WO2006090569A1 - Organic semiconductor material, organic semiconductor film, organic semiconductor device, organic thin-film transistor, field effect transistor and switching device - Google Patents

Organic semiconductor material, organic semiconductor film, organic semiconductor device, organic thin-film transistor, field effect transistor and switching device Download PDF

Info

Publication number
WO2006090569A1
WO2006090569A1 PCT/JP2006/301959 JP2006301959W WO2006090569A1 WO 2006090569 A1 WO2006090569 A1 WO 2006090569A1 JP 2006301959 W JP2006301959 W JP 2006301959W WO 2006090569 A1 WO2006090569 A1 WO 2006090569A1
Authority
WO
WIPO (PCT)
Prior art keywords
group
organic semiconductor
semiconductor material
organic
general formula
Prior art date
Application number
PCT/JP2006/301959
Other languages
French (fr)
Japanese (ja)
Inventor
Chiyoko Takemura
Rie Katakura
Tatsuo Tanaka
Katsura Hirai
Original Assignee
Konica Minolta Holdings, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Holdings, Inc. filed Critical Konica Minolta Holdings, Inc.
Priority to JP2007504653A priority Critical patent/JPWO2006090569A1/en
Publication of WO2006090569A1 publication Critical patent/WO2006090569A1/en

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/615Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
    • H10K85/622Polycyclic condensed aromatic hydrocarbons, e.g. anthracene containing four rings, e.g. pyrene
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/464Lateral top-gate IGFETs comprising only a single gate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/466Lateral bottom-gate IGFETs comprising only a single gate

Definitions

  • Organic semiconductor materials organic semiconductor films, organic semiconductor elements, organic thin film transistors, field effect transistors, and switching elements
  • the present invention relates to an organic semiconductor material, an organic semiconductor film using the same, an organic semiconductor element, an organic thin film transistor, a field effect transistor, and a switching element using the transistor.
  • a display medium is formed using an element using liquid crystal, organic EL, electrophoresis, or the like.
  • the technology that uses TFT elements that are active drives as image drive elements has become the mainstream.
  • these TFT elements are formed on a glass substrate, and liquid crystal, organic EL elements, etc. are sealed.
  • TFT elements are manufactured by forming multiple layers and forming source, drain, and gate electrodes sequentially on the substrate. The manufacture of such TFT elements usually requires sputtering and other vacuum manufacturing processes.
  • organic semiconductor materials have been energetically advanced in recent years as an organic compound having a high charge transporting property.
  • These compounds are not only charge transport materials for organic EL devices, but also organic laser oscillation devices such as those discussed in Science, 289 ⁇ ⁇ ⁇ ⁇ ⁇ , 599 (2000), etc. It is expected to be applied to organic thin-film transistors that have been reported in a number of papers such as (Nature), April 03, 521 (2000). If these organic semiconductor devices can be realized, there is a possibility of obtaining a semiconductor that can be dissolved by simplifying the manufacturing process by vacuum or low-pressure deposition at a relatively low temperature and further improving its molecular structure appropriately.
  • the organic semiconductor solution is made into an ink by a printing method including an ink jet method. Manufacturing by these low-temperature processes has been considered impossible for conventional Si-based semiconductor materials, but devices using organic semiconductors have the potential, and thus the above-mentioned limitations on substrate heat resistance are present.
  • a TFT element can be formed on a transparent resin substrate. If a TFT element is formed on a transparent resin substrate and the display material can be driven by the TFT element, the display will be It is lighter and more flexible than the ones, and it can be a display that does not crack (or very hard to break) when dropped.
  • organic semiconductor materials poly-ethylene biylene, polypyrrole, polythiophene, oligothiophene, pentacene and the like have been studied. Especially, the polyacene compounds such as pentacene have high carrier mobility. It has been reported that semiconductor device characteristics can be obtained. Also, polyacene compounds or polyacene compound derivatives are disclosed (see, for example, Patent Documents 1 to 4 and Non-Patent Document 1), all of which are suitable for solution process suitability, carrier mobility, and semiconductor device characteristics. It is not enough in terms of compatibility, and further development of organic semiconductor materials is desired!
  • Patent Document 1 Pamphlet of International Publication No. 03Z16599
  • Patent Document 2 Pamphlet of International Publication No. 03Z28125
  • Patent Document 3 U.S. Pat.No. 6,690,029
  • Patent Document 4 Japanese Unexamined Patent Application Publication No. 2004-107216
  • Non-Patent Document 1 Science, 303, pp. 1644–1646 (2004) Disclosure of Invention
  • An object of the present invention is to provide an organic semiconductor material that has good characteristics as a transistor including deterioration over time and that can be easily formed into a thin film by coating, an organic semiconductor film using the organic semiconductor material, an organic semiconductor element, an organic thin film transistor, and It is an object to provide a field effect transistor and a switching element using the transistor.
  • X to X each represents a substituent
  • R to R represent a hydrogen atom or a substituent, respectively.
  • nl to n4 each represents an integer of 0 to 5. However, when nl to n4 are all 0, R
  • At least one of 8 is a substituent, not all hydrogen atoms.
  • X to X each represents a substituent
  • R to R represent a hydrogen atom or a substituent, respectively.
  • nl ⁇ ! ⁇ 4 represents an integer of 0 to 4, respectively.
  • nl to n4 are all 0, and R, R, R, and R are
  • R, R, R, and R are each a hydrogen atom.
  • nl to n4 are all 0, and one of R and R is an alkyl group And the other is a hydrogen atom, one of R and R is an alkyl group and the other is a hydrogen atom
  • one of X and X is an alkyl group and the other is a hydrogen atom.
  • X is an alkyl group and the other is a hydrogen atom.
  • R, and R are each a hydrogen atom.
  • one of R and R is an alkyl group and the other is a hydrogen atom.
  • An organic semiconductor element comprising the organic semiconductor material according to any one of 1 to 9 above.
  • An organic thin film transistor comprising the organic semiconductor material according to any one of 1 to 9 in a semiconductor layer.
  • a field-effect transistor comprising the organic semiconductor material according to any one of 1 to 9 above in a semiconductor layer.
  • a switching element comprising the organic thin film transistor according to 12 or the field effect transistor according to 13.
  • an organic semiconductor material that has good characteristics as a transistor including deterioration with time and that can be easily formed into a thin film by coating, an organic semiconductor film using the organic semiconductor material, and an organic semiconductor It was possible to provide a body element, an organic thin film transistor, a field effect transistor, and a switching element for the transistor.
  • FIG. 1 is a diagram showing a configuration example of a field effect organic thin film transistor using an organic semiconductor material for an active layer.
  • X to X each represents a substituent, and examples of the substituent are
  • Alkyl groups eg, methyl, ethyl, propyl, isopropyl, tert-butyl, pentyl, hexyl, octyl, dodecyl, tridecyl, tetradecyl, pentadecyl, etc.
  • a cycloalkyl group for example, a cyclopentyl group, a cyclohexyl group, etc.
  • an alkenyl group for example, a buyl group, an aryl group, etc.
  • an alkynyl group for example, an ethynyl group, a propargyl group, etc.
  • an aryl group for example, a phenyl group.
  • heteroaryl group for example, furyl group, chael group, pyridyl group, pyridazyl group, pyrimidyl group, virazyl group, triazyl group, imidazolyl group, pyrazolyl group, thiazolyl group, benzoimidazolyl group, Benzoxazolyl group, quinazolyl group, phthalazyl group, etc.
  • heterocyclic group for example, pyrrolidini Group, imidazolidinyl group, morpholinyl group, oxazolidyl group, etc.
  • alkoxy group for example, methoxy group, ethoxy group, propyloxy group, pentyloxy group, hexyloxy group, octyloxy group, dodecyloxy group, etc.
  • cycloalkoxy group for example, , Cyclopentyloxy group, cyclohe
  • acyl group (eg, acetyl) Group, ethyl carbonate group, propyl carbon group, pentyl carbon group, cyclohexyl carbon group, octyl carbon group, 2-ethyl hexyl carbon group, dodecyl carbon group, vinyl carbon group Group, naphthylcarbol group, pyridylcarbol group, etc.), acyloxy group (for example, acetyloxy group, ethylcarboxoxy group, butylcar
  • Id group pentylureido group, cyclohexylureido group, octylureido group, dodecylureido group, ferureureido group, naphthylureido group, 2-pyridylamido Noureid groups, etc.
  • sulfier groups eg methyl sulfier groups, ethyl sulfier groups, butyl sulfier groups, cyclohexyl sulfier groups, 2-ethyl hexyl sulfier groups, dodecyl sulfir groups, phenols
  • alkylsulfol group eg, methylsulfol group, ethylsulfol group, butylsulfol group, cyclo
  • R to R each represent a hydrogen atom or a substituent, and examples of the substituent are X to X.
  • nl to n4 each represents an integer of 0 to 5. However, when nl to n4 are all 0, R to R are not all hydrogen atoms, that is, at least one of R to R is a substituent.
  • preferred compounds are those in which one of R and R when nl to n4 are all 0.
  • 1 8 is an alkyl group and the other is a hydrogen atom, one of R and R is an alkyl group and the other is a hydrogen atom
  • R, R, R are each an alkyl group, and R, R, R, R are each an alkyl group, and R, R, R, R
  • R are compounds each being a hydrogen atom.
  • R to R are each a hydrogen atom or
  • nl to n4 each represents an integer of 0 to 4.
  • a preferable compound is a compound in which nl to n4 are all 0, Preferred compounds of X, X, X, and X are each an alkyl group, or X,
  • One of X is an alkyl group and the other is a hydrogen atom, and one of X and X is an alkyl group and the other
  • R, R, R and R are each an alkyl group
  • R, R, R, R are each a hydrogen atom.
  • the compound represented by the general formula (1) according to the present invention can be synthesized, for example, by the following method.
  • An organic thin film transistor has a source electrode and a drain electrode connected by an organic semiconductor channel (active layer) on a support, and a top gate type having a gate electrode on the gate electrode via a gate insulating layer.
  • a bottom gate type having a gate electrode on a support and a source electrode and a drain electrode connected by an organic semiconductor channel through a gate insulating layer is roughly classified.
  • the compound according to the present invention in the active layer of the organic thin film transistor element, it can be placed on the substrate by vacuum vapor deposition, but it can be dissolved in an appropriate solvent, and the additive can be added as needed. It is preferable to install the prepared solution on the substrate by cast coating, spin coating, printing, ink jet method, abrasion method or the like.
  • the solvent for dissolving the organic semiconductor material of the present invention is not particularly limited as long as it can prepare a solution having an appropriate concentration by dissolving the organic semiconductor material.
  • Chain ether solvents such as thiol ether diisopropyl ether, cyclic ether solvents such as tetrahydrofuran and dioxane, ketone solvents such as acetone methyl ketyl ketone, halogenated forms such as chloroform and 1,2-dichloroethane Alkyl solvents, toluene, ⁇ -dichlorobenzene, nitrobenzene, m-talesol and other aromatic solvents, hexane and other chain hydrocarbon solvents, cyclohexane and other cyclic hydrocarbon solvents, N —Methyl pyrrolidone, carbon disulfide and the like.
  • the material for forming the source electrode, the drain electrode, and the gate electrode is not particularly limited as long as it is a conductive material.
  • a known conductive polymer whose conductivity has been improved by doping or the like, for example, conductive polyarine, conductive polypyrrole, conductive polythiophene, a complex of polyethylene dioxythiophene and polystyrene sulfonic acid, etc. is also suitably used. It is done. Of these, those having low electrical resistance on the contact surface with the semiconductor layer are preferred.
  • a method for forming an electrode a method for forming an electrode using a known photolithographic method or a lift-off method from a conductive thin film formed using a method such as vapor deposition or sputtering using the above as a raw material, aluminum, copper, or the like
  • a method of etching on a metal foil using a resist by thermal transfer, ink jet or the like.
  • the conductive polymer solution or dispersion, or the conductive fine particle dispersion may be directly patterned by ink jetting, or may be formed from the coating film by lithography or laser ablation.
  • a method of patterning an ink containing a conductive polymer or conductive fine particles, a conductive paste, or the like by a printing method such as relief printing, intaglio printing, lithographic printing, or screen printing can also be used.
  • an inorganic oxide film having a high relative dielectric constant is preferable.
  • inorganic oxides include silicon oxide, aluminum oxide, tantalum oxide, titanium oxide, tin oxide, vanadium oxide, barium strontium titanate, barium zirconate titanate, lead zirconate titanate, titanate Lead lanthanum, strontium titanate, barium titanate, barium magnesium fluoride, bismuth titanate, strontium bismuth titanate, strontium bismuth tantanoate, tantanol Examples thereof include bismuth acid niobate and trioxide yttrium. Of these, preferred are silicon oxide, acid aluminum, acid tantalum, and acid titanium. Inorganic nitrides such as silicon nitride and aluminum nitride can also be suitably used.
  • Examples of the method for forming the coating include vacuum deposition, molecular beam epitaxy, ion cluster beam, low energy ion beam, ion plating, CVD, sputtering, and atmospheric pressure plasma. Dry process, spray coating method, spin coating method, blade coating method, dip coating method, casting method, roll coating method, bar coating method, die coating method and other coating methods, printing and ink jet patterning methods, etc. Can be used depending on the material.
  • the wet process includes a method of applying and drying a liquid in which fine particles of inorganic oxide are dispersed in an arbitrary organic solvent or water using a dispersion aid such as a surfactant as necessary, or an oxide precursor.
  • a so-called sol-gel method in which a solution of a body, for example, an alkoxide body is applied and dried is used.
  • the atmospheric pressure plasma method and the sol-gel method are preferable.
  • a method for forming an insulating film by plasma film formation under atmospheric pressure is a process in which discharge is performed under atmospheric pressure or a pressure near atmospheric pressure, and a reactive gas is plasma-excited to form a thin film on a substrate. Therefore, the method is described in Japanese Patent Laid-Open Nos. 11-61406, 11-133205, 2000-121804, 2000-147209, 2000-185362, etc. And Thereby, a highly functional thin film can be formed with high productivity.
  • organic compound film polyimide, polyamide, polyester, polyacrylate, photo-radical polymerization system, photopower thione polymerization system photocurable resin, or copolymer containing acrylonitrile component, polybule Phenolic alcohol, polybutyl alcohol, novolac resin, cyano ethyl pullulan, and the like can also be used.
  • the wet process is preferable as a method of forming the organic compound film.
  • the inorganic oxide film and the organic oxide film can be laminated and used together.
  • the thickness of these insulating films is generally 50 nm to 3 ⁇ m, preferably 100 nm to 1 ⁇ m.
  • the support is made of glass or a flexible resin sheet.
  • a plastic film can be used as the sheet.
  • the plastic film include For example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), polyetherimide, polyetheretherketone, polyphenylene sulfide, polyarylate, polyimide, polycarbonate (PC), cellulose triacetate (TAC), cellulose acetate propionate (CAP) and the like.
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • PES polyethersulfone
  • PES polyetherimide
  • polyetheretherketone polyphenylene sulfide
  • PC polycarbonate
  • TAC cellulose triacetate
  • CAP cellulose acetate propionate
  • FIG. 1 shows a configuration example of a field effect type organic thin film transistor using the organic semiconductor material of the present invention for an active layer.
  • a source electrode 2 and a drain electrode 3 are formed on a support 6 with a metal foil or the like, an active layer 1 made of the organic semiconductor material of the present invention is formed between both electrodes, and insulation is formed thereon.
  • the field effect transistor is formed by forming the layer 5 and further forming the gate electrode 4 thereon.
  • FIG. 2B shows the active layer 1 formed between the electrodes in FIG. 1A, which is formed so as to cover the entire surface of the electrode and the support using a coating method or the like.
  • C shows that the active layer 1 is first formed on the support 6 using a coating method or the like, and then the source electrode 2, the drain electrode 3, the insulating layer 5, and the gate electrode 4 are formed.
  • FIG. 4D after forming the gate electrode 4 with a metal foil or the like on the support 6, the insulating layer 5 is formed, and the source electrode 2 and the drain electrode 3 are formed with the metal foil or the like thereon. Then, the active layer 1 made of the semiconductor material of the present invention is formed between the electrodes.
  • Other configurations such as those shown in (e) and (f) of FIG.
  • a 2000 A thick thermal oxide film was formed on a Si wafer having a specific resistance of 0.01 ⁇ 'cm as a gate electrode to form a gate insulating layer, and then surface treatment with octyltrichlorosilane was performed.
  • Comparative compound ⁇ 1> poly (3-hexylthiophene) (regioregular, manufactured by Aldrich) (Appropriate molecular weight 89000, PHT) was applied with an applicator and dried to form a cast film (thickness 50 nm), which was then heat-treated at 50 ° C for 30 minutes in a nitrogen atmosphere. Was given. Further, gold was deposited on the surface of this film using a mask to form source and drain electrodes.
  • the organic thin film transistor element 2 was prepared in the same manner as the organic thin film transistor element 1, except that the comparative compound ⁇ 1> was replaced with the comparative compound ⁇ 2> (pentacene, which was obtained by sublimation purification using a commercially available reagent manufactured by Aldrich). Was made.
  • Organic thin film transistor elements 3 to 8 were produced in the same manner as in organic thin film transistor element 1, except that comparative compound ⁇ 1> was replaced with the exemplary compounds according to the present invention shown in Table 1.
  • the organic thin film transistor elements 1 and 3 to 8 produced as described above exhibited good operating characteristics of p-channel enhancement type FETs. Furthermore, for the organic thin film transistor elements 1 to 8, the carrier mobility and the ONZOFF ratio (the ratio of the drain current when the gate bias is 50V and 0V with the drain bias of 50V) were obtained from the saturation region of the IV characteristics. The obtained device was left in the atmosphere for 1 month, and the carrier mobility and ONZOFF ratio were obtained again. The results are shown in Table 1.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Thin Film Transistor (AREA)

Abstract

Disclosed is an organic semiconductor material having good characteristics as transistor including deterioration over time which can be easily formed into a thin film by coating. Also disclosed are an organic semiconductor film using such an organic semiconductor material, an organic semiconductor device, an organic thin-film transistor, a filed effect transistor and a switching device using such a transistor. Specifically disclosed is an organic semiconductor material containing a compound represented by the following general formula (1). [Chemical formula] (1) (In the formula, X1-X4 respectively represent a substituent; R1-R8 respectively represent a hydrogen atom or a substituent; and n1-n4 respectively represent an integer of 0-5. When all n1-n4 are 0, all R1-R8 are not hydrogen atoms and at least one of them is a substituent.)

Description

明 細 書  Specification
有機半導体材料、有機半導体膜、有機半導体素子、有機薄膜トランジス タ、電界効果型トランジスタ及びスイッチング素子  Organic semiconductor materials, organic semiconductor films, organic semiconductor elements, organic thin film transistors, field effect transistors, and switching elements
技術分野  Technical field
[0001] 本発明は有機半導体材料、それを用いた有機半導体膜、有機半導体素子、有機 薄膜トランジスタ及び電界効果型トランジスタ、並びに該トランジスタ用いたスィッチン グ素子に関する。  The present invention relates to an organic semiconductor material, an organic semiconductor film using the same, an organic semiconductor element, an organic thin film transistor, a field effect transistor, and a switching element using the transistor.
背景技術  Background art
[0002] 情報端末の普及に伴い、コンピュータ用のディスプレイとしてフラットパネルディスプ レイに対するニーズが高まっている。また更に情報化の進展に伴い、従来紙媒体で 提供されていた情報が電子化されて提供される機会が増え、薄くて軽い、手軽に持 ち運びが可能なモパイル用表示媒体として、電子ペーパーあるいはデジタルぺーパ 一へのニーズも高まりつつある。  With the widespread use of information terminals, there is an increasing need for flat panel displays as computer displays. In addition, with the progress of computerization, the information provided by paper media has increased in opportunities to be provided electronically. As a display medium for mopile that is thin, light and easy to carry, electronic paper can be used. Or there is a growing need for digital paper.
[0003] 一般に平板型のディスプレイ装置にぉ ヽては、液晶、有機 EL、電気泳動などを利 用した素子を用いて表示媒体を形成して 、る。またこうした表示媒体では画面輝度 の均一性や画面書き換え速度などを確保するために、画像駆動素子としてァクティ ブ駆動である TFT素子を用いる技術が主流になっている。例えば、通常のコンビュ ータディスプレイではガラス基板上にこれら TFT素子を形成し、液晶、有機 EL素子 等が封止されている。  [0003] Generally, in a flat panel display device, a display medium is formed using an element using liquid crystal, organic EL, electrophoresis, or the like. In such display media, in order to ensure uniformity of screen brightness, screen rewriting speed, etc., the technology that uses TFT elements that are active drives as image drive elements has become the mainstream. For example, in an ordinary computer display, these TFT elements are formed on a glass substrate, and liquid crystal, organic EL elements, etc. are sealed.
[0004] ここで TFT素子には主に a— Si (アモルファスシリコン)、 p— Si (ポリシリコン)などの 半導体を用いることができ、これらの S泮導体 (必要に応じて金属膜も)を多層化し、 ソース、ドレイン、ゲート電極を基板上に順次形成していくことで TFT素子が製造され る。こうした TFT素子の製造には、通常スパッタリング、その他の真空系の製造プロセ スが必要とされる。  Here, semiconductors such as a—Si (amorphous silicon) and p—Si (polysilicon) can be mainly used for TFT elements, and these S 泮 conductors (and metal films as required) can be used. TFT elements are manufactured by forming multiple layers and forming source, drain, and gate electrodes sequentially on the substrate. The manufacture of such TFT elements usually requires sputtering and other vacuum manufacturing processes.
[0005] し力しながら、このような TFT素子の製造では、真空チャンバ一を含む真空系の製 造プロセスを何度も繰り返して各層を形成せざるを得ず、装置コスト、ランニングコスト が非常に膨大なものとなっていた。例えば、 TFT素子では、通常それぞれの層の形 成のために真空蒸着、ドープ、フォトリソグラフ、現像等の工程を何度も繰り返す必要 があり、何十もの工程を経て素子を基板上に形成している。スイッチング動作の要と なる半導体部分に関しても、 p型、 n型等、複数種類の半導体層を積層している。こう した従来の Si半導体による製造方法ではディスプレイ画面の大型化のニーズに対し 、真空チャンバ一等の製造装置の大幅な設計変更が必要とされるなど、設備の変更 が容易ではない。 [0005] However, in the manufacture of such a TFT element, the vacuum system manufacturing process including the vacuum chamber must be repeated many times to form each layer, resulting in extremely high equipment costs and running costs. It was huge. For example, in TFT elements, the shape of each layer is usually For this purpose, it is necessary to repeat processes such as vacuum deposition, dope, photolithography, and development many times, and elements are formed on the substrate through tens of processes. For the semiconductor portion that is the key to the switching operation, multiple types of semiconductor layers such as p-type and n-type are stacked. In such a conventional manufacturing method using Si semiconductors, it is not easy to change the equipment because the design of a manufacturing apparatus such as a vacuum chamber needs to be drastically changed in response to the need to increase the size of the display screen.
[0006] また、このような従来からの Si材料を用いた TFT素子の形成には高い温度の工程 が含まれるため、基板材料には工程温度に耐える材料であると ヽぅ制限が加わること になる。このため実際上はガラスを用いざるをえず、先に述べた電子ペーパーあるい はデジタルペーパーと!/、つた薄型ディスプレイを、こうした従来知られた TFT素子を 利用して構成した場合、そのディスプレイは重ぐ柔軟性に欠け、落下の衝撃で割れ る可能性のある製品となってしまう。ガラス基板上に TFT素子を形成することに起因 するこれらの特徴は、情報化の進展に伴う手軽な携行用薄型ディスプレイへの-一 ズを満たすにあたり、望ましくないものである。  [0006] In addition, since the formation of a TFT element using such a conventional Si material includes a process at a high temperature, the substrate material is limited to a material that can withstand the process temperature. Become. For this reason, in practice, glass must be used, and when the above-mentioned electronic paper or digital paper! /, And a thin display using such a conventionally known TFT element are used, the display Will be heavy and inflexible, and may be broken by the impact of a drop. These characteristics resulting from the formation of TFT elements on a glass substrate are undesirable in meeting the need for easy-to-use thin-type displays with the progress of computerization.
[0007] 一方、近年にぉ ヽて高 ヽ電荷輸送性を有する有機化合物として、有機半導体材料 の研究が精力的に進められて 、る。これらの化合物は有機 EL素子用の電荷輸送性 材料のほか、例えば、サイエンス(Science)誌、 289卷、 599頁(2000)等において 論じられているような有機レーザー発振素子や、例えば、ネイチヤー (Nature)誌、 4 03卷、 521頁(2000)等、多数の論文にて報告されている有機薄膜トランジスタへの 応用が期待されている。これら有機半導体デバイスを実現できれば、比較的低い温 度での真空ないし低圧蒸着による製造プロセスの簡易化や、更にはその分子構造を 適切に改良することによって、溶液ィ匕できる半導体を得る可能性があると考えられ、 有機半導体溶液をインク化することによりインクジェット方式を含む印刷法によって製 造することも考えられる。これらの低温プロセスによる製造は、従来の Si系半導体材 料については不可能と考えられてきたが、有機半導体を用いたデバイスにはその可 能性があり、従って前述の基板耐熱性に関する制限が緩和され、透明榭脂基板上に も、例えば、 TFT素子を形成できる可能性がある。透明榭脂基板上に TFT素子を形 成し、その TFT素子により表示材料を駆動させることができれば、ディスプレイを従来 のものよりも軽ぐ柔軟性に富み、落としても割れない (もしくは非常に割れにくい)デ イスプレイとすることができるであろう。 [0007] On the other hand, research on organic semiconductor materials has been energetically advanced in recent years as an organic compound having a high charge transporting property. These compounds are not only charge transport materials for organic EL devices, but also organic laser oscillation devices such as those discussed in Science, 289 サ イ エ ン ス, 599 (2000), etc. It is expected to be applied to organic thin-film transistors that have been reported in a number of papers such as (Nature), April 03, 521 (2000). If these organic semiconductor devices can be realized, there is a possibility of obtaining a semiconductor that can be dissolved by simplifying the manufacturing process by vacuum or low-pressure deposition at a relatively low temperature and further improving its molecular structure appropriately. It can be considered that the organic semiconductor solution is made into an ink by a printing method including an ink jet method. Manufacturing by these low-temperature processes has been considered impossible for conventional Si-based semiconductor materials, but devices using organic semiconductors have the potential, and thus the above-mentioned limitations on substrate heat resistance are present. There is a possibility that, for example, a TFT element can be formed on a transparent resin substrate. If a TFT element is formed on a transparent resin substrate and the display material can be driven by the TFT element, the display will be It is lighter and more flexible than the ones, and it can be a display that does not crack (or very hard to break) when dropped.
[0008] 有機半導体材料としては、ポリフエ-レンビ-レン、ポリピロール、ポリチォフェン、ォ リゴチオフェン、ペンタセンなどが研究されている力 特にペンタセンを始めとするポリ ァセン化合物は、高 、キャリア移動度と優れた半導体デバイス特性が得られることが 報告されている。また、ポリアセンィ匕合物あるいはポリアセンィ匕合物誘導体について 開示されている(例えば、特許文献 1〜4及び非特許文献 1参照。)が、いずれも溶液 プロセス適性と、キャリア移動度、半導体デバイス特性の両立という点において十分 とは言えず、更なる有機半導体材料の開発が望まれて!/ヽた。  [0008] As organic semiconductor materials, poly-ethylene biylene, polypyrrole, polythiophene, oligothiophene, pentacene and the like have been studied. Especially, the polyacene compounds such as pentacene have high carrier mobility. It has been reported that semiconductor device characteristics can be obtained. Also, polyacene compounds or polyacene compound derivatives are disclosed (see, for example, Patent Documents 1 to 4 and Non-Patent Document 1), all of which are suitable for solution process suitability, carrier mobility, and semiconductor device characteristics. It is not enough in terms of compatibility, and further development of organic semiconductor materials is desired!
特許文献 1:国際公開第 03Z16599号パンフレット  Patent Document 1: Pamphlet of International Publication No. 03Z16599
特許文献 2 :国際公開第 03Z28125号パンフレット  Patent Document 2: Pamphlet of International Publication No. 03Z28125
特許文献 3 :米国特許第 6, 690, 029号明細書  Patent Document 3: U.S. Pat.No. 6,690,029
特許文献 4 :特開 2004— 107216号公報  Patent Document 4: Japanese Unexamined Patent Application Publication No. 2004-107216
非特許文献 1 :サイエンス(Science)誌、 303卷、 1644〜1646頁(2004) 発明の開示  Non-Patent Document 1: Science, 303, pp. 1644–1646 (2004) Disclosure of Invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0009] 本発明の目的は、経時劣化を含めてトランジスタとしての特性が良好であり、更に 塗布による薄膜形成が容易な有機半導体材料、それを用いた有機半導体膜、有機 半導体素子、有機薄膜トランジスタ及び電界効果型トランジスタ、並びに該トランジス タ用いたスイッチング素子を提供することである。 [0009] An object of the present invention is to provide an organic semiconductor material that has good characteristics as a transistor including deterioration over time and that can be easily formed into a thin film by coating, an organic semiconductor film using the organic semiconductor material, an organic semiconductor element, an organic thin film transistor, and It is an object to provide a field effect transistor and a switching element using the transistor.
課題を解決するための手段  Means for solving the problem
[0010] 本発明の上記課題は、下記構成により達成された。 [0010] The above object of the present invention has been achieved by the following constitution.
[0011] 1.下記一般式 (1)で表される化合物を含有することを特徴とする有機半導体材料 [0012] [化 1] 般式 (1 » [0011] 1. An organic semiconductor material comprising a compound represented by the following general formula (1): [0012] [Chemical Formula 1] General formula (1 »
Figure imgf000006_0001
Figure imgf000006_0001
[0013] (式中、 X〜Xはそれぞれ置換基を表し、 R〜Rはそれぞれ水素原子または置換基 [Wherein, X to X each represents a substituent, and R to R represent a hydrogen atom or a substituent, respectively.
1 4 1 8  1 4 1 8
を表す。 nl〜n4はそれぞれ 0〜5の整数を表す。但し、 nl〜n4が全て 0のとき、 R  Represents. nl to n4 each represents an integer of 0 to 5. However, when nl to n4 are all 0, R
1 1
〜R ~ R
8は全て水素原子になることはなぐ少なくとも 1つは置換基である。 ) At least one of 8 is a substituent, not all hydrogen atoms. )
2.前記一般式(1)が下記一般式 (2)で表されることを特徴とする前記 1に記載の有 機半導体材料。 2. The organic semiconductor material as described in 1 above, wherein the general formula (1) is represented by the following general formula (2).
[0014] [化 2] 一般式 (2) [0014] [Chemical formula 2] General formula (2)
Figure imgf000006_0002
Figure imgf000006_0002
[0015] (式中、 X〜Xはそれぞれ置換基を表し、 R〜Rはそれぞれ水素原子または置換基 [Wherein, X to X each represents a substituent, and R to R represent a hydrogen atom or a substituent, respectively.
1 8 1 8  1 8 1 8
を表す。 nl〜! ι4はそれぞれ 0〜4の整数を表す。 )  Represents. nl ~! ι4 represents an integer of 0 to 4, respectively. )
3.前記一般式(1)において、 nl〜n4が全て 0であり、 R、 R、 R、 Rはそれぞれァ  3. In the general formula (1), nl to n4 are all 0, and R, R, R, and R are
1 4 5 8  1 4 5 8
ルキル基であり、 R、 R、 R、 Rはそれぞれ水素原子であることを特徴とする前記 1に  Wherein R, R, R, and R are each a hydrogen atom.
2 3 6 7  2 3 6 7
記載の有機半導体材料。  The organic semiconductor material described.
[0016] 4.前記一般式(1)において、 nl〜n4が全て 0であり、 R、 Rの一方がアルキル基 で他方が水素原子であり、 R、 Rの一方がアルキル基で他方が水素原子であること [0016] 4. In the general formula (1), nl to n4 are all 0, and one of R and R is an alkyl group And the other is a hydrogen atom, one of R and R is an alkyl group and the other is a hydrogen atom
4 5  4 5
を特徴とする前記 1に記載の有機半導体材料。  2. The organic semiconductor material as described in 1 above.
[0017] 5.前記一般式(2)において、 nl〜n4が全て 0であることを特徴とする前記 2に記 載の有機半導体材料。 [0017] 5. The organic semiconductor material as described in 2 above, wherein in the general formula (2), nl to n4 are all 0.
[0018] 6.前記一般式(2)にお!/、て、 X、 X、 X、 Xがそれぞれアルキル基であることを特  [0018] 6. In the general formula (2),! /, X, X, X, and X are each an alkyl group.
5 6 7 8  5 6 7 8
徴とする前記 2または 5に記載の有機半導体材料。  6. The organic semiconductor material as described in 2 or 5 above.
[0019] 7.前記一般式(2)にお!/、て、 X、 Xの一方がアルキル基で他方が水素原子であり [0019] 7. In the general formula (2), one of X and X is an alkyl group and the other is a hydrogen atom.
5 6  5 6
、 X、 Xの一方がアルキル基で他方が水素原子であることを特徴とする前記 2または Wherein X is an alkyl group and the other is a hydrogen atom.
7 8 7 8
5に記載の有機半導体材料。  5. The organic semiconductor material according to 5.
[0020] 8.前記一般式(2)にお!/、て、 R、 R、 R、 Rはそれぞれアルキル基であり、 R、 R [0020] 8. In the general formula (2),! /, R, R, R, and R are each an alkyl group, and R, R
1 4 5 8 2 3 1 4 5 8 2 3
、 R、 Rはそれぞれ水素原子であることを特徴とする前記 2、 5〜7のいずれ力 1項に, R, and R are each a hydrogen atom.
6 7 6 7
記載の有機半導体材料。  The organic semiconductor material described.
[0021] 9.前記一般式(2)において、 R、 Rの一方がアルキル基で他方が水素原子であり [0021] 9. In the general formula (2), one of R and R is an alkyl group and the other is a hydrogen atom.
1 8  1 8
、 R、 Rの一方がアルキル基で他方が水素原子であることを特徴とする前記 2、 5〜7 2, 5-7, wherein one of R, R and R is an alkyl group and the other is a hydrogen atom
4 5 4 5
の 、ずれか 1項に記載の有機半導体材料。  The organic semiconductor material according to item 1 above.
[0022] 10.前記 1〜9のいずれか 1項に記載の有機半導体材料を含有することを特徴とす る有機半導体膜。 [0022] 10. An organic semiconductor film comprising the organic semiconductor material according to any one of 1 to 9 above.
[0023] 11.前記 1〜9のいずれか 1項に記載の有機半導体材料を含有することを特徴とす る有機半導体素子。  [0023] 11. An organic semiconductor element comprising the organic semiconductor material according to any one of 1 to 9 above.
[0024] 12.前記 1〜9のいずれか 1項に記載の有機半導体材料を半導体層に含有するこ とを特徴とする有機薄膜トランジスタ。  [0024] 12. An organic thin film transistor comprising the organic semiconductor material according to any one of 1 to 9 in a semiconductor layer.
[0025] 13.前記 1〜9のいずれか 1項に記載の有機半導体材料を半導体層に含有するこ とを特徴とする電界効果型トランジスタ。 [0025] 13. A field-effect transistor comprising the organic semiconductor material according to any one of 1 to 9 above in a semiconductor layer.
[0026] 14.前記 12に記載の有機薄膜トランジスタまたは前記 13に記載の電界効果型トラ ンジスタを用いることを特徴とするスイッチング素子。 [0026] 14. A switching element comprising the organic thin film transistor according to 12 or the field effect transistor according to 13.
発明の効果  The invention's effect
[0027] 本発明により、経時劣化を含めてトランジスタとしての特性が良好であり、更に塗布 による薄膜形成が容易な有機半導体材料、それを用いた有機半導体膜、有機半導 体素子、有機薄膜トランジスタ及び電界効果型トランジスタ、並びに該トランジスタ用 V、たスイッチング素子を提供することができた。 [0027] According to the present invention, an organic semiconductor material that has good characteristics as a transistor including deterioration with time and that can be easily formed into a thin film by coating, an organic semiconductor film using the organic semiconductor material, and an organic semiconductor It was possible to provide a body element, an organic thin film transistor, a field effect transistor, and a switching element for the transistor.
図面の簡単な説明  Brief Description of Drawings
[0028] [図 1]有機半導体材料を活性層に用いた電界効果型有機薄膜トランジスタの構成例 を示す図である。  FIG. 1 is a diagram showing a configuration example of a field effect organic thin film transistor using an organic semiconductor material for an active layer.
符号の説明  Explanation of symbols
[0029] 1 活性層 [0029] 1 Active layer
2 ソース電極  2 Source electrode
3 ドレイン電極  3 Drain electrode
4 ゲート電極  4 Gate electrode
5 絶縁層  5 Insulation layer
6 支持体  6 Support
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0030] 以下、本発明につ 、て詳述する。 [0030] Hereinafter, the present invention will be described in detail.
[0031] 前記一般式(1)において、 X〜Xはそれぞれ置換基を表し、その置換基の例とし  In the general formula (1), X to X each represents a substituent, and examples of the substituent are
1 4  14
ては、アルキル基(例えば、メチル基、ェチル基、プロピル基、イソプロピル基、 tert— ブチル基、ペンチル基、へキシル基、ォクチル基、ドデシル基、トリデシル基、テトラ デシル基、ペンタデシル基等)、シクロアルキル基(例えば、シクロペンチル基、シクロ へキシル基等)、アルケニル基 (例えば、ビュル基、ァリル基等)、アルキニル基 (例え ば、ェチニル基、プロパルギル基等)、ァリール基 (例えば、フエニル基、ナフチル基 等)、ヘテロァリール基 (例えば、フリル基、チェ-ル基、ピリジル基、ピリダジル基、ピ リミジル基、ビラジル基、トリアジル基、イミダゾリル基、ピラゾリル基、チアゾリル基、ベ ンゾイミダゾリル基、ベンゾォキサゾリル基、キナゾリル基、フタラジル基等)、ヘテロ環 基 (例えば、ピロリジニル基、イミダゾリジニル基、モルホリニル基、ォキサゾリジ-ル 基等)、アルコキシ基 (例えば、メトキシ基、エトキシ基、プロピルォキシ基、ペンチル ォキシ基、へキシルォキシ基、ォクチルォキシ基、ドデシルォキシ基等)、シクロアル コキシ基 (例えば、シクロペンチルォキシ基、シクロへキシルォキシ基等)、ァリールォ キシ基 (例えば、フエノキシ基、ナフチルォキシ基等)、アルキルチオ基 (例えば、メチ ルチオ基、ェチルチオ基、プロピルチオ基、ペンチルチオ基、へキシルチオ基、オタ チルチオ基、ドデシルチオ基等)、シクロアルキルチオ基 (例えば、シクロペンチルチ ォ基、シクロへキシルチオ基等)、ァリールチオ基 (例えば、フエ-ルチオ基、ナフチ ルチオ基等)、アルコキシカルボ-ル基(例えば、メチルォキシカルボ-ル基、ェチル ォキシカルボニル基、ブチルォキシカルボニル基、ォクチルォキシカルボニル基、ド デシルォキシカルボ-ル基等)、ァリールォキシカルボ-ル基(例えば、フエ-ルォキ シカルボニル基、ナフチルォキシカルボ-ル基等)、スルファモイル基(例えば、ァミノ スルホ-ル基、メチルアミノスルホ -ル基、ジメチルアミノスルホ -ル基、ブチルァミノ スルホ-ル基、へキシルアミノスルホ -ル基、シクロへキシルアミノスルホ -ル基、オタ チルアミノスルホ -ル基、ドデシルアミノスルホ-ル基、フエ-ルアミノスルホ -ル基、 ナフチルアミノスルホ -ル基、 2—ピリジルアミノスルホ -ル基等)、ァシル基(例えば、 ァセチル基、ェチルカルボ-ル基、プロピルカルボ-ル基、ペンチルカルボ-ル基、 シクロへキシルカルボ-ル基、ォクチルカルポ-ル基、 2—ェチルへキシルカルボ- ル基、ドデシルカルボ-ル基、フヱ-ルカルボ-ル基、ナフチルカルボ-ル基、ピリジ ルカルボ-ル基等)、ァシルォキシ基(例えば、ァセチルォキシ基、ェチルカルボ- ルォキシ基、ブチルカルボ-ルォキシ基、ォクチルカルボ-ルォキシ基、ドデシルカ ルボニルォキシ基、フエ-ルカルポ-ルォキシ基等)、アミド基(例えば、メチルカルボ -ルァミノ基、ェチルカルボ-ルァミノ基、ジメチルカルボ-ルァミノ基、プロピルカル ボ-ルァミノ基、ペンチルカルボ-ルァミノ基、シクロへキシルカルボ-ルァミノ基、 2 ェチルへキシルカルボ-ルァミノ基、ォクチルカルポ-ルァミノ基、ドデシルカルボ -ルァミノ基、フエ-ルカルポ-ルァミノ基、ナフチルカルボ-ルァミノ基等)、力ルバ モイル基(例えば、ァミノカルボ-ル基、メチルァミノカルボ-ル基、ジメチルァミノ力 ルポ-ル基、プロピルアミノカルボ-ル基、ペンチルァミノカルボ-ル基、シクロへキ シルァミノカルボ-ル基、ォクチルァミノカルボ-ル基、 2—ェチルへキシルァミノカル ボニル基、ドデシルァミノカルボ-ル基、フエ-ルァミノカルボ-ル基、ナフチルァミノ カルボニル基、 2—ピリジルァミノカルボ-ル基等)、ウレイド基 (例えば、メチルゥレイ ド基、ェチルウレイド基、ペンチルゥレイド基、シクロへキシルウレイド基、ォクチルウレ イド基、ドデシルウレイド基、フエ-ルゥレイド基、ナフチルウレイド基、 2—ピリジルアミ ノウレイド基等)、スルフィエル基(例えば、メチルスルフィエル基、ェチルスルフィエル 基、ブチルスルフィエル基、シクロへキシルスルフィエル基、 2—ェチルへキシルスル フィエル基、ドデシルスルフィ-ル基、フエ-ルスルフィ-ル基、ナフチルスルフィ-ル 基、 2—ピリジルスルフィエル基等)、アルキルスルホ -ル基(例えば、メチルスルホ- ル基、ェチルスルホ -ル基、ブチルスルホ -ル基、シクロへキシルスルホ -ル基、 2— ェチルへキシルスルホ -ル基、ドデシルスルホ -ル基等)、ァリールスルホ -ル基(例 えば、フエ-ルスルホ-ル基、ナフチルスルホ-ル基、 2—ピリジルスルホ -ル基等) 、アミノ基 (例えば、アミノ基、ェチルァミノ基、ジメチルァミノ基、プチルァミノ基、シク 口ペンチルァミノ基、 2—ェチルへキシルァミノ基、ドデシルァミノ基、ァ-リノ基、ナフ チルァミノ基、 2—ピリジルァミノ基等)、ハロゲン原子 (例えば、フッ素原子、塩素原 子、臭素原子等)、フッ化炭化水素基 (例えば、フルォロメチル基、トリフルォロメチル 基、ペンタフルォロェチル基、ペンタフルオロフヱ-ル基等)、シァノ基、シリル基(例 えば、トリメチルシリル基、トリイソプロビルシリル基、トリフヱ -ルシリル基、フヱ -ルジ ェチルシリル基等)等が挙げられ、これらの置換基は上記の置換基によって更に置 換されて 、ても、複数が互いに結合して環を形成して 、てもよ!/、。 Alkyl groups (eg, methyl, ethyl, propyl, isopropyl, tert-butyl, pentyl, hexyl, octyl, dodecyl, tridecyl, tetradecyl, pentadecyl, etc.), A cycloalkyl group (for example, a cyclopentyl group, a cyclohexyl group, etc.), an alkenyl group (for example, a buyl group, an aryl group, etc.), an alkynyl group (for example, an ethynyl group, a propargyl group, etc.), an aryl group (for example, a phenyl group). , Naphthyl group, etc.), heteroaryl group (for example, furyl group, chael group, pyridyl group, pyridazyl group, pyrimidyl group, virazyl group, triazyl group, imidazolyl group, pyrazolyl group, thiazolyl group, benzoimidazolyl group, Benzoxazolyl group, quinazolyl group, phthalazyl group, etc.), heterocyclic group (for example, pyrrolidini Group, imidazolidinyl group, morpholinyl group, oxazolidyl group, etc.), alkoxy group (for example, methoxy group, ethoxy group, propyloxy group, pentyloxy group, hexyloxy group, octyloxy group, dodecyloxy group, etc.), cycloalkoxy group (for example, , Cyclopentyloxy group, cyclohexyloxy group, etc.), aryloxy group (eg, phenoxy group, naphthyloxy group, etc.), alkylthio group (eg, methoxy) Ruthio group, ethylthio group, propylthio group, pentylthio group, hexylthio group, octylthio group, dodecylthio group, etc.), cycloalkylthio group (eg, cyclopentylthio group, cyclohexylthio group, etc.), arylthio group (eg, phenol- Ruthio group, naphthylthio group, etc.), alkoxy carbo yl group (for example, methyloxy carbo yl group, ethyloxy carbonyl group, butyloxy carbonyl group, octyloxy carbonyl group, dodecyloxy carbo Group), aryloxycarbonyl group (for example, phenylcarbonyl group, naphthyloxycarbonyl group, etc.), sulfamoyl group (for example, aminosulfonyl group, methylaminosulfol group). , Dimethylaminosulfol group, butyraminosulfol group, hexylaminosulfol group, cyclohexyl Ruaminosulfol group, octylaminosulfol group, dodecylaminosulfol group, phenolaminosulfol group, naphthylaminosulfol group, 2-pyridylaminosulfol group, etc.), acyl group (eg, acetyl) Group, ethyl carbonate group, propyl carbon group, pentyl carbon group, cyclohexyl carbon group, octyl carbon group, 2-ethyl hexyl carbon group, dodecyl carbon group, vinyl carbon group Group, naphthylcarbol group, pyridylcarbol group, etc.), acyloxy group (for example, acetyloxy group, ethylcarboxoxy group, butylcarboxoxy group, octylcarboxoxy group, dodecylcarbonyloxy group, phenylcarboxyl group) Group), amide group (for example, methylcarbo-lamino group, ethylcarbo-lamino group, Methyl carbolumino group, propyl carbolumino group, pentyl carbolumino group, cyclohexyl carbolumino group, 2-ethylhexyl carbolumino group, octyl carbolumino group, dodecyl carbolumino group, phenol carbolumino group , Naphthyl carboamino groups, etc.), strong rubamoyl groups (for example, amino carbo group, methyl amino carbo ol group, dimethyl amino group, propyl amino carbo ol group, pentyl amino carbo ol group) , Cyclohexylaminocarbonyl group, octylaminocarbonyl group, 2-ethylhexylaminocarbonyl group, dodecylaminocarbonyl group, phenylaminocarbonyl group, naphthylaminocarbonyl group, 2-pyridylamino Carbo group), ureido group (eg methylureido group, ethyluree group). Id group, pentylureido group, cyclohexylureido group, octylureido group, dodecylureido group, ferureureido group, naphthylureido group, 2-pyridylamido Noureid groups, etc.), sulfier groups (eg methyl sulfier groups, ethyl sulfier groups, butyl sulfier groups, cyclohexyl sulfier groups, 2-ethyl hexyl sulfier groups, dodecyl sulfir groups, phenols) Rusulfyl group, naphthylsulfuric group, 2-pyridylsulfel group, etc.), alkylsulfol group (eg, methylsulfol group, ethylsulfol group, butylsulfol group, cyclohexylsulfol group) 2-ethylhexylsulfol group, dodecylsulfol group, etc.), arylsulfol group (eg, phenylsulfol group, naphthylsulfol group, 2-pyridylsulfol group, etc.), amino Group (for example, amino group, ethylamino group, dimethylamino group, ptylamino group, cyclopentylamino group, 2-ethylhexylamino group) Group, dodecylamino group, arlino group, naphthylamino group, 2-pyridylamino group, etc.), halogen atom (eg, fluorine atom, chlorine atom, bromine atom, etc.), fluorinated hydrocarbon group (eg, fluoromethyl group, trifluoromethyl group, etc.) Chloromethyl group, pentafluoroethyl group, pentafluorophenyl group, etc.), cyano group, silyl group (for example, trimethylsilyl group, triisopropylpropyl group, triphenylsilyl group, benzylethylsilyl) These substituents may be further substituted with the above substituents, or a plurality of these may be bonded to each other to form a ring.
[0032] R〜Rはそれぞれ水素原子または置換基を表し、置換基としては X〜Xで挙げた [0032] R to R each represent a hydrogen atom or a substituent, and examples of the substituent are X to X.
1 8 1 4 置換基と同義である。 nl〜n4はそれぞれ 0〜5の整数を表す。但し、 nl〜n4が全て 0のとき、 R〜Rは全て水素原子ではない、即ち R〜Rの少なくとも 1つが置換基で  1 8 1 4 Synonymous with substituent. nl to n4 each represents an integer of 0 to 5. However, when nl to n4 are all 0, R to R are not all hydrogen atoms, that is, at least one of R to R is a substituent.
1 8 1 8  1 8 1 8
ある。  is there.
[0033] 一般式(1)において、好ましい化合物は nl〜n4が全て 0であるとき、 R、 Rの一方  [0033] In the general formula (1), preferred compounds are those in which one of R and R when nl to n4 are all 0.
1 8 がアルキル基で他方が水素原子であり、 R、 Rの一方がアルキル基で他方が水素原  1 8 is an alkyl group and the other is a hydrogen atom, one of R and R is an alkyl group and the other is a hydrogen atom
4 5  4 5
子である化合物か、あるいは R、 R、 R、 Rはそれぞれアルキル基であり、 R、 R、 R  Or R, R, R, R are each an alkyl group, and R, R, R
1 4 5 8 2 3 6 1 4 5 8 2 3 6
、 Rはそれぞれ水素原子である化合物である。 , R are compounds each being a hydrogen atom.
7  7
[0034] 前記一般式 (2)において、 X〜Xは置換基を表すが、置換基としては前記一般式  [0034] In the general formula (2), X to X represent substituents.
1 8  1 8
(1)における X〜Xが表す置換基と同義である。 R〜Rはそれぞれ水素原子または  It is synonymous with the substituent represented by X to X in (1). R to R are each a hydrogen atom or
1 4 1 8  1 4 1 8
置換基を表し、置換基としては前記一般式(1)における X〜xが表す置換基と同義  Represents a substituent, and the substituent has the same meaning as the substituent represented by X to x in the general formula (1).
1 4  14
である。 nl〜n4はそれぞれ 0〜4の整数を表す。  It is. nl to n4 each represents an integer of 0 to 4.
[0035] 一般式(2)において、好ましく化合物は、 nl〜n4は全て 0である化合物であり、別 の好ましい化合物は、 X、 X、 X、 Xがそれぞれアルキル基である力、あるいは X、 [0035] In the general formula (2), a preferable compound is a compound in which nl to n4 are all 0, Preferred compounds of X, X, X, and X are each an alkyl group, or X,
5 6 7 8 5 5 6 7 8 5
Xの一方がアルキル基で他方が水素原子であり、 X、 Xの一方がアルキル基で他方One of X is an alkyl group and the other is a hydrogen atom, and one of X and X is an alkyl group and the other
6 7 8 6 7 8
が水素原子である化合物である。また R、 R、 R、 Rはそれぞれアルキル基であり、  Is a compound in which is a hydrogen atom. R, R, R and R are each an alkyl group,
1 4 5 8  1 4 5 8
R、 R、 R、 Rはそれぞれ水素原子である化合物力 R、 Rの一方がアルキル基で R, R, R, R are each a hydrogen atom.
2 3 6 7 1 8 2 3 6 7 1 8
他方が水素原子であり、 R、 Rの一方がアルキル基で他方が水素原子である化合物  A compound in which the other is a hydrogen atom, one of R and R is an alkyl group and the other is a hydrogen atom
4 5  4 5
も好ましい。  Is also preferable.
[0036] 以下、本発明に係る前記一般式(1)で表される化合物の具体例を示すが、本発明 はこれらに限定されるものではない。  [0036] Specific examples of the compound represented by the general formula (1) according to the present invention are shown below, but the present invention is not limited thereto.
[0037] [化 3] [0037] [Chemical 3]
Figure imgf000012_0001
Figure imgf000012_0001
[0038] [ィ匕 4] [0038] [Yi 4]
Figure imgf000013_0001
Figure imgf000013_0001
[0039] 本発明に係る前記一般式(1)で表される化合物は、例えば、以下の方法で合成す ることがでさる。  [0039] The compound represented by the general formula (1) according to the present invention can be synthesized, for example, by the following method.
[0040] [化 5] [0040] [Chemical 5]
Figure imgf000014_0001
般式 <1)
Figure imgf000014_0001
General formula <1)
[0041] より具体的【こ ίま、 Org. Chem. , 55, 13, 1990, 4190〜4198【こ記載の方法 を参考にして合成することができる。 [0041] More specifically, Org. Chem., 55, 13, 1990, 4190-4198 can be synthesized with reference to the method described herein.
[0042] 有機薄膜トランジスタは、支持体上に有機半導体チャネル (活性層)で連結されたソ ース電極とドレイン電極を有し、その上にゲート絶縁層を介してゲート電極を有するト ップゲート型と支持体上にゲート電極を有し、ゲート絶縁層を介して有機半導体チヤ ネルで連結されたソース電極とドレイン電極を有するボトムゲート型に大別される。 [0042] An organic thin film transistor has a source electrode and a drain electrode connected by an organic semiconductor channel (active layer) on a support, and a top gate type having a gate electrode on the gate electrode via a gate insulating layer. A bottom gate type having a gate electrode on a support and a source electrode and a drain electrode connected by an organic semiconductor channel through a gate insulating layer is roughly classified.
[0043] 本発明に係る化合物を有機薄膜トランジスタ素子の活性層に設置するには、真空 蒸着により基板上に設置することもできるが、適切な溶剤に溶解し、必要に応じ添カロ 剤をカ卩えて調製した溶液をキャストコート、スピンコート、印刷、インクジェット法、アブ レーシヨン法等によって基板上に設置するのが好ましい。この場合、本発明の有機半 導体材料を溶解する溶剤は、該有機半導体材料を溶解して適切な濃度の溶液が調 製できるものであれば格別の制限はな 、が、具体的にはジェチルエーテルゃジイソ プロピルエーテル等の鎖状エーテル系溶媒、テトラヒドロフランやジォキサンなどの環 状エーテル系溶媒、アセトンゃメチルェチルケトン等のケトン系溶媒、クロ口ホルムや 1, 2—ジクロロェタン等のハロゲン化アルキル系溶媒、トルエン、 ο—ジクロ口べンゼ ン、ニトロベンゼン、 m—タレゾール等の芳香族系溶媒、へキサンなどの鎖状炭化水 素系溶媒、シクロへキサンなどの環状炭化水素系溶媒、 N—メチルピロリドン、ニ硫 化炭素等を挙げることができる。  [0043] In order to install the compound according to the present invention in the active layer of the organic thin film transistor element, it can be placed on the substrate by vacuum vapor deposition, but it can be dissolved in an appropriate solvent, and the additive can be added as needed. It is preferable to install the prepared solution on the substrate by cast coating, spin coating, printing, ink jet method, abrasion method or the like. In this case, the solvent for dissolving the organic semiconductor material of the present invention is not particularly limited as long as it can prepare a solution having an appropriate concentration by dissolving the organic semiconductor material. Chain ether solvents such as thiol ether diisopropyl ether, cyclic ether solvents such as tetrahydrofuran and dioxane, ketone solvents such as acetone methyl ketyl ketone, halogenated forms such as chloroform and 1,2-dichloroethane Alkyl solvents, toluene, ο-dichlorobenzene, nitrobenzene, m-talesol and other aromatic solvents, hexane and other chain hydrocarbon solvents, cyclohexane and other cyclic hydrocarbon solvents, N —Methyl pyrrolidone, carbon disulfide and the like.
[0044] 本発明おいて、ソース電極、ドレイン電極及びゲート電極を形成する材料は導電性 材料であれば特に限定されず、白金、金、銀、ニッケル、クロム、銅、鉄、錫、アンチ モン鉛、タンタル、インジウム、パラジウム、テルル、レニウム、イリジウム、アルミニウム 、ルテニウム、ゲルマニウム、モリブデン、タングステン、酸化スズ 'アンチモン、酸化ィ ンジゥム 'スズ (ITO)、フッ素ドープ酸ィ匕亜鉛、亜鉛、炭素、グラフアイト、グラッシ一力 一ボン、銀ペースト及びカーボンペースト、リチウム、ベリリウム、ナトリウム、マグネシ ゥム、カリウム、カルシウム、スカンジウム、チタン、マンガン、ジルコニウム、ガリウム、 ニオブ、ナトリウム、ナトリウム一カリウム合金、マグネシウム、リチウム、ァノレミ-ゥム、 マグネシウム Z銅混合物、マグネシウム Z銀混合物、マグネシウム Zアルミニウム混 合物、マグネシウム Zインジウム混合物、アルミニウム Z酸ィ匕アルミニウム混合物、リ チウム Zアルミニウム混合物等が用いられるが、特に白金、金、銀、銅、アルミニウム 、インジウム、 ιτο及び炭素が好ましい。あるいはドーピング等で導電率を向上させた 公知の導電性ポリマー、例えば、導電性ポリア-リン、導電性ポリピロール、導電性ポ リチォフェン、ポリエチレンジォキシチォフェンとポリスチレンスルホン酸の錯体なども 好適に用いられる。中でも半導体層との接触面にぉ ヽて電気抵抗が少な ヽものが好 ましい。 In the present invention, the material for forming the source electrode, the drain electrode, and the gate electrode is not particularly limited as long as it is a conductive material. Platinum, gold, silver, nickel, chromium, copper, iron, tin, anti Lead, tantalum, indium, palladium, tellurium, rhenium, iridium, aluminum, ruthenium, germanium, molybdenum, tungsten, tin oxide 'antimony, indium oxide' tin (ITO), fluorine-doped acid zinc, zinc, carbon, Graphite, glassy power, bonbon, silver paste and carbon paste, lithium, beryllium, sodium, magnesium, potassium, calcium, scandium, titanium, manganese, zirconium, gallium, niobium, sodium, sodium monopotassium alloy, magnesium, Lithium, Anorium, Magnesium Z Copper Mixture, Magnesium Z Silver Mixture, Magnesium Z Aluminum Mixture, Magnesium Z Indium Mixture, Aluminum Z Acid-Aluminum Mixture, Lithium Z Al A mixture of minium and the like is used, and platinum, gold, silver, copper, aluminum, indium, ιτο, and carbon are particularly preferable. Alternatively, a known conductive polymer whose conductivity has been improved by doping or the like, for example, conductive polyarine, conductive polypyrrole, conductive polythiophene, a complex of polyethylene dioxythiophene and polystyrene sulfonic acid, etc. is also suitably used. It is done. Of these, those having low electrical resistance on the contact surface with the semiconductor layer are preferred.
[0045] 電極の形成方法としては、上記を原料として蒸着やスパッタリング等の方法を用い て形成した導電性薄膜を、公知のフォトリソグラフ法やリフトオフ法を用いて電極形成 する方法、アルミニウムや銅などの金属箔上に熱転写、インクジェット等によるレジスト を用いてエッチングする方法がある。また導電性ポリマーの溶液あるいは分散液、導 電性微粒子分散液を直接インクジェットによりパターユングしてもよ ヽし、塗工膜から リソグラフやレーザーアブレーシヨンなどにより形成してもよい。更に導電性ポリマー や導電性微粒子を含むインク、導電性ペーストなどを凸版、凹版、平版、スクリーン印 刷などの印刷法でパターニングする方法も用いることができる。  [0045] As a method for forming an electrode, a method for forming an electrode using a known photolithographic method or a lift-off method from a conductive thin film formed using a method such as vapor deposition or sputtering using the above as a raw material, aluminum, copper, or the like There is a method of etching on a metal foil using a resist by thermal transfer, ink jet or the like. Alternatively, the conductive polymer solution or dispersion, or the conductive fine particle dispersion may be directly patterned by ink jetting, or may be formed from the coating film by lithography or laser ablation. Furthermore, a method of patterning an ink containing a conductive polymer or conductive fine particles, a conductive paste, or the like by a printing method such as relief printing, intaglio printing, lithographic printing, or screen printing can also be used.
[0046] ゲート絶縁層としては種々の絶縁膜を用いることができる力 特に比誘電率の高い 無機酸ィ匕物皮膜が好ましい。無機酸ィ匕物としては、酸化ケィ素、酸ィ匕アルミニウム、 酸化タンタル、酸化チタン、酸化スズ、酸化バナジウム、チタン酸バリウムストロンチウ ム、ジルコニウム酸チタン酸バリウム、ジルコニウム酸チタン酸鉛、チタン酸鉛ランタン 、チタン酸ストロンチウム、チタン酸バリウム、フッ化バリウムマグネシウム、チタン酸ビ スマス、チタン酸ストロンチウムビスマス、タンタノレ酸ストロンチウムビスマス、タンタノレ 酸ニオブ酸ビスマス、トリオキサイドイットリウムなどが挙げられる。それらのうち好まし いのは、酸化ケィ素、酸ィ匕アルミニウム、酸ィ匕タンタル、酸ィ匕チタンである。窒化ケィ 素、窒化アルミニウム等の無機窒化物も好適に用いることができる。 As the gate insulating layer, various insulating films can be used. In particular, an inorganic oxide film having a high relative dielectric constant is preferable. Examples of inorganic oxides include silicon oxide, aluminum oxide, tantalum oxide, titanium oxide, tin oxide, vanadium oxide, barium strontium titanate, barium zirconate titanate, lead zirconate titanate, titanate Lead lanthanum, strontium titanate, barium titanate, barium magnesium fluoride, bismuth titanate, strontium bismuth titanate, strontium bismuth tantanoate, tantanol Examples thereof include bismuth acid niobate and trioxide yttrium. Of these, preferred are silicon oxide, acid aluminum, acid tantalum, and acid titanium. Inorganic nitrides such as silicon nitride and aluminum nitride can also be suitably used.
[0047] 上記皮膜の形成方法としては、真空蒸着法、分子線ェピタキシャル成長法、イオン クラスタービーム法、低エネルギーイオンビーム法、イオンプレーティング法、 CVD法 、スパッタリング法、大気圧プラズマ法などのドライプロセスや、スプレーコート法、スピ ンコート法、ブレードコート法、ディップコート法、キャスト法、ロールコート法、バーコ ート法、ダイコート法などの塗布による方法、印刷やインクジェットなどのパターユング による方法などのウエットプロセスが挙げられ、材料に応じて使用できる。  [0047] Examples of the method for forming the coating include vacuum deposition, molecular beam epitaxy, ion cluster beam, low energy ion beam, ion plating, CVD, sputtering, and atmospheric pressure plasma. Dry process, spray coating method, spin coating method, blade coating method, dip coating method, casting method, roll coating method, bar coating method, die coating method and other coating methods, printing and ink jet patterning methods, etc. Can be used depending on the material.
[0048] ウエットプロセスは、無機酸化物の微粒子を、任意の有機溶剤あるいは水に必要に 応じて界面活性剤などの分散補助剤を用いて分散した液を塗布、乾燥する方法や、 酸化物前駆体、例えばアルコキシド体の溶液を塗布、乾燥する、いわゆるゾルゲル 法が用いられる。 [0048] The wet process includes a method of applying and drying a liquid in which fine particles of inorganic oxide are dispersed in an arbitrary organic solvent or water using a dispersion aid such as a surfactant as necessary, or an oxide precursor. A so-called sol-gel method in which a solution of a body, for example, an alkoxide body is applied and dried is used.
[0049] これらのうち好ましいのは、大気圧プラズマ法とゾルゲル法である。  [0049] Of these, the atmospheric pressure plasma method and the sol-gel method are preferable.
[0050] 大気圧下でのプラズマ製膜処理による絶縁膜の形成方法は、大気圧または大気圧 近傍の圧力下で放電し、反応性ガスをプラズマ励起し、基材上に薄膜を形成する処 理で、その方法【こつ ヽて ίま特開平 11— 61406号、同 11— 133205号、特開 2000 — 121804号、同 2000— 147209号、同 2000— 185362号の各公報等に記載さ れて 、る。これによつて高機能性の薄膜を生産性高く形成することができる。 [0050] A method for forming an insulating film by plasma film formation under atmospheric pressure is a process in which discharge is performed under atmospheric pressure or a pressure near atmospheric pressure, and a reactive gas is plasma-excited to form a thin film on a substrate. Therefore, the method is described in Japanese Patent Laid-Open Nos. 11-61406, 11-133205, 2000-121804, 2000-147209, 2000-185362, etc. And Thereby, a highly functional thin film can be formed with high productivity.
[0051] また有機化合物皮膜としては、ポリイミド、ポリアミド、ポリエステル、ポリアタリレート、 光ラジカル重合系、光力チオン重合系の光硬化性榭脂、あるいはアクリロニトリル成 分を含有する共重合体、ポリビュルフエノール、ポリビュルアルコール、ノボラック榭 脂、及びシァノエチルプルラン等を用いることもできる。 [0051] Further, as the organic compound film, polyimide, polyamide, polyester, polyacrylate, photo-radical polymerization system, photopower thione polymerization system photocurable resin, or copolymer containing acrylonitrile component, polybule Phenolic alcohol, polybutyl alcohol, novolac resin, cyano ethyl pullulan, and the like can also be used.
[0052] 有機化合物皮膜の形成法としては、前記ウエットプロセスが好ましい。 [0052] The wet process is preferable as a method of forming the organic compound film.
[0053] 無機酸ィ匕物皮膜と有機酸ィ匕物皮膜は積層して併用することができる。またこれら絶 縁膜の膜厚としては、一般に 50nm〜3 μ m、好ましくは 100nm〜l μ mである。 [0053] The inorganic oxide film and the organic oxide film can be laminated and used together. The thickness of these insulating films is generally 50 nm to 3 μm, preferably 100 nm to 1 μm.
[0054] また支持体はガラスやフレキシブルな榭脂製シートで構成され、例えば、プラスチッ クフィルムをシートとして用いることができる。前記プラスチックフィルムとしては、例え ば、ポリエチレンテレフタレート(PET)、ポリエチレンナフタレート(PEN)、ポリエーテ ルスルホン(PES)、ポリエーテルイミド、ポリエーテルエーテルケトン、ポリフエ-レン スルフイド、ポリアリレート、ポリイミド、ボリカーボネート(PC)、セルローストリァセテ一 ト (TAC)、セルロースアセテートプロピオネート(CAP)等力 なるフィルム等が挙げ られる。このように、プラスチックフィルムを用いることで、ガラス基板を用いる場合に 比べて軽量ィ匕を図ることができ、可搬性を高めることができるとともに、衝撃に対する 耐性を向上できる。 [0054] The support is made of glass or a flexible resin sheet. For example, a plastic film can be used as the sheet. Examples of the plastic film include For example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), polyetherimide, polyetheretherketone, polyphenylene sulfide, polyarylate, polyimide, polycarbonate (PC), cellulose triacetate (TAC), cellulose acetate propionate (CAP) and the like. In this way, by using a plastic film, it is possible to achieve lighter weight than when a glass substrate is used, to improve portability, and to improve resistance to impact.
[0055] 以下に、本発明の有機半導体材料カゝらなる有機薄膜を用いた電界効果型の有機 薄膜トランジスタについて説明する。  Hereinafter, a field effect type organic thin film transistor using an organic thin film made of an organic semiconductor material of the present invention will be described.
[0056] 図 1は、本発明の有機半導体材料を活性層に用いた電界効果型の有機薄膜トラン ジスタの構成例を示す。同図(a)は支持体 6上に金属箔等によりソース電極 2、ドレイ ン電極 3を形成し、両電極間に本発明の有機半導体材料からなる活性層 1を形成し 、その上に絶縁層 5を形成し、更にその上にゲート電極 4を形成して電界効果型トラ ンジスタを形成したものである。同図(b)は活性層 1を、(a)では電極間に形成したも のを、コート法等を用いて電極及び支持体表面全体を覆うように形成したものを表す 。(c)は支持体 6上に先ずコート法等を用いて、活性層 1を形成し、その後ソース電極 2、ドレイン電極 3、絶縁層 5、ゲート電極 4を形成したものを表す。  FIG. 1 shows a configuration example of a field effect type organic thin film transistor using the organic semiconductor material of the present invention for an active layer. In FIG. 2 (a), a source electrode 2 and a drain electrode 3 are formed on a support 6 with a metal foil or the like, an active layer 1 made of the organic semiconductor material of the present invention is formed between both electrodes, and insulation is formed thereon. The field effect transistor is formed by forming the layer 5 and further forming the gate electrode 4 thereon. FIG. 2B shows the active layer 1 formed between the electrodes in FIG. 1A, which is formed so as to cover the entire surface of the electrode and the support using a coating method or the like. (C) shows that the active layer 1 is first formed on the support 6 using a coating method or the like, and then the source electrode 2, the drain electrode 3, the insulating layer 5, and the gate electrode 4 are formed.
[0057] 同図(d)は支持体 6上にゲート電極 4を金属箔等で形成した後、絶縁層 5を形成し 、その上に金属箔等で、ソース電極 2及びドレイン電極 3を形成し、該電極間に本発 明の半導体材料により形成された活性層 1を形成する。その他同図(e)、(f)に示す ような構成を取ることちできる。  In FIG. 4D, after forming the gate electrode 4 with a metal foil or the like on the support 6, the insulating layer 5 is formed, and the source electrode 2 and the drain electrode 3 are formed with the metal foil or the like thereon. Then, the active layer 1 made of the semiconductor material of the present invention is formed between the electrodes. Other configurations such as those shown in (e) and (f) of FIG.
実施例  Example
[0058] 以下、実施例により本発明を説明するが、本発明の実施態様はこれらに限定される ものではない。  [0058] Hereinafter, the present invention will be described by way of examples, but the embodiments of the present invention are not limited thereto.
[0059] 実施例 1 [0059] Example 1
ゲート電極としての比抵抗 0. 01 Ω 'cmの Siウェハーに、厚さ 2000Aの熱酸化膜 を形成してゲート絶縁層とした後、ォクチルトリクロロシランによる表面処理を行った。 比較化合物〈1〉(ポリ(3—へキシルチオフェン)(regioregular、アルドリッチ社製、平 均分子量 89000、 PHT) )のクロ口ホルム溶液をアプリケーターを用いて塗布し、自 然乾燥することによりキャスト膜 (厚さ 50nm)を形成して、窒素雰囲気下で 50°C、 30 分間の熱処理を施した。更にこの膜の表面にマスクを用いて金を蒸着して、ソース及 びドレイン電極を形成した。ソース及びドレイン電極は幅 100 m、厚さ 200nmで、 チャネル幅 W= 3mm、チャネル長 L= 20 μ mの有機薄膜トランジスタ素子 1を作製 した。 A 2000 A thick thermal oxide film was formed on a Si wafer having a specific resistance of 0.01 Ω'cm as a gate electrode to form a gate insulating layer, and then surface treatment with octyltrichlorosilane was performed. Comparative compound <1> (poly (3-hexylthiophene) (regioregular, manufactured by Aldrich) (Appropriate molecular weight 89000, PHT)) was applied with an applicator and dried to form a cast film (thickness 50 nm), which was then heat-treated at 50 ° C for 30 minutes in a nitrogen atmosphere. Was given. Further, gold was deposited on the surface of this film using a mask to form source and drain electrodes. An organic thin film transistor element 1 having a source and drain electrode width of 100 m, a thickness of 200 nm, a channel width W = 3 mm, and a channel length L = 20 μm was fabricated.
[0060] 比較化合物〈1〉を比較化合物〈2〉(ペンタセン、アルドリッチ社製市販試薬を昇華 精製して用いた)に代えた他は、有機薄膜トランジスタ素子 1と同様の方法で、有機 薄膜トランジスタ素子 2を作製した。  [0060] The organic thin film transistor element 2 was prepared in the same manner as the organic thin film transistor element 1, except that the comparative compound <1> was replaced with the comparative compound <2> (pentacene, which was obtained by sublimation purification using a commercially available reagent manufactured by Aldrich). Was made.
[0061] [化 6] 比較化合物 <1> 比較化合物 <2>
Figure imgf000018_0001
[0061] [Chemical 6] Comparative compound <1> Comparative compound <2>
Figure imgf000018_0001
[0062] 更に比較化合物〈1〉を表 1に示した本発明に係る例示化合物に代えた他は、有機 薄膜トランジスタ素子 1と同様の方法で、有機薄膜トランジスタ素子 3〜8を作製した。 [0062] Organic thin film transistor elements 3 to 8 were produced in the same manner as in organic thin film transistor element 1, except that comparative compound <1> was replaced with the exemplary compounds according to the present invention shown in Table 1.
[0063] 以上のように作製した有機薄膜トランジスタ素子 1及び 3〜8は、 pチャネルのェンノヽ ンスメント型 FETの良好な動作特性を示した。更に有機薄膜トランジスタ素子 1〜8に ついて、 I V特性の飽和領域から、キャリア移動度と ONZOFF比(ドレインバイアス — 50Vとし、ゲートバイアス 50Vおよび 0Vにしたときのドレイン電流値の比率)を求 めた。また得られた素子を大気中で 1ヶ月放置し、再度キャリア移動度と ONZOFF 比を求めた。結果を表 1に示す。  [0063] The organic thin film transistor elements 1 and 3 to 8 produced as described above exhibited good operating characteristics of p-channel enhancement type FETs. Furthermore, for the organic thin film transistor elements 1 to 8, the carrier mobility and the ONZOFF ratio (the ratio of the drain current when the gate bias is 50V and 0V with the drain bias of 50V) were obtained from the saturation region of the IV characteristics. The obtained device was left in the atmosphere for 1 month, and the carrier mobility and ONZOFF ratio were obtained again. The results are shown in Table 1.
[0064] [表 1]
Figure imgf000019_0001
表 1の結果より、本発明の有機薄膜トランジスタ素子はトランジスタとしての特性が 良好であり、更に経時劣化が抑えられていることがわ力 た。また、比較化合物〈2〉 ( ペンタセン)を用いた有機薄膜トランジスタ素子 2の結果は、塗布による薄膜形成によ つては活性層として機能するペンタセン薄膜を得がたいことが明確に示されているが 、本発明の有機薄膜トランジスタ素子は、塗布による薄膜形成で良好なトランジスタと しての特性を示すことがわ力つた。
[0064] [Table 1]
Figure imgf000019_0001
From the results in Table 1, it was found that the organic thin film transistor element of the present invention has good characteristics as a transistor and further suppresses deterioration over time. Further, the result of the organic thin film transistor element 2 using the comparative compound <2> (pentacene) clearly shows that it is difficult to obtain a pentacene thin film functioning as an active layer by forming a thin film by coating. The organic thin-film transistor device showed excellent characteristics as a transistor by forming a thin film by coating.

Claims

請求の範囲 下記一般式 (1)で表される化合物を含有することを特徴とする有機半導体材料。 An organic semiconductor material comprising a compound represented by the following general formula (1):
[化 1]  [Chemical 1]
Figure imgf000020_0001
Figure imgf000020_0001
(式中、 X〜Xはそれぞれ置換基を表し、 R〜Rはそれぞれ水素原子または置換基 (Wherein, X to X each represents a substituent, and R to R represent a hydrogen atom or a substituent, respectively.
1 4 1 8  1 4 1 8
を表す。 nl〜n4はそれぞれ 0〜5の整数を表す。但し、 nl〜n4が全て 0のとき、 R  Represents. nl to n4 each represents an integer of 0 to 5. However, when nl to n4 are all 0, R
1 1
〜Rは全て水素原子になることはなぐ少なくとも 1つは置換基である。 ) At least one of -R is not a hydrogen atom and is a substituent. )
8  8
[2] 前記一般式(1)が下記一般式 (2)で表されることを特徴とする請求の範囲第 1項に 記載の有機半導体材料。  [2] The organic semiconductor material according to claim 1, wherein the general formula (1) is represented by the following general formula (2).
[化 2] 一般式 (2)  [Chemical formula 2] General formula (2)
Figure imgf000020_0002
Figure imgf000020_0002
(式中、 X〜Xはそれぞれ置換基を表し、 R〜Rはそれぞれ水素原子または置換基 (Wherein, X to X each represents a substituent, and R to R represent a hydrogen atom or a substituent, respectively.
1 8 1 8  1 8 1 8
を表す。 nl〜n4はそれぞれ 0〜4の整数を表す。 )  Represents. nl to n4 each represents an integer of 0 to 4. )
前記一般式(1)において、 nl〜n4が全て 0であり、 R、 R、 R、 Rはそれぞれアルキ ル基であり、 R、 R、 R、 Rはそれぞれ水素原子であることを特徴とする請求の範囲In the general formula (1), nl to n4 are all 0, and R, R, R, and R are each alkyl. And R, R, R, and R are each a hydrogen atom.
2 3 6 7 2 3 6 7
第 1項に記載の有機半導体材料。  The organic semiconductor material according to item 1.
[4] 前記一般式(1)において、 nl〜n4が全て 0であり、 R、 Rの一方がアルキル基で他 [4] In the general formula (1), nl to n4 are all 0, and one of R and R is an alkyl group and the other
1 8  1 8
方が水素原子であり、 R、 Rの一方がアルキル基で他方が水素原子であることを特  One of R and R is an alkyl group and the other is a hydrogen atom.
4 5  4 5
徴とする請求の範囲第 1項に記載の有機半導体材料。  The organic semiconductor material according to claim 1, wherein
[5] 前記一般式(2)において、 nl〜n4が全て 0であることを特徴とする請求の範囲第 2 項に記載の有機半導体材料。 [5] The organic semiconductor material according to claim 2, wherein in the general formula (2), nl to n4 are all 0.
[6] 前記一般式(2)にお 、て、 X、 X、 X、 Xがそれぞれアルキル基であることを特徴と [6] In the general formula (2), X, X, X, and X are each an alkyl group,
5 6 7 8  5 6 7 8
する請求の範囲第 2項または第 5項に記載の有機半導体材料。  6. An organic semiconductor material according to claim 2 or claim 5.
[7] 前記一般式(2)において、 X、 Xの一方がアルキル基で他方が水素原子であり、 X [7] In the general formula (2), one of X and X is an alkyl group and the other is a hydrogen atom;
5 6 7 5 6 7
、 Xの一方がアルキル基で他方が水素原子であることを特徴とする請求の範囲第 2X is an alkyl group and the other is a hydrogen atom.
8 8
項または第 5項に記載の有機半導体材料。  Item 6. The organic semiconductor material according to Item 5 or Item 5.
[8] 前記一般式(2)にお!/、て、 R、 R、 R、 Rはそれぞれアルキル基であり、 R、 R、 R、 [8] In the general formula (2)! /, R, R, R, R are each an alkyl group, and R, R, R,
1 4 5 8 2 3 6 1 4 5 8 2 3 6
Rはそれぞれ水素原子であることを特徴とする請求の範囲第 2項、第 5項〜第 7項のEach of R's is a hydrogen atom.
7 7
V、ずれか 1項に記載の有機半導体材料。  V, the organic semiconductor material according to item 1.
[9] 前記一般式(2)において、 R、 Rの一方がアルキル基で他方が水素原子であり、 R [9] In the general formula (2), one of R and R is an alkyl group and the other is a hydrogen atom;
1 8 4 1 8 4
、 Rの一方がアルキル基で他方が水素原子であることを特徴とする請求の範囲第 2Wherein one of R is an alkyl group and the other is a hydrogen atom.
5 Five
項、第 5項〜第 7項のいずれか 1項に記載の有機半導体材料。  Item 8. The organic semiconductor material according to any one of Items 5 to 7.
[10] 請求の範囲第 1項〜第 9項のいずれか 1項に記載の有機半導体材料を含有すること を特徴とする有機半導体膜。 [10] An organic semiconductor film comprising the organic semiconductor material according to any one of [1] to [9].
[11] 請求の範囲第 1項〜第 9項のいずれか 1項に記載の有機半導体材料を含有すること を特徴とする有機半導体素子。 [11] An organic semiconductor element comprising the organic semiconductor material according to any one of claims 1 to 9.
[12] 請求の範囲第 1項〜第 9項のいずれか 1項に記載の有機半導体材料を半導体層に 含有することを特徴とする有機薄膜トランジスタ。 [12] An organic thin film transistor comprising the organic semiconductor material according to any one of claims 1 to 9 in a semiconductor layer.
[13] 請求の範囲第 1項〜第 9項のいずれか 1項に記載の有機半導体材料を半導体層に 含有することを特徴とする電界効果型トランジスタ。 [13] A field-effect transistor comprising the organic semiconductor material according to any one of claims 1 to 9 in a semiconductor layer.
[14] 請求の範囲第 12項に記載の有機薄膜トランジスタまたは請求の範囲第 13項に記載 の電界効果型トランジスタを用いることを特徴とするスイッチング素子。 [14] A switching element using the organic thin film transistor according to claim 12 or the field effect transistor according to claim 13.
PCT/JP2006/301959 2005-02-24 2006-02-06 Organic semiconductor material, organic semiconductor film, organic semiconductor device, organic thin-film transistor, field effect transistor and switching device WO2006090569A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007504653A JPWO2006090569A1 (en) 2005-02-24 2006-02-06 Organic semiconductor material, organic semiconductor film, organic semiconductor element, organic thin film transistor, field effect transistor, and switching element

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005-048685 2005-02-24
JP2005048685 2005-02-24

Publications (1)

Publication Number Publication Date
WO2006090569A1 true WO2006090569A1 (en) 2006-08-31

Family

ID=36927212

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/301959 WO2006090569A1 (en) 2005-02-24 2006-02-06 Organic semiconductor material, organic semiconductor film, organic semiconductor device, organic thin-film transistor, field effect transistor and switching device

Country Status (2)

Country Link
JP (1) JPWO2006090569A1 (en)
WO (1) WO2006090569A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6463534A (en) * 1987-08-03 1989-03-09 American Cyanamid Co Manufacture of naphthacene
JP2000066233A (en) * 1998-08-17 2000-03-03 Hitachi Ltd Liquid crystal display device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10289786A (en) * 1997-04-14 1998-10-27 Toyo Ink Mfg Co Ltd Organic electroluminescent element material and organic electroluminescent element using the same
US5936259A (en) * 1997-10-16 1999-08-10 Lucent Technologies Inc. Thin film transistor and organic semiconductor material thereof
JP4481028B2 (en) * 2003-02-05 2010-06-16 旭化成株式会社 Manufacturing method of organic semiconductor thin film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6463534A (en) * 1987-08-03 1989-03-09 American Cyanamid Co Manufacture of naphthacene
JP2000066233A (en) * 1998-08-17 2000-03-03 Hitachi Ltd Liquid crystal display device

Also Published As

Publication number Publication date
JPWO2006090569A1 (en) 2008-07-24

Similar Documents

Publication Publication Date Title
WO2006059486A1 (en) Organic thin-film transistor material, organic thin-film transistor, field effect transistor, switching device, organic semiconductor material, and organic semiconductor film
JP2007019294A (en) Organic semiconductor material, organic semiconductor film, organic semiconductor element, and organic thin film transistor
US7709829B2 (en) Organic semiconductor material, organic transistor, field effect transistor, switching device and thiazole compound
WO2005122278A1 (en) Organic semiconductor thin film, organic semiconductor device, organic thin film transistor, and organic electro-luminescence element
JP2005206750A (en) Organic semiconductive material, organic transistor, field-effect transistor, switching element, and five-membered heterocyclic compound
WO2005122277A1 (en) Organic thin film transistor
WO2007088768A1 (en) Organic thin film transistor, organic semiconductor material, organic semiconductor film, and organic semiconductor device
WO2006054686A1 (en) Method for manufacturing organic thin-film transistor and organic thin-film transistor
JP2007067262A (en) Organic semiconductor material, organic semiconductor film, organic semiconductor device and organic semiconductor thin-film transistor
JP2007088224A (en) Organic semiconductor material and organic semiconductor film using same, organic semiconductor device, and organic thin-film transistor
JP2006339577A (en) Organic semiconductor thin film and organic thin film transistor
WO2007105473A1 (en) Organic semiconductor material, organic semiconductor film, organic semiconductor device, and organic thin film transistor
WO2006038459A1 (en) Organic thin-film transistor material, organic thin-film transistor, field effect transistor and switching device
JP2006222251A (en) Organic semiconductor material, organic thin-film transistor, field effect transistor, and switching element
JP2004146733A (en) Organic semiconductor and organic thin film transistor element
JP2006028055A (en) Organic semiconductor material, organic transistor, field-effect transistor and switching element
JP2005236096A (en) Organic semiconductor material, organic thin-film transistor using the same, field effect organic thin-film transistor, and switching element using both
JP2006060116A (en) Organic thin film transistor, material therefor, field effect transistor and switching device
WO2006098121A1 (en) Organic semiconductor material, organic semiconductor film, organic semiconductor device, organic thin-film transistor, and method for manufacturing organic thin-film transistor
WO2006090569A1 (en) Organic semiconductor material, organic semiconductor film, organic semiconductor device, organic thin-film transistor, field effect transistor and switching device
JP2005223238A (en) Organic semiconductor material and organic thin film transistor employing it, field effect organic thin film transistor and switching element employing them
JP2006140180A (en) Organic thin film transistor material, organic thin film transistor, field effect transistor, and switching element
JP2006165015A (en) Organic thin film transistor material, organic thin film transistor, field effect transistor, and switching device
JP2006219550A (en) Organic semiconductor material, organic thin film transistor (tft), electric field effect transistor and switching element
JP2006028054A (en) Organic thin film transistor material, organic thin film transistor, field effect transistor and swichintg device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2007504653

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 06713102

Country of ref document: EP

Kind code of ref document: A1

WWW Wipo information: withdrawn in national office

Ref document number: 6713102

Country of ref document: EP