WO2008114929A1

WO2008114929A1 - Connector device

Info

Publication number: WO2008114929A1
Application number: PCT/KR2008/000594
Authority: WO
Inventors: Naoki Nakamura; Ik Sung Doh
Original assignee: Absco., Ltd.
Priority date: 2007-03-16
Filing date: 2008-01-31
Publication date: 2008-09-25

Abstract

The present invention relates to a connector device used to inspect electrical characteristics of a semiconductor wafer. The present invention provides a connector device comprising a male connector connected to a probe card, a female connector connected to a PCB of semiconductor inspection equipment, the male connector comprising a second housing for receiving contact pins formed by a plurality of second ground pins and second signal pins, and an insert member and an insert pin to be inserted into the female connector, the female connector comprising a first housing for receiving contact pins formed by a plurality of first ground pins and first signal pins, and a locking lever for locking a male connector with a female connector, and the first ground pin of the female connector being slidingly locked with the second ground pin of the male connector by a locking device, and the first signal pin of the female connector being electrically connected to the second signal pin of the male connector.

Description

CONNECTOR DEVICE

Technical Field

[1] The present invention relates to a connector device, more specifically, to a connector device that connects a probe card with a PCB (Printed Circuit Board) of semiconductor inspection equipment electrically/mechanically so as to inspect electrical characteristics of a semiconductor wafer. Background Art

[2] Generally, inspection equipment for inspecting a chip on a semiconductor wafer requires very high precision level. A connector device connecting a probe card with a PCB semiconductor inspection equipment as well as a probe card having thousands of probe pins to be contacted with a semiconductor wafer requires very high reliability. Especially, a connector device transmitting electric signal between probe card and semiconductor inspection equipment plays an important role in product reliability. In addition, shortening inspection time with enhancing reliability of inspection is an important task in light of mass production of semiconductor industry.

[3] One example of a connector device is shown in Fig. 1 to Fig. 3. The connector device shown in Fig. 1 to 3 is disclosed in Korean Patent Registration No. 10-0364065. Fig. 1 is a cross-sectional view showing assembling status of a connecting part (40) to a connector (50), Fig. 2 is a perspective view illustrating contact pins, and Fig. 3 is a schematic view of locking condition of the contact pin.

[4] In a conventional connector device shown in Fig. 1 to 3, a connecting part (40) is inserted into a connector (50). The conventional connector device has an electric terminal (48). The electric terminal (48) is a form of a pin and supported by a terminal supporting member (44). The terminal supporting member (44) includes a signal pin for transmitting electric signal and a ground pin for earth. In this specification, the term of a contact pin means a signal pin and/or a ground pin.

[5] The connecting part (40) is fixed on a substrate (30) by a rivet (42). A numeral 46 denotes a reinforcing plate.

[6] The connecting part (40) is detachably inserted into a connector (50) and a plurality of contact pins (70) is configured in the inside of the connector (50) to contact with the electric terminal (48) of the contacting part (40). The contact pin (50) is supported by a housing (68) and has a contact portion (74) that contacts with the electric terminal (48). When the contacting part (40) is inserted into the connector (50), the electric terminal (48) comes into contact with the contact pin (70). In the conventional connector device shown in Fig. 1 to 3, the contacting part (40) and the connector (50) correspond to a male connector and a female connector of the present invention respectively. Also, the electric terminal (48) and the contact pin (70) in Fig. 1 to 3 correspond to a contact pin of male connector and a contact pin of female connector of the present invention respectively.

[7] The contact pin (70), as shown in Fig. 2, is composed of a plurality of signal pins and ground pins arranged in a horizontal direction. The electric terminal (48) is inserted into the inside of the contact pin (70). Also, the signal pin and ground pin have the same structure.

[8] The contact pin (70), as shown in Fig. 3, has a contact portion (74) of bent shape to come into contact with the electric terminal (48). A pressing member (78) is arranged outside of the contact portion (74) so as to press the contact pin (70) toward the electric terminal (48) and keep in contact with the electric terminal (48). The pressing member (78) includes a rotation cam (72) and a rotation cam support member (76), and brings the contact pin (70) into contact with the electric terminal (48). The rotation cam (72) includes a circumference portion (75) and a strait portion (77), and is rotated by a rotation cam driving part (not shown). When the pressing member (78) presses the contact pin (70), the contact portion comes into contact with the electric terminal (48), thereby transmitting an electric signal.

[9] However, in the conventional connector device, the flat electric terminal (48) comes into contact with a protruding contact portion (74). Thus, the contact area of "A"portion in Fig. 3 is changed at the time of connection. This leads to a change of electric current at "A"portion where the electrical terminal (48) contacts with a contact pin (70).

[10] Once the flow of electric current is changed, it is difficult to transmit accurate electric signal because impedance is changed. Subsequently, the reliability of inspection procedure of a semiconductor wafer is deteriorated notwithstanding inspection procedure requires high precision standards. As described above, mass production of a semiconductor wafer requires high-speed and high-precision inspection procedure. However, the conventional connector device cannot satisfy the above r equirement.

[11] Furthermore, the conventional connector device is problematic in that electric interference can be generated between a signal pin and a ground pin.

[12] Another problem is that locking is incomplete because an electric terminal comes in contact with a contact pin by pushing a contact pin using a cam of semicircle shape. Disclosure of Invention Technical Problem

[13] Taking into account the above problems inherent in the prior art, it is an object of the present invention to match impedance of a contact pin of a female connector with that of a male connector, thus preventing transmitted electric signal from changing.

[14] Another object of the present invention is to arrange a signal pin and a ground pin as a pair having different shape, thus enhancing assembling efficiency and space applicability.

[15] A further object of the present invention is to transmit electric signal quickly and preclude electric interference by improving the shape of a signal pin.

[16] A still further object of the present invention is to provide a locking system that can fixedly lock a male connector with a female connector and detach it with ease. Technical Solution

[17] In order to achieve the above objects, the present invention provides a connector device comprising a male connector connected to a probe card to inspect electrical characteristics of a semiconductor wafer, a female connector connected to a PCB (Printed Circuit Board) of semiconductor inspection equipment, the male connector comprising a second housing for receiving contact pins formed by a plurality of second ground pins and second signal pins arranged in a horizontal direction, and an insert member and an insert pin to be inserted into the female connector, the female connector comprising a first housing for receiving contact pins formed by a plurality of first ground pins and first signal pins arranged in a horizontal direction, and a locking lever for locking a male connector with a female connector, and the first ground pin of the female connector being slidingly locked with the second ground pin of the male connector by a locking device, and the first signal pin of the female connector being electrically connected to the second signal pin of the male connector.

[18] According to the connector device of the present invention, the contact surface of the first ground pin and the second ground pin is an inclined plane respectively.

[19] According to the connector device of the present invention, the contact surface of the first signal pin and the second signal pin is an inclined plane respectively.

[20] According to the connector device of the present invention, the first ground pin and the first signal pin of the female connector are alternatively arranged in pairs in a horizontal direction.

[21] According to the connector device of the present invention, the second ground pin and the second signal pin of the male connector are alternatively arranged in pairs in a horizontal direction.

[22] According to the connector device of the present invention, the first ground pin, the second ground pin, the first signal pin and the second signal pin have different shapes each other.

[23] According to the connector device of the present invention, the first ground pin comprises an inclined portion with a gentle curve at one end and a convex portion to be coupled to the second ground pin at the other end.

[24] According to the connector device of the present invention, the second ground pin comprises a concave portion corresponding to the convex portion of the first ground pin and comprises an inwardly bent portion at one end.

[25] According to the connector device of the present invention, the second signal pin comprises an outwardly bent portion toward the opposite bent direction of the second ground pin.

[26] According to the connector device of the present invention, the locking device comprises a locking lever configured at one end of a female connector, a rotation shaft rotated by a rotation of the locking lever, a rotation plate coupled by a first connecting shaft and a second connecting shaft, a rotation cam connected to the rotation shaft, a connecting member connected to the rotation cam, and a slider coupled to the connecting member so as to slide the first ground pin downwardly toward the concave portion of the second ground pin.

[27] According to the connector device of the present invention, the rotation cam is arranged at both sides, and is connected by a pair of fourth connecting shaft, and is rotated in an opposite direction with regard to a rotational direction of the locking lever.

[28] According to the connector device of the present invention, the slider comprises a concave portion of semicircle shape and an opened portion of rectangular shape, and the both outer sides of the opened portion comprise a circular arc portion corresponding to the outer shape of the first ground pin.

[29] According to the connector device of the present invention, the rotation cam of a female connector slides along the rail formed inside of a second housing of a male connector, and makes the rotation cam and the locking lever unlocked condition automatically when a male connector is inserted into a female connector.

Advantageous Effects

[30] The connector device of the present invention provides an effect that impedance of contact pins can be matched by making the contact point of a female connector and a male connector inclined plane, thus enabling a connector device to transmit stable electric signal.

[31] Further, the connector device of the present invention provides an effect that assembling efficiency is enhanced by forming a signal pin and a ground pin differently each other and arranging a signal pin and a ground pin in a pair, thus precluding electrical interference.

[32] Still further, the connector device of the present invention provides an effect that more contact pin can be arranged by reducing a gap between contact pins, thus shortening inspection time for probing a wafer. [33] Yet still further, the connector device of the present invention provides an effect that the female connector and male connector are stably connected without fail electrically and mechanically.

Brief Description of the Drawings [34] The above and other objects, features and advantages of the present invention will become apparent from the following description of preferred embodiments given in conjunction with the accompanying drawings, in which: [35] Fig. 1 is a cross-sectional view showing assembling status of a connecting part to a connector according to a conventional connector device; [36] Fig. 2 is a perspective view showing contact pins of Fig 1;

[37] Fig. 3 is a schematic view showing locking condition of the contact pin of Fig. 1;

[38] Fig. 4 is a perspective view showing a connector device in accordance with the present invention; [39] Fig. 5 is an exploded perspective view showing a female connector and a male connector of the present invention; [40] Fig. 6 is an exploded perspective view showing a female connector of the present invention; [41] Fig. 7 is a perspective view showing assembled connector pins in accordance with the present invention; [42] Fig. 8 is a perspective view showing a pair of contact pins in accordance with the present invention; [43] Fig. 9 is a view showing unlocked condition of the contact pin in accordance with the present invention; [44] Fig. 10 is a view showing locked condition of the contact pin in accordance with the present invention;

Mode for the Invention [45] Preferred embodiments of a connector device according to the present invention will now be described in detail with reference to the accompanying drawings. [46] Fig. 4 is a perspective view showing a connector device in accordance with the present invention, Fig. 5 is an exploded perspective view showing a female connector and a male connector of the present invention, Fig. 6 is an exploded perspective view showing a female connector of the present invention, Fig. 7 is a perspective view showing assembled connector pins in accordance with the present invention, Fig. 8 is a perspective view showing a pair of contact pins in accordance with the present invention, Fig. 9 is a view showing unlocked condition of the contact pin in accordance with the present invention, and Fig. 10 is a view showing locked condition of the contact pin in accordance with the present invention.

[47] Before explaining the characteristics of the present invention, the general structure of a connector device will be explained.

[48] A connector device is used to connect a PCB of semiconductor inspection equipment with a probe card for probing a semiconductor on a wafer in the process of inspecting electrical characteristics of a semiconductor wafer. The connector device has to connect a semiconductor inspection device with a probe card stably and precisely in terms of electrical and mechanical connection.

[49] Generally, a connector device is composed of combination of a female connector and a male connector. The male connector is electrically connected to a probe card for probing a chip on a wafer. The female connector is connected to a PCB coupled to semiconductor inspection equipment, and transmits the condition of chip on the wafer acquired by a probe card as in the form of electric signal to the semiconductor inspection equipment.

[50] When a male connector is connected to a female connector, certain insertion force is needed to precisely connect the contact pins electrically.

[51] At this time, if an insertion force is strong, electric contact efficiency can be enhanced. However, a friction force is increased at the same time, thus making it difficult to insert/detach a male connector to/from a female connector. Specifically, in case a lot of contact pins are arranged in a female connector or plural male connectors have to be inserted into plural female connectors at the same time, very strong insertion force is needed.

[52] In order to solve the above problems, a connector without insertion force is proposed. The connector is usually called as "ZIF" (Zero Insertion Force) connector"because an insertion force is not necessary when inserting a male connector into a female connector. In the ZIF connector, a locking lever is used to connect a male connector to female connector electrically/mechanically after a male connector is inserted into a female connector. The present invention is a kind of the ZIF connector.

[53] Even in the ZIF connector, the relative position of a male connector can deviate from its exact position at the time of inserting a male connector into a female connector. In case of requiring high precision connection status, a minute deviation of relative position can raise a severe problem. Accordingly, an extra space is needed for contact pins in a ZIF connector. Therefore, the number of contact pin is restricted in a ZIF connector.

[54] Generally, a very high reliability is required in semiconductor inspection equipment used for inspecting minute semiconductor. Specifically, in order to inspect huge amount of semiconductor quickly and precisely, a connector device has to transmit an electric signal very quickly and precisely.

[55] Furthermore, in order to inspect various semiconductor parts, various substrates are needed including a probe for contacting a semiconductor. Also, a connector used in semiconductor inspection equipment has to be manufactured to receive and detach the various substrates with ease.

[56] In addition, when a male connector is inserted into a female connector, impedance of the contact pins of a male and female connector has to be matched each other. Otherwise, it is impossible to transmit exact electric signal.

[57] A probe card for probing a chip on a wafer is connected to dozens or hundreds of male connectors. The male connector is inserted into a female connector connected to inspection equipment. When a male connector is inserted into a female connector, electrical stability becomes an important problem. Specifically, when a male connector is inserted into a female connector, a male connector has to be completely locked with a female connector mechanically so as not to be disconnected.

[58] The present invention is proposed in consideration of the above-mentioned problems. Fig. 4 is a perspective view showing a connector device according to the present invention and Fig. 5 is an exploded perspective view showing a female connector and a male connector according to the present invention.

[59] A connector device of the present invention, as shown in Fig. 4 and Fig. 5, comprises a male connector (200) connected to a probe card (not shown) and a female connector (300) connected to a PCB (305) of semiconductor inspection equipment.

[60] The male connector (200), as shown in Fig. 5, includes a second housing (201) that has a pair of contact pins (203) on both sides. A plurality of insert members (206) to be inserted into a female connector (300) is arranged at both ends of a male connector (200). An insert pin (205) of round shape is arranged at one side of the second housing (201) of a male connector (200). In Fig. 5, the insert pin (205) is arranged at one end of the second housing (201). However, the insert pin (205) can be arranged at both sides of the second housing (201) of the male connector (200).

[61] A contact pin (203) of a male connector (200), as shown in Fig. 7 and Fig. 8, includes a plurality of second ground pins (203b) and second signal pins (203a) arranged at both sides in a horizontal direction.

[62] The female connector (300), as shown in Fig. 6, includes a first housing (301) having a plurality of contact pins (303) at both sides. A locking device for locking a male connector (200) with a female connector (300) is configured at one side of the first housing (301) of a female connector (300).

[63] The locking device, as shown in Fig. 6, Fig. 9 and Fig. 10, comprises a locking lever (302a) configured at one end of a female connector (300), a rotation shaft (312b) rotated by a rotation of the locking lever (302a), a rotation plate (310) coupled by a first connecting shaft (308) and a second connecting shaft (309), a rotation cam (304) connected to the rotation shaft (310), a connecting member (307) connected to the rotation cam (304), and a slider (306) coupled to the connecting member (307) so as to slide the first ground pin (303b) downwardly toward the concave portion (203c) of the second ground pin (203b). The rotation cam (304) is connected by a pair of fourth connecting shafts (312) inside of the first housing (301) and is rotated in an opposite direction with regard to a rotational direction of the locking lever (302a).

[64] A slider (306), as shown in Fig. 9 and Fig. 10, comprises upper concave portion of semicircle shape where the connecting member (307) is engaged and a lower opened portion of rectangular shape. Also, the both outer sides of the opened portion of the slider (306) have a circular arc portion corresponding to the outer shape of the first ground pin (303b).

[65] According to the locking device, a first ground pin (303b) of a female connector

(300) is slidingly locked with a second ground pin (203b) of a male connector (200) by rotating the locking lever (302a). At this time, the convex portion of the first ground pin (303b) comes into contact with the concave portion of the second ground pin (203b), thus connecting the first ground pin (303b) of a female connector (300) with the second ground pin (203b) of a male connector (200) electrically. At the same time, a first signal pin (303a) of a female connector (300) and a second signal pin (203a) of a male connector (200) are electrically connected (refer to Fig. 8).

[66] When a male connector (200) is inserted into a female connector (300), the rotation cam (304) of a female connector (300) slides along the rail (not shown) formed inside of a second housing (201) of a male connector (200), and makes the rotation cam (304) and the locking lever (302a) unlocked condition automatically.

[67] In this condition, a male connector (200) can be locked to a female connector (300) by rotating a locking lever (302a).

[68] The contact pin (203, 303) of a male connector (200) and a female connector (300) of the present invention are arranged as shown in Fig. 7.

[69] That is, the first ground pin (303b) and the first signal pin (303a) of the female connector (300) are alternatively arranged in pairs in a horizontal direction. The second ground pin (203b) and the second signal pin (203a) of the male connector (200) are alternatively arranged in pairs in a horizontal direction.

[70] By arranging the contact pins (203, 303) in pairs, it is possible to preclude electric interference, thus reducing the gap between first signal pins (303a) and first ground pins (303b), and a second signal pin (203a) and second ground pin (203b). Therefore, it is possible to arrange more contact pins in a predetermined space, thus shortening inspection time.

[71] Hereinafter, the construction of contact pins according to the present invention will be described in detail with reference to Fig. 8.

[72] As mentioned above, a pair of contact pins consists of a first ground pin (303b), second ground pin (203b), first signal pin (303a) and second signal pin (203a).

[73] Specifically, the first ground pin (303b), second ground pin (203b), first signal pin

(303a) and second signal pin (203a) have different shapes each other.

[74] The first ground pin (303b) comprises an inclined portion with a gentle curve at one end and a convex portion (303c) at the other end to be coupled to the second ground pin (203b) of a male connector (200).

[75] The second ground pin (203b) comprises a concave portion (203c) corresponding to the convex portion (303c) of the first ground pin (303b) of a female connector (300). A male connector (200) can be locked with a female connector (300) by connecting the convex portion (303c) of the first ground pin (303b) to the concave portion (203c) of the second ground pin (203b). The one end of the second ground pin (203b) is inwardly bent.

[76] The second signal pin (203a) comprises an outwardly bent portion toward the opposite bent direction of the second ground pin (203b).

[77] Preferably, the contact surface of the first ground pin (303b) and second ground pin

(203b), and the contact surface of the first signal pin (303a) and second signal pin (203a) have an inclined plane respectively.

[78] The flow of electric current can be constantly maintained by forming the contact surface as an inclined plane. Subsequently, unlike in the conventional connector device, it is possible to prevent impedance from changing, thus precluding change of electric signal.

[79] Also, it is preferred that the structure of a first signal pin (303a) and second signal pin (203a) have simple shape compared to a first ground pin (303b) and second ground pin (203b). This is to transmit electric signal without fail and to improve electrical characteristics. Accordingly, it is possible to prevent impedance from changing and maintain electrically stable condition.

[80] Meanwhile, as shown in Fig. 8, a first ground pin (303b) has a convex portion

(303c), and a second ground pin (203b) has a concave portion (203c) corresponding to a concave portion (303c) of a first ground pin (303b). The convex portion (303c) of the first ground pin (303b) is engaged with the concave portion (203c) of the second ground pin (203b) when a male connector (200) is locked with a female connector (300).

[81] According to the present invention, an inclined section of the first ground pin

(303b) located in the middle potion of the female connector (300) comes into contact with the inclined section of the second ground pin (203b) located at one end of the male connector (200)(refer to Cl). At the same time, the convex portion (303c) of the first ground pin (303b) of the female connector (300) comes into contact with the concave portion (203c) of the second ground pin (203b) of the male connector (200)(refer to C2).

[82] That is, the contact condition of the first signal pin (303a) and second signal pin

(203a) is an inclined plane contact at Cl point, and the contact condition of the first ground pin (303b) and second ground pin (203b) is an inclined plane contact at Cl point and is a curved surface contact at C2 point.

[83] In other words, the first ground pin (303b) comes into contact with the second ground pin (203b) at Cl point (inclined plane contact) and at C2 point (curved surface contact). Therefore, at the time of inserting a male connector into a female connector, a contact force is dispersed, and connection can be stably accomplished.

[84] Meanwhile, it is preferred that the concave portion (203c) of the second ground pin

(203b) is a little larger than the convex portion (303c) of the first ground pin (303b). In this construction, the second ground pin (203b) can be raised a little upwardly. This makes it possible to enhance contact condition at Cl point.

[85] As set forth in the forging, a probe card is connected to a male connector (200), and semiconductor inspection equipment is connected to a female connector (300) via PCB (305). When the PCB (305) is inserted into a female connector (300), an electric terminal of PCB (305) comes into contact with contact pins of first ground pins (303b) and first ground pins (303a) of a female connector (300).

[86] Even though the PCB (305) is inserted in a bent condition, the electric terminal of a

PCB (305) can be inserted with ease because the first ground pin (303b) and first signal pin (303a) have elasticity like a spring.

[87] Also, the female connector (300) and male connector (200) can maintain mechanically perfect locking condition because the convex portion (303c) of the first ground pin (303b) is engaged with the concave portion (203c) of the second ground pin (203b).

[88] Next, referring to Fig. 9 and Fig. 10, the locking structure of a female connector

(300) and a male connector (200) will be described.

[89] Fig. 9 shows unlocked condition of the contact pin when the first ground pin (303b) of female connector (300) is not locked with the second ground pin (203b) of male connector (200), and Fig. 10 shows locked condition of the contact pin when the first ground pin (303b) of female connector (300) is locked with the second ground pin (203b) of male connector (200) in accordance with the present invention.

[90] When a male connector (200) is inserted into a female connector (300), the rotation cam (304) of a female connector (300) slides along the rail (not shown) formed inside of a second housing (201) of a male connector (200), and makes the rotation cam (304) and the locking lever (302a) unlocked condition automatically as shown in Fig. 9. This is to prevent contact pins from contacting each other in a locking condition when a male connector (200) is inserted into a female connector (300) for the first time.

[91] In this unlocking condition, if a locking lever (302a) of a female connector (300) is moved to the right direction in Fig. 9, a rotation plate (310) connected to the locking lever (302a) by a first connecting shaft (308) and second connecting shaft (309) is rotated to the right direction.

[92] If the rotation plate (310) is rotated to the right direction, a rotation cam (304) coupled to the rotation plate (310) is rotated to the left direction, pushing a connecting member (307) coupled to the rotation cam (304) downwardly. Then, the connecting member (307) pushes a slider (306) coupled to the connecting member (307) downwardly, and the slider (306) moves downwardly to press the convex portion (303c) of the first ground pin (303b) toward the concave portion (203c) of the second ground pin (203b), thus locking a female connector (300) with a male connector (200).

[93] According to the locking structure of the present invention, a female connector

(300) can be mechanically locked to a male connector (200) without fail because the convex portion (303c) of the first ground pin (303b) of a female connector (300) comes into contact with the concave portion (203c) of the second ground pin (203b) of a male connector (200), and then the first ground pin (303b) of a female connector (300) is pressed by a slider (306).

[94] In case of disassembling a connector device, it is possible to detach a male connector (200) from a female connector (300) after rotating a locking lever (302a) to the left direction.

[95] While the present invention has been shown and described in respect to one preferred embodiment, this is for the illustrative purpose only and is not intended to limit the scope of the invention by no means. It will be understood by those skilled in the art that various changes and modifications may be made thereto without departing from the spirit and scope of the invention as defined in the following claims. Industrial Applicability

[96] As described in the foregoing, the present invention is directed to a connector device used to inspect electric characteristics of semiconductor water, and can be widely applied to semiconductor industry.

Claims

[1] A connector device including a male connector (200) connected to a probe card to inspect electrical characteristics of a semiconductor wafer, and a female connector (300) connected to a PCB (Printed Circuit Board)(305) of semiconductor inspection equipment characterized in that: the male connector (200) comprises a second housing (201) for receiving contact pins (203) formed by a plurality of second ground pins (203b) and second signal pins (203a) arranged in a horizontal direction, and an insert member (206) and an insert pin (205) to be inserted into the female connector (300), the female connector (300) comprises a first housing (301) for receiving contact pins (303) formed by a plurality of first ground pins (303b) and first signal pins (303a) arranged in a horizontal direction, and a locking lever (302a) for locking a male connector (200) with a female connector (300), and the first ground pin (303b) of the female connector (300) is slidingly locked with the second ground pin (203b) of the male connector (200) by a locking device, and the first signal pin (303a) of the female connector (300) is electrically connected to the second signal pin (203a) of the male connector (200).

[2] The connector device according to claim 1, wherein the contact surface of the first ground pin (303b) and the second ground pin (203b) is an inclined plane respectively.

[3] The connector device according to claim 1, wherein the contact surface of the first signal pin (303a) and the second signal pin (203a) is an inclined plane respectively.

[4] The connector device according to claim 1, wherein the first ground pin (303b) and the first signal pin (303a) of the female connector (300) are alternatively arranged in pairs in a horizontal direction.

[5] The connector device according to claim 1, wherein the second ground pin

(203b) and the second signal pin (203a) of the male connector (200) are alternatively arranged in pairs in a horizontal direction.

[6] The connector device according to claim 1, wherein the first ground pin (303b), the second ground pin (203b), the first signal pin (303a) and the second signal pin (203a) have different shapes each other.

[7] The connector device according to claim 6, wherein the first ground pin (303b) comprises an inclined portion with a gentle curve at one end and a convex portion (303c) to be coupled to the second ground pin (203b) at the other end.

[8] The connector device according to claim 6, wherein the second ground pin

(203b) comprises a concave portion (203c) corresponding to the convex portion (303c) of the first ground pin (303b) and comprises an inwardly bent portion at one end.

[9] The connector device according to claim 6, wherein the second signal pin (203a) comprises an outwardly bent portion toward the opposite bent direction of the second ground pin (203b).

[10] The connector device according to claim 1, wherein the locking device comprises a locking lever (302a) configured at one end of a female connector (300), a rotation shaft (312b) rotated by a rotation of the locking lever (302a), a rotation plate (310) coupled by a first connecting shaft (308) and a second connecting shaft (309), a rotation cam (304) connected to the rotation shaft (310), a connecting member (307) connected to the rotation cam (304), and a slider (306) coupled to the connecting member (307) so as to slide the first ground pin (303b) downwardly toward the concave portion (203c) of the second ground pin (203b).

[11] The connector device according to claim 10, wherein the rotation cam (304) is arranged at both sides, and is connected by a pair of fourth connecting shafts (312), and is rotated in an opposite direction with regard to a rotational direction of the locking lever (302a).

[12] The connector device according to claim 10, wherein the slider (306) comprises a concave portion of semicircle shape and an opened portion of rectangular shape, and wherein the both outer sides of the opened portion comprise a circular arc portion corresponding to the outer shape of the first ground pin (303b).

[13] The connector device according to claim 1, wherein the rotation cam (304) of a female connector (300) slides along the rail formed inside of a second housing (201) of a male connector (200), and makes the rotation cam (304) and the locking lever (302a) unlocked condition automatically when a male connector (200) is inserted into a female connector (300).