WO2008036204A3 - Pre-ionizer for pulsed gas-discharge laser - Google Patents

Pre-ionizer for pulsed gas-discharge laser Download PDF

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Publication number
WO2008036204A3
WO2008036204A3 PCT/US2007/020000 US2007020000W WO2008036204A3 WO 2008036204 A3 WO2008036204 A3 WO 2008036204A3 US 2007020000 W US2007020000 W US 2007020000W WO 2008036204 A3 WO2008036204 A3 WO 2008036204A3
Authority
WO
WIPO (PCT)
Prior art keywords
laser
enclosure
ionizer
aperture
membrane
Prior art date
Application number
PCT/US2007/020000
Other languages
French (fr)
Other versions
WO2008036204A2 (en
Inventor
Raul Martin Wong Gutierrez
Christian J Shackleton
Thomas V Hennessey Jr
Original Assignee
Coherent Inc
Raul Martin Wong Gutierrez
Christian J Shackleton
Thomas V Hennessey Jr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/524,337 external-priority patent/US7545842B2/en
Priority claimed from US11/900,530 external-priority patent/US7693207B2/en
Application filed by Coherent Inc, Raul Martin Wong Gutierrez, Christian J Shackleton, Thomas V Hennessey Jr filed Critical Coherent Inc
Publication of WO2008036204A2 publication Critical patent/WO2008036204A2/en
Publication of WO2008036204A3 publication Critical patent/WO2008036204A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]

Abstract

In a CO2 laser a pre-ionizer (2OC) is assembled in a flange configured to be attached to a laser-gas enclosure of the laser over an aperture (27) in a wall (29) of the enclosure. An aperture in the base of the flange is aligned over the aperture in the enclosure wall. The aperture in the pre-ionizer flange is covered by a ceramic membrane (62). A disc electrode (74) is in contact with the ceramic membrane on a side of the membrane outside of the laser-gas enclosure. An RF potential applied to the disc electrode creates a corona discharge (96) on the side of the ceramic membrane inside the enclosure. The corona discharge ionizes laser gas in the enclosure before RF power is applied to electrodes of the slab laser. A cylindrical ceramic sleeve (162) extends from the membrane for containing the discharge.
PCT/US2007/020000 2006-09-20 2007-09-14 Pre-ionizer for pulsed gas-discharge laser WO2008036204A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11/524,337 US7545842B2 (en) 2006-09-20 2006-09-20 Pre-ionizer for pulsed gas-discharge laser
US11/524,337 2006-09-20
US11/900,530 2007-09-12
US11/900,530 US7693207B2 (en) 2007-09-12 2007-09-12 Pre-ionizer for pulsed gas-discharge laser

Publications (2)

Publication Number Publication Date
WO2008036204A2 WO2008036204A2 (en) 2008-03-27
WO2008036204A3 true WO2008036204A3 (en) 2008-05-08

Family

ID=39099889

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/020000 WO2008036204A2 (en) 2006-09-20 2007-09-14 Pre-ionizer for pulsed gas-discharge laser

Country Status (1)

Country Link
WO (1) WO2008036204A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102480099B (en) * 2010-11-30 2013-06-12 中国科学院电子学研究所 Transverse excitation atmosphere CO2 laser with high repetition frequency

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2098791A (en) * 1981-04-23 1982-11-24 United Technologies Corp Sealed-off CO2 laser
EP0542718A1 (en) * 1984-10-09 1993-05-19 Mitsubishi Denki Kabushiki Kaisha Discharge excitation type short pulse laser device
US5313487A (en) * 1991-05-23 1994-05-17 Mitsubishi Denki Kabushiki Kaisha Discharge excitation gas laser apparatus
US6963596B2 (en) * 2004-01-28 2005-11-08 Coherent, Inc. Pre-ionizer for RF-energized gas laser

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2098791A (en) * 1981-04-23 1982-11-24 United Technologies Corp Sealed-off CO2 laser
EP0542718A1 (en) * 1984-10-09 1993-05-19 Mitsubishi Denki Kabushiki Kaisha Discharge excitation type short pulse laser device
US5313487A (en) * 1991-05-23 1994-05-17 Mitsubishi Denki Kabushiki Kaisha Discharge excitation gas laser apparatus
US6963596B2 (en) * 2004-01-28 2005-11-08 Coherent, Inc. Pre-ionizer for RF-energized gas laser

Also Published As

Publication number Publication date
WO2008036204A2 (en) 2008-03-27

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