WO2007116679A1

WO2007116679A1 - Optical measurement instrument and optical measurement method

Info

Publication number: WO2007116679A1
Application number: PCT/JP2007/056190
Authority: WO
Inventors: Shigeo Kamiya
Original assignee: Nidec-Read Corporation
Priority date: 2006-04-06
Filing date: 2007-03-26
Publication date: 2007-10-18
Also published as: TW200745602A; JP2007278849A

Abstract

An optical measurement instrument for observing an inspection object three-dimensionally by a color image through a simple structure. The optical measurement instrument comprises an objective lens system for outputting first reflection light reflected from the inspection object by focusing first light of first wavelength inputted onto the inspection object, splitting second light of second wavelength inputted into second reference light and second measurement light, outputting second reflection light reflected from the inspection object by focusing second measurement light onto the inspection object, and outputting third reflection light interfering with the second reflection light by reflecting the second reference light. A three-dimensional image of the inspection object is formed using the first reflection light, and interference of the second reflection light and the third reflection light.

Description

Specification

Optical measuring apparatus and optical measuring method

Technical field

TECHNICAL FIELD [0001] The present invention relates to an optical measurement apparatus and an optical measurement method capable of measuring an inspection object three-dimensionally. More specifically, the shape and height of a fine inspection object such as a bump electrode of a semiconductor package are accurately measured. The present invention relates to an optical measurement apparatus and an optical measurement method that can be measured.

Background art

[0002] Conventionally, a white light interference type three-dimensional microscope or a confocal point type three-dimensional microscope has been used to measure a minute inspection object!

FIG. 7 shows a typical white light interference type three-dimensional microscope 100 as an example. It consists of a first light source 10, such as a halogen lamp, a convex lens 11, a half prism 120, and an objective lens.

131, a beam splitter 132, and a reference mirror 133. The inspection object 18 is placed on the inspection table 17.

The light from the first light source 10 is deflected in the direction of the test object 18 by the half prism 120 via the convex lens 11. After passing through the objective lens 131, the light is split by the beam splitter 132 into light B 1 that passes through the objective lens 131 and light B 2 that is reflected toward the reference mirror 133.

When the light B 1 is reflected from the inspection object 18, the light B 1 travels in the reverse direction, passes through the half prism 120, is focused by the image lens 15, and reaches the CCD camera 140.

On the other hand, the light B2 split by the beam splitter 132 is reflected by the reference mirror 133 and follows a reverse path, and is focused by the image lens 15 and reaches the CCD camera 140 in the same manner as the light B1.

[0007] The objective lens system 130 including the objective lens 131, the beam splitter 132, and the reference mirror 133 can move upward or downward along the optical axis of the light B1. Along with the movement, since the distance between the objective lens 131 and the inspection object 18 changes, the length of the optical axis of the light B1 also changes. On the other hand, the distance between the objective lens 131 and the reference mirror 133 is constant. Therefore, there is a difference between the optical axis length of the light B1 and the optical axis length of the light B2, and this difference is It will change as the series 130 moves.

[0008] Due to the difference in the length of the optical axis, the relative phase difference between the two lights changes. If the relative phase difference is 0, the intensities of those lights are intensified, and if the phase difference is 180 degrees, the intensities cancel each other. In addition, the intensity changes like a sine curve between these phase differences.

[0009] Therefore, as the objective lens system 130 moves up and down, the light B1 and the light B2 generate interference fringes representing a change in intensity at a height corresponding to the unevenness of the surface of the inspection object. The interference fringes are observed at CCD force Mela 140.

[0010] In this way, the white light interferometric 3D microscope uses white light and uses the path difference between the reference path (the optical path reflected by the reference mirror) and the inspection path to the inspection object. The height of the object to be inspected is calculated according to the interference state of white light.

[0011] In addition, a confocal three-dimensional microscope has been conventionally used to measure a minute inspection object. The confocal three-dimensional microscope has a configuration that changes the distance from the object to be inspected by moving the objective lens from top to bottom and a pinhole. When the distance between the objective lens and the object to be inspected is changed, the position force of the image of the object to be inspected is gradually focused, and then the focus is defocused again. When light is focused on the pinhole, it captures the image of the focused part and synthesizes the image.

As described above, since the confocal three-dimensional microscope captures the image of the focused portion, the synthesized image can reproduce the color of the inspection object.

Patent Document 1: Japanese Patent Laid-Open No. 2001-201325 Patent Document 1 describes a three-dimensional shape having an imaging camera that images an object to be observed through an objective lens and a two-dimensional interferometer that measures the unevenness of the object to be observed. An observation device is disclosed. The device uses two types of light sources as a two-dimensional interferometer, and switches between illumination lamps for observing the object to be observed and the two types of light sources of the two-dimensional interferometer. A shatter etc. is used to perform

Disclosure of the invention

Problems to be solved by the invention

The white light interference type three-dimensional microscope has a high resolution with respect to the “height”, but has a problem that the obtained image cannot reproduce color tone and brightness. [0014] The confocal 3D microscope can obtain images with natural color and brightness. The resolution for the power "height" is low. It is difficult to obtain accuracy, and there are problems.

[0015] In addition, the apparatus of Patent Document 1 switches irradiation between two types of light sources having different wavelengths, an illumination lamp for observing an object to be observed, and two types of light sources of the two-dimensional interferometer. It requires a shatter to perform, and the structure is complicated.

Means for solving the problem

The optical measurement apparatus according to the present invention focuses the input first light having the first wavelength on the inspection object, outputs the first reflected light reflected from the inspection object, and inputs the input second light having the second wavelength. The two lights are divided into a second reference light and a second measurement light, the second measurement light is focused on the inspection object, and a second reflected light reflected from the inspection object is output, and the second light is output. An objective lens system that outputs a third reflected light that reflects the reference light and interferes with the second reflected light is provided. The objective lens system outputs the third reflected light by using the first reflected light and the interference between the second reflected light and the third reflected light. A three-dimensional image of the inspection object is generated.

[0016] The first light may be visible light, and the second light may be ultraviolet light.

[0017] The objective lens system can include a reflecting means for reflecting the reference light of the measurement light having the second wavelength.

[0018] The optical measurement apparatus according to the present invention may further include a moving means for moving the objective lens system or the inspection object to change the distance between the inspection object and the objective lens system.

[0019] The reflecting means can reflect only the second reference light by absorbing or transmitting the first light.

[0020] Further, an optical measurement apparatus capable of measuring a three-dimensional shape of an object to be inspected according to the present invention includes a first light source that outputs first light, a second light source that outputs second light, An objective lens system comprising: a splitting unit that splits the two light beams into a measurement beam and a reference beam; and a reflecting unit that reflects the reference beam; and a focusing unit that focuses the measurement beam and the first beam onto the object to be inspected. An objective lens system that outputs the measurement light reflected from the object to be inspected, the first light and the reference light reflected by the reflecting means, and the object lens system that is output from the objective lens system and is reflected from the object to be inspected. A first imaging means for receiving the first light; a second imaging means for receiving the measurement light reflected from the object to be inspected and the reference light reflected by the reflecting means force output from the objective lens system; 1 and And an image generating means for generating a three-dimensional image of the object to be inspected from the light received by the second light receiving means.

[0021] The first light may be visible light, and the second light may be ultraviolet light.

[0022] The reflecting means reflects only the reference light by absorbing or transmitting the first light.

[0023] Further, a moving means for moving the objective lens system or the inspection object to change the distance between the inspection object and the objective lens system may be provided.

[0024] Further, between the objective lens system and the first or second imaging means, the reflected light of the first light from the inspection object and the reflected light of the measurement light from the inspection object and the reflection means are reflected. It may be equipped with a separation means to separate the reference light.

[0025] It is desirable to generate an interference intensity pattern when the reflected light of the measurement light from the object to be inspected and the reference light reflected from the reflecting means are detected by the second imaging means.

[0026] Further, the optical measurement method for measuring the three-dimensional shape of the inspection object according to the present invention includes a step of acquiring a color image of the inspection object with the first light, and a predetermined light of the inspection object with the second light. The process of obtaining interference fringe data of height, the process of generating interference fringes in the second light by changing the height of the object to be inspected relatively stepwise, and the interference from the color image of the object to be inspected A step of extracting image data corresponding to the fringe data; and a step of generating an image representing the three-dimensional shape of the inspection object by combining the image data extracted for each interference fringe data. Effect

According to the present invention, by using ultraviolet light, accuracy (resolution) can be improved as compared with a conventional white light interference microscope using white light, and visible light is also used. Thus, a captured image can be obtained as a color image (an image having color tone and brightness).

[0028] Further, even in the case of an image having a wide field of view with respect to the inspection object, higher height accuracy and resolution (resolution) can be obtained than with a confocal microscope.

Furthermore, the inspection object can be observed three-dimensionally with a simple structure.

Brief Description of Drawings FIG. 1 is a schematic side view of an optical measuring device according to an embodiment of the present invention.

FIG. 2 is a partial schematic side view for explaining the principle of generation of interference fringes due to the difference in the optical path length in the optical measurement apparatus according to FIG. 1.

[FIG. 3] FIG. 3 shows a flow chart when observing an inspection object using the optical measuring apparatus according to FIG.

FIG. 4 (a) to FIG. 4 (e) are diagrams for explaining an example of acquiring an image when observing an inspection object using the optical measurement apparatus according to FIG.

[FIG. 5] FIG. 5 is a combination of FIGS. 4 (a) to 4 (e).

[FIG. 6] FIG. 6 is a three-dimensional representation of the image of FIG.

FIG. 7 is a schematic side view of a conventional white light interference type three-dimensional microscope. Explanation of symbols

[0031] 10: First light source

11, 15: Convex lens

17: Inspection table

18: Inspected object

20: Second light source

22, 24, 26: Noof mirror

23: Control device

25: Objective lens system

28, 29: CCD camera (first and second imaging device)

251: Objective lens

253: Reference mirror

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, preferred embodiments of an optical measurement device according to the present invention will be described with reference to the accompanying drawings. In the figure, the same elements are denoted by the same reference numerals, and redundant description is omitted.

[Configuration of optical measuring device]

FIG. 1 shows an optical measuring apparatus 1 according to an embodiment of the present invention. The device 1 includes a first light source 10, a second light source 20, a convex lens 11, a first half mirror 22, a second half mirror 24, a third half mirror 26, and an objective lens system 25. The first imaging means 28, the second imaging means 29, the control means 23, and the mounting table 17 are provided.

The first light source 10 is a light source that emits light for extracting color information from the inspection object 18.

[0035] Therefore, the light from the first light source 10 needs to be a color that can be seen by humans, and uses visible light. As the light from the first light source 10, for example, white light having a wavelength of about 500 nm to about 700 ηm can be used.

[0036] The first light source 10 may be a halogen lamp or the like that outputs such light.

The second light source 20 is a light source that can output light having a wavelength different from that of the first light source 10. The second light source 20 outputs a wavelength different from that of the light from the first light source 10, and as will be described in detail later, the light from the second light source 20 causes interference, and the height information of the inspection object 18 is obtained. Make it possible to get.

As the light output from the second light source 20, ultraviolet light having a wavelength of about 350 ° can be used. The light of the second light source 20 as described above is not particularly limited as long as it has a wavelength different from that of the light of the first light source 10, but since the inspection object 18 is fine, ultraviolet light having a wavelength shorter than that of infrared light. Is used. In addition, it is preferable to use a laser irradiation device for the second light source 20 in order to output a stable ultraviolet ray.

The convex lens 11 is used to make the light diverged from the first light source 10 into parallel light.

The first half mirror 22 transmits the first light output from the first light source 10 and reflects the second light from the second light source 20 toward the second half mirror 24. By using the first half mirror 22, the first light from the first light source 10 and the second light from the second light source 20 can be synthesized.

The second half mirror 24 guides the synthesized first light and second light to an objective lens system 25 described later.

Note that the second half mirror 24 transmits reflected light from an objective lens system 25 described later. [0043] The objective lens system 25 irradiates the inspection object 18 with the first light and the second light to generate reflected light, and also generates interference light for "height" measurement from the second light. . The objective lens system 25 separates the synthesized first light and second light into first light for obtaining “color” information and second light for obtaining “height” information. The objective lens system 25 further separates and interferes with the separated second light.

That is, the objective lens system 25 separates the first light and the second light from the combined light of the incident first light and second light, and the first light is guided to the inspection object 18. At the same time, the second light is further separated so that one light is guided to the inspection object 18 and the other light is used as an interference light. Further, these three lights are used by the inspection object or the reference mirror. Output as reflected light.

The objective lens system 25 irradiates the inspection object 18 with the separated first light and guides the imaging light reflected from the inspection object 18 to a third half mirror 26 described later. The objective lens system 25 irradiates the inspection object 18 with the separated second light, and the measurement light reflected from the inspection object 18 and the reference light for causing interference with the measurement light. The interference light from the measurement light and reference light is guided to the third half mirror 26.

The objective lens system 25 includes an objective lens 251, a fourth half mirror 252, and a reference mirror 253.

The objective lens 251 transmits the first light and the second light incident on the objective lens system 25 to be inspected 1

Used to focus on 8.

[0048] The fourth half mirror 252 guides the first light to the inspection object 18 and reflects the light C1 that passes the second light toward the inspection object 18 in a direction of force and is reflected by the reference mirror 253. Separated into directional light C2.

[0049] The light C1 is reflected by the inspection object 18 and becomes measurement light, and the light C2 is a reference mirror described later.

It is reflected from 253 and becomes reference light.

[0050] The reference mirror 253 is a mirror that reflects the second light.

[0051] As described above, the fourth half mirror 252 separates the second light into two. However, since the first light is separated into two at the same time, the reference mirror 253 separates the first light. A mirror that transmits and reflects only the second light is used.

[0052] In addition, as another method, there is a second optical path on the optical path between the reference mirror 253 and the fourth half mirror 252. A filter that absorbs one light and transmits only the second light can also be disposed. In this case, a mirror that reflects the first light and the second light can be used as the reference mirror.

[0053] By such a reference mirror and filter, a reflecting means for reflecting only the second reference light by absorbing or transmitting the first light is configured.

The third half mirror 26 reflects the first light imaging light of the inspection object that has passed through the second half mirror 24, the second light measurement light reflected from the inspection object 18, and the reference mirror 253. This is a mirror for separating the reference light.

Therefore, the third half mirror 26 allows the first imaging light of the inspection object that has passed through the second half mirror 24 to pass through and reaches the first imaging means 28, and the third half mirror 2

In 6, the measurement light of the second light reflected from the inspection object 18 and the reference light reflected from the reference mirror 253 are reflected and guided to the second imaging device 29.

[0056] Further, the optical measuring device 1 further includes a lens 15 that bundles the first light beam that has passed through the third half mirror 26, and a first imaging device 28 that forms an image based on the first light power. And a second imaging device 29 that forms an image from ultraviolet light. As the third half mirror 26, a dichroic mirror that selectively reflects or transmits different wavelengths such as the first light and the second light can be used.

The objective lens 251, the fourth half mirror 252 and the reference mirror 253 constitute an objective lens system 25. The objective lens system 25 can move up and down along the optical axes of the first light D1 and the ultraviolet measurement light C1. The objective lens system 25 can be moved by, for example, a piezo element (not shown). The scanning range of the measurement target portion of the inspection object 18 by the movement is, for example, a range obtained by adding several tens of meters to the height of the measurement target portion. For example, if the height of the part to be measured to the top of the bottom force is 60 m, the scanning range is about 70 / z m. Thus, the scanning range can be changed by changing the setting of the driving range of a driving device (not shown) that moves the objective lens system 25 according to the height of the measurement target portion. .

[0058] The reading resolution of the height data by the scanning is about 0.1 nm, and the repetition accuracy is about 10 nm. Since the scanning is performed while changing only a distance smaller than the depth of field of the objective lens 251, the number of movements depends on the height of the measurement target portion of the inspection object 18. It is determined. For each movement, the first imaging device 28 and the second imaging device 29 obtain images of the first light and the second light.

[0059] The first and second imaging devices 28 and 29 are connected to the control device 23 and store the data every time an image is obtained. Further, the control device 23 generates a three-dimensional image of the measurement target portion of the inspection object 18 based on these data.

[Generation of interference fringes by ultraviolet light]

FIG. 2 is a diagram showing the relationship between the distance between the objective lens 251 and the reference mirror 253 and the distance between the objective lens 251 and the inspection object 18. In Fig. 2, the distance from the objective lens 251 to the reference mirror 253 and the distance from the objective lens 251 to the object to be inspected 18 are the same from the objective lens 251 to the reflecting surface of the beam splitter 252. Therefore, the reflection surface force of the beam splitter 252 is also expressed as L1 as the distance to the inspection object 18, and the reflection surface force of the beam splitter 252 is expressed as L2 as the distance to the reference mirror 253.

[0060] The distance between the objective lens 251 and the reference mirror 253 is fixed. That is, the reflecting surface force of the beam splitter 252 is also constant at the distance L2 to the reference mirror 253. On the other hand, since the objective lens system 25 including them moves up and down along the optical axes of the first light D1 and the ultraviolet measurement light C1, the distance between the objective lens 251 and the inspection object 18, that is, The distance L 1 from the passage position of the beam splitter 252 to the inspection object 18 varies according to the movement of the objective lens system 25. As a result, the optical path length determined by L1 is different from the optical path length determined by L2.

[0061] Therefore, a difference occurs in the phase of light passing through two different optical path lengths L1 and L2. If the phase difference is ^, the intensity of the light is increased, and if the phase difference is 180 degrees, the intensity is canceled. Also, between these phase differences, the combined intensity changes to draw a sine curve.

That is, when the objective lens system 25 moves upward or downward, a difference occurs in the optical path lengths (L1 and L2) of the two light portions C 1 and C2 of the second light, and their relative phases differ. It will be. Therefore, the reference light C2 of the second light reflected from the reference mirror 253 and the measurement light C1 reflected from the inspection object 18 have a height corresponding to the unevenness of the surface of the inspection object 18 and have an intensity. Interference fringes representing changes occur. The CCD camera 29 can observe the interference fringes. it can.

The control device 23 obtains high-level data from the interference fringes observed by the CCD camera 29. For example, when one wavelength is 350 nm, a resolution about 1/1000 of that can be obtained.

[Operation of optical measuring device]

FIG. 3 is a flowchart of the operation for obtaining the image of the inspection object in the optical measurement apparatus of FIG.

[0064] First, in step S31, the inspection object 18 is placed on the inspection table 17.

[0065] In step S32, it is determined which region of the inspection object 18 is to be measured, and a predetermined position is focused.

[0066] In step S33, the first light source 10 and the second light source 20 are activated to output the first light and the second light, respectively.

When the first light is output from the first light source 10, the first light is converted into parallel light by the convex lens 11, passes through the first half mirror 22, and reaches the second half mirror 24. In the second half mirror 24, the first light is deflected toward the inspection object 18. The first light is further focused toward the inspection object 18 by the object lens 251. When the first light passing through the objective lens 251 passes through the fourth half mirror 252, a part of the first light D 2 is deflected toward the reference mirror 253. The first light D2 that has reached the reference mirror 253 is absorbed there and is not reflected.

[0068] The first light D1 that has passed through the fourth half mirror 252 irradiates the object 18 to be inspected, and is then reflected back to the original path. That is, the first light D 1 reflected from the inspection object 18 passes through the fourth half mirror 252, the objective lens 251 and the second half mirror 24.

The first light that has passed through the second half mirror 24 further passes through the third half mirror 26 and is focused toward the first imaging device 28 by the objective lens 15.

On the other hand, the second light output from the second light source 20 at the same time as the first light is output from the first light source 10 is reflected by the first half mirror 22 toward the second half mirror 24, and further. Further, the light is deflected toward the inspection object 18 by the second half mirror 24. The deflected second light is focused toward the inspection object 18 by the objective lens 251. Then the second light The fourth half mirror 252 separates the reference light C2 reflected toward the reference mirror 253 and the measurement light C1 passing therethrough.

[0071] The reference light C2 that has reached the reference mirror 253 returns to its original path after being reflected there.

That is, the reference light C 2 that has reached the fourth half mirror 252 is reflected by the fourth half mirror 252 toward the objective lens 251.

The measurement light C1 of the second light that has passed through the fourth half mirror 252 irradiates the inspection object 18, is reflected therefrom, and returns to the original path. That is, the measurement light C 1 is reflected from the inspection object 18 and passes through the fourth half mirror 252.

[0073] Second light reference light C2 deflected by fourth half mirror 252 and fourth half mirror

The second measurement light C 1 that has passed through 252 passes through the objective lens 251 and then through the second half mirror 24.

The second measurement light C 1 and the reference light C 2 that have passed through the second half mirror 24 are deflected toward the second imaging device 29 by the third half mirror 26.

In step S 34, the first imaging device 28 captures a color image of the measurement area of the inspection object 18 by the first light reflected from the inspection object 18. Further, the second imaging device 29 detects the interference fringes generated according to the difference in the path between the measurement light C1 and the reference light C2. Data of the first and second imaging devices 28 and 29 are stored in a storage device (not shown) of the control device 23.

[0076] Subsequently, in step S35, it is determined whether or not the control device 23 has measured all the measurement target areas of the inspected object (whether the image has been acquired), and the measurement area is not yet observed. In some cases, in step S36, the objective lens system 25 is moved upward or downward by a predetermined distance, and in the same manner as described above, the predetermined portion of the object to be inspected by the first light and the second light. Take an image. The imaging is repeated a predetermined number of times, and each data is stored in the storage device of the control device 23 for each imaging.

[0077] When all the measurement target portions have been observed, the measurement operation ends, and then, using the data stored in the control device 23, a three-dimensional image of the measurement target portion of the inspection object is generated. I do.

[Generation of 3D image of inspection object] Fig. 4 (a) to Fig. 4 (e) show examples of images when one measurement target part of the inspected object 18 is observed in order along the height direction by the optical measuring device 1 shown in Fig. 1. Show.

As described above, the interference fringes are generated when the second light is measured. On the other hand, an enlarged color image of the test object 18 can be obtained from the first light. However, the color image includes a clear image within the range of the depth of field and an image that is out of focus and out of focus.

[0079] The height of the inspection object in which the interference fringes are generated by the second light is also a position where the first light is focused on the height position of the inspection object. Therefore, it is necessary to extract only the portion corresponding to the interference fringes in the color image obtained by the first light. This is the image shown in FIGS. 4 (a) to 4 (e).

FIG. 4 (a) to FIG. 4 (e) show five measurement regions taken by the first imaging device 28 and the second imaging device 29 by moving the objective lens system 2 by a predetermined distance. . The moving distance is shallower than the depth of field of the objective lens 251. For each distance, the object 18 is photographed along the height direction while moving the objective lens system 25.

FIG. 4 (a) is an image of the portion 40a at the highest position of the object to be inspected! FIG. 4 (e) is an image of the portion 40e at the lowest position of the inspection object where the interference fringes are generated. 4 (b), 4 (c) and 4 (d) show that the objective lens system 2 is moved by a predetermined distance between the portion 40a shown in FIG. 4 (a) and the portion 40e shown in FIG. 4 (e). This is an image of the portions 40b, 40c, and 40d where the interference fringes obtained when moving and photographed.

[0082] When the images shown in FIGS. 4 (a) to 4 (e) are combined in the height direction, an image as shown in FIG. 5 is obtained. In addition, since the measurement is performed in the height direction for each distance shorter than the depth of field, there is a color image between two interference fringe occurrence positions with different heights. Shows only the position where the color image is extracted, such as the interference fringe, as a line, and the image in the height direction is omitted. FIG. 6 three-dimensionally represents the measurement target portion 40 of the inspection object 18.

These processes are performed in the control device 23. That is, first, the second imaging device 29 obtains the height data of the measurement portion of the inspection object from the interference fringe data of the second light obtained in the above. Next, image data of a portion corresponding to the interference fringe is extracted from the color image data of the measurement portion of the inspection object by the first light corresponding to the height data. Extract The obtained image data is combined in the height direction to generate a three-dimensional image of the inspection object.

[Alternative examples]

Although the optical measuring apparatus according to the present invention has been described above, the present invention is not limited to these embodiments. It should be noted that additions, deletions, modifications, etc. that can be easily made by those skilled in the art are included in the present invention. The technical scope of the present invention is defined by the description of the appended claims.

For example, in the present embodiment, the example in which the objective lens system 25 is moved up and down has been described. However, the objective lens system 25 is not powered, and the inspection table 17 on which the inspection object 18 is placed is illuminated. You may move it up and down along the axis.

In this embodiment, the objective lens 251 is disposed on the incident side to the fourth half mirror 252, but may be disposed on the side facing the object 18 to be measured on the exit side of the fourth half mirror 252.

Further, a half prism may be used instead of the half mirror.

Claims

The scope of the claims

[1] The first light having the first wavelength input is focused on the inspection object, the first reflected light reflected from the inspection object is output, and the second light having the second wavelength input is the second. The light is divided into reference light and second measurement light, and the second measurement light is focused on the inspection object to output second reflected light reflected from the inspection object, and the second reference light is reflected. An objective lens system that outputs third reflected light that interferes with the second reflected light,

An optical measurement device that generates a three-dimensional image of the test object using the first reflected light and the interference between the second reflected light and the third reflected light.

2. The optical measurement device according to claim 1, wherein the first light is visible light and the second light is ultraviolet light.

[3] The optical measurement apparatus according to [1], wherein the objective lens system includes a reflection unit configured to reflect the reference light of the measurement light having the second wavelength.

4. The optical measurement apparatus according to claim 1, further comprising a moving unit that moves the objective lens system or the inspection object to change a distance between the inspection object and the objective lens system.

5. The optical measuring device according to claim 3, wherein the reflecting means reflects only the second reference light by absorbing or transmitting the first light.

[6] An optical measuring device capable of measuring a three-dimensional shape of an inspection object,

A first light source that outputs first light;

A second light source that outputs a second light;

Splitting means for splitting the second light into measurement light and reference light;

An objective lens system comprising a reflecting means for reflecting the reference light, and a focusing means for focusing the measurement light and the first light on the inspection object, the measurement light reflected from the inspection object and the An object lens system for outputting the first light and the reference light reflected by the reflecting means;

First imaging means for receiving the first light reflected from the object to be inspected and output from the objective lens system;

Second imaging means for receiving the measurement light reflected from the object to be inspected and the reference light reflected from the reflection means output from the objective lens system; An optical measuring apparatus comprising: an image generating unit configured to generate a three-dimensional image of the inspection object from the light received by the first and second light receiving units.

7. The optical measurement device according to claim 6, wherein the first light is visible light and the second light is ultraviolet light.

8. The optical measuring device according to claim 6, wherein the reflecting means reflects only the reference light by absorbing or transmitting the first light.

9. The optical measurement apparatus according to claim 6, further comprising moving means for moving the objective lens system or the inspection object to change a distance between the inspection object and the objective lens system.

[10] Further, between the objective lens system and the first or second imaging means, the reflected light of the first light from the inspection object and the reflection of the measurement light from the inspection object 7. The optical measurement apparatus according to claim 6, further comprising a separating unit that separates the light and the reflection means force from the reflected reference light.

[11] The interference intensity pattern is generated when the reflected light of the measurement light from the inspection object and the reference light reflected from the reflecting means are detected by the second imaging means. Optical measuring device.

[12] An optical measurement method for measuring a three-dimensional shape of an inspection object,

Obtaining a color image of the inspection object with first light;

Obtaining interference fringe data of a predetermined height of the object to be inspected by the second light, and generating interference fringes in the second light by changing the height of the object to be inspected relatively stepwise; Process,

Extracting image data corresponding to the interference fringe data from the color image of the inspection object;

An optical measurement method including a step of combining the image data extracted for each interference fringe data to generate an image representing a three-dimensional shape of the inspection object.