WO2006128733A2 - Appareil de mesure par coordonnees et procede pour mesurer un objet a l'aide d'un appareil de mesure par coordonnees - Google Patents

Appareil de mesure par coordonnees et procede pour mesurer un objet a l'aide d'un appareil de mesure par coordonnees Download PDF

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Publication number
WO2006128733A2
WO2006128733A2 PCT/EP2006/005355 EP2006005355W WO2006128733A2 WO 2006128733 A2 WO2006128733 A2 WO 2006128733A2 EP 2006005355 W EP2006005355 W EP 2006005355W WO 2006128733 A2 WO2006128733 A2 WO 2006128733A2
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
measuring
optical
coordinate
interferometer
Prior art date
Application number
PCT/EP2006/005355
Other languages
German (de)
English (en)
Other versions
WO2006128733A3 (fr
Inventor
Rainer Tutsch
Matthias ANDRÄS
Wolfgang Rauh
Ralf Christoph
Original Assignee
Werth Messtechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Werth Messtechnik Gmbh filed Critical Werth Messtechnik Gmbh
Priority to DE112006001423.4T priority Critical patent/DE112006001423B4/de
Publication of WO2006128733A2 publication Critical patent/WO2006128733A2/fr
Publication of WO2006128733A3 publication Critical patent/WO2006128733A3/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37193—Multicoordinate measuring system, machine, cmm
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37287—Fiber optic interferometer

Definitions

  • the invention relates to a coordinate measuring machine comprising an at least two coordinate axes in particular automatically movable as machine-controlled probe with at least one object to be measured non-contact scanning optical sensor, in particular as a working on the principle of operation of an interferometer point-acting distance sensor (interferometer sensor) is. Furthermore, the invention relates to a method for measuring an object by means of a coordinate measuring machine using an automatically movable in at least two coordinate axes probe system with an object to be measured non-contact optical sensor, in particular a working according to the principle of operation of an interferometer point-acting distance sensor (interferometer Sensor).
  • Coordinate measuring machines are used to measure geometric features of workpieces such as length, diameter, angle, angularity and parallelism. Almost all device forms are based on Cartesian coordinate axes with linear scales. Measuring carriages in the axles are moved either manually or by a motor. On one of the axes, usually on the vertical Z-axis (quill), is a sensor attached to record measuring points. In the case of a tactile sensor, the position of the three measuring carriages are read out each time the probe is touched with the object, and the point coordinates on the surface of the object to be measured are determined therefrom.
  • Optoelectronic sensors such.
  • image processing sensors usually have their own mostly two-dimensional measuring range.
  • Multi-sensor coordinate measuring machines which make it possible to measure an object with more than one sensor.
  • sensors basically optical, tactile and optotactile sensors come into question (DE Christoph Z., Ralf et al: Multisensor Coordinate Metrology, The Library of Technology, Volume 248).
  • Multi-sensor coordinate measuring devices are known from the prior art, which comprise a video sensor and a laser probe, which are both set up on a common beam path for detecting a same measuring point on the workpiece, and a tactile-working sensor (DE-C-38 06 686).
  • the combination key comprises a key support with a first and a second sensing device, one of which is an interference optical sensor.
  • DE-A-103 31 966 an optical measuring device is known in which an interferometer is used for the quantitative and / or qualitative determination of the nature of a surface geometry of an object.
  • Corresponding techniques can be found in DE-A-101 31 780 or DE-A-101 31 779 or DE-C-102 93 797.
  • EP-BI 082 581 can be seen. It is also known from DE-U-200 08 721.5 to connect optical deflection of sensors via an interface with a coordinate measuring machine.
  • Object of the present invention is to develop a coordinate measuring machine and a method for measuring an object of the type mentioned so that an application for a variety of measurement tasks is possible, with high precision and small dimensions to be measured.
  • the measurements should be fast and accurate.
  • the object is essentially achieved by a coordinate measuring machine of the type mentioned initially in that the exit angle and / or the angular position and / or length of the measuring beam path of the at least one optical sensor and / or the measuring beam paths of at least two optical sensors integrated in the coordinate measuring machine are desired Structures of the object is adaptable or adjustable and that the measurement results for the different exit angles and / or angular positions and / or lengths by successive measurement of the optical sensor or with respect to the different exit angles and / or angular positions and / or lengths in a uniform coordinate system are available.
  • an operating principle based on the functional principle of an interferometer is used as the optical sensor, which is also referred to below as an interferometer sensor in a simplified manner.
  • the radiation reflected by the object is evaluated.
  • partially coherent light is used.
  • the optical sensor can also be a chromatic distance sensor or a laser distance sensor, to name, for example, further optical sensors that are used in the teaching according to the invention.
  • the senor can be connected to interchangeable angle optical attachments in order to obtain the desired measuring beam direction or length.
  • the senor or the sensors which have differing exit angles and / or angular positions and / or beam lengths in the different measurement tasks, are metered on one another in order to have measurement results available in a uniform coordinate system, that is preferably that of the coordinate measuring apparatus.
  • the calibration takes place via calibration standards, which may be rings, spheres, polygonal objects or other suitable elements.
  • optical sensor For reasons of simplification, the following is basically spoken of an interferometer sensor as the optical sensor, without this being intended to limit the teaching according to the invention. Rather, all possible optical sensors are suitable for realizing the teaching according to the invention, provided that the beam paths required for this purpose are present.
  • interferometer sensor - called interferometer sensor - in the coordinate measuring machine other sensors of the coordinate measuring such as contact sensors and / or image processing and / or laser and / or tactile-optical fiber probe and / or measuring probe and / or switching button and / or laser distance sensor are integrated.
  • the sensors integrated in the coordinate measuring machine can be measured in their positions and / or directions and the measurement results can be made available in a uniform coordinate system.
  • the interferometer sensor has replaceable designed optical fibers, through which the optical beam is guided to the measuring location.
  • the optical conductor can also be referred to as a measuring conductor or measuring needle.
  • the exit angles of the sensor beam path from the measuring conductors can be designed differently.
  • the exit angles of the measuring conductors are designed such that, taking into account the aperture angles of the sensors, possible surface inclinations of the measuring objects in the range from 0 ° to 90 ° or 0 ° to 180 ° are detected.
  • the measuring conductors are arranged rotatable about the measuring conductor axis.
  • the physically effective axis of rotation of the measuring needle is determined by measuring the sensor on a calibrated normal and then taken into account correcting the use of the sensor.
  • calibrated rings and / or calibrated balls can be used as a calibration standard.
  • the absolute position of the sensor characteristic within the coordinate measuring machine is preferably measured for each angular position by measuring the position of a calibrated standard.
  • the absolute position of the sensor characteristic curve is determined in order to determine the sensor characteristic position by interpolation during subsequent measuring for intermediate angular positions.
  • the interferometer sensor is preferably connected via a rotary or rotary pivot joint with the coordinate measuring machine, wherein the pivot point of the rotary or rotary swivel joint should be located close to the touch point of the sensor or at the touch point of the sensor itself.
  • Systematic measurement errors that depend on the angle inclination between the sensor measuring axis (optical axis) and the material surface are corrected by the fact that the deviation is previously stored by measuring a normal in the coordinate measuring machine when the deviation is determined, and then during measurement be taken into account correcting workpieces with the sensor.
  • Tilt angle dependent errors can be detected by measuring a ball standard. Alternatively, measurements can be taken on inclined planes. It is also possible to measure tilt-dependent errors by tilting a measuring surface with a rotary or rotary pivot axis integrated in the coordinate measuring machine.
  • the measuring conductors are preferably made exchangeable via an exchange interface. Replaceable measuring conductors can be exchanged and replaced via a probe changing magazine of a coordinate measuring machine. In this case, the mechanical interface of the probe changing magazine of other sensors used, in particular tactile sensors correspond, so that in this respect is given a compatibility.
  • sensors with correspondingly differently designed measuring needles can also be used.
  • the overall contour can be determined from measuring points which are determined by different sensors.
  • contours are detected by the scanning principle with the interferometric sensor in the coordinate measuring machine by adjusting one or more coordinate axes of the coordinate measuring device of the deflection detected by the sensor so that the touched material surface point is approximately in the middle the sensor characteristic is located.
  • the entire interferometer sensor can be replaced via a sensor change interface against other sensors such as tactile sensors or image processing sensors.
  • a movement in an additional feed axis can be carried out simultaneously during the scanning operation and with a further feed axis simultaneously tangential or approximately tangential to the material surface are moved to scan multidimensional contours on the material surface.
  • the delivery movement can take place meandering.
  • Other travel paths such as helix and / or spiral line are also possible.
  • the characteristic curve of the interferometer sensor for different workpiece surface types is measured with the axes of the coordinate measuring machine, whereby the measured values are assigned to specific movement positions of the coordinate axes (XYZ).
  • the setting parameters for the scanning operation of the coordinate measuring machine are stored for different workpiece surfaces and used for scanning.
  • the selection of suitable control parameters for the scanning control is derived from the result of the calibration process of the characteristic of the sensor on the concrete material surface.
  • points with another z. In addition to the measurement points that are measured with the interferometer sensor, points with another z. B. tactile or image sensor to be measured in order then to correct the measured by the interferometer sensor point cloud geometrically by the measured with the other sensor points.
  • the sensors can be adjusted independently of each other and / or along different axes.
  • the measurement object can be turned around or pivoted by rotary or rotary pivot axes during the measurement to the interferometer sensor in order to achieve an optimal alignment of the optical beam.
  • the measurement object is automatically swiveled or rotated by means of a rotary or rotary pivot axis during the scanning process with the interferometer sensor into an optimal angular position for the scanning operation, wherein typically measurement point normal and optical axis of the measurement beam run parallel to one another.
  • the setpoint for screwing in or swiveling in the measurement object should be a 90 ° position between the scanning line formed from adjacent measurement points and the sensor beam path.
  • the target value for the screwing or swiveling in of the test object can be a 90 ° position between the scanning line formed from adjacent measuring points and the optical measuring axis.
  • the direction of the scanning line can be effected by compensation calculation from two or more measuring points.
  • contamination is present on the workpiece to be measured, such as oil, water or similar substances, it is envisaged that corresponding contamination will be masked out of the measurement result when measuring with the interferometer sensor, that when measuring more than one layer with the interferometer. Sensor, the layer furthest away from the sensor is taken into account for measurement.
  • a method for measuring an object by means of a coordinate measuring machine using an automatically movable in at least two coordinate axes probe system with an object to be measured non-contact optical sensor, in particular a working according to the principle of operation of an interferometer point-acting distance sensor (interferometer sensor) is characterized in that desired surface structures such as surface slopes of the object are measured with the at least one and / or at least two optical sensors with adaptable or adjustable measuring beam exit angle and / or measuring beam angle position and / or measuring beam length, and the measurement results for the different exit angles and / or angular positions and / or lengths by measuring the sensor (s) in relation to one another with respect to the different exit angles and / or angular positions and / or beam lengths in a uniform coordinate be made available.
  • an operating according to the operating principle of the interferometer optical sensor is used using partially coherent light.
  • the invention provides that in addition to the optical sensor such as interferometer sensor other sensors of the coordinate measuring technique, such as contact sensors and / or image processing and / or laser and / or tactile-optical fiber probe and / or measuring probe and / or switching buttons and / or laser distance sensors are integrated into the coordinate measuring machine.
  • the sensors should be adjusted independently of each other and / or along different axes.
  • 1 is a schematic diagram of a coordinate measuring machine
  • FIG. 2 is a schematic diagram relating to the measurement of different angular positions
  • 6 is a schematic diagram of a probe change magazine
  • 7 is a schematic representation of measurements with different angle attachments of a sensor as well as a contour curve determined therefrom,
  • Fig. 8 is a schematic diagram for determining a sensor characteristic
  • Fig. 9 is a schematic diagram for determining the spatial position of a sensor characteristic.
  • Fig. 1 is purely in principle a coordinate measuring machine 10 with z. B. consisting of granite existing base frame 12 with measuring table 14, on which a workpiece 16 is arranged, which is to be measured.
  • a portal 18 in the Y direction of the coordinate system of the coordinate measuring machine 10 is adjustable.
  • columns or uprights 20, 22 are slidably supported on the base frame 12. From the columns 20, 22, a traverse 24 goes along, so according to the drawing in the X direction, a carriage 26 is adjustable, which in turn receives a quill or column 28 which is adjustable in the Z direction.
  • the quill or column 28 has in the exemplary embodiment two sensors.
  • One of the sensors 30 may be a distance sensor. This can also be replaced, for example, by a mechanical button or an optotactile button.
  • the second sensor 32 which is designed according to the invention, preferably operates according to the principle of an interferometer, without this limiting the teaching according to the invention. Instead of a sensor operating according to the interferometric principle, it is also possible, for example, to use a laser distance sensor. For reasons of simplification, an interferometer sensor is referred to below, without this being mentioned as limiting the teaching.
  • This interferometer sensor 32 is connected via a rotary swivel joint 34 with the quill 28. From the rotary swivel joint goes a housing 36 with within these sem running measuring or light guide 38, through which the particular partially coherent radiation for non-contact probing of the object 16 is imaged on this, then, due to the reflected back into the light guide 38 radiation according to the interferometri principle to measure the workpiece 16.
  • the interferometer sensor 32 or the housing 36 accommodating the optical waveguide 38 can be exchanged via an exchangeable interface in order to use, to the desired extent, other measuring conductors or other sensors such as tactile sensors.
  • the optical waveguide 38 with straight measuring beam 42 is shown in a straight line in FIG.
  • the exit beam 42 of the sensor 32 extends at an angle deviating from 0 ° to the longitudinal axis of the light guide 38 and the housing 36.
  • the measurement beam 42 at the light guide 38 may be provided with beam deflecting elements such as mirrors or prisms to achieve desired exit beam directions as mentioned.
  • the corresponding deflecting elements can be exchangeably connected to the housing 36 and the light guide 38, wherein the light guide 38 does not have to continue in the deflecting element.
  • the sensor 32 or the housing 36 having the light guide 38 starts from a rotary / pivot joint 34, which in turn is connected to the quill or the carriage 28.
  • Angle attachments 40 are connected to the housing 36 in order to allow the measuring beam 42, which is guided via the optical waveguide 38 and emerging from the angle optical attachment 40, to drop onto the surface of the object 16 to be measured at the desired angle.
  • the exchangeable angle optical attachments 40 are designed differently in order to align the measuring beam 42 at a desired angle ⁇ to the longitudinal axis of the optical waveguide 38.
  • a calibration must be performed. Based on FIG. 2, the calibration of different angular positions is illustrated in principle. Taking account of the embodiment of FIG. 1, the housing 36 is interchangeably connected to three angle attachments 44, 46, 48, via which the respective measuring beam 42 deviating from each other angle to the longitudinal axis of the light guide 28, ie the exit angle from the sensor differ from each other. To calibrate the various angular positions of the angle optics attachments 44, 46, 48, a calibration ball 50 is used which is keyed using the various angle optics attachments 44, 46, 48.
  • FIG. 3 different probing positions 52, 54, 56, 58, 60, 62, 64 are shown. These can be touched on the ball 50 with each respective angle lens attachment 44, 46, 48. The points are correspondingly measured with each angle optical attachment 52, 54, 56, 58, 60, 62, 64 and calculated from the respective points the respective ball center point positions. The offset of the respective angle optical attachment 44, 46, 48 from one another results from the sphere center point positions. The same applies to the case that not a sensor with different angle optical attachments is used, but a plurality of sensors having correspondingly different angle angles.
  • the swivel head 66 is connected to the carriage or quill 28, which comprises a holder 68 with swivel joint 70 which slidably receives the sensor 32 along a guideway 72.
  • the guideway 72 is formed such that the sensor 32 is movable along the arrow 74, wherein the operating point 76 of the sensor 32 comes to lie in the middle of the pivoting range.
  • the surface inclination dependence of the sensor 36 is determined experimentally.
  • an adjustment plane 78 is moved about the operating point 80 of the sensor 36.
  • the measuring points of the sensor 36 are recorded for each angular position of the Ein industrybene 78 and plotted in a curve. This characteristic is then used for the correction of the sensor behavior as a function of the angle of inclination of the surface.
  • the probe changing magazine 82 comprises a total of three parking possibilities of sensors, wherein in the embodiment, a tactile-working sensor and two according to the teaching of the invention working optical sensors or measuring needles 86, 88 are parked.
  • the measuring needles 86, 88 which can be coupled to the sensor, have deviating angle optical attachments, in order to measure different. This is symbolized by the arrows.
  • the housing receiving the optical waveguide 38 is exchangeable with the angle optical attachment as a unit.
  • the housing receiving the optical waveguide 38 is exchangeable with the angle optical attachment as a unit.
  • the left-hand illustration in FIG. 7 is intended to illustrate that measurements are carried out with special angle object attachments which enclose an angle of 90 ° or + 45 ° or -45 ° to the longitudinal axis of the light guide 38.
  • the angle attachments 90 show a 90 ° deflection direction, the angle optical attachment 92 a - 45 ° deflection and the angle optical attachment 94 a + 45 ° deflection.
  • the corresponding contour curves 96, 98, 100, 102, 104 determined therefrom are joined together to form a closed contour 106 (right-hand representation in FIG. 7) with the aid of previously measured position values of the sensors or angle optical attachments 90, 92, 94.
  • the calibration of the sensor to a calibration standard such as the ball 50 will be illustrated with reference to FIG. 7.
  • the sensor used is deflected along its measuring direction 110 (Z) by means of an angle optical attachment 108 which is deflected by - 45 °.
  • the distance values A which the sensor 108 supplies, are represented as a characteristic curve 112 over the deflection values Z.
  • This characteristic curve 1 12 is stored in a computer in order to use later for the correction of the respective measured values of the respective distance measurement value A.
  • the ball 50 should be significantly larger than the measuring range of the sensor in order to minimize errors.
  • the calibration standard 114 is measured in at least four positions each with, for example, three different distances to the calibration standard.
  • the movement of the sensor does not have to coincide with the measuring beam direction, but may deviate from this. Due to the calibration according to the invention, however, no measurement errors occur as a result. From the points with the same distance, ie 2, 6, 9, 15 or 3, 7, 1 1, 17 or 4, 8, 13, 19 then the ball centers Pl, P2 and P3 are calculated.
  • the measured value is related to the real or actual value.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

L'invention concerne un appareil de mesure par coordonnées (10) qui comprend au moins un capteur optique (32) balayant sans contact un objet à mesurer (16). L'invention vise à permettre de mesurer de petites dimensions et inclinaisons très précises de l'objet. A cet effet, l'angle de sortie et/ou la position angulaire et/ou la longueur de la trajectoire du faisceau de mesure du capteur optique (32) peuvent être adaptés pour la détection de structures désirées de l'objet (16) et les résultats de mesure pour les différents angles de sortie et/ou positions angulaires et/ou longueurs peuvent être mis à disposition dans un système de coordonnées homogène par calibrage réciproque des capteurs optiques en ce qui concerne les différents angles de sortie et/ou positions angulaires et/ou longueurs.
PCT/EP2006/005355 2005-06-03 2006-06-06 Appareil de mesure par coordonnees et procede pour mesurer un objet a l'aide d'un appareil de mesure par coordonnees WO2006128733A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE112006001423.4T DE112006001423B4 (de) 2005-06-03 2006-06-06 Koordinatenmessgerät sowie Verfahren zum Messen eines Objektes mit einem Koordinatenmessgerät

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005026022A DE102005026022A1 (de) 2005-06-03 2005-06-03 Koordinatenmessgerät sowie Verfahren zum Messen eines Objektes mit einem Koordinatenmessgerät
DE102005026022.5 2005-06-03

Publications (2)

Publication Number Publication Date
WO2006128733A2 true WO2006128733A2 (fr) 2006-12-07
WO2006128733A3 WO2006128733A3 (fr) 2007-01-18

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DE102007003059A1 (de) * 2007-01-15 2008-07-24 Technische Universität Ilmenau Verfahren zur objektivierten Fokussierung für die optische Längenmesstechnik
WO2010108365A1 (fr) * 2009-03-24 2010-09-30 Harbin Institute Of Technology Procédé de mesure de microcavité à base de collimation à longueur focale microscopique et son équipement de détection
JP2010539458A (ja) * 2007-09-14 2010-12-16 ライカ ジオシステムズ アクチエンゲゼルシャフト 表面の測定方法および測定装置
EP2667147B1 (fr) 2012-05-25 2018-07-04 Mitutoyo Corporation Configuration optique interchangeable pour stylo optique à capteur de variation chromatique
EP2153166B1 (fr) 2007-05-24 2019-12-18 Taylor Hobson Ltd. Procédé de mesure de forme de surfaces de forme libre
CN112848822A (zh) * 2021-02-25 2021-05-28 清华大学 一种测量挂车车头与货箱夹角的拉线装置及其测量方法
US11159784B2 (en) 2014-10-23 2021-10-26 Cognex Corporation System and method for calibrating a vision system with respect to a touch probe
CN113945179A (zh) * 2020-07-15 2022-01-18 卡尔蔡司工业测量技术有限公司 带有距离确定的坐标测量机的探测过程
US11650050B2 (en) 2017-02-14 2023-05-16 Renishaw Plc Method of calibrating a surface sensing device, corresponding calibrating program for a control computer and corresponding calibration kit

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WO2014191016A1 (fr) 2013-05-27 2014-12-04 Carl Zeiss Industrielle Messtechnik Gmbh Dispositif et procédé d'étalonnage d'un appareil de mesure de coordonnées
CN110057338B (zh) * 2019-05-24 2021-04-20 福建工程学院 一种基于复合测量的工件原点自适应设置方法

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DE10240292A1 (de) * 2002-08-31 2004-03-18 Carl Mahr Holding Gmbh Tasteinrichtung für vielfältige Messaufgaben

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DE102007003059A1 (de) * 2007-01-15 2008-07-24 Technische Universität Ilmenau Verfahren zur objektivierten Fokussierung für die optische Längenmesstechnik
EP2153166B1 (fr) 2007-05-24 2019-12-18 Taylor Hobson Ltd. Procédé de mesure de forme de surfaces de forme libre
JP2010539458A (ja) * 2007-09-14 2010-12-16 ライカ ジオシステムズ アクチエンゲゼルシャフト 表面の測定方法および測定装置
WO2010108365A1 (fr) * 2009-03-24 2010-09-30 Harbin Institute Of Technology Procédé de mesure de microcavité à base de collimation à longueur focale microscopique et son équipement de détection
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GB2480202B (en) * 2009-03-24 2017-04-05 Harbin Institute Technology Micro focal-length collimation based micro-cavity measuring method and detecting equipment thereof
EP2667147B1 (fr) 2012-05-25 2018-07-04 Mitutoyo Corporation Configuration optique interchangeable pour stylo optique à capteur de variation chromatique
US11159784B2 (en) 2014-10-23 2021-10-26 Cognex Corporation System and method for calibrating a vision system with respect to a touch probe
US11563931B2 (en) 2014-10-23 2023-01-24 Cognex Corporation System and method for calibrating a vision system with respect to a touch probe
US11650050B2 (en) 2017-02-14 2023-05-16 Renishaw Plc Method of calibrating a surface sensing device, corresponding calibrating program for a control computer and corresponding calibration kit
CN113945179A (zh) * 2020-07-15 2022-01-18 卡尔蔡司工业测量技术有限公司 带有距离确定的坐标测量机的探测过程
CN112848822A (zh) * 2021-02-25 2021-05-28 清华大学 一种测量挂车车头与货箱夹角的拉线装置及其测量方法
CN112848822B (zh) * 2021-02-25 2022-12-09 清华大学 一种测量挂车车头与货箱夹角的拉线装置及其测量方法

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