WO2006001842A3 - Electro-optic sensor - Google Patents
Electro-optic sensor Download PDFInfo
- Publication number
- WO2006001842A3 WO2006001842A3 PCT/US2005/002844 US2005002844W WO2006001842A3 WO 2006001842 A3 WO2006001842 A3 WO 2006001842A3 US 2005002844 W US2005002844 W US 2005002844W WO 2006001842 A3 WO2006001842 A3 WO 2006001842A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electro
- optic sensor
- signal
- modulation signal
- acoustic signal
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1706—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US57998604P | 2004-06-14 | 2004-06-14 | |
US60/579,986 | 2004-06-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006001842A2 WO2006001842A2 (en) | 2006-01-05 |
WO2006001842A3 true WO2006001842A3 (en) | 2007-02-08 |
Family
ID=35782207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/002844 WO2006001842A2 (en) | 2004-06-14 | 2005-02-01 | Electro-optic sensor |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2006001842A2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009029002B3 (en) * | 2009-08-28 | 2011-01-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Photoacoustic sensor and method for its production and use |
DE102009045724B3 (en) | 2009-10-15 | 2011-01-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Photoacoustic gas sensor and method for its production and use |
EP3349020A1 (en) * | 2017-01-13 | 2018-07-18 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method of and system for performing subsurface imaging using vibration sensing |
NO20200190A1 (en) * | 2020-02-14 | 2021-08-16 | Optonor As | System and method for analysing an object |
CN116113825A (en) * | 2020-07-01 | 2023-05-12 | 深视超声科技公司 | Acousto-optic harmonic imaging with optical sensor |
-
2005
- 2005-02-01 WO PCT/US2005/002844 patent/WO2006001842A2/en active Application Filing
Non-Patent Citations (2)
Title |
---|
GRAHN H.T. ET AL.: "Sound Velocity and Index of Refraction of AlAs Measured by Picosecond Electronics", APPL. PHYS. LETT., vol. 53, no. 21, 21 November 1988 (1988-11-21), pages 2023 - 2024, XP003006698 * |
YACOUBIAN A. ET AL.: "EO Polymer Based Integrated-Optical Acoustic Spectrum Analyzer", IEEE J. SELECTED TOPICS IN QUANT. ELECTR., vol. 6, no. 5, September 2000 (2000-09-01) - October 2000 (2000-10-01), pages 810 - 816, XP000981005 * |
Also Published As
Publication number | Publication date |
---|---|
WO2006001842A2 (en) | 2006-01-05 |
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