WO2007114222A1 - Amorphous glass tablet and tablet-integrated exhaust tube - Google Patents

Amorphous glass tablet and tablet-integrated exhaust tube Download PDF

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Publication number
WO2007114222A1
WO2007114222A1 PCT/JP2007/056810 JP2007056810W WO2007114222A1 WO 2007114222 A1 WO2007114222 A1 WO 2007114222A1 JP 2007056810 W JP2007056810 W JP 2007056810W WO 2007114222 A1 WO2007114222 A1 WO 2007114222A1
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WO
WIPO (PCT)
Prior art keywords
glass
tablet
exhaust pipe
amorphous glass
amorphous
Prior art date
Application number
PCT/JP2007/056810
Other languages
French (fr)
Japanese (ja)
Inventor
Noriaki Masuda
Original Assignee
Nippon Electric Glass Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co., Ltd. filed Critical Nippon Electric Glass Co., Ltd.
Publication of WO2007114222A1 publication Critical patent/WO2007114222A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels
    • H01J9/385Exhausting vessels
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/24Fusion seal compositions being frit compositions having non-frit additions, i.e. for use as seals between dissimilar materials, e.g. glass and metal; Glass solders
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06Joining glass to glass by processes other than fusing
    • C03C27/10Joining glass to glass by processes other than fusing with the aid of adhesive specially adapted for that purpose
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/14Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/22Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions containing two or more distinct frits having different compositions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/10AC-PDPs with at least one main electrode being out of contact with the plasma
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20Constructional details
    • H01J11/48Sealing, e.g. seals specially adapted for leading-in conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20Constructional details
    • H01J11/54Means for exhausting the gas
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/245Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps

Definitions

  • the present invention relates to an amorphous glass tablet used for sealing an exhaust pipe for a flat display device such as a plasma display panel (hereinafter referred to as PDP), and a tablet-integrated exhaust pipe using the same. .
  • PDP plasma display panel
  • glass has been used as a sealing material for electronic components, flat display devices, and the like.
  • Glass is excellent in chemical durability and heat resistance as compared with a resin-based adhesive, and is suitable for ensuring airtightness of a flat display device or the like.
  • a glass tube called an exhaust pipe is attached for the purpose of exhausting the inside or filling a rare gas after exhausting. Further, the exhaust pipe is attached so that the position of the exhaust hole provided in the panel of the flat display device and the opening at the tip of the exhaust pipe coincide with each other before being subjected to the exhaust process.
  • the inclination of the exhaust pipe is reduced as much as possible with respect to the panel so that it can be easily connected to the exhaust equipment, and the exhaust pipe is attached perpendicularly to the panel surface.
  • the flat display device it is required to mount the flat display device so that the airtightness is maintained while maintaining the light emission capability.
  • a glass tablet obtained by molding glass powder into a ring shape with good surface flatness also referred to as press frit, glass sintered body, glass molded body, etc.
  • the glass tablet has an insertion hole for inserting the exhaust pipe. After inserting the exhaust pipe into this insertion hole and aligning the tip of the exhaust pipe with the position of the exhaust hole on the panel, The exhaust pipe is attached to the panel by firing at the sealing temperature and softening the glass tablet.
  • a crystalline glass tablet in which the glass tablet crystallizes after an exhaust pipe is attached to the panel. If the glass tablet crystallizes after attaching the exhaust pipe to the panel, then the exhaust pipe moves so that the glass tablet does not deform softly even when exhausted at a temperature of 370-420 ° C. There is no such thing as blocking or loss of airtightness due to holes in the glass tablet. Crystallinity As a material of the glass tablet, for example, the glasses described in Patent Documents 3 and 4 are used.
  • Patent Document 1 Japanese Patent Laid-Open No. 63-315536
  • Patent Document 2 JP-A-6-24797
  • Patent Document 3 Japanese Patent Laid-Open No. 2001-122640
  • Patent Document 4 Japanese Patent Laid-Open No. 2001-10843
  • the glass tablet is produced through a plurality of independent heating processes as follows. First, a binder is added to a sealing glass powder containing a low-melting glass powder and a refractory filler powder to form a slurry. Thereafter, this slurry is put into a granulator such as a spray dryer to produce granules of sealing glass powder. At that time, the granules of the sealed glass powder are heat-treated in a temperature range (about 100 to 200 ° C.) where the solvent evaporates. Further, the produced sealing glass powder granules are put into a mold designed to have a predetermined size, and are dry press-molded into a ring shape to produce a pressed body.
  • a binder is added to a sealing glass powder containing a low-melting glass powder and a refractory filler powder to form a slurry. Thereafter, this slurry is put into a granulator such as a spray dryer to produce granules of sealing glass
  • the binder remaining in the pressed body is decomposed and volatilized, and sintered at the softening point of the low melting point glass to produce a glass tablet.
  • the firing in the firing furnace may be performed a plurality of times. If the firing is performed a plurality of times, the sintering strength of the glass tablet is improved, and the glass tablet can be prevented from being broken or broken.
  • a low-melting glass used for a glass tablet is required to have a thermal stability that does not cause crystals to precipitate in a glass tablet manufacturing process in which a plurality of heat processes are separately performed. If even a small amount of crystals are deposited on the glass tablet during the glass tablet manufacturing process, the glass tablet will crystallize before the exhaust pipe is sealed to the flat panel display panel during the sealing process. In addition, the airtightness in the flat display device cannot be secured.
  • Patent Document 3 discloses a PbO—ZnO—BO SiO-based crystalline low-melting-point glass powder having a mass percentage display of 80% or more and less than 99.99%, 0.01 to 5 % Of zircon powder, more than 1% and less than 19.99% ⁇ -alumina powder and 0-10% low expansion ceramic filler, a composition consisting essentially of a-4PbO-BO crystal powder
  • a wearing composition is disclosed.
  • This sealing composition can easily adjust the crystals precipitated in the glass by adding a small amount of crystal seeds, and is considered suitable for producing a crystalline glass tablet.
  • this sealing composition is a lead borate glass and does not satisfy the lead reduction requirement from the environmental viewpoint in recent years.
  • Patent Document 4 WO, ZrO, and NbO components are added to the PO-SnO-based glass.
  • Crystal composed of 5%, AlO 0-5%, ZrO 0.1-5%, NbO 0.1-10%
  • This crystalline low melting point glass does not contain PbO in the glass composition, and thus satisfies the recent lead reduction requirements.
  • this crystalline low-melting-point glass contains SnO as a main component, and SnO is easily oxidized by thermal decomposition of a binder added in the process of producing a glass tablet to become SnO.
  • SnO is easily oxidized by thermal decomposition of a binder added in the process of producing a glass tablet to become SnO.
  • bismuth-based glass is actually in the characteristics such as thermal stability and still does not reach the characteristics of lead borate glass.
  • bismuth glass is thermally unstable compared to lead borate glass, so it is possible to control crystal precipitation by heat treatment.
  • Have difficulty If the precipitation of crystals is early, the exhaust pipe cannot be sealed with the glass tablet, and the fluidity of the glass tablet cannot be secured, and the airtightness in the flat display device cannot be ensured.
  • the precipitation of crystals is slow, the glass tablet is easily softened and deformed in the exhaust process, and the exhaust pipe moves to close the exhaust hole, or the glass tablet cannot be secured to ensure airtightness in the flat display device.
  • a method using an amorphous glass tablet that does not require control of crystal precipitation can be adopted.
  • an amorphous glass tablet using a conventional bismuth glass is exhausted at a temperature of 370 to 420 ° C, The glass tablet is easily softly deformed and the exhaust pipe moves to block the exhaust hole, or the glass tablet has a hole and the airtightness is lost.
  • the above situation does not occur if the furnace is kept at a low temperature below the glass transition temperature in the exhaust process, but if the temperature during the exhaust process is lowered in the manufacture of a flat display device, the exhaust time will not be lengthened. Therefore, a decrease in production efficiency is not a very effective measure.
  • the present invention flows well when sealing an exhaust pipe for a flat panel display device, etc., and the force is softly deformed in the exhaust process of 370 to 420 ° C provided thereafter 1. Moves to block the exhaust vent! It is a technical problem to obtain a non-crystalline glass tablet made of bismuth-based glass that does not cause a situation where there is a hole or a hole!
  • an amorphous glass tablet containing a low-melting glass and a refractory filler represents the low-melting glass in the form of mol% in terms of the following oxides.
  • non-crystalline means that a crystallization peak is detected at a temperature of 500 ° C. or lower when the temperature is raised at 10 ° C.Z in a macro-type differential thermal analyzer. It refers to things that cannot.
  • sealing of flat display devices and the like is usually performed at 550 ° C. or lower, if the sealing layer of flat display devices or the like has a glass luster, “amorphous” glass was used. It can be handled as a thing.
  • Low melting point glass refers to a glass having a soft spot of 500 ° C. or lower as measured by a macro-type differential thermal analyzer. Sarako, “soft spot” refers to the temperature (TB) at the inflection point as shown in Figure 3 as measured with a macro-type differential thermal analyzer.
  • the thermal stability of the glass can be improved. Therefore, in the amorphous glass tablet of the present invention, when the crystal is deposited on the glass tablet in the manufacturing process of the glass tablet that has undergone multiple heat treatment processes, and the deposited crystal grows when the glass tablet is used, Does not occur. As a result, the fluidity of the glass tablet due to crystal precipitation does not occur, and the airtightness in the flat display device can be reliably maintained. In addition, the non-crystalline glass tablet of the present invention does not cause defects due to crystal precipitation even when the sealing temperature is set to 500 ° C. or higher in the manufacturing process of the flat display device. It can contribute to improvement.
  • the above glass composition has the advantage that the glass has a low soft softness point and has excellent fluidity in addition to excellent thermal stability. Therefore, since the non-crystalline glass tablet of the present invention has excellent flowability of glass, the reaction at the interface between the panel and the glass tablet proceeds sufficiently, and the sealing strength between the panel and the exhaust pipe is remarkably increased. Can be raised. As a result, the exhaust pipe can be greatly contributed to maintaining the long-term reliability of the PDP, where the exhaust pipe is not damaged or peeled off. In other words, the non-crystalline glass tablet of the present invention does not cause a decrease in fluidity due to devitrification, and since the soft softness point of the glass is low, the original good fluidity of the sealing material. Can be maximized.
  • the low melting point glass flows well, so that an accurate sealing shape can be formed for sealing the exhaust pipe.
  • the glass tablet, the exhaust pipe, and the glass It is possible to prevent the occurrence of cracks at the interface between the tablet and the panel.
  • the amorphous glass tablet of the present invention flows well even at a sealing temperature of 480 ° C. or lower, it can contribute to the improvement of the production efficiency of flat display devices and the like.
  • the low melting point glass according to the present invention is a glass mainly composed of Bi 2 O, BO and ZnO.
  • the composition of the refractory filler is regulated as described above.
  • the refractory filler includes both crystalline materials such as ceramics and amorphous materials such as glass.
  • the refractory filler is a crystalline material, if the constituent component of the crystalline material is in the above range in terms of weight%, it is determined that the refractory filler is a refractory filler according to the present invention.
  • the components of the refractory filler do not exclude the inclusion of unspecified components.
  • the unspecified components are optional components like ZrO, TiO, Li 0, and MgO.
  • the composition of the refractory filler is regulated as described above, a part of the component of the refractory filler (surface layer portion of the refractory filler) can be dissolved in the low-melting glass in the sealing step of a flat panel display device or the like.
  • the melting point of a refractory filler is several hundred or more higher than that of glass. Therefore, if a part of the filler can be appropriately dissolved in the glass in the sealing step of the flat panel display device, it becomes possible to increase the melting point of the glass tablet after the sealing step, which is provided thereafter.
  • the glass tablet will not be easily softly deformed in the exhaust process at 420 ° C, and the exhaust pipe will not move and will block the exhaust hole, and there will be no situation where the airtightness is lost due to the hole. That is, the non-crystalline glass tablet of the present invention, as a matter of course, can enjoy the same benefits as the non-crystalline glass tablet, in addition to the non-crystalline glass. There are no problems caused by the precipitation of crystals in the tablet.
  • the amount of the refractory filler dissolved in the sealing step can be easily controlled within an appropriate range, and the post-sealing step can be performed.
  • the melting point raising effect of the amorphous glass tablet can be enjoyed to the maximum. That is, the fire-resistant filler according to the present invention can dissolve only the surface layer portion of the fire-resistant filler by regulating the composition as described above. The effect of increasing the melting point of the amorphous glass tablet after the sealing step without impairing the effect, the effect of improving the mechanical strength, etc. can be enjoyed.
  • the fire resistant filler of the present invention has good compatibility (compatibility) with bismuth glass, Even if a part of the refractory filler is dissolved in the glass, crystals are not deposited on the glass tablet in the sealing process in which the thermal stability of the glass tablet is not impaired.
  • the heat treatment temperature in the glass tablet manufacturing process is lower than the sealing temperature, and the heat treatment time is as short as about 10 minutes. Therefore, in the fire resistant filler according to the present invention, the fluidity of the glass tablet is not impaired due to the heat treatment in the glass tablet manufacturing process which is difficult to melt in the glass tablet manufacturing process.
  • the glass tablet easily flows in the exhaust process of 370 to 420 ° C, which flows well when sealing the exhaust pipe for a flat display device and the like, and the force is provided thereafter. It is possible to obtain a non-crystalline glass tablet made of bismuth-based glass that does not deform softly and does not cause a situation where the exhaust pipe moves to block the exhaust hole or the airtightness is lost due to the hole being formed. .
  • the amorphous glass tablet of the present invention is a non-crystalline glass tablet containing a low-melting glass and a refractory filler.
  • the amorphous glass tablet of the present invention is characterized by containing 40 to 95% of a low-melting glass and 5 to 60% of a refractory filler in volume%.
  • the amorphous glass tablet of the present invention is characterized in that the refractory filler is a crystalline product having cordierite (2MgO-2AlO-5SiO) as the main crystal.
  • the amorphous glass tablet of the present invention is characterized by substantially not containing PbO.
  • substantially no PbO means a case where the content of PbO is lOOOppm or less.
  • the amorphous glass tablet of the present invention is characterized by having a soft shear point of 350 to 470 ° C.
  • softening point refers to a value measured with a macro-type differential thermal analyzer.
  • the amorphous glass tablet of the present invention is a yield point of the amorphous glass tablet. (° C), and T (° C) is the deformation point of the amorphous glass tablet after baking at 480 ° C for 30 minutes. Attached.
  • Bend point refers to the value measured with a push-bar thermal expansion measurement (TMA) device. 3 at 480 ° C
  • the temperature increase / decrease rate in the 0-minute firing is 2 ° CZ, and the temperature increase starts at the room temperature. When the temperature reaches room temperature, the temperature decrease ends.
  • the amorphous glass tablet of the present invention is characterized by being used for sealing an exhaust pipe for a flat display device.
  • the amorphous glass tablet of the present invention is characterized by being used for an exhaust pipe for PDP.
  • the tablet-integrated exhaust pipe of the present invention is characterized in that the non-crystalline glass tablet of V, which is one of the above, is attached to the tip of the expanded exhaust pipe.
  • the “exhaust pipe tip” refers to the surface portion of the exhaust pipe whose diameter has been enlarged. The exhaust pipe bottom surface and the outer peripheral side surface of the exhaust pipe that are in contact with the panel over the enlarged diameter portion. Point to.
  • the non-crystalline glass tablet includes not only an embodiment in which the non-crystalline glass tablet is adhered to only the tip portion of the exhaust pipe but also an embodiment in which the amorphous glass tablet is adhered to a part of the tip portion of the exhaust pipe.
  • any one of the amorphous glass tablet and the high-melting-point tablet are attached to the tip of the expanded exhaust pipe.
  • the amorphous glass tablet is attached to the front end side of the expanded exhaust pipe, and the high melting point tablet is attached to the rear end side of the amorphous glass tablet.
  • “High-melting-point tablets” are made using a material with a heat resistance of 520 ° C or higher (in the case of glass, the soft spot when measured with a macro-type differential thermal analyzer is 520 ° C or higher). Refers to a tablet made.
  • the amorphous glass tablet of the present invention flows well when sealing an exhaust pipe for a flat panel display device, etc., and the softness is easily softened in the exhaust process of 370 to 420 ° C provided thereafter. ⁇ There is no deformation, and the exhaust pipe does not move and closes the exhaust hole, or there is no hole and the airtightness is not lost. As a result, the amorphous glass tablet of the present invention can increase the soft spot of the glass tablet after the sealing step, even though the glass is amorphous. Therefore, it is possible to enjoy the same benefits as the crystalline glass tablet.
  • the glass tablet of the present invention is non-crystalline, it is extremely difficult to control the crystal precipitation, in which crystals do not precipitate on the glass tablet in the glass tablet manufacturing process and the flat panel display sealing process. There is no problem caused by the precipitation of crystals in the tablet. Therefore, the amorphous glass tablet of the present invention has the same or better characteristics as the crystalline glass tablet. In particular, the bismuth glass has poor thermal stability compared to the lead borate glass. Considering the fact that it was impossible to mass-produce crystalline glass tablets, the effect of the present invention is considered to be great.
  • BiO is a main component for lowering the softening point. Its content is 30 to 60 mole 0/0,
  • the content of BiO is more than 60 mol%
  • the glass becomes thermally unstable, and the glass tends to be devitrified during melting or firing.
  • B 2 O is a component that forms a glass network of bismuth-based glass, and is an essential component.
  • Its content is 10 to 40 mole 0/0, preferably from 12 to 35 mole 0/0, more preferably 15-30 mol%, more preferably 15 to 25 mol%.
  • the glass becomes thermally unstable and the glass tends to devitrify when melted or fired.
  • the content of B 2 O is more than 0 mol%, the viscosity of the glass becomes too high.
  • ZnO is a component that has an effect of suppressing devitrification when the glass is melted or fired.
  • Its content is 10 to 50 mole 0/0, preferably from 12 to 45 mole 0/0, more preferably 15 to 40 molar 0/0, more preferably 20 to 35 mole 0/0.
  • the content of ZnO is less than 10 mole 0/0, the effect of suppressing devitrification at the time of melting or during sintering of the glass is difficult to obtain.
  • the ZnO content is higher than 50 mol%, the glass composition lacks balance, and conversely the thermal stability of the glass. As a result, the glass tends to be devitrified.
  • BaO, SrO, MgO, and CaO have an effect of suppressing devitrification when the glass is melted or fired. These components can be contained in a total amount of up to 15 mol%. When the total content of these components is more than 15 mole 0/0, too high glass ⁇ I ⁇ , it is difficult to seal in the following low temperature 500 ° C.
  • the content of BaO is more preferably 1 to 10 mol 0/0 preferably fixture 2-6 mol 0/0.
  • the content of BaO is less than 1 mol%! /, It becomes difficult to obtain the effect of suppressing devitrification when the glass is melted or fired.
  • the content of ZnO is more than 10 mole 0/0, lack the balance of the glass composition, the thermal stability of the glass is impaired to the contrary, the result, the glass tends to be devitrified.
  • SrO, MgO, the content of each of CaO is more preferably 0 to 5 mole 0/0 preferably fixture 0-2 mol 0/0. If the content of each component is more than 5 mol%, the glass tends to devitrify and phase separation.
  • CuO has an effect of suppressing devitrification when the glass is melted or fired, and can be added up to 10 mol%. If the CuO content is more than 10 mol%, the glass tends to be devitrified and the fluidity of the glass tends to be impaired.
  • Fe 2 O has an effect of suppressing devitrification when glass is melted or fired, and its content
  • the balance in the glass composition will be lost, and conversely, the thermal stability of the glass will be impaired, and as a result, the glass will be easily devitrified.
  • SiO and Al 2 O are components that improve the weather resistance of glass. Its content is the total amount
  • the content of SiO is preferably 0 to 10 mol%, more preferably 0 to 5 mol%.
  • the content of Al 2 O is preferably 0 to 5 mol%, more preferably 0 to 2 mol%.
  • WO is a component for suppressing devitrification of glass, and its content is 0 to 5 mol%.
  • Preferred is 0 to 2 mol%.
  • the content of BiO is 40 monolayers.
  • the thermal stability of the glass is impaired, and as a result, the glass is easily devitrified.
  • SbO is a component for suppressing devitrification of glass, and its content is 0 to 5 mol%.
  • SbO is a network structure of bismuth glass
  • Sb is added to bismuth-based glass.
  • the balance of the glass yarn is lost, and the thermal stability of the glass is impaired. As a result, the glass is easily devitrified.
  • O and Ga O are not essential components, but are components for suppressing devitrification of glass.
  • the total content is preferably 0 to 5 mol%, more preferably 0.1 to 3 mol%.
  • the content of Bi 2 O is 40 mol% by adding In O and Ga 2 O as appropriate.
  • In content of content is 0-5 mol 0/0 more preferably tool Ga O of O is 0 to 2 mol 0/0 Gayori
  • Lithium, Na, K, and Cs oxides are components that lower the soft melting point of glass, and have the effect of promoting devitrification of glass during melting, so the total amount is 2 mol%. It is preferable that:
  • MoO La O, Y 2 O, CeO, and Gd 2 O suppress glass phase separation during melting
  • the soft spot of the glass will increase, Baking at a temperature below ° C.
  • any other components leaving at be added Caro to 5 mole 0/0 within a range not to impair the properties of the glass.
  • composition of the refractory filler is limited as described above in the amorphous glass tablet of the present invention.
  • SiO is a component that increases the melting point of the amorphous glass tablet after the sealing step.
  • Both a component to lower the thermal expansion coefficient of the refractory filler the content thereof is 30 to 1 00 weight 0/0, preferably from 35 to 85 weight 0/0, more preferably 40 to 70 weight 0/0 is there.
  • SiO should be used alone as a refractory filler.
  • Al O is a component that increases the melting point of the amorphous glass tablet after the sealing step
  • Al O content is 4
  • ZnO is a component for lowering the thermal expansion coefficient of the refractory filler, and its content is 0 to 35 wt%, preferably 0 to 30 wt%.
  • the content of ZnO is more than 35% by weight, the effect of lowering the thermal expansion coefficient of the refractory filler becomes poor, and in addition, the amount of refractory filler leached out in the sealing process decreases.
  • ZrO is a component that increases the melting point of the amorphous glass tablet after the sealing step
  • Its content is 0 to 20% by weight. If the ZrO content is more than 20% by weight,
  • Crystals are likely to precipitate on the glass tablet.
  • TiO is a component for reducing the thermal expansion coefficient of the refractory filler, and its content
  • Crystals are likely to precipitate on the tablet.
  • Li 2 O is a component for accelerating the dissolution of the refractory filler in the sealing process.
  • the content is 0 to 10% by weight. If the Li O content is more than 10% by weight, sealing
  • Crystals are likely to precipitate on the glass tablet in the process.
  • MgO is a component for promoting dissolution of the refractory filler after the sealing step.
  • the content thereof is 0 to 25 wt%, preferably 0 to 20 wt%, more preferably 10 to 20 wt 0/0.
  • crystal glass tablet is likely to precipitate in the sealing step.
  • the refractory filler can be used as either a glass or a crystalline material as long as it is within the above composition range.
  • the use of such a material is preferable because it can improve the mechanical strength of the amorphous glass tablet that lowers the thermal expansion coefficient of the refractory filler.
  • glass when glass is used as the refractory filler, it is possible to increase the amount of the refractory filler that is melted, and as a result, the effect of increasing the melting point of the amorphous glass tablet after the sealing process is increased.
  • the refractory filler according to the present invention has a low thermal expansion coefficient in a crystal or quartz glass mainly composed of cordierite, ⁇ -quartz solid solution, zinc petalite, ⁇ -eucryptite, garnite and the like.
  • the effect of increasing the melting point after the sealing step is great, which is preferable.
  • the crystalline material with cordierite as the main crystal has a good compatibility with bismuth-based glass, which has a large melting point increasing effect after the sealing process because the amount of refractory filler dissolved in the glass is large in the sealing process.
  • a refractory filler other than the refractory filler having the above composition for example, tin oxide, zirconium oxide, alumina, etc.
  • a refractory filler having the above composition for example, tin oxide, zirconium oxide, alumina, etc.
  • the particle ratio (integrated value) of 5 m or less when measured with a laser diffraction particle size distribution analyzer is preferably 15% or more, more preferably 20% or more. More preferably 35% or more. If the proportion of particles of 5 m or less in the refractory filler is less than 15%, the amount of the refractory filler that dissolves in the glass in the sealing process decreases, and as a result, the effect of increasing the melting point after the sealing process is obtained. .
  • the amount of the refractory filler dissolved in the glass in the sealing step increases as the specific surface area of the refractory filler increases.
  • BET specific surface area measurement The specific surface area value measured with the apparatus is preferably 0.5 to 3.5 m 2 Zg, more preferably 0.6 to 1.2 mg. If the specific surface area of the refractory filler is less than 0.5 m 2 / g, the amount of the refractory filler dissolved in the glass becomes too large in the sealing process, which may impair the fluidity of the glass tablet.
  • the specific surface area value of the refractory filler is more than 3.5 m 2 / g, the amount of the refractory filler that dissolves in the glass during the sealing process decreases, and as a result, the effect of increasing the melting point after the sealing process becomes difficult to obtain. .
  • low-melting glass is 40 to 95 volume 0/0, 5 to 60 vol% refractory filler it is good better tool low-melting glass strength 0-90 volume 0/0, more preferably refractory filler 10 to 60 volume 0/0.
  • the reason for specifying the ratio of the two in this way is that when the amount of the refractory filler is less than 5% by volume, it is difficult to obtain the effect of decreasing the thermal expansion coefficient or the effect of increasing the mechanical strength. If this happens, the fluidity of the glass tablet will deteriorate, and there will be a possibility that it will be impossible to seal tightly.
  • thermo expansion coefficient 85 X 10 "V ° O, soda plate glass (thermal expansion coefficient 90 X 10 _7 Z ° C), etc. non-crystalline glass tablet
  • the coefficient of thermal expansion is preferably designed to be about 10-30 X 10 _7 Z ° C lower than the material to be sealed, which means that the distortion applied to the amorphous glass tablet after sealing is compressed (compressed). This is to prevent the destruction of the amorphous glass tablet.
  • the amorphous glass tablet of the present invention preferably contains substantially no PbO.
  • the amorphous glass tablet of the present invention can be made into an embodiment without containing PbO in the low-melting glass and the refractory filler. If the amorphous glass tablet is substantially free of Pb 2 O, it can meet recent environmental requirements.
  • the soft spot of the amorphous glass tablet is preferably 350 to 470 ° C force S, more preferably 390 to 450 ° C. If the soft glass point of the amorphous glass tablet is lower than 350 ° C, the glass tablet can be easily softened in the subsequent exhaust process unless the melting amount of the refractory filler is extremely increased in the sealing process. ⁇ Deformation will cause the exhaust pipe to move and block the exhaust hole, or the glass tablet will have a hole and airtightness will be lost.
  • the soft spot of amorphous glass tablets is higher than 450 ° C. May not flow sufficiently, and airtightness in the flat display device may not be secured.
  • the yield point of the amorphous glass tablet is T (° C), and the yield point of the amorphous glass tablet after baking at 480 ° C for 30 minutes.
  • the glass tablet can be easily softly deformed by the exhaust stroke, and the exhaust pipe may move to block the exhaust hole, or the glass tablet may have a hole and airtightness may be impaired. . T -T ⁇ 5 ° C relationship
  • the yield point of the non-crystalline glass tablet is T (° C), and calcined at a temperature of (soft point + 50) ° C for 30 minutes. It is preferable to satisfy the relationship of T—T ⁇ 5 ° C, where T (° C) is the yield point of the amorphous glass tablet of T
  • T-T is 5 ° C
  • the soft spot of the glass tablet is raised after the sealing process.
  • T 3 T 1 ⁇ 5 ° C the glass tablet easily deforms softly in the exhaust process, and the exhaust pipe moves to block the exhaust hole, or the glass tablet has a hole and the airtightness is impaired. There is a risk of being.
  • the temperature increase / decrease rate in "(soft soft spot + 50) ° C firing for 30 minutes" is 2 ° CZ minutes, the temperature rise starts from room temperature, and the temperature drops when it reaches room temperature. Exit.
  • the measurement sample of T is separately amorphous.
  • the softening point of a powder sample used for the production of porous glass tablets was measured with a macro-type differential thermal analyzer, and the same powder sample was calcined at a temperature 10 ° C higher than the soft saddle point for 30 minutes. use.
  • the rate of temperature increase / decrease in this firing is 2 ° CZ, and the temperature increase starts from room temperature and ends when the temperature reaches room temperature.
  • the amorphous glass tablet of the present invention is used for sealing an exhaust pipe for a flat display device. It is preferable.
  • Flat display devices such as PDP and field emission display (FED) need to use an exhaust pipe to evacuate the inside. Glass is usually used for sealing the exhaust pipe in order to ensure the airtightness of the flat display device.
  • the inside of the flat display device is put into a high vacuum state by a vacuum pump or the like through the exhaust pipe. At this time, in order to make the inside of the flat display device into a high vacuum state in a short time, it becomes more advantageous to exhaust at a high temperature. Accordingly, since the soft glass point of the amorphous glass tablet of the present invention increases after the sealing process, the heat treatment temperature of the exhaust process provided thereafter can be increased, and the manufacturing process of the flat display device can be improved. It can be shortened.
  • the exhaust efficiency can be improved by increasing the exhaust temperature. Specifically, if the exhaust temperature is increased, the time required for the exhaust will be several tens of hours or even 10 hours. It can be shortened to a certain extent, and the inside of the PDP device can be made high vacuum. If the inside of the PDP device can be evacuated to a high vacuum, the content of adhering impurities inside the device can be reduced, so that the purity of the rare gas components to be sealed later inside the device can be increased. Characteristics can be improved. As described above, the amorphous glass tablet of the present invention has a soft saddle point that rises after the sealing step, and therefore can appropriately meet such a demand.
  • the glass tablet of the present invention is non-crystalline, in addition to the above-mentioned advantages, the crystal tablet does not precipitate in the glass tablet in the glass tablet manufacturing process and the flat panel display sealing process. There are no problems caused by the precipitation of crystals in crystalline glass tablets that are difficult to control.
  • the PDP manufacturing process takes a long time for heat treatment compared to other flat panel display devices, and the use of crystalline glass tablets makes it extremely difficult to control crystal precipitation. The significance of using non-crystalline glass tablets is great.
  • the non-crystalline glass tablet of the present invention can have various shapes such as a ring shape, a cylindrical shape, a triangular prism, and a quadrangular prism that are not particularly limited in shape.
  • the shape of the amorphous glass tablet can be securely fixed to the exhaust pipe without closing the exhaust hole of the panel. Is preferred.
  • the filling rate is 65% or more (preferably 70%). % Or more, particularly 75% or more) is preferable. In this way, the dimensional change can be reduced in the sealing step, and the fluidity of the amorphous tablet can be increased.
  • “filling ratio” refers to a value of ⁇ (actual density of non-crystalline tablet) / (theoretical density of non-crystalline tablet) ⁇ X 10 0 (%).
  • the amorphous glass tablet of the present invention can be produced through a plurality of independent heating processes as follows. First, a binder or a solvent is added to a sealing glass powder containing a low melting glass powder and a refractory filler powder to form a slurry. Thereafter, this slurry is put into a granulator such as a spray dryer to produce granules of sealing glass powder. At that time, the granules are heat-treated at a temperature at which the solvent evaporates (about 100 to 200 ° C.). The granule particle size is preferably about 20 to 250 m. In this way, the filling property into the mold can be improved.
  • the produced granules are put into a mold designed to have a predetermined size, and are dry press-molded into a ring shape to produce a pressed body.
  • the binder remaining in the pressed body is decomposed and volatilized in a baking furnace such as a belt furnace, and fired at about the soft spot of the low melting point glass to produce an amorphous glass tablet.
  • the firing in the firing furnace may be performed a plurality of times. If the firing is performed a plurality of times, the strength of the amorphous glass tablet is improved, and the loss or breakage of the amorphous glass tablet can be suppressed. .
  • Solvents to be added to the sealing glass powder include N, N'-dimethylformamide (DMF), a terbinol, higher alcohol, butyl latatatone ( ⁇ -BL), tetralin, butyral carbitol acetate, ethyl acetate, Isoamyl acetate, diethylene glycol monoethylenoateolene, diethyleneglycolenomonoethylenoate acetate, benzenoreal alcohol, toluene, 3-methoxy 3-methylbutanol, water, triethylene glycol monomethyl ether, triethylene glycol dimethyl ether, dipropylene Glycol monomethyl ether, dipropylene glycol monomono butylene ethere, tripropylene glycoleno monomethylol ether, tripropylene glycol monomono butylene ether, propylene carbonate DOO, dimethyl sulfoxide (DMSO), it is possible for ⁇ - methyl-2-
  • acrylic resin ethyl cellulose, polyethylene glycol, polyethylene glycol derivatives, nitrocellulose, polymethyl styrene, polyethylene carbonate, methacrylic acid ester and the like can be used.
  • acrylic resin and low molecular weight polyethylene glycol are preferable because of their good thermal decomposability.
  • the amorphous glass tablet of the present invention is preferably used as a tablet-integrated exhaust pipe by being attached to the tip of the expanded exhaust pipe.
  • the exhaust pipe is fixed with a jig, and an amorphous glass tablet is inserted into the exhaust pipe in this state and fired.
  • a jig for fixing the exhaust pipe it is preferable to use a material to which the amorphous glass tablet is not fused.
  • a carbon jig or the like can be used. Adhesion between the exhaust pipe and the amorphous glass tablet can be done in a short time of about 5 to 10 minutes near the soft melting point of the low melting point glass.
  • the amount of low-melting point glass melted by the refractory filler is extremely small, and the soft spot of the amorphous glass tablet does not rise unduly.
  • the amorphous glass tablet of the present invention has good thermal stability, and crystals are not deposited on the amorphous glass tablet in the bonding process between the exhaust pipe and the amorphous glass tablet. Crystals are not unduly deposited on the amorphous glass tablet in the sealing process of the device.
  • the exhaust pipe As the exhaust pipe, a product grade “FE-2” manufactured by Nippon Electric Glass Co., Ltd. is suitable. This exhaust pipe has a coefficient of thermal expansion of 85 X 10 _7 Z ° C and a heat resistant temperature of 550 ° C. For example, an exhaust pipe with an outer diameter of 5 mm and an inner diameter of 3.5 mm can be used. As the exhaust pipe, it is preferable to form a flare or flange at the tip and expand the diameter of the tip of the exhaust pipe. Various methods can be adopted as a method of expanding the diameter of the tip of the exhaust pipe. However, several kinds of treatment can be performed by heating the tip of the exhaust pipe using a gas burner while rotating the tip. A method of processing into a predetermined shape using a tool is preferable because it is excellent in mass productivity.
  • FIG. 1 shows an example of a tablet-integrated exhaust pipe having such a configuration.
  • Fig. 1 is a cross-sectional view of a tablet-integrated exhaust pipe. The tip of the exhaust pipe 1 is enlarged in diameter, and the amorphous glass tablet 2 is bonded to the tip of the exhaust pipe on the panel side. .
  • an amorphous glass tablet and a high melting point tablet are attached to the tip of the expanded exhaust pipe, and the amorphous glass tablet is expanded.
  • the high-melting-point tablet is used as a tablet-integrated exhaust pipe attached to the rear end side rather than the amorphous glass tablet. If the tablet-integrated exhaust pipe is configured in this way, it is attached to the tip side of the amorphous glass tablet force S exhaust pipe, so the area in contact with the panel etc. when attaching the exhaust pipe to the panel etc.
  • the exhaust pipe is wider than the case of only the exhaust pipe, and the exhaust pipe can be made to stand on the panel etc.
  • the tablet-integrated exhaust pipe is configured in this way, when the amorphous glass tablet is fixed to the exhaust pipe in the process of manufacturing the tablet-type exhaust pipe, the jig and the amorphous glass tablet By placing a high melting point tablet between them, it is possible to manufacture a tablet-integrated exhaust pipe, that is, it is not necessary to use a special jig in the manufacture of a tablet-integrated exhaust pipe, and the manufacturing process is simplified. be able to.
  • the amorphous glass tablet is preferably fixed to the outer peripheral surface of the tip of the glass tube. More preferably, it is fixed only to the outer peripheral surface of the front end portion of the glass tube, and is not fixed to the front end surface of the front end portion of the glass tube, that is, the surface bonded to the panel or the like. In this way, it becomes easy to prevent the glass from flowing into the exhaust holes formed in the panel or the like.
  • the high melting point tablet is not directly attached to the exhaust pipe but is fixed to the exhaust pipe via an amorphous glass tablet, the high melting point tablet part is fixed with a clip in the sealing process and the exhaust pipe is added. It is preferable because it can be sealed.
  • the high melting point tablet it is preferable to use commercial grades “ST-4” and “FN-13” manufactured by Nippon Electric Glass Co., Ltd. as materials.
  • the high melting tablet is made of the above amorphous glass tab It can be produced by the same method as the lett. Moreover, ceramics or a metal can also be used as a material as a high melting point tablet.
  • FIG. 2 shows an example of a tablet-integrated exhaust pipe having such a configuration.
  • Fig. 2 is a cross-sectional view of the tablet-integrated exhaust pipe.
  • the tip of the exhaust pipe 1 has an enlarged diameter.
  • the flange portion of the exhaust pipe 1 Are adhered.
  • the high melting point tablet 3 is not bonded to the outer peripheral surface side of the exhaust pipe 1.
  • the amorphous glass tablet 2 is attached to the front end side of the flange portion la, and the high melting point tablet 3 is attached to the rear end side of the flange portion la rather than the amorphous glass tablet 2.
  • Example 1 is a cross-sectional view of the tablet-integrated exhaust pipe.
  • the tip of the exhaust pipe 1 has an enlarged diameter.
  • the flange portion of the exhaust pipe 1 Are adhered.
  • the high melting point tablet 3 is not bonded to the outer peripheral surface side of the exhaust pipe 1.
  • the amorphous glass tablet 2 is attached to the front end side of the flange portion la,
  • Tables 1 to 4 show the low-melting glass of the examples (samples A to N) and the low-melting glass of the comparative example (samples 0 and P). Samples A to P shown in Tables 1 to 4 were prepared as follows.
  • a glass batch prepared by preparing raw materials such as various oxides and carbonates so as to have the glass composition shown in Tables 1 to 4 was prepared and placed in a platinum crucible at 900 to 1000 ° C. At 1 to 2 hours.
  • a part of the molten glass was poured out into a stainless steel mold, and the other molten glass was formed into a thin piece with a water-cooled roller.
  • a sample for measuring the thermal expansion coefficient and the like was subjected to a predetermined slow cooling treatment (annealing) after molding.
  • the glass flakes were pulverized by a ball mill and passed through a sieve having an opening of 75 m to obtain samples having an average particle diameter of about 10 m.
  • the soft saddle point was determined by a macro-type differential thermal analyzer using a powder sample. The heating rate was 10 ° CZ. [0096] The glass transition point, the thermal expansion coefficient in the temperature range of 30 to 300 ° C, and the yield point were determined by a well-known push rod type thermal expansion measurement device.
  • the devitrification state was evaluated by observing crystals in the sample using an optical microscope (magnification 100 times) after firing Samples A to P at 500 ° C for 30 minutes. Those that were devitrified were marked with “ ⁇ ”, and those with devitrification were marked with “X”. For each sample, a powder having a weight corresponding to the density of each sample was dry-pressed into a button shape having an outer diameter of 20 mm using a die. The heating / cooling rate was 10 ° CZ.
  • Tables 5 to 8 show Examples (Sample Nos. 1 to 15) and Comparative Examples (Sample Nos. 16 to 20).
  • the material used for the amorphous glass tablet was prepared by mixing a low melting glass powder and a refractory filler powder in a mixing ratio as shown in the table.
  • Cordierite (crystal), willemite (crystal), and quartz glass were used as the refractory filler powder.
  • Cordierite is prepared by mixing magnesium oxide, aluminum oxide, and silicon oxide at a ratio of 2MgO'2AlO-5SiO, and after mixing, baked at 1400 ° C for 10 hours.
  • the fired product was pulverized and passed through a 325 mesh stainless steel sieve to obtain an average particle diameter of 5 m.
  • Willemite is zinc oxide, Kei arsenide, aluminum oxide - 70% ZnO and ⁇ beam weight 0/0, SiO 25%, formulated to be A10 5% of the composition,
  • the mixture was baked at 1440 ° C for 15 hours, and then the baked product was pulverized and passed through a 250 mesh stainless steel sieve to obtain an average particle size of 10 m. Quartz glass with an average particle size of 10 ⁇ m was used.
  • the softening point was determined by a macro-type differential thermal analyzer using a powder sample.
  • the glass transition point, the thermal expansion coefficient in the temperature range of 30 to 300 ° C, and the yield point were determined by a well-known push rod type thermal expansion measurement device.
  • samples fired for 30 minutes at a temperature of (soft spot + 10 ° C) and those fired for 30 minutes at a temperature of (softening point + 50 ° C) were tested. Used as a fee.
  • the sample was fired at a temperature increase / decrease rate of 2 ° CZ.
  • the temperature of (softening point + 10 ° C) corresponds to the temperature when the glass tablet is sintered in a baking furnace, and the temperature of (softening point + 50 ° C) is used in the manufacture of flat display devices. It corresponds to the sealing temperature.
  • the yield point measured using a sample fired at a temperature of (softening point + 10 ° C) corresponds to T, and measured using a sample fired at a temperature of (softening point + 50 ° C). The yield point is equivalent to T
  • Sample Nos. 1 to 15 have a thermal expansion coefficient of 67.0 to 71.3 X 10 _7 Z ° C in the temperature range of 30 to 300 ° C. It was consistent with the thermal expansion coefficient of the high strain point glass substrate. Samples Nos. 1 to 15 have a softening point of 400 to 450 ° C and can be sealed at a low temperature of 500 ° C or less.
  • Samples Nos. 1 to 15 use cordierite or quartz glass as the fireproof filler, so compared to when fired at a temperature of (soft spot + 10 ° C), When firing at a temperature of (softening point + 50 ° C), the yield point increased by 6-12 ° C. Therefore, it can be seen that the non-crystalline tablets produced using Samples Nos. 1 to 15 have an increased soft spot during the sealing process and are less likely to flow during the subsequent exhaust process. As a matter of course, the non-crystalline tablets according to Sample Nos. 1 to 15 can be kept at the sealing temperature for about 60 minutes as in the PDP sealing process, for example, by increasing the sealing time. The increase in the yield point can be further increased. On the other hand, sample Nos.
  • the amorphous glass tablet of the present invention is suitable for sealing applications such as exhaust pipes such as PDP, FED, plasma addressed liquid crystal display, and fluorescent display tube. Furthermore, the amorphous glass tablet of the present invention is used for sealing a display such as a cathode ray tube (CRT), for forming an insulating dielectric layer such as a fluorescent display tube or a PDP, for magnetic head-cores or between cores and sliders.
  • CTR cathode ray tube
  • sealing of electronic parts such as crystal units and IC packages
  • sealing of sheathed heaters and sealing of thermos bottles Is also suitable.
  • FIG. 1 is a cross-sectional view showing a tablet-integrated exhaust pipe of the present invention.
  • FIG. 2 is a cross-sectional view showing a tablet-integrated exhaust pipe of the present invention.
  • FIG. 3 is a schematic diagram showing the soft spot of glass when measured with a macro-type differential thermal analyzer. Explanation of symbols

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Abstract

[PROBLEMS] To provide an amorphous glass tablet of bismuth glass that exhibits appropriate fluidity at hermetical bonding of an exhaust tube for planar display unit, etc., being resistant to softening deformation at subsequent exhaust step at 370° to 420°C, and that avoids the situations of exhaust tube shifting leading to clogging of exhaust hole and perforation leading to airtightness deterioration. [MEANS FOR SOLVING PROBLEMS] There is provided an amorphous glass tablet containing a low-melting-point glass and a refractory filler, characterized in that the low-melting-point glass has a glass composition containing, by mole in terms of oxide, 30 to 60% Bi2O3, 10 to 40% B2O3 and 10 to 50% ZnO, and that the refractory filler has a composition containing, by mole in terms of oxide, 30 to 100% SiO2, 0 to 45% Al2O3, 0 to 35% ZnO, 0 to 20% ZrO2, 0 to 20% TiO2, 0 to 10% Li2O and 0 to 25% MgO.

Description

明 細 書  Specification
非結晶性ガラスタブレットおよびタブレット一体型排気管  Non-crystalline glass tablet and tablet integrated exhaust pipe
技術分野  Technical field
[0001] 本発明は、プラズマディスプレイパネル(以下、 PDPと称する)等の平面表示装置 用排気管等の封着に用いる非結晶性ガラスタブレットおよびこれを用いたタブレット 一体型排気管に関するものである。  TECHNICAL FIELD [0001] The present invention relates to an amorphous glass tablet used for sealing an exhaust pipe for a flat display device such as a plasma display panel (hereinafter referred to as PDP), and a tablet-integrated exhaust pipe using the same. .
背景技術  Background art
[0002] 従来から電子部品および平面表示装置等の封着材料としてガラスが用いられてい る。ガラスは、榭脂系の接着剤に比べ、化学的耐久性および耐熱性が優れるとともに 、平面表示装置等の気密性を確保するのに適している。  Conventionally, glass has been used as a sealing material for electronic components, flat display devices, and the like. Glass is excellent in chemical durability and heat resistance as compared with a resin-based adhesive, and is suitable for ensuring airtightness of a flat display device or the like.
[0003] これらのガラスは、用途によっては機械的強度、流動性、電気絶縁性等様々な特性 が要求されるが、少なくとも平面表示装置等に使用される蛍光体の蛍光特性等を劣 ィ匕させない温度で使用可能であることが要求される。それゆえ、上記特性を満足する ガラスとして、ガラスの融点を下げる効果が極めて大き 、PbOを多量に含有する鉛ホ ゥ酸系ガラス (例えば、特許文献 1参照)が広く用いられてきた。  [0003] These glasses are required to have various properties such as mechanical strength, fluidity, and electrical insulation depending on the application, but at least the fluorescence properties of phosphors used in flat display devices are inferior. It is required to be usable at a temperature that does not allow them to be used. Therefore, as a glass satisfying the above characteristics, a lead fluoric acid-based glass containing a large amount of PbO (see, for example, Patent Document 1) has been widely used.
[0004] ところが、最近、鉛ホウ酸系ガラスに含まれる PbOに対して環境上の問題が指摘さ れており、鉛ホウ酸系ガラス力も PbOを含まないガラスに置き換えることが望まれてい る。そのため、鉛ホウ酸系ガラスの代替品として、様々な低融点ガラスが開発されて いる。その中でも、特許文献 2等に記載されているビスマス系ガラス (Bi O— B O系  [0004] However, recently, environmental problems have been pointed out with respect to PbO contained in lead borate glass, and it is desired to replace the lead borate glass power with glass containing no PbO. For this reason, various low-melting-point glasses have been developed as substitutes for lead borate glasses. Among them, bismuth glass (Bi O— B O system) described in Patent Document 2 etc.
2 3 2 3 ガラスとも称される)は、化学耐久性、機械的強度等の諸特性において鉛ホウ酸系ガ ラスと同等の特性を有するため、その代替候補として期待されている。  2 3 2 3 (also called glass) is expected to be an alternative candidate because it has the same characteristics as lead borate glass in terms of chemical durability and mechanical strength.
[0005] ところで、 PDP等の平面表示装置には、その内部を排気、または排気後に希ガスを 充填する目的で、排気管と呼ばれるガラス管が取り付けられている。また、排気管は 、排気工程に供される前に平面表示装置のパネルに設けられた排気孔の位置と、排 気管先端の開口部が一致するように取り付けられる。  [0005] By the way, in a flat display device such as a PDP, a glass tube called an exhaust pipe is attached for the purpose of exhausting the inside or filling a rare gas after exhausting. Further, the exhaust pipe is attached so that the position of the exhaust hole provided in the panel of the flat display device and the opening at the tip of the exhaust pipe coincide with each other before being subjected to the exhaust process.
[0006] 排気管の取り付けにあたっては、排気設備への接続を容易にできるように排気管の 傾きをパネルに対して可及的に低減するとともに、パネル面に対し垂直に取り付ける こと、更には平面表示装置の発光能力を維持しつつ気密性が保たれるように取り付 けること等が求められる。また、後工程において、排気管が折損したり、取り付け部が 剥離しないような強度で排気管をパネルに取り付ける必要がある。 [0006] When installing the exhaust pipe, the inclination of the exhaust pipe is reduced as much as possible with respect to the panel so that it can be easily connected to the exhaust equipment, and the exhaust pipe is attached perpendicularly to the panel surface. In addition, it is required to mount the flat display device so that the airtightness is maintained while maintaining the light emission capability. In the subsequent process, it is necessary to attach the exhaust pipe to the panel with such a strength that the exhaust pipe will not break or the mounting part will not peel off.
[0007] 従来、排気管の取り付けには、排気管先端部に低融点ガラス粉末を含むスラリーを 塗布した後、パネル上に排気管を立てた状態で保持し、焼成する方法が広く採用さ れていた。この方法では、焼成時に有機成分が分解揮発して平面表示装置内部が 汚染されるのを防止するために、予め排気管を加熱して、スラリー塗布層の有機成分 を除去 (脱バインダー)する工程が行われる。ところが、この方法では、スラリー塗布層 の有機成分を除去した後に残った低融点ガラス層の平坦度が悪くなる。このため、パ ネル上の排気管に傾きが生じやすくなり、場合によっては、その状態で封着されてし まう。また、低融点ガラス層とパネルとの隙間が埋まらず、気密性が保てないといった 問題が生じていた。  [0007] Conventionally, for attaching an exhaust pipe, a method of applying a slurry containing a low-melting-point glass powder to the tip of the exhaust pipe, holding the exhaust pipe upright on the panel, and firing is widely used. It was. In this method, in order to prevent the organic components from decomposing and volatilizing during the firing and contaminating the inside of the flat display device, the exhaust pipe is heated in advance to remove (debinder) the organic components in the slurry coating layer. Is done. However, in this method, the flatness of the low-melting glass layer remaining after removing the organic component of the slurry coating layer is deteriorated. For this reason, the exhaust pipe on the panel tends to be inclined, and in some cases, it is sealed in that state. Further, the gap between the low melting point glass layer and the panel is not filled, and there is a problem that the airtightness cannot be maintained.
[0008] そこで、排気管をパネルに封着させる方法として、ガラス粉末を表面平坦度が良好 なリング状に成形加工したガラスタブレット(プレスフリット ·ガラス焼結体 ·ガラス成形 体等とも称される)が用いられている。ガラスタブレットには、排気管を挿入するための 挿入孔が形成されており、この挿入孔に排気管を挿入し、排気管の先端部をパネル の排気孔の位置に合わせた後、ガラスタブレットの封着温度で焼成し、ガラスタブレツ トを軟化させることにより、排気管をパネルに取り付けている。  [0008] Therefore, as a method for sealing the exhaust pipe to the panel, a glass tablet obtained by molding glass powder into a ring shape with good surface flatness (also referred to as press frit, glass sintered body, glass molded body, etc.) ) Is used. The glass tablet has an insertion hole for inserting the exhaust pipe. After inserting the exhaust pipe into this insertion hole and aligning the tip of the exhaust pipe with the position of the exhaust hole on the panel, The exhaust pipe is attached to the panel by firing at the sealing temperature and softening the glass tablet.
[0009] 排気管を取り付けた後に排気する際には、排気効率を上げるため比較的高い温度  [0009] When exhausting after attaching an exhaust pipe, a relatively high temperature is used to increase exhaust efficiency.
(例えば 370〜420°C)で排気される。このとき、ガラスタブレットが軟ィ匕変形し排気管 が動 、て排気孔を塞!、だり、ガラスタブレットに穴があ!、て気密性が損なわれな 、よう に、ガラスタブレットには、 370〜420°C程度で排気管が動かないように固定できる程 度の耐熱性が求められる。  (For example, 370-420 ° C). At this time, the glass tablet is softly deformed and the exhaust pipe is moved to block the exhaust hole! The glass tablet has a hole! The airtightness is not impaired. Heat resistance that can be fixed so that the exhaust pipe does not move at ~ 420 ° C is required.
[0010] 上記特性を満足するために、パネルに排気管を取り付けた後にガラスタブレットが 結晶化する結晶性ガラスタブレットが用いられている。パネルに排気管を取り付けた 後にガラスタブレットが結晶化すれば、その後、 370〜420°Cの温度で排気してもガ ラスタブレットが軟ィ匕変形することがなぐ排気管が動いて排気孔を塞いだり、ガラス タブレットに穴があいて気密性が損なわれるといった事態は生じない。なお、結晶性 ガラスタブレットの材質として、例えば、特許文献 3、 4に記載のガラスが使用されてい る。 [0010] In order to satisfy the above characteristics, a crystalline glass tablet is used in which the glass tablet crystallizes after an exhaust pipe is attached to the panel. If the glass tablet crystallizes after attaching the exhaust pipe to the panel, then the exhaust pipe moves so that the glass tablet does not deform softly even when exhausted at a temperature of 370-420 ° C. There is no such thing as blocking or loss of airtightness due to holes in the glass tablet. Crystallinity As a material of the glass tablet, for example, the glasses described in Patent Documents 3 and 4 are used.
特許文献 1 :特開昭 63— 315536号公報  Patent Document 1: Japanese Patent Laid-Open No. 63-315536
特許文献 2:特開平 6 - 24797号公報  Patent Document 2: JP-A-6-24797
特許文献 3:特開 2001— 122640号公報  Patent Document 3: Japanese Patent Laid-Open No. 2001-122640
特許文献 4:特開 2001— 10843号公報  Patent Document 4: Japanese Patent Laid-Open No. 2001-10843
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0011] ガラスタブレットは、以下のように、複数回の熱工程を別途独立に経て、製造される 。まず、低融点ガラス粉末と耐火性フィラー粉末を含有する封着ガラス粉末にバイン ダーゃ溶剤を添加し、スラリーを形成する。その後、このスラリーをスプレードライヤー 等の造粒装置に投入し、封着ガラス粉末の顆粒を作製する。その際、封着ガラス粉 末の顆粒は、溶剤が揮発する温度域(100〜200°C程度)で熱処理される。さらに、 作製された封着ガラス粉末の顆粒は、所定の寸法に設計された金型に投入され、リ ング状に乾式プレス成形され、プレス体が作製される。次に、ベルト炉等の焼成炉に て、このプレス体に残存するバインダーを分解揮発させるとともに、低融点ガラスの軟 化点程度で焼結され、ガラスタブレットが作製される。また、焼成炉における焼成は、 複数回行われる場合があり、焼成を複数回行うと、ガラスタブレットの焼結強度が向 上し、ガラスタブレットの欠損、破壊等を抑止することができる。 [0011] The glass tablet is produced through a plurality of independent heating processes as follows. First, a binder is added to a sealing glass powder containing a low-melting glass powder and a refractory filler powder to form a slurry. Thereafter, this slurry is put into a granulator such as a spray dryer to produce granules of sealing glass powder. At that time, the granules of the sealed glass powder are heat-treated in a temperature range (about 100 to 200 ° C.) where the solvent evaporates. Further, the produced sealing glass powder granules are put into a mold designed to have a predetermined size, and are dry press-molded into a ring shape to produce a pressed body. Next, in a baking furnace such as a belt furnace, the binder remaining in the pressed body is decomposed and volatilized, and sintered at the softening point of the low melting point glass to produce a glass tablet. In addition, the firing in the firing furnace may be performed a plurality of times. If the firing is performed a plurality of times, the sintering strength of the glass tablet is improved, and the glass tablet can be prevented from being broken or broken.
[0012] 一般的に、ガラスタブレットに用いる低融点ガラスは、複数回の熱工程を別途独立 に経るガラスタブレットの製造工程で結晶が析出しない程度の熱的安定性が要求さ れる。ガラスタブレットの製造工程でガラスタブレットに結晶が少量でも析出すれば、 封着工程で排気管が平面表示装置のパネルに封着される前に、ガラスタブレットが 結晶化してしまうため、ガラスタブレットの流動性が確保できないとともに、平面表示 装置内の気密性を担保できなくなる。  [0012] Generally, a low-melting glass used for a glass tablet is required to have a thermal stability that does not cause crystals to precipitate in a glass tablet manufacturing process in which a plurality of heat processes are separately performed. If even a small amount of crystals are deposited on the glass tablet during the glass tablet manufacturing process, the glass tablet will crystallize before the exhaust pipe is sealed to the flat panel display panel during the sealing process. In addition, the airtightness in the flat display device cannot be secured.
[0013] このような背景から、種々の結晶性ガラスを用いて、結晶性ガラスタブレットを作製 することが試みられている。特許文献 3には、質量百分率表示で、 80%以上かつ 98 . 99%未満の PbO— ZnO— B O SiO系結晶性低融点ガラスの粉末、 0. 01〜5 %のジルコン粉末、 1%超かつ 19. 99%以下の α—アルミナ粉末および 0〜10%の 低膨張セラミックスフイラ一力 実質的になる組成物に、 a -4PbO-B O結晶粉末 [0013] Against this background, attempts have been made to produce crystalline glass tablets using various crystalline glasses. Patent Document 3 discloses a PbO—ZnO—BO SiO-based crystalline low-melting-point glass powder having a mass percentage display of 80% or more and less than 99.99%, 0.01 to 5 % Of zircon powder, more than 1% and less than 19.99% α-alumina powder and 0-10% low expansion ceramic filler, a composition consisting essentially of a-4PbO-BO crystal powder
2 3 と Pb O粉末との少なくとも 1種が合量で 0. 0001〜3%外掛けで添加されている封 2 3 and at least one of Pb O powder is added in a total amount of 0.0001 to 3%.
3 4 3 4
着用組成物が開示されている。この封着用組成物は、少量の結晶種の添カ卩により、 ガラス内に析出する結晶を容易に調節することができ、結晶性ガラスタブレットの作 製にとって好適であると考えられる。しかし、この封着用組成物は、鉛ホウ酸系ガラス であり、近年の環境的観点からの鉛削減要求を満たさない。  A wearing composition is disclosed. This sealing composition can easily adjust the crystals precipitated in the glass by adding a small amount of crystal seeds, and is considered suitable for producing a crystalline glass tablet. However, this sealing composition is a lead borate glass and does not satisfy the lead reduction requirement from the environmental viewpoint in recent years.
[0014] また、特許文献 4には、 P O—SnO系ガラスに、 WO、 ZrOおよび Nb O成分を [0014] In Patent Document 4, WO, ZrO, and NbO components are added to the PO-SnO-based glass.
2 5 3 2 2 5 導入することにより、ガラスの結晶化が促進され、化学的耐久性および耐熱性が向上 し、且つ良好な流動性を示し、強固な接着強度を有する結晶性低融点ガラスが得ら れることが記載されており、また、上記結晶性低融点ガラスの粉末に、低熱膨張耐火 性フイラ一を添加することにより、封着温度の上昇を最小限に抑えて良好な流動性を 維持しつつ、一段と小さい熱膨張係数(α )を有し、かつ、強固な接着強度を有する 封着用組成物が得られることを記載されている。具体的には、酸化物基準のモル% で表して、 P O 20〜45%、SnO 45〜75%、WO 0. 5〜10%、 MgO 0〜10  2 5 3 2 2 5 Introducing a crystalline low-melting-point glass that promotes crystallization of glass, improves chemical durability and heat resistance, exhibits good fluidity, and has strong adhesive strength. In addition, by adding a low thermal expansion refractory filler to the crystalline low melting point glass powder, it is possible to minimize the increase in the sealing temperature and achieve good fluidity. It is described that a sealing composition having a much smaller thermal expansion coefficient (α 2) and having strong adhesive strength can be obtained while maintaining the same. Specifically, P O 20 to 45%, SnO 45 to 75%, WO 0.5 to 10%, MgO
2 5 3  2 5 3
%、 CaO 0〜10%、 SrO 0〜10%、 BaO 0〜10%、 SiO 0〜5%、 B O 0〜  %, CaO 0-10%, SrO 0-10%, BaO 0-10%, SiO 0-5%, B O 0-
2 2 3 2 2 3
5%、 Al O 0〜5%、 ZrO 0. 1〜5%、 Nb O 0. 1〜10%の組成からなる結晶Crystal composed of 5%, AlO 0-5%, ZrO 0.1-5%, NbO 0.1-10%
2 3 2 2 5 2 3 2 2 5
性低融点ガラスが記載されている。この結晶性低融点ガラスは、ガラス組成内に PbO を含有していないため、近年の鉛削減要求を満たしている。しかし、この結晶性低融 点ガラスは、主成分として SnOを含有しており、 SnOはガラスタブレットを作製する過 程で添加されるバインダーの熱分解によって容易に酸ィ匕され、 SnOとなる。ガラス内  Low melting glass is described. This crystalline low melting point glass does not contain PbO in the glass composition, and thus satisfies the recent lead reduction requirements. However, this crystalline low-melting-point glass contains SnO as a main component, and SnO is easily oxidized by thermal decomposition of a binder added in the process of producing a glass tablet to become SnO. In the glass
2  2
の SnOが SnOに酸化されると、ガラスに結晶が著しく析出し、複数回の熱処理工程  When SnO is oxidized to SnO, crystals are remarkably deposited on the glass, resulting in multiple heat treatment steps.
2  2
を経るガラスタブレットを作製することが困難となる。一方、ガラスタブレットの製造ェ 程でガラス粉末にノインダーを添加しなければ、製造効率が著しく低下するため、上 記問題は深刻と考えられる。  It becomes difficult to produce the glass tablet which passes through. On the other hand, if no noinder is added to the glass powder during the manufacturing process of the glass tablet, the manufacturing efficiency will be significantly reduced, so the above problem is considered serious.
[0015] 一方、ビスマス系ガラスは、熱的安定性等の特性にお!、て、依然として鉛ホウ酸系 ガラスの特性に及ばないのが実情である。つまり、ビスマス系ガラスは、鉛ホウ酸系ガ ラスに比べて熱的に不安定であるため、熱処理による結晶の析出を制御することが 困難である。結晶の析出時期が早いと、ガラスタブレットで排気管を封着することがで きず、ガラスタブレットの流動性を確保できないとともに、平面表示装置内の気密性を 担保することができない。一方、結晶の析出が遅いと、排気工程でガラスタブレットが 容易に軟化変形し、排気管が動いて排気孔を塞いだり、ガラスタブレットに穴があい て平面表示装置内の気密性が担保できない。したがって、上記事情から、結晶析出 の制御が要求されるビスマス系ガラスで構成される結晶性ガラスタブレットは、平面表 示装置内の気密性を担保することが困難であり、特に、平面表示装置用排気管の封 着に使用することが困難であり、未だ実用化に至っていない。 [0015] On the other hand, bismuth-based glass is actually in the characteristics such as thermal stability and still does not reach the characteristics of lead borate glass. In other words, bismuth glass is thermally unstable compared to lead borate glass, so it is possible to control crystal precipitation by heat treatment. Have difficulty. If the precipitation of crystals is early, the exhaust pipe cannot be sealed with the glass tablet, and the fluidity of the glass tablet cannot be secured, and the airtightness in the flat display device cannot be ensured. On the other hand, when the precipitation of crystals is slow, the glass tablet is easily softened and deformed in the exhaust process, and the exhaust pipe moves to close the exhaust hole, or the glass tablet cannot be secured to ensure airtightness in the flat display device. Therefore, from the above situation, it is difficult for a crystalline glass tablet composed of bismuth-based glass that requires control of crystal precipitation to ensure airtightness in a flat display device. It is difficult to use for sealing exhaust pipes, and has not yet been put to practical use.
[0016] また、結晶析出の制御が不要な非結晶性ガラスタブレットを用いる方法も採用可能 であるが、従来のビスマス系ガラスによる非結晶性ガラスタブレットは 370〜420°Cの 温度で排気すると、ガラスタブレットが容易に軟ィ匕変形し、排気管が動いて排気孔を 塞いだり、ガラスタブレットに穴があいて気密性が損なわれる。この場合、排気工程で 炉内をガラス転移点未満の低温に保持すれば、上記事態は生じないが、平面表示 装置の製造において排気工程時の温度を低下すれば、排気時間を極めて長くしな ければならないことから、製造効率の低下は著しぐ有効な措置とはならない。  [0016] In addition, a method using an amorphous glass tablet that does not require control of crystal precipitation can be adopted. However, when an amorphous glass tablet using a conventional bismuth glass is exhausted at a temperature of 370 to 420 ° C, The glass tablet is easily softly deformed and the exhaust pipe moves to block the exhaust hole, or the glass tablet has a hole and the airtightness is lost. In this case, the above situation does not occur if the furnace is kept at a low temperature below the glass transition temperature in the exhaust process, but if the temperature during the exhaust process is lowered in the manufacture of a flat display device, the exhaust time will not be lengthened. Therefore, a decrease in production efficiency is not a very effective measure.
[0017] そこで、本発明は、平面表示装置用排気管等の封着時には良好に流動し、し力も その後に供される 370〜420°Cの排気工程で軟ィ匕変形し 1 、排気管が動いて排気 孔を塞!、だり、穴があ!、て気密性が損なわれる事態が生じな ヽビスマス系ガラスによ る非結晶性ガラスタブレットを得ることを技術的課題とする。  [0017] Therefore, the present invention flows well when sealing an exhaust pipe for a flat panel display device, etc., and the force is softly deformed in the exhaust process of 370 to 420 ° C provided thereafter 1. Moves to block the exhaust vent! It is a technical problem to obtain a non-crystalline glass tablet made of bismuth-based glass that does not cause a situation where there is a hole or a hole!
課題を解決するための手段  Means for solving the problem
[0018] 本発明者は、鋭意努力の結果、低融点ガラスと耐火性フィラーを含有する非結晶 性ガラスタブレットにおいて、低融点ガラスを下記酸ィ匕物換算のモル%表示で Bi O [0018] As a result of diligent efforts, the present inventor, in an amorphous glass tablet containing a low-melting glass and a refractory filler, represents the low-melting glass in the form of mol% in terms of the following oxides.
2 3 twenty three
30〜60%、 B O 10 30-60%, B O 10
3 〜40%、 ZnO 10〜50%の範囲に規制し、而火性フイラ Regulated in the range of 3-40%, ZnO 10-50%, metaphysical filler
2 一 の組成を下記酸化物換算の重量%表示で SiO 30 2 The composition of SiO 30 in terms of weight% in terms of the following oxide
2 〜100%、 Al O 0  2 to 100%, Al O 0
2 3 〜45%、 Z nO 0〜35%、ZrO 0  2 3 to 45%, ZnO 0 to 35%, ZrO 0
2 〜20%、 TiO 0 0  2-20%, TiO 0 0
2 〜20%、 Li O  2-20%, Li O
2 〜10%、 MgO 0〜25 2-10%, MgO 0-25
%に規制することにより、上記技術的課題を解決できることを見出し、本発明として提 案するものである。ここで、本発明において、「非結晶性」とは、マクロ型示差熱分析 装置において、 10°CZ分で昇温したとき 500°C以下の温度で結晶化ピークが検出さ れないものを指す。なお、平面表示装置等の封着は、通常、 550°C以下で行われて いるため、平面表示装置等の封着層にガラス光沢があれば、「非結晶性」ガラスが使 用されたものとして取り扱っても差し支えない。また、「低融点ガラス」とは、マクロ型示 差熱分析装置で測定した時のガラスの軟ィ匕点が 500°C以下のガラスを指す。さら〖こ、 「軟ィ匕点」は、マクロ型示差熱分析装置で測定し、図 3に示すような屈曲点の温度 (T B)を指している。 It is found that the above technical problem can be solved by restricting to%, and is proposed as the present invention. Here, in the present invention, “non-crystalline” means that a crystallization peak is detected at a temperature of 500 ° C. or lower when the temperature is raised at 10 ° C.Z in a macro-type differential thermal analyzer. It refers to things that cannot. In addition, since sealing of flat display devices and the like is usually performed at 550 ° C. or lower, if the sealing layer of flat display devices or the like has a glass luster, “amorphous” glass was used. It can be handled as a thing. “Low melting point glass” refers to a glass having a soft spot of 500 ° C. or lower as measured by a macro-type differential thermal analyzer. Sarako, “soft spot” refers to the temperature (TB) at the inflection point as shown in Figure 3 as measured with a macro-type differential thermal analyzer.
[0019] また、本発明の非結晶性ガラスタブレットにお 、て、低融点ガラスのガラス組成を上 記のように規制すると、ガラスの熱的安定性を向上させることができる。それ故、本発 明の非結晶性ガラスタブレットは、複数回の熱処理工程を経るガラスタブレットの製造 工程でガラスタブレットに結晶が析出し、ガラスタブレットの使用時に析出した結晶が 成長するといつた事態が生じない。その結果、結晶の析出に起因するガラスタブレツ トの流動性の低下が生じず、平面表示装置内の気密性を確実に維持することができ る。また、本発明の非結晶性ガラスタブレットは、平面表示装置の製造工程で封着温 度を 500°C以上としても、結晶の析出に起因する不具合が生じないため、平面表示 装置の製造効率の向上に寄与することができる。  [0019] In the amorphous glass tablet of the present invention, when the glass composition of the low-melting glass is regulated as described above, the thermal stability of the glass can be improved. Therefore, in the amorphous glass tablet of the present invention, when the crystal is deposited on the glass tablet in the manufacturing process of the glass tablet that has undergone multiple heat treatment processes, and the deposited crystal grows when the glass tablet is used, Does not occur. As a result, the fluidity of the glass tablet due to crystal precipitation does not occur, and the airtightness in the flat display device can be reliably maintained. In addition, the non-crystalline glass tablet of the present invention does not cause defects due to crystal precipitation even when the sealing temperature is set to 500 ° C. or higher in the manufacturing process of the flat display device. It can contribute to improvement.
[0020] さらに、上記ガラス組成は、熱的安定性が優れることにカ卩えて、ガラスの軟ィ匕点が低 ぐガラスの流動性が優れる特長も有している。それ故、本発明の非結晶性ガラスタ ブレットは、ガラスの流動性が優れているため、パネルとガラスタブレットの界面にお ける反応も十分に進行し、パネルと排気管の封着強度を顕著に上昇させることができ る。その結果、排気管が封着部分に起因して欠損、剥離することがなぐ PDPの長期 信頼性の維持に大きく寄与することができる。つまり、本発明の非結晶性ガラスタブレ ットは、失透による流動性の低下を生じることがないことに加えて、ガラスの軟ィ匕点が 低いことから、封着材料本来の良好な流動性を最大限に発揮させることができる。さ らに、封着工程において、低融点ガラスが良好に流動することにより、排気管の封着 にとつて的確な封着形状を形成することができ、結果として、ガラスタブレットと排気管 およびガラスタブレットとパネル間の界面でクラックが発生する事態を防止できる。特 に、本発明の非結晶性ガラスタブレットは、封着温度が 480°C以下でも、良好に流動 するため、平面表示装置等の製造効率の向上に寄与することができる。 [0021] さらに、本発明に係る低融点ガラスは、 Bi O、 B O、 ZnOを主成分とするガラスで [0020] Further, the above glass composition has the advantage that the glass has a low soft softness point and has excellent fluidity in addition to excellent thermal stability. Therefore, since the non-crystalline glass tablet of the present invention has excellent flowability of glass, the reaction at the interface between the panel and the glass tablet proceeds sufficiently, and the sealing strength between the panel and the exhaust pipe is remarkably increased. Can be raised. As a result, the exhaust pipe can be greatly contributed to maintaining the long-term reliability of the PDP, where the exhaust pipe is not damaged or peeled off. In other words, the non-crystalline glass tablet of the present invention does not cause a decrease in fluidity due to devitrification, and since the soft softness point of the glass is low, the original good fluidity of the sealing material. Can be maximized. Furthermore, in the sealing step, the low melting point glass flows well, so that an accurate sealing shape can be formed for sealing the exhaust pipe. As a result, the glass tablet, the exhaust pipe, and the glass It is possible to prevent the occurrence of cracks at the interface between the tablet and the panel. In particular, since the amorphous glass tablet of the present invention flows well even at a sealing temperature of 480 ° C. or lower, it can contribute to the improvement of the production efficiency of flat display devices and the like. [0021] Further, the low melting point glass according to the present invention is a glass mainly composed of Bi 2 O, BO and ZnO.
2 3 2 3  2 3 2 3
あり、 PbOを含有していなくても、良好な熱的安定性および流動性が得られるため、 近年の環境的要請を満たすことができる。  Yes, even if it does not contain PbO, good thermal stability and fluidity can be obtained, so it can meet recent environmental demands.
[0022] 本発明の非結晶性ガラスタブレットにおいて、耐火性フィラーの組成は、上記のよう に規制されている。ここで、耐火性フィラーには、セラミック等の結晶物、ガラス等の非 晶質の双方が含まれる。耐火性フィラーが結晶物の場合、結晶物の構成成分が重量 %換算で上記範囲内であれば、本発明に係る耐火性フィラーであると判断する。な お、耐火性フィラーの構成成分は、明示されていない成分の含有を排除するもので はなぐ明示されていない成分は、 ZrO、 TiO、 Li 0、 MgOと同様に任意成分であ  [0022] In the amorphous glass tablet of the present invention, the composition of the refractory filler is regulated as described above. Here, the refractory filler includes both crystalline materials such as ceramics and amorphous materials such as glass. When the refractory filler is a crystalline material, if the constituent component of the crystalline material is in the above range in terms of weight%, it is determined that the refractory filler is a refractory filler according to the present invention. It should be noted that the components of the refractory filler do not exclude the inclusion of unspecified components. The unspecified components are optional components like ZrO, TiO, Li 0, and MgO.
2 2 2  2 2 2
る。耐火性フィラーの組成を上記のように規制すると、平面表示装置等の封着工程で 耐火性フィラーの成分の一部 (耐火性フィラーの表層部分)を低融点ガラスに溶解さ せることができる。一般的に、耐火性フィラーの融点は、ガラスの融点よりも数百で以 上高い。よって、平面表示装置の封着工程でフィラーの一部をガラスに適切に溶解さ せることができれば、封着工程後にガラスタブレットの融点を上昇させることが可能と なり、その後に供される 370〜420°Cの排気工程でガラスタブレットが容易に軟ィ匕変 形することがなくなるとともに、排気管が動いて排気孔を塞いだり、穴があいて気密性 が損なわれる事態が生じない。すなわち、本発明の非結晶性ガラスタブレットは、ガラ スが非結晶性であるにもかかわらず、結晶性ガラスタブレットと同様の利益を享受で きることに加えて、当然のことながら、結晶性ガラスタブレットが有する結晶の析出に 起因する問題が生じることもない。  The When the composition of the refractory filler is regulated as described above, a part of the component of the refractory filler (surface layer portion of the refractory filler) can be dissolved in the low-melting glass in the sealing step of a flat panel display device or the like. In general, the melting point of a refractory filler is several hundred or more higher than that of glass. Therefore, if a part of the filler can be appropriately dissolved in the glass in the sealing step of the flat panel display device, it becomes possible to increase the melting point of the glass tablet after the sealing step, which is provided thereafter. The glass tablet will not be easily softly deformed in the exhaust process at 420 ° C, and the exhaust pipe will not move and will block the exhaust hole, and there will be no situation where the airtightness is lost due to the hole. That is, the non-crystalline glass tablet of the present invention, as a matter of course, can enjoy the same benefits as the non-crystalline glass tablet, in addition to the non-crystalline glass. There are no problems caused by the precipitation of crystals in the tablet.
[0023] さらに、本発明に係る耐火性フィラーの組成を上記のように規制することによって、 封着工程で耐火性フィラーの溶解量を適切な範囲に制御しやすくなるとともに、封着 工程後の非結晶性ガラスタブレットの融点上昇効果を最大限に享受することができる 。つまり、本発明に係る耐火性フイラ一は、組成を上記のように規制することによって 、耐火性フィラーの表層部分のみを溶解させることができ、耐火性フィラーの本来の 効果、例えば、低膨張化効果、機械的強度向上効果等を損なうことなぐ封着工程後 の非結晶性ガラスタブレットの融点上昇効果を享受することができる。また、本発明の 耐火性フイラ一は、ビスマス系ガラスと相性 (適合性)が良好であるため、封着工程で 耐火性フィラーの一部がガラスに溶解しても、ガラスタブレットの熱的安定性が損なわ れることがなぐ封着工程でガラスタブレットに結晶が析出することがない。 [0023] Further, by regulating the composition of the refractory filler according to the present invention as described above, the amount of the refractory filler dissolved in the sealing step can be easily controlled within an appropriate range, and the post-sealing step can be performed. The melting point raising effect of the amorphous glass tablet can be enjoyed to the maximum. That is, the fire-resistant filler according to the present invention can dissolve only the surface layer portion of the fire-resistant filler by regulating the composition as described above. The effect of increasing the melting point of the amorphous glass tablet after the sealing step without impairing the effect, the effect of improving the mechanical strength, etc. can be enjoyed. In addition, since the fire resistant filler of the present invention has good compatibility (compatibility) with bismuth glass, Even if a part of the refractory filler is dissolved in the glass, crystals are not deposited on the glass tablet in the sealing process in which the thermal stability of the glass tablet is not impaired.
[0024] 一般的に、ガラスタブレット製造工程の熱処理温度は、封着温度に比べて低温であ るとともに、熱処理時間も 10分程度と短い。よって、本発明に係る耐火性フイラ一は、 ガラスタブレットの製造工程で溶け込みにくぐガラスタブレットの製造工程における 熱処理に起因して、ガラスタブレットの流動性が損なわれることはな 、。  [0024] Generally, the heat treatment temperature in the glass tablet manufacturing process is lower than the sealing temperature, and the heat treatment time is as short as about 10 minutes. Therefore, in the fire resistant filler according to the present invention, the fluidity of the glass tablet is not impaired due to the heat treatment in the glass tablet manufacturing process which is difficult to melt in the glass tablet manufacturing process.
[0025] 上記構成を備える本発明によれば、平面表示装置用排気管等の封着時には良好 に流動し、し力もその後に供される 370〜420°Cの排気工程でガラスタブレットが容 易に軟ィ匕変形することがないとともに、排気管が動いて排気孔を塞いだり、穴があい て気密性が損なわれる事態が生じないビスマス系ガラスによる非結晶性ガラスタブレ ットを得ることができる。  [0025] According to the present invention having the above-described configuration, the glass tablet easily flows in the exhaust process of 370 to 420 ° C, which flows well when sealing the exhaust pipe for a flat display device and the like, and the force is provided thereafter. It is possible to obtain a non-crystalline glass tablet made of bismuth-based glass that does not deform softly and does not cause a situation where the exhaust pipe moves to block the exhaust hole or the airtightness is lost due to the hole being formed. .
[0026] 第二に、本発明の非結晶性ガラスタブレットは、低融点ガラスと耐火性フィラーを含 有する非結晶性ガラスタブレットにおいて、低融点ガラスが、ガラス組成として、下記 酸化物換算のモル%表示で Bi O 30〜60%、 B O 10〜40%、 ZnO 10〜50  [0026] Secondly, the amorphous glass tablet of the present invention is a non-crystalline glass tablet containing a low-melting glass and a refractory filler. Indication: Bi O 30-60%, BO 10-40%, ZnO 10-50
2 3 2 3  2 3 2 3
%、 BaO + SrO + MgO + CaO 0〜15%、 CuO 0〜10%、 Fe O 0〜5%、 SiO  %, BaO + SrO + MgO + CaO 0-15%, CuO 0-10%, FeO 0-5%, SiO
2 3  twenty three
+A1 O 0〜15%、 WO 0〜5%、 Sb O 0〜5%、 In O +Ga O 0〜5%を + A1 O 0-15%, WO 0-5%, SbO 0-5%, In O + GaO 0-5%
2 2 3 3 2 3 2 3 2 3 含有することに特徴付けられる。 2 2 3 3 2 3 2 3 2 3 Characterized by containing.
[0027] 第三に、本発明の非結晶性ガラスタブレットは、体積%表示で、低融点ガラス 40〜 95%、耐火性フィラー 5〜60%を含有することに特徴付けられる。  [0027] Thirdly, the amorphous glass tablet of the present invention is characterized by containing 40 to 95% of a low-melting glass and 5 to 60% of a refractory filler in volume%.
[0028] 第四に、本発明の非結晶性ガラスタブレットは、耐火性フィラーがコーデイエライト( 2MgO - 2Al O - 5SiO )を主結晶とする結晶物であることに特徴付けられる。  [0028] Fourth, the amorphous glass tablet of the present invention is characterized in that the refractory filler is a crystalline product having cordierite (2MgO-2AlO-5SiO) as the main crystal.
2 3 2  2 3 2
[0029] 第五に、本発明の非結晶性ガラスタブレットは、実質的に PbOを含有しないことに 特徴付けられる。本発明において、「実質的に PbOを含有しない」とは、 PbOの含有 量が lOOOppm以下の場合を指す。  [0029] Fifth, the amorphous glass tablet of the present invention is characterized by substantially not containing PbO. In the present invention, “substantially no PbO” means a case where the content of PbO is lOOOppm or less.
[0030] 第六に、本発明の非結晶性ガラスタブレットは、軟ィ匕点が 350〜470°Cであることに 特徴付けられる。ここで、「軟化点」は、マクロ型示差熱分析装置で測定した値を指す  [0030] Sixth, the amorphous glass tablet of the present invention is characterized by having a soft shear point of 350 to 470 ° C. Here, “softening point” refers to a value measured with a macro-type differential thermal analyzer.
[0031] 第七に、本発明の非結晶性ガラスタブレットは、非結晶性ガラスタブレットの屈伏点 を (°C)とし、 480°Cで 30分間焼成した後の非結晶性ガラスタブレットの屈伏点を T (°C)としたときに、 Τ— T≥5°Cの関係を満たすことに特徴付けられる。ここで、「屈[0031] Seventh, the amorphous glass tablet of the present invention is a yield point of the amorphous glass tablet. (° C), and T (° C) is the deformation point of the amorphous glass tablet after baking at 480 ° C for 30 minutes. Attached. Where
2 2 1 2 2 1
伏点」とは、押棒式熱膨張測定 (TMA)装置で測定した値を指す。なお、 480°Cで 3 “Bend point” refers to the value measured with a push-bar thermal expansion measurement (TMA) device. 3 at 480 ° C
0分間焼成における昇降温速度は、 2°CZ分であり、室温力 昇温を開始し、室温に なった時点で降温を終了する。 The temperature increase / decrease rate in the 0-minute firing is 2 ° CZ, and the temperature increase starts at the room temperature. When the temperature reaches room temperature, the temperature decrease ends.
[0032] 第八に、本発明の非結晶性ガラスタブレットは、平面表示装置用排気管の封着に 用いることに特徴付けられる。 [0032] Eighth, the amorphous glass tablet of the present invention is characterized by being used for sealing an exhaust pipe for a flat display device.
[0033] 第九に、本発明の非結晶性ガラスタブレットは、 PDP用排気管に用いることに特徴 付けられる。 [0033] Ninthly, the amorphous glass tablet of the present invention is characterized by being used for an exhaust pipe for PDP.
[0034] 第十に、本発明のタブレット一体型排気管は、拡径された排気管の先端部に、前記 V、ずれかの非結晶性ガラスタブレットが取り付けられて 、ることに特徴付けられる。こ こで、「排気管の先端部」とは、拡径化された排気管の表面部位を指し、拡径化され た部分にぉ 、てパネルと接する側の排気管底面および排気管外周側面を指す。ま た、非結晶性ガラスタブレットは、排気管の先端部のみに接着される態様だけでなく 、排気管の先端部の一部に接着される態様を含む。  [0034] Tenthly, the tablet-integrated exhaust pipe of the present invention is characterized in that the non-crystalline glass tablet of V, which is one of the above, is attached to the tip of the expanded exhaust pipe. . Here, the “exhaust pipe tip” refers to the surface portion of the exhaust pipe whose diameter has been enlarged. The exhaust pipe bottom surface and the outer peripheral side surface of the exhaust pipe that are in contact with the panel over the enlarged diameter portion. Point to. Further, the non-crystalline glass tablet includes not only an embodiment in which the non-crystalline glass tablet is adhered to only the tip portion of the exhaust pipe but also an embodiment in which the amorphous glass tablet is adhered to a part of the tip portion of the exhaust pipe.
[0035] 第十一に、本発明のタブレット一体型排気管は、拡径された排気管の先端部に、前 記いずれかの非結晶性ガラスタブレットと、高融点タブレットとが取り付けられており、 且つ非結晶性ガラスタブレットが拡径された排気管の先端部側に取り付けられ、高融 点タブレットが非結晶性ガラスタブレットよりも後端部側に取り付けられていることに特 徴付けられる。また、「高融点タブレット」とは、耐熱性が 520°C以上の材料 (ガラスの 場合は、マクロ型示差熱分析装置で測定した時の軟ィ匕点が 520°C以上)を用いて作 製したタブレットを指す。  [0035] Eleventhly, in the tablet-integrated exhaust pipe of the present invention, any one of the amorphous glass tablet and the high-melting-point tablet are attached to the tip of the expanded exhaust pipe. The amorphous glass tablet is attached to the front end side of the expanded exhaust pipe, and the high melting point tablet is attached to the rear end side of the amorphous glass tablet. “High-melting-point tablets” are made using a material with a heat resistance of 520 ° C or higher (in the case of glass, the soft spot when measured with a macro-type differential thermal analyzer is 520 ° C or higher). Refers to a tablet made.
発明の効果  The invention's effect
[0036] 本発明の非結晶性ガラスタブレットは、平面表示装置用排気管等の封着時には良 好に流動し、し力もその後に供される 370〜420°Cの排気工程で容易に軟ィ匕変形す ることがなく、排気管が動いて排気孔を塞いだり、穴があいて気密性が損なわれる事 態が生じない。その結果、本発明の非結晶性ガラスタブレットは、ガラスが非結晶性 であるにもかかわらず、封着工程後にガラスタブレットの軟ィ匕点を上昇させることがで きるため、結晶性ガラスタブレットと同様の利益を享受することが可能となる。し力も本 発明のガラスタブレットは、非結晶性であるため、ガラスタブレットの製造工程および 平面表示装置の封着工程でガラスタブレットに結晶が析出することがなぐ結晶析出 の制御が極めて難しい結晶性ガラスタブレットが有する結晶の析出に起因する問題 が生じない。したがって、本発明の非結晶性ガラスタブレットは、結晶性ガラスタブレ ットと同等以上の特性を有しており、特に、ビスマス系ガラスは、鉛ホウ酸系ガラスに 比べて熱的安定性が乏しぐ結晶性ガラスタブレットを量産できな力つたことを考慮す ると、本発明がもたらす効果は大きいと考えられる。 [0036] The amorphous glass tablet of the present invention flows well when sealing an exhaust pipe for a flat panel display device, etc., and the softness is easily softened in the exhaust process of 370 to 420 ° C provided thereafter.匕 There is no deformation, and the exhaust pipe does not move and closes the exhaust hole, or there is no hole and the airtightness is not lost. As a result, the amorphous glass tablet of the present invention can increase the soft spot of the glass tablet after the sealing step, even though the glass is amorphous. Therefore, it is possible to enjoy the same benefits as the crystalline glass tablet. Since the glass tablet of the present invention is non-crystalline, it is extremely difficult to control the crystal precipitation, in which crystals do not precipitate on the glass tablet in the glass tablet manufacturing process and the flat panel display sealing process. There is no problem caused by the precipitation of crystals in the tablet. Therefore, the amorphous glass tablet of the present invention has the same or better characteristics as the crystalline glass tablet. In particular, the bismuth glass has poor thermal stability compared to the lead borate glass. Considering the fact that it was impossible to mass-produce crystalline glass tablets, the effect of the present invention is considered to be great.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0037] 本発明の非結晶性ガラスタブレットにおいて、低融点ガラスのガラス組成を上記の ように限定した理由を下記に示す。  [0037] The reason why the glass composition of the low-melting glass in the amorphous glass tablet of the present invention is limited as described above will be described below.
[0038] Bi Oは、軟化点を下げるための主要成分である。その含有量は 30〜60モル0 /0[0038] BiO is a main component for lowering the softening point. Its content is 30 to 60 mole 0/0,
2 3  twenty three
好ましくは 35〜55モル0 /0、より好ましくは 35〜50モル0 /0、更に好ましくは 35〜45モ ル%である。 Bi Oの含有量が 30モル%より少ないと、ガラスの軟化点が高くなり過 Preferably 35 to 55 moles 0/0, more preferably 35 to 50 mole 0/0, more preferably from 35 to 45 molar%. If the content of BiO is less than 30 mol%, the softening point of the glass becomes high.
2 3  twenty three
ぎ、 500°C以下の低温で封着しにくくなる。一方、 Bi Oの含有量が 60モル%より多  It becomes difficult to seal at a low temperature of 500 ° C or less. On the other hand, the content of BiO is more than 60 mol%
2 3  twenty three
いと、ガラスが熱的に不安定になり、溶融時または焼成時にガラスが失透しやすくな る。  In such a case, the glass becomes thermally unstable, and the glass tends to be devitrified during melting or firing.
[0039] B Oは、ビスマス系ガラスのガラスネットワークを形成する成分であり、必須成分で  [0039] B 2 O is a component that forms a glass network of bismuth-based glass, and is an essential component.
2 3  twenty three
ある。その含有量は 10〜40モル0 /0、好ましくは 12〜35モル0 /0、より好ましくは 15〜 30モル%、更に好ましくは 15〜25モル%である。 B Oの含有量が 10モル%ょり少 is there. Its content is 10 to 40 mole 0/0, preferably from 12 to 35 mole 0/0, more preferably 15-30 mol%, more preferably 15 to 25 mol%. Low BO content by 10 mol%
2 3  twenty three
ないと、ガラスが熱的に不安定になり、溶融時または焼成時にガラスが失透しやすく なる。一方、 B Oの含有量力 0モル%より多いと、ガラスの粘性が高くなり過ぎ、 50  Otherwise, the glass becomes thermally unstable and the glass tends to devitrify when melted or fired. On the other hand, when the content of B 2 O is more than 0 mol%, the viscosity of the glass becomes too high.
2 3  twenty three
o°c以下の低温で封着することが困難になる。  It becomes difficult to seal at a low temperature of o ° c or less.
[0040] ZnOは、ガラスの溶融時または焼成時の失透を抑制する効果がある成分である。 [0040] ZnO is a component that has an effect of suppressing devitrification when the glass is melted or fired.
その含有量は 10〜50モル0 /0、好ましくは 12〜45モル0 /0、より好ましくは 15〜40モ ル0 /0、更に好ましくは 20〜35モル0 /0である。 ZnOの含有量が 10モル0 /0より少ないと 、ガラスの溶融時または焼成時の失透を抑制する効果が得られにくくなる。 ZnOの含 有量が 50モル%より多いと、ガラス組成内のバランスを欠き、逆にガラスの熱的安定 性が損なわれ、その結果、ガラスが失透しやすくなる。 Its content is 10 to 50 mole 0/0, preferably from 12 to 45 mole 0/0, more preferably 15 to 40 molar 0/0, more preferably 20 to 35 mole 0/0. When the content of ZnO is less than 10 mole 0/0, the effect of suppressing devitrification at the time of melting or during sintering of the glass is difficult to obtain. If the ZnO content is higher than 50 mol%, the glass composition lacks balance, and conversely the thermal stability of the glass. As a result, the glass tends to be devitrified.
[0041] BaO、 SrO、 MgO、 CaOは、ガラスの溶融時または焼成時の失透を抑制する効果 がある。これらの成分は、合量で 15モル%まで含有させることができる。これらの成分 の合量が 15モル0 /0より多くなると、ガラスの軟ィ匕点が高くなり過ぎ、 500°C以下の低 温で封着することが困難になる。 [0041] BaO, SrO, MgO, and CaO have an effect of suppressing devitrification when the glass is melted or fired. These components can be contained in a total amount of up to 15 mol%. When the total content of these components is more than 15 mole 0/0, too high glass軟I匕点, it is difficult to seal in the following low temperature 500 ° C.
[0042] BaOの含有量は 1〜10モル0 /0が好ましぐ 2〜6モル0 /0がより好ましい。 BaOの含 有量が 1モル%より少な!/、と、ガラスの溶融時または焼成時の失透を抑制する効果が 得られにくくなる。 ZnOの含有量が 10モル0 /0より多いと、ガラス組成内のバランスを 欠き、逆にガラスの熱的安定性が損なわれ、その結果、ガラスが失透しやすくなる。 [0042] The content of BaO is more preferably 1 to 10 mol 0/0 preferably fixture 2-6 mol 0/0. When the content of BaO is less than 1 mol%! /, It becomes difficult to obtain the effect of suppressing devitrification when the glass is melted or fired. When the content of ZnO is more than 10 mole 0/0, lack the balance of the glass composition, the thermal stability of the glass is impaired to the contrary, the result, the glass tends to be devitrified.
[0043] SrO、 MgO、 CaOのそれぞれの含有量は 0〜5モル0 /0が好ましぐ 0〜2モル0 /0が より好ましい。各成分の含有量が 5モル%より多いと、ガラスが失透や分相しやすくな る。 [0043] SrO, MgO, the content of each of CaO is more preferably 0 to 5 mole 0/0 preferably fixture 0-2 mol 0/0. If the content of each component is more than 5 mol%, the glass tends to devitrify and phase separation.
[0044] CuOは、ガラスの溶融時または焼成時の失透を抑制する効果があり、 10モル%ま で添加することができる。 CuOの含有量が 10モル%より多いと、ガラスが失透しやす くなり、ガラスの流動性が損なわれやすくなる。  [0044] CuO has an effect of suppressing devitrification when the glass is melted or fired, and can be added up to 10 mol%. If the CuO content is more than 10 mol%, the glass tends to be devitrified and the fluidity of the glass tends to be impaired.
[0045] Fe Oは、ガラスの溶融時または焼成時の失透を抑制する効果があり、その含有量  [0045] Fe 2 O has an effect of suppressing devitrification when glass is melted or fired, and its content
2 3  twenty three
は 0〜5モル%が好ましぐ 0. 1〜2モル%がより好ましい。 Fe Oの含有量が 5モル  Is preferably 0 to 5 mol%, more preferably 0.1 to 2 mol%. Fe O content is 5 mol
2 3  twenty three
%より多いと、ガラス組成内のバランスを欠き、逆にガラスの熱的安定性が損なわれ、 その結果、ガラスが失透しやすくなる。  If it is more than%, the balance in the glass composition will be lost, and conversely, the thermal stability of the glass will be impaired, and as a result, the glass will be easily devitrified.
[0046] SiO、 Al Oは、ガラスの耐候性を向上させる成分である。その含有量は、合量で [0046] SiO and Al 2 O are components that improve the weather resistance of glass. Its content is the total amount
2 2 3  2 2 3
0〜15モル0 /0力 S好ましく、 0〜10モル0 /0がより好ましい。これらの成分の合量が 15モ ル%より多いと、ガラスの軟ィ匕点が高くなり過ぎ、 500°C以下の低温で封着することが 困難となる。特に、 SiOの含有量は、 0〜10モル%が好ましぐ 0〜5モル%がより好 15 mol 0/0 force S, and more preferably from 0 to 10 mol 0/0. If the total amount of these components is more than 15 mol%, the soft softness point of the glass becomes too high, and it becomes difficult to seal at a low temperature of 500 ° C or lower. In particular, the content of SiO is preferably 0 to 10 mol%, more preferably 0 to 5 mol%.
2  2
ましい。 Al Oの含有量は 0〜5モル%が好ましぐ 0〜2モル%がより好ましい。  Good. The content of Al 2 O is preferably 0 to 5 mol%, more preferably 0 to 2 mol%.
2 3  twenty three
[0047] WOは、ガラスの失透を抑制するための成分であり、その含有量は 0〜5モル%が  [0047] WO is a component for suppressing devitrification of glass, and its content is 0 to 5 mol%.
3  Three
好ましぐ 0〜2モル%がより好ましい。ビスマス系ガラスにおいて、ガラスの軟ィ匕点を 下げるためには、 Bi Oの含有量を多くする必要がある力 Bi Oの含有量が多くな  Preferred is 0 to 2 mol%. In bismuth glass, in order to lower the soft spot of the glass, it is necessary to increase the content of BiO.
2 3 2 3  2 3 2 3
ると、焼成中にガラス力 結晶が析出して、ガラスの流動性が阻害される傾向がある。 特に、 Bi Oの含有量力 0モル%以上の場合、その傾向が顕著になる。しかし、ビスThen, glass power crystals are precipitated during firing, and the fluidity of the glass tends to be hindered. In particular, when the content of BiO is 0 mol% or more, the tendency becomes remarkable. But screw
2 3 twenty three
マス系ガラスにおいて、 WOを適宜添カ卩することによって、 Bi Oの含有量が 40モノレ  In mass-based glass, by adding WO appropriately, the content of BiO is 40 monolayers.
3 2 3  3 2 3
%以上であっても、ガラスの熱的安定性が低下する事態を抑止することができる。た だし、 WOの含有量が 5モル%より多くなると、ガラス組成内のバランスを欠き、逆に  Even if it is more than%, the situation where the thermal stability of glass falls can be suppressed. However, if the WO content exceeds 5 mol%, the balance in the glass composition is lost, and conversely
3  Three
ガラスの熱的安定性が損なわれ、その結果、ガラスが失透しやすくなる。  The thermal stability of the glass is impaired, and as a result, the glass is easily devitrified.
[0048] Sb Oは、ガラスの失透を抑制するための成分であり、その含有量は 0〜5モル% [0048] SbO is a component for suppressing devitrification of glass, and its content is 0 to 5 mol%.
2 3  twenty three
が好ましぐ 0〜2モル0 /0がより好ましい。 Sb Oはビスマス系ガラスのネットワーク構 It is preferred instrument 0-2 mole 0/0 is more preferable. SbO is a network structure of bismuth glass
2 3  twenty three
造を安定ィ匕させる効果があり、ビスマス系ガラスにおいて、 Sb 加すること  Sb is added to bismuth-based glass.
2 oを適宜添  2 o
3  Three
によって、 Bi Oの含有量力 0モル%以上であっても、ガラスの熱的安定性が低下  Reduces the thermal stability of the glass even when the content of BiO is 0 mol% or more.
2 3  twenty three
する事態を抑止することができる。ただし、 Sb Oの含有量が 5モル%より多くなると、  Can be deterred. However, if the SbO content is more than 5 mol%,
2 3  twenty three
ガラス糸且成内のバランスを欠き、逆にガラスの熱的安定性が損なわれ、その結果、ガ ラスが失透しやすくなる。  The balance of the glass yarn is lost, and the thermal stability of the glass is impaired. As a result, the glass is easily devitrified.
[0049] In O、 Ga Oは必須成分ではないが、ガラスの失透を抑制するための成分であり [0049] In O and Ga O are not essential components, but are components for suppressing devitrification of glass.
2 3 2 3  2 3 2 3
、その含有量は合量で 0〜5モル%が好ましぐ 0. 1〜3モル%がより好ましい。 Sb O  The total content is preferably 0 to 5 mol%, more preferably 0.1 to 3 mol%. Sb O
2 はビスマス系ガラスのネットワーク構造を安定ィ匕させる効果があり、ビスマス系ガラス 2 has the effect of stabilizing the network structure of bismuth-based glass.
3 Three
において、 In O、 Ga Oを適宜添カ卩することによって、 Bi Oの含有量が 40モル%  In this case, the content of Bi 2 O is 40 mol% by adding In O and Ga 2 O as appropriate.
2 3 2 3 2 3 以上であっても、ガラスの熱的安定性が低下する事態を抑止することができる。ただ し、 In O、 Ga Oの含有量が 5モル0 /0より多くなると、ガラス組成内のバランスを欠きEven if it is 2 3 2 3 2 3 or more, a situation in which the thermal stability of the glass is lowered can be suppressed. However, an In O, the content of Ga O is more than 5 mole 0/0, lack the balance of the glass composition
2 3 2 3 2 3 2 3
、逆にガラスの熱的安定性が損なわれ、その結果、ガラスが失透しやすくなる。なお、 Conversely, the thermal stability of the glass is impaired, and as a result, the glass is easily devitrified. In addition,
In Oの含有量は 0〜5モル0 /0がより好ましぐ Ga Oの含有量は 0〜2モル0 /0がよりIn content of content is 0-5 mol 0/0 more preferably tool Ga O of O is 0 to 2 mol 0/0 Gayori
2 3 2 3 2 3 2 3
好ましい。  preferable.
[0050] Li、 Na、 Kおよび Csの酸ィ匕物は、ガラスの軟ィ匕点を低くする成分である力 溶融時 にガラスの失透を促進する作用を有するため合量で 2モル%以下であることが好まし い。  [0050] Lithium, Na, K, and Cs oxides are components that lower the soft melting point of glass, and have the effect of promoting devitrification of glass during melting, so the total amount is 2 mol%. It is preferable that:
[0051] P Oは、溶融時の失透を抑制する成分である力 添加量が 1モル%よりも多いと、  [0051] When P O is added in an amount of force, which is a component that suppresses devitrification at the time of melting, is greater than 1 mol%,
2 5  twenty five
溶融時にガラスが分相しやす 、ため好ましくな 、。  This is preferable because the glass is likely to phase separate during melting.
[0052] MoO、: La O、 Y O、 CeOおよび Gd Oは、溶融時にガラスの分相を抑制する [0052] MoO: La O, Y 2 O, CeO, and Gd 2 O suppress glass phase separation during melting
3 2 3 2 5 2 2 3  3 2 3 2 5 2 2 3
成分であるが、これらの合量が 3モル%よりも多いと、ガラスの軟ィ匕点が高くなり、 500 °C以下の温度で焼成しに《なる。 If the total amount of these components is more than 3 mol%, the soft spot of the glass will increase, Baking at a temperature below ° C.
[0053] また、その他の成分であっても、ガラスの特性を損なわない範囲で 5モル0 /0まで添 カロすることがでさる。 [0053] In addition, any other components, leaving at be added Caro to 5 mole 0/0 within a range not to impair the properties of the glass.
[0054] 本発明の非結晶性ガラスタブレットにお 、て、耐火性フィラーの組成を上記のように 限定した理由を下記に示す。  [0054] The reason why the composition of the refractory filler is limited as described above in the amorphous glass tablet of the present invention will be described below.
[0055] SiOは、封着工程後に非結晶性ガラスタブレットの融点を上昇させる成分であると [0055] SiO is a component that increases the melting point of the amorphous glass tablet after the sealing step.
2  2
ともに、耐火性フィラーの熱膨張係数を低下させる成分であり、その含有量は 30〜1 00重量0 /0、好ましくは 35〜85重量0 /0、より好ましくは 40〜70重量0 /0である。 SiOの Both a component to lower the thermal expansion coefficient of the refractory filler, the content thereof is 30 to 1 00 weight 0/0, preferably from 35 to 85 weight 0/0, more preferably 40 to 70 weight 0/0 is there. SiO
2 含有量が 30重量%よりも少ないと、封着工程後に非結晶性ガラスタブレットの融点を 上昇させる効果が乏しくなる。なお、 SiOは、単独で耐火性フイラ一として使用するこ  2 If the content is less than 30% by weight, the effect of increasing the melting point of the amorphous glass tablet after the sealing process is poor. SiO should be used alone as a refractory filler.
2  2
とちでさる。  Tochidaru.
[0056] Al Oは、封着工程後に非結晶性ガラスタブレットの融点を上昇させる成分であり、  [0056] Al O is a component that increases the melting point of the amorphous glass tablet after the sealing step,
2 3  twenty three
その含有量は 0〜45重量%、好ましくは 10〜40重量%である。 Al Oの含有量が 4  Its content is 0 to 45% by weight, preferably 10 to 40% by weight. Al O content is 4
2 3  twenty three
5重量%よりも多いと、封着工程でガラスタブレットに結晶が析出しやすくなる。  If it is more than 5% by weight, crystals tend to precipitate on the glass tablet in the sealing step.
[0057] ZnOは、耐火性フィラーの熱膨張係数を低下させるための成分であり、その含有量 は 0〜35重量%、好ましくは 0〜30重量%である。 ZnOの含有量が 35重量%よりも 多いと、耐火性フィラーの熱膨張係数を低下させる効果が乏しくなることに加えて、封 着工程における耐火性フィラーの溶け出し量が少なくなる。 [0057] ZnO is a component for lowering the thermal expansion coefficient of the refractory filler, and its content is 0 to 35 wt%, preferably 0 to 30 wt%. When the content of ZnO is more than 35% by weight, the effect of lowering the thermal expansion coefficient of the refractory filler becomes poor, and in addition, the amount of refractory filler leached out in the sealing process decreases.
[0058] ZrOは、封着工程後に非結晶性ガラスタブレットの融点を上昇させる成分であり、 [0058] ZrO is a component that increases the melting point of the amorphous glass tablet after the sealing step,
2  2
その含有量は 0〜20重量%である。 ZrOの含有量が 20重量%よりも多いと、封着工  Its content is 0 to 20% by weight. If the ZrO content is more than 20% by weight,
2  2
程でガラスタブレットに結晶が析出しやすくなる。  Crystals are likely to precipitate on the glass tablet.
[0059] TiOは、耐火性フィラーの熱膨張係数を低下させるための成分であり、その含有量 [0059] TiO is a component for reducing the thermal expansion coefficient of the refractory filler, and its content
2  2
は 0〜20重量%である。 TiOの含有量が 20重量%よりも多いと、封着工程でガラス  Is 0 to 20% by weight. If the TiO content is more than 20% by weight, glass will be used in the sealing process.
2  2
タブレットに結晶が析出しやすくなる。  Crystals are likely to precipitate on the tablet.
[0060] Li Oは、封着工程における耐火性フィラーの溶け出しを促進するための成分であり [0060] Li 2 O is a component for accelerating the dissolution of the refractory filler in the sealing process.
2  2
、その含有量は 0〜10重量%である。 Li Oの含有量が 10重量%よりも多いと、封着  The content is 0 to 10% by weight. If the Li O content is more than 10% by weight, sealing
2  2
工程でガラスタブレットに結晶が析出しやすくなる。  Crystals are likely to precipitate on the glass tablet in the process.
[0061] MgOは、封着工程後における耐火性フィラーの溶け出しを促進するための成分で あり、その含有量は 0〜25重量%、好ましくは 0〜20重量%、より好ましくは 10〜20 重量0 /0である。 MgOの含有量が 25重量0 /0よりも多いと、封着工程でガラスタブレット に結晶が析出しやすくなる。 [0061] MgO is a component for promoting dissolution of the refractory filler after the sealing step. There, the content thereof is 0 to 25 wt%, preferably 0 to 20 wt%, more preferably 10 to 20 wt 0/0. When the content of MgO is more than 25 weight 0/0, crystal glass tablet is likely to precipitate in the sealing step.
[0062] また、その他の成分は、耐火性フィラーの特性を損なわない範囲 (好ましくは 10重 量%まで)で含有してもよ!/ヽ。  [0062] In addition, other components may be contained within a range that does not impair the properties of the refractory filler (preferably up to 10% by weight)! / ヽ.
[0063] 本発明の非結晶性ガラスタブレットにお 、て、耐火性フイラ一は、上記組成範囲内 であれば、ガラスおよび結晶物のいずれも使用することができる力 耐火性フィラーと して結晶物を使用すると、耐火性フィラーの熱膨張係数を低ぐ非結晶性ガラスタブ レットの機械的強度を向上できるため、好ましい。また、耐火性フイラ一としてガラスを 使用すると、耐火性フィラーの溶け出し量を多くすることができ、結果として、封着工 程後の非結晶性ガラスタブレットの融点を上昇させる効果が大きくなる。  [0063] In the amorphous glass tablet of the present invention, the refractory filler can be used as either a glass or a crystalline material as long as it is within the above composition range. The use of such a material is preferable because it can improve the mechanical strength of the amorphous glass tablet that lowers the thermal expansion coefficient of the refractory filler. In addition, when glass is used as the refractory filler, it is possible to increase the amount of the refractory filler that is melted, and as a result, the effect of increasing the melting point of the amorphous glass tablet after the sealing process is increased.
[0064] 本発明に係る耐火性フイラ一は、コーディエライト、 β クォーツ固溶体、亜鉛ぺタ ライト、 β ユークリプタイト、ガーナイト等を主結晶とする結晶物または石英ガラスは 、熱膨張係数が低いとともに、封着工程後の融点上昇効果が大きいため、好適であ る。特に、コーディエライトを主結晶とする結晶物は、封着工程で耐火性フィラーがガ ラスに溶け込む量が多ぐ封着工程後の融点上昇効果が大きいだけでなぐビスマス 系ガラスと相性が良好であるため、耐火性フィラーの溶け込み量が多くても、ガラスの 熱的安定性を損なうことがない、つまり封着工程で結晶の析出を促進させないため、 好適である。また、ガラスの機械的強度等を上昇させる目的で上記組成を有する耐 火性フイラ一以外の耐火性フィラー(例えば、酸化錫、ジルコユア、アルミナ等)を適 宜添加することができる。  [0064] The refractory filler according to the present invention has a low thermal expansion coefficient in a crystal or quartz glass mainly composed of cordierite, β-quartz solid solution, zinc petalite, β-eucryptite, garnite and the like. At the same time, the effect of increasing the melting point after the sealing step is great, which is preferable. In particular, the crystalline material with cordierite as the main crystal has a good compatibility with bismuth-based glass, which has a large melting point increasing effect after the sealing process because the amount of refractory filler dissolved in the glass is large in the sealing process. Therefore, even if the amount of the refractory filler is large, the thermal stability of the glass is not impaired, that is, the crystal precipitation is not promoted in the sealing step, which is preferable. In addition, a refractory filler other than the refractory filler having the above composition (for example, tin oxide, zirconium oxide, alumina, etc.) can be appropriately added for the purpose of increasing the mechanical strength of the glass.
[0065] 本発明に係る耐火性フィラーにおいて、レーザー回折粒度分布測定装置で測定し たときの 5 m以下の粒子割合 (積算値)は、 15%以上が好ましぐ 20%以上がより 好ましぐ 35%以上が更に好ましい。耐火性フィラーの 5 m以下の粒子割合が 15 %より小さいと、封着工程で耐火性フィラーがガラスに溶け込む量が少なくなり、その 結果、封着工程後の融点上昇効果が得られに《なる。  [0065] In the refractory filler according to the present invention, the particle ratio (integrated value) of 5 m or less when measured with a laser diffraction particle size distribution analyzer is preferably 15% or more, more preferably 20% or more. More preferably 35% or more. If the proportion of particles of 5 m or less in the refractory filler is less than 15%, the amount of the refractory filler that dissolves in the glass in the sealing process decreases, and as a result, the effect of increasing the melting point after the sealing process is obtained. .
[0066] 封着工程で耐火性フィラーがガラスに溶け込む量は、耐火性フィラーの比表面積 が大きいほど、多くなる。本発明に係る耐火性フィラーにおいて、 BET比表面積測定 装置で測定したときの比表面積値は 0. 5〜3. 5m2Zgが好ましぐ 0. 6〜1. 2m gがより好ましい。耐火性フィラーの比表面積値が 0. 5m2/gより小さいと、封着工程 で耐火性フィラーがガラスに溶け込む量が多くなり過ぎ、ガラスタブレットの流動性を 阻害するおそれがある。耐火性フィラーの比表面積値が 3. 5m2/gより多いと、封着 工程で耐火性フィラーがガラスに溶け込む量が少なくなり、その結果、封着工程後の 融点上昇効果が得られにくくなる。 [0066] The amount of the refractory filler dissolved in the glass in the sealing step increases as the specific surface area of the refractory filler increases. In the refractory filler according to the present invention, BET specific surface area measurement The specific surface area value measured with the apparatus is preferably 0.5 to 3.5 m 2 Zg, more preferably 0.6 to 1.2 mg. If the specific surface area of the refractory filler is less than 0.5 m 2 / g, the amount of the refractory filler dissolved in the glass becomes too large in the sealing process, which may impair the fluidity of the glass tablet. When the specific surface area value of the refractory filler is more than 3.5 m 2 / g, the amount of the refractory filler that dissolves in the glass during the sealing process decreases, and as a result, the effect of increasing the melting point after the sealing process becomes difficult to obtain. .
[0067] 低融点ガラス (低融点ガラス粉末)と耐火性フィラー (耐火性フィラー粉末)の混合割 合は、低融点ガラスが 40〜95体積0 /0、耐火性フィラー 5〜60体積%であることが好 ましぐ低融点ガラス力 0〜90体積0 /0、耐火性フィラー 10〜60体積0 /0であることが 更に好ましい。両者の割合をこのように規定した理由は、耐火性フィラーが 5体積% よりも少ないと、熱膨張係数を低下させる効果や機械的強度を上昇させる効果が得ら れにくぐ 60体積%より多くなるとガラスタブレットの流動性が悪くなり、気密封着がで きなくなるおそれがある力もである。 [0067] mixing proportion of the low melting point glass (low-melting glass powder) and refractory filler (refractory filler powder), low-melting glass is 40 to 95 volume 0/0, 5 to 60 vol% refractory filler it is good better tool low-melting glass strength 0-90 volume 0/0, more preferably refractory filler 10 to 60 volume 0/0. The reason for specifying the ratio of the two in this way is that when the amount of the refractory filler is less than 5% by volume, it is difficult to obtain the effect of decreasing the thermal expansion coefficient or the effect of increasing the mechanical strength. If this happens, the fluidity of the glass tablet will deteriorate, and there will be a possibility that it will be impossible to seal tightly.
[0068] また、例えば高歪点ガラス (熱膨張係数 85 X 10"V°O、ソーダ板ガラス (熱膨張 係数 90 X 10_7Z°C)等の封着を行う場合、非結晶性ガラスタブレットの熱膨張係数 は、被封着物に対して 10〜30 X 10_7Z°C程度低く設計することが好ましい。これは 、封着後に非結晶性ガラスタブレットにかかる歪をコンプレツシヨン (圧縮)側にして非 結晶性ガラスタブレットの破壊を防ぐためである。 [0068] In addition, when sealing high strain point glass (thermal expansion coefficient 85 X 10 "V ° O, soda plate glass (thermal expansion coefficient 90 X 10 _7 Z ° C), etc., non-crystalline glass tablet The coefficient of thermal expansion is preferably designed to be about 10-30 X 10 _7 Z ° C lower than the material to be sealed, which means that the distortion applied to the amorphous glass tablet after sealing is compressed (compressed). This is to prevent the destruction of the amorphous glass tablet.
[0069] 本発明の非結晶性ガラスタブレットは、実質的に PbOを含有しないことが好ましい。  [0069] The amorphous glass tablet of the present invention preferably contains substantially no PbO.
本発明の非結晶性ガラスタブレットは、低融点ガラスおよび耐火性フイラ一につ 、て PbOを含有しな 、態様にすることができる。非結晶性ガラスタブレットを実質的に Pb Oを含有しな 、態様とすれば、近年の環境的要請を満たすことができる。  The amorphous glass tablet of the present invention can be made into an embodiment without containing PbO in the low-melting glass and the refractory filler. If the amorphous glass tablet is substantially free of Pb 2 O, it can meet recent environmental requirements.
[0070] 本発明の非結晶性ガラスタブレットにお 、て、非結晶性ガラスタブレットの軟ィ匕点は 350〜470°C力 S好ましく、 390〜450°Cがより好ましい。非結晶性ガラスタブレットの 軟ィ匕点が 350°Cより低いと、封着工程で耐火性フィラーの溶け込み量を極めて多くし なければ、その後に供される排気工程でガラスタブレットが容易に軟ィ匕変形し、排気 管が動いて排気孔を塞いだり、ガラスタブレットに穴があいて気密性が損なわれる。 非結晶性ガラスタブレットの軟ィ匕点が 450°Cより高 、と、封着工程でガラスタブレット が十分に流動せず、平面表示装置内の気密性が担保できないおそれがある。 [0070] In the amorphous glass tablet of the present invention, the soft spot of the amorphous glass tablet is preferably 350 to 470 ° C force S, more preferably 390 to 450 ° C. If the soft glass point of the amorphous glass tablet is lower than 350 ° C, the glass tablet can be easily softened in the subsequent exhaust process unless the melting amount of the refractory filler is extremely increased in the sealing process.匕 Deformation will cause the exhaust pipe to move and block the exhaust hole, or the glass tablet will have a hole and airtightness will be lost. The soft spot of amorphous glass tablets is higher than 450 ° C. May not flow sufficiently, and airtightness in the flat display device may not be secured.
[0071] 本発明の非結晶性ガラスタブレットにお 、て、非結晶性ガラスタブレットの屈伏点を T (°C)とし、 480°Cで 30分間焼成した後の非結晶性ガラスタブレットの屈伏点を T ( [0071] In the amorphous glass tablet of the present invention, the yield point of the amorphous glass tablet is T (° C), and the yield point of the amorphous glass tablet after baking at 480 ° C for 30 minutes. T (
1 21 2
°C)としたときに、 T— T≥5°Cの関係を満たすことが好ましぐ T— T≥7°Cの関係 It is preferable to satisfy the relationship of T—T≥5 ° C
2 1 2 1  2 1 2 1
を満たすことがより好ましぐ T—T≥10°Cの関係を満たすことが更に好ましい。 T  It is even more preferable to satisfy the relationship of T—T≥10 ° C. T
2 1 2 T < 5°Cであれば、封着工程後のガラスタブレットの軟ィ匕点上昇効果が乏しぐ本 発明の有する特有の効果を享受し難い。すなわち、 T 2— Tく  When 2 1 2 T <5 ° C, it is difficult to enjoy the unique effect of the present invention, in which the soft tablet point raising effect of the glass tablet after the sealing step is insufficient. That is, T 2— T
1 5°Cであれば、排気ェ 程でガラスタブレットが容易に軟ィ匕変形し、排気管が動いて排気孔を塞いだり、ガラ スタブレットに穴があいて気密性が損なわれるおそれがある。 T -T≥5°Cの関係を  1 If the temperature is 5 ° C, the glass tablet can be easily softly deformed by the exhaust stroke, and the exhaust pipe may move to block the exhaust hole, or the glass tablet may have a hole and airtightness may be impaired. . T -T≥5 ° C relationship
2 1  twenty one
満たすためには、既述の通り、耐火性フィラーの材質を選定するとともに、その粒度 を適切な値に設定することが有効である。  In order to satisfy this requirement, it is effective to select the material of the refractory filler and set the particle size to an appropriate value as described above.
[0072] 本発明の非結晶性ガラスタブレットにお 、て、非結晶性ガラスタブレットの屈伏点を T (°C)とし、(軟ィ匕点 + 50) °Cの温度で 30分間焼成した後の非結晶性ガラスタブレ ットの屈伏点を T (°C)としたときに、 T— T≥5°Cの関係を満たすことが好ましぐ T [0072] In the non-crystalline glass tablet of the present invention, the yield point of the non-crystalline glass tablet is T (° C), and calcined at a temperature of (soft point + 50) ° C for 30 minutes. It is preferable to satisfy the relationship of T—T≥5 ° C, where T (° C) is the yield point of the amorphous glass tablet of T
3 3 1 3 3 3 1 3
— T≥7°Cの関係を満たすことがより好ましぐ T— T≥10°Cの関係を満たすことが— It is more preferable to satisfy the relationship of T≥7 ° C T — To satisfy the relationship of T≥10 ° C
1 3 1 1 3 1
更に好ましい。 T -Tく 5°Cであれば、封着工程後のガラスタブレットの軟ィ匕点上昇  Further preferred. If T-T is 5 ° C, the soft spot of the glass tablet is raised after the sealing process.
3 1  3 1
効果が乏しぐ本発明の有する特有の効果を享受し難い。すなわち、 T 3 T 1 < 5°C であれば、排気工程でガラスタブレットが容易に軟ィ匕変形し、排気管が動いて排気孔 を塞いだり、ガラスタブレットに穴があいて気密性が損なわれるおそれがある。 T 3 -T It is difficult to enjoy the peculiar effects of the present invention that are poor in effect. In other words, if T 3 T 1 <5 ° C, the glass tablet easily deforms softly in the exhaust process, and the exhaust pipe moves to block the exhaust hole, or the glass tablet has a hole and the airtightness is impaired. There is a risk of being. T 3 -T
≥5°Cの関係を満たすためには、既述の通り、耐火性フィラーの材質を選定するとと もに、その粒度を適切な値に設定することが有効である。ここで、「(軟ィ匕点 + 50) °C の温度で 30分間焼成」における昇降温速度は、 2°CZ分であり、室温から昇温を開 始し、室温になった時点で降温を終了する。また、 Tの測定試料は、別途、非結晶 In order to satisfy the relationship of ≥5 ° C, it is effective to select the material of the refractory filler and set the particle size to an appropriate value as described above. Here, the temperature increase / decrease rate in "(soft soft spot + 50) ° C firing for 30 minutes" is 2 ° CZ minutes, the temperature rise starts from room temperature, and the temperature drops when it reaches room temperature. Exit. In addition, the measurement sample of T is separately amorphous.
3  Three
性ガラスタブレットの作製に供する粉末試料の軟化点をマクロ型示差熱分析装置で 測定した上で、新たに同様の粉末試料を軟ィ匕点より 10°C高い温度で 30分間焼成し たものを使用する。なお、この焼成における昇降温速度は、 2°CZ分であり、室温から 昇温を開始し、室温になった時点で降温を終了する。  The softening point of a powder sample used for the production of porous glass tablets was measured with a macro-type differential thermal analyzer, and the same powder sample was calcined at a temperature 10 ° C higher than the soft saddle point for 30 minutes. use. The rate of temperature increase / decrease in this firing is 2 ° CZ, and the temperature increase starts from room temperature and ends when the temperature reaches room temperature.
[0073] 本発明の非結晶性ガラスタブレットは、平面表示装置用排気管の封着に使用する ことが好ましい。 PDP、フィールドェミッションディスプレイ (FED)等の平面表示装置 は、その内部を真空にするために排気管を使用する必要がある。排気管の封着には 、平面表示装置の内部の気密性を担保するため、通常、ガラスが使用される。また、 排気管を封着した後は、排気管を介して真空ポンプ等により平面表示装置内部を高 真空状態とする。このとき、平面表示装置内部を短時間で高真空状態とするために は、高温で排気するほど、有利になる。したがって、本発明の非結晶性ガラスタブレツ トは、封着工程後に軟ィ匕点が上昇するため、その後に供される排気工程の熱処理温 度を上昇させることができ、平面表示装置の製造工程を短縮することができる。 [0073] The amorphous glass tablet of the present invention is used for sealing an exhaust pipe for a flat display device. It is preferable. Flat display devices such as PDP and field emission display (FED) need to use an exhaust pipe to evacuate the inside. Glass is usually used for sealing the exhaust pipe in order to ensure the airtightness of the flat display device. In addition, after sealing the exhaust pipe, the inside of the flat display device is put into a high vacuum state by a vacuum pump or the like through the exhaust pipe. At this time, in order to make the inside of the flat display device into a high vacuum state in a short time, it becomes more advantageous to exhaust at a high temperature. Accordingly, since the soft glass point of the amorphous glass tablet of the present invention increases after the sealing process, the heat treatment temperature of the exhaust process provided thereafter can be increased, and the manufacturing process of the flat display device can be improved. It can be shortened.
[0074] PDPの排気工程において、排気温度を上昇させると、排気効率を向上できることが 知られており、具体的には、排気温度を上昇させると、排気に要する時間を数十時間 力も 10時間程度に短縮できるとともに、 PDPの装置内部を高真空にすることができる 。 PDPの装置内部を高真空にすることができれば、装置内部の付着不純物の含有 量を低減できることから、装置内部で後に封入される希ガス成分の純度を高めること ができ、結果として、 PDPの発光特性を向上させることができる。既述の通り、本発明 の非結晶性ガラスタブレットは、封着工程後に軟ィ匕点が上昇するため、かかる要請に 的確に対応することができる。さらに、本発明のガラスタブレットは、非結晶性である ため、上記の利点に加えて、ガラスタブレットの製造工程および平面表示装置の封 着工程でガラスタブレットに結晶が析出することがなぐ結晶析出の制御が難しい結 晶性ガラスタブレットが有する結晶の析出に起因する問題が生じない。特に、 PDPの 製造工程は、熱処理が他の平面表示装置に比べて長時間であり、結晶性ガラスタブ レットを使用すれば、結晶析出の制御が極めて困難になるため、 PDP用排気管の封 着に非結晶性ガラスタブレットを用いる意義は大き 、と 、える。  [0074] In the PDP exhaust process, it is known that the exhaust efficiency can be improved by increasing the exhaust temperature. Specifically, if the exhaust temperature is increased, the time required for the exhaust will be several tens of hours or even 10 hours. It can be shortened to a certain extent, and the inside of the PDP device can be made high vacuum. If the inside of the PDP device can be evacuated to a high vacuum, the content of adhering impurities inside the device can be reduced, so that the purity of the rare gas components to be sealed later inside the device can be increased. Characteristics can be improved. As described above, the amorphous glass tablet of the present invention has a soft saddle point that rises after the sealing step, and therefore can appropriately meet such a demand. Furthermore, since the glass tablet of the present invention is non-crystalline, in addition to the above-mentioned advantages, the crystal tablet does not precipitate in the glass tablet in the glass tablet manufacturing process and the flat panel display sealing process. There are no problems caused by the precipitation of crystals in crystalline glass tablets that are difficult to control. In particular, the PDP manufacturing process takes a long time for heat treatment compared to other flat panel display devices, and the use of crystalline glass tablets makes it extremely difficult to control crystal precipitation. The significance of using non-crystalline glass tablets is great.
[0075] 本発明の非結晶性ガラスタブレットは、特に形状が限定されるものではなぐリング 状、円柱状、三角柱、四角柱等種々の形状を有することができる。特に、排気管の封 着を想定した場合、非結晶性ガラスタブレットの形状は、パネルの排気孔を塞ぐこと なぐ排気管を確実に固定できるため、リング状 (望ましくは、段付きのリング状)が好 ましい。  [0075] The non-crystalline glass tablet of the present invention can have various shapes such as a ring shape, a cylindrical shape, a triangular prism, and a quadrangular prism that are not particularly limited in shape. In particular, assuming the sealing of the exhaust pipe, the shape of the amorphous glass tablet can be securely fixed to the exhaust pipe without closing the exhaust hole of the panel. Is preferred.
[0076] 本発明の非結晶性ガラスタブレットにおいて、充填率は、 65%以上(望ましくは 70 %以上、特に 75%以上)が好ましい。このようにすれば、封着工程で寸法変化を少な くすることができ、非結晶性タブレットの流動性を高めることができる。ここで、「充填率 」とは、 { (非結晶性タブレットの実測密度) / (非結晶性タブレットの理論密度) } X 10 0 (%)の値を指す。 [0076] In the amorphous glass tablet of the present invention, the filling rate is 65% or more (preferably 70%). % Or more, particularly 75% or more) is preferable. In this way, the dimensional change can be reduced in the sealing step, and the fluidity of the amorphous tablet can be increased. Here, “filling ratio” refers to a value of {(actual density of non-crystalline tablet) / (theoretical density of non-crystalline tablet)} X 10 0 (%).
[0077] 本発明の非結晶性ガラスタブレットは、以下のように複数回の熱工程を別途独立に 経て、製造することができる。まず、低融点ガラス粉末と耐火性フィラー粉末を含有す る封着ガラス粉末にバインダーや溶剤を添加し、スラリーを形成する。その後、このス ラリーをスプレードライヤー等の造粒装置に投入し、封着ガラス粉末の顆粒を作製す る。その際、顆粒は、溶剤が揮発する程度の温度(100〜200°C程度)で熱処理され る。顆粒の粒度は、 20〜250 m程度が好ましい。このようにすれば、金型への充填 性を高めることができる。さらに、作製された顆粒は、所定の寸法に設計された金型 に投入され、リング状に乾式プレス成形され、プレス体が作製される。次に、ベルト炉 等の焼成炉にて、このプレス体に残存するバインダーを分解揮発させるとともに、低 融点ガラスの軟ィ匕点程度で焼成され、非結晶性ガラスタブレットが作製される。また、 焼成炉における焼成は、複数回行われる場合があり、焼成を複数回行うと、非結晶 性ガラスタブレットの強度が向上し、非結晶性ガラスタブレットの欠損、破壊等を抑止 することができる。  [0077] The amorphous glass tablet of the present invention can be produced through a plurality of independent heating processes as follows. First, a binder or a solvent is added to a sealing glass powder containing a low melting glass powder and a refractory filler powder to form a slurry. Thereafter, this slurry is put into a granulator such as a spray dryer to produce granules of sealing glass powder. At that time, the granules are heat-treated at a temperature at which the solvent evaporates (about 100 to 200 ° C.). The granule particle size is preferably about 20 to 250 m. In this way, the filling property into the mold can be improved. Further, the produced granules are put into a mold designed to have a predetermined size, and are dry press-molded into a ring shape to produce a pressed body. Next, the binder remaining in the pressed body is decomposed and volatilized in a baking furnace such as a belt furnace, and fired at about the soft spot of the low melting point glass to produce an amorphous glass tablet. In addition, the firing in the firing furnace may be performed a plurality of times. If the firing is performed a plurality of times, the strength of the amorphous glass tablet is improved, and the loss or breakage of the amorphous glass tablet can be suppressed. .
[0078] 封着ガラス粉末に添加する溶媒としては、 N、 N'—ジメチルホルムアミド(DMF)、 a タービネオール、高級アルコール、 Ί ブチルラタトン(γ—BL)、テトラリン、ブ チルカルビトールアセテート、酢酸ェチル、酢酸イソァミル、ジエチレングリコールモノ ェチノレエーテノレ、ジエチレングリコーノレモノェチノレエーテノレアセテート、ベンジノレア ルコール、トルエン、 3—メトキシ 3—メチルブタノール、水、トリエチレングリコール モノメチルエーテル、トリエチレングリコールジメチルエーテル、ジプロピレングリコー ルモノメチルエーテル、ジプロピレングリコーノレモノブチノレエーテノレ、トリプロピレング リコーノレモノメチノレエーテル、トリプロピレングリコーノレモノブチノレエーテル、プロピレ ンカーボネート、ジメチルスルホキシド(DMSO)、 Ν—メチルー 2—ピロリドン等が使 用可能である。特に、 DMF、トルエンは、適度な沸点を有しており、榭脂等の溶解性 も良好であるため、好ましい。 [0079] 封着ガラス粉末に添加するバインダーとしては、アクリル榭脂、ェチルセルロース、 ポリエチレングリコール、ポリエチレングリコール誘導体、ニトロセルロース、ポリメチル スチレン、ポリエチレンカーボネート、メタクリル酸エステル等が使用可能である。特に 、アクリル榭脂、低分子量のポリエチレングリコールは、熱分解性が良好であるため、 好ましい。 [0078] Solvents to be added to the sealing glass powder include N, N'-dimethylformamide (DMF), a terbinol, higher alcohol, butyl latatatone (γ-BL), tetralin, butyral carbitol acetate, ethyl acetate, Isoamyl acetate, diethylene glycol monoethylenoateolene, diethyleneglycolenomonoethylenoate acetate, benzenoreal alcohol, toluene, 3-methoxy 3-methylbutanol, water, triethylene glycol monomethyl ether, triethylene glycol dimethyl ether, dipropylene Glycol monomethyl ether, dipropylene glycol monomono butylene ethere, tripropylene glycoleno monomethylol ether, tripropylene glycol monomono butylene ether, propylene carbonate DOO, dimethyl sulfoxide (DMSO), it is possible for Ν- methyl-2-pyrrolidone or the like is used. In particular, DMF and toluene are preferable because they have an appropriate boiling point and good solubility of rosin and the like. [0079] As the binder to be added to the sealing glass powder, acrylic resin, ethyl cellulose, polyethylene glycol, polyethylene glycol derivatives, nitrocellulose, polymethyl styrene, polyethylene carbonate, methacrylic acid ester and the like can be used. In particular, acrylic resin and low molecular weight polyethylene glycol are preferable because of their good thermal decomposability.
[0080] 本発明の非結晶性ガラスタブレットは、拡径された排気管の先端部に取り付けてタ ブレット一体型排気管として用いることが好ましい。以上のような構成にすれば、パネ ル、非結晶性ガラスタブレットおよび排気管の 3つの部品を排気孔での中心位置合 わせを同時に行う必要がなぐ排気管取り付け作業を簡略ィ匕することができる。このよ うなタブレット一体型排気管を製造するためには、排気管に非結晶性ガラスタブレット を挿入した状態で焼成し、非結晶性ガラスタブレットを排気管の先端部に接着させて おく必要がある。このような場合、一般的に、排気管を治具により固定し、この状態の 排気管に非結晶性ガラスタブレットを挿入し焼成する方法を採用することができる。 排気管を固定する治具は、非結晶性ガラスタブレットが融着しない材質を用いること が好ましぐ例えば、カーボン治具等が使用可能である。また、排気管と非結晶性ガ ラスタブレットの接着は、低融点ガラスの軟ィ匕点付近で 5〜 10分程度の短時間で行 えばよぐこの排気管と非結晶性ガラスタブレットの接着工程で耐火性フィラーが低融 点ガラスの溶け込む量は、極少量であり、非結晶性ガラスタブレットの軟ィ匕点が不当 に上昇することはない。さらに、本発明の非結晶性ガラスタブレットは、熱的安定性が 良好であり、排気管と非結晶性ガラスタブレットの接着工程で非結晶性ガラスタブレツ トに結晶が析出することがないとともに、平面表示装置の封着工程で非結晶性ガラス タブレットに不当に結晶が析出することがない。  [0080] The amorphous glass tablet of the present invention is preferably used as a tablet-integrated exhaust pipe by being attached to the tip of the expanded exhaust pipe. With the above configuration, it is possible to simplify the exhaust pipe installation work that eliminates the need to simultaneously align the three parts of the panel, the amorphous glass tablet, and the exhaust pipe in the exhaust hole. it can. In order to manufacture such a tablet-integrated exhaust pipe, it is necessary to baked with the amorphous glass tablet inserted into the exhaust pipe, and to adhere the amorphous glass tablet to the tip of the exhaust pipe. . In such a case, it is generally possible to employ a method in which the exhaust pipe is fixed with a jig, and an amorphous glass tablet is inserted into the exhaust pipe in this state and fired. As a jig for fixing the exhaust pipe, it is preferable to use a material to which the amorphous glass tablet is not fused. For example, a carbon jig or the like can be used. Adhesion between the exhaust pipe and the amorphous glass tablet can be done in a short time of about 5 to 10 minutes near the soft melting point of the low melting point glass. However, the amount of low-melting point glass melted by the refractory filler is extremely small, and the soft spot of the amorphous glass tablet does not rise unduly. Furthermore, the amorphous glass tablet of the present invention has good thermal stability, and crystals are not deposited on the amorphous glass tablet in the bonding process between the exhaust pipe and the amorphous glass tablet. Crystals are not unduly deposited on the amorphous glass tablet in the sealing process of the device.
[0081] 排気管としては、 日本電気硝子社製の商品グレード「FE— 2」が好適である。この 排気管は、熱膨張係数が 85 X 10_7Z°Cであり、耐熱温度は 550°Cである。また、例 えば外径 5mm、内径 3. 5mmの排気管が利用可能である。排気管として、先端部に フレア部またはフランジ部を形成し、排気管の先端部分を拡径ィ匕するのが好ま 、。 排気管の先端部分を拡径化する方法として、種々の方法を採用することが可能であ るが、排気管の先端部を回転させながらガスバーナーを用いて加熱し、数種類の治 具を用いて所定の形状に加工する方法が量産性に優れるため好ましい。 As the exhaust pipe, a product grade “FE-2” manufactured by Nippon Electric Glass Co., Ltd. is suitable. This exhaust pipe has a coefficient of thermal expansion of 85 X 10 _7 Z ° C and a heat resistant temperature of 550 ° C. For example, an exhaust pipe with an outer diameter of 5 mm and an inner diameter of 3.5 mm can be used. As the exhaust pipe, it is preferable to form a flare or flange at the tip and expand the diameter of the tip of the exhaust pipe. Various methods can be adopted as a method of expanding the diameter of the tip of the exhaust pipe. However, several kinds of treatment can be performed by heating the tip of the exhaust pipe using a gas burner while rotating the tip. A method of processing into a predetermined shape using a tool is preferable because it is excellent in mass productivity.
[0082] 図 1にこのような構成のタブレット一体型排気管の一例を示す。図 1は、タブレット一 体型排気管の断面図であり、排気管 1の先端部が拡径化されており、排気管のパネ ル側の先端部分に非結晶性ガラスタブレット 2が接着されている。  FIG. 1 shows an example of a tablet-integrated exhaust pipe having such a configuration. Fig. 1 is a cross-sectional view of a tablet-integrated exhaust pipe. The tip of the exhaust pipe 1 is enlarged in diameter, and the amorphous glass tablet 2 is bonded to the tip of the exhaust pipe on the panel side. .
[0083] 本発明の非結晶性ガラスタブレットは、拡径された排気管の先端部に非結晶性ガラ スタブレットと、高融点タブレットとが取り付けられており、且つ非結晶性ガラスタブレツ トが拡径された排気管の先端部側に取り付けて、高融点タブレットが非結晶性ガラス タブレットよりも後端部側に取り付けたタブレット一体型排気管として用いることが好ま しい。タブレット一体型排気管をこのような構成にすれば、非結晶性ガラスタブレット 力 S排気管の先端部側に取り付けられているので、パネル等に排気管を取り付ける際 にパネル等と接触する面積は、排気管だけの場合よりも広くなり、安定してパネル等 の上に排気管を自立させることができ、パネル等に対して傾くことなく垂直に取り付け ることが容易となる。また、タブレット一体型排気管をこのような構成にすれば、タブレ ットー体型排気管を製造する工程において、非結晶性ガラスタブレットを排気管に固 着させる際、治具と非結晶性ガラスタブレットの間に高融点タブレットを配置させること により、タブレット一体型排気管を製造することができ、つまりタブレット一体型排気管 の製造において、特殊な治具を使用する必要がなくなり、製造工程を簡略化すること ができる。  [0083] In the amorphous glass tablet of the present invention, an amorphous glass tablet and a high melting point tablet are attached to the tip of the expanded exhaust pipe, and the amorphous glass tablet is expanded. It is preferable that the high-melting-point tablet is used as a tablet-integrated exhaust pipe attached to the rear end side rather than the amorphous glass tablet. If the tablet-integrated exhaust pipe is configured in this way, it is attached to the tip side of the amorphous glass tablet force S exhaust pipe, so the area in contact with the panel etc. when attaching the exhaust pipe to the panel etc. The exhaust pipe is wider than the case of only the exhaust pipe, and the exhaust pipe can be made to stand on the panel etc. stably, and it becomes easy to install vertically without tilting with respect to the panel etc. In addition, if the tablet-integrated exhaust pipe is configured in this way, when the amorphous glass tablet is fixed to the exhaust pipe in the process of manufacturing the tablet-type exhaust pipe, the jig and the amorphous glass tablet By placing a high melting point tablet between them, it is possible to manufacture a tablet-integrated exhaust pipe, that is, it is not necessary to use a special jig in the manufacture of a tablet-integrated exhaust pipe, and the manufacturing process is simplified. be able to.
[0084] 上記構成のタブレット一体型排気管にお!ヽて、非結晶性ガラスタブレットは、好まし くは、ガラス管の先端部の外周面に固着される。さらに好ましくは、ガラス管の先端部 の外周面のみに固着され、ガラス管先端部の先端面、すなわちパネル等と接着する 面には固着されない。このようにすれば、パネル等に形成された排気孔へのガラスの 流れ込みを防止することが容易になる。また、高融点タブレットは、排気管に直接接 着せず、非結晶性ガラスタブレットを介して排気管に固定すれば、封着工程で高融 点タブレット部分をクリップで固定した状態で排気管を加圧封着できるため、好ましい  [0084] In the tablet-integrated exhaust pipe having the above structure, the amorphous glass tablet is preferably fixed to the outer peripheral surface of the tip of the glass tube. More preferably, it is fixed only to the outer peripheral surface of the front end portion of the glass tube, and is not fixed to the front end surface of the front end portion of the glass tube, that is, the surface bonded to the panel or the like. In this way, it becomes easy to prevent the glass from flowing into the exhaust holes formed in the panel or the like. In addition, if the high melting point tablet is not directly attached to the exhaust pipe but is fixed to the exhaust pipe via an amorphous glass tablet, the high melting point tablet part is fixed with a clip in the sealing process and the exhaust pipe is added. It is preferable because it can be sealed.
[0085] 高融点タブレットとしては、 日本電気硝子社製の商品グレード「ST— 4」、「FN— 13 」を材料として用いるのが好ましい。高融点タブレットは、上述の非結晶性ガラスタブ レットと同様の方法で作製することができる。また、高融点タブレットとして、セラミック スまたは金属を材料として用いることもできる。 [0085] As the high melting point tablet, it is preferable to use commercial grades “ST-4” and “FN-13” manufactured by Nippon Electric Glass Co., Ltd. as materials. The high melting tablet is made of the above amorphous glass tab It can be produced by the same method as the lett. Moreover, ceramics or a metal can also be used as a material as a high melting point tablet.
[0086] 図 2にこのような構成のタブレット一体型排気管の一例を示す。図 2は、タブレット一 体型排気管の断面図であり、排気管 1の先端部が拡径化されており、排気管 1のフラ ンジ部分 la外周面側の先端部分に非結晶性ガラスタブレット 2が接着している。一方 、高融点タブレット 3は排気管 1の外周面側に接着していない。また、非結晶性ガラス タブレット 2は、フランジ部分 laの先端部側に取り付けられて、高融点タブレット 3が非 結晶性ガラスタブレット 2よりもフランジ部分 laの後端部側に取り付けられている。 実施例 1  FIG. 2 shows an example of a tablet-integrated exhaust pipe having such a configuration. Fig. 2 is a cross-sectional view of the tablet-integrated exhaust pipe. The tip of the exhaust pipe 1 has an enlarged diameter. The flange portion of the exhaust pipe 1 Are adhered. On the other hand, the high melting point tablet 3 is not bonded to the outer peripheral surface side of the exhaust pipe 1. The amorphous glass tablet 2 is attached to the front end side of the flange portion la, and the high melting point tablet 3 is attached to the rear end side of the flange portion la rather than the amorphous glass tablet 2. Example 1
[0087] 以下、実施例に基づいて本発明を詳細に説明する。  [0087] Hereinafter, the present invention will be described in detail based on examples.
[0088] 表 1〜4は実施例の低融点ガラス (試料 A〜N)を示し、比較例の低融点ガラス (試 料 0、 P)を示すものである。また、表 1〜4に記載の各試料 A〜Pは次のようにして調 製した。  [0088] Tables 1 to 4 show the low-melting glass of the examples (samples A to N) and the low-melting glass of the comparative example (samples 0 and P). Samples A to P shown in Tables 1 to 4 were prepared as follows.
[0089] まず、表 1〜4に示したガラス組成となるように各種酸ィ匕物、炭酸塩等の原料を調合 したガラスバッチを準備し、これを白金坩堝に入れて 900〜 1000°Cで 1〜 2時間溶 融した。次に、溶融ガラスの一部をステンレス製の金型に流し出し、その他の溶融ガ ラスは、水冷ローラーにより薄片状に成形した。なお、熱膨張係数等を測定するため のサンプルは、成形後に所定の徐冷処理 (ァニール)を行った。最後に、薄片状のガ ラスをボールミルにて粉砕後、 目開き 75 mの篩いを通過させて、平均粒径約 10 mの各試料を得た。  [0089] First, a glass batch prepared by preparing raw materials such as various oxides and carbonates so as to have the glass composition shown in Tables 1 to 4 was prepared and placed in a platinum crucible at 900 to 1000 ° C. At 1 to 2 hours. Next, a part of the molten glass was poured out into a stainless steel mold, and the other molten glass was formed into a thin piece with a water-cooled roller. A sample for measuring the thermal expansion coefficient and the like was subjected to a predetermined slow cooling treatment (annealing) after molding. Finally, the glass flakes were pulverized by a ball mill and passed through a sieve having an opening of 75 m to obtain samples having an average particle diameter of about 10 m.
[0090] 以上の試料を用いて、ガラス転移点、屈伏点、軟化点、 30〜300°Cの温度範囲に おける熱膨張係数および失透状態を評価した。その結果を表 1〜4に示す。  [0090] Using the above samples, the glass transition point, yield point, softening point, thermal expansion coefficient and devitrification state in the temperature range of 30 to 300 ° C were evaluated. The results are shown in Tables 1-4.
[0091] [表 1] 試料 A B C D E [0091] [Table 1] Sample ABCDE
39. 2 41. 9 38. 5 47. 4 47. 4 23. 6 22. 2 23. 0 18. 7 20. 2 24. 5 23. 4 27. 5 25. 5 23. 3 ガラス組成 6. 1 2. 8 2. 0 2. 3 2. 5 39. 2 41. 9 38. 5 47. 4 47. 4 23. 6 22. 2 23. 0 18. 7 20. 2 24. 5 23. 4 27. 5 25. 5 23. 3 Glass composition 6.1 2. 8 2. 0 2. 3 2. 5
(m o 1 %) 5. 9 8. 5 5. 0 5. 0 5. 5 (m o 1%) 5. 9 8. 5 5. 0 5. 0 5.5
0. 7 0. 7 0. 7 0. 6 0. 6  0. 7 0. 7 0. 7 0. 6 0. 6
3. 3  3.3
0. 5 0. 5 0. 5 ガラス s移点 (°c) 355 345 360 340 340 屈伏点 ( ) 0OOOO 0OTc 390 400 404 379 383 軟化点 ΓΟ 425 415 435 400 405 熱膨張係数 0. 5 0. 5 0. 5 Glass s transition point (° c) 355 345 360 340 340 Sag point () 0 OOOO 0OTc 390 400 404 379 383 Softening point ΓΟ 425 415 435 400 405 Thermal expansion coefficient
110 1 1 2 105 1 15 1 15 110 1 1 2 105 1 15 1 15
(X 10— 7/。c) (X 10- 7 /.c)
失透状態 〇 〇 〇 〇 〇  Devitrification state ○ ○ ○ ○ ○
[0092] [表 2] [0092] [Table 2]
Figure imgf000024_0001
Figure imgf000024_0001
[0093] [表 3]
Figure imgf000025_0001
[0093] [Table 3]
Figure imgf000025_0001
[0094] [表 4] [0094] [Table 4]
Figure imgf000025_0002
Figure imgf000025_0002
[0095] 軟ィ匕点は、粉末試料を用いて、マクロ型示差熱分析装置により求めた。なお、昇温 速度は、 10°CZ分とした。 [0096] ガラス転移点、 30〜300°Cの温度範囲における熱膨張係数および屈伏点は、周 知の押棒式熱膨張測定装置により求めた。 [0095] The soft saddle point was determined by a macro-type differential thermal analyzer using a powder sample. The heating rate was 10 ° CZ. [0096] The glass transition point, the thermal expansion coefficient in the temperature range of 30 to 300 ° C, and the yield point were determined by a well-known push rod type thermal expansion measurement device.
[0097] また、失透状態は、試料 A〜Pを 500°Cで 30分焼成した後、光学顕微鏡 (倍率 100 倍)を用いて試料中の結晶を観察することにより評価した。失透が認められな力つた ものを「〇」、失透が認められたものを「X」とした。なお、各試料は、各試料の密度に 相当する重量の粉末を金型により外径 20mmのボタン状に乾式プレスしたものを使 用した。また、昇降温速度は 10°CZ分とした。 [0097] The devitrification state was evaluated by observing crystals in the sample using an optical microscope (magnification 100 times) after firing Samples A to P at 500 ° C for 30 minutes. Those that were devitrified were marked with “◯”, and those with devitrification were marked with “X”. For each sample, a powder having a weight corresponding to the density of each sample was dry-pressed into a button shape having an outer diameter of 20 mm using a die. The heating / cooling rate was 10 ° CZ.
[0098] 表 5〜8は、実施例(試料 No. 1〜15)、比較例(試料 No. 16〜20)を示すもので ある。非結晶性ガラスタブレットに用いる材料は、低融点ガラス粉末と耐火性フィラー 粉末を表に示すような混合割合で混合して調製した。 Tables 5 to 8 show Examples (Sample Nos. 1 to 15) and Comparative Examples (Sample Nos. 16 to 20). The material used for the amorphous glass tablet was prepared by mixing a low melting glass powder and a refractory filler powder in a mixing ratio as shown in the table.
[0099] [表 5] [0099] [Table 5]
Figure imgf000026_0001
Figure imgf000026_0001
[0100] [表 6] [0100] [Table 6]
Figure imgf000026_0002
Figure imgf000026_0002
[0101] [表 7] 実施例 [0101] [Table 7] Example
試料 o .  Sample o.
1 1 12 1 3 1 1 5  1 1 12 1 3 1 1 5
K L M N M  K L M N M
ガラス  Glass
混合割合 70 65 67. 5 70 65  Mixing ratio 70 65 67. 5 70 65
(体積 °/。) 耐火性 コ-テ'、イエライト コ テ"イエライト コ-テ÷イエライト コザ、イエライト 石英ガラス (Volume ° /.) Fireproof coat ', Yellite coat "Yellite coat ÷ Yellite Koza, Yellite quartz glass
フイラ— 30 35 32. 5 30 35 軟化点 (。C) 450 405 440 437 4 1 屈伏 O  Filler 30 35 32. 5 30 35 Softening point (.C) 450 405 440 437 4 1 Sag O
(軟化点 + 1 X) 402 380 400 397 400  (Softening point + 1 X) 402 380 400 397 400
(軟化点 +5 Ot) 410 390 410 406 41 2  (Softening point +5 Ot) 410 390 410 406 41 2
熱膨張係数  Coefficient of thermal expansion
68. 1 69. 2 67. 7 71. 3  68. 1 69. 2 67. 7 71. 3
(X 10一7 Z°c) 68. 4 (X 10 1 7 Z ° c) 68.4
[0102] [表 8] [0102] [Table 8]
Figure imgf000027_0001
Figure imgf000027_0001
[0103] 耐火性フィラー粉末は、コーディエライト (結晶物)、ウィレマイト (結晶物)、石英ガラ スを使用した。コーディエライトは、酸化マグネシウム、酸ィ匕アルミニウム、酸化ケィ素 を 2MgO'2Al O -5SiOの割合になるように調合し、混合後、 1400°Cで 10時間焼  [0103] Cordierite (crystal), willemite (crystal), and quartz glass were used as the refractory filler powder. Cordierite is prepared by mixing magnesium oxide, aluminum oxide, and silicon oxide at a ratio of 2MgO'2AlO-5SiO, and after mixing, baked at 1400 ° C for 10 hours.
2 3 2  2 3 2
成し、次いでこの焼成物を粉砕し、 325メッシュのステンレス製篩を通過させ、平均粒 子径 5 mとしたものを使用した。ウィレマイトは、亜鉛華、酸化ケィ素、酸化アルミ- ゥムを重量0 /0で ZnO 70%、SiO 25%、A10 5%の組成になるように調合し、 Then, the fired product was pulverized and passed through a 325 mesh stainless steel sieve to obtain an average particle diameter of 5 m. Willemite is zinc oxide, Kei arsenide, aluminum oxide - 70% ZnO and © beam weight 0/0, SiO 25%, formulated to be A10 5% of the composition,
2 2 3  2 2 3
混合後、 1440°Cで 15時間焼成し、次いでこの焼成物を粉砕し、 250メッシュのステ ンレス製篩を通過させ、平均粒子径 10 mとしたものを使用した。石英ガラスは、平 均粒子径 10 μ mとしたものを使用した。  After mixing, the mixture was baked at 1440 ° C for 15 hours, and then the baked product was pulverized and passed through a 250 mesh stainless steel sieve to obtain an average particle size of 10 m. Quartz glass with an average particle size of 10 μm was used.
[0104] 軟化点は、粉末試料を用いて、マクロ型示差熱分析装置により求めた。 [0104] The softening point was determined by a macro-type differential thermal analyzer using a powder sample.
[0105] ガラス転移点、 30〜300°Cの温度範囲における熱膨張係数および屈伏点は、周 知の押棒式熱膨張測定装置により求めた。屈伏点の測定には、(軟ィ匕点 + 10°C)の 温度で 30分焼成したものおよび (軟化点 + 50°C)の温度で 30分焼成したものを試 料として用いた。なお、試料の焼成は 2°CZ分の昇降温速度で行った。なお、(軟ィ匕 点 + 10°C)の温度は、ガラスタブレットを焼成炉で焼結するときの温度に相当し、(軟 化点 + 50°C)の温度は平面表示装置の製造における封着温度に相当して 、る。ま た、(軟化点 + 10°C)の温度で焼成した試料を用いて測定した屈伏点は Tに相当し 、(軟化点 + 50°C)の温度で焼成した試料を用 、て測定した屈伏点は Tに相当して [0105] The glass transition point, the thermal expansion coefficient in the temperature range of 30 to 300 ° C, and the yield point were determined by a well-known push rod type thermal expansion measurement device. For the measurement of the yield point, samples fired for 30 minutes at a temperature of (soft spot + 10 ° C) and those fired for 30 minutes at a temperature of (softening point + 50 ° C) were tested. Used as a fee. The sample was fired at a temperature increase / decrease rate of 2 ° CZ. Note that the temperature of (softening point + 10 ° C) corresponds to the temperature when the glass tablet is sintered in a baking furnace, and the temperature of (softening point + 50 ° C) is used in the manufacture of flat display devices. It corresponds to the sealing temperature. In addition, the yield point measured using a sample fired at a temperature of (softening point + 10 ° C) corresponds to T, and measured using a sample fired at a temperature of (softening point + 50 ° C). The yield point is equivalent to T
3 いる。さらに、いずれの焼成においても No. 1〜15の試料に結晶は析出していなか つた o  3 Furthermore, no crystals were deposited on the samples No. 1 to 15 in any firing.
[0106] 表 5〜7から明らかなように、試料 No. 1〜15は、 30〜300°Cの温度範囲における 熱膨張係数が 67. 0〜71. 3 X 10_7Z°Cであり、高歪点ガラス基板の熱膨張係数と 整合していた。また、試料 No. 1〜15は、軟化点が 400〜450°Cであり、 500°C以下 の低温で封着可能である。 [0106] As is clear from Tables 5 to 7, Sample Nos. 1 to 15 have a thermal expansion coefficient of 67.0 to 71.3 X 10 _7 Z ° C in the temperature range of 30 to 300 ° C. It was consistent with the thermal expansion coefficient of the high strain point glass substrate. Samples Nos. 1 to 15 have a softening point of 400 to 450 ° C and can be sealed at a low temperature of 500 ° C or less.
[0107] 試料 No. 1〜15は、耐火性フイラ一としてコーディエライト、或いは石英ガラスを使 用しているため、(軟ィ匕点 + 10°C)の温度で焼成したときに比べ、(軟化点 + 50°C) の温度で焼成した場合、屈伏点が 6〜12°C上昇した。よって、試料 No. 1〜15を用 いて、作製した非結晶性タブレットは、封着工程の過程で軟ィ匕点が上昇し、その後の 排気工程で軟ィ匕流動し難いことが分かる。なお、試料 No. 1〜15に係る非結晶性タ ブレットは、当然のことながら、封着時間を長くすれば、例えば、 PDPの封着工程の ように封着温度で 60分程度保持すれば、屈伏点の上昇値を更に大きくすることがで きる。一方、試料 No. 16〜20は、耐火性フィラーとしてウィレマイトを使用しているた め、(軟化点 + 10°C)の温度で焼成した場合と (軟化点 + 50°C)の温度で焼成した場 合で屈伏点が略同等であった。  [0107] Samples Nos. 1 to 15 use cordierite or quartz glass as the fireproof filler, so compared to when fired at a temperature of (soft spot + 10 ° C), When firing at a temperature of (softening point + 50 ° C), the yield point increased by 6-12 ° C. Therefore, it can be seen that the non-crystalline tablets produced using Samples Nos. 1 to 15 have an increased soft spot during the sealing process and are less likely to flow during the subsequent exhaust process. As a matter of course, the non-crystalline tablets according to Sample Nos. 1 to 15 can be kept at the sealing temperature for about 60 minutes as in the PDP sealing process, for example, by increasing the sealing time. The increase in the yield point can be further increased. On the other hand, sample Nos. 16 to 20 use willemite as a refractory filler, and therefore fired at a temperature of (softening point + 10 ° C) and at a temperature of (softening point + 50 ° C). In that case, the yield point was almost the same.
産業上の利用可能性  Industrial applicability
[0108] 以上の説明から明らかなように、本発明の非結晶性ガラスタブレットは、 PDP、 FE D、プラズマアドレスリキッドクリスタルディスプレイ、蛍光表示管等の排気管等の封着 用途に好適である。さらに、本発明の非結晶性ガラスタブレットは、陰極線管 (CRT) 等のディスプレイの封着用途、蛍光表示管、 PDP等の絶縁誘電体層形成用途、磁 気ヘッド—コア同士またはコアとスライダーの封着用途、水晶振動子や ICパッケージ 等の電子部品の封着用途、シーズヒーターの封止用途および魔法瓶の封止用途に も好適である。 As is apparent from the above description, the amorphous glass tablet of the present invention is suitable for sealing applications such as exhaust pipes such as PDP, FED, plasma addressed liquid crystal display, and fluorescent display tube. Furthermore, the amorphous glass tablet of the present invention is used for sealing a display such as a cathode ray tube (CRT), for forming an insulating dielectric layer such as a fluorescent display tube or a PDP, for magnetic head-cores or between cores and sliders. For sealing, sealing of electronic parts such as crystal units and IC packages, sealing of sheathed heaters and sealing of thermos bottles Is also suitable.
図面の簡単な説明  Brief Description of Drawings
[0109] [図 1]本発明のタブレット一体型排気管を示す断面図である。  FIG. 1 is a cross-sectional view showing a tablet-integrated exhaust pipe of the present invention.
[図 2]本発明のタブレット一体型排気管を示す断面図である。  FIG. 2 is a cross-sectional view showing a tablet-integrated exhaust pipe of the present invention.
[図 3]マクロ型示差熱分析装置で測定した時のガラスの軟ィ匕点を示す模式図である。 符号の説明  FIG. 3 is a schematic diagram showing the soft spot of glass when measured with a macro-type differential thermal analyzer. Explanation of symbols
[0110] 1 排気管 [0110] 1 Exhaust pipe
2 非結晶性ガラスタブレット  2 Amorphous glass tablet
3 高融点タブレット  3 High melting point tablet

Claims

請求の範囲 The scope of the claims
[1] 低融点ガラスと耐火性フィラーを含有する非結晶性ガラスタブレットにおいて、  [1] In an amorphous glass tablet containing a low melting glass and a refractory filler,
低融点ガラス力 ガラス組成として、下記酸ィヒ物換算のモル%表示で Bi O 30〜  Low melting point glass strength As a glass composition, Bi O 30 ~
2 3 twenty three
60%、 B O 10〜40%、 ZnO 10〜50%を含有し、 60%, B O 10-40%, ZnO 10-50%,
2 3  twenty three
且つ耐火性フィラーが、組成として、下記酸化物換算の重量%表示で SiO 30〜  And the refractory filler is composed of SiO 30-in terms of the following oxide-based weight% as a composition:
2 2
100%、 Al O 0〜45%、 ZnO 0〜35%、 ZrO 0〜20%、 TiO 0〜20%、 Li 100%, AlO 0-45%, ZnO 0-35%, ZrO 0-20%, TiO 0-20%, Li
2 3 2 2 2 2 3 2 2 2
O 0〜10%、 MgO 0〜25%を含有することを特徴とする非結晶性ガラスタブレット Amorphous glass tablet containing 0-10% O and 0-25% MgO
[2] 更に、低融点ガラス力 BaO + SrO + MgO + CaO 0〜15%、 CuO 0〜10%、[2] Furthermore, low melting point glass BaO + SrO + MgO + CaO 0-15%, CuO 0-10%,
Fe O 0〜5%、 SiO +A1 O 0〜15%、 WO 0〜5%、 Sb O 0〜5%、 In OFe O 0-5%, SiO + A1 O 0-15%, WO 0-5%, Sb O 0-5%, In O
2 3 2 2 3 3 2 3 22 3 2 2 3 3 2 3 2
+ Ga O 0〜5%を含有することを特徴とする請求項 1に記載の非結晶性ガラスタThe amorphous glass layer according to claim 1, characterized by containing + GaO 0-5%.
3 2 3 3 2 3
ブレット。  Bullet.
[3] 体積%表示で、低融点ガラス 40〜95%、耐火性フィラー 5〜60%を含有すること を特徴とする請求項 1または 2に記載の非結晶性ガラスタブレット。  [3] The amorphous glass tablet according to claim 1 or 2, which contains 40 to 95% of low-melting glass and 5 to 60% of a refractory filler in terms of volume%.
[4] 耐火性フィラーがコーディエライトを主結晶とする結晶物であることを特徴とする請 求項 1〜3のいずれかに記載の非結晶性ガラスタブレット。 [4] The amorphous glass tablet according to any one of claims 1 to 3, wherein the refractory filler is a crystalline material having cordierite as a main crystal.
[5] 実質的に PbOを含有しないことを特徴とする請求項 1〜4のいずれかに記載の非 結晶性ガラスタブレット。 [5] The amorphous glass tablet according to any one of [1] to [4], which is substantially free of PbO.
[6] 非結晶性ガラスタブレットの軟ィ匕点が 350〜470°Cであることを特徴とする請求項 1[6] The soft saddle point of the amorphous glass tablet is 350 to 470 ° C.
〜5のいずれかに記載の非結晶性ガラスタブレット。 The amorphous glass tablet in any one of -5.
[7] 非結晶性ガラスタブレットの屈伏点を T (°C)とし、 480°Cで 30分間焼成した後の非 結晶性ガラスタブレットの屈伏点を T (°C)としたときに、 [7] When the yield point of the amorphous glass tablet is T (° C) and the yield point of the amorphous glass tablet after baking at 480 ° C for 30 minutes is T (° C),
2  2
T -T≥5°Cの関係を満たすことを特徴とする非結晶性ガラスタブレット。  An amorphous glass tablet characterized by satisfying the relationship of T-T≥5 ° C.
2 1  twenty one
[8] 平面表示装置用排気管の封着に用いることを特徴とする請求項 1〜7のいずれか に記載の非結晶性ガラスタブレット。  [8] The amorphous glass tablet according to any one of [1] to [7], which is used for sealing an exhaust pipe for a flat display device.
[9] 平面表示装置がプラズマディスプレイパネルであることを特徴とする請求項 8に記 載の非結晶性ガラスタブレット。 [9] The amorphous glass tablet according to [8], wherein the flat display device is a plasma display panel.
[10] 拡径された排気管の先端部に、請求項 1〜9のいずれかに記載の非結晶性ガラス タブレットが取り付けられていることを特徴とするタブレット一体型排気管。 [10] The amorphous glass according to any one of [1] to [9] above, at the tip of the expanded exhaust pipe A tablet-integrated exhaust pipe with a tablet attached.
拡径された排気管の先端部に、請求項 1〜9のいずれかに記載の非結晶性ガラス タブレットと、高融点タブレットとが取り付けられており、且つ非結晶性ガラスタブレット が拡径された排気管の先端部側に取り付けられ、高融点タブレットが非結晶性ガラス タブレットよりも後端部側に取り付けられていることを特徴とするタブレット一体型排気 管。  The non-crystalline glass tablet according to any one of claims 1 to 9 and the high melting point tablet are attached to the tip of the expanded exhaust pipe, and the non-crystalline glass tablet is expanded. A tablet-integrated exhaust pipe, which is attached to the front end side of the exhaust pipe, and the high melting point tablet is attached to the rear end side of the amorphous glass tablet.
PCT/JP2007/056810 2006-04-03 2007-03-29 Amorphous glass tablet and tablet-integrated exhaust tube WO2007114222A1 (en)

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