WO2008110036A1 - Dispositif et méthode de correction - Google Patents

Dispositif et méthode de correction Download PDF

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Publication number
WO2008110036A1
WO2008110036A1 PCT/CN2007/000820 CN2007000820W WO2008110036A1 WO 2008110036 A1 WO2008110036 A1 WO 2008110036A1 CN 2007000820 W CN2007000820 W CN 2007000820W WO 2008110036 A1 WO2008110036 A1 WO 2008110036A1
Authority
WO
WIPO (PCT)
Prior art keywords
calibration
value
correction
measured
information
Prior art date
Application number
PCT/CN2007/000820
Other languages
English (en)
Chinese (zh)
Inventor
Gang Peng
Original Assignee
HUANG, Jintong
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HUANG, Jintong filed Critical HUANG, Jintong
Priority to PCT/CN2007/000820 priority Critical patent/WO2008110036A1/fr
Priority to CN200780052133A priority patent/CN101657695A/zh
Publication of WO2008110036A1 publication Critical patent/WO2008110036A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/56—Gauges for measuring angles or tapers, e.g. conical calipers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02—Details
    • G01C9/06—Electric or photoelectric indication or reading means

Definitions

  • the present invention relates to the field of measurement, and in particular to an apparatus for correcting measured information and a method of correcting the same. Background technique
  • the existing measuring device such as the angle measuring device uses a potentiometer
  • the potential difference information of the potentiometer corresponds to the information of the object to be measured
  • the measurement information can be stored, transmitted or displayed to the user in an electronic form.
  • the resolution and measurement accuracy of such measuring devices are often determined by the precision of various specialized devices, such as dedicated high-precision encoders, tilt or angle sensors, angular displacement sensors, Hall elements or optocouplers, etc.
  • the price of the device ranges from tens of dollars to several thousand dollars, resulting in expensive measuring devices, which is not conducive to universal application.
  • the measurement device using a low-resolution or low-measurement device has low measurement accuracy, and the measurement result is susceptible to environmental influence, and the performance is not satisfactory. Summary of the invention
  • the present invention in combination with the calibration device using the ordinary potentiometer, high-precision measurement can be realized, P strives for lowering the accuracy of the potentiometer, and reduces the manufacturing cost of the measuring device.
  • the invention can simultaneously realize the calibration of the calibration device, has high practicability and precision, and is easy to popularize and use.
  • the invention provides a correction device, comprising: a measurement unit, which acquires measured information of the object to be tested; a storage unit stores correction data for correcting the measured information; and a correction unit that corrects the measured information according to the correction data to form a calibration result.
  • the calibration data includes a calibration value and corresponding calibration information, and the plurality of sets of calibration data form a calibration data table;
  • the at least one measured information is subjected to at least one correction to form at least one calibration result.
  • a user interface unit is further included to output a correction result to the user, and further includes a data interface unit connected to the correction unit.
  • the invention also proposes a method for correcting measured measured information, comprising: obtaining correction data based on the measured information; and calculating a correction result based on the measured information and the corrected data.
  • the calibration data includes first calibration information and a first calibration value, and second calibration information and a second calibration value.
  • the calibration result is the sum of the first calibration value and the correction value; the correction value is the ratio of the difference between the measured information and the first calibration information to the difference between the second calibration information and the first calibration information, and multiplied by the second calibration value.
  • the difference from the first calibration value is obtained.
  • the information, ml and m2 are the first calibration value and the second calibration value, respectively, and M is the calibration result.
  • the invention also provides a calibration method for the calibration device, comprising: setting at least one calibration value in advance; obtaining at least one measured information corresponding to the at least one calibration value, setting the measured information as calibration information; and setting at least one calibration value and The calibration information corresponding thereto constitutes at least one set of correction data.
  • FIG. 1 is a schematic view of a first embodiment of the present invention applied to an angle measuring device;
  • FIG. 2 is a schematic view of a control circuit of a first embodiment of the present invention;
  • FIG. 3 is a schematic diagram of a calibration data table according to a first embodiment of the present invention.
  • FIG. 4 is a schematic flow chart of a measurement process of a first embodiment of the present invention.
  • FIG. 5 is a flow chart showing the calibration process of the first embodiment of the present invention.
  • FIG. 6 is a schematic flow chart of a calibration process according to a first embodiment of the present invention.
  • FIG. 7 is a schematic illustration of a control circuit of a second embodiment of the present invention. The objects, functions, and advantages of the invention will be described in conjunction with the accompanying drawings. detailed description
  • the correction device of the first embodiment of the present invention is applied to the field of angle measurement.
  • a schematic view of an angle measuring device 100 is shown, which comprises a body 1 and a measuring rod 2, the measuring rod 2 being rotatably connected to the body 1, for example by means of an articulated shaft 3.
  • the angle measuring device 100 can have its own power supply, such as a battery power supply, or an external power supply.
  • a correction device is included in the angle measuring device 100.
  • Fig. 2 there is shown a schematic diagram of a correction device control circuit 101 of an embodiment of the present invention, including a correction unit 11, which is coupled to a measurement unit 12 and a storage unit 14, respectively.
  • the measuring unit 12 can adopt a variable resistor as a linear potentiometer, and the resistance value of the variable resistor changes according to an angle change between the main body 1 of the angle measuring device 100 and the measuring rod 1; wherein, the main body 1 and the measuring rod 2 The angle between them corresponds to the angle to be measured.
  • the measuring unit 12 converts the resistance value of the variable resistor to the measured potential value.
  • the correcting unit 11 receives the measured potential value corresponding to the measured angle sent by the measuring unit 12, and forms a corresponding measured AD value by analog-to-digital conversion, and then corrects the measured AD value to form a calibration result.
  • the angle measuring device 100 of the present embodiment may further include a user interface unit 13 that outputs a correction result to the user in accordance with a command outputted by the correcting unit 11 to output a correction result.
  • the user interface unit 13 can adopt one or more of a liquid crystal panel, a digital display, a buzzer, a speaker, an indicator light, or a pointer.
  • the storage unit 14 of the present embodiment implements nonvolatile storage of data by using an EEPROM or EEPROM erasable storage medium.
  • the storage unit 14 may be a separate unit or integrated in the processing unit 11.
  • the storage unit 14 stores a series of correction data which form a correction data table.
  • An example of the correction data table is shown in Fig. 3.
  • Each of the correction data includes a calibration angle value and a corresponding calibration AD value.
  • _ sets a linear relationship between two adjacent calibration AD values, for example, the calibration AD value changes according to a proportional relationship with a calibration angle value.
  • the values of the present invention are the first calibration information and the second calibration information. Calculate the deviation between the measured AD value and the calibrated AD value. According to the relationship between the two calibrated AD values, the deviation is converted into the corrected angle value ⁇ m, and the corrected angle value ⁇ ra is calculated in conjunction with the calibrated angle value corresponding to the calibrated angle value.
  • the result angle M is obtained, and the result angle M is the correction result; if the measured AD value exceeds the correction data If the range of the value of the AD value is calibrated in the table, it is considered that the calibration fails, and the measured potential value A is converted into the measured angle value m to form a correction result of the calibration failure, and the measured angle value m is output.
  • the angle measuring process of the angle measuring device 100 of this embodiment is as shown in FIG. 4:
  • the measuring rod 2 of the rotation angle measuring device 100 is caused to have a measured angle with the main body 1;
  • the resistance value is converted into the measured potential value A;
  • the correction angle value A m is calculated, that is, the correction value; according to the correction formula ( 2 ), according to the correction angle value ⁇ m and the calibration angle value ml calculate the result angle M as a correction result, proceed to S109;
  • a command for outputting a calibration result is sent to the user interface unit 13, the command including the calibration result, returning to the angle measurement process, and the calibration process ends.
  • the correction formula (1) used in S107 in the above calibration process is:
  • M m2 - ⁇ ( 4 ) can also give the result angle ⁇ .
  • the example illustrates the angle measurement process of this embodiment:
  • the measuring rod 2 of the angle measuring device 100 is rotated to a measured angle with the main body 1, and the variable resistor generates a resistance value corresponding to the measured angle, and is converted into the measured potential value A.
  • the measured potential value A is converted by the modulus of the correction unit 11 to generate a corresponding measured AD value X, X is 5936; the correcting unit 11 queries the storage unit 14 for two calibration data whose calibration AD value is close to X, and the returned correction data is obtained. as follows:
  • the smaller calibration AD value XI is 5901, the corresponding calibration angle value ml is 53.1°, the larger calibration AD value X2 is 6002, and the corresponding calibration angle value m2 is 54.0. ;
  • the resulting angle M is 53. 412. . It is further assumed that the measuring rod 2 is rotated to another measured angle with the main body 1, and a corresponding measured potential value A is generated, and the potential value A is converted by the modulus of the correcting unit 11 to obtain a corresponding measured AD value X, which is 20000.
  • the correcting unit 11 queries the storage unit 14 for two calibration data that are similar to the calibration of the AD value and X, and obtains the corrected data as follows:
  • the measured AD value X' is equal to one of the calibrated AD values X2, which is 20000, calculated according to the above correction formula (1) and the correction formula (1):
  • the resulting angle M is 180. 0°. It is also assumed that the measuring rod 2 is rotated to a further measured angle with the main body 1, and a corresponding measured potential value A" is generated, which is converted by the modulus of the correcting unit 11 to obtain a corresponding measured AD value X, ' , for 20300, the correcting unit 11 queries the storage unit 14 for the two calibration data with the closest AD value and X", and finds that X" exceeds the data range of the calibration AD value in the calibration data table, that is, the measured angle exceeds the correction range. , the query error message is returned. "FAILURES correction unit 11 cannot find a valid AD value in the return information.
  • the two calibration AD values in the above calibration process that are close to the measured AD value X may be two calibration AD values closest to the measured AD value X in the correction data table, or may be two closer to the measured AD value X. It is also possible to calibrate the AD value; of course, one calibration AD value is equal to the measured AD value, and the other calibration AD value is a calibration AD value close to the measured AD value.
  • the calibrated AD value when the measured AD value X is 5936, the calibrated AD value may be the closest 5901 and 6002 to 5936, or may be 6002 and 6110 which are closer to 5936; when the measured AD value X is 20000, the calibrated AD value may be 20000 and 19906, or 19800 and 19906, select specific query rules based on measurement accuracy and actual conditions.
  • the two calibration AD values XI and X2 which are close to the measured AD value X are directly returned to the correction unit 11 in the memory unit 14.
  • the calibration data table can also be divided into multiple data segments. For example, the calibration AD value is divided into one segment for each increment of about 1000, or every 20 calibration data is divided into one segment.
  • the correcting unit 11 issues a query command to the storage unit 14 according to the measured AD value X, and the range of values for the calibration AD value includes the partial correction data of the measured AD value X, and returns the correction data, and the correction unit 11 will query the correction again. Data, find two calibration AD values that are close to the measured AD value X.
  • the S102 to S107 part of the correction process is:
  • querying the calibration data table, and retrieving the calibration AD value range includes the partial correction data of the measured AD value X;
  • the principle of the calibration process is: preset a plurality of known calibration angle values, the calibration of this embodiment
  • the measuring unit 12 of the positive device respectively generates a corresponding resistance value for each calibration angle value, and converts into a calibration potential value
  • the correction unit 11 receives each calibration potential value and converts it into a corresponding value
  • the AD value is a calibration AD value
  • the angle value and the paired calibration AD value constitute a correction data stored in the storage unit 14.
  • the calibration process includes presetting at least one calibration angle value; obtaining corresponding measured information according to the at least one calibration angle value, setting the measured information as calibration information; and setting at least one calibration angle value and corresponding calibration information At least one set of correction data is constructed.
  • the calibration angle value is preset, or the sampling angle range and the preset sampling angle number are preset, and the calibration angle value of each sampling angle can be calculated according to the sampling angle number and the sampling angle range.
  • the stepping motor can be connected to the measuring unit 12 of the correcting device using a driving device such as a stepping motor driving correction device, and the variable resistance of the stepping motor driving measuring unit 12 generates a nominal resistance value corresponding to each of the calibration angle values.
  • the measuring unit 12 is connected to the stepping motor
  • the driving measurement unit generates a calibration resistance value for the calibration angle value
  • the calibration range is set to 0. 0° ⁇ 180. 0°, and 201 calibration angle values are taken in the range, and the calibration angle values are sequentially incremented by 0.9°, corresponding to the stepping angle of the stepping motor. 9° ⁇ The interval is 0. 9 °, that is, each time the measurement unit 12 is rotated, the calibration angle value is increased by 0.9. With reference to Fig. 6, starting from the calibration angle value of 0. 0°, the calibration AD value is set to 0, and stored in the calibration data table, returning to S33, driving the measurement unit 12 to 0.
  • the value is generated and the calibration AD value is 98, stored in the calibration data table, and returned to S33, and then the driving measurement unit 12 is rotated to 1.8°, and the calibration AD value is generated to be 203, and the calibration data is stored. Table, back to S33... One cycle is performed until the calibration angle value reaches 180. 0.
  • the calibration AD value is 20000, and after being stored in the calibration data table, it is judged that the calibration angle value reaches the predetermined calibration range, and the calibration process is ended.
  • the calibration AD does not necessarily have the same calibration AD value for each calibration angle value, and the calibration process should be performed separately for each calibration device.
  • various calibration schemes can be employed, for example, larger or smaller step angle intervals can be set, such as 0. ⁇ or 1. 5. Etc.; You can set more or less calibration angle values, such as 100 or 800.
  • the calibration accuracy and accuracy of the calibration device after calibration are also different.
  • the above calibration method uses a stepping motor as a potentiometer driving device, and the measuring rod 2 of the angle measuring device 100 in which the stepping motor drives the correcting device rotates around the hinge shaft 3, so that an angle is generated between the measuring rod 2 and the main body 1, the stepping motor Each time it is stepped, the measuring rod 2 is driven to rotate by an angle.
  • the above calibration method can also separately perform the calibration process of the variable resistor of the calibration device, and automatically obtain multiple sets of calibration data at one time, which is convenient and quick in actual production, and can be used for mass production.
  • other driving devices or other schemes may be employed to cause the calibration device to calibrate a plurality of calibration angle values to obtain correction data.
  • the above angle measuring device can also adopt other mechanical structures, and is not limited to the main body 1 and the measuring rod 2, the main body 1 and the measuring rod 2 are hinged by the hinge shaft 3, and the measuring rod 2 can be rotated about the hinge shaft 3 to form an angle with the main body 1.
  • the measuring unit 12 is also not limited to being mounted in the hinge shaft 3, but may be mounted at other positions of the angle measuring device.
  • the control circuit of the above correction device can also be implemented by other components or circuit structures, and is not limited to the solution described in the above embodiments.
  • the calibrating range of the calibrating device of the present embodiment is determined by the measuring range of the angle measuring device and the calibration range of the calibrating device, and the mechanical structure of the angle measuring device and the setting of the calibration range can be realized to be 0. 0° ⁇ 90. 0°, Measurement and correction of angles from 0. 0° - 185°, even 0. 0° ⁇ 360°.
  • the correction mechanism used in the embodiment is used for correcting the measured measured information to obtain high-precision and high-accuracy calibration results in the case where the accuracy of the measuring unit of the angle measuring device is not high, thereby achieving high completion with ordinary devices. Accuracy, high accuracy angle measurement of.
  • the calibration device is calibrated in advance, and the calibration data table is stored in the storage unit 14, and the measured AD value is corrected by the correction data in the calibration data table to form a more accurate and more accurate calibration result.
  • the correction device of the second embodiment is proposed based on the above embodiment, which is applied to the field of angle measurement, and the correction device comprises a correction unit 11 which is connected to the measurement unit 12, the user interface unit 13, and the storage unit 14, respectively.
  • the present embodiment stores the result data in the storage unit 14, and the plurality of correction results can form a result data table.
  • the user performs at least one measurement using the angle measuring device, and obtains at least one calibration result stored in the storage unit 14, respectively. After the measurement is completed, the stored calibration result is called for unified processing.
  • the user interface unit 13 of the present embodiment sets the corresponding display device and sounding device to output the correction result to the user.
  • the angle measuring device of this embodiment further includes a setting unit 15 for receiving setting information of the user for the angle measuring device and transmitting the setting information to the correcting unit 11.
  • the setting unit 15 includes one or more of a button, a knob, a keyboard, a toggle switch, and a slider.
  • the information set by the user includes controlling storage, sorting, deleting or recalling the calibration result, and displaying the accuracy of the calibration result.
  • the setting unit 15 may further include a zero adjustment button 151 for the user to zero.
  • the user combines the main body 1 of the angle measuring device and the measuring rod 2 to form a 0. 0° angle, and confirms that the measured angle value at this time is 0. 0°, and the zeroing of the angle measuring device can be realized according to the zeroing information.
  • the embodiment may further include a low-voltage detecting unit connected to the power supply unit and the correcting unit 11, respectively, for detecting the power supply and issuing an early warning signal to the correcting unit 11, thereby ensuring that the angle measuring device operates normally.
  • a low-voltage detecting unit connected to the power supply unit and the correcting unit 11, respectively, for detecting the power supply and issuing an early warning signal to the correcting unit 11, thereby ensuring that the angle measuring device operates normally.
  • the embodiment may further include a data interface unit controlled by the correction unit to connect to an external data processing device for data exchange.
  • a data interface unit controlled by the correction unit to connect to an external data processing device for data exchange.
  • External data processing equipment includes personal computers, engineering computers, portable computers, and handheld smart devices.
  • horizontal and vertical measuring devices can be provided.
  • a horizontal blisters 1B2 and a vertical blister 1B3 are disposed on the main body 1 or the measuring rod 2
  • the horizontal blisters 1B2 are used for accommodating the horizontal blisters
  • the vertical blisters 1B3 are used for erecting the vertical Straight blisters.
  • the angle measuring device of this embodiment can also be provided with various measuring units including horizontal, temperature, humidity and the like.
  • the above first and second embodiments realize the measurement and correction of the angle
  • the calibration device and the calibration method of the present invention can also be applied to various measurement devices to realize various measurement data such as length, height, temperature, pressure, weight, and the like. Correction.
  • a third embodiment of the present invention is proposed herein, and a correction device is provided for use in the field of length measurement.
  • the length measuring device includes a main body and a measuring head.
  • the measuring head is movably coupled to the main body 1, for example, by a pull wire connection, and the measuring head drives the pulling wire movement.
  • the length of the pull wire corresponds to the length of the measurement object.
  • the length measuring device includes a correcting device, and the correcting device control circuit is similar to the first embodiment, and includes a correcting unit that is connected to the measuring unit and the storage unit, respectively. It can have its own power supply, such as battery power, or an external power supply.
  • the measuring unit may employ a variable resistor as a linear potentiometer, and the resistance value of the variable resistor varies according to a change in the length of the wire of the length measuring device, wherein the length of the wire corresponds to the length of the object to be measured.
  • the measuring unit converts the resistance value of the variable resistor to the measured potential value.
  • the calibration unit receives the measured potential value corresponding to the length of the object to be measured sent by the measuring unit, and forms a corresponding measured AD value by analog-to-digital conversion; and then corrects the measured AD value to form a calibration result.
  • the correction unit performs the correction of the measured AD value in combination with the correction data of the storage unit.
  • the storage unit of the embodiment is similar to the storage unit 14 of the first embodiment, and stores a series of correction data in the storage unit, including the calibration length value and The AD value is scaled accordingly.
  • the correction mechanism is similar to the first embodiment, and it is considered that there is a linear relationship between the adjacent two calibration AD values, for example, the calibration AD value changes in accordance with the proportional length value as a function of the proportional length value.
  • the calibration AD value changes in accordance with the proportional length value as a function of the proportional length value.
  • the length M is used as the calibration result; if the measured AD value exceeds the range of the value of the calibrated AD value in the calibration data table, the correction is considered to be a failure, and the measured potential value A is converted into the measured length value m as the correction result.
  • the length measuring process, the calibration process, and the calibration method of the present embodiment are similar to those of the first embodiment, except that the present embodiment is applied to the measurement of the length and the correction of the measurement data, and thus will not be described herein.
  • the correction range of the correction device and the correction method of the present embodiment is determined by the measurement range of the length measuring device and the calibration range of the correction device.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

L'invention porte sur un dispositif de correction comprenant: une unité de mesure (12) qui capte des informations de mesure actuelles de l'objet mesuré; une unité de mémoire (14) qui contient des données de correction des informations de mesure actuelles; une unité de correction (11) qui corrige les informations de mesure actuelles au moyen desdites données de correction pour donner un résultat corrigé.
PCT/CN2007/000820 2007-03-14 2007-03-14 Dispositif et méthode de correction WO2008110036A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/CN2007/000820 WO2008110036A1 (fr) 2007-03-14 2007-03-14 Dispositif et méthode de correction
CN200780052133A CN101657695A (zh) 2007-03-14 2007-03-14 校正装置及校正方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2007/000820 WO2008110036A1 (fr) 2007-03-14 2007-03-14 Dispositif et méthode de correction

Publications (1)

Publication Number Publication Date
WO2008110036A1 true WO2008110036A1 (fr) 2008-09-18

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CN (1) CN101657695A (fr)
WO (1) WO2008110036A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1014471B (zh) * 1987-05-06 1991-10-23 富士胶片公司 密度校正方法及装置
CN1239222A (zh) * 1998-06-12 1999-12-22 戴怀来 一种微机远距离多点测温系统
CN1358271A (zh) * 1999-06-24 2002-07-10 三井金属矿业株式会社 流量传感器单元及使用它的流量计、以及流量传感器
US6770868B1 (en) * 2003-05-19 2004-08-03 Kla-Tencor Technologies Corporation Critical dimension scanning electron microscope
US6862545B1 (en) * 2003-04-03 2005-03-01 Taiwan Semiconductor Manufacturing Co., Ltd Linewidth measurement tool calibration method employing linewidth standard
US6861616B1 (en) * 1998-09-30 2005-03-01 Lasertec Gmbh Depth measurement and depth control or automatic depth control for a hollow to be produced by a laser processing device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1014471B (zh) * 1987-05-06 1991-10-23 富士胶片公司 密度校正方法及装置
CN1239222A (zh) * 1998-06-12 1999-12-22 戴怀来 一种微机远距离多点测温系统
US6861616B1 (en) * 1998-09-30 2005-03-01 Lasertec Gmbh Depth measurement and depth control or automatic depth control for a hollow to be produced by a laser processing device
CN1358271A (zh) * 1999-06-24 2002-07-10 三井金属矿业株式会社 流量传感器单元及使用它的流量计、以及流量传感器
US6862545B1 (en) * 2003-04-03 2005-03-01 Taiwan Semiconductor Manufacturing Co., Ltd Linewidth measurement tool calibration method employing linewidth standard
US6770868B1 (en) * 2003-05-19 2004-08-03 Kla-Tencor Technologies Corporation Critical dimension scanning electron microscope

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