WO2007104483A3 - Epitaktischer stoffsensitiver sensor - Google Patents

Epitaktischer stoffsensitiver sensor Download PDF

Info

Publication number
WO2007104483A3
WO2007104483A3 PCT/EP2007/002056 EP2007002056W WO2007104483A3 WO 2007104483 A3 WO2007104483 A3 WO 2007104483A3 EP 2007002056 W EP2007002056 W EP 2007002056W WO 2007104483 A3 WO2007104483 A3 WO 2007104483A3
Authority
WO
WIPO (PCT)
Prior art keywords
epitaxial
substance
sensitive sensor
monocrystalline
electrically insulating
Prior art date
Application number
PCT/EP2007/002056
Other languages
English (en)
French (fr)
Other versions
WO2007104483A2 (de
Inventor
Karlheinz Wienand
Thomas Loose
Original Assignee
Heraeus Sensor Technology Gmbh
Karlheinz Wienand
Thomas Loose
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Sensor Technology Gmbh, Karlheinz Wienand, Thomas Loose filed Critical Heraeus Sensor Technology Gmbh
Publication of WO2007104483A2 publication Critical patent/WO2007104483A2/de
Publication of WO2007104483A3 publication Critical patent/WO2007104483A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

Die Erfindung ermöglicht die reproduzierbare Herstellung miniaturisierter Sensoren mit extrem hoher Selektivität und Genauigkeit durch einen elektrischen Sensor, bei dem auf einer einkristallinen elektrisch isolierende Oberfläche (2) eine metallische Leiterbahn (1) gerichtet aufgewachsen ist (epitaktisch) und die Schichtdicke der Leiterbahn unter 50 nm beträgt, sowie die Verwendung eines elektrischen Sensors mit einer epitaktisch aufgewachsene Widerstandsstruktur (1) auf einkristalliner, elektrisch isolierender Oberfläche eines Substrats (2) zur Bestimmung von auf der Widerstandsstruktur adsorbierten Stoffen.
PCT/EP2007/002056 2006-03-14 2007-03-09 Epitaktischer stoffsensitiver sensor WO2007104483A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006012088A DE102006012088B4 (de) 2006-03-14 2006-03-14 Verwendung einer epitaktischen Widerstandsstruktur als stoffsensitiven Sensor, Verfahren zum Betreiben des stoffsensitiven Sensors sowie stoffsensitiver Sensor
DE102006012088.4 2006-03-14

Publications (2)

Publication Number Publication Date
WO2007104483A2 WO2007104483A2 (de) 2007-09-20
WO2007104483A3 true WO2007104483A3 (de) 2007-11-08

Family

ID=37986811

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/002056 WO2007104483A2 (de) 2006-03-14 2007-03-09 Epitaktischer stoffsensitiver sensor

Country Status (2)

Country Link
DE (1) DE102006012088B4 (de)
WO (1) WO2007104483A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008047369A1 (de) * 2008-09-15 2010-04-15 Heraeus Sensor Technology Gmbh Epitaktischer Rußsensor
DE102009007940B4 (de) * 2009-02-06 2010-11-18 Heraeus Sensor Technology Gmbh Nichtleitfähiges Zirkonoxid
DE102014104219B4 (de) 2014-03-26 2019-09-12 Heraeus Nexensos Gmbh Keramikträger sowie Sensorelement, Heizelement und Sensormodul jeweils mit einem Keramikträger und Verfahren zur Herstellung eines Keramikträgers

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2219718A1 (de) * 1971-04-23 1972-11-09 Selco Mining Corp. Ltd., Toronto, Ontario (Kanada) Verfahren und Vorrichtung zum Feststellen ausgewählter Komponenten in Medien
DE10210772C1 (de) * 2002-03-12 2003-06-26 Heraeus Sensor Nite Gmbh Temperatursensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19921532A1 (de) * 1999-05-11 2000-11-30 Heraeus Electro Nite Int Gassensor mit diffusions-limitierender Schicht
DE10213805A1 (de) * 2001-03-28 2002-11-07 Denso Corp Gassensor und Verfahren zum Herstellen eines Gassensors

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2219718A1 (de) * 1971-04-23 1972-11-09 Selco Mining Corp. Ltd., Toronto, Ontario (Kanada) Verfahren und Vorrichtung zum Feststellen ausgewählter Komponenten in Medien
DE10210772C1 (de) * 2002-03-12 2003-06-26 Heraeus Sensor Nite Gmbh Temperatursensor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ZHOU H ET AL: "Investigation of platinum films grown on sapphire (0001) by molecular beam epitaxy", JOURNAL OF CRYSTAL GROWTH, NORTH-HOLLAND PUBLISHING, AMSTERDAM, NL, vol. 234, no. 2-3, January 2002 (2002-01-01), pages 561 - 568, XP004323084, ISSN: 0022-0248 *

Also Published As

Publication number Publication date
DE102006012088A1 (de) 2007-09-20
DE102006012088B4 (de) 2008-02-14
WO2007104483A2 (de) 2007-09-20

Similar Documents

Publication Publication Date Title
WO2007084076A8 (en) Biosensor
TW200636822A (en) Structure and method for manufacturing strained silicon directly-on insulator substrate with hybrid crystalling orientation and different stress levels
TW200725880A (en) Semiconductor piezoresistive sensor and operation method thereof
WO2008094870A3 (en) Carbon nanotube device and process for manufacturing same
WO2009060607A1 (ja) 回路保護素子およびその製造方法
WO2008094287A3 (en) Three-dimensional integrated circuit for analyte detection
WO2008057671A3 (en) Electronic device including a conductive structure extending through a buried insulating layer
WO2009078370A1 (ja) ガスセンサ
EP2055757A4 (de) Schaltkreisverbindungsmaterial, verbindungsstruktur eines schaltkreisgliedes und verfahren zur herstellung der verbindungsstruktur eines schaltkreisgliedes
WO2006036297A3 (en) Organic electroluminescence device and method of production of same
WO2007078686A3 (en) Method of polishing a semiconductor-on-insulator structure
WO2008011687A3 (en) Conductive contacts on ge
WO2009019308A3 (de) Bauelement mit reduziertem temperaturgang und verfahren zur herstellung
TW200802743A (en) High frequency device module and method for manufacturing the same
WO2008023329A3 (en) Method of manufacturing a semiconductor sensor device and semiconductor sensor device
WO2009033728A3 (en) Sensor matrix with semiconductor components
WO2007104483A3 (de) Epitaktischer stoffsensitiver sensor
WO2006005332A3 (de) Festelektrolyt-gassenor mit heizelement
WO2007046045A3 (en) A component adapted for being mounted on a substrate and a method of mounting a surface mounted device
WO2009054159A1 (ja) 表示装置及び表示装置の製造方法
ATE416365T1 (de) Temperatursensor
WO2006114746A3 (en) Bipolar transistor and method of fabricating the same
WO2007021421A3 (en) Low temperature formation of patterned epitaxial si containing films
TW200802796A (en) Semiconductor device and method of manufacturing the same
EP1403629A3 (de) Gerät zur Aufspürung eines Dehnungsanteils und dazugehörende Herstellungsmethode

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07723138

Country of ref document: EP

Kind code of ref document: A2

122 Ep: pct application non-entry in european phase

Ref document number: 07723138

Country of ref document: EP

Kind code of ref document: A2