WO2008026523A1 - Procédé et dispositif de mesure de lumière de champ proche - Google Patents

Procédé et dispositif de mesure de lumière de champ proche Download PDF

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Publication number
WO2008026523A1
WO2008026523A1 PCT/JP2007/066494 JP2007066494W WO2008026523A1 WO 2008026523 A1 WO2008026523 A1 WO 2008026523A1 JP 2007066494 W JP2007066494 W JP 2007066494W WO 2008026523 A1 WO2008026523 A1 WO 2008026523A1
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Prior art keywords
waveguide
sample
field light
light
measurement method
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PCT/JP2007/066494
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English (en)
Japanese (ja)
Inventor
Shin'ichiro Hayashi
Yuichi Ogawa
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Tohoku University
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Priority to JP2008532044A priority Critical patent/JPWO2008026523A1/ja
Publication of WO2008026523A1 publication Critical patent/WO2008026523A1/fr

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor

Definitions

  • the present invention provides a near-field optical measurement method capable of performing high-sensitivity measurement on a sample that is difficult to perform normal transmission measurement, such as having large absorption and scattering in the terahertz wave band and the millimeter wave band. And relates to a near-field light measurement device.
  • FT-IR Fourier transform infrared spectrophotometer
  • ATR method total reflection absorption measurement method
  • the terahertz wave band may be able to analyze objects that could not be analyzed with conventional infrared light or X-rays.
  • chemicals in envelopes and opaque plastics can be analyzed using electromagnetic waves in the force terahertz band, which is difficult to detect using infrared light or X-rays (for example, patent documents). 1 and 2).
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2004-286716
  • Patent Document 2 JP 2005-114413 A
  • Patent Document 3 Japanese Patent Laid-Open No. 2004-354246
  • Non-Patent Document 1 Hideki Hirori and 2 others, “Time-domain Terahertz ATR Spectroscopy”, Spectroscopic Research, The Spectroscopical Society of Japan, 2004, Vol. 53, No. 6, p.361-364
  • Non-Patent Document 2 Eihiro Hirori and three others (H. Hiroi, .Yamashita, M.Nagai and .Tanaka) Total Reflection Spectroscopy in rime Domain Using erahertz coherent Pulses), Jpn.J.Appl.Phys., Japan Society of Applied Physics, 2004, 43, 10A No., L1287-L1289
  • Non-Patent Document 3 JJ Degnan, "The Waveguide Laser: a Review", Applied Phys. (USA), 1 976, Vol. 11, p.1-33
  • Non-Patent Document 4 JJ Degnan, “Waveguide Laser Mode Patterns in the Near and Far Field”, ⁇ ⁇ Opt., (USA) ), 1973, Vol. 1, Vol. 2, No. 5, pp.1026-1033
  • the present invention makes it possible to perform high-sensitivity measurement on a sample that is difficult to perform normal transmission measurement, such as a sample containing a large amount of moisture, such as having large absorption or scattering in the terahertz wave or millimeter wave band.
  • the purpose is to provide a near-field light measurement method and a near-field light measurement apparatus! It also aims to provide 2D and 3D images of the sample.
  • a near-field light measurement method uses a terahertz wave or millimeter wave incident light generated by a terahertz wave or millimeter wave light source as a waveguide. And information on a sample arranged within the reach of the near-field light is obtained by near-field light generated outside the waveguide. [0009]
  • the near-field light measurement method according to the present invention can obtain information on a sample arranged within the reach of the near-field light using near-field light of terahertz wave or millimeter wave. .
  • Terahertz or millimeter-wave near-field light is used, so it is possible to obtain information on samples that are difficult to perform normal transmission measurements, especially with large absorption and scattering in the terahertz or millimeter wave band. wear.
  • moisture such as biological tissue, food, and water-soluble amino acids is absorbed. Even a sample containing a large amount can be measured with high sensitivity without being affected by water absorption.
  • Terahertz wave or millimeter wave light sources include, for example, backward wave tubes, terahertz wave parametric light sources, gun oscillators, impatting oscillators, tannet oscillators, photoconductive switch excitation using ultrashort pulse lasers, and quantum cascade lasers. , P-Ge laser, free electron laser, etc.
  • Waveguides are made of silicon single crystals, Teflon (registered trademark), plastic materials, quartz glass, ceramics, metal oxides, semiconductors, etc., from the sample to be measured with a small absorption coefficient in the terahertz or millimeter wave band. Is preferably composed of a material having a high refractive index.
  • a terahertz wave is an electromagnetic wave having a frequency of 0 ⁇ ;! to 10 THz and a wavelength of 30 111 to 3111 m.
  • a millimeter wave is an electromagnetic wave having a frequency of 30 to 300 GHz and a wavelength of !! to 10 mm.
  • the near-field light measurement method it is preferable to obtain information on the sample by detecting transmitted light that has passed through the waveguide.
  • information on the sample can be obtained by measuring the intensity of transmitted light, intensity change, and the like.
  • the waveguide is tubular, has an inner diameter that is 6 to 1000 times the wavelength of the incident light, and the near-field light has a characteristic propagation that the incident light has. Depending on the mode, it is preferably generated near the surface of the waveguide. In this case, uniform near-field light can be generated in the vicinity of the waveguide surface by the characteristic propagation mode of incident light, and high-sensitivity and high-accuracy measurement is possible.
  • Tubular waveguide means that the inside is not a hollow but a dense cylinder, and its cross-sectional shape is circular, elliptical, rectangular, polygonal, etc. May be.
  • the sample may be composed of a liquid, powder, solid, gel-like substance, or gas, and information on the sample may be continuously measured. . In this case, temporal and spatial changes in sample information can be obtained.
  • the near-field light measurement method according to the present invention may be capable of spectroscopic measurement by changing the wavelength of the incident light or by dispersing the transmitted light with respect to the broadband incident light.
  • the chemical substance contained in the sample, the structure of the substance, etc. can be specified.
  • the near-field light measurement method may be capable of measuring the shape of the sample from a change in intensity of the transmitted light by changing a relative position between the sample and the waveguide. Good.
  • a two-dimensional image of the sample can be obtained from the measured shape of the sample.
  • a method of changing the relative position between the sample and the waveguide for example, a method of scanning by moving the sample along the waveguide, or moving the waveguide along the surface of the sample, There is a method of moving the waveguide close to or away from each other. By combining these, it is possible to obtain a 3D shape with only the 2D shape of the sample, and to obtain a 3D image of the sample.
  • the waveguide may have a curvature along the propagation direction of the incident light.
  • the shape of the waveguide can be matched to the shape of the sample and the measurement situation, and efficient measurement can be performed.
  • the interaction area between the sample and near-field light can be expanded, highly sensitive measurement is possible.
  • the curvature of the waveguide should be in the range where the characteristic propagation mode of the incident light does not change! /.
  • a near-field light measurement device includes a terahertz wave or millimeter wave light source, and a waveguide provided so as to be capable of propagating incident light of the terahertz wave or millimeter wave. And a detection unit that detects transmitted light that has passed through the waveguide so as to acquire information on a sample disposed within the reach of near-field light generated outside the waveguide. To do.
  • the near-field light measurement apparatus is used to implement the near-field light measurement method according to the present invention.
  • the near-field light measurement apparatus according to the present invention uses the near-field light of the terahertz wave or millimeter wave to obtain information on the sample arranged within the reach of the near-field light. Can do. Because it uses near-field light of terahertz waves or millimeter waves, it is possible to obtain information on samples that are difficult to perform normal transmission measurement, especially with large absorption and scattering in the terahertz wave or millimeter wave band. it can. In addition, non-destructive and non-invasive measurement around the sample surface can be performed with near-field light of terahertz wave or millimeter wave.
  • the waveguide is tubular and the near-field light is generated near the surface of the waveguide.
  • the tubular waveguide means that the inside is not a hollow but a dense cylinder, and the cross-sectional shape may be a circle, an ellipse, a rectangle, a polygon, or the like.
  • the near-field light measuring device is provided so that the sample or the waveguide can be moved so that the relative position between the sample and the waveguide is changed within the reach of the near-field light.
  • the transmitted light is detected by the detector while the sample or the waveguide is moved by the moving means and the moving means, the shape of the sample is measured from the change in the intensity of the transmitted light.
  • an analysis means for displaying a two-dimensional image or a three-dimensional image may be provided. In this case, it is possible to obtain a 2D image or a 3D image of the sample from the measured sample shape.
  • the moving means may be anything as long as the relative position between the sample and the waveguide can be changed within the reach of the near-field light.
  • the sample is moved along the waveguide. Or move the waveguide along the surface of the sample, or move the sample and the waveguide closer to or away from each other! /.
  • a highly sensitive measurement is performed on a sample that is difficult to perform normal transmission measurement, such as a sample that contains a lot of moisture, such as having a large absorption or scattering in the terahertz wave or millimeter wave band. It is possible to provide a near-field light measurement method and a near-field light measurement apparatus that can perform the same. In addition, 2D and 3D images of the sample can be provided.
  • FIG. 1 to 18 show a near-field light measurement method and a near-field light measurement apparatus according to an embodiment of the present invention.
  • the near-field light measurement apparatus 10 includes a light source 11, an optical element unit 12, a waveguide 13 and And a detection unit 14.
  • the light source 11 can generate a terahertz wave and a millimeter wave, and includes a backward wave tube.
  • the light source 11 generates a continuous wave having a frequency of about ITHz with an output of about lmW.
  • the optical element unit 12 includes an optical light source 21 for optical adjustment, a glass plate 22 with an ITO film, an off-axis parabolic mirror 23, an optical chino 24, a wire grid 25, and a lens 26.
  • the glass plate 22 with the ITO film is arranged so that light from the light source 21 for optical adjustment can be transmitted straight, and incident light from the light source 11 can be reflected by about 90 degrees.
  • the ITO film-coated glass plate 22 can be adjusted so that the propagation direction of the incident light from the light source 11 coincides with the propagation direction of the light from the optical adjustment light source 21.
  • the off-axis paraboloid mirror 23 is composed of four, and is arranged to form an optical path for making incident light from the light source 11 parallel light and guiding the incident light to the waveguide 13.
  • the optical chopper 24 is provided near the middle of the optical path, and is configured to modulate the intensity of incident light.
  • the wire grid 25 is provided near the end of the optical path, and is configured to transmit a part of incident light and reflect the rest by 90 degrees.
  • the lens 26 is disposed so as to collect the incident light transmitted through the wire grid 25 and guide it into the waveguide 13.
  • the waveguide 13 is made of a cylindrical silicon crystal having a refractive index higher than that of the sample to be measured having a small absorption coefficient in the terahertz wave and millimeter wave bands.
  • the waveguide 13 is provided so that incident light from the light source 11 that has passed through the lens 26 can propagate from one end to the inside.
  • Waveguide 13 has an inner diameter of 2 mm (waveguide with a refractive index of 3.4) and an incident light wavelength of 3 mm (frequency: 0. ITHz) when the wavelength of incident light is 0.3 mm (frequency: ITHz).
  • the inner diameter is 20 mm (waveguide with a refractive index of 1.6), and the inner diameter is about 7 times the wavelength of the incident light.
  • the generation of near-field light has been confirmed using a waveguide with an inner diameter of 5 mm (approximately 17 times the wavelength of incident light).
  • the limit of the inner diameter of the waveguide is 1/2 of the wavelength of the incident light, so it has an inner diameter of about 0.5 times the wavelength of the incident light. Even if a waveguide is used, the force S can be generated to generate near-field light.
  • the detection unit 14 includes two pyroelectric element type detectors 27a and 27b, an oscilloscope 28, and a computer 29.
  • One pyroelectric element type detector 27a is arranged on the other end side of the waveguide 13. Thus, the transmitted light that has passed through the waveguide 13 can be detected.
  • the other pyroelectric element type detector 27b is arranged so as to detect the reference light reflected by the wire grid 25.
  • the oscilloscope 28 is connected to each pyroelectric element type detector 27a, 27b, and can display the transmitted signal of the transmitted light and the reference signal of the reference light detected by each pyroelectric element type detector 27a, 27b.
  • the computer 29 is connected to the oscilloscope 28, and can be analyzed by inputting a transmission signal and a reference signal.
  • the near-field light measurement method can be implemented by the near-field light measurement apparatus 10.
  • the incident light of the terahertz wave or millimeter wave generated by the light source 11 is converted into parallel light by the optical element unit 12 such as the off-axis parabolic mirror 23, and then subjected to intensity modulation by the optical chopper 24 etc.
  • the light is collected by 26 and enters the waveguide 13.
  • the terahertz wave or millimeter wave propagating in the waveguide 13 has a characteristic propagation mode, and propagates while generating uniform near-field light near the outer surface which is the surface of the waveguide 13.
  • the transmitted light of the terahertz wave or millimeter wave radiated again from the waveguide 13 to the free space is detected by the pyroelectric element type detector 27a and displayed on the oscilloscope 28 and the computer 29.
  • Obtain sample information by placing the sample within the reach of the near-field light generated on the surface of the waveguide 13 and measuring the intensity or intensity change of the transmitted light that has passed through the waveguide 13. Can do.
  • the near-field light measurement method and the near-field light measurement apparatus 10 use near-field light of terahertz waves or millimeter waves, and thus are large in the terahertz wave band or millimeter wave band. It is possible to obtain information on a sample that is difficult to perform normal transmission measurement, such as having absorption or scattering. In addition, it is possible to perform non-destructive and non-invasive measurement around the sample surface with high sensitivity by near-field light of terahertz wave or millimeter wave.
  • electromagnetic waves in the terahertz wave or millimeter wave band have the property of being strongly absorbed by water, but the near-field light measurement method and the near-field light measurement device 10 according to the embodiment of the present invention Therefore, even a sample containing a large amount of water such as a biological tissue, food, or a water-soluble amino acid can be measured with high sensitivity without being affected by water absorption.
  • the near-field light measurement method and the near-field light measurement apparatus 10 can generate uniform near-field light on the surface of the waveguide 13 by the characteristic propagation mode of incident light. Highly sensitive and highly accurate measurement is possible. Also, liquid, powder, solid, gel Information on a sample made of a substance or gas can be obtained. By measuring sample information continuously, temporal and spatial changes in sample information can be obtained.
  • Samples to be measured include organic compounds, inorganic compounds, metals, ceramics, and the like.
  • organic polymers such as plastics, engineering products such as pipes, PVC pipes, electric wire coatings, nucleic acids (DNA, RNA), amino acids, peptides, proteins, lectins, antibodies, sugar chains, vitamins, hormones, environmental hormones, cells
  • nucleic acids DNA, RNA
  • amino acids amino acids
  • peptides proteins
  • lectins antibodies
  • sugar chains sugar chains
  • vitamins hormones, environmental hormones, cells
  • In vivo components such as viruses, allergic components, blood “lymper fluid” and bone marrow fluid, biological tissues, foods such as fruits and vegetables, pharmaceuticals, and cosmetics are considered.
  • FIG. 2 shows the concentration dependence of the aqueous saccharide solution of the terahertz wave intensity transmitted through the waveguide 13 measured by the near-field light measurement method and the near-field light measurement apparatus 10 according to the embodiment of the present invention.
  • the frequency of incident light is about ITHz
  • the aqueous sugar solution is an aqueous glucose solution.
  • the transmittance of the terahertz wave increases monotonically!
  • the near-field light measurement method and the near-field light measurement apparatus 10 can measure the amount of water and the concentration of the aqueous solution around the waveguide 13. For this reason, it is possible to measure with high sensitivity a sample that has been difficult to measure by transmission because of its high absorption, and the area of interaction with the sample can be made larger than that of the THz-ATR method using near-field light. A degree can be achieved.
  • FIG. 3 shows the relationship between the length of the sample and the change in transmitted light intensity when a paper (sample) infiltrated with water as the sample 1 is placed around the waveguide 13.
  • the frequency of incident light is about ITHz.
  • the transmittance is observed to decrease! /.
  • FIG. 4 shows the transmittance when water or a 50% strength aqueous sugar solution as sample 1 is infiltrated into paper having a width of about 6 cm and the paper is wound around the waveguide 13.
  • a Teflon (registered trademark) rod having an inner diameter of 1.2 cm and a length of 30 cm was used, and a millimeter wave with a frequency of 94 GHz was used as incident light.
  • the sugar solution had a higher transmittance than water.
  • the near-field light measurement apparatus 10 can measure the amount of water and the concentration of the aqueous solution around the waveguide 13. As shown in FIGS.
  • the waveguide 13 is not limited to a columnar shape, and is made of a material having a curvature along the propagation direction of incident light within a range in which the characteristic propagation mode does not change. May be.
  • the shape of the waveguide 13 can be matched with the shape of the sample 1 and the measurement situation, and efficient measurement can be performed.
  • the curvature that the waveguide 13 can have depends on the refractive index of the waveguide 13.
  • FIG. 5 shows a biological information measurement system using the near-field light measurement device 10.
  • the waveguide 13 has a mechanism that has a curvature to the extent that the standing wave is not disturbed inside, so that the interaction area with the object that is the sample 1 can be expanded. Even small changes can be measured with high sensitivity.
  • it is possible to adopt a U-shaped or S-shaped configuration according to the force target object and the measurement situation showing the coiled waveguide 13.
  • the terahertz wave and millimeter wave propagated through the waveguide 13 are detected by a detector such as a pyroelectric element type detector 27a as transmitted light together with information on the object obtained by near-field light.
  • the object is a living body
  • the ability to get change This makes it possible to non-invasively evaluate skin moisture and changes in blood components, freshness and quality in the case of agricultural products, and nondestructive discrimination of internal disorders.
  • FIG. 6 shows a method for determining the experimental results obtained in the experimental system shown in FIG. For example, if the skin of the measurer increases, the amount of moisture in the subcutaneous layer increases, so that the near-field light that penetrates the waveguide 13 is absorbed, and the amount of transmission obtained by the pyroelectric detector 27a is Decrease. By using such results, it becomes possible to non-invasively measure the efficacy of pharmaceuticals and cosmetics and changes in blood components.
  • FIG. 7 shows a nondestructive inspection system for industrial products and the like using the near-field light measuring device 10.
  • Fig. 7 shows a non-destructive inspection of internal defects in a tubular member made of a material that transmits terahertz waves or millimeter waves.
  • this method can be introduced in other than a tubular member such as a plate material by selecting the shape of the waveguide 13 according to the shape of the measurement object.
  • the waveguide 13 can also have a mechanism having a curvature to such an extent that the standing wave is not disturbed inside.
  • Figure 7 touches the bent waveguide 13
  • the configuration is such that the object that is the sample 1 moves, and when the movement of the object is difficult, a configuration in which the waveguide 13 can move is also possible.
  • the terahertz wave or millimeter wave transmitted light propagating through the waveguide 13 is detected by a detector such as a pyroelectric element type detector 27a.
  • Fig. 8 shows the measurement site of the pipe cross-section of Sample 1, using the nondestructive inspection system shown in Fig. 7.
  • the near-field light 13a having a permeation depth of about the wavelength is formed around the waveguide 13, defects inside the pipe and changes in the thickness of the pipe are detected.
  • Non-destructive monitoring is possible as a change in permeation amount.
  • the measurement may be performed by moving one waveguide 13 along the pipe and arranging a plurality of waveguides 13 along the pipe. Further, in this case, the waveguide 13 may be measured in a coil shape.
  • Figure 9 shows how to determine the abnormal part from the results obtained at this time. If there is no abnormality in the object, a force indicating an arbitrary amount of transmission will move. If there is an abnormal part, the transmission will change. By comparing this amount of change with a threshold value, it becomes possible to inspect the opaque pipe.
  • FIG. 10 shows a reaction monitoring method for the solution, which is Sample 1, using the near-field light measurement apparatus 10.
  • the generated terahertz wave or millimeter wave is condensed on the end face of the waveguide 13 by the condenser lens 26 and is coupled to the waveguide 13 at the beam waist.
  • the waveguide 13 can also have a mechanism having a curvature to such an extent that the standing wave is not disturbed inside.
  • the waveguide 13 is made of a member having a refractive index higher than that of the solution, and propagates in the lowest order mode inside. As a result, near-field light oozes out of the entire waveguide 13.
  • the terahertz and millimeter wave bands are bands that absorb large amounts of water, unlike visible light, so the increase or decrease of water molecules due to hydrolysis in an enzymatic reaction in a protein solution, for example, due to changes in the near-field light that leaks out.
  • the power S can be monitored.
  • Figure 11 shows how to monitor the enzymatic reaction of a protein solution. When enzyme A is used, it can be determined that the reactivity is higher than that of enzyme B. Combining these results with LC / MS (liquid chromatography / mass spectrometry) enables high-efficiency production of any peptide.
  • the reaction inside can be measured, and further, the reaction can be measured with high sensitivity by changing the shape of the waveguide 13.
  • the waveguide 13 can be brought into close contact with the outer periphery of the container 2 as a method in which the waveguide 13 is not disposed in the liquid that is the sample 1.
  • the container 2 is preferably capable of transmitting a terahertz wave and a millimeter wave.
  • FIG. 13 shows the results of measuring the time change of the permeability to the antigen-antibody reaction in real time by the interaction (binding) between biotin and avidin. Since the biotin cannot be directly bonded to the waveguide 13 composed of the silicon rod force, the waveguide 13 is first immersed in a biotin-labeled BSA solution, then crosslinked with dartal aldehyde, and the biotin label is formed on the surface of the waveguide 13. BSA was immobilized. In this state, the experimental system was constructed and measurement started at 0 seconds in Fig. 13.
  • the periphery of the waveguide 13 is filled with a buffer in which BSA is dissolved.
  • the transmittance sharply decreases due to absorption by the nofer (especially water).
  • BSA in the solution gradually adheres to the surface of the waveguide 13 and is replaced with water molecules. Since water absorbs more than BSA, the transmittance gradually increases as shown in FIG.
  • the near-field light measurement apparatus 10 can measure a change in transmittance with time in response to an antigen-antibody reaction in real time.
  • bacteria and viruses can be observed.
  • the number of cells can be measured with the near-field light measurement device 10 to ensure the safety of milk. Can be secured.
  • FIG. 14 shows the result of spectroscopic measurement performed on the aqueous solution of water and monosaccharides by changing the wavelength of incident light.
  • Monosaccharide aqueous solutions include mannose and glucose (Glucose) and fructose (Fructose) were used, and the incident light frequencies were 0.93 THz and 0.996 THz.
  • Glucose mannose and glucose
  • fructose fructose
  • Fig. 14 (a) As shown in Fig. 14 (a), it was confirmed that, at 0.993 THz, only mannose has a low transmittance and a large absorption. In addition, mannose is known to absorb in the vicinity of 0.93 THz in the case of powder, which is inconsistent with this result. At 0.96 THz, it was confirmed that the transmittance of the three monosaccharide aqueous solutions was almost the same.
  • the spectral spectrum of a liquid sample can be acquired by the near-field light measurement method and the near-field light measurement apparatus 10 according to the embodiment of the present invention, which has not been obtained until now. Was confirmed. It is considered that long sugar chains such as oligosaccharides and other liquid samples can be analyzed by changing the wavelength of incident light.
  • the near-field light measuring apparatus 10 has a moving means 31 composed of a rotary stage, and the sample 1 and the waveguide 13 are placed by rotating the sample 1 on the rotary stage.
  • the relative position may be changed.
  • the pyroelectric element type detector 27a of the detector 14 detects the transmitted light, and the shape of the sample 1 is measured by the computer 29 of the analysis means from the change in the transmitted light intensity. 2D images or 3D images can be displayed.
  • the moving means 31 may be anything as long as it can change the relative position between the sample 1 and the waveguide 13 within the reach of near-field light.
  • spectroscopic measurement can be performed by changing the wavelength of incident light or by dispersing transmitted light by broadband incident light.
  • Figure 16 shows spectroscopic measurements on a sample with a thickness of lmm. The result of having performed is shown. As shown in FIG. 16, for example, when the wavelength power of incident light is THz, the transmittance is about 9%, and even a sample having a predetermined thickness can emit near-field light of terahertz waves and millimeter waves. It was confirmed that it can be used for spectroscopic measurement. By introducing such near-field spectroscopy, spectral imaging becomes possible. As a result, it is possible to identify substances and substance structures by imaging samples, such as chemical substances in envelopes, tissue diagnosis under skin, fruit and vegetable inspection, and industrial material inspection.
  • FIG. 17 shows the result of measuring the change in the intensity of transmitted light by moving the rectangular plate-shaped sample 1 in the direction perpendicular to the length direction of the waveguide 13.
  • the frequency of incident light is about ITHz.
  • Figure 18 shows the result of measuring the shape of Sample 1 by the computer 29 and displaying it as a two-dimensional image based on the result of Figure 17. As shown in Fig. 18, it was confirmed that the planar shape of Sample 1 was accurately reproduced.
  • the force S can be obtained to obtain a two-dimensional image or a three-dimensional image of the sample 1.
  • FIG. 19 when a polyethylene plate whose thickness is changed from lmm to 2mm is used as the sample 1, the sample 1 is moved in the direction perpendicular to the axial direction of the waveguide 13. The result of measuring the intensity change of transmitted light is shown. The frequency of incident light is about ITHz. As shown in FIG. 19, it was confirmed that the intensity changed at the position where the thickness of Sample 1 changed. Therefore, according to the near-field light measurement method and the near-field light measurement apparatus 10 of the embodiment of the present invention, the two-dimensional shape of the sample 1 can be measured, and the shape force of the sample 1 2 7 source Ability to obtain images. The change in intensity after the thickness change is considered to be due to the influence of scattering at the edge of Sample 1.
  • FIG. 1 is an overall configuration diagram showing a near-field light measuring apparatus according to an embodiment of the present invention.
  • FIG. 2 is a graph showing the aqueous solution concentration dependence of the transmittance of terahertz waves in the near-field light measurement method and the near-field light measurement device according to the embodiment of the present invention.
  • FIG. 3 shows the near-field light measurement method and the near-field light measurement device according to the embodiment of the present invention. It is a graph which shows the sample length dependence of the transmittance
  • FIG. 4 is a graph showing millimeter wave transmittances for water and a 50% sugar aqueous solution in the near-field light measurement method and the near-field light measurement device according to the embodiment of the present invention.
  • FIG. 5 is a perspective view showing an application example of the near-field light measurement method and the near-field light measurement device according to the embodiment of the present invention to a biological information measurement system.
  • FIG. 6 is a graph showing a method for determining the experimental result of the biological information measurement system shown in FIG.
  • FIG. 7 is a perspective view showing an application example of the near-field light measurement method and the near-field light measurement device of the embodiment of the present invention to a nondestructive inspection system for industrial products and the like.
  • FIG. 8 is a cross-sectional view showing a usage state of the nondestructive inspection system shown in FIG.
  • FIG. 10 is a perspective view showing an application example of the near-field light measurement method and the near-field light measurement device of the embodiment of the present invention to a solution reaction monitoring method.
  • FIG. 12 is a side view showing an application example of the near-field light measurement method and the near-field light measurement device according to the embodiment of the present invention to measurement of an object in a container.
  • FIG. 13 is a graph showing the temporal change of transmittance with respect to antigen-antibody reaction in the near-field light measurement method and the near-field light measurement device according to the embodiment of the present invention.
  • FIG. 14 shows (a) a graph showing the results of spectroscopic measurement on a liquid sample, and (b) spectroscopic measurement of a liquid sample in the vicinity of the waveguide of the near-field light measurement method and near-field light measurement device of the embodiment of the present invention. It is a perspective view which shows a fixed method.
  • FIG. 15 is a block diagram showing a modified example having a moving means of the near-field light measuring device shown in FIG.
  • FIG. 16 is a graph showing spectroscopic measurement results of the near-field light measurement method and the near-field light measurement apparatus according to the embodiment of the present invention.
  • FIG. 17 (a) A rectangular plate-shaped sample of a near-field light measurement method and a near-field light measurement apparatus according to an embodiment of the present invention along the long side direction with respect to the waveguide length direction. To move vertically A graph showing the change in transmittance when moved; (b) the transmittance when a rectangular plate-shaped sample is moved in the direction perpendicular to the length direction of the waveguide along its short side direction. It is a graph showing changes.
  • FIG. 19 (a) a graph showing a change in intensity of transmitted light with respect to the thickness of a sample, (b) a perspective view of a sample of the near-field light measurement method and the near-field light measurement device of the embodiment of the present invention; c) A side view showing a moving state of the sample with respect to the waveguide.

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Abstract

Le problème à résoudre dans le cadre de la présente invention concerne un procédé et un dispositif de mesure de lumière de champ proche destinés à effectuer une mesure très sensible d'un échantillon tel que de l'eau qui absorbe ou diffuse considérablement une bande d'ondes térahertziennes ou une bande d'ondes millimétriques, ce qui rend la mesure difficile, et à produire une image bidimensionnelle de l'échantillon. La solution proposée consiste en un dispositif permettant de transformer la lumière entrante de l'onde térahertzienne ou de l'onde millimétrique émise par une source lumineuse (11) en un faisceau parallèle de lumière à l'aide d'un élément optique (12). Le faisceau parallèle est soumis à une modulation d'intensité par un découpeur optique (24) ou similaire, focalisé par une lentille (26) et amené à entrer dans un guide d'ondes (13). L'onde térahertzienne ou l'onde millimétrique se propageant à travers le guide d'ondes (13) présente un mode de propagation caractéristique et se propage tout en produisant une lumière de champ proche uniforme sur la surface du guide d'ondes (13). La lumière transmise de l'onde térahertzienne ou de l'onde millimétrique émise par le guide d'ondes (13) dans l'espace libre est détectée par un détecteur à élément pyroélectrique (27a) et affichée sur un oscilloscope (28). L'échantillon est placé dans la zone que peut atteindre la lumière de champ proche produite sur la surface du guide d'ondes (13), ce qui permet d'acquérir des informations sur l'échantillon.
PCT/JP2007/066494 2006-08-28 2007-08-24 Procédé et dispositif de mesure de lumière de champ proche WO2008026523A1 (fr)

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JP2013190311A (ja) * 2012-03-13 2013-09-26 Canon Inc センサ装置
CN104330384A (zh) * 2014-11-14 2015-02-04 首都师范大学 应用太赫兹频域光谱技术检测粮食中氨基酸含量的方法
CN105092518A (zh) * 2015-06-16 2015-11-25 江西农业大学 一种脐橙糖度快速无损检测方法和装置
CN105699701A (zh) * 2016-03-26 2016-06-22 吉林大学 用于提取近场太赫兹信号的伪零差干涉探测系统及探测方法
CN105699701B (zh) * 2016-03-26 2019-01-25 吉林大学 用于提取近场太赫兹信号的伪零差干涉探测系统及探测方法
CN109696422A (zh) * 2018-12-27 2019-04-30 雄安华讯方舟科技有限公司 太赫兹近场成像装置和方法
CN111366555A (zh) * 2020-02-27 2020-07-03 浙江大学 一种耕地土壤中农膜残留的检测方法
CN111366555B (zh) * 2020-02-27 2021-01-26 浙江大学 一种耕地土壤中农膜残留的检测方法
JP2021179390A (ja) * 2020-05-15 2021-11-18 国立研究開発法人理化学研究所 自由水測定装置、自由水測定方法、及びプログラム
JP7418005B2 (ja) 2020-05-15 2024-01-19 国立研究開発法人理化学研究所 自由水測定装置、自由水測定方法、及びプログラム
CN112083196A (zh) * 2020-09-17 2020-12-15 电子科技大学 一种太赫兹近场成像系统及方法
CN112083196B (zh) * 2020-09-17 2021-09-28 电子科技大学 一种太赫兹近场成像系统及方法

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