 (en) 2014-12-22 2018-09-11 Analog Devices, Inc. Silicon-based MEMS devices including wells embedded with high density metal
US10078098B2 (en) 2015-06-23 2018-09-18 Analog Devices, Inc. Z axis accelerometer design with offset compensation

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