WO2007046408A1

WO2007046408A1 - Plotting device and plotting method

Info

Publication number: WO2007046408A1
Application number: PCT/JP2006/320728
Authority: WO
Inventors: Daisuke Nakaya; Mitsuru Mushano
Original assignee: Fujifilm Corporation
Priority date: 2005-10-20
Filing date: 2006-10-18
Publication date: 2007-04-26
Also published as: JP2007114468A; JP4606992B2; TW200720854A

Abstract

Disclosed is a plotting device for relatively moving a stage on which a recording medium is placed and a plotting head having a plurality of plotting elements in a predetermined scan direction and causing the plotting elements to plot plotting points so as to plot an image on the recording medium. The plotting device detects a positional difference amount between the stage and the plotting head in real time and extracts a predetermined number of data pieces counted from an extraction position predetermined for each of the plotting elements from the image data, so as to generate plotting point data corresponding to plotting point sequence to be plotted by the plotting elements for each of the plotting elements and correct the extraction position with a correction amount corresponding to the detected positional difference amount in real time.

Description

Specification

Drawing apparatus and drawing method

Technical field

The present invention relates to a drawing apparatus and a drawing method that include a stage and a drawing head arranged so as to be relatively movable, and draw on a recording medium supported by the drawing head.

Background art

Conventionally, there has been known an exposure apparatus that exposes a light-sensitive material by passing light modulated by a spatial light modulator through an imaging optical system and forming an image of the light on a light-sensitive material! / This type of exposure apparatus includes a spatial light modulation element in which a large number of pixel units that modulate irradiated light according to control signals are arranged in a two-dimensional manner, a light source that irradiates light to the spatial light modulation element, and And an imaging optical system that forms an image of light modulated by a spatial light modulator on a photosensitive material, and is widely used for recording a predetermined pattern on a printed wiring board or a substrate of a flat panel display. Used.

In this type of exposure apparatus, for example, an LCD (Liquid Crystal Display Element), a DMD (Digital Micromirror Device), or the like is used as the spatial light modulation element. The DMD is a mirror device that is two-dimensionally arranged on a semiconductor substrate such as a number of rectangular micromirror force silicons that change the angle of the reflecting surface in accordance with a control signal.

[0004] When a predetermined wiring pattern or the like is exposed on a substrate using such an exposure apparatus, it is necessary to expose the desired wiring pattern or the like at a desired position on the substrate. Matching is necessary.

However, for example, the relative position of the DMD with respect to the exposure surface may be temporarily shifted due to the influence of disturbances such as vibration transmitted to the exposure apparatus. For example, density unevenness and exposure position deviation may occur. And the quality of the exposed image may be deteriorated.

[0006] Therefore, in order to solve this problem, a method has been proposed in which an exposure head having a DMD and a stage on which a substrate is placed are placed on an active or passive vibration isolator (for example, (See Patent Document 1). [0007] In addition, a desired pattern is displayed on the transmissive liquid crystal display element, and this is exposed on a photosensitive substrate on the stage, and the movement error of the stage is detected in real time using a laser interferometer or the like. There has been proposed a method for correcting a stage movement error in real time by changing a pattern displayed on a transmissive liquid crystal display element (see, for example, Patent Document 2).

Patent Document 1: Japanese Patent Laid-Open No. 11-327657

Patent Document 2: JP-A-2004-319899

Disclosure of the invention

Problems to be solved by the invention

[0008] However, the method described in Patent Document 1 has a problem that the cost of the vibration isolator becomes very high when the exposure apparatus becomes large and heavy.

In addition, the technique described in Patent Document 2 described above is a force that detects a movement error of the stage in real time and changes a pattern displayed on the transmissive liquid crystal display element so as to cancel the error. The above-mentioned Patent Document 2 specifically describes how to change the pattern so as to cancel the stage movement error. Therefore, this technique is applied to an apparatus for drawing an image on a recording medium by drawing a drawing point by a plurality of drawing elements while relatively moving a stage on which the recording medium is placed and a drawing head having a plurality of drawing elements. Even if applied, deterioration of image quality due to occurrence of abnormalities such as vibrations may not be effectively suppressed.

The present invention has been made to solve the above-described problems, and provides a drawing apparatus and a drawing method capable of suppressing deterioration in image quality due to occurrence of abnormality such as vibration without causing an increase in cost. The purpose is to do.

Means for solving the problem

[0011] The drawing apparatus according to the first aspect of the present invention provides the plurality of drawing elements while relatively moving a drawing head having a stage on which a recording medium is placed and a plurality of drawing elements in a predetermined scanning direction. In the drawing apparatus that draws an image on the recording medium by drawing a drawing point, the storage component that stores the input image data, and the positional deviation amount between the stage and the drawing head are detected in real time. Misalignment detection The drawing component data corresponding to the drawing point sequence to be drawn by the drawing element is extracted for each drawing element by taking out a predetermined number of data from the output component and the drawing position force predetermined for each drawing element from the image data. A drawing point data generation component to be generated; and a correction component that corrects the extraction position in real time with a correction amount corresponding to the detected positional deviation amount.

The drawing apparatus according to the present invention draws drawing points by a plurality of drawing elements while relatively moving a drawing head having a stage on which a recording medium is placed and a plurality of drawing elements in a predetermined scanning direction. Thus, an image is drawn on the recording medium. For example, the drawing head can be an exposure head equipped with a spatial light modulator or a liquid droplet ejection head that ejects liquid droplets.

[0013] The misregistration amount detection component renders the misregistration amount between the stage and the drawing head in real time, ie, draws an image on a recording medium by relatively moving the stage and the drawing head in the scanning direction. Detect during.

[0014] The drawing point data generation component corresponds to the drawing point sequence to be drawn by the drawing element by taking out the image data force stored in the storage component from the data of the extraction position force predetermined constant determined for each drawing element. Drawing point data is generated for each drawing element. A drawing point sequence is drawn by each drawing element based on the drawing point data generated for each drawing element, and an image is formed on the recording medium.

[0015] Here, if a position shift occurs between the stage and the drawing head due to vibration or the like, the position of the image formed on the recording apparatus is shifted, which causes the image to deteriorate.

[0016] Therefore, the correction component moves the take-out position in real time with a correction amount corresponding to the position shift amount detected by the position shift amount detection component, that is, the stage and the drawing head relatively move in the scanning direction! Corrections are made sequentially during the process.

[0017] In this way, the amount of positional deviation between the stage and the drawing head is detected, and the extraction position for generating the drawing point data is changed according to the amount of positional deviation. It is possible to prevent the quality of the image from deteriorating due to the raw drawing point being displaced. In addition, a device that does not require a special device for correcting the amount of misalignment can be configured at low cost. [0018] It should be noted that the direction in which the addresses of the storage components are continuous and the arrangement direction in which the drawing point data corresponding to the respective drawing points drawn in time series in the scanning direction match are matched. The image processing apparatus may further include a storage control component that stores the input image data in the storage component. As a result, when the drawing point data is generated, the image data can be continuously read from the storage component, and the drawing point data can be generated at high speed.

[0019] Further, the positional deviation amount detection component detects a positional deviation amount between the stage and the drawing head in a first direction and a positional deviation amount in a second direction orthogonal to the first direction. Can do. In this case, the extraction position can be corrected with the same correction amount for each drawing element.

[0020] Further, a correction table data storage component that stores correction table data indicating a correspondence relationship between the positional deviation amount and the correction amount is further provided, and the correction component is detected based on the correction table data. A correction amount corresponding to the amount of misalignment can be obtained.

[0021] Further, the misregistration amount detection component further detects a misregistration amount in the rotation direction of the stage and the drawing head, and the correction table data storage component includes the correspondence relationship for each drawing element. Correction table data indicating that may be stored. Thereby, it is possible to correct the positional deviation of the drawing point with higher accuracy.

[0022] The drawing method according to the second aspect of the present invention provides the plurality of drawing elements while relatively moving a drawing head having a stage on which a recording medium is placed and a plurality of drawing elements in a predetermined scanning direction. By drawing a drawing point, the amount of positional deviation between the stage and the drawing head is detected in real time in accordance with a drawing method for drawing an image on the recording medium. Predetermined extraction position force Stores a predetermined number of data from the image data stored in the component, thereby generating and detecting drawing point data corresponding to the drawing point sequence to be drawn by the drawing element for each drawing element. The extraction position is corrected in real time with a correction amount corresponding to the amount of positional deviation.

[0023] According to the present invention, the positional deviation amount between the stage and the drawing head is detected, and this position is not detected. Since the extraction position when generating the drawing point data is changed according to the amount, it is possible to suppress the deterioration of the image quality due to the position of the drawing point being shifted due to the occurrence of an abnormality such as vibration. In addition, a device that realizes this method without the need to provide a special device for correcting the amount of displacement can be configured at low cost.

The invention's effect

[0024] According to the present invention, there is an effect that it is possible to suppress degradation of image quality due to occurrence of an abnormality such as vibration without causing an increase in cost.

Brief Description of Drawings

FIG. 1 is a perspective view showing an appearance of an exposure apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a configuration of a scanner of the exposure apparatus.

FIG. 3A is a plan view showing an exposed area formed on a photosensitive material.

FIG. 3B is a diagram showing an arrangement of exposure areas by each exposure head.

FIG. 4 is a perspective view showing a schematic configuration of an exposure head of the exposure apparatus.

FIG. 5 is a partially enlarged view showing a configuration of a digital micromirror device (DMD).

FIG. 6A is an explanatory diagram for explaining the operation of DMD.

FIG. 6B is an explanatory diagram for explaining the operation of the DMD.

[FIG. 7A] FIGS. 7A and 7B are plan views showing the arrangement of exposure beams and scanning lines in a case where the DMD is not inclined (FIG. 7A) and in a case where the DMD is inclined (FIG. 7B).

[FIG. 7B] FIGS. 7A and 7B are plan views showing the arrangement of the exposure beams and the scanning lines in the case where the DMD is not inclined (FIG. 7A) and in the case where the DMD is inclined (FIG. 7B).

FIG. 8A is a perspective view showing a configuration of a fiber array light source.

FIG. 8B is a front view showing the arrangement of light emitting points in the laser emission part of the fiber array light source.

FIG. 9 is a block diagram of a control system of the exposure apparatus.

FIG. 10 is a perspective view showing a configuration of a position measurement unit.

FIG. 11 is a schematic diagram for explaining the relationship between the address space in the image data storage unit and the image data stored in the image data storage unit as seen from the power of the storage control unit.

FIG. 12A is a diagram for explaining a method for creating frame data. FIG. 12B is a diagram for explaining a method for creating frame data.

FIG. 12C is a diagram for explaining a method for creating frame data.

FIG. 12D is a diagram for explaining a method for creating frame data.

FIG. 12E is a diagram for explaining a method for creating frame data.

FIG. 12F is a diagram for explaining a method for creating frame data.

FIG. 12G is a diagram for explaining a method for creating frame data.

FIG. 12H is a diagram for explaining a method for creating frame data.

[Figure 13] The power of the frame data creation unit

FIG. 5 is a schematic diagram for explaining a relationship with frame data stored in a frame data storage unit.

FIG. 14 is a diagram schematically showing the positional relationship between image data stored in an image data storage unit and drawing points.

FIG. 15 is a block diagram of a control system of an exposure apparatus according to a modification.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, an exposure apparatus according to an embodiment of the present invention will be described with reference to the drawings.

[0027] (Configuration of exposure apparatus)

As shown in FIG. 1, the exposure apparatus includes a flat plate-like moving stage 152 that holds a sheet-like photosensitive material 150 on the surface thereof. Two guides 158 extending along the stage moving direction STM are installed on the upper surface of the thick plate-shaped installation table 156 supported by the four legs 154. The moving stage 152 is arranged so that its longitudinal direction faces the stage moving direction, and is supported by a guide 158 so as to be reciprocally movable. Note that this exposure apparatus is provided with a stage drive unit 15 (see FIG. 9), which will be described later, that drives a moving stage 152 as a sub-scanning component along a guide 158.

A gate 160 is provided at the center of the installation table 156 so as to straddle the moving path of the moving stage 152. Each end of the gate 160 is fixed to both side surfaces of the installation table 156. A scanner 162 is provided on one side of the gate 160, and a plurality of (for example, two) sensors 164 for detecting the front and rear ends of the photosensitive material 150 are provided on the other side. A scanner 162 and a sensor 164 are each attached to the gate 160 to move the moving step. It is fixedly arranged above the moving path of the page 152. The scanner 162 and the sensor 164 are connected to a control unit (not shown) that controls them.

As shown in FIGS. 2 and 3B, the scanner 162 includes a plurality of (for example, 14) exposure heads 166 arranged in a matrix of m rows and n columns (eg, 3 rows and 5 columns). Yes. In this example, four exposure heads 166 are arranged in the third row in relation to the width of the photosensitive material 150. It should be noted that the individual exposure heads arranged in the m-th row and the n-th column are denoted as exposure head 16 6.

mn

An exposure area 168 by the exposure head 166 has a rectangular shape with a short side in the sub-scanning direction SS. Therefore, as the moving stage 152 moves, a strip-shaped exposed area 170 is formed in the photosensitive material 150 for each exposure head 166. Note that the exposure area by the individual exposure heads arranged in the m-th row and the n-th column is expressed as an exposure area 168.

mn

In addition, as shown in FIGS. 3A and 3B, each of the exposure heads 166 in each row arranged in a line so that the strip-shaped exposed regions 170 are arranged without gaps in the direction orthogonal to the sub-scanning direction These are arranged at predetermined intervals in the arrangement direction (natural number times the long side of the exposure area, twice in this example). Therefore, the exposure between exposure area 168 and exposure area 168 in the first row

11 12 Unlit areas are exposed by exposure area 168 in the second row and exposure area 168 in the third row.

21 31 can. In FIG. 3A, the speed of one constant low-speed scan in the sub-scan direction is 40 mmZs, for example.

As shown in FIGS. 4 and 5, the exposure head 166

ll to 166 are incident light beams mn

As a spatial light modulation element that modulates the image for each pixel in accordance with image data, a digital micromirror device (DMD) 50 manufactured by Texas Instruments Inc. is provided. The DMD 50 is connected to a later-described DMD dryer 13 (see FIG. 9) having a data processing unit and a mirror drive control unit. The data processing unit of the DMD driver 13 generates a control signal for driving and controlling each micromirror in the region to be controlled by the DMD 50 for each exposure head 166 based on the input image data. Further, the mirror drive control unit controls the angle of the reflection surface of each micromirror of the DMD 50 for each exposure head 166 based on the control signal generated by the data processing unit. The control of the angle of the reflecting surface will be described later. [0033] On the light incident side of the DMD 50, a fiber array light source having a laser emitting portion in which the emitting end portion (light emitting point) of the optical fiber is arranged in a line along the direction corresponding to the long side direction of the exposure area 168 66, a lens system 67 for correcting the laser light emitted from the fiber array light source 66 and collecting it on the DMD, and a mirror 69 for reflecting the laser light transmitted through the lens system 67 toward the DMD 50 are arranged in this order. Yes. The lens system 67 includes a condensing lens that condenses laser light as illumination light emitted from the fiber array light source 66, and a rod-shaped optical integrator (hereinafter referred to as a rod integrator) inserted in the optical path of the light that has passed through the condensing lens. ) And an imaging lens placed on the mirror 69 side in front of this rod integrator. The condensing lens, the rod integrator, and the imaging lens cause the laser light emitted from the fiber array light source 66 to enter the DMD 50 as a light beam that is close to parallel light and has a uniform beam cross-sectional intensity.

The laser light emitted from the lens system 67 is reflected by the mirror 69 and irradiated to the DMD 50 via a TIR (total reflection) prism.

Further, on the light reflection side of the DMD 50, an image forming optical system 51 for forming an image of the laser light reflected by the DMD 50 on the photosensitive material 150 is disposed. The imaging optical system 51 includes a plurality of imaging lenses for enlarging and projecting an image, and a large number of microlenses corresponding to each pixel of the DMD 50 are arranged two-dimensionally between the plurality of imaging lenses. It is possible to configure by inserting a microlens array.

As shown in FIG. 5, the DMD 50 has a large number of mirrors (for example, 1024 × 768) on the SRAM cell (memory cell) 60 (FIGS. 6A and 6B). (Micromirror) 62 is a mirror device in which 62 is arranged in a lattice pattern. In each pixel, a rectangular micromirror 62 supported by a support is provided at the top, and a material having high reflectivity such as aluminum is deposited on the surface of the micromirror 62. The reflectivity of the micro mirror 62 is 90% or more, and the arrangement pitch is 13.7 m as an example in both the vertical and horizontal directions. Directly below the micromirror 62 is a silicon gate CMOS SRAM cell 60 manufactured on a normal semiconductor memory manufacturing line via a support including a hinge and a yoke, and the entire structure is monolithic. Has been.

[0037] When a digital signal is written to the SRAM cell 60 of the DMD 50, the matrix supported by the column is supported. The mouth mirror 62 is tilted in a range of ± degrees (for example, ± 12 degrees) with respect to the substrate side on which the DMD 50 is disposed with the diagonal line as the center. FIG. 6A shows a state tilted to + α degrees when the micromirror 62 is on, and FIG. 6B shows a state tilted to α degrees when the micromirror 62 is off. Therefore, by controlling the tilt of the micromirror 62 in each pixel of the DMD 50 according to the image signal as shown in FIG. 5, the laser light incident on the DMD 50 is reflected in the tilt direction of each micromirror 62. .

FIG. 5 shows an example of a state in which a part of the DMD 50 is enlarged and the micromirror 62 is controlled to + α degrees or α degrees. The on / off control of each micromirror 62 is performed by the DMD driver 13 connected to the DMD 50. In addition, a light absorber is disposed in the direction in which the laser light reflected by the microphone mirror 62 in the off state travels.

[0039] In addition, it is preferable that the DMD 50 is arranged with a slight inclination so that the short side forms a predetermined angle (for example, 0.1 ° to 5 °) with the sub-scanning direction! /. Fig. 7 (b) shows the scanning trajectory of the reflected light image (exposure beam) 53 by each micromirror when the DMD 50 is not tilted, and Fig. 7 (b) shows the scanning trajectory of the exposure beam 53 when the DMD 50 is tilted.

[0040] In DMD50, a number of micromirrors 62 are arranged in the longitudinal direction (for example, 1024) Micromirror array force A number of ^ 1_ (for example, 756 yarns) in the short direction is arranged Figure 7B Thus, by tilting the DMD 50, the pitch P 1S of the scanning trajectory (scan line) of the exposure beam 53 by each micromirror 62 P 1S scan line pitch when the DMD 50 is not tilted.

2

H It becomes narrower than P, and the resolution can be greatly improved. Meanwhile, the inclination angle of DMD50

1

Is very small, so scan width W when DMD50 is tilted and DMD50 tilt

2

The scan width w in the absence is substantially the same.

1

In addition, the same scanning line is overlaid and exposed (multiple exposure) by different micromirror arrays. Thus, by performing multiple exposure, variations in exposure position are averaged, and high-definition exposure can be realized. Further, joints between a plurality of exposure heads arranged in the main scanning direction can be connected without any step by controlling a very small amount of exposure position.

[0042] It should be noted that the same effect can be obtained by arranging the micromirror rows in a staggered manner by shifting them by a predetermined interval in a direction orthogonal to the sub-scanning direction instead of inclining the DMD 50. As shown in FIG. 8A, the fiber array light source 66 includes a plurality of (for example, 14) laser modules 64, and one end of a multimode optical fiber 40 is coupled to each laser module 64. The other end of the multimode optical fiber 40 is coupled with an optical fiber 31 having the same core diameter as the multimode optical fiber 40 and a cladding diameter smaller than the multimode optical fiber 40. As shown in detail in FIG. 8B, seven ends of the optical fiber 31 opposite to the multimode optical fiber 40 are arranged along the main scanning direction orthogonal to the sub-scanning direction, and they are arranged in two rows. (First row: Rl, second row: R2) The laser emitting section 68 is configured.

[0044] As shown in FIG. 8B, the laser emitting portion 68 constituted by the end portion of the optical fiber 31 is sandwiched and fixed between two support plates 65 having a flat surface. In addition, it is desirable that a transparent protective plate such as glass be disposed on the light emitting end face of the optical fiber 31 for protection. The light exit end face of the optical fiber 31 is easy to collect dust and easily deteriorate because of its high light density, but by arranging the protective plate as described above, it prevents dust from adhering to the end face and delays deterioration. be able to.

[0045] The laser module 64 is constituted by a combined laser light source (fiber light source).

The combined laser light source includes a plurality of chip-like lateral multimode or single mode GaN semiconductor lasers arrayed and fixed on a heat block, and a collimator lens provided corresponding to each of the GaN semiconductor lasers. It is composed of one condenser lens and one multimode optical fiber 40. Further, instead of a plurality of collimator lenses, a collimator lens array in which these lenses are integrated can also be used.

Next, the electrical configuration of the exposure apparatus of this example will be described with reference to FIG.

As shown in FIG. 9, the control unit 10 that controls the entire exposure apparatus receives the image data output unit 70 that outputs the image data to be exposed and the image data output from the image data output unit 70, and The received image data is stored in the image data storage unit 71. The storage control unit 72 and the image data stored in the image data storage unit 71 are subjected to rotation processing or matrix transposition processing and stored in the frame data storage unit 73. A frame data creation unit 74 that creates and outputs frame data based on the image data stored in the data storage unit 73, and a D based on the frame data output from the frame data creation unit 74. DMD driver 13 that outputs a control signal to MD50, LD driver 14 that controls the drive of laser module 64, stage drive unit 15 that controls the movement of moving stage 152, and stage position measuring unit 20 that measures the position of moving stage 152 When the frame data is created by the misalignment amount computing unit 75 and the frame data creating unit 74 that computes the displacement amount of the moving stage 152 with respect to the exposure head 166 based on the measurement result of the stage position measuring unit 20. A memory 76 in which correction table data indicating a correspondence relationship between the read position of the image data and the positional deviation amount calculated by the positional deviation amount calculation unit 75 is stored in advance is connected. A broken line arrow from the exposure head 166 to the moving stage 152 represents exposure.

[0047] It should be noted that the storage control unit 72 and the frame data creation unit 74 each store a program for executing a predetermined procedure, and the control unit 10 controls the operation of the apparatus according to the procedure of the program. The predetermined procedure executed by each program will be described in detail later.

[0048] As the image data storage unit 71 and the frame data storage unit 73, any device can be used as long as the stored data can be read sequentially in the direction in which the addresses are continuous, for example, using DRAM. May be. Further, a storage component from which stored data is read out by so-called burst transfer may be used. Large data such as image data is usually stored on inexpensive DRAM, and as a result, it has a demerit that it is slower than random access.

The stage position measurement unit 20 is provided to obtain the position and displacement amount of the moving stage 152 (position displacement amount of the moving stage 152 with respect to the exposure head 166). As shown in FIG. 10, the stage position measuring unit 20 includes an X direction position measuring unit 42 that measures the position of the moving stage 152 in the X direction, and a Y direction position that measures the position of the moving stage 152 in the Y direction. A measurement unit 44 and a Z direction position measurement unit 46 that measures the position of the moving stage 152 in the Z direction are provided.

[0050] The X-direction position measurement unit 42 emits a laser beam to the side mirror 26 installed on the side surface of the moving stage 152 extending in the moving direction, and the side mirror 26, and detects the reflected light to detect the side mirror 26. And an X-direction laser length measurement unit 21 that measures the distance to the [0051] The Y-direction position measurement unit 44 emits laser light to the cube mirrors 27 and 28 installed on the side surfaces of the moving stage 152 extending in a direction orthogonal to the moving direction, and the reflected light from the cube mirror 27. Measures the distance to the cube mirror 27 by detecting the first 方向 direction laser length measurement unit 22 and the laser beam is emitted to the cube mirror 28 and the reflected light is detected to measure the distance to the cube mirror 28 And a second saddle direction laser length measuring unit 23.

The heel direction position measurement unit 46 is a surface facing the exposure head 166 of the moving stage 152 and is disposed on a portion of the surface where the photosensitive material 150 is not adsorbed. The laser beam is emitted to the top mirror 29 and the reflected light is detected, and the laser beam is emitted to the top mirror 30 and the reflected light is detected. And a second laser direction laser length measuring unit 25 for measuring the distance to the upper surface mirror 30.

In FIG. 10, only one X-direction laser length measuring unit 21 is provided, but actually, the displacement amount of the moving stage 152 in the X direction during the exposure was obtained. For this purpose, it is assumed that a sufficient number of X direction laser length measuring units 21 are provided.

[0054] Furthermore, only one X-direction laser length measuring unit 21 may be provided, and the length of the side mirror 26 may be set to a length sufficient for obtaining the amount of displacement during exposure.

[0055] Further, the top mirrors 29 and 30 for measuring the position in the eyelid direction can also have a sufficient length for obtaining the amount of displacement during exposure.

Hereinafter, a method for measuring the amount of displacement (displacement) of the moving stage 152 with respect to the exposure head 166 will be specifically described.

[0057] First, laser light is emitted from the X-direction laser length measurement unit 21 to the side mirror 26, and the first and second direction laser length measurement units 22 and 23 respectively transmit cube cubes 27. , 28, and laser light is emitted from the first Ζ direction laser length measurement unit 24 and the second Ζ direction laser length measurement unit 25 to the upper surface mirrors 29 and 30, respectively.

[0058] The laser light emitted from the X-direction laser length measuring unit 21 is reflected by the side mirror 26, and the reflected light is detected by the X-direction laser length measuring unit 21 to measure the distance to the side mirror 26. Is done. Also emitted from the first and second longitudinal laser length measuring units 22, 23 The laser light is reflected by the cube mirrors 27 and 28, and the reflected lights are detected by the first and second Y-direction laser length measuring units 22 and 23, respectively, and the distances to the cube mirrors 27 and 28 are measured. . Similarly, the laser beams emitted from the first and second Z-direction laser length measuring units 24 and 25 are reflected by the upper surface mirrors 29 and 30, and the reflected light is reflected in the first and second Z-direction laser length measuring units, respectively. The distances to the top mirrors 29 and 30 detected by the units 24 and 25 are measured.

[0059] Based on the measurement result of the X-direction position measurement unit 42, the position information XI of the movement stage 152 in the X direction is obtained, and based on the measurement result of the Y-direction position measurement unit 44, the movement stage 152 Position information Yl and Y2 in the Y direction are obtained, and based on the measurement result of the Z direction position measurement unit 46, the position information Zl and Z2 in the Z direction of the moving stage 152 are obtained.

The stage drive unit 15 moves the moving stage 152 along the Y direction. This exposure apparatus is provided with a linear encoder that outputs a pulse signal as the moving stage 152 moves, and detects position information and scanning speed of the moving stage 152 based on the pulse signal from the linear encoder. is doing. The stage drive unit 15 can move the moving stage 152 at a constant speed based on the pulse signal of linear encoder. The stage position measurement unit 20 performs position measurement for each predetermined number of pulses, and outputs the measurement result (position information) to the position deviation amount calculation unit 75.

The misregistration amount calculation unit 75 uses the X direction of the moving stage 152 relative to the exposure head 166 and the X direction and Y direction of the moving stage 152 measured by the stage position measuring unit 20. The positional deviation amounts Xa and Ya in the Y direction and the rotation angle Θ on the XY plane of the moving stage 152 are obtained.

[0062] The positional deviation amount Xa in the X direction of the moving stage 152 relative to the exposure head 166, the positional deviation amount Ya in the Y direction, and the positional information XI, Y1 acquired by the stage position measuring unit 20 and the moving stage 152 are ideal Reference position information when moving to (reference position information) It can be obtained by calculating the difference between XO and YO. The positional deviation amount Ya in the Y direction may be obtained by calculating the difference between the position information Y1 or Y2 and the reference position information YO, or the average value of the position information Yl and Υ2 and the reference position information. Calculate the difference from ΥΟ You may ask for. Note that the reference position YO in the Y direction, which is the moving direction of the moving stage 152, is determined according to the current position of the moving stage 152. Therefore, for example, when the movement stage 152 starts to move with the origin position force, the reference position information YO in the Y direction at the current position can be obtained from the elapsed time of the current force and the movement speed of the movement stage 152. Monkey.

[0063] Further, the difference between the position information Yl and Υ2 is obtained, and from this and the distance (fixed value) between the first Υ direction laser length measurement unit 22 and the second Υ direction laser length measurement unit 23, Χ-回転 Find the rotation angle Θ of the moving stage 152 on the plane.

[0064] The positional shift amounts Xa, Ya and the rotation angle Θ obtained in this way are output to the control unit 10.

(Operation of exposure apparatus)

The exposure operation of this exposure apparatus will be described below.

First, in an image data output unit 70 such as a computer, image data corresponding to an image to be exposed on the photosensitive material 150 is created, and the image data is output to the exposure apparatus. The image data is received by the storage controller 72 of the exposure apparatus.

Here, for example, a method of creating frame data when the number “2” as shown in FIG. 11 is drawn on the exposure surface will be described. Note that circles 1 to 8 shown in FIGS. 12A to 12H schematically show DMD micromirrors.

First, as shown in FIG. 11, the storage control unit 72 corresponds to a plurality of drawing points drawn side by side in the direction AD where the addresses in the image data storage unit 71 continue and the scanning direction SD of the DMD 50. The image data storage unit 71 stores the drawing point data forming the image data so that the arrangement direction in which the plurality of drawing point data to be stored matches. FIG. 11 is a schematic diagram for explaining the relationship between the address space in the image data storage unit 71 and the image data stored in the image data storage unit 71 as viewed from the storage control unit 72. When the image data output from the image data output unit 70 is vector data, the storage control unit 72 converts the vector data into bitmap data, and then stores the drawing point data as described above. Do. [0069] After all the drawing point data is stored in the image data storage unit 71 as described above, the drawing point data stored in the image data storage unit 71 is read out by the frame data creation unit 74. At this time, as shown in FIGS. 12A to 12H, the frame data creating unit 74 sequentially reads the drawing point data stored in the image data storage unit 71 by a predetermined number of pixels in the direction in which the addresses are continuous, and FIG. As shown by “mirror 1 (MR1)” to “mirror 8 (MR8)” on the right side of FIG. 12H, a drawing point data group of each micromirror is acquired. The drawing point data corresponding to the white and hatched square drawing points shown in FIGS. 12A to 12H is OFF data “0”, and the drawing point data corresponding to the black square drawing points is ON data “1”. It is. Further, the range of the hatched square portion indicates a substantial range of the image drawn on the drawing surface, and the drawing point data is “0”, which is the same as the white square.

[0070] The method of reading the drawing point data stored in the image data storage unit 71 is not necessarily limited to the method of reading one drawing point data once. For example, the drawing point data is sampled while sampling at a predetermined pitch. By reading the data, one drawing point data may be read several times, or the drawing point data may be thinned and read. The resolution of the image data can be converted by reading as described above.

[0071] Then, the frame data creation unit 74 stores each drawing point data of the drawing point data group of each micromirror acquired as described above in the frame data storage unit 73. At this time, as shown in FIG. 13, the frame data creation unit 74 matches the direction in which the addresses in the frame data storage unit 73 are continuous with the arrangement direction in which drawing point data belonging to the same frame data is stored. The drawing point data is stored in the frame data storage unit 73 as described above. In FIG. 13, black circled numbers arranged in the direction in which the addresses are continuous represent a mirror, and numbers arranged in a direction orthogonal to the direction in which the addresses are continuous represent a frame.

FIG. 13 is a schematic diagram for explaining the relationship between the address space in the frame data storage unit 73 and the frame data stored in the frame data storage unit 73 as viewed from the frame data creation unit 74. is there. By storing the drawing point data group of each micromirror in the frame data storage unit 73 as described above, the frame data creation unit 74 can substantially reduce the image data stored in the image data storage unit 71. This means that 90-degree rotation processing or matrix transposition processing has been performed. Then, after storing the drawing point data of each micromirror in the frame data storage unit 73 as described above, the frame data creation unit 74 has the address of the drawing point data stored in the frame data storage unit 73. Each frame data 1 to 15 is sequentially read out in the continuous direction and is sequentially output to the DMD driver 13, and the DMD driver 13 generates a control signal corresponding to the input frame data. The frame data as described above is generated for each DMD 50 of each exposure head 166.

[0074] Then, a control signal for each exposure head 166 is generated as described above, and a stage drive control signal is output from the control unit 10 to the stage drive unit 15, and the stage drive unit 15 outputs the stage drive control signal. Accordingly, the moving stage 152 is moved along the guide 158 in the stage moving direction at a desired speed. When the moving stage 152 passes under the gate 160 and the front end of the photosensitive material 150 is detected by the sensor 164 attached to the gate 160, a control signal is output from the DMD driver 13 to the DMD 50 of each exposure head 166. The drawing of each exposure head 166 is started.

Then, the photosensitive material 150 moves at a constant speed together with the moving stage 152, the photosensitive material 150 is scanned in the direction opposite to the stage moving direction by the scanner 162, and a strip-shaped exposed region 70 is formed for each exposure head 166. It is formed.

Here, during the exposure by the exposure head 166, the displacement amounts Xa and Ya and the rotation angle Θ calculated by the displacement amount calculation unit 75 are input to the control unit 10 in real time at predetermined time intervals.

[0077] When all of the positional deviation amounts Xa, Ya and the rotation angle Θ are '0', the control unit 10 determines that the positional deviation of the moving stage 152 has occurred, and indicates this. The information is output to the frame data creation unit 74. As a result, when reading the drawing point data stored in the image data storage unit 71, the frame data creation unit 74 reads the drawing point data from the normal reading positions indicated by circles 1 to 8 in FIGS. 12A to 12H. .

On the other hand, if any one of the displacement amounts Xa, Ya and the rotation angle Θ is not “0”, it is determined that the displacement of the moving stage 152 has occurred, and the image data storage unit 71 Information on the amount of correction for correcting the readout position in the X and Y directions when the stored drawing point data is read out is output to the frame data creation unit 74. [0079] Specifically, referring to the table data stored in the memory 76, the read position correction amounts in the X direction and the Y direction corresponding to the positional deviation amounts Xa and Ya and the rotation angle 0 are obtained to obtain the frame data. Output to the creation unit 74.

[0080] The memory 76 stores the X-direction readout position correction amount Χρ and the Υ-direction readout position correction amount Υρ and the positional deviation amount for each drawing point when the frame data creation unit 74 creates the frame data. Correction table data indicating the correspondence between Xa, Ya and rotation angle Θ is stored in advance.

[0081] Here, the reading position correction amount Xp in the X direction and the reading position correction amount Yp in the Y direction are the normal reading position when the image data force stored in the image data storage unit 71 reads the drawing point data, That is, the distance between the reading position when the moving stage 152 is not displaced and the corrected reading position is represented by the number of pixels.

Hereinafter, with reference to FIG. 14, the correction amount of the readout position when the positional deviation amounts Xa and Ya of the moving stage 152 are both one pixel in the positive direction will be described.

FIG. 14 schematically shows the relationship between the image data 71 A (image represented by) stored in the image data storage unit 71 and the drawing point 80 corresponding to the micromirror of the exposure head 166. . In the figure, the right direction is the positive direction in the X direction, the downward direction is the positive direction in the Y direction, and the opposite directions are the negative directions.

[0084] When the positional deviation amount Xa, Ya of the moving stage 152 relative to the exposure head 166 is one pixel in the positive direction, the positional deviation amount of the drawing point 80 relative to the moving stage 152 is reversed. When reading the drawing point data of each drawing point 80 from the image data 71A and reading the normal reading position force as it is, the image finally formed on the photosensitive material 150 is the X direction and It will be shifted by 11 pixels in the Y direction. Therefore, in this case, the reading position in the X direction and the Y direction when reading the drawing point data of each drawing point 80 from the image data 71A is shifted by one pixel for the normal reading position force. The position of the image formed on the material 150 can be corrected to a normal position.

That is, as shown in FIG. 14, the image data 71 A force stored in the image data storage unit 71 is also normal in the X and Y directions when the drawing point data of each drawing point 80 is read out. The reading position is corrected so that the drawing point data of each drawing point 80 is also read out at positions (Xt-1, Yt-1) that are shifted by one pixel in the X and Y directions from the reading position (Xt, Yt). To do.

Therefore, the correction table data includes, for each drawing point that can eliminate the positional deviation of the image for various combinations of the positional deviation amounts Xa, Ya and the rotation angle Θ of the moving stage 152. Reading position correction amounts Xp and Yp are set respectively. When the reading position is corrected only in the X direction and the Υ direction, which does not require correction for the shift of the rotation angle Θ, the reading position correction amount is the same at each drawing point 80. It is also possible to use correction table data with the angle Θ data omitted.

Then, as described above, when the scanning of the photosensitive material 150 by the scanner 162 is completed and the rear end of the photosensitive material 150 is detected by the sensor 164, the moving stage 152 is moved by the stage driving unit 15. After returning to the origin on the most upstream side of the gate 160 along the guide 158 and installing a new photosensitive material 150, it moves again at a constant speed from the upstream side of the gate 160 to the downstream side along the guide 158. To do.

In this way, the amount of displacement of the moving stage 152 is detected in real time, and the position of the drawing point data read from the image data 71A is corrected according to the amount of displacement, so that the moving stage 152 is moved to the moving stage 152 by vibration or the like. Even when the positional deviation occurs, it is possible to suppress the deterioration of the image quality. In addition, since only the drawing point data reading position is changed, an apparatus that requires special hardware for correction can be configured at low cost.

Note that, in the above description, the case where the displacement of the moving stage 152 is detected is described as 1S. The present invention is not limited to this, and the displacement of the exposure head 166 may be detected.

Further, the exposure apparatus described above may further include a compression processing unit 72 に in the storage control unit 72 and a decompression processing unit 74 に in the frame data creation unit 74 as shown in FIG. Then, with respect to the image data received by the storage control unit 72, V is compressed in the arrangement direction for a plurality of drawing point data corresponding to a plurality of drawing points drawn side by side in the scanning direction. The arrangement direction in which the compressed drawing point data subjected to the compression processing is stored is the same as the direction in which the addresses of the image data storage unit 71 continue. Alternatively, the compressed drawing point data may be stored in the image data storage unit 71. When creating the frame data, the frame data creation unit 74 sequentially reads the compressed drawing point data from the image data storage unit 71 in the direction in which the addresses are continuous, and the read data is read out. After the decompression processing unit 74A performs decompression processing on the compressed drawing point data, the decompressed rendering point data before compression is stored in the frame data storage unit 73 in the same manner as described above. It may be. The processing after the drawing point data is stored in the frame data storage unit 73 is the same as described above.

In the above description, after the drawing point data is subjected to compression processing, the compressed drawing point data is stored in the image data storage unit 71. However, the drawing point data is described above. In the same manner as described above, the image data is stored in the image data storage unit 71. Thereafter, the drawing point data stored in the direction in which the addresses in the image data storage unit 71 are consecutively compressed is subjected to compression processing. It may be stored in the image data storage unit 71 again.

[0092] When binary data is used as the drawing point data, run-length compression processing can be used as the compression processing.

In the above embodiment, a memory having the same force in which the image data storage unit 71 and the frame data storage unit 73 are provided separately may be used.

Further, in the above embodiment, the exposure apparatus provided with the DMD as the spatial light modulation element has been described. However, in addition to such a reflective spatial light modulation element, a transmissive spatial light modulation element is used. You can also GLV (Grating Light Valve) may also be used.

In addition, the drawing point forming unit of the present invention is not limited to a spatial light modulation element, and a plurality of light emitting elements arranged may be used.

In the above-described embodiment, a so-called flat bed type exposure apparatus has been described as an example. However, a so-called outer drum type exposure apparatus having a drum around which a photosensitive material is wound may be used.

In addition, the photosensitive material 150 to be exposed in the above embodiment may be a printed circuit board or a display filter. Further, the shape of the photosensitive material 150 may be a sheet shape or a long shape (flexible substrate or the like).

Further, the drawing method and apparatus in the present invention are applied to a printer such as an ink jet method. This can also be applied to drawing control. For example, the drawing point by ink ejection can be controlled by the same method as in the present invention. In other words, the drawing element in the present invention can be considered by replacing it with an element that strikes a drawing point by ejecting ink or the like.

Claims

The scope of the claims

[1] The recording point is drawn by drawing the drawing points by the drawing elements while relatively moving a drawing head having a stage on which the recording medium is placed and the drawing elements in a predetermined scanning direction. A drawing device for drawing an image on a medium,

A storage component for storing input image data;

A displacement amount detection component for detecting in real time a displacement amount between the stage and the drawing head;

A drawing point that generates drawing point data corresponding to a drawing point sequence to be drawn by the drawing element for each drawing element by taking out a predetermined number of data from a predetermined extraction position for each drawing element. A data generation component;

A correction component for correcting the take-out position in real time with a correction amount corresponding to the detected positional deviation amount;

A drawing apparatus comprising:

[2] The direction in which the addresses of the storage components are continuous and the arrangement direction in which the drawing point data corresponding to the respective drawing points drawn in time series in the scanning direction match are matched. The drawing apparatus according to claim 1, further comprising a storage control component that stores the input image data in the storage component.

[3] The positional deviation amount detection component detects at least one of a positional deviation amount between the stage and the drawing head in a first direction and a positional deviation amount in a second direction orthogonal to the first direction. The drawing apparatus according to claim 1 or 2.

[4] A correction table data storage component that stores correction table data indicating a correspondence relationship between the positional deviation amount and the correction amount,

4. The drawing device according to claim 1, wherein the correction component obtains a correction amount corresponding to the detected positional deviation amount based on the correction table data.

[5] The misregistration amount detection component detects a misregistration amount in the rotation direction of the stage and the drawing head,

The correction table data storage component is the correspondence relationship for each drawing element. The drawing apparatus according to claim 4, wherein correction table data indicative of

[6] The drawing according to any one of claims 1 to 5, wherein the drawing head is at least one of an exposure head provided with a spatial light modulator and a liquid droplet ejection head that ejects liquid droplets. apparatus.

[7] The recording point is drawn by drawing the drawing points with the plurality of drawing elements while relatively moving a drawing head having a stage on which the recording medium is placed and a plurality of drawing elements in a predetermined scanning direction. A drawing method for drawing an image on a medium,

The drawing element is detected by detecting the amount of positional deviation between the stage and the drawing head in real time, and taking out a predetermined number of data for each drawing element from image data stored in a storage component. Generate drawing point data corresponding to the drawing point sequence to be drawn for each drawing element,

A drawing method for correcting the take-out position in real time with a correction amount corresponding to the detected displacement amount,