WO2008024721A3 - Ethylene terephthalate polymer retaining ring for a chemical mechanical polishing head - Google Patents

Ethylene terephthalate polymer retaining ring for a chemical mechanical polishing head Download PDF

Info

Publication number
WO2008024721A3
WO2008024721A3 PCT/US2007/076331 US2007076331W WO2008024721A3 WO 2008024721 A3 WO2008024721 A3 WO 2008024721A3 US 2007076331 W US2007076331 W US 2007076331W WO 2008024721 A3 WO2008024721 A3 WO 2008024721A3
Authority
WO
WIPO (PCT)
Prior art keywords
retaining ring
mechanical polishing
chemical mechanical
ethylene terephthalate
polishing head
Prior art date
Application number
PCT/US2007/076331
Other languages
French (fr)
Other versions
WO2008024721A2 (en
Inventor
Gerard Stephen Moloney
Peter Lao
Original Assignee
Ebara Tech Inc
Gerard Stephen Moloney
Peter Lao
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Tech Inc, Gerard Stephen Moloney, Peter Lao filed Critical Ebara Tech Inc
Publication of WO2008024721A2 publication Critical patent/WO2008024721A2/en
Publication of WO2008024721A3 publication Critical patent/WO2008024721A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B24B37/32—Retaining rings

Abstract

Embodiments of a retaining ring for use with a chemical mechanical polishing process with a body including a polyethylene terephthalate polymer or polymer including ethylene terephthalate monomers are disclosed.
PCT/US2007/076331 2006-08-22 2007-08-20 Ethylene terephthalate polymer retaining ring for a chemical mechanical polishing head WO2008024721A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US83955206P 2006-08-22 2006-08-22
US60/839,552 2006-08-22
US11/542,303 US20080051011A1 (en) 2006-08-22 2006-10-02 Ethylene terephthalate polymer retaining ring for a chemical mechanical polishing head
US11/542,303 2006-10-02

Publications (2)

Publication Number Publication Date
WO2008024721A2 WO2008024721A2 (en) 2008-02-28
WO2008024721A3 true WO2008024721A3 (en) 2008-07-24

Family

ID=39107569

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/076331 WO2008024721A2 (en) 2006-08-22 2007-08-20 Ethylene terephthalate polymer retaining ring for a chemical mechanical polishing head

Country Status (3)

Country Link
US (1) US20080051011A1 (en)
TW (1) TW200815155A (en)
WO (1) WO2008024721A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8740673B2 (en) * 2010-10-05 2014-06-03 Strasbaugh CMP retaining ring with soft retaining ring insert
US9050700B2 (en) 2012-01-27 2015-06-09 Applied Materials, Inc. Methods and apparatus for an improved polishing head retaining ring
US9597771B2 (en) * 2013-12-19 2017-03-21 Taiwan Semiconductor Manufacturing Co., Ltd. Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6899610B2 (en) * 2001-06-01 2005-05-31 Raytech Innovative Solutions, Inc. Retaining ring with wear pad for use in chemical mechanical planarization
US7086939B2 (en) * 2004-03-19 2006-08-08 Saint-Gobain Performance Plastics Corporation Chemical mechanical polishing retaining ring with integral polymer backing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6899610B2 (en) * 2001-06-01 2005-05-31 Raytech Innovative Solutions, Inc. Retaining ring with wear pad for use in chemical mechanical planarization
US7086939B2 (en) * 2004-03-19 2006-08-08 Saint-Gobain Performance Plastics Corporation Chemical mechanical polishing retaining ring with integral polymer backing

Also Published As

Publication number Publication date
TW200815155A (en) 2008-04-01
WO2008024721A2 (en) 2008-02-28
US20080051011A1 (en) 2008-02-28

Similar Documents

Publication Publication Date Title
WO2007099239A3 (en) Modification of solid surfaces by means of polymer combinations
EP2236577A3 (en) Polyethylene article
TWI315317B (en) Solid titanium catalyst component, catalyst for polymerization of olefin and process for producing olefin polymer
ZA200707776B (en) A process for the preparation of an ethylene copolymer in a tubular reactor
BRPI0910239A2 (en) polyethylene terephthalate polymer of biological origin, container of biological origin, and method of producing a polyethylene terephthalate polymer of biological origin.
WO2010019597A3 (en) Cyclo olefin polymer and copolymer medical devices
GB0609973D0 (en) An apparatus for the production of polyethylene and ethylene copolymers
MX2008007999A (en) A process for the preparation of an olefin oxide or a chemical derivable from an olefin oxide, and a reactor suitable for such a process
WO2009016532A3 (en) Personal-care articles having self-assembling peptides
WO2007146297A3 (en) Surface treatment of a polymeric stent
EP2046556A4 (en) Methods for changing the shape of a surface of a shape memory polymer article
BRPI1006795A2 (en) ethylene polymerization in a high pressure reactor with improved primer feed
EP1900758A4 (en) Catalyst for olefin polymerization, method for producing olefin polymer, method for producing propylene copolymer, propylene polymer, propylene polymer composition, and use of those
WO2011090643A3 (en) Moisture-curable siloxane-containing and fluorocarbon-containing compounds and polymers formed therefrom
WO2009115266A8 (en) Medical device having hydrophilic coatings
PL1937748T3 (en) Process for the production of a pet polymer with improved properties
WO2009027971A3 (en) Antimicrobial polymers
EP2089452B8 (en) Process for obtaining increased molecular weight of a polymer and the use of said polymer
WO2008024721A3 (en) Ethylene terephthalate polymer retaining ring for a chemical mechanical polishing head
EP2520591B8 (en) Catalyst for polyolefin polymerisation and a production method for the same
TW200801103A (en) Use of propylene copolymer waxes for production of tacky plastics films
PL1907460T3 (en) Cycloolefin copolymer bottle with a scratch-resistant coating
WO2010068691A3 (en) Carrier head membrane roughness to control polishing rate
EP2020448A4 (en) Primer set for detection of dekkera yeast or brettanomyces yeast
WO2011115812A8 (en) Affinity peptides toward bmp-2

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07841125

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

NENP Non-entry into the national phase

Ref country code: RU

122 Ep: pct application non-entry in european phase

Ref document number: 07841125

Country of ref document: EP

Kind code of ref document: A2