WO2008001660A1 - Substrat de conversion de couleur et dispositif d'affichage de couleur - Google Patents
Substrat de conversion de couleur et dispositif d'affichage de couleur Download PDFInfo
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- WO2008001660A1 WO2008001660A1 PCT/JP2007/062394 JP2007062394W WO2008001660A1 WO 2008001660 A1 WO2008001660 A1 WO 2008001660A1 JP 2007062394 W JP2007062394 W JP 2007062394W WO 2008001660 A1 WO2008001660 A1 WO 2008001660A1
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/38—Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/875—Arrangements for extracting light from the devices
Definitions
- Color conversion substrate and color display device are Color conversion substrate and color display device
- the present invention relates to a color conversion substrate, a method for manufacturing the substrate, and a color display device using the same. More specifically, the present invention relates to a color conversion substrate in which a blue color filter layer separates a fluorescence conversion layer.
- a single color blue light emitting element and a color conversion substrate having a blue color filter layer, a green fluorescent conversion layer, and a red fluorescent conversion layer can be combined to obtain a full color single display.
- the blue color filter layer is used to further increase the color purity of the blue light emitting element.
- this system can form a film without separately coating light-emitting elements of one color, the light-emitting element film-forming apparatus is small and requires only a small amount of light-emitting material.
- a general-purpose photolithography method, a printing method, or the like can be applied to the color conversion substrate, mass production of a large screen and a high definition display is easy.
- CF method for obtaining a full-color display by combining a white light emitting element and a color filter
- the color conversion method can use a more stable light emitting element than the CF method, and can also emit fluorescent light. In principle, the efficiency is high.
- Patent Document 3 discloses a color conversion member (color conversion substrate) in which a blue color filter layer, a green fluorescence conversion layer, and a red fluorescence conversion layer are embedded between light shielding layers.
- Patent Documents 4 and 5 an ink jet method or a screen printing method is used between transparent partition walls.
- the fluorescent conversion layer is embedded.
- the partition walls are transparent, the isotropic fluorescence of the fluorescence conversion layer enters the adjacent fluorescence conversion layer from the side surface of the partition wall, and excites the adjacent fluorescence conversion layer to emit unnecessary fluorescence. It was. As a result, color mixing occurred and color display with high color reproducibility was hindered. In addition, it was necessary to newly form a transparent partition wall, and the manufacturing cost of the color conversion board was increased.
- Patent Document 6 discloses a color conversion member (color conversion substrate) in which a red color filter is formed between fluorescence conversion layers.
- the isotropic red fluorescence of the red fluorescence conversion layer is transmitted through the red color filter and enters the green fluorescence conversion layer, and color display with good color reproducibility cannot be obtained due to color mixture.
- the film thickness of the red color filter layer under the red fluorescence conversion layer is not uniform, and there is a fear that color display cannot be obtained with high uniformity.
- Patent Document 1 Japanese Patent Laid-Open No. 03-152897
- Patent Document 2 Japanese Patent Laid-Open No. 05-258860
- Patent Document 3 W01998Z34437 pamphlet
- Patent Document 4 Japanese Patent Laid-Open No. 2003-229260
- Patent Document 5 WO2006Z 022123
- Patent Document 6 Japanese Unexamined Patent Application Publication No. 2004-152749
- the present invention has been made in view of the above problems, and an object of the present invention is to provide a high-definition color conversion substrate and a color display device with high color reproducibility.
- Another object of the present invention is to provide a method for producing a color conversion substrate at a low cost.
- the following color conversion substrate, a manufacturing method thereof, and a color display device are provided.
- Translucent substrate, a manufacturing method thereof, and a color display device are provided.
- a color conversion substrate comprising a plurality of blue color filter layers and a plurality of fluorescence conversion layers on the translucent substrate, wherein a part of the blue color filter layer separates the plurality of fluorescence conversion layers.
- a color display device including a light emitting element substrate including a blue light emitting component facing the color conversion substrate.
- a color display device including a light emitting element including a blue light emitting component facing the blue color filter layer and the fluorescence conversion layer of the color conversion substrate.
- the first fluorescence conversion layer and the second fluorescence conversion layer are separated by a blue color filter layer!
- a color display device
- the color display device according to any one of 8 to: L0 in which the light emitting element is actively driven.
- a plurality of blue color filter layers are formed on the translucent substrate,
- a high-definition color conversion substrate and a color display device with high color reproducibility can be provided.
- FIG. 1 is a schematic cross-sectional view showing an embodiment of a color conversion substrate according to the present invention.
- FIG. 2 is a schematic sectional view showing another embodiment of the color conversion substrate according to the present invention.
- FIG. 3 is a schematic sectional view showing another embodiment of a color conversion substrate according to the present invention.
- FIG. 4 is a schematic sectional view showing an embodiment of a color display device according to the present invention.
- FIG. 5 is a schematic sectional view showing another embodiment of a color display device according to the present invention.
- FIG. 6 is a schematic sectional view showing another embodiment of the color display device according to the present invention.
- FIG. 7 is a diagram showing a process for forming a polysilicon TFT.
- FIG. 8 is a circuit diagram showing an electrical switch connection structure including a polysilicon TFT.
- FIG. 9 is a plan perspective view showing an electrical switch connection structure including a polysilicon TFT.
- FIG. 1 is a schematic sectional view showing an embodiment of a color conversion substrate according to the present invention.
- the color conversion substrate 1 has a blue color filter layer 12a, 12b, and green fluorescence on a translucent substrate 10.
- a conversion layer 14 and a red fluorescence conversion layer 16 are provided, and a blue color filter layer 12b separates the green fluorescence conversion layer 14 and the red fluorescence conversion layer 16.
- the blue color filter layer 12a can form a blue pixel
- the green fluorescence conversion layer 14 can form a green pixel
- the red fluorescence conversion layer can form a red pixel.
- h represents the film thickness of the blue color filter layers 12a and 12b
- w represents the width of the blue color filter layer 12b separating the phosphor conversion layers.
- the blue light from the light emitting element is transmitted through the blue color filter layer (blue pixel), so that the blue light with higher color purity is obtained. Can be obtained.
- the green fluorescence conversion layer (green pixel) absorbs blue light from the light emitting element and emits green fluorescence.
- the red fluorescence conversion layer (red pixel) absorbs blue light from the light emitting element and emits red fluorescence.
- the blue color filter layer 12b separates the green fluorescence conversion layer 14 and the red fluorescence conversion layer 16
- the isotropic green fluorescence and red fluorescence emitted from the green fluorescence conversion layer 14 are provided.
- the isotropic red fluorescence emitted from the conversion layer 16 is blocked by the blue color filter layer 12 and cannot be mixed into the adjacent fluorescence conversion layer or excited the adjacent fluorescence conversion layer.
- the blue color filter layer 12a is not a fluorescent layer, it does not emit light in the same direction.
- the blue color filter layers 12a and 12b of this embodiment transmit a larger amount of light in the ultraviolet region (300 to 400 nm) than the black light-shielding layer (black matrix), patterning by a single photolithography method is possible. Easy to process. Accordingly, the blue color filter layers 12a and 12b having a thicker film (large h) and high precision (small w /! Can be formed.
- the fluorescence conversion layers 14 and 16 can be separated. Therefore, a high-definition color conversion substrate and a color display device can be obtained.
- the plurality of blue color filter layers 12a and 12b including the layer 12b (also referred to as a partition wall or a bank) that separates the fluorescence conversion layers 14 and 16 are simultaneously formed by performing layer formation only once. Can do. Therefore, the process of forming the color conversion substrate can be simplified and the manufacturing cost can be reduced.
- a color conversion member including a blue color filter layer, a green fluorescence conversion layer, and a red fluorescence conversion layer is described using a blue light emitting element.
- the color conversion member can also be composed of a color filter layer, a yellow fluorescence conversion layer, and a magenta color fluorescence conversion layer.
- the blue light-emitting element can include not only a blue component but also other color components such as a green component.
- FIG. 2 is a schematic sectional view showing another embodiment of the color conversion substrate according to the present invention.
- the black matrix 20 is provided between the blue color filter layer 12 a, the green fluorescence conversion layer 14, and the red fluorescence conversion layer 16 in the color conversion substrate 1 of Embodiment 1 described above.
- the black matrix 20 is preferably a thin film while maintaining light shielding properties.
- the black matrix 20 only needs to be interposed between the blue color filter layer 12a, the green fluorescence conversion layer 14 and the red fluorescence conversion layer 16, as shown in FIG. It may be formed on the translucent substrate 10 and may be formed on the opposite side of the translucent substrate 10 as shown in FIG. Alternatively, they may be alternately formed as shown in FIG.
- FIG. 3 is a schematic sectional view showing another embodiment of the color conversion substrate according to the present invention.
- this color conversion substrate 3 as shown in FIG. 3 (a), in the color conversion substrate 1 of Embodiment 1 described above, between the green fluorescence conversion layer 14 and the translucent substrate 10, and the red fluorescence conversion layer 16 and A color filter 30 is formed between the transparent substrates 12.
- the color filter 30 By forming the color filter 30, it is possible to suppress the light emission of the fluorescence conversion layers 14 and 16 due to external light. As a result, the contrast of the color display device is increased. Further, the color purity of the fluorescence emitted from the fluorescence conversion layers 14 and 16 taken out can be improved.
- Black bear tritas 20 may be formed as shown in Fig. 3 (b).
- FIG. 4 is a schematic cross-sectional view showing an embodiment of a color display device according to the present invention.
- This color display device 4 includes a light emitting element substrate 100 in which a light emitting element 50 is formed on a support substrate 40, and the color conversion substrate 1 of Embodiment 1, and includes the light emitting element 50, a blue color filter layer 12a, and a green color.
- the fluorescence conversion layer 14 and the red fluorescence conversion layer 16 are disposed so as to face each other.
- a thin film transistor (TFT) 60 an interlayer insulating film 70, a lower electrode 52, a light emitting medium 54, an upper electrode 56, and a barrier film 80 are formed on a support substrate 40 in this order.
- TFT thin film transistor
- the lower electrode 52, the light emitting medium 54, and the upper electrode 56 constitute a light emitting element 50.
- the light emitting element substrate 100 and the color conversion substrate 1 are bonded and sealed with an adhesive layer 90.
- the opposing light emitting element 50 and the blue color filter layer 12 a form a blue pixel
- the opposing light emitting element 50 and the green fluorescence conversion layer 14 are green pixels
- the opposing light emission is green
- the element 50 and the red fluorescence conversion layer 16 form a red pixel.
- the light emitting elements for the blue, green, and red pixels in this embodiment are all the same, but the light emitting elements for each pixel may be changed as necessary.
- the influence (irregularity of the substrate surface, moisture and monomers of the color conversion substrate power) that the light emitting element 50 receives from the color conversion substrate 1 is reduced. It is out.
- the TFT 60 is disposed on the support substrate 40 opposite to the light extraction side (color conversion substrate 1), the arrangement is easy and the aperture ratio can be increased. Therefore, the light emission luminance of the color display device 4 can be increased.
- FIG. 5 is a schematic sectional view showing another embodiment of the color display device according to the present invention.
- a flat layer 92, a barrier layer 80, a lower electrode 52, an interlayer insulating film 70, a light emitting medium 54, and an upper electrode 56 are formed on the color conversion substrate 1 in this order.
- the light emitting element 50 and the color conversion substrate 1 can be easily aligned.
- the color display device 5 can be made thin and light.
- FIG. 6 is a schematic sectional view showing another embodiment of the color display device according to the present invention.
- the blue color filter layers 12a and 12b, the green fluorescence conversion layer 14 and the red fluorescence conversion layer 18 are arranged directly on the noria layer 80 of the light emitting element substrate 100. Different.
- the light emitting element 50, the blue color filter layer 12a, and the fluorescence conversion layers 14 and 16 are close to each other. Can be efficiently incorporated into the blue color filter layer 12a and the fluorescence conversion layers 14 and 16. In addition, since only one substrate is required, the color display device can be made thin and lightweight.
- the TFT60 can be easily arranged, and light emission can be taken out from the opposite side of the TFT60, so that the aperture ratio of the pixel can be increased and the light emission luminance of the color display device 6 can be increased. .
- the light emitting elements 50 of the color display devices 4 to 6 are preferably driven actively. By actively driving each light-emitting element, a large-screen, high-definition color display device can be obtained at a low voltage without applying a load to the light-emitting element.
- the color conversion substrate includes a translucent substrate, a blue color filter layer, a fluorescence conversion layer, and, if necessary, a black matrix and a color filter.
- the light-transmitting substrate used in the present invention is a substrate that supports the organic EL display device, and is preferably a smooth substrate having a light transmittance in the visible region of 400 nm to 700 nm of 50% or more.
- Ingredients Physically, a glass plate, a polymer plate, etc. are mentioned.
- the glass plate include soda lime glass, norlium strontium-containing glass, lead glass, aluminosilicate glass, borosilicate glass, norium borosilicate glass, and quartz.
- the polymer plate include polycarbonate, acrylic, polyethylene terephthalate, polyethersulfide, and polysulfone.
- the blue color filter layer used in the present invention is disposed between the blue pixel portion and the fluorescence conversion layer of the color conversion substrate (or the obtained color display device).
- the blue color filter layer of the blue pixel portion usually has a light transmittance peak of 400 to 500 nm (blue region) of 50% or more, and a light transmittance of 500 nm or more is less than 50% or less. is there
- the light emitting element has a function of selectively transmitting light in a blue region of light and increasing the color purity of blue light emission.
- the transmittance of the side surface of the blue color filter layer separating the fluorescence conversion layer is preferably 50% or less at a wavelength of 500 nm or more, more preferably 30% or less, more preferably 20% or less, between the fluorescence conversion layers. .
- the wavelength of 500 nm or more is the wavelength region of green and red fluorescence, and the transmittance of 50% or less can further suppress the mixing of fluorescence.
- the blue color filter layer is formed from a photosensitive resin, and is an exposure step (30 of photolithography step).
- the aspect ratio (height Z width) of the blue color filter layer disposed between the fluorescence conversion layers is preferably 1Z2 (0.5) to: LOZl (10), more preferably 2Z3 (0.67). ) To 5Zl (5). If the aspect ratio is less than 1Z2 (0.5), the advantages of high definition and high aperture ratio cannot be obtained.
- the width of the blue color filter layer disposed between the fluorescence conversion layers is preferably 1 â m to 50 â m, more preferably 5 â m to 30 â m. If the width is less than 1 â m, the stability will deteriorate, and 5
- a suitable film thickness is automatically calculated from the preferred aspect ratio and width. Is done. Specifically, this is 0.5 m to 500 â m.
- the surface shape of the plurality of blue color filter layers arranged between the fluorescence conversion layers may be a lattice shape or a stripe shape, but is preferably a lattice shape from the degree of freedom of color arrangement.
- the cross-sectional shape may be a force reverse trapezoidal shape that is normally rectangular, or a T-letter shape.
- a photosensitive resin to which a photolithography method can be applied can be selected.
- photo-curable resist materials having reactive vinyl groups such as acrylic acid, methacrylic acid, polyvinyl cinnamate, and ring rubber. These resist materials can be either liquid or film (dry film).
- fine particles such as various blue pigments, dyes, and pigments may be included.
- fine particles such as various blue pigments, dyes, and pigments may be included.
- a single type of dioxazine pigment or a combination of two or more types is determined by the characteristics required for blue pixels (blue chromaticity, efficiency), light blocking from the adjacent fluorescence conversion layer, and the film of the fluorescence conversion layer. Determined by balance with thickness (embeddable, flatness).
- a fluorescence conversion layer is a layer having a function of converting light emitted from a light emitting element into light containing a component having light having a longer wavelength. For example, blue light component (wavelength of 400 â ! To 500 nm) of the light emitted from the light emitting element is absorbed by the fluorescence conversion layer, and converted into green or red light having a longer wavelength.
- the fluorescence conversion layer includes at least a phosphor that converts the wavelength of light incident from the light emitting element, and may be dispersed in the binder resin as necessary.
- organic phosphors such as commonly used fluorescent dyes and inorganic phosphors can be used.
- phosphors for converting blue, blue-green, or white light of a light emitting element into green light emission are, for example, 2, 3, 5, 6-1H, 4H-tetrahydro 8- Trifluoromethylquinolizino (9, 9a, 1âgh) coumarin (coumarin 153), 3â (2 â² âbenzothiazolyl) â7âjetylaminocoumarin (coumarin 6), 3â (2 â² âbenz Imidazolyl)-7-N, N-Jetylaminocoumarin (coumarin 7) and other coumarin dyes, and other coumarin colors
- Examples thereof include basic yellow 51, which is a basic dye, and naphthalimide dyes such as solvent yellow 11 and solvent yellow 116.
- a fluorescent dye for converting blue to green or white light of a light emitting element into light emission from orange to red for example, 4-disyanomethylene-2-methyl-6- (P- Dimethylaminostyryl) âCyanine dyes such as 4Hâpyran (DCM), 1âethyl 2â (4â (p-dimethylaminophenol) â 1, 3--butagel) âpyridy
- DCM dimethylaminostyryl
- pyridine dyes such as hum-perchlorate (pyridine 1)
- rhodamine dyes such as rhodamine B, rhodamine 6G, and basic biored 11, and oxazine dyes.
- various dyes can be selected as phosphors if they are fluorescent.
- the phosphor is a pigment such as polymethacrylic acid ester, polyvinyl chloride, salt vinyl alcohol acetate copolymer, alkyd resin, aromatic sulfonamide resin, urea resin, melanin resin, benzoguanamine resin, etc. It can be pigmented and kneaded in advance!
- the inorganic phosphor those made of an inorganic compound such as a metal compound and absorbing visible light and emitting fluorescence longer than the absorbed light can be used.
- the surface of the phosphor may be modified with an organic substance such as a long-chain alkyl group or phosphoric acid.
- the durability of the phosphor layer can be further improved.
- the following nanocrystal phosphors are preferred because they are more transparent and have a high conversion efficiency.
- Dopes doped with transition metal ions that absorb visible light such as + and Tb 3+ .
- a transition metal ion that absorbs visible light such as Eu 2+ , Eu 3+ , Ce 3+ , T b 3+ , or Cu 2+ . S, Se, etc.
- silica, etc. The surface may be modified with other metal oxides or organic substances.
- (c) A nanocrystal phosphor that absorbs and emits visible light using a semiconductor band gap.
- Semiconductor nanocrystals such as CdS, CdSe, CdTe, ZnS, ZnSe, InP. These are known in the literature such as JP-T-2002-510866, etc., so that the band gap can be controlled by changing the particle size nano-size, and as a result, the absorption-fluorescence wavelength can be changed.
- the surface may be modified with a metal oxide such as silica or an organic substance.
- the surface of CdSe fine particles may be coated with a high-bandgap semiconductor material shell such as ZnS! / !. This facilitates the effect of confining electrons generated in the central fine particles.
- the above nanocrystal phosphors may be used alone or in combination of two or more!
- the semiconductor nanocrystal absorption efficiency is high, a fluorescence conversion layer with higher conversion efficiency can be obtained.
- the half-width of the fluorescence wavelength becomes smaller (the fluorescence spectrum becomes sharper; preferably, the half-width is less than 50 nm), so that the fluorescence is mixed into the adjacent layer. It is possible to obtain a color display device with better color reproducibility just by suppressing the color.
- a transparent material (with a light transmittance of 50% or more in visible light) is preferable.
- transparent resin polymer
- polymer such as polyalkyl methacrylate, polyacrylate, alkylmethacrylate / methacrylic acid copolymer, polycarbonate, polybulal alcohol, polybutylpyrrolidone, hydroxychetylcellulose, carboxymethylcellulose, etc.
- a photosensitive resin to which a photolithography method can be applied is also selected in order to separate and arrange the phosphor layers in a plane.
- photocurable resist materials having reactive vinyl groups such as acrylic acid-based, methacrylic acid-based, polyvinyl cinnamate-based, and ring rubber-based.
- a printing ink (medium) using a transparent resin is selected.
- polyvinyl chloride resin for example, polyvinyl chloride resin, melamine resin, phenol resin, alkyd resin, epoxy resin, polyurethane resin, polyester resin, maleic acid resin, polyamide resin monomer 1.Oligomers, polymers, and polymethylolene methacrylate, polyacrylate, polycarbonate, polyvinyl alcohol, polyvinyl pyrrolidone, hydroxyethyl cellulose, carboxymethyl cellulose, and other thermoplastic or thermosetting transparent resins.
- polyvinyl chloride resin for example, polyvinyl chloride resin, melamine resin, phenol resin, alkyd resin, epoxy resin, polyurethane resin, polyester resin, maleic acid resin, polyamide resin monomer 1.Oligomers, polymers, and polymethylolene methacrylate, polyacrylate, polycarbonate, polyvinyl alcohol, polyvinyl pyrrolidone, hydroxyethyl cellulose, carboxymethyl cellulose, and other thermoplastic or thermosetting transparent resins.
- the fluorescence conversion layer is prepared by mixing, dispersing, or solubilizing a phosphor, a binder resin, and an appropriate solvent to form a liquid material, and then applying the liquid material on a substrate or the like by spin coating, roll coating, carrier coating.
- the film can be formed by a method such as a strike method, and then a desired fluorescence conversion layer can be embedded between the blue color filter layers by a buttering jungle by a photolithography method.
- the upper surface and the Z or side surface of the blue color filter layer are made of a material for the fluorescent conversion layer to be embedded by performing fluorine (CF4) plasma treatment or fluorine coating with a fluorine-containing surfactant, resin, or photocatalyst layer.
- fluorine fluorine
- the contact angle with respect to the (coating liquid) is increased (30 ° or more), and the surface of the fluorescence conversion layer can be flattened by suppressing the swelling and dent of the embedded fluorescence conversion layer.
- the use efficiency of the material of the fluorescence conversion layer is high.
- the material of the fluorescence conversion layer is applied to the entire surface, and the selected portion is left exposed, and the other portions are discarded. Therefore, the material use efficiency is low.
- this manufacturing method is approximately three times as efficient as the photolithography method.
- the thickness of the fluorescence conversion layer is not particularly limited as long as it sufficiently receives (absorbs) the light of the light emitting element and does not hinder the function of fluorescence conversion, but the blue color filter layer is not limited. It is preferable not to exceed the film thickness of 0.4 â m to 499 â m, more preferably 5 â m to 100 â m! / â .
- the color filter blocks excitation light from the fluorescence conversion layer and transmits fluorescence.
- arranging such a color filter between the fluorescence conversion layer of the color conversion substrate and the translucent substrate (or on the light extraction side from the fluorescence conversion layer) light emission of the fluorescence conversion layer due to external light is suppressed. Therefore, the contrast of the obtained color display device can be improved. Furthermore, the color purity of the fluorescent color from the fluorescence conversion layer can also be improved.
- the material of the color filter is not particularly limited, and examples thereof include a material composed of a dye, a pigment and a resin, or a material capable of using only a dye and a pigment.
- Examples of the color filter composed of a dye, a pigment and a resin include those in a solid state in which a dye and a pigment are dissolved or dispersed in a binder resin.
- the dyes and pigments used in the color filter are preferably perylene, isoindoline, cyanine, azo, aged xazine, phthalocyanine, quinacridone, anthraquinone, diketopyrrolo-pyrrole and the like.
- the fluorescence conversion layer can be provided with the function of converting the light of the light emitting element power and the function of the color filter for improving the color purity, thereby simplifying the configuration.
- the method of forming the color filter is the same as that of the fluorescence conversion layer.
- the film thickness may be the same as that of the fluorescent conversion layer, but a thin film is preferable for uniform color display. For example, it is 10 nm to 5 â m, preferably 100 nm to 2 â m.
- the black matrix is arranged at a position across each pixel of the color conversion substrate. Further, a black matrix may be present both above and below the blue color filter layer or the fluorescence conversion layer. Since the black matrix is formed, the incidence and reflection of light from outside light can be reduced, so that the contrast of the color display device can be improved.
- the surface shape of the black matrix may be a lattice shape or a stripe shape! /, But a lattice shape is more preferable in order to further improve the contrast of the color display device.
- the transmittance of the black matrix is preferably 10% or less, more preferably 1% or less, in light in the visible region, that is, in the visible region having a wavelength of 400 nm to 700 nm.
- examples of the black matrix material include the following metals and black pigments.
- Metal types include Ag, Al, Au, Cu, Fe, Ge, In, K, Mg, Ba, Na, Ni, Pb, Pt, Si, Sn, W, Zn, Cr, Ti, Mo, Ta And one or more metals such as stainless steel.
- the above metal oxides, nitrides, sulfides, nitrates, sulfates, etc. may be used, and carbon may be contained if necessary.
- black pigments include carbon black, titanium black, arlin black, and black pigments obtained by mixing the color filter pigments. These black pigments or the above-mentioned metal material is dissolved or dispersed in a binder resin used in the fluorescence conversion layer, and is patterned by the same method as the fluorescence conversion layer (preferably photolithography method). Blue matrix A black matrix pattern can be formed at a position that straddles the lower layer and the Z or upper layer of the color filter layer and the fluorescence conversion layer.
- the above material may be formed by a method such as a sputtering method, a vapor deposition method, a CVD method, an ion plating method, an electrodeposition method, an electroplating method, a chemical plating method, or the like under the blue color filter layer and the fluorescence conversion layer and Z or
- a black matrix pattern can be formed by depositing the film on the top and patterning by a photolithography method or the like.
- the light-emitting element one that emits visible light can be used.
- an organic electroluminescent (EL) element, an inorganic EL element, a semiconductor light-emitting diode, or a fluorescent display tube can be used.
- an EL element using a transparent electrode on the light extraction side specifically, a light reflecting electrode, a light emitting medium (including a light emitting layer), and the light reflecting electrode so as to sandwich the light emitting medium.
- Organic EL elements and inorganic EL elements including transparent electrodes are preferred.
- an organic EL element is preferable because a light emitting element having a low luminance and a high luminance can be obtained.
- the light-emitting element will be described by taking an organic EL element as an example.
- the organic EL substrate is composed of a substrate and an organic EL element
- the organic EL element is composed of a light emitting medium and an upper electrode and a lower electrode that sandwich the light emitting medium.
- the support substrate in the organic EL display device is a member for supporting the organic EL element and the like, and is preferably a substrate having excellent mechanical strength and dimensional stability.
- the material of the support substrate examples include a glass plate, a metal plate, a ceramic plate, and a plastic plate (for example, polycarbonate resin, acrylic resin, vinyl chloride resin, polyethylene terephthalate resin, polyimide resin, polyester resin). And the like. (Resins, epoxy resins, phenol resins, silicone resins, fluorine resins, polyethersulfone resins).
- the support substrate made of these materials further forms an inorganic film or is coated with a fluorine resin to prevent moisture from entering the organic EL display device, so that the moisture-proof treatment and hydrophobicity can be achieved.
- U preferably treated.
- the moisture content and the gas permeability coefficient of water vapor or oxygen in the support substrate are preferably reduced.
- the moisture content of the support substrate is preferably 0.0001% by weight or less
- the water vapor or oxygen permeability coefficient is 1 X 10 " 13 cc-cm / cm 2 -sec. CmHg or less.
- the support substrate When taking out EL emission from the opposite side of the support substrate, the support substrate is not necessarily transparent.
- the light emitting medium is a medium including an organic light emitting layer capable of EL emission by recombination of electrons and holes.
- the thickness of the luminescent medium is not particularly limited, but for example, the thickness is preferably set to a value within the range of 5 â to 5 / â . This is because when the thickness of the light emitting medium is less than 5 nm, the light emission luminance may decrease the durability, while when the thickness of the light emitting medium exceeds 5 m, the value of the applied voltage increases. Therefore, the thickness of the luminescent medium is more preferably set to a value in the range of 10 â -3 / â , and further preferably in the range of 20 nm to l â m.
- This luminescent medium can be configured, for example, by stacking the layers shown in any of (a) to (g) below on the anode.
- the configuration (d) is particularly preferred because it provides higher emission luminance and excellent durability.
- Examples of the light-emitting material for the organic light-emitting layer include p-quaterphenyl derivatives, p-quinkole derivatives, benzodiazole compounds, benzimidazole compounds, benzoxazole compounds, metal chelate oxinoid compounds, oxadiazole compounds, styrylbenzene.
- organic light-emitting materials 4,4-bis (2,2-di-tert-butylphenol) biphenyl (abbreviated as DTBPBBi) or 4,4 as an aromatic dimethylidin-based compound.
- 4 Bis (2,2 diphenyl) biphenyl (abbreviated as DPVBi) and derivatives thereof are more preferred.
- an organic light-emitting material having a distyrylarylene skeleton or the like is used as a host material, and the host material is doped with a fluorescent dye having a strong blue power as a dopant, such as a coumarin-based material, or a fluorescent dye similar to the host. It is also suitable to use materials together. More specifically, as the host material, preferably the above-mentioned DPVBi or the like is used as the dopant. Preferably, N, N diphenylaminobenzene (abbreviated as DPAVB) or the like is used.
- DPAVB N, N diphenylaminobenzene
- the hole injection layer in the light-emitting medium 1 X 10 4 â 1 X 10 6 hole mobility measured when applying a voltage in the range of VZcm is 1 X 10 _6 cm 2 ZV 'seconds
- a compound having an ionization energy of 5.5 eV or less By providing such a hole injection layer, hole injection into the organic light emitting layer becomes good, high emission luminance is obtained, and low voltage driving is possible.
- borphyrin compounds aromatic tertiary amine compounds, stilamine compounds, aromatic dimethylidin compounds, and condensed aromatic ring compounds.
- NPD 4, 4 bis [Nâ (1-naphthyl) -N-phenolamino] biphenyl
- MTDATA N-phenylamino] triphenylamine
- an inorganic compound such as p-typeâSi or p-typeâSiC as the constituent material of the hole injection layer.
- the electron injection layer in the luminescent medium comprising at 1 X 10 4 â 1 X 10 6 electron mobility measured when applying a voltage in the range of VZcm is 1 X 10 _6 cm 2 ZV 'more seconds It is preferable to use a compound having an ionization energy exceeding 5.5 eV. By providing such an electron injection layer, electron injection into the organic light emitting layer is improved, high emission luminance is obtained, and low voltage driving is possible.
- constituent material of such an electron injection layer include a metal complex of 8-hydroxyquinoline (A1 chelate: Alq), a derivative thereof, and an oxadiazole derivative.
- Adhesion improving layer in the luminescent medium can be regarded as one form of the electron injection layer.
- the electron injection layers it is a layer having particularly good material strength with good adhesion to the cathode, and it is also preferable to constitute an 8-hydroxyquinoline metal complex or a derivative thereof.
- the conductivity in contact with the electron injection layer described above, is also preferable to provide a 1 X 10 _1 S / C m or more organic semiconductor layers. By providing such an organic semiconductor layer, the electron injection property into the organic light emitting layer is further improved.
- the upper electrode corresponds to an anode layer or a cathode layer depending on the configuration of the organic EL substrate.
- a material having a high work function for example, 4. OeV or more
- a material having a low work function for example, a material of less than 4. OeV, in order to facilitate electron injection.
- the upper electrode needs to have transparency.
- Examples of the material for the cathode layer include sodium, sodium monopotassium alloy, cesium, magnesium, lithium, magnesium silver alloy, aluminum, aluminum oxide, aluminum-lithium alloy, indium, rare earth metal, and these metals. It is preferable to use a mixture of a light emitting medium material and a mixture of these metals and an electron injection layer material, etc., alone or in combination of two or more.
- ITO indium tin oxide
- IZO indium zinc oxide
- Culn indium copper
- SnO tin oxide
- a transparent electrode such as zinc oxide (ZnO) is laminated on the cathode layer, or metals such as Pt, Au, Ni, Mo, W, Cr, Ta, and Al are used singly or in combination of two or more. It is also preferable to add to the cathode layer.
- the upper electrode can be selected from at least one constituent material selected from the group consisting of a light transmissive metal film, a non-condensed semiconductor, an organic conductor, a semiconducting carbon compound, and the like.
- the organic conductor is preferably a conductive conjugated polymer, an oxidizing agent-added polymer, a reducing agent-added polymer, an oxidizing agent-added low molecule, or a reducing agent-added low molecule.
- the oxidizing agent added to the organic conductor include Lewis acids such as salted iron, antimony chloride, and salted aluminum.
- examples of the reducing agent added to the organic conductor include alkali metals, alkaline earth metals, rare earth metals, alkaline compounds, alkaline earth compounds, rare earths, and the like.
- examples of the conductive conjugated polymer include polyline and derivatives thereof, polythiophene and derivatives thereof, and Lewis acid-added amine compounds.
- the non-condensed semiconductor is preferably an oxide, a nitride, or a chalcogenide compound, for example.
- the carbon compound is preferably, for example, amorphous carbon, graphite, or diamond-like carbon.
- the inorganic semiconductor is preferably, for example, ZnS, ZnSe, ZnSSe, MgS, MgSSe, CdS, CdSe, CdTe, or CdSSe.
- the thickness of the upper electrode is preferably determined in consideration of sheet resistance and the like.
- the thickness of the upper electrode is preferably set to a value within the range of 50 nm to 5000 nm, more preferably set to a value between lOOnm and 500 nm. The reason for this is that by setting the thickness of the upper electrode within this range, a uniform thickness distribution and a light transmittance of 60% or more can be obtained in EL emission, and the surface resistance of the upper electrode can be reduced. This is because the value can be 15 â / mouth or less, preferably 10 â / mouth or less.
- the lower electrode corresponds to a cathode layer or an anode layer depending on the configuration of the organic EL display device.
- the anode layer for example, indium stannate (ITO), indium zinc oxide (IZO), indium copper (Culn), tin oxide (SnO), zinc oxide (ZnO), anti-oxide
- a combination of more than one species can be mentioned.
- the material of the lower electrode is not necessarily transparent. Rather, as one preferable form, it is good to form from a light absorptive conductive material. With this configuration, the display contrast of the organic EL display device can be further improved.
- a preferable light-absorbing conductive material in that case, Semiconducting carbon materials, colored organic compounds, or combinations of reducing agents and oxidizing agents as described above, and colored conductive oxides (for example, transition metals such as VO, MoO, and WO)
- a reflective material may be formed! With this configuration, light emission from the organic EL display device can be extracted efficiently.
- preferable light-reflective materials include metal materials exemplified in the black matrix and high refractive index materials such as acid titanium, acid magnesium, and magnesium sulfate.
- the thickness of the lower electrode is not particularly limited as in the case of the upper electrode.
- the interlayer insulating film in the organic EL color display device is provided near or around the light emitting medium.
- the interlayer insulating film is used to increase the definition of the entire organic EL display device and to prevent a short circuit between the lower electrode and the upper electrode.
- the interlayer insulating film protects the TFT and is used as a base for depositing the lower electrode on a flat surface.
- an inter-layer insulating film is provided so as to fill a space between electrodes provided separately for each pixel. That is, the interlayer insulating film is provided along the boundary between the pixels.
- acrylic resin polycarbonate resin, polyimide resin, fluorinated polyimide resin, benzoguanamine resin, melamine resin, cyclic polyolefin, novolac resin, and polycacin acid
- acrylic resin polycarbonate resin
- polyimide resin fluorinated polyimide resin
- benzoguanamine resin melamine resin
- cyclic polyolefin novolac resin
- polycacin acid examples thereof include vinyl, cyclized rubber, polyvinyl chloride resin, polystyrene resin, phenol resin, alkyd resin, epoxy resin, polyurethane resin, polyester resin, maleic acid resin, and polyamide resin.
- the interlayer insulating film is composed of an inorganic oxide
- preferable inorganic oxides include silicon oxide (SiO or SiO 2), acid aluminum (Al 2 O or AIO), and acid titanium. (TiO
- X in the above inorganic compounds is a value within the range of l â x â 3.
- acrylic resin polyimide resin, fluorinated polyimide, cyclic polyolefin, epoxy resin, and inorganic oxide are preferably used.
- these interlayer insulating films can be formed into a desired pattern by a force printing technique in which a photosensitive group is introduced and processed into a desired pattern by a photolithography method.
- the thickness is preferably a value within the range of 10 nm to Lmm, although it depends on the definition of display and the unevenness of other members combined with the organic EL. The reason for this is that such a configuration can sufficiently flatten irregularities such as TFTs or lower electrode patterns. More preferred is a value in the range of 100 nm to 100 â m, and even more preferred is a value in the range of 100 nm to 10 â m.
- organic EL is easily degraded by moisture and oxygen, these are blocked by a noria film.
- Transparent inorganic materials such as ON, TiAlO, TiAlON, SiTiO, and SiTiON are preferred.
- the film it is preferable to form the film at a low film formation rate at 0 ° C. or lower, and a method such as sputtering, vapor deposition, or CVD is preferable.
- these transparent inorganic substances are amorphous because they control deterioration of an organic EL device having a high blocking effect of moisture, oxygen, low molecular weight monomers, and the like.
- Such a barrier film preferably has a thickness of â ! â Lmm.
- the thickness of the noria film is less than 10 â m, the amount of moisture and oxygen permeation may increase.
- the thickness of the barrier film exceeds S lmm, the film thickness becomes thick as a whole and cannot be thinned. Because there is . For these reasons, it is more preferably 10 â to 100 / â .
- the adhesive layer is a layer for bonding the organic EL substrate and the color conversion substrate. It may be arranged on the periphery of the display unit or on the entire surface.
- UV curable resin preferably composed of ultraviolet curable resin, visible light curable resin, thermosetting resin or an adhesive using them.
- specific examples of these include LUX TRACK L CR0278, 0242D (all manufactured by Toa Gosei Co., Ltd.), â 3113 (epoxy-based: manufactured by Three Bond Co., Ltd.), Benefix VL (acrylic: manufactured by Vadel Corporation) ) And other commercial products.
- FIGS. 7A to 7I are diagrams showing a process for forming a polysilicon TFT.
- FIG. 8 is a circuit diagram showing an electrical switch connection structure including a polysilicon TFT
- FIG. 9 is a plan perspective view showing an electrical switch connection structure including a polysilicon TFT.
- a Si layer 202 is formed on a 112 mm X 143 mm X l.1 mm glass substrate 201 (OA2 glass, manufactured by Nippon Electric Glass Co., Ltd.) by a technique such as low pressure chemical vapor deposition (LPCVD). Laminated (Fig. 7 (a)).
- an excimer laser such as a KrF (248 nm) laser was irradiated to the â - Si layer 202 to perform annealing crystallization to form polysilicon (FIG. 7 (b)). This polysilicon was patterned into islands by photolithography (Fig. 7 (c)).
- An insulating gate material 204 was laminated on the surface of the obtained island polysilicon polysilicon 203 and the substrate 201 by chemical vapor deposition (CVD) or the like to form a gate oxide insulating layer 204 (FIG. 7 (d)).
- the gate electrode 205 is formed by vapor deposition or sputtering (FIG. 7 (e)), and the gate electrode 205 is patterned and anodized (FIG. 7 (f) to (! I)). )).
- a doping region was formed by ion doping (ion implantation), and thereby an active layer was formed, and a polysilicon TFT was formed as a source 206 and a drain 207 (FIG. 7 (i)).
- the gate electrode 205 (and the scan electrode 221 in FIG. 8 and the bottom electrode of the capacitor 228) was Al, and the TFT source 206 and drain 207 were n + type.
- an interlayer insulating film (SiO 2) having a thickness of 500 nm is formed on the obtained active layer by the CRCVD method.
- the drain of 226 was connected to the signal electrode (Figs. 8 and 9).
- the connection between each TFT and each electrode is appropriately established by opening the interlayer insulation film SiO by wet etching with hydrofluoric acid.
- A1 and IZO indium zincate were sequentially deposited by sputtering at 20000 A and 1300 A, respectively.
- a positive resist (HPR204: manufactured by Fuji Film March) is spin-coated on this substrate, exposed to UV light through a photomask that forms a dot pattern of 100 m â 320 â m, and TMAH (tetramethyl)
- the resist pattern was obtained by developing with an image solution of (ammonium hydroxide) and betaning at 130 ° C.
- the exposed portion of IZO was etched with an IZO etchant composed of 5% oxalic acid, and then A1 was etched with a mixed acid aqueous solution of phosphoric acid, acetic acid, and nitric acid.
- the resist was treated with a stripping solution mainly composed of ethanolamine (106: manufactured by Tokyo Ohka Kogyo Co., Ltd.) to obtain an A1 ZIZO pattern (lower electrode: anode).
- Tr2 227 and the lower electrode 201 were connected through the opening X (FIG. 9).
- a black negative resist V259BK: manufactured by Nippon Steel Chemical Co., Ltd.
- TMAH tetramethylammonium hydroxide
- beta was performed at 220 ° C to cover the edge of A1 / IZO (film thickness 1 m, IZO opening 90 m X 310 m), and an organic interlayer insulating film was formed (not shown) .
- the substrate with an interlayer insulating film thus obtained was subjected to ultrasonic cleaning in pure water and isopropyl alcohol, dried by air blow, and then UV cleaned.
- the TFT substrate was moved to an organic vapor deposition device (manufactured by Nippon Vacuum Technology), and the substrate was fixed to the substrate holder.
- an organic vapor deposition device manufactured by Nippon Vacuum Technology
- the substrate was fixed to the substrate holder.
- 4 4, 4, 4, 4, 4, --Tris [N- (3-methylphenol) -N-phenylamine] MTDATA
- PBD luminescent materials
- DPVBi bis (2, 2-diphenyl bi) biphenyl
- DPAVB tris (8-quinolinol) aluminum (Alq) and Li as the electron injection material and cathode, respectively
- the target was mounted in another sputtering tank.
- the vacuum chamber was depressurized to 5 X 10 _7 torr, and then the layers were sequentially stacked in one order from the hole injection layer to the cathode in the following order without breaking the vacuum on the way.
- MTDATA is deposited at a deposition rate of 0.1 to 0.3 nmZ second, the film thickness is 60 â m, and NPD is deposited at a deposition rate of 0.1 to 0.3 nmZ second, the film thickness is 20 nm.
- DPV Bi and DPAVB were deposited at a deposition rate of 0.1 to 0.3 nmZ seconds, deposition rate of 0.03 to 0.05 nm / second, and a film thickness of 50 nm.
- Alq was deposited at a deposition rate of 0.1.
- the substrate was moved to a sputtering tank, and IZO was formed as a cathode take-out electrode at a film formation rate of 0.1 to 0.3 nmZ seconds and a film thickness of 200 nm to produce an organic EL device.
- SiO N (OZ as a transparent inorganic film on the IZO electrode of the organic EL element as a noria film.
- a 1mm support substrate (translucent substrate) (OA2 glass: manufactured by Nippon Glass Co., Ltd.) is spin coated with V259BK (manufactured by Nippon Steel Chemical Co., Ltd.) as a black matrix material.
- the film was exposed to ultraviolet light through a photomask such that, developed with a 2% aqueous sodium carbonate solution, and beta-formed at 200 ° C. to form a black matrix (thickness 1.0 m) pattern.
- the black matrix had a light transmittance of 1% or less in the visible region having a wavelength of 400 nm to 700 nm.
- the line width of the lattice pattern is 30 â m, and the opening is 80 m X 300 m (opening ratio is 66%).
- V259R (manufactured by Nippon Steel Chemical Co., Ltd.) is spin-coated as a material for the red color filter, and a photomask that can provide 320 rectangular stripe patterns (100 â m line, 230 â m gap).
- the film was exposed to UV light, developed with a 2% aqueous sodium carbonate solution, and beta-treated at 200 ° C. to form a pattern of a red color filter (film thickness of 1.5 m) adjacent to the green color filter.
- the line width of the layer including the blue pixel portion was 130 m
- the line width of the layer separating the fluorescence conversion layer was 20 / zm
- the film thickness was 15 / zm.
- the transmittance of the side surface of the blue color filter layer adjacent to the fluorescence conversion layer was 20% or less at 500 nm or more between the fluorescence conversion layers.
- the transmittance and film thickness of the pixel portion of the blue color filter layer, and the fluorescence The transmittance force of the side surface of the blue color filter layer adjacent to the fluorescence conversion layer is calculated by the line width of the layer separating the conversion layer. That is, the transmittance is converted into absorbance, and after proportionally calculating with the film thickness, it is converted into transmittance.
- InPZZnS semiconductor nanocrystals were synthesized with reference to J. Am. Chem. Soc., 2005, 127, 11364.
- the nanocrystals to 20 weight 0/0 (vs. solids) â Konaru so dispersed V259PA (manufactured by Nippon Steel Chemical Co., Ltd.), a piezoelectric element type Inkujietsu winding device, during another blue color filter layer Then, it was exposed to ultraviolet light and betated at 200 ° C., and the red fluorescence conversion layer was embedded between the blue color filter layers.
- the film thickness was 13 â m.
- Photothermosetting adhesive (TB3113 manufactured by ThreeBond Co., Ltd.) is applied to the entire surface of the produced color conversion substrate, and the organic EL substrate is used to emit light from the organic EL element.
- the fluorescent color conversion layer or the blue color filter layer of the color conversion substrate ( The pixel portion was aligned so that it received light, and after exposure from the color conversion substrate side, it was heated and bonded at 80 ° C. to obtain an organic EL color display device.
- Example 1 an attempt was made to form a light-shielding layer (V259BK manufactured by Nippon Steel Chemical Co., Ltd.) with a black matrix thickness of 15 m instead of a blue color filter layer separation layer, but UV rays did not transmit sufficiently. It is impossible to form a black matrix pattern with a line width of 20 m, and a color conversion substrate and a color display device having the same definition as in Example 1 should be formed. I could't.
- V259BK manufactured by Nippon Steel Chemical Co., Ltd.
- Example 1 a transparent separation layer was formed instead of the separation layer composed of the blue color filter layer. That is, after forming the red color filter, VPA204 / P5.4-2 (manufactured by Nippon Steel Chemical Co., Ltd.) is spin-coated on the substrate as a material for the transparent separation layer (partition or bank), and the strip-like separation layer is formed. The film was exposed to ultraviolet rays through a photomask capable of forming a film, developed with a 2% aqueous sodium carbonate solution, and beta-treated at 200 ° C. to form a transparent separation layer.
- VPA204 / P5.4-2 manufactured by Nippon Steel Chemical Co., Ltd.
- the film was exposed to ultraviolet rays through a photomask capable of forming a film, developed with a 2% aqueous sodium carbonate solution, and beta-treated at 200 ° C. to form a transparent separation layer.
- the line width of the layer separating the fluorescence conversion layer is 20 m, and the film thickness is 15 m.
- Example 1 Thereafter, a color conversion substrate and a color display device were produced in the same manner as in Example 1. In producing a color conversion substrate, the number of steps for forming a transparent separation layer is increased as compared with Example 1.
- the color display device using the color conversion substrate of the present invention is a consumer or industrial display, for example, a display for a portable display terminal, an in-vehicle display such as a car navigation system or an instrument panel, a personal computer for office automation (OA), Used for display devices for TV (TV receiver) or FA (factory automation). In particular, it is used for thin, flat monocolor, multicolor or full color displays.
- OA personal computer for office automation
- TV receiver TV receiver
- FA factory automation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Optical Filters (AREA)
Description
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Applications Claiming Priority (4)
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US11/488,724 US20080001528A1 (en) | 2006-06-29 | 2006-07-19 | Color conversion substrate and color display |
US11/488,724 | 2006-07-19 |
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WO2008001660A1 true WO2008001660A1 (fr) | 2008-01-03 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007044597A1 (de) * | 2007-09-19 | 2009-04-02 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauteil |
WO2013039141A1 (ja) * | 2011-09-14 | 2013-03-21 | ã·ã£ãŒãæ ªåŒäŒç€Ÿ | è²å€æåºæ¿ãç»åè¡šç€ºè£ çœ®ããã³è²å€æåºæ¿ã®è£œé æ¹æ³ |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08279394A (ja) * | 1995-02-06 | 1996-10-22 | Idemitsu Kosan Co Ltd | å€è²çºå è£ çœ®ããã³ãã®è£œé æ¹æ³ |
JP2004152749A (ja) * | 2002-10-08 | 2004-05-27 | Dainippon Printing Co Ltd | è²å€æéšæããã³ãããçšããïœ ïœãã£ã¹ãã¬ã€ |
JP2005135891A (ja) * | 2003-10-07 | 2005-05-26 | Fuji Electric Holdings Co Ltd | è²å€æãã£ã«ã¿ã®è£œé æ¹æ³ããã³è£ 眮 |
JP2005332589A (ja) * | 2004-05-18 | 2005-12-02 | Hitachi Displays Ltd | ææ©ãšã¬ã¯ããã«ãããã»ã³ã¹è¡šç€ºè£ 眮 |
-
2007
- 2007-06-20 WO PCT/JP2007/062394 patent/WO2008001660A1/ja active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08279394A (ja) * | 1995-02-06 | 1996-10-22 | Idemitsu Kosan Co Ltd | å€è²çºå è£ çœ®ããã³ãã®è£œé æ¹æ³ |
JP2004152749A (ja) * | 2002-10-08 | 2004-05-27 | Dainippon Printing Co Ltd | è²å€æéšæããã³ãããçšããïœ ïœãã£ã¹ãã¬ã€ |
JP2005135891A (ja) * | 2003-10-07 | 2005-05-26 | Fuji Electric Holdings Co Ltd | è²å€æãã£ã«ã¿ã®è£œé æ¹æ³ããã³è£ 眮 |
JP2005332589A (ja) * | 2004-05-18 | 2005-12-02 | Hitachi Displays Ltd | ææ©ãšã¬ã¯ããã«ãããã»ã³ã¹è¡šç€ºè£ 眮 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007044597A1 (de) * | 2007-09-19 | 2009-04-02 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauteil |
US8314547B2 (en) | 2007-09-19 | 2012-11-20 | Osram Opto Semiconductors Gmbh | Opto-electronic component |
WO2013039141A1 (ja) * | 2011-09-14 | 2013-03-21 | ã·ã£ãŒãæ ªåŒäŒç€Ÿ | è²å€æåºæ¿ãç»åè¡šç€ºè£ çœ®ããã³è²å€æåºæ¿ã®è£œé æ¹æ³ |
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