WO2008048137A1 - Multi-channel optical monochromator - Google Patents

Multi-channel optical monochromator Download PDF

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Publication number
WO2008048137A1
WO2008048137A1 PCT/RU2006/000644 RU2006000644W WO2008048137A1 WO 2008048137 A1 WO2008048137 A1 WO 2008048137A1 RU 2006000644 W RU2006000644 W RU 2006000644W WO 2008048137 A1 WO2008048137 A1 WO 2008048137A1
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WO
WIPO (PCT)
Prior art keywords
monochromator
output
plate
slit
slots
Prior art date
Application number
PCT/RU2006/000644
Other languages
French (fr)
Russian (ru)
Inventor
Konstantin Petrovich Kornev
Irina Pavlovna Korneva
Original Assignee
Federalnoe Gosudarstvennoe Obrazovatelnoe Uchrezhdenie Vyschego Professionalnogo Obrazovaniya 'rossysky Gosudarstvenny Universitet Im. I. Kanta'
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Federalnoe Gosudarstvennoe Obrazovatelnoe Uchrezhdenie Vyschego Professionalnogo Obrazovaniya 'rossysky Gosudarstvenny Universitet Im. I. Kanta' filed Critical Federalnoe Gosudarstvennoe Obrazovatelnoe Uchrezhdenie Vyschego Professionalnogo Obrazovaniya 'rossysky Gosudarstvenny Universitet Im. I. Kanta'
Publication of WO2008048137A1 publication Critical patent/WO2008048137A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method

Definitions

  • the proposed technical solution relates to the field of measurement technology and can be widely used in various spectrometric measurements, in particular in determining the optical parameters of thin films.
  • Known single-channel monochromators which have one input slit and one output. Such monochromators isolate one monochromatic beam from the entire spectrum.
  • the monochromator contains: a condenser, an input replaceable slit, a mirror, a diffraction grating, and replaceable output slits of constant width.
  • the entrance and exit slots of the monochromator can be changed, thereby changing the width of the spectral region that is emitted by the monochromator.
  • the disadvantages of the known monochromator include its limited capabilities in spectrometric measurements. So, measurements can be simultaneously performed only for one fixed monochromatic part of the spectrum, which is selected by the angle of rotation of the drum of the monochromator.
  • the aim of the proposed technical solution is to expand the functionality of the monochromator.
  • the output slots of the monochromator are made in replaceable plates, moreover, in each plate, several output slots are made. Moreover, the output slots in the plates are configured to change the distance between them.
  • the number of exit slots (there can be from 2 to 10), the width of the slots and the distance between them is determined by the spectrometric problem to be solved.
  • FIG. l schematically shows the proposed monochromator.
  • the monochromator includes: a condenser 1, a single entrance slit 2, a mirror 3, a diffraction grating 4, a second mirror 5, a plate 6 with output slots 7.
  • the light beam reflected from the mirror is directed to the concave diffraction grating 4.
  • the light diffracted by the grating, reflected from the mirror 5, is focused on the plate b with output slots 7.
  • each of output slots 7 focuses a beam of light with its wavelength. Therefore, at the output of the monochromator, several monochromatic beams 8 are obtained, which can be further used in various spectrometric measurements.
  • the use of several output slots in the monochromator allows you to create a multichannel optical monochromator, and, accordingly, to measure in each of the channels obtained both independently of each other and in parallel.
  • the use of such a monochromator significantly expands the range of spectrometric measurements that can be carried out using it, compared with conventional single-channel monochromators.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The invention relates to metrology and can be widely used for carrying out different spectrometric measurements, in particular for determining optical parameters of thin films. The inventive monochromator comprises a capacitor (1), an interchangeable entrance slit (2), mirrors (3, 5), a diffraction grating (4) and a plate provided with an exit slit, wherein a plate (6) provided with several constant-width exit slits (7) is used instead of a plate provided with one constant-width exit slit.

Description

МНОГОКАНАЛЬНЫЙ ОПТИЧЕСКИЙ МОНОХРОМАТОР MULTI-CHANNEL OPTICAL MONOCHROMATOR
Предлагаемое техническое решение относится к области измерительной техники и может найти широкое применение при различных спектрометрических измерениях, в частности при определении оптических параметров тонких пленок.The proposed technical solution relates to the field of measurement technology and can be widely used in various spectrometric measurements, in particular in determining the optical parameters of thin films.
Известны одноканальные монохроматоры, у которых имеется одна входная щель и одна выходная. Такие монохроматоры выделяют из всего спектра один монохроматический пучок.Known single-channel monochromators, which have one input slit and one output. Such monochromators isolate one monochromatic beam from the entire spectrum.
Наиболее близким к заявляемому является одноканальный универсальный малогабаритный монохроматор МУМ 1.720.012 ТО (Техническое описание и инструкция по эксплуатации), предназначенный для выделения монохроматического излучения, исследования источников света, приемников излучения, проведения спектрометрических измерений в области 200 - 800 нм. Монохроматор содержит: конденсор, входную сменную щель, зеркало, дифракционную решетку и сменные выходные щели постоянной ширины. Входную и выходную щели монохроматора можно менять, изменяя тем самым ширину спектральной области, которая выделяется монохроматором. Данное техническое решение принято нами за прототип.Closest to the claimed one is the single-channel universal small-sized monochromator MUM 1.720.012 TO (Technical description and instruction manual), designed to isolate monochromatic radiation, study light sources, radiation receivers, and conduct spectrometric measurements in the region of 200 - 800 nm. The monochromator contains: a condenser, an input replaceable slit, a mirror, a diffraction grating, and replaceable output slits of constant width. The entrance and exit slots of the monochromator can be changed, thereby changing the width of the spectral region that is emitted by the monochromator. This technical solution was made by us as a prototype.
К недостаткам известного монохроматора можно отнести его ограниченные возможности при спектрометрических измерениях. Так, измерения одновременно можно проводить только для одной фиксированной монохроматической части спектра, которая выбирается углом поворота барабана монохроматора.The disadvantages of the known monochromator include its limited capabilities in spectrometric measurements. So, measurements can be simultaneously performed only for one fixed monochromatic part of the spectrum, which is selected by the angle of rotation of the drum of the monochromator.
Целью предлагаемого технического решения является расширение функциональных возможностей монохроматора.The aim of the proposed technical solution is to expand the functionality of the monochromator.
Поставленная цель достигается тем, что выходные щели монохроматора выполнены в сменных пластинках, причем, в каждой пластинке выполнено по несколько выходных щелей. При этом, выходные щели в пластинках выполнены с возможностью изменения расстояния между ними. Количество выходных щелей (их может быть от 2 до 10), ширина щелей и расстояние между ними определяется решаемой спектрометрической задачей.This goal is achieved in that the output slots of the monochromator are made in replaceable plates, moreover, in each plate, several output slots are made. Moreover, the output slots in the plates are configured to change the distance between them. The number of exit slots (there can be from 2 to 10), the width of the slots and the distance between them is determined by the spectrometric problem to be solved.
Сущность изобретения поясняется рисунком, где на фиг. l схематично изображен предлагаемый монохроматор.The invention is illustrated in the figure, where in FIG. l schematically shows the proposed monochromator.
Монохроматор включает: конденсор 1, одинарную входную щель 2, зеркало 3, дифракционную решетку 4, второе зеркало 5, пластинку 6 с выходными щелями 7.The monochromator includes: a condenser 1, a single entrance slit 2, a mirror 3, a diffraction grating 4, a second mirror 5, a plate 6 with output slots 7.
Работа монохроматора осуществляется следующим образом:The operation of the monochromator is as follows:
Сфокусированный конденсором луч 9, через одинарную входную щель 2 падает на зеркало 3. Отразившийся от зеркала пучок света направляется на вогнутую дифракционную решетку 4. Дифрагированный решеткой свет, отразившись от зеркала 5, фокусируется на пластинку б с выходными щелями 7. При этом на каждую из выходных щелей 7 фокусируется пучок света со своей длиной волны. Следовательно, на выходе монохроматора получают несколько монохроматических пучков 8, которые в дальнейшем могут быть использованы в различных спектрометрических измерениях.The beam 9 focused by the condenser, through a single entrance slit 2, falls onto the mirror 3. The light beam reflected from the mirror is directed to the concave diffraction grating 4. The light diffracted by the grating, reflected from the mirror 5, is focused on the plate b with output slots 7. In this case, each of output slots 7 focuses a beam of light with its wavelength. Therefore, at the output of the monochromator, several monochromatic beams 8 are obtained, which can be further used in various spectrometric measurements.
Таким образом, применение в монохроматоре нескольких выходных щелей позволяет создать многоканальный оптический монохроматор, и, соответственно, проводить измерения в каждом из полученных каналов как независимо друг от друга, так и параллельно. Применение такого монохроматора существенно расширяет тот диапазон спектрометрических измерений, которые можно проводить с его использованием, по сравнению с обычными одноканальными монохроматорами. Thus, the use of several output slots in the monochromator allows you to create a multichannel optical monochromator, and, accordingly, to measure in each of the channels obtained both independently of each other and in parallel. The use of such a monochromator significantly expands the range of spectrometric measurements that can be carried out using it, compared with conventional single-channel monochromators.

Claims

Формула полезной модели Utility Model Formula
1. Оптический монохроматор, содержащий конденсор, входную щель, зеркало, дифракционную решетку и сменные выходные щели, отличающийся тем, что выходные щели монохроматора выполнены в сменных пластинках, причем, в каждой пластинке выполнено несколько выходных щелей.1. An optical monochromator containing a condenser, an entrance slit, a mirror, a diffraction grating and interchangeable output slits, characterized in that the output slots of the monochromator are made in replaceable plates, moreover, several output slots are made in each plate.
2. Оптический монохроматор, поп.l отличающийся тем, что выходные щели в пластинках выполнены с возможностью изменения расстояния между ними. 2. Optical monochromator, pop.l characterized in that the output slots in the plates are configured to change the distance between them.
PCT/RU2006/000644 2006-10-18 2006-11-30 Multi-channel optical monochromator WO2008048137A1 (en)

Applications Claiming Priority (2)

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RU2006136760 2006-10-18
RU2006136760 2006-10-18

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017144528A1 (en) * 2016-02-25 2017-08-31 Centre National De La Recherche Scientifique System for obtaining a spectrum and imaging

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU830138A1 (en) * 1979-06-18 1981-05-15 Ленинградское Специальное Конструкторскоебюро Научно-Производственногообъединения "Нефтехимавтоматика" Monochromator output device
JPS60117118A (en) * 1983-11-30 1985-06-24 Shimadzu Corp Spectrophotometer
EP0396507A1 (en) * 1989-05-03 1990-11-07 CARL ZEISS JENA GmbH Monochromator
JPH05203492A (en) * 1992-01-24 1993-08-10 Res Dev Corp Of Japan Raman spectrophotometer
JP2003139611A (en) * 2001-11-06 2003-05-14 Olympus Optical Co Ltd Spectrophotometer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU830138A1 (en) * 1979-06-18 1981-05-15 Ленинградское Специальное Конструкторскоебюро Научно-Производственногообъединения "Нефтехимавтоматика" Monochromator output device
JPS60117118A (en) * 1983-11-30 1985-06-24 Shimadzu Corp Spectrophotometer
EP0396507A1 (en) * 1989-05-03 1990-11-07 CARL ZEISS JENA GmbH Monochromator
JPH05203492A (en) * 1992-01-24 1993-08-10 Res Dev Corp Of Japan Raman spectrophotometer
JP2003139611A (en) * 2001-11-06 2003-05-14 Olympus Optical Co Ltd Spectrophotometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"Tekhnicheskoe opisania. Opublikovano v poiskovoi sisterne Rambler", 17 December 2000 (2000-12-17), Retrieved from the Internet <URL:http://www.vega.inp.nsk.su/hardware/mum.html> *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017144528A1 (en) * 2016-02-25 2017-08-31 Centre National De La Recherche Scientifique System for obtaining a spectrum and imaging
FR3048282A1 (en) * 2016-02-25 2017-09-01 Centre Nat Rech Scient SPECTROSCOPY AND IMAGING SYSTEM

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