WO2007149764A3 - Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same - Google Patents

Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same Download PDF

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Publication number
WO2007149764A3
WO2007149764A3 PCT/US2007/071214 US2007071214W WO2007149764A3 WO 2007149764 A3 WO2007149764 A3 WO 2007149764A3 US 2007071214 W US2007071214 W US 2007071214W WO 2007149764 A3 WO2007149764 A3 WO 2007149764A3
Authority
WO
WIPO (PCT)
Prior art keywords
frequency
output signal
microelectromechanical
measurement system
temperature measurement
Prior art date
Application number
PCT/US2007/071214
Other languages
French (fr)
Other versions
WO2007149764A2 (en
Inventor
Aaron Partridge
Bernhard E Boser
Crist Y Lu
Markus Lutz
Paul Merritt Hagelin
Original Assignee
Sitime Corp
Aaron Partridge
Bernhard E Boser
Crist Y Lu
Markus Lutz
Paul Merritt Hagelin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/453,314 external-priority patent/US7446619B2/en
Application filed by Sitime Corp, Aaron Partridge, Bernhard E Boser, Crist Y Lu, Markus Lutz, Paul Merritt Hagelin filed Critical Sitime Corp
Publication of WO2007149764A2 publication Critical patent/WO2007149764A2/en
Publication of WO2007149764A3 publication Critical patent/WO2007149764A3/en

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Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03LAUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L1/00Stabilisation of generator output against variations of physical values, e.g. power supply
    • H03L1/02Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
    • H03L1/022Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature

Abstract

There are many inventions described and illustrated herein. In one aspect, the present inventions relate to a temperature measurement system comprising (1) a first microelectromechanical resonator to generate a first output signal having a frequency that varies with operating temperature, wherein the first microelectromechanical resonator includes a frequency function of temperature; (2) a second microelectromechanical resonator to generate a second output signal having a frequency that varies with operating temperature, wherein the second microelectromechanical resonator includes a frequency function of temperature; and (3) frequency division circuitry, coupled to the first and second microelectromechanical resonators, to determine data which is representative of the operating temperature of the first and/or second microelectromechanical resonator using (i) data which is representative of the frequency of the first output signal and (ii) data which is representative of the frequency of the second output signal. The frequency division circuitry may include circuitry to divide the frequency of the first output signal by the frequency of the second output signal (whether in digital or analog domain).
PCT/US2007/071214 2006-06-14 2007-06-14 Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same WO2007149764A2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US11/453,314 2006-06-14
US11/453,314 US7446619B2 (en) 2006-06-14 2006-06-14 Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same
US11/493,704 2006-07-26
US11/493,226 US7446620B2 (en) 2006-06-14 2006-07-26 Microelectromechanical oscillator having temperature measurement system, and method of operating same
US11/493,226 2006-07-26
US11/493,704 US7369004B2 (en) 2006-06-14 2006-07-26 Microelectromechanical oscillator and method of operating same

Publications (2)

Publication Number Publication Date
WO2007149764A2 WO2007149764A2 (en) 2007-12-27
WO2007149764A3 true WO2007149764A3 (en) 2008-09-04

Family

ID=38834263

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/071214 WO2007149764A2 (en) 2006-06-14 2007-06-14 Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same

Country Status (1)

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WO (1) WO2007149764A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2524748A (en) 2014-03-31 2015-10-07 St Microelectronics Res & Dev Frequency compensation
FI128195B (en) 2017-09-05 2019-12-13 Tikitin Oy Frequency reference oscillator device and method of stabilizing a frequency reference signal

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050151592A1 (en) * 2004-01-09 2005-07-14 Aaron Partridge Frequency and/or phase compensated microelectromechanical oscillator
US20050184822A1 (en) * 2004-02-03 2005-08-25 Nokia Corporation Reference oscillator frequency stabilization

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050151592A1 (en) * 2004-01-09 2005-07-14 Aaron Partridge Frequency and/or phase compensated microelectromechanical oscillator
US20050184822A1 (en) * 2004-02-03 2005-08-25 Nokia Corporation Reference oscillator frequency stabilization

Also Published As

Publication number Publication date
WO2007149764A2 (en) 2007-12-27

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