WO2007031571A1

WO2007031571A1 - Conveying device for a flexible supporting ribbon

Info

Publication number: WO2007031571A1
Application number: PCT/EP2006/066393
Authority: WO
Inventors: Sigmund Niklas; Ewald Weckerle
Original assignee: Mühlbauer Ag
Priority date: 2005-09-16
Filing date: 2006-09-15
Publication date: 2007-03-22
Also published as: TW200738545A; DE102005044425A1; EP1924517A1; WO2007031571B1

Abstract

The invention relates to a conveying device and a method for moving a flexible supporting ribbon (1) step by step at a predetermined speed of travel and along a predetermined path of travel (7, 20) within an apparatus that processes semiconductor components and/or applies the same to the supporting ribbon (1). A roll (11, 25) which can be moved perpendicular to the plane of the supporting ribbon (1) and by means of which the supporting ribbon (1) can be deflected is arranged as a drive unit for performing the stepwise movement. A displacement path (12, 22) and a displacement speed of the roll (11, 25) are proportionate to the path of travel (7, 20) and the speed of travel of the supporting ribbon (1).

Description

Transport device for a flexible carrier tape

description

The invention relates to a transport device for the progressive movement of a flexible carrier tape within a semiconductor components processing and / or applying to the carrier tape device with a predeterminable feed rate and a predeterminable feed path according to the preamble of claim 1. Furthermore, the invention relates to a method for moving progressively the flexible carrier tape within the device according to the preamble of claim 8.

Carrier tapes, such as woven tapes, are often used in the semiconductor industry, and more particularly in the manufacture of smart labels, to sequentially transfer semiconductor devices, such as microchips, to the tape in a step-by-step process within a device, with each microchip, for example an antenna, which is already arranged on the band, may be assigned. For this purpose, the belt is moved stepwise underneath an application unit in order to enable transfer of the microchip to the belt during its standstill.

For the production of smart labels, semiconductor chips are removed by means of a removal device, referred to as a flipper, from a wafer mounted on a foil acting as a first carrier. In such flip-chip machines, the removed chip or dice is flipped by the flipper, that is to say its top and bottom interchanged, and then by means of a pick-and-place system to form a second flat carrier to be transported and placed on it representing substrate. This substrate is for example the woven tape.

Since such a chip is to be applied to a predetermined position of the woven tape having the bonding contacts for bonding the chip to the substrate, accurate positioning of the chip on the woven tape to be loaded is required. For a high throughput of the semiconductor devices applying device or this semiconductor devices verifying or processing device is also a rapid feed of the carrier tape during a Fortbewegungsschrittes and its exact positioning during a standstill step is required.

Conventionally, such carrier tapes by means of a Reibradantriebes which two rollers, similar to the Spannradprinzip, can rest from above and below on the carrier tape to pull it between the rollers, progressively. This friction-based drive principle requires in particular for rapid step movements of the belt with feed, the feed may have different lengths clock units, high demands on the exact operation of such Reibradkonstruktionen, this accuracy decreases in particular in a wear of the mostly rubber-bonded friction wheels. As a result, the chips with their connections can not be assigned exactly to the terminals of the antennas already arranged on the woven ribbon in an automated process.

In addition, by means of an L-guiding principle by slightly twisting the longitudinal axes of several rollers around which the carrier tape is guided, a centering of the carrier tape necessarily performed, especially when using thin and narrow Webbändern within a transport device by the deviation of the woven tape during the gradual movement is required. Such the L-guiding principle performing roles are costly as an overall arrangement in their production.

Accordingly, the present invention has for its object to provide a transport device for the gradual movement of a flexible carrier tape within a semiconductor components processing and / or applying to the carrier tape device available, which allows a simple and fast way a precise, gradual transport of the carrier tape and inexpensive in their manufacture. Of the way It is an object of the invention to provide a method for carrying out such a stepwise movement.

This object is achieved on the device side by the features of patent claim 1 and, on the process side, by the features of patent claim 8.

The core idea of the invention is that a transport device for the stepwise movement of a flexible carrier tape within a semiconductor components processing and / or on the carrier tape applying device with a predeterminable advance speed and a predeterminable feed path as a drive unit for performing the stepwise movement one perpendicular to the plane the carrier tape has a displaceable roller, by means of which the carrier tape is deflectable, wherein a displacement and a displacement speed of this roller are proportional to the feed path and the feed rate of the carrier tape. Such a simply designed drive unit can press, for example, from above on the carrier tape, wherein the roller is arranged on the underside of the drive unit and is in contact with the top surface of the carrier tape.

Now, if this drive unit, for example, by means of a drive motor and a between the roller and the drive motor extending spindle, such as a KR spindle, moved down to the predeterminable displacement, finds a deflection or deflection of the carrier tape down to the role around instead of. As a result, by a sliding movement of the roller to the predeterminable displacement path, the carrier tape in a work area, in which, for example, the flip chips are applied to the carrier tape or on the woven tape, moved to the opposite of the displacement twice as long feed path. This has the consequence that only half the distance per movement step or cycle unit must be covered for the implementation of the sliding movement of the role, resulting in a gradual progression of movement with high clock frequency. This leads to a high speed of the transport device and thus to a high throughput of the overall device. In addition, such a simple drive structure of the transport device allows low production costs of those. - A -

A first retaining element is for local locking of the carrier tape within the device - viewed in the feed direction of the carrier tape - arranged in front of the drive unit to alternately with a second retaining element, which is arranged behind the drive unit to hold the carrier tape. Such an alternating holding process of the two retaining elements, which is tuned to the timing of the progressive movement of the carrier tape and can be identical to this, allows the feed of the carrier tape by moving the role from its starting position to a target position during a first clock unit, in which second retaining member locks the carrier tape to make a tensile stress acting only against the incoming and not the expiring part of the carrier tape. Once the sliding movement of the roller has been performed by a predeterminable displacement, the first retaining element is closed so that it locks the carrier tape relative to a previous processing area of the carrier tape, by opening the second holding member within a second clock unit at the same time as the processing step, a discharge of To enable carrier tape from the drive area by shifting back the role to its starting position. This takes place by the locking of the first retaining element without affecting the carrier tape section that is currently in the processing area instead.

Such retaining elements preferably have rubber surfaces for increasing the frictional force between the retaining element and the carrier tape. These rubber surfaces may act under pressure on the carrier tape, preferably in a region where no chips are arranged.

A third retaining element can be arranged according to a preferred embodiment for local locking of the carrier tape in the initial region of the processing or processing and / or Auftragungsbereiches the device. This, in conjunction with the first retaining element, which is arranged in the end region of the processing and / or application area, arresting the carrier tape at both ends of the processing area, so that a positionally accurate arrangement or application of flip chips arranged on contacts of already on the carrier tape Antennas or, for example, a review of the existing contact points can be performed. Further advantageous embodiments, in particular also the method already described emerge from the subclaims.

Advantages and expediencies can be found in the following description in conjunction with the single figure. This figure shows a schematic side view of a transport device with a carrier tape within a die applying the chips and verifying or processing device according to an embodiment of the invention.

A flexible carrier tape 1 is rolled up on a supply roll 2 and is unrolled from this. In the context of such a unwinding operation, a buffer roll 4, which is pressurized by means of a compressed air cylinder with a proportional control valve 3, the carrier tape 1 evenly, optionally in coordination with a later-described drive unit, the transport device is supplied. In this case, the control valve can additionally control a unwinding motor not shown here for the input spool station.

The carrier tape 1 is in a Indexeranfangsbereich, which serves the actual processing area for application of Flipchipmodulen (FCM area), steered around a quarter-circle plate 5 with adjustable side boundary to prevent or compensate for the wake of a roll with adjustable flange.

A retaining element 6, as a third retaining element with respect to a first retaining element 8 and a second retaining element 14, is not in the region of a drive unit 10, 11, but in the initial region of the application section of the carrier strip in which the flip chips, which are not shown here, are applied arranged. This third retaining element 6 is used together with the first retaining element 8 to avoid sequelae, resulting from tracking properties of roles and the cooperating carrier tape and an accurate positioning of the Trägerband- section during the Flipchip-, Auftrage-, and positioning process on the carrier tape.

The carrier tape is moved in sections by a feed path 7 forward - ie from left to right - in which the drive unit 10, 1 1 by a displacement path 12 down is shifted, as shown by the double arrow 13. Previously, the carrier tape is deflected over a quarter circle plate 9.

A displacement of the drive units 10, 11 according to the invention, which consists of the roller 11, which consists of POM material, and the adjusting motor 10 with interposed KR spindle for carrying out a maximum displacement of 120 mm 12, can from an overhead start position in take place an underlying target position so as to cause a deflection of the carrier tape around the roller 11. As a result, by the displacement of the drive unit 10, 11 down to a certain displacement 12, a further transport of the carrier tape 1 by a feed path 7, which corresponds to almost twice the displacement path 12 causes.

The drive unit additionally has an adjustable flanged wheel and optionally a change kit for recessing already applied microchips.

Subsequently, within a buffer station, which is composed of the sheets 15, 18 and the roller 17 and the air cylinder with the proportional control valve 3, the carrier tape passes through another station in which a permanent connection between the flip chip and the carrier tape is manufactured and tested , For this purpose, the carrier tape, independently of the first processing station in which the flip chips are applied, is cyclically pulled forwards by a feed path 20 due to the buffer region 16, 17 by means of a further drive unit 24, 25, whereby first and third retaining elements 21, 19 serve for accurate positioning of the carrier tape portion within the processing area. Again, a deflection over a quarter circle plate 23 takes place.

The drive unit, which in turn is composed of the adjusting motor 24 and the roller 25 and a spindle arranged therebetween, can be displaced in the up and down direction, as indicated by the double arrow 26, in order to move almost by means of a predeterminable, freely selectable displacement path 22 To get twice as long feed path 20. Subsequently, in turn, a deflection of the carrier strip 1 in interaction with a further second holding element 28 is effected via a quarter-circle plate 27 and removed by means of a friction-wheel drive 29 from the entire device.

The feed time for 20 mm may be 70-80 ms, for example.

An inventive method for gradually moving the flexible carrier tape within the transport device according to the invention can proceed as follows:

1. For about 15 ms takes place a clamping of the second retaining member 14 by the carrier tape can not be moved in this area. Now a Postbondaufnahme is carried out within this time.

2. Within the next 15 ms, the first retaining element 8 is opened to move the roller 1 1 down the displacement path 12 within the next 60 ms in a 20 mm distance down. This results in the Prebondaufnahme.

3. Within a further approx. 15 ms, the clamping of the first retaining element 8 is switched on, in order to carry out an application process of the flip chips within the application region, which lies between the first and the third retaining element 8, 6.

4. Subsequently, the clamping of the second retaining element 14 is opened within 15 ms and the roller 11 is displaced backwards into its starting position in about 200 ms from bottom to top.

Such a process takes place similarly in the area of manufacture and testing of the contacting (Finalbond and Finalbondtester), wherein a downward movement of the roller 25 over a period of 500 ms at a 550 mm distance and a final displacement of the roll 25 upwards over a period of 5000 ms takes place. All disclosed in the application documents features are claimed as essential to the invention, provided they are new individually or in combination over the prior art.

LIST OF REFERENCE NUMBERS

1 carrier tape

2 input roller

3 air cylinder with control valve 4 buffer roll

5, 9, 15, 18, 23, 27 quarter circle plates

6, 19 third retaining elements 7, 20 feed paths

8, 21 first retaining elements 10, 24 adjusting motors

11. 25 rolls

12, 22 displacement paths

13. 26 sliding movement 14, 28 second retaining elements 16, 17 buffer station

29 friction wheel device

Claims

Transport device for a flexible carrier tape Patent claims

1. Transport device for stepwise movement of a flexible carrier tape (1) within a semiconductor components processing and / or on the carrier tape (1) applying device with a predeterminable feed rate and a predeterminable feed path (7, 20), characterized in that as a drive unit for the implementation of the stepwise movement of a perpendicular to the carrier belt (1) displaceable roller (11, 25), by means of which the carrier tape (1) is deflectable, is arranged, wherein a displacement path (12, 22) and a sliding speed of the roller (11, 25) are proportional to the feed path (7, 20) and the feed rate of the carrier tape (1).

2. Transport device according to claim 1, characterized in that the displaceable roller (11, 25) via a spindle with an adjusting motor (10, 24) is connected.

3. Transport device according to claim 1 or 2, characterized by a first retaining element (8, 21) for local locking of the carrier tape (1) within the device, wherein the first retaining element (8, 21) - viewed in the feed direction of the carrier tape (1) - is arranged in front of the drive unit.

4. Transport device according to one of claims 1-3, characterized by a second retaining element (14, 28) for local locking of the carrier tape (1) within the device, wherein the second retaining element (14, 28) - in the feed direction of the carrier tape (1). considered - behind the drive unit is arranged.

5. Transport device according to one of claims 3 or 4, characterized in that the first and the second retaining element (8, 21, 14, 28) each have at least one rubber surface for increasing the frictional force between the retaining element (8, 21, 14, 28). and the carrier tape (1).

6. Transport device according to one of claims 3-5, characterized in that the first and the second retaining element (8, 21, 14, 28) are alternately actuated in their locking function.

7. Transport device according to one of the preceding claims, characterized by a third retaining element (6, 19) for local locking of the carrier tape (1) - in the feed direction of the carrier tape (1) viewed - in the beginning of a processing and / or Auftragungsbereiches the device ,

8. A method for progressively moving a flexible carrier tape (1) within a semiconductor components processing and / or on the carrier tape (1) auftra- ing device with a predeterminable feed rate and a predeterminable feed path (7, 20), characterized in that a movement step of a roller (11, 25) is moved perpendicular to the plane of the carrier tape (1) with a predetermined displacement and a predetermined displacement speed to deflect the carrier tape (1) by the roller (11, 25), wherein the displacement speed and the displacement (12, 22) of the feed speed and the feed path (7, 20) are proportional.

9. The method according to claim 8, characterized in that a first retaining element (8, 21) the carrier tape (1) within the device - viewed in the feed direction of the carrier tape (1) - in front of the roller (11, 25) locally locked while the Semiconductor devices are applied and / or processed and the roller (11, 25) is moved to its initial position in which the carrier tape (1) undergoes little or no deflection.

10. The method according to claim 8 or 9, characterized in that a second retaining element (14, 28) the carrier tape (1) within the device - viewed in the feed direction of the carrier tape - behind the roller (11, 25) locally locked while the roller (11, 25) is displaced to the maximum possible deflection of the carrier tape (1) by the maximum displacement path (12, 22) and the first Festhal- teelement (8, 21) the carrier tape (1) is not locked.