WO2007128045A1 - Systèmes de microfluidique utilisant l'énergie acoustique superficielle et leur procédé d'utilisation - Google Patents

Systèmes de microfluidique utilisant l'énergie acoustique superficielle et leur procédé d'utilisation Download PDF

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Publication number
WO2007128045A1
WO2007128045A1 PCT/AU2007/000575 AU2007000575W WO2007128045A1 WO 2007128045 A1 WO2007128045 A1 WO 2007128045A1 AU 2007000575 W AU2007000575 W AU 2007000575W WO 2007128045 A1 WO2007128045 A1 WO 2007128045A1
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Prior art keywords
piezoelectric substrate
substrate
wave
fluid
channels
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PCT/AU2007/000575
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English (en)
Inventor
James Robert Friend
Leslie Yu-Ming Yeo
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Monash University
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Priority claimed from AU2006902259A external-priority patent/AU2006902259A0/en
Application filed by Monash University filed Critical Monash University
Publication of WO2007128045A1 publication Critical patent/WO2007128045A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
    • B01F31/80—Mixing by means of high-frequency vibrations above one kHz, e.g. ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B01F33/302—Micromixers the materials to be mixed flowing in the form of droplets
    • B01F33/3021—Micromixers the materials to be mixed flowing in the form of droplets the components to be mixed being combined in a single independent droplet, e.g. these droplets being divided by a non-miscible fluid or consisting of independent droplets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B39/00—Compounds having molecular sieve and base-exchange properties, e.g. crystalline zeolites; Their preparation; After-treatment, e.g. ion-exchange or dealumination
    • C01B39/02—Crystalline aluminosilicate zeolites; Isomorphous compounds thereof; Direct preparation thereof; Preparation thereof starting from a reaction mixture containing a crystalline zeolite of another type, or from preformed reactants; After-treatment thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B39/00—Compounds having molecular sieve and base-exchange properties, e.g. crystalline zeolites; Their preparation; After-treatment, e.g. ion-exchange or dealumination
    • C01B39/54—Phosphates, e.g. APO or SAPO compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00889—Mixing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00925—Irradiation
    • B01J2219/00932—Sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0864—Configuration of multiple channels and/or chambers in a single devices comprising only one inlet and multiple receiving wells, e.g. for separation, splitting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/089—Virtual walls for guiding liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
    • B01L2400/0436—Moving fluids with specific forces or mechanical means specific forces vibrational forces acoustic forces, e.g. surface acoustic waves [SAW]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0493—Specific techniques used
    • B01L2400/0496—Travelling waves, e.g. in combination with electrical or acoustic forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers

Definitions

  • the present invention generally relates to microfluidic systems and methods of using such systems, and is in particular directed to microfluidic systems using acoustic energy for the manipulation of fluid and particles suspended within that fluid.
  • a simple microfluidic system would typically include a substrate formed of material such as silicon, glass, polymeric film or thermoplastic in which is etched, laser cut or moulded microfluidic channels. Such channels would typically have at least one dimension of less than 1 mm. A cover may also be provided over the channels to enclose them. A syringe or a microelectromechanical system (MEMS) may then be used to transport fluids, and any associated reagents or analytes through these channels.
  • MEMS microelectromechanical system
  • More sophisticated microfluidic systems utilise piezoelectric actuators which are actuated for vibration using electrical excitation.
  • capillaries are mounted on or mechanically coupled to such an actuator to thereby allow for ultrasonic vibration of the capillary.
  • This has a particular application in the concentration of biological ; material within pressure nodes located within the acoustic standing wave generated by the vibration of the capillary.
  • the major disadvantages of such capillary based systems are difficulties in pumping fluids through the capillaries to reliably perform what are routine laboratory functions on the micro-scaie and the subsequent removal of the fluid and the concentrated material from the capillaries. All the above described applications use a continuous flow of fluid through channels or capillaries.
  • RF radio frequency
  • One such system uses a piezoelectric substrate upon which the surface of the piezoelectric substrate is located at least one interdigital electrode. Application of a RF input to the electrodes generates within the piezoelectric substrate surface a surface acoustic wave (SAW), also known as a "Rayleigh” wave.
  • SAW surface acoustic wave
  • the SAW excitation of the substrate surface acts to displace or manipulate one or more liquid droplets located on that surface.
  • Lithium Niobate LiNbOa
  • SAW generation Lithium Niobate
  • This material is however susceptible to damage from contact to fluids that are corrosive in nature. Such fluids therefore cannot be placed in direct contract with; the substrate.
  • it is not practical to produce channels within such a substrate limiting its applicability in continuous flow microfluidic applications.
  • a microfluidic system including: a piezoelectric substrate; • ⁇ > . .
  • a wave generation means for generating a wave in the piezoelectric substrate; and a rigid secondary substrate coupled to said piezoelectric substrate and providing a working surface for the system, the secondary substrate being formed of a relatively easily fabricated and/or chemically inert material; the coupling of the piezoelectric substrate with the secondary substrate being provided by a fluid coupling layer located between the piezoelectric substrate and the secondary substrate overlaying the piezoelectric substrate.
  • the wave generation means may generate a surface acoustic wave (SAW) in the surface of the piezoelectric substrate. This wave may then be transferred to the surface of the rigid secondary substrate. It is however also envisaged that other forms of waves could be used in this system to deliver acoustic energy to the secondary substrate including bulk acoustic waves (BAW), surface-skimming bulk waves (SSBW) and shear surface acoustic waves (SH-SAW).
  • the rigid substrate may be made from glass, Si ⁇ 2 , thermoplastic or other rigid materials. These materials are relatively chemically inert so as not to react to contact with corrosive fluids. The use of a chemically inert rigid substrate allows the microfluidic system to be used for corrosive fluids.
  • these materials may also be of lower cost than more expensive piezoelectric materials, and may also be easier to machine or etch or mould channels and other surface features in that substrate.
  • the rigid substrate may for example be provided by a conventional laboratory glass slide.
  • the coupling of the piezoelectric substrate with the rigid secondary substrate may be achieved by means of a fluid coupling layer.
  • the fluid may be a moderate viscosity fluid such as H 2 O, although the use of other fluids of lower and higher viscosities is also envisaged.
  • the fluid coupling layer separates the opposing surfaces of the substrates such that there is no direct physical contact between the substrates.
  • any solid layer such as a solidified adhesive layer as a coupling between the piezoelectric substrate and secondary substrate may act to absorb and suppress the SAW wave preventing its distribution to the secondary substrate, since almost all adhesives have extremely high acoustic losses.
  • the secondary substrate may not be permanently attached to ,the piezoelectric substrate. This means that relatively inexpensive secondary substrates as simple as a glass slide would be used and then discarded while the relatively expensive piezoelectric substrate and wave generation means can be reused.
  • the piezoelectric substrate itself may be conventionally formed from Lithium Niobate (LiNbOs).
  • Other types of piezoelectric material may also be used as it is possible to induce waves in polycrystalline piezoelectric material including barium titanate (BiTaOa), lead zirconium titanate (PZT or PbZrOs, often used with dopants to improve performance), zinc oxide (ZnO), aluminium nitride (AIN), and single crystal materials like lithium tantalate (LiTaO 3 ), quartz, langasite (La 3 Ga 5 SiO 14 ), and gallium orthophosphate (GaPO 4 ) (this may be applicable for high temperature applications; the coupling fluid could then be a metal, and permit us to make high-temperature atomized particles of caustic solutions).
  • barium titanate BaOa
  • PZT or PbZrOs lead zirconium titanate
  • ZnO zinc oxide
  • single crystal materials like lithium tantalate
  • the wave generation means may include at least one interdigital electrode deposited on the piezoelectric substrate, and electrical supply means for applying an RF input into the electrode. It is however also envisaged that other types of transducers could be used to generate the SAW wave or other waves in the piezoelectric substrate.
  • the piezoelectric substrate may be elongate in shape having opposing ends, and at least one said interdigital electrode may be located at one end thereof. Preferably, an interdigital electrode can be provided at opposing ends of the piezoelectric substrate.
  • the secondary substrate and fluid coupling layer may then be located over the piezoelectric substrate between the electrodes. These interdigital electrodes will therefore be located away from and will not be covered by the secondary substrate.
  • the fluid coupling layer may be in the form of a liquid droplet upon which the secondary substrate is overlaid.
  • the liquid droplet may be located away from the electrodes.
  • the use of the fluid coupling layer means that the secondary substrate does not need to be aligned perfectly parallel to the surface of the piezoelectric substrate.
  • at least one interdigital electrode may be located under the secondary substrate and therefore at least partially within the fluid coupling layer. Preferably a number pf said electrodes may be located under the secondary substrate. This arrangement which will be subsequently described in more detail, is particularly useful when microfluidic channels are provided in the secondary substrate, and different SAW waves are distributed along different sections of the channels.
  • a method of synthesizing zeolite nanocrystals using the above described microfluidic system includes applying on the working surface a liquid droplet of a solution predominantly comprising NaOH, H 3 PO 4 , silica and sodium aluminate, and a gelling polymer, with ethanol and/or water as solvent, and applying a SAW vibration to the working surface sufficient to cause atomisation of the fluid droplet thereby leading to the generation of said zeolite nanocrystals.
  • the secondary substrate may be provided with microfluidic channels through which fluid can be delivered, and at least one electrode may be provided under the secondary substrate on the piezoelectric substrate to thereby apply waves to fluid passing through those channels.
  • at least two supply channels may be provided, the supply channels coming together at a mixer zone.
  • Reactants passing through each supply channel may be mixed at the mixer zone by means of an interdigital electrode located near the zone and generating a SAW wave in that mixer zone to thereby facilitate mixing and/or reacting of the reactants.
  • Following the mixing zone may be a test zone where the mixed reactants can be analysed.
  • Integrated circuit devices may be located on the secondary substrate to analyse the mixed reactants within the channel of the test zone.
  • Opposing electrodes on either side 'of the test zone channel may apply a SAW wave to the test zone to facilitate the reaction therein.
  • Downstream from the test zone may be provided a steering device provided by a further electrode provided near a channel junction which separates into at least two discharge channels.
  • the electrode may generate a SAW wave as required to allow the reacted product to pass along one discharge channel where the reacted result is positive, or along another discharge channel acting as a waste channel when the reacted product is unacceptable.
  • Figure 1 is a plan view of a first preferred embodiment of a microfluidic system according to the present invention
  • Figure 2 is a partial side view of the microfluidic system of Figure 1 showing its application in caustic solution atomisation;
  • Figure 3a is a partial side view of a second preferred embodiment of the microfluidic system according to the present invention.
  • Figure 3b is a partial plane view of the microfluidic system of Figure 3a.
  • microfluidic system according to a first preferred embodiment of a microfluidic system according to the present invention includes an elongate piezoelectric substrate 1 having an upper surface 3.
  • Wave generation means in the form of lnterdigital electrodes 5 are deposited on the surface 3 at opposing ends of the piezoelectric substrate 1.
  • a radio frequency (RF) input 7 is provided to each of the interdigital electrodes 5.
  • This pulse excitation of the interdigital electrodes 5 results in a surface acoustic wave (SAW) wave 9 within the piezoelectric substrate of a surface 3.
  • SAW surface acoustic wave
  • the SAW wave may be either a standing or a travelling wave generated within the upper surface 3.
  • the frequency of the pulse excitation can typically be in the order of between 10 to 1000 MHz, although this frequency can vary depending on the application of the microfluidic system.
  • a rigid secondary substrate 11 Located above the upper surface 3 is a rigid secondary substrate 11 , with a liquid droplet 13 being provided between the piezoelectric substrate upper surface 3 and the secondary substrate 11 to provide a fluid coupling layer 13 therebetween.
  • the secondary substrate 11 is formed of relatively chemically inert material such as glass. This enables fluid droplets 15 of caustic solution to be supported on the working surface 12 of the secondary substrate 11. This caustic solution would otherwise corrode the surface of the piezoelectric substrate 1 if applied directly on to that surface 3.
  • Figure 2 illustrates a particular application of the microfluidic system according to the present invention where fluid can be atomised mechanically due to the vibration of the working surface 12 when the SAW wave is distributed to the secondary substrate 11.
  • the microfluidic device according to the present invention may be used to synthesize aluminosilicate or silicoaluminophosphate zeolite nanocrystals.
  • Zeolites are used in many industrial applications, for example in the production of gas separation membranes where the zeolite is embedded in a polymer matrix. It is at present difficult to synthesize zeolite nanostructures using conventional techniques.
  • the microfluidic system according to the present invention however facilitates the production of zeolite nanocrystals. This is achieved by using the system to atomise fluid droplets 15 of a caustic solution predominantly comprising NaOH, H 3 PO 4 , silica and sodium aluminate, and a gelling polymer, with ethanol and/or water as solvent.
  • These fluid droplets 15 can be applied to the working surface 12 of the secondary substrate 11 which, being chemically inert, will not be corroded by that caustic fluid.
  • High frequency electric fields of 10 MHz to as much as 2 GHz may be applied to the electrodes 5 in order to induce exceptionally shallow ( ⁇ 5 wavelengths) mechanical SAW vibrations along the piezoelectric substrate surface 3.
  • Placement of a liquid droplet 15 upon the working surface 12 permits transmission of this acoustic energy into the droplet which appears at the droplet's surface as a capillary wave.
  • the droplet With sufficient acoustic power input into the droplet, usually over 0.5W and dependent upon the viscosity of the droplet and its size, the droplet is atomized by generation of small particles that form via breakage and separation at each of the capillary wave peaks.
  • SAW atomization The advantages of SAW atomization are its high energy density, efficient piezoelectric energy conversion, and straightforward particle size control method. Moreover, the power requirement, typically a continuous 2-5 W, is low, allowing the design of a compact device. Recent studies by the Applicant have demonstrated the possibility of generating copious (several mL/min) amounts of nanodrops of 10-1000 nm in diameter.
  • copious (several mL/min) amounts of nanodrops of 10-1000 nm in diameter The wayelength of the capillary wave in the fluid is directly related to the wavelength of the SAW radiation along the substrate surface, and so the atomized droplet size is controlled by the frequency of the SAW and the physical characteristics of the fluid set atop the working surface 12.
  • FIGS. 3a and 3b show an alternative preferred embodiment of the microfluidic system of the present invention.
  • the use of the same reference numerals for corresponding features is used in the description of this alternative arrangement for clarity reasons.
  • This second preferred embodiment also includes a piezoelectric substrate 1 having an upper surface 3.
  • a secondary substrate 11 is also located above the upper surface 3, with a fluid coupling layer 13 being provided therebetween.
  • the principal differences are that a plurality of interdigital electrodes are located under the secondary substrate 11 , and a series of channels 17 are provided within the working surface 12 of the secondary substrate 11.
  • the microfluidic channels 17 include a pair of supply channels 19a and 19b through which different reactants can be separately supplied.
  • the supply channels 19a, 19b merge at a mixer zone 21 where the different reactants can mix and react.
  • Located adjacent to the mixer zone 21 is a first curved interdigital electrode 23 which distributes a SAW wave through the fluid coupling 13 to the mixer zone to facilitate mixing of the reactants therein.
  • the mixed reactants then move to a test zone 25 located downstream from the mixer zone 21.
  • a test arrangement (not shown) can be located on the secondary substrate 11 adjacent the test zone 25 to enable analysis of the mixed reactants located within the test zone 25.
  • IC devices could be readily secured to the working surface 12 adjacent the test zone 25.
  • Opposing interdigital electrodes 27 are located on opposing sides of the test zone 25 to thereby allow for the distribution of a further SAW wave to the test zone 25 to facilitate the reaction of the mixed reactants. Downstream from the test zone 25 are two discharge channels 29a and 29b. A second curved interdigital electrode 31 is located adjacent the junction 28 of the two discharge channels 29a, 29b. The secondary interdigital electrode can be selectively actuated to direct the next reactants through one of the discharge channels 29a where the reacted results is positive or along the other discharge channel 29b when the reacted product is unacceptable.

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  • Engineering & Computer Science (AREA)
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Abstract

L'invention porte sur un système de microfluidique comprenant: Un substrat piézoélectrique (1), un générateur d'ondes (5) produisant des ondes à l'intérieur du substrat piézoélectrique, un substrat rigide (11) relié au substrat piézoélectrique (1) et servant de surface de travail (12) au système. Le substrat rigide (11) peut être fait d'un matériau relativement inerte chimiquement. Le couplage du substrat piézoélectrique (1) et du substrat rigide (11) étant assuré par une couche fluide située entre eux et recouvrant le substrat piézoélectrique (1). Dans une application, le système peut servir à synthétiser des nanocristaux de zéolite par atomisation de gouttelettes liquides (15).
PCT/AU2007/000575 2006-05-02 2007-05-02 Systèmes de microfluidique utilisant l'énergie acoustique superficielle et leur procédé d'utilisation WO2007128045A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AU2006902259A AU2006902259A0 (en) 2006-05-02 Microfluidic Systems using Surface Acoustic Energy and Method of use Thereof
AU2006902259 2006-05-02

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Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100139377A1 (en) * 2008-12-05 2010-06-10 The Penn State Reserch Foundation Particle focusing within a microfluidic device using surface acoustic waves
WO2011023949A2 (fr) 2009-08-24 2011-03-03 The University Court Of The University Of Glasgow Appareil fluidique et substrat fluidique
WO2012114076A1 (fr) 2011-02-24 2012-08-30 The University Court Of The University Of Glasgow Appareil fluidique pour la manipulation par ondes acoustiques de surface d'échantillons de fluides, et procédé de fabrication dudit appareil fluidique
CN101639475B (zh) * 2009-08-14 2012-09-05 宁波大学 在两个微流控芯片之间实现数字微流体输运的装置及方法
WO2012135663A2 (fr) * 2011-03-31 2012-10-04 University Of South Florida Dispositif microfluidique à deux étages pour manipulation acoustique de particules et procédés de séparation
US8415619B2 (en) 2009-11-13 2013-04-09 University of Glascgow Methods and systems for mass spectrometry
WO2014066624A1 (fr) * 2012-10-26 2014-05-01 President And Fellows Of Harvard College Systèmes et procédés de production et de manipulation de gouttelettes à l'aide d'ondes acoustiques
WO2015054742A1 (fr) * 2013-10-17 2015-04-23 Royal Melbourne Institute Of Technology Plate-forme d'actionnement piézo-électrique
WO2015107014A1 (fr) * 2014-01-15 2015-07-23 Eth Zurich Manipulation de gouttelettes acoustophorétiques dans des dispositifs d'ondes acoustiques de volume
US9608547B2 (en) 2012-01-31 2017-03-28 The Penn State Research Foundation Microfluidic manipulation and sorting of particles using tunable standing surface acoustic wave
US9606086B2 (en) 2012-08-01 2017-03-28 The Penn State Research Foundation High-efficiency separation and manipulation of particles and cells in microfluidic device using surface acoustic waves at an oblique angle
US9695390B2 (en) 2010-08-23 2017-07-04 President And Fellows Of Harvard College Acoustic waves in microfluidics
US9757699B2 (en) 2012-11-27 2017-09-12 The Penn State Research Foundation Spatiotemporal control of chemical microenvironment using oscillating microstructures
US9795966B2 (en) 2015-10-28 2017-10-24 Northwestern University Non-contact droplet manipulation apparatus and method
US10258987B2 (en) 2014-06-26 2019-04-16 President And Fellows Of Harvard College Fluid infection using acoustic waves
CN113198400A (zh) * 2021-04-30 2021-08-03 浙江大学 基于声表面行波的纳米粒子可控合成反应加速装置及方法
US11311686B2 (en) 2014-11-11 2022-04-26 The University Court Of The University Of Glasgow Surface acoustic wave device for the nebulisation of therapeutic liquids
US11559806B2 (en) 2015-08-27 2023-01-24 President And Fellows Of Harvard College Acoustic wave sorting
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