WO2008060148A3 - Atomizer for atomizing a doping solution and a method for treating a substrate - Google Patents
Atomizer for atomizing a doping solution and a method for treating a substrate Download PDFInfo
- Publication number
- WO2008060148A3 WO2008060148A3 PCT/NL2007/050561 NL2007050561W WO2008060148A3 WO 2008060148 A3 WO2008060148 A3 WO 2008060148A3 NL 2007050561 W NL2007050561 W NL 2007050561W WO 2008060148 A3 WO2008060148 A3 WO 2008060148A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- doping solution
- atomizing
- treating
- atomizer
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 6
- 239000007788 liquid Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/0012—Apparatus for achieving spraying before discharge from the apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electroluminescent Light Sources (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Photovoltaic Devices (AREA)
Abstract
Atomizer for atomizing a doping solution for treating a substrate therewith, wherein the atomizer comprises an atomizing element with a liquid compartment for receiving the doping solution to be atomized, wherein the atomizing element is an atomizing element functioning on the basis of an air flow. The invention further relates to a method for treating a substrate, wherein the method comprises the following steps: - providing a substrate; - atomizing a doping solution; - supplying the atomized doping solution to the substrate to treat the substrate therewith, wherein the doping solution is atomized by passing an air flow over the doping solution.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1032854 | 2006-11-13 | ||
NL1032854A NL1032854C2 (en) | 2006-11-13 | 2006-11-13 | Nebulizer for atomizing a dopant solution and a method for treating a substrate. |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008060148A2 WO2008060148A2 (en) | 2008-05-22 |
WO2008060148A3 true WO2008060148A3 (en) | 2008-07-24 |
Family
ID=38171985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/NL2007/050561 WO2008060148A2 (en) | 2006-11-13 | 2007-11-13 | Atomizer for atomizing a doping solution and a method for treating a substrate |
Country Status (3)
Country | Link |
---|---|
NL (1) | NL1032854C2 (en) |
TW (1) | TW200911382A (en) |
WO (1) | WO2008060148A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI413038B (en) * | 2009-10-02 | 2013-10-21 | Innolux Corp | Method of fabricating flexible display device |
US8565364B2 (en) * | 2009-11-16 | 2013-10-22 | General Electric Company | Water based dispersions of boron or boron compounds for use in coating boron lined neutron detectors |
WO2015019468A1 (en) | 2013-08-08 | 2015-02-12 | 東芝三菱電機産業システム株式会社 | Atomizer |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4116387A (en) * | 1976-05-11 | 1978-09-26 | Eastfield Corporation | Mist generator |
US4251033A (en) * | 1978-06-12 | 1981-02-17 | Eastfield Corporation | Mist generating structure and molding apparatus therefor |
US4273950A (en) * | 1979-05-29 | 1981-06-16 | Photowatt International, Inc. | Solar cell and fabrication thereof using microwaves |
EP0627266A2 (en) * | 1993-06-04 | 1994-12-07 | Medic-Aid Limited | Nebuliser |
US5527389A (en) * | 1992-08-07 | 1996-06-18 | Ase Americas, Inc. | Apparatus for forming diffusion junctions in solar cell substrates |
US6405944B1 (en) * | 1997-08-25 | 2002-06-18 | Sarl Prolitec | Spraying attachment and appliance |
US20040042969A1 (en) * | 2002-08-30 | 2004-03-04 | Atusi Sakaida | Method and apparatus for generation of fine particles |
-
2006
- 2006-11-13 NL NL1032854A patent/NL1032854C2/en not_active IP Right Cessation
-
2007
- 2007-11-13 WO PCT/NL2007/050561 patent/WO2008060148A2/en active Application Filing
- 2007-11-13 TW TW96142855A patent/TW200911382A/en unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4116387A (en) * | 1976-05-11 | 1978-09-26 | Eastfield Corporation | Mist generator |
US4251033A (en) * | 1978-06-12 | 1981-02-17 | Eastfield Corporation | Mist generating structure and molding apparatus therefor |
US4273950A (en) * | 1979-05-29 | 1981-06-16 | Photowatt International, Inc. | Solar cell and fabrication thereof using microwaves |
US5527389A (en) * | 1992-08-07 | 1996-06-18 | Ase Americas, Inc. | Apparatus for forming diffusion junctions in solar cell substrates |
EP0627266A2 (en) * | 1993-06-04 | 1994-12-07 | Medic-Aid Limited | Nebuliser |
US6405944B1 (en) * | 1997-08-25 | 2002-06-18 | Sarl Prolitec | Spraying attachment and appliance |
US20040042969A1 (en) * | 2002-08-30 | 2004-03-04 | Atusi Sakaida | Method and apparatus for generation of fine particles |
Also Published As
Publication number | Publication date |
---|---|
TW200911382A (en) | 2009-03-16 |
NL1032854C2 (en) | 2008-05-14 |
WO2008060148A2 (en) | 2008-05-22 |
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Legal Events
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DPE1 | Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101) | ||
NENP | Non-entry into the national phase |
Ref country code: DE |
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122 | Ep: pct application non-entry in european phase |
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