WO2007087936A3 - Device and method for the detection of a substance in a liquid - Google Patents

Device and method for the detection of a substance in a liquid Download PDF

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Publication number
WO2007087936A3
WO2007087936A3 PCT/EP2006/069827 EP2006069827W WO2007087936A3 WO 2007087936 A3 WO2007087936 A3 WO 2007087936A3 EP 2006069827 W EP2006069827 W EP 2006069827W WO 2007087936 A3 WO2007087936 A3 WO 2007087936A3
Authority
WO
WIPO (PCT)
Prior art keywords
substance
resonant frequency
temperature
piezoelectric layer
liquid
Prior art date
Application number
PCT/EP2006/069827
Other languages
German (de)
French (fr)
Other versions
WO2007087936A2 (en
Inventor
Jan Weber
Original Assignee
Siemens Ag
Jan Weber
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag, Jan Weber filed Critical Siemens Ag
Publication of WO2007087936A2 publication Critical patent/WO2007087936A2/en
Publication of WO2007087936A3 publication Critical patent/WO2007087936A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02881—Temperature

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)

Abstract

The invention relates to a device and a method for detecting a substance in a liquid. The inventive device comprises at least one piezo-acoustic resonator element (30; 40) encompassing at least one piezoelectric layer (310, 320; 410), electrodes (311, 312; 321, 322; 411, 412) contacting the piezoelectric layer, and at least one surface section (2a) which is equipped so as to accumulate the substance that is to be detected from the liquid. The piezo-acoustic resonator element (30; 40) is designed such that a volume vibration of the piezoelectric layer is excited at a resonant frequency by applying a voltage to the piezoelectric layer (310, 320; 410) by means of the electrodes, said resonant frequency changing in accordance with the mass of the substance that has accumulated and is to be detected. An evaluation unit (3) is provided for determining a characteristic accumulation value based on the measured resonant frequency. The inventive device further comprises an apparatus (4) for determining an influence of the temperature on the resonant frequency by taking measurements at least at two different vibrations, a first one of which depends on the mass and the temperature and a second one of which substantially depends exclusively on the temperature. In order to determine a characteristic accumulation value, the evaluation unit (3) is equipped so as to determine a temperature-independent characteristic accumulation value based on the measured values of the at least two measurements.
PCT/EP2006/069827 2006-01-31 2006-12-18 Device and method for the detection of a substance in a liquid WO2007087936A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200610004449 DE102006004449A1 (en) 2006-01-31 2006-01-31 Apparatus and method for detecting a substance in a liquid
DE102006004449.5 2006-01-31

Publications (2)

Publication Number Publication Date
WO2007087936A2 WO2007087936A2 (en) 2007-08-09
WO2007087936A3 true WO2007087936A3 (en) 2008-04-10

Family

ID=38282029

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/069827 WO2007087936A2 (en) 2006-01-31 2006-12-18 Device and method for the detection of a substance in a liquid

Country Status (2)

Country Link
DE (1) DE102006004449A1 (en)
WO (1) WO2007087936A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005043037B4 (en) * 2005-09-09 2009-04-09 Siemens Ag Device with piezoacoustic resonator element, method for its production and method for outputting a signal as a function of a resonant frequency
DE102007047156A1 (en) * 2007-10-02 2009-04-23 Siemens Ag Humidity sensor for detecting amount of water in e.g. liquid, has physical transducer coupled with sensor layer in such manner that characteristic of transducer depends on water amount absorbed by sensor layer
DE102007047155A1 (en) * 2007-10-02 2009-04-30 Siemens Ag Humidity sensor has piezoacoustic resonator element which has two electrode layers and piezoceramic layer arranged between electrode layers, where sensor layer is provided with hygroscopic material for sorption of water
DE102007047153A1 (en) * 2007-10-02 2009-04-30 Siemens Ag Humidity sensor for detecting water content in e.g. organic solvent, has resonator element and sensor layer coupled together in manner such that resonant frequency of resonator element depends on amount of water absorbed by sensor layer
DE102011076193A1 (en) * 2010-10-01 2012-04-05 Siemens Aktiengesellschaft Determining a material property of a thin film of a material
DE102015225470A1 (en) * 2015-12-16 2017-06-22 Siemens Aktiengesellschaft Method for detection and substance detector
DE102016205293A1 (en) * 2016-03-31 2017-10-05 Siemens Aktiengesellschaft Method for detecting at least one substance and substance detector
CN112834570B (en) * 2020-12-30 2023-09-22 中国航空工业集团公司金城南京机电液压工程研究中心 Gas-liquid two-phase detection device and method based on self-excitation type piezoelectric element

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686779A (en) * 1995-03-01 1997-11-11 The United States Of America As Represented By The Secretary Of The Army High sensitivity temperature sensor and sensor array
US5744902A (en) * 1995-05-16 1998-04-28 The United States Of America As Represented By The Secretary Of The Army Chemical and biological sensor based on microresonators
WO2003012988A2 (en) * 2001-07-30 2003-02-13 Infineon Technologies Ag Piezoelectric resonator device comprising an acoustic reflector
US6955787B1 (en) * 2003-10-11 2005-10-18 William Paynter Hanson Integrated biological and chemical sensors

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6668618B2 (en) * 2001-04-23 2003-12-30 Agilent Technologies, Inc. Systems and methods of monitoring thin film deposition
AU2003250294A1 (en) * 2002-07-19 2004-03-03 Siemens Aktiengesellschaft Device and method for detecting a substance with the aid of a high frequency piezo-acoustic thin film resonator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686779A (en) * 1995-03-01 1997-11-11 The United States Of America As Represented By The Secretary Of The Army High sensitivity temperature sensor and sensor array
US5744902A (en) * 1995-05-16 1998-04-28 The United States Of America As Represented By The Secretary Of The Army Chemical and biological sensor based on microresonators
WO2003012988A2 (en) * 2001-07-30 2003-02-13 Infineon Technologies Ag Piezoelectric resonator device comprising an acoustic reflector
US6955787B1 (en) * 2003-10-11 2005-10-18 William Paynter Hanson Integrated biological and chemical sensors

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOHN R VIG ET AL: "Chemical Sensor Based on Quartz Microresonators", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 5, no. 2, June 1996 (1996-06-01), pages 139 - 140, XP011034707, ISSN: 1057-7157 *

Also Published As

Publication number Publication date
DE102006004449A1 (en) 2007-08-09
WO2007087936A2 (en) 2007-08-09

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