WO2007133176A3 - Flat panel display substrate testing system - Google Patents

Flat panel display substrate testing system Download PDF

Info

Publication number
WO2007133176A3
WO2007133176A3 PCT/US2006/014794 US2006014794W WO2007133176A3 WO 2007133176 A3 WO2007133176 A3 WO 2007133176A3 US 2006014794 W US2006014794 W US 2006014794W WO 2007133176 A3 WO2007133176 A3 WO 2007133176A3
Authority
WO
WIPO (PCT)
Prior art keywords
pallet
electron beam
fpds
columns
scan
Prior art date
Application number
PCT/US2006/014794
Other languages
French (fr)
Other versions
WO2007133176A2 (en
Inventor
N William Parker
S Daniel Miller
Tirunelveli S Ravi
Original Assignee
Multibeam Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Multibeam Systems Inc filed Critical Multibeam Systems Inc
Priority to US10/589,097 priority Critical patent/US7941237B2/en
Publication of WO2007133176A2 publication Critical patent/WO2007133176A2/en
Publication of WO2007133176A3 publication Critical patent/WO2007133176A3/en

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Abstract

Pallet (100) is supported by bi-directional motor-driven rollers (627) to transport pallet (100) into and out of the process chamber (not shown) along direction (1299). Each column (1211 ) includes an electron source for generating an electron beam (1230), one or more lenses for focusing electron beam (1230) onto the surface of FPDS (120), and a deflector for deflecting electron beam (1230) on the surface of FPDS (120). The design of columns (1211) is optimized to scan beams (1230) substantially along an axis perpendicular to the direction of travel (1299) (X direction) of pallet (100). Five electron beam columns (1211) generate electro beams (1230), each beam (1230) being configured to scan substantially along an axis perpendicular to the direction of travel (1299) of pallet (100). The scan distance of each beam (1230) is typically -125 mm wide and the spacing of columns (1211 ) is less than or equal to the width of the beam scans, thus neighboring scans overlap or abut, enabling the full width of FPDS (120) to be scanned with at least one e-beam 1230 without the need for motion in the Y direction.
PCT/US2006/014794 2006-04-18 2006-04-19 Flat panel display substrate testing system WO2007133176A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/589,097 US7941237B2 (en) 2006-04-18 2006-04-19 Flat panel display substrate testing system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US37920706A 2006-04-18 2006-04-18
US11/379,207 2006-04-18

Publications (2)

Publication Number Publication Date
WO2007133176A2 WO2007133176A2 (en) 2007-11-22
WO2007133176A3 true WO2007133176A3 (en) 2009-04-23

Family

ID=38694330

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/014794 WO2007133176A2 (en) 2006-04-18 2006-04-19 Flat panel display substrate testing system

Country Status (1)

Country Link
WO (1) WO2007133176A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102621731B (en) * 2012-04-17 2014-11-19 深圳市华星光电技术有限公司 Voltage application device of liquid crystal substrate

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5719466A (en) * 1994-12-27 1998-02-17 Industrial Technology Research Institute Field emission display provided with repair capability of defects
US20030218456A1 (en) * 2002-05-23 2003-11-27 Applied Materials, Inc. Large substrate test system
US20050209808A1 (en) * 2004-03-08 2005-09-22 Kelbon Richard G Circuit board diagnostic operating center
US20060038554A1 (en) * 2004-02-12 2006-02-23 Applied Materials, Inc. Electron beam test system stage

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5719466A (en) * 1994-12-27 1998-02-17 Industrial Technology Research Institute Field emission display provided with repair capability of defects
US20030218456A1 (en) * 2002-05-23 2003-11-27 Applied Materials, Inc. Large substrate test system
US20060038554A1 (en) * 2004-02-12 2006-02-23 Applied Materials, Inc. Electron beam test system stage
US20050209808A1 (en) * 2004-03-08 2005-09-22 Kelbon Richard G Circuit board diagnostic operating center

Also Published As

Publication number Publication date
WO2007133176A2 (en) 2007-11-22

Similar Documents

Publication Publication Date Title
WO2008024212A3 (en) Fast axis beam profile shaping by collimation lenslets
US9592570B2 (en) Laser processing apparatus
WO2002049065A1 (en) Electron beam device and semiconductor device production method using the device
US7468506B2 (en) Spot grid array scanning system
US20150083911A1 (en) Method of Detecting Electrons, an Electron-Detector and an Inspection System
WO2007032779A3 (en) Apparatus and method for inspection and testing of flat panel display substrates
WO2009077450A3 (en) Scanning charged particle beams
WO2008101713A3 (en) High throughput sem tool
TW200727579A (en) Switching micro-resonant structures using at least one director
JP2007513460A5 (en)
JP2010503001A5 (en)
WO2008068691A3 (en) X-ray tube with multiple electron sources and common electron deflection unit
KR101777442B1 (en) Scanning exposure apparatus using microlens array
JP2005173438A5 (en)
JP5174844B2 (en) Circuit pattern inspection apparatus and inspection method thereof
WO2007133176A3 (en) Flat panel display substrate testing system
DE602007006076D1 (en) Optical scanning device and color image forming apparatus therewith
TWI765905B (en) An apparatus for annealing a layer of semiconductor material, a method of annealing a layer of semiconductor material, and a flat panel display
US8106355B1 (en) Automated inspection using cell-cell subtraction perpendicular to stage motion direction
CN102922127B (en) Method and the system of processing with laser scanner of operation laser scanner
WO2010055362A3 (en) Method and measuring system for scanning a region of interest
JP2006080303A (en) Electron beam drawing apparatus
WO2008024211A3 (en) Fast axis beam profile shaping
WO2022004229A1 (en) Differential exhaust device and focused energy beam device
US6992288B2 (en) Apparatus and method for directing gas towards a specimen

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 10589097

Country of ref document: US

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 06758420

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 06758420

Country of ref document: EP

Kind code of ref document: A2