WO2008006809A1 - Vacuum pump with cast drive motor - Google Patents

Vacuum pump with cast drive motor Download PDF

Info

Publication number
WO2008006809A1
WO2008006809A1 PCT/EP2007/056992 EP2007056992W WO2008006809A1 WO 2008006809 A1 WO2008006809 A1 WO 2008006809A1 EP 2007056992 W EP2007056992 W EP 2007056992W WO 2008006809 A1 WO2008006809 A1 WO 2008006809A1
Authority
WO
WIPO (PCT)
Prior art keywords
motor
vacuum
vacuum pump
stator
drive motor
Prior art date
Application number
PCT/EP2007/056992
Other languages
German (de)
French (fr)
Inventor
Dirk Schiller
Manfred Wybranietz
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Publication of WO2008006809A1 publication Critical patent/WO2008006809A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/08—Insulating casings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/04—Thermal properties
    • F05C2251/048—Heat transfer

Definitions

  • the invention relates to a vacuum pump with an electric drive motor having a motor rotor and a motor stator.
  • Another design solution is to isolate the motor rotor isolated by a split pot in vacuum, while the motor stator outside the gap pot is arranged outside the vacuum or in the atmosphere.
  • the containment shell entails inevitable electro-technical disadvantages, namely a deteriorated efficiency and a degraded power factor, and as a result a relatively large drive motor and high heat losses.
  • the object of the invention is in contrast to provide a vacuum pump with an electric drive motor with high efficiency and without shaft seal.
  • the motor stator is arranged within a vacuum-tight motor housing within the vacuum. Furthermore, the motor stator is cast in a potting compound body from a suitable potting compound. In contrast to a split pot motor not only the motor rotor, but also the motor stator is arranged within the vacuum space according to the invention, that is not hermetically separated from vacuum-carrying parts of the vacuum pump. If necessary, the motor housing has only one opening through which control and supply lines for the drive motor are led outwards to the outside of the motor housing.
  • the vacuum-tight sealing of non-moving parts, as they are control and supply lines, is much easier than the sealing of a moving part against a stationary part, for example by a shaft seal. With the arrangement of both the motor rotor and the motor stator in vacuum, a shaft seal is eliminated and a leak-free and reliable permanent sealing of the vacuum space of the vacuum pump is realized.
  • the gap between the motor stator and the motor rotor can be reduced to a constructively required minimum.
  • the efficiency or the power factor of the drive motor is significantly improved.
  • smaller electric drive motors can be used to generate the same shaft power. Because of the lower electromagnetic losses and the heat generation is significantly reduced, whereby further structural simplifications are made possible.
  • the motor stator is cast in a potting compound, wherein in any case the motor stator winding or windings are cast into the potting compound body. This is necessary because otherwise between the turns of the stator winding or windings in a vacuum voltage flashovers would occur.
  • the potting compound is a good electrical insulator compared to the potting compound-free vacuum. Furthermore, the potting compound ensures heat removal due to its thermal conductivity.
  • the laminated core of the motor stator can, but need not, be completely or partially molded into the potting compound body.
  • the motor stator has a winding or a plurality of windings and a laminated core, wherein both the winding or windings and the laminated core are cast into the potting compound body.
  • the potting material is an epoxy resin. Epoxy resin is a good electrical insulator, has high thermal conductivity, and is relatively easy to cast at relatively low temperatures.
  • the potting compound contains fillers which have a better thermal conductivity than the potting compound material. As a result, the heat conductivity of the potting compound is increased, so that larger amounts of heat can be dissipated.
  • a cable feedthrough is provided by a motor housing opening and protrudes the potting compound axially with an approach into the opening, ie along the axial of the drive motor and the pump rotor.
  • the approach is formed integrally with the potting compound of the potting compound body.
  • the lines for supplying the drive motor and possibly other lines are arranged axially.
  • the vacuum-tight seal of the implementation may be formed between the Vergussmasse- approach and the opening edge by suitable sealing means, for example by a rubber-elastic O-ring.
  • the actual vacuum-tight seal can also be effected by a separate opening cover, which in turn is sealed with respect to the edge of the motor housing opening with a rubber-elastic O-ring, and having corresponding contact pins for the implementation.
  • the drive motor is a brushless DC or asynchronous motor.
  • Such motors are particularly suitable as a drive motor for vacuum pumps because of their brushlessness.
  • the vacuum pump is a Roots vacuum pump.
  • Roots vacuum pumps is by design, the drive motor or parts of the drive motor usually on the vacuum side arranged so that the requirement of a vacuum-tight sealing of the drive motor results in particular in Roots vacuum pumps.
  • Figure 1 shows a Roots vacuum pump in longitudinal section
  • FIG. 2 enlarges a line bushing of the vacuum pump of FIG. 1.
  • Roots vacuum pump 10 is shown in longitudinal section, the u.a. an electric drive motor 12, a first pump rotor 14 and two bearings designed as a roller bearing 16,18.
  • One of the two rolling bearings 18 is arranged axially between the pump rotor 14 and the drive motor 12.
  • a second pump rotor, with which the first pump rotor cooperates, is not shown.
  • the housing 19 of the vacuum pump 10 essentially consists of a gear housing 20, a pump housing 22 and a motor housing 24.
  • the vacuum-tight metal motor housing 24 of the drive motor 12 is arranged, which is formed by a motor stator 28 and a motor rotor 30 sitting on a wave 32.
  • the drive motor 12 is a brushless DC motor, but may also be designed as a brushless asynchronous motor. In any case, the drive motor 12 is brushless.
  • the entire vacuum pump housing 19 is formed vacuum-tight.
  • the motor housing 24 is formed vacuum-tight. Within the motor housing 24 therefore always approximately the same gas pressure is formed, as at the adjacent end of the pump rotor 14. This is, inter alia required to prevent gas flow from the motor housing 24 in the direction of the pump rotor 14, could pass through the undesirably lubricant from the motor housing 24 in the pump area.
  • a sealing arrangement 34 is provided, which is essentially a lubricant seal and prevents passage of lubricant from the motor housing 24 into the pump housing 22.
  • the motor stator 28 has a plurality of windings 42 on a laminated core 40.
  • the motor stator 28 formed by the laminated core 40 and the windings 42 is completely cast in a potting compound body 43 of potting compound 44.
  • the potting compound body 43 forms in this way a closed ring.
  • the potting compound 44 is made of epoxy resin and contains fillers which have a better thermal conductivity than the Vergussmassen- material. Particularly suitable as fillers are electromagnetically neutral materials, such as sand and the like.
  • a line bushing 46 is shown enlarged by an axial motor housing opening 48.
  • a potting compound 60 protrudes axially into the opening 48 over part of the opening length.
  • the opening 48 and lug 60 are arranged axially, i. parallel to the drive motor axial.
  • the actual vacuum-tight sealing takes place through a cover 62, which is sealed with an O-ring 64 relative to the housing 24.
  • the cover 62 one or more contact pins 50 'are cast, the electrical leads 50 contact the outside.
  • the electrical leads 50 are used to energize the motor stator 28, possibly serve to energize a magnetic bearing and are used to transmit sensor data.

Abstract

The invention relates to a vacuum pump (10) with an electric drive motor (12) which has a motor-rotor (30) and a motor-stator (28). According to the invention, the motor-stator (28) is arranged inside a vacuum-sealed motor housing (24) in the vacuum. The motor-stator (28) is cast in a casting-compound body (43) and in this way is hermetically insulated against the vacuum. The casting compound (44) acts as an electrical insulator which prevents voltage discharges between coil windings, and additionally acts as a good thermal conductor which allows the heat generated in the motor-stator (28) to be dissipated. Both the motor-rotor (30) and the motor-stator (28) are arranged in the vacuum such that there is no need for a spacer can. The drive motor (12) thus has a high efficiency and a high power factor.

Description

VAKUUMPUMPE MIT EINGEGOSSENEM ANTRIEBSMOTOR VACUUM PUMP WITH INCLUDED DRIVE MOTOR
Die Erfindung bezieht sich auf eine Vakuumpumpe mit einem elektrischen Antriebsmotor, der einen Motor-Rotor und einen Motor-Stator aufweist.The invention relates to a vacuum pump with an electric drive motor having a motor rotor and a motor stator.
Bei Vakuumpumpen mit einem rotorantreibenden elektrischen Antriebsmotor sind verschiedene Konstruktionen bekannt, um den vakuumführenden Teil der Pumpe in Bezug auf den Antriebsmotor abzudichten. Eine Lösung besteht darin, den Antriebsmotor vollständig außerhalb des Vakuums anzuordnen und die Motorwelle durch eine Öffnung des Pumpengehäuses hindurch zu führen. Die Wellendichtung an der Gehäusedurchführung muss vakuumdicht ausgeführt sein, was beispielsweise mit ölgedichteten Wellendichtungen realisierbar ist. Eine derartige Dichtung eignet sich jedoch grundsätzlich nicht für einen ölfreien Betrieb.In vacuum pumps with a rotor-driving electric drive motor, various constructions are known for sealing the vacuum-carrying part of the pump with respect to the drive motor. One solution is to dispose the drive motor completely out of vacuum and pass the motor shaft through an opening in the pump housing. The shaft seal on the housing feedthrough must be made vacuum-tight, which can be realized, for example, with oil-sealed shaft seals. However, such a seal is in principle not suitable for oil-free operation.
Eine andere konstruktive Lösung besteht darin, den Motor-Rotor durch einen Spalttopf isoliert im Vakuum anzuordnen, während der Motor-Stator außerhalb des Spalttopfes außerhalb des Vakuums bzw. in der Atmosphäre angeordnet ist. Der Spalttopf bringt jedoch unvermeidliche elektrotechnische Nachteile mit sich, nämlich einen verschlechterten Wirkungsgrad und einen verschlechterten Leistungsfaktor, und daraus resultierend einen relativ großen Antriebsmotor und hohe Wärmeverluste.Another design solution is to isolate the motor rotor isolated by a split pot in vacuum, while the motor stator outside the gap pot is arranged outside the vacuum or in the atmosphere. However, the containment shell entails inevitable electro-technical disadvantages, namely a deteriorated efficiency and a degraded power factor, and as a result a relatively large drive motor and high heat losses.
Aufgabe der Erfindung ist es demgegenüber, eine Vakuumpumpe mit einem elektrischen Antriebsmotor mit hohem Wirkungsgrad und ohne Wellendichtung zu schaffen.The object of the invention is in contrast to provide a vacuum pump with an electric drive motor with high efficiency and without shaft seal.
Diese Aufgabe wird erfindungsgemäß gelöst mit einer Vakuumpumpe mit den Merkmalen des Patentanspruches 1.This object is achieved according to the invention with a vacuum pump having the features of patent claim 1.
Bei der erfindungsgemäßen Vakuumpumpe ist der Motor-Stator innerhalb eines vakuumdichten Motorgehäuses innerhalb des Vakuums angeordnet. Ferner ist der Motor-Stator in einem Vergussmasse-Körper aus einer geeigneten Vergussmasse eingegossen. Im Gegensatz zu einem Spalttopf-Motor ist gemäß der Erfindung nicht nur der Motor-Rotor, sondern auch der Motor-Stator innerhalb des Vakuumraumes angeordnet, also nicht hermetisch getrennt von vakuumführenden Teilen der Vakuumpumpe. Das Motorgehäuse weist ggf. lediglich eine Öffnung auf, durch die Steuer- und Versorgungsleitungen für den Antriebsmotor nach außen zur Außenseite des Motorgehäuses geführt werden. Die vakuumdichte Abdichtung von nicht beweglichen Teilen, wie sie Steuer- und Versorgungsleitungen darstellen, ist erheblich einfacher als die Abdichtung eines beweglichen Teiles gegenüber einem unbeweglichen Teil, beispielsweise durch eine Wellendichtung. Mit der Anordnung sowohl des Motor-Rotors als auch des Motor-Stators im Vakuum fällt eine Wellendichtung weg und wird eine leckfreie und zuverlässige dauerhafte Abdichtung des Vakuumraumes der Vakuumpumpe realisiert.In the vacuum pump according to the invention, the motor stator is arranged within a vacuum-tight motor housing within the vacuum. Furthermore, the motor stator is cast in a potting compound body from a suitable potting compound. In contrast to a split pot motor not only the motor rotor, but also the motor stator is arranged within the vacuum space according to the invention, that is not hermetically separated from vacuum-carrying parts of the vacuum pump. If necessary, the motor housing has only one opening through which control and supply lines for the drive motor are led outwards to the outside of the motor housing. The vacuum-tight sealing of non-moving parts, as they are control and supply lines, is much easier than the sealing of a moving part against a stationary part, for example by a shaft seal. With the arrangement of both the motor rotor and the motor stator in vacuum, a shaft seal is eliminated and a leak-free and reliable permanent sealing of the vacuum space of the vacuum pump is realized.
Durch das Wegfallen eines Spalttopfes kann der Spalt zwischen dem Motor- Stator und dem Motor-Rotor auf ein konstruktiv erforderliches Mindestmaß reduziert werden. Hierdurch wird der Wirkungsgrad bzw. der Leistungsfaktor des Antriebsmotors erheblich verbessert. Hierdurch lassen sich wiederum kleinere elektrische Antriebsmotoren zur Erzeugung derselben Wellenleistung einsetzen. Wegen der geringeren elektromagnetischen Verluste ist auch die Wärmeentwicklung erheblich reduziert, wodurch weitere konstruktive Vereinfachungen ermöglicht werden.By eliminating a split pot, the gap between the motor stator and the motor rotor can be reduced to a constructively required minimum. As a result, the efficiency or the power factor of the drive motor is significantly improved. As a result, smaller electric drive motors can be used to generate the same shaft power. Because of the lower electromagnetic losses and the heat generation is significantly reduced, whereby further structural simplifications are made possible.
Der Motor-Stator ist in einer Vergussmasse eingegossen, wobei jedenfalls die Motor-Statorwicklung bzw. -Wicklungen in den Vergussmasse-Körper eingegossen sind. Dies ist erforderlich, da andernfalls zwischen den Windungen der Statorwicklung bzw. -Wicklungen im Vakuum Spannungsüberschläge auftreten würden. Die Vergussmasse ist ein guter elektrischer Isolator im Vergleich zum vergussmassefreien Vakuum. Ferner stellt die Vergussmasse wegen ihrer Wärmeleitfähigkeit den Wärmeabtransport sicher. Das Blechpaket des Motor-Stators kann, muss aber nicht, vollständig oder teilweise mit in den Vergussmasse-Körper mit eingegossen sein.The motor stator is cast in a potting compound, wherein in any case the motor stator winding or windings are cast into the potting compound body. This is necessary because otherwise between the turns of the stator winding or windings in a vacuum voltage flashovers would occur. The potting compound is a good electrical insulator compared to the potting compound-free vacuum. Furthermore, the potting compound ensures heat removal due to its thermal conductivity. The laminated core of the motor stator can, but need not, be completely or partially molded into the potting compound body.
Weitere wichtige Eigenschaften der Vergussmasse sollten eine geringe Ausgasung und eine gute Korrosionsbeständigkeit sein.Other important properties of the potting compound should be low outgassing and good corrosion resistance.
Der Motor-Stator weist eine Wicklung oder mehrere Wicklungen sowie ein Blechpaket auf, wobei sowohl die Wicklung bzw. Wicklungen und das Blechpaket in den Vergussmasse-Körper eingegossen sind. Gemäß einer bevorzugten Ausgestaltung ist das Vergussmassen-Material ein Epoxydharz. Epoxydharz ist ein guter elektrischer Isolator, weist eine hohe Wärmeleitfähigkeit auf und ist relativ einfach bei relativ niedrigen Temperaturen gießbar.The motor stator has a winding or a plurality of windings and a laminated core, wherein both the winding or windings and the laminated core are cast into the potting compound body. According to a preferred embodiment, the potting material is an epoxy resin. Epoxy resin is a good electrical insulator, has high thermal conductivity, and is relatively easy to cast at relatively low temperatures.
Gemäß einer bevorzugten Ausführung enthält die Vergussmasse Füllstoffe, die eine bessere Wärmeleitfähigkeit aufweisen, als das Vergussmassen-Material. Hierdurch wird die Wärmeleitfähigkeit der Vergussmasse erhöht, so dass größere Wärmemengen abgeführt werden können.According to a preferred embodiment, the potting compound contains fillers which have a better thermal conductivity than the potting compound material. As a result, the heat conductivity of the potting compound is increased, so that larger amounts of heat can be dissipated.
Vorzugsweise ist eine Leitungsdurchführung durch eine Motorgehäuse-Öffnung vorgesehen und ragt die Vergussmasse mit einem Ansatz axial in die Öffnung hinein, also entlang der Axialen des Antriebsmotors und des Pumpenrotors. Der Ansatz ist einstückig mit der Vergussmasse des Vergussmasse-Körpers ausgebildet. In dem Ansatz sind möglichst mittig die Leitungen zur Versorgung des Antriebsmotors und ggf. weiterer Leitungen axial angeordnet. Die vakuumdichte Abdichtung der Durchführung kann zwischen dem Vergussmasse- Ansatz und dem Öffnungsrand durch geeignete Dichtmittel, beispielsweise durch einen gummi-elastischen O-Ring ausgebildet sein. Die eigentliche vakuumdichte Abdichtung kann jedoch auch durch einen separaten Öffnungs-Deckel erfolgen, der seinerseits gegenüber dem Rand der Motorgehäuse-Öffnung mit einem gummi-elastischen O-Ring abgedichtet ist, und zur Durchführung entsprechende Kontaktstifte aufweist.Preferably, a cable feedthrough is provided by a motor housing opening and protrudes the potting compound axially with an approach into the opening, ie along the axial of the drive motor and the pump rotor. The approach is formed integrally with the potting compound of the potting compound body. In the approach as centrally as possible, the lines for supplying the drive motor and possibly other lines are arranged axially. The vacuum-tight seal of the implementation may be formed between the Vergussmasse- approach and the opening edge by suitable sealing means, for example by a rubber-elastic O-ring. However, the actual vacuum-tight seal can also be effected by a separate opening cover, which in turn is sealed with respect to the edge of the motor housing opening with a rubber-elastic O-ring, and having corresponding contact pins for the implementation.
Vorzugsweise ist der Antriebsmotor ein bürstenloser Gleichstrom- oder Asynchron-Motor. Derartige Motoren sind wegen ihrer Bürstenlosigkeit besonders geeignet als Antriebsmotor für Vakuumpumpen.Preferably, the drive motor is a brushless DC or asynchronous motor. Such motors are particularly suitable as a drive motor for vacuum pumps because of their brushlessness.
Gemäß einer bevorzugten Ausführung ist die Vakuumpumpe eine Wälzkolben- Vakuumpumpe. Bei Wälzkolben-Vakuumpumpen ist konstruktionsbedingt der Antriebsmotor bzw. Teile des Antriebsmotors in der Regel auf der Vakuumseite angeordnet, so dass sich das Erfordernis einer vakuumdichten Abdichtung des Antriebsmotors insbesondere bei Wälzkolben-Vakuumpumpen ergibt.According to a preferred embodiment, the vacuum pump is a Roots vacuum pump. In Roots vacuum pumps is by design, the drive motor or parts of the drive motor usually on the vacuum side arranged so that the requirement of a vacuum-tight sealing of the drive motor results in particular in Roots vacuum pumps.
Im Folgenden wird unter Bezugnahme auf die Zeichnungen ein Ausführungsbeispiel der Erfindung näher erläutert.In the following an embodiment of the invention will be explained in more detail with reference to the drawings.
Figur 1 zeigt eine Wälzkolben-Vakuumpumpe im Längsschnitt, undFigure 1 shows a Roots vacuum pump in longitudinal section, and
Figur 2 vergrößert eine Leitungsdurchführung der Vakuumpumpe der Fig. 1.FIG. 2 enlarges a line bushing of the vacuum pump of FIG. 1.
In der Figur 1 ist eine Wälzkolben-Vakuumpumpe 10 im Längsschnitt dargestellt, die u.a. einen elektrischen Antriebsmotor 12, einen ersten Pumpenrotor 14 und zwei als Wälzlager ausgebildete Lager 16,18 aufweist. Eines der beiden Wälzlager 18 ist axial zwischen dem Pumpenrotor 14 und dem Antriebsmotor 12 angeordnet. Ein zweiter Pumpenrotor, mit dem der erste Pumpenrotor zusammenwirkt, ist nicht dargestellt.1 shows a Roots vacuum pump 10 is shown in longitudinal section, the u.a. an electric drive motor 12, a first pump rotor 14 and two bearings designed as a roller bearing 16,18. One of the two rolling bearings 18 is arranged axially between the pump rotor 14 and the drive motor 12. A second pump rotor, with which the first pump rotor cooperates, is not shown.
Das Gehäuse 19 der Vakuumpumpe 10 besteht im Wesentlichen aus einem Getriebegehäuse 20, einem Pumpengehäuse 22 und einem Motorgehäuse 24. In dem vakuumdichten Metall-Motorgehäuse 24 ist der Antriebsmotor 12 angeordnet, der von einem Motor-Stator 28 und einem Motor-Rotor 30 gebildet wird, der auf einer Welle 32 sitzt.The housing 19 of the vacuum pump 10 essentially consists of a gear housing 20, a pump housing 22 and a motor housing 24. In the vacuum-tight metal motor housing 24 of the drive motor 12 is arranged, which is formed by a motor stator 28 and a motor rotor 30 sitting on a wave 32.
Der Antriebsmotor 12 ist ein bürstenloser Gleichstrommotor, kann jedoch auch als bürstenloser Asynchronmotor ausgebildet sein. In jedem Fall ist der Antriebsmotor 12 bürstenlos ausgebildet.The drive motor 12 is a brushless DC motor, but may also be designed as a brushless asynchronous motor. In any case, the drive motor 12 is brushless.
Das gesamte Vakuumpumpen-Gehäuse 19 ist vakuumdicht ausgebildet. Insbesondere das Motorgehäuse 24 ist vakuumdicht ausgebildet. Innerhalb des Motorgehäuses 24 bildet sich daher stets ungefähr der gleiche Gasdruck aus, wie an dem angrenzenden Ende des Pumpenrotors 14. Dies ist u.a. deshalb erforderlich, um eine Gasströmung von dem Motorgehäuse 24 in Richtung Pumpenrotor 14 zu vermeiden, durch den unerwünschterweise Schmiermittel aus dem Motorgehäuse 24 in den Pumpenbereich gelangen könnte.The entire vacuum pump housing 19 is formed vacuum-tight. In particular, the motor housing 24 is formed vacuum-tight. Within the motor housing 24 therefore always approximately the same gas pressure is formed, as at the adjacent end of the pump rotor 14. This is, inter alia required to prevent gas flow from the motor housing 24 in the direction of the pump rotor 14, could pass through the undesirably lubricant from the motor housing 24 in the pump area.
Zwischen dem motorseitigen Lager 18 und dem Pumpenrotor 14 ist eine Dichtanordnung 34 vorgesehen, die im Wesentlichen eine Schmiermittel- Dichtung ist und einen Übertritt von Schmiermittel aus dem Motorgehäuse 24 in das Pumpengehäuse 22 verhindert.Between the motor-side bearing 18 and the pump rotor 14, a sealing arrangement 34 is provided, which is essentially a lubricant seal and prevents passage of lubricant from the motor housing 24 into the pump housing 22.
Der Motor-Stator 28 weist auf einem Blechpaket 40 mehrere Wicklungen 42 auf. Der von dem Blechpaket 40 und den Wicklungen 42 gebildete Motor-Stator 28 ist vollständig in einem Vergussmasse-Körper 43 aus Vergussmasse 44 eingegossen. Der Vergussmasse-Körper 43 bildet auf diese Weise einen geschlossenen Ring. Die Vergussmasse 44 besteht aus Epoxydharz und enthält Füllstoffe, die eine bessere Wärmeleitfähigkeit aufweisen als das Vergussmassen- Material. Als Füllstoffe eignen sich insbesondere elektromagnetisch neutrale Materialien, wie beispielsweise Sand u.a..The motor stator 28 has a plurality of windings 42 on a laminated core 40. The motor stator 28 formed by the laminated core 40 and the windings 42 is completely cast in a potting compound body 43 of potting compound 44. The potting compound body 43 forms in this way a closed ring. The potting compound 44 is made of epoxy resin and contains fillers which have a better thermal conductivity than the Vergussmassen- material. Particularly suitable as fillers are electromagnetically neutral materials, such as sand and the like.
In der Figur 2 ist vergrößert eine Leitungsdurchführung 46 durch eine axiale Motorgehäuse-Öffnung 48 dargestellt. Ein Vergussmasse-Ansatz 60 ragt axial über einen Teil der Öffnungslänge in die Öffnung 48 hinein. Die Öffnung 48 und der Ansatz 60 sind axial angeordnet, d.h. parallel zur Antriebsmotor-Axialen. Die eigentliche vakuumdichte Abdichtung erfolgt durch einen Deckel 62, der mit einem O-Ring 64 gegenüber dem Gehäuse 24 abgedichtet ist. In dem Deckel 62 ist ein bzw. sind mehrere Kontaktstifte 50' eingegossen, die elektrische Leitungen 50 nach außen kontaktieren. Die elektrischen Leitungen 50 dienen der Bestromung des Motor-Stators 28, dienen ggf. der Bestromung einer Magnetlagerung und dienen der Übertragung von Sensordaten. In FIG. 2, a line bushing 46 is shown enlarged by an axial motor housing opening 48. A potting compound 60 protrudes axially into the opening 48 over part of the opening length. The opening 48 and lug 60 are arranged axially, i. parallel to the drive motor axial. The actual vacuum-tight sealing takes place through a cover 62, which is sealed with an O-ring 64 relative to the housing 24. In the cover 62, one or more contact pins 50 'are cast, the electrical leads 50 contact the outside. The electrical leads 50 are used to energize the motor stator 28, possibly serve to energize a magnetic bearing and are used to transmit sensor data.

Claims

Patentansprüche claims
1. Vakuumpumpe (10) mit einem elektrischen Antriebsmotor (12), der einen Motor-Rotor (30) und einen Motor-Stator (28) aufweist,A vacuum pump (10) comprising an electric drive motor (12) having a motor rotor (30) and a motor stator (28),
d a d u r c h g e k e n n z e i c h n e t ,characterized ,
dass der Motor-Stator (28) innerhalb eines vakuumdichten Motorgehäuses (24) angeordnet ist, undthat the motor stator (28) is disposed within a vacuum-tight motor housing (24), and
dass der Motor-Stator (28) in einen Vergussmassen-Körper (43) aus Vergussmasse (44) eingegossen ist.in that the motor stator (28) is cast in a potting compound body (43) made of potting compound (44).
2. Vakuumpumpe (10) nach Anspruch 1, wobei das Vergussmassen-Material ein Epoxydharz ist.2. Vacuum pump (10) according to claim 1, wherein the Vergussmassen material is an epoxy resin.
3. Vakuumpumpe (10) nach Anspruch 1 oder 2, wobei die Vergussmasse (44) Füllstoffe enthält, die eine bessere Wärmeleitfähigkeit aufweisen als das Vergussmassen-Material.3. Vacuum pump (10) according to claim 1 or 2, wherein the potting compound (44) contains fillers which have a better thermal conductivity than the Vergussmassen material.
4. Vakuumpumpe (10) nach einem der Ansprüche 1 bis 3, wobei eine Leitungsdurchführung (46) durch eine Motorgehäuse-Öffnung (48) vorgesehen ist und die Vergussmasse (44) mit einem Ansatz (60) axial in die Öffnung (48) hineinragt.4. Vacuum pump (10) according to one of claims 1 to 3, wherein a line feedthrough (46) through a motor housing opening (48) is provided and the potting compound (44) with a projection (60) axially into the opening (48) protrudes ,
5. Vakuumpumpe (10) nach einem der Ansprüche 1 bis 4, wobei der Motor- Stator (28) eine Wicklung (42) und ein Blechpaket (40) aufweist. 5. Vacuum pump (10) according to one of claims 1 to 4, wherein the motor stator (28) has a winding (42) and a laminated core (40).
6. Vakuumpumpe (10) nach einem der Ansprüche 1 bis 5, wobei der Antriebsmotor (12) ein bürstenloser Gleichstrom- oder Asynchron-Motor ist.6. Vacuum pump (10) according to any one of claims 1 to 5, wherein the drive motor (12) is a brushless DC or asynchronous motor.
7. Vakuumpumpe (10) nach einem der Ansprüche 1 bis 6, wobei die Vakuumpumpe (10) eine Wälzkolben-Pumpe ist. 7. Vacuum pump (10) according to any one of claims 1 to 6, wherein the vacuum pump (10) is a Roots pump.
PCT/EP2007/056992 2006-07-14 2007-07-09 Vacuum pump with cast drive motor WO2008006809A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006032765.9 2006-07-14
DE200610032765 DE102006032765A1 (en) 2006-07-14 2006-07-14 vacuum pump

Publications (1)

Publication Number Publication Date
WO2008006809A1 true WO2008006809A1 (en) 2008-01-17

Family

ID=38515781

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/056992 WO2008006809A1 (en) 2006-07-14 2007-07-09 Vacuum pump with cast drive motor

Country Status (3)

Country Link
DE (1) DE102006032765A1 (en)
TW (1) TW200819629A (en)
WO (1) WO2008006809A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11418101B2 (en) * 2018-10-18 2022-08-16 Hitachi High-Technologies Corporation Linear motor for vacuum and vacuum processing apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008036623A1 (en) * 2008-08-06 2010-02-11 Oerlikon Leybold Vacuum Gmbh Use of a roller bearing for mounting rotating components in Vakuumeinirchtungen and vacuum device
DE102008042656A1 (en) 2008-10-07 2010-04-15 Ilmvac Gmbh Electric motor with encapsulated motor housing
DE102008062054B4 (en) * 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Arrangement with vacuum pump and method for operating a vacuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5779453A (en) * 1995-03-20 1998-07-14 Ebara Corporation Vacuum pump motor arrangement having reduced heat generation
US20040031141A1 (en) * 2002-06-26 2004-02-19 James Miller High-density, thermally-conductive plastic compositions for encapsulating motors
US6700273B1 (en) * 1999-08-05 2004-03-02 Ebara Corporation Gas transfer machine
US20050232791A1 (en) * 2002-05-29 2005-10-20 Leybold Vakuum Gmbh Dual-shaft vacuum pump

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004024554B4 (en) * 2004-05-18 2018-01-25 Pfeiffer Vacuum Gmbh Oil-sealed rotary vane vacuum pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5779453A (en) * 1995-03-20 1998-07-14 Ebara Corporation Vacuum pump motor arrangement having reduced heat generation
US6700273B1 (en) * 1999-08-05 2004-03-02 Ebara Corporation Gas transfer machine
US20050232791A1 (en) * 2002-05-29 2005-10-20 Leybold Vakuum Gmbh Dual-shaft vacuum pump
US20040031141A1 (en) * 2002-06-26 2004-02-19 James Miller High-density, thermally-conductive plastic compositions for encapsulating motors

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11418101B2 (en) * 2018-10-18 2022-08-16 Hitachi High-Technologies Corporation Linear motor for vacuum and vacuum processing apparatus

Also Published As

Publication number Publication date
DE102006032765A1 (en) 2008-01-17
TW200819629A (en) 2008-05-01

Similar Documents

Publication Publication Date Title
DE3237196C2 (en) Synchronous micro motor
EP3297131A1 (en) Rotor for an electric rotating machine
DE102006019689A1 (en) Motor and brush holder for this
EP0846364A1 (en) Electric motor
EP1142084A1 (en) Electric motor cooled by a fluid and having high specific power
DE19705974A1 (en) Electric motor for a pump or a fan
WO2008046817A1 (en) Encapsulated electrical machine with liquid-cooled stator
DE102006027001A1 (en) Water pump for especially ponds, aquariums, fountains and the like
WO2008006809A1 (en) Vacuum pump with cast drive motor
DE102013018317A1 (en) Electric machine
EP3723240B1 (en) Electric motor with reduced gap for optimising magnetic flux between rotor and stator
EP2365614A2 (en) Canned motor with support structure
EP0519091A1 (en) Gaseous cooled electrical machine
DE102019210526B3 (en) Electromechanical converter device and motor vehicle with an electromechanical converter device
DE10144653B4 (en) Permanently energized electromechanical machine for operation in liquids and gases
DE102014109201A1 (en) Stator, three-phase induction motor and compressor
DE4304760A1 (en) Drive device for a rotating anode
DE102019218768A1 (en) Drive unit for a pump system
WO2011050798A1 (en) Brushless rotor for an electric canned motor pump
DE10320703B4 (en) Sealing device for electrical machines
EP0844723A2 (en) Electric motor driven pump
EP3616305B1 (en) Cable duct
DE102008058528B4 (en) End block for a magnetron assembly with a rotating target
DE276545C (de) Vorrichtung zum elektromotorischen antrieb einer in einem gehäuse gasdicht eingeschlossenen arbeitsmaschine
EP1398510B1 (en) Wet running rotary pump unit

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07787268

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

NENP Non-entry into the national phase

Ref country code: RU

122 Ep: pct application non-entry in european phase

Ref document number: 07787268

Country of ref document: EP

Kind code of ref document: A1