WO2006125162A3 - Surface and subsurface detection sensor - Google Patents
Surface and subsurface detection sensor Download PDFInfo
- Publication number
- WO2006125162A3 WO2006125162A3 PCT/US2006/019468 US2006019468W WO2006125162A3 WO 2006125162 A3 WO2006125162 A3 WO 2006125162A3 US 2006019468 W US2006019468 W US 2006019468W WO 2006125162 A3 WO2006125162 A3 WO 2006125162A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- detection sensor
- signal
- subsurface detection
- subsurface
- modulation signal
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
A sensor (100) comprises an optical modulator (102) that generates a modulation signal, an interferometer (104) that mixes an acoustic signal evoked by a pulsed laser (110) with the modulation signal to down-convert the acoustic signal to lower frequencies, and a photodetector (124) that detects the down-converted signal.
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US68212705P | 2005-05-18 | 2005-05-18 | |
US68231505P | 2005-05-18 | 2005-05-18 | |
US68229905P | 2005-05-18 | 2005-05-18 | |
US60/682,127 | 2005-05-18 | ||
US60/682,299 | 2005-05-18 | ||
US60/682,315 | 2005-05-18 | ||
US74808305P | 2005-12-06 | 2005-12-06 | |
US60/748,083 | 2005-12-06 | ||
US74659906P | 2006-05-05 | 2006-05-05 | |
US60/746,599 | 2006-05-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006125162A2 WO2006125162A2 (en) | 2006-11-23 |
WO2006125162A3 true WO2006125162A3 (en) | 2007-05-10 |
Family
ID=37432179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/019468 WO2006125162A2 (en) | 2005-05-18 | 2006-05-18 | Surface and subsurface detection sensor |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2006125162A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9488620B2 (en) | 2011-03-15 | 2016-11-08 | Purdue Research Foundation | Weak bond detection |
US11359976B2 (en) * | 2020-10-23 | 2022-06-14 | Accelovant Technologies Corporation | Multipoint surface temperature measurement system and method thereof |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4854710A (en) * | 1985-03-01 | 1989-08-08 | Therma-Wave, Inc. | Method and apparatus for evaluating surface and subsurface features in a semiconductor |
US5191465A (en) * | 1990-03-28 | 1993-03-02 | Matsushita Electric Industrial Co., Ltd. | Optical apparatus for alignment of reticle and wafer in exposure apparatus |
US5491552A (en) * | 1993-03-29 | 1996-02-13 | Bruker Medizintechnik | Optical interferometer employing mutually coherent light source and an array detector for imaging in strongly scattered media |
US20040212807A1 (en) * | 2003-04-23 | 2004-10-28 | Hanson Gregory R. | Faster processing of multiple spatially-heterodyned direct to digital holograms |
-
2006
- 2006-05-18 WO PCT/US2006/019468 patent/WO2006125162A2/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4854710A (en) * | 1985-03-01 | 1989-08-08 | Therma-Wave, Inc. | Method and apparatus for evaluating surface and subsurface features in a semiconductor |
US5191465A (en) * | 1990-03-28 | 1993-03-02 | Matsushita Electric Industrial Co., Ltd. | Optical apparatus for alignment of reticle and wafer in exposure apparatus |
US5491552A (en) * | 1993-03-29 | 1996-02-13 | Bruker Medizintechnik | Optical interferometer employing mutually coherent light source and an array detector for imaging in strongly scattered media |
US20040212807A1 (en) * | 2003-04-23 | 2004-10-28 | Hanson Gregory R. | Faster processing of multiple spatially-heterodyned direct to digital holograms |
Also Published As
Publication number | Publication date |
---|---|
WO2006125162A2 (en) | 2006-11-23 |
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