WO2007122542A2 - Calibration of a magnetic sensor device - Google Patents
Calibration of a magnetic sensor device Download PDFInfo
- Publication number
- WO2007122542A2 WO2007122542A2 PCT/IB2007/051351 IB2007051351W WO2007122542A2 WO 2007122542 A2 WO2007122542 A2 WO 2007122542A2 IB 2007051351 W IB2007051351 W IB 2007051351W WO 2007122542 A2 WO2007122542 A2 WO 2007122542A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- magnetic
- field
- calibration
- sensor device
- magnetic sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V13/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices covered by groups G01V1/00 – G01V11/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
- G01R33/1269—Measuring magnetic properties of articles or specimens of solids or fluids of molecules labeled with magnetic beads
Definitions
- the invention relates to a magnetic sensor device comprising at least one magnetic excitation field generator and at least one magnetic sensor element. Moreover, the invention relates to the use of such a magnetic sensor device and a method for detecting magnetic particles with such a magnetic sensor device.
- a magnetic sensor device which may for example be used in a microfluidic biosensor for the detection of (e.g. biological) molecules labeled with magnetic beads.
- the microsensor device is provided with an array of sensor units comprising wires for the generation of a magnetic field and Giant Magneto Resistance devices (GMRs) for the detection of stray fields generated by magnetized beads. The resistance of the GMRs is then indicative of the number of the beads near the sensor unit.
- GMRs Giant Magneto Resistance devices
- a problem with magnetic biosensors of the aforementioned kind is that the sensitivity of the magneto -resistive elements and therefore the effective gain of the whole measurements is very sensitive to uncontrollable parameters like magnetic instabilities in the sensors, external magnetic fields, aging, temperature and the like.
- a magnetic sensor device serves for detecting magnetic particles in an investigation region, for example in an adjacent sample chamber.
- the term "magnetic particle” shall refer to any kind of material (molecules, complexes and especially nanoparticles) that can be magnetized when being exposed to a magnetic field.
- the magnetic particles may for instance serve as labels for target molecules one is actually interested in.
- the magnetic sensor device comprises the following components: a) At least one magnetic excitation field generator for generating a magnetic excitation field in the investigation region.
- At least one magnetic calibration field generator for generating a magnetic calibration field in the investigation region, wherein said calibration field has at least temporarily a sufficient magnitude to change the magnetization characteristics of magnetic particles that are present in the investigation region
- At least one magnetic sensor element for measuring (inter alia) magnetic reaction fields generated by magnetic particles in the investigation region in reaction to the magnetic excitation field and/or the magnetic calibration field.
- An evaluation unit for calibrating the magnetic sensor element based on measurements of said element, wherein magnetic particles are present and wherein a magnetic excitation field and/or a magnetic calibration field prevails in the investigation region during said measurements.
- the evaluation unit may for example be realized by an on-chip circuitry or by an external microcomputer.
- the invention relates to a method for detecting magnetic particles in an investigation region which comprises the following steps: a) Generating a magnetic excitation field in the investigation region with at least one magnetic excitation field generator. b) Generating a magnetic calibration field in the investigation region with at least one magnetic calibration field generator, wherein said field has at least temporarily a sufficient magnitude to change the magnetization characteristics of magnetic particles in the investigation region. c) Measuring magnetic reaction fields with at least one magnetic sensor element, wherein said fields are generated by magnetic particles in the investigation region in reaction to the magnetic excitation field and/or the magnetic calibration field. d) Calibrating the magnetic sensor element based on measurements with a magnetic excitation field and/or a magnetic calibration field and with magnetic particles in the investigation region.
- the magnetic sensor device and the method described above make use of a magnetic calibration field that can change the magnetization characteristics of the magnetic particles which shall be detected. This allows to change the reactions of said particles to an excitation field accordingly.
- the magnetic crosstalk between the excitation field generator and the magnetic sensor element is not affected by the calibration field. A comparison between measurements generated with the same excitation field but different calibration fields therefore allows to infer the contribution coming from magnetic crosstalk. As this contribution is independent of the (unknown) amount of particles present in the investigation region, it can be used to determine the sensor gain.
- the evaluation unit may optionally be adapted to determine the amount of magnetic particles in the investigation region based on measurements which were generated during times in which the magnetic calibration field at least approximately vanishes in the investigation region.
- the amount of magnetic particles present in the investigation region (or, if particles of the same kind are concerned, their number) is the parameter one actually wants to know. If the calibration field is zero, it can be determined as usual with magnetic excitation fields only. The corresponding measurements will however achieve a higher accuracy because they can be calibrated based on previous and/or subsequent measurements with a magnetic calibration field.
- the magnetic calibration field vanishes repeatedly.
- the aforementioned detection of the magnetic particles without disturbances by calibration fields can then be repeated accordingly, wherein the intermediate times during which the calibration field is nonzero can be used to update the calibration of the magnetic sensor element.
- the magnetic calibration field is chosen so large that it saturates the magnetic particles at least temporarily. During the times of saturation, the magnetic particles cannot react to variations of the magnetic excitation field, which allows to identify the direct effect of this field on the magnetic sensor element (i.e. the magnetic crosstalk).
- the magnetic excitation field has preferably a nonzero excitation frequency, wherein the term "frequency” is understood here and in the following as the repetition frequency of a periodic pattern.
- the Fourier spectrum of the excitation field may therefore comprise the excitation frequency as a basic frequency together with other frequencies, e.g. higher harmonics of the excitation frequency.
- Using an alternating excitation field allows a facilitated detection of contributions that are due to this field in the spectrum of the sensor signal.
- the magnetic calibration field may have a nonzero calibration frequency.
- the calibration field may for example be a square-wave field that periodically switches between two values, e.g. zero and a nonzero value, or a field that switches between zero and an alternating course.
- the calibration frequency and the aforementioned excitation frequency may be the same, or they may be different.
- the magnetic sensor element is driven with a nonzero sensing frequency.
- a nonzero sensing frequency allows to detect influences of the driving operation in the sensor signal and to position signal components one is interested in optimally with respect to noise in the signal spectrum.
- the magnetic excitation field generator and the magnetic calibration field generator may in principle be the same component, for example a wire on a sensor chip; excitation and calibration fields might then be generated by a superposition of corresponding currents.
- a problem of this design is however that in many cases the calibration fields required for a change of the magnetization characteristics of the magnetic particles have to be so large that they also significantly change the characteristics of the magnetic sensor element. This is undesirable, as a calibration should determine the sensor characteristics as they are during normal measurements, i.e. without a calibration field.
- the magnetic calibration field is therefore adjusted such that it is minimized (preferably to a value of essentially zero) in the magnetic sensor element (or, more precisely, in the sensitive region thereof) with respect to the sensitive direction of the magnetic sensor element.
- the "sensitive direction" of the magnetic sensor element means that the sensor element is most (or only) sensitive with respect to components of a magnetic field vector that are parallel to said spatial direction.
- the magnetic sensor element has only one sensitive direction and is substantially insensitive to components of a magnetic field perpendicular to this direction.
- the magnetic calibration field is then preferably oriented in said insensitive direction, which typically requires the calibration field generator to be different from the excitation field generator.
- the evaluation unit may optionally be adapted to determine that component of the measurement signals that is directly due to the magnetic calibration field inside the magnetic sensor element (or, more precisely, in its sensitive region). Such a determination can then be used to adjust the magnetic calibration field - particularly its orientation - in such a way that this component is minimized or even completely removed. Thus the optimal conditions of the aforementioned embodiment can be reached and preserved in a feedback procedure.
- the magnetic (excitation/calibration) field generators can be realized in many different ways. Preferably, they comprise at least one conductor wire, which may be disposed on or in a substrate of the magnetic sensor device.
- the magnetic excitation field generator and the magnetic calibration field generator are at least partially realized in the same hardware, e.g. by the same integrated wire on a chip.
- the magnetic calibration field generator may comprise at least one coil for an external generation of the calibration field.
- the magnetic sensor element may particularly be realized by a Hall sensor or by a magneto -resistive element, for example a GMR (Giant Magnetic Resistance), a TMR (Tunnel Magneto Resistance), or an AMR (Anisotropic Magneto Resistance).
- the magnetic excitation field generator and the magnetic sensor element may be realized as an integrated circuit, for example using CMOS technology together with additional steps for realizing the magneto -resistive components on top of a CMOS circuitry.
- Said integrated circuit may optionally also comprise the magnetic calibration field generator and/or the evaluation unit.
- the invention further relates to the use of the magnetic sensor device described above for molecular diagnostics, biological sample analysis, and/or chemical sample analysis, particularly the detection of small molecules.
- Molecular diagnostics may for example be accomplished with the help of magnetic beads that are directly or indirectly attached to target molecules.
- Figure 1 schematically shows a magnetic sensor device according to the present invention during a measurement
- Figure 2 shows the magnetic sensor device of Figure 1 during a calibration
- Figure 3 illustrates the resistance of a GMR sensor in dependence on the applied magnetic field
- FIG. 4 illustrates the magnetization behavior of magnetic particles. Like reference numbers in the Figures refer to identical or similar components.
- FIG. 1 illustrates a magnetic sensor device 10 according to the present invention in the particular application as a biosensor for the detection of magnetically interactive particles, e.g. superparamagnetic beads 2 in a sample chamber.
- Magneto- resistive biochips or biosensors have promising properties for bio-molecular diagnostics, in terms of sensitivity, specificity, integration, ease of use, and costs. Examples of such biochips are described in the WO 2003/054566, WO 2003/054523, WO 2005/010542 A2, WO 2005/010543 Al, and WO 2005/038911 Al, which are incorporated into the present application by reference.
- a biosensor typically consists of an array of (e.g. 100) sensor devices 10 of the kind shown in Figure 1 and may thus simultaneously measure the concentration of a large number of different target molecules (e.g. protein, DNA, amino acids, drugs of abuse) in a solution (e.g. blood or saliva).
- target molecules e.g. protein, DNA, amino acids, drugs of abuse
- a solution e.g. blood or saliva
- the so-called “sandwich assay” this is achieved by providing a binding surface 14 with first antibodies to which the target molecules may bind.
- Superparamagnetic beads 2 carrying second antibodies may then attach to the bound target molecules (for clarity the antibodies and target molecules are not shown of the Figure).
- a current Ii flowing in at least one of the excitation wires 11 and 13 of the sensor device 10 generates a magnetic excitation field Bi, which then magnetizes the superparamagnetic beads 2.
- the stray field B 2 from the superparamagnetic beads 2 introduces an in-plane magnetization component in the sensitive direction (here the x- direction) of the Giant Magneto Resistance (GMR) 12 of the sensor device 10, which results in a measurable resistance change. Said resistance change is determined with the help of a sensor current I 2 and the resulting voltage drop u.
- Figure 3 shows in this context the GMR resistance R as a function of the magnetic field component B
- the slope of the curve corresponds to the sensitivity S GMR of the magnetic sensor element 12 and depends on B
- ) of the measurement is sensitive to non-controllable parameters, for example: - stochastic sensitivity variations due to magnetic instabilities in the sensor; externally applied magnetic fields; production tolerances; aging effects; - temperature; memory effects from e.g. magnetic actuation fields; gain variations in the current sources and the detection electronics.
- the approach proposed here for solving the aforementioned problems tries to determine the effective gain of the biosensor system by applying magnetic calibration fields to the sensor in such a way that the calibration field is hardly affected by the presence of beads near the sensor. At the same time, the applied fields shall still enable a bead detection process.
- the magnetic sensor device 10 of Figure 1 comprises at least one external coil 15 for generating a magnetic calibration field B 3 (cf. Figure 2) and an evaluation unit 16 to which the excitation wires 11, 13 and the GMR sensor 12 are coupled.
- the evaluation unit may be realized by analog or digital circuits integrated into the substrate of the sensor device 10 and/or by an external digital processing unit (e.g. a workstation) with appropriate software. Additionally or alternatively to the external coil 15, means for generating a calibration field might also be located on the sensor chip.
- Figure 4 schematically shows the magnetization ⁇ of the magnetic beads 2 in dependence on the magnetic field B they are exposed to (the shown hysteresis may be present or not). It can be seen that the magnetization ⁇ saturates if the field B exceeds certain limits. Typical values of such saturation fields of the beads are 10-100 mT.
- the saturation fields of magneto -resistive sensors can be about 10 mT (8000 A/m), but only when the fields are applied in the sensitive x-direction of the sensor.
- a magnetic "calibration" field B 3 that is essentially orthogonal to the sensitive x-direction of the GMR sensor 12 (i.e. that is directed in the z-direction in Figure 2) is therefore applied to saturate the magnetic beads 2.
- the biosensor measures the beads and calibrates the detection, including the GMR sensor, in an alternating way. Note that in this way also fluctuations of the excitation currents Ii and the sensor currents I2 are compensated.
- R 0 static resistance of GMR
- is composed of Bi, B 2 and B 3 according to:
- I 2 ,o (constant, known) amplitude of the sensor current I 2 .
- the magnetic calibration field B 3 is a square-wave field oscillating between two values ⁇ B 3;0 with frequency f 3 ⁇ ft:
- equation (3) can be demodulated as in Case 1 with a proper frequency (fi ⁇ £) to yield the term (5). Further analysis is then the same as in Case 1.
- the magnetization ⁇ varies between ⁇ sat with the same frequency ft as the magnetic crosstalk component a-Ii in equation (3).
- Demodulation of equation (3) with a proper frequency (ft ⁇ f2) yields then the quantity g-(a-Ii,o + b-N- ⁇ sat >I 2 , 0 (7)
- the calibration field B 3 has always a magnitude ⁇ B 3;0 that saturates the beads 2.
- the calibration field B 3 may however also oscillate between such a magnitude B 3 0 and the value zero.
- the beads are swept between a saturated and sensitive regime at frequency f 3 , which can be viewed as a kind of field-gating method. As in the cases analyzed above, this generates higher harmonic signals (second and third) and respective mixing signals (mixing between harmonics of ft, f 2 , and f 3 ). Signals components will then be characteristic for the sensor response and for the presence of the magnetic particles, respectively.
- the magneto -resistive signal at frequency f 3 may optionally be used to tune the direction of the applied magnetic calibration field B 3 , e.g. to orient it into an out-of-plane direction (z-direction in Figure 2).
- the beads are not completely saturated, but shifted across their non-linear magnetic characteristic. This measure effectively changes the magnetic response of the beads, and thus the overall detection gain.
- the detection gain without the field may be calibrated by observing the gain difference.
- This method requires a well-calibrated bead magnetization change.
- the magnetic beads do have a hysteresis characteristic introduced by e.g. magnetic remanence, coercive field, or magnetic anisotropy.
- the operating point of the beads is shifted between a sensitive (inner loop) and a non-sensitive regime (saturated regime).
- the required magnetic field to implement this embodiment is typically smaller than the required field for the aforementioned embodiment. This is because a small calibration field may shift the bead from the linear to the saturated region.
- a constant magnetic field permanent magnet
- the sensitivity S GMR of the GMR sensor is preferably measured in the same frequency range in which the beads excitation is performed. This is because of reasons of signal-to-noise ratio SNR (to reduce the influence of 1/f noise, small current, small voltage) and to be consistent to the bead measurement.
- the invention was explained in the Figures with respect to a biosensor based on an integrated excitation of superparamagnetic nano-particles, it can also be applied in other magneto -resistive sensors likes AMR and TMR and in combination with an external excitation method. Moreover, the invention is also applicable to other configurations of the magneto -resistive element (e.g. Wheatstone bridges or half- Wheatstone bridges) or to various amplifier and sensor current means.
- the magneto -resistive element e.g. Wheatstone bridges or half- Wheatstone bridges
- the calibration field may be internally generated, e.g. by a low-duty cycle, high amplitude current (to limit dissipation) in integrated wires.
- Said wires might be the excitation wires, which are operated bi-functionally in this case, or separate wires.
- the magnetic crosstalk from the internal wires generating the calibration field to the sensor is minimized in this embodiment by e.g. a vertical (z-direction) alignment of the centers of said wires and the sensor.
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- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/298,066 US20090072815A1 (en) | 2006-04-26 | 2007-04-16 | Calibration of a magnetic sensor device |
EP07735500A EP2013645A2 (de) | 2006-04-26 | 2007-04-16 | Kalibrierung eines magnetsensors |
JP2009507204A JP2009535615A (ja) | 2006-04-26 | 2007-04-16 | 磁気センサーデバイスの校正 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06113113.2 | 2006-04-26 | ||
EP06113113 | 2006-04-26 |
Publications (2)
Publication Number | Publication Date |
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WO2007122542A2 true WO2007122542A2 (en) | 2007-11-01 |
WO2007122542A3 WO2007122542A3 (en) | 2008-09-25 |
Family
ID=38474027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IB2007/051351 WO2007122542A2 (en) | 2006-04-26 | 2007-04-16 | Calibration of a magnetic sensor device |
Country Status (5)
Country | Link |
---|---|
US (1) | US20090072815A1 (de) |
EP (1) | EP2013645A2 (de) |
JP (1) | JP2009535615A (de) |
CN (1) | CN101427157A (de) |
WO (1) | WO2007122542A2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012146930A3 (en) * | 2011-04-27 | 2013-06-20 | The University Of Manchester | Electromagnetic sensor and calibration thereof |
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DE102007009210A1 (de) * | 2007-02-26 | 2008-08-28 | Siemens Ag | Bildgebendes tomographisches Verfahren und zugehörige Anordnung |
EP2401625B1 (de) | 2009-02-26 | 2014-01-22 | Regents of the University of Minnesota | Detektion von teilchen mit hohem magnetischem moment |
US8825426B2 (en) | 2010-04-09 | 2014-09-02 | CSR Technology Holdings Inc. | Method and apparatus for calibrating a magnetic sensor |
US8395381B2 (en) * | 2010-07-09 | 2013-03-12 | Invensense, Inc. | Micromachined magnetic field sensors |
CN102288926B (zh) * | 2010-11-30 | 2016-07-13 | 北京德锐磁星科技有限公司 | 微机电磁传感器 |
US9304130B2 (en) | 2010-12-16 | 2016-04-05 | International Business Machines Corporation | Trenched sample assembly for detection of analytes with electromagnetic read-write heads |
US9040311B2 (en) | 2011-05-03 | 2015-05-26 | International Business Machines Corporation | Calibration assembly for aide in detection of analytes with electromagnetic read-write heads |
US8855957B2 (en) | 2011-05-03 | 2014-10-07 | International Business Machines Corporation | Method for calibrating read sensors of electromagnetic read-write heads |
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US9435800B2 (en) | 2012-09-14 | 2016-09-06 | International Business Machines Corporation | Sample assembly with an electromagnetic field to accelerate the bonding of target antigens and nanoparticles |
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CN103076037B (zh) * | 2013-01-09 | 2016-02-10 | 苏州世力源科技有限公司 | 可在线校准传感器的方法 |
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CN105548935B (zh) * | 2016-01-04 | 2018-11-09 | 清华大学 | 磁场测量仪分辨率的检测方法和装置 |
CN107796865B (zh) | 2016-09-05 | 2021-05-25 | 财团法人工业技术研究院 | 生物分子磁传感器 |
EP3315983B1 (de) * | 2016-10-31 | 2020-06-03 | Senis AG | Kalibrierwerkzeug für die kalibrierung eines magnetfeldsensors |
US10837943B2 (en) * | 2017-05-26 | 2020-11-17 | Allegro Microsystems, Llc | Magnetic field sensor with error calculation |
CN107290694B (zh) * | 2017-07-18 | 2020-12-18 | 上海交通大学 | 抑制方向串扰的电感型磁传感器及其制备方法 |
EP3467528B1 (de) | 2017-10-06 | 2020-05-20 | Melexis Technologies NV | Kalibrierung der empfindlichkeitsanpassung eines magnetsensors |
US20210190893A1 (en) | 2017-10-06 | 2021-06-24 | Melexis Technologies Nv | Magnetic sensor sensitivity matching calibration |
US10955493B2 (en) * | 2018-05-02 | 2021-03-23 | Analog Devices Global Unlimited Company | Magnetic sensor systems |
CN108828477A (zh) * | 2018-09-12 | 2018-11-16 | 中国科学院地质与地球物理研究所 | 一种tmr阵列扫描式岩石磁性检测仪 |
WO2020062089A1 (zh) * | 2018-09-28 | 2020-04-02 | 深圳市大疆创新科技有限公司 | 磁传感器校准方法以及可移动平台 |
CN109489601A (zh) * | 2018-11-21 | 2019-03-19 | 嘉兴中润光学科技有限公司 | 位移传感器应用的可行性验证装置及方法 |
TWI693418B (zh) * | 2019-03-22 | 2020-05-11 | 宇能電科技股份有限公司 | 校正磁場產生裝置及其具有自我校正磁場能力的磁場感測器與校正方法 |
CN111077488A (zh) * | 2019-12-23 | 2020-04-28 | 郑州大学 | 一种磁矩校正方法 |
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2007
- 2007-04-16 JP JP2009507204A patent/JP2009535615A/ja active Pending
- 2007-04-16 WO PCT/IB2007/051351 patent/WO2007122542A2/en active Application Filing
- 2007-04-16 US US12/298,066 patent/US20090072815A1/en not_active Abandoned
- 2007-04-16 EP EP07735500A patent/EP2013645A2/de not_active Withdrawn
- 2007-04-16 CN CNA2007800145901A patent/CN101427157A/zh active Pending
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012146930A3 (en) * | 2011-04-27 | 2013-06-20 | The University Of Manchester | Electromagnetic sensor and calibration thereof |
US9404992B2 (en) | 2011-04-27 | 2016-08-02 | The University Of Manchester | Sensors |
RU2593677C2 (ru) * | 2011-04-27 | 2016-08-10 | Дзе Юниверсити Оф Манчестер | Электромагнитный датчик и его калибровка |
EP3203224A1 (de) * | 2011-04-27 | 2017-08-09 | The University Of Manchester | Verbesserungen an sensoren |
US10144987B2 (en) | 2011-04-27 | 2018-12-04 | The University Of Manchester | Sensors |
RU2712981C2 (ru) * | 2011-04-27 | 2020-02-03 | Дзе Юниверсити Оф Манчестер | Электромагнитный датчик и его калибровка |
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WO2007122542A3 (en) | 2008-09-25 |
JP2009535615A (ja) | 2009-10-01 |
CN101427157A (zh) | 2009-05-06 |
EP2013645A2 (de) | 2009-01-14 |
US20090072815A1 (en) | 2009-03-19 |
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