WO2006073234A1

WO2006073234A1 - Method and apparatus for treating three-dimensional molded polymeric article

Info

Publication number: WO2006073234A1
Application number: PCT/KR2005/004289
Authority: WO
Inventors: Soon Ok Kim
Original assignee: Tescom Co., Ltd.
Priority date: 2005-01-03
Filing date: 2005-12-14
Publication date: 2006-07-13
Also published as: TW200624244A; KR20060079725A; TWI284591B; KR100649665B1

Abstract

The present invention relates to a method and apparatus for treating a three-dimensional molded polymeric article, and more particularly, to a method and apparatus for treating a three-dimensional molded polymeric article, wherein a plasma sheath is formed to conform to the shape of a three-dimensional molded polymeric article so that the hardness and surface conductivity of the polymeric article can be improved. The present invention provides an apparatus for treating a three-dimensional molded polymeric article, comprising a processing chamber capable of defining a hermetic space therein; a radio frequency power supply unit including a radio frequency power supply, a matching box and an antenna, so as to supply radio frequency power for generation of plasma within the processing chamber; a process gas supply unit including a process gas source, a process gas supply passage and a flow rate control means, so as to supply a process gas for constituting the plasma generated within the processing chamber; a pumping unit for reducing pressure in the processing chamber so that the interior of the processing chamber is under a vacuum condition; and a grid unit including a negative voltage generator and a grid so as to focus ions, wherein the antenna and the grid are provided to be spaced apart by a distance of 250 to 350mm from each other.

Description

METHOD AND APPARATUS FOR TREATING THREE- DIMENSIONAL MOLDED POLYMERIC ARTICLE

Technical Field

[1] The present invention relates to a method and apparatus for treating a three- dimensional molded polymeric article, and more particularly, to a method and apparatus for treating a three-dimensional molded polymeric article, wherein a plasma sheath is formed to conform to the shape of a three-dimensional molded polymeric article so that the hardness and surface conductivity of the polymeric article can be improved. Background Art

[2] Polymers are materials with a wide variety of uses due to their properties such as their light weight, moldability and processability, transparency, and electrical insulation. According to their uses, such polymers are often required to have improvement of only surface properties without changing the overall properties of the polymers. Since the hydrophilic or hydrophobic property of a surface has a great influence on wettability, printability, colorability, biocompatibility, anti-static property, adhesive property, water-proof property, damp-proof property and the like, there have been used a variety of methods for improving surface properties.

[3] Such surface modification methods for polymers include chemical treatment, corona treatment, plasma treatment, and the like. Among them, plasma treatment is a method for treating polymers using plasma at low pressure.

[4] Plasma is considered as a fourth state of a material and means partially ionized gas.

The components of plasma are electrons, cations, neutral atoms, neutral molecules, and the like. When energy is applied to gas particles, valence electrons escape from their orbits and become free electrons, so that the gas particles can have positive charges. The electrons thus produced and ionized gas maintain an electrically neutral state as a whole. Interactions among the constituent particles emit unique light and activate the particles that in turn have higher reactivity. As compared with corona treatment, plasma treatment using such plasma has advantages in that a reaction gas can be selected and process parameters such as treatment pressure can be controlled.

[5] Conventional plasma treatment methods include techniques for improving surface hardness of a metal or the like using ion beams or plasma nitriding. Recently, there are cases where plasma is applied to metals and polymers by using plasma ion implantation.

[6] However, when ions are implanted into a three-dimensional molded polymeric article in accordance with the prior art, they are not implanted into a side surface or a curved portion of the article. Therefore, there is a problem in that the distribution of surface conductivity of the polymeric article is not uniform. This is because the shape of a plasma sheath is not curved to conform to the surface of the polymeric article.

[7] Further, since ion implantation depth is small, H O is dissociated or bonding forces of a double bond and a network structure are weakened on the surface of the polymeric article. Thus, as time passes or temperature increases, there is a problem in that surface conductivity decreases remarkably. Disclosure of Invention Technical Problem

[8] An object of the present invention is to provide an apparatus for treating a three- dimensional molded polymeric article, wherein a problem of deterioration of surface conductivity does not occur even though a certain period of time passes or temperature is raised.

[9] Another object of the present invention is to provide a method for treating a three- dimensional molded polymeric article, wherein a problem of deterioration of surface conductivity does not occur even though a certain period of time passes or temperature increases, and massive treatment can be carried out. Technical Solution

[10] According to the present invention for achieving the objects, there is provided an apparatus for treating a three-dimensional molded polymeric article, comprising a processing chamber capable of defining a hermetic space therein; a radio frequency power supply unit including a radio frequency power supply, a matching box and an antenna, so as to supply radio frequency power for generation of plasma within the processing chamber; a process gas supply unit including a process gas source, a process gas supply passage and a flow rate control means, so as to supply a process gas for constituting the plasma generated within the processing chamber; a pumping unit for reducing pressure in the processing chamber so that the interior of the processing chamber is under a vacuum condition; and a grid unit including a negative voltage generator and a grid so as to focus ions, wherein the antenna and the grid are provided to be spaced apart by a distance of 250 to 350mm from each other.

[11] The grid may be provided to have a structure with a plurality of grids connected to one another, and a distance between adjacent grids is 15 to 140mm. Thus, a plasma sheath can be smoothly formed to conform to a curved surface of the three-dimensional molded polymeric article so that ion implantation into the three-dimensional molded polymeric article can be smoothly performed.

[12] Preferably, the grid is "D "-shaped with front and rear portions thereof connected to each other, and the front and rear portions are connected to each other while being spaced apart by a distance of 30 to 90mm from each other, such that front and rear surfaces of the three-dimensional molded polymeric article can be simultaneously treated and plasma cannot be generated within previously generated plasma. [13] Preferably, the process gas is a multi-component process gas comprising C H , CH ,

Ar⁺, N ⁺ and H , so that the content of CH ^" can increase in the resulting plasma.

2 2 4

[14] A composition ratio of the multi-component process gas may be C H :H = 80:20,

CH :H = 70:30, and Ar⁺:H = 90:10.

4 2 2

[15] A pre-processing chamber may be further provided to be connected to the processing chamber, and the pre-processing chamber may have the same configuration as the processing chamber but perform plasma treatment for the three-dimensional molded polymeric article using a voltage lower than that used in the processing chamber. Thus, moisture and gas present in the three-dimensional molded polymeric article are removed to greatly reduce process time in the processing chamber, thereby enabling massive treatment.

[16] Preferably, the apparatus further comprises a loading chamber provided to be connected to the pre-processing chamber so as to receive the three-dimensional molded polymeric article from the outside and supply it to the pre-processing chamber; and an unloading chamber provided to be connected to the processing chamber so as to receive the three-dimensional molded polymeric article treated in the processing chamber and deliver it to the outside, wherein gate valves are further provided between adjacent ones of the loading chamber, the pre-processing chamber, the processing chamber and the unloading chamber, so as to open the respective chambers. Thus, the three-dimensional molded polymeric article, which is an object to be treated, can be automatically loaded and unloaded, and transferred at a predetermined rate between the respective processes, resulting in automation of the entire processes.

[17] The present invention provides a method for treating a three-dimensional molded polymeric article, comprising the steps of:

[18] 1) introducing the three-dimensional molded polymeric article with a polymer existing on a surface thereof into a loading chamber that is under an atmospheric pressure condition;

[19] 2) reducing pressure in the loading chamber to be under a vacuum condition, and introducing the three-dimensional molded polymeric article into a pre-processing chamber that is always under a vacuum condition;

[20] 3) removing moisture (H O) and gas present in the three-dimensional molded polymeric article by using plasma in the pre-processing chamber;

[21] 4) introducing the three-dimensional molded polymeric article into a processing chamber that is always under a vacuum condition; [22] three-dimensional molded polymeric article by using plasma in the processing chamber; and

[23] 6) transferring the three-dimensional molded polymeric article to an unloading chamber that is under a vacuum condition, increasing pressure in the unloading chamber to an atmospheric pressure condition, and delivering the three-dimensional molded polymeric article to the outside.Preferably, step 3) performs treatment such that surface conductivity of the three-dimensional molded polymeric article is maintained in a range of 10 to 10 Ω/cm . Thus, the process time required in step 5) can be shortened and the treatment process can be easily performed.

[24] Preferably, step 5) performs treatment such that surface conductivity of the three- dimensional molded polymeric article is maintained in a range of 10 to 10 Ω/cm , thereby producing a superconductor.

Advantageous Effects

[25] With the apparatus for treating a three-dimensional molded polymeric article according to the present invention, a plasma sheath is generated to conform to the surface contours of a three-dimensional molded polymeric article and a proper ion motion distance is secured. Thus, there is an advantage in that the entire surface of a three-dimensional molded polymeric article can be treated uniformly.

[26] Particularly, since ions are deeply implanted into the surface of the three-dimensional molded polymeric article, there is an advantage in that it is possible to obtain a three-dimensional molded polymeric article with superior surface conductivity. Brief Description of the Drawings

[27] Fig. 1 is a sectional view showing the configuration of an apparatus for treating a three-dimensional molded polymeric article according to an embodiment of the present invention.

[28] Fig. 2 is a side view of a grid in the embodiment of the present invention.

[29] Fig. 3 is a sectional view of the configuration of a processing chamber according to an embodiment of the present invention.

[30] Fig. 4 is a sectional view of the configuration of a processing chamber according to another embodiment of the present invention.

[31] Fig. 5 is a flowchart illustrating respective steps of a method for treating a three- dimensional molded polymeric article according to an embodiment of the present invention.

[32] <Explanation of Reference Numerals for Main Parts in the Drawings>

[33] 1: Apparatus for treating a three-dimensional molded polymeric article according to an embodiment of the present invention [34] 10: Loading chamber 20: Pre-processing chamber

[35] 30: Processing chamber 40: Unloading chamber

[36] 50: Gate valve 60: Vacuum pump

[37] 70: Feeding means

Best Mode for Carrying Out the Invention

[38] The configuration and function of an apparatus for treating a three-dimensional molded polymeric article 1 according to an embodiment of the present invention will be first described in detail.

[39] The apparatus 1 of this embodiment comprises a loading chamber 10, a preprocessing chamber, a processing chamber 30, and an unloading chamber 40. Here, there may be two or more processing chambers 30.

[40] Each of the chambers is provided with a vacuum pump 60 for establishing a low degree of vacuum within the chamber. In this embodiment, a rotary pump or a mechanical booster pump is used as the vacuum pump. With the use of the rotary pump or mechanical booster pump, pressure in the chamber can reach about 10 Torr. To decrease the pressure in the chamber to about 10 Torr, it is desirable to further provide a turbo and cryo pump. Such a turbo and cryo pump may not be provided at the loading chamber 10 and the unloading chamber 40, and is preferably provided at the pre-processing chamber 20 and the processing chamber 30 since these chambers require a high degree of vacuum.

[41] Passages through which a three-dimensional molded polymeric article M can pass are formed in partitions formed between adjacent chambers, and a gate valve 50 is formed in each of the passages. The gate valve 50 is closed or opened by a pneumatic or hydraulic cylinder to isolate the adjacent chambers from each other or to allow them to communicate with each other so that the three-dimensional molded polymeric article M can pass therethrough.

[42] In this embodiment, the loading chamber 10 is an element for first introducing the three-dimensional molded polymeric article M, which is an object to be treated, into the apparatus 1 of this embodiment. The loading chamber 10 continuously receives three-dimensional molded polymeric articles from the outside while changing the interior thereof to an atmospheric pressure condition or a vacuum condition. That is, the loading chamber receives a three-dimensional molded polymeric article from the outside while maintaining the interior thereof under an atmospheric pressure condition, and is isolated from the outside after the three-dimensional molded polymeric article has been received therein. Then, the vacuum pump 60 is operated to establish a vacuum condition in the loading chamber. The reason why a vacuum condition is established is that it is advantageous to cause pressure in the loading chamber 10 to be identical with pressure in the pre-processing chamber 20, which is adjacent to the loading chamber and always maintained under a vacuum condition, in order to transfer the three-dimensional molded polymeric article from the loading chamber to the preprocessing chamber. A feeding means 70a is provided at an upper portion of the loading chamber 10 to receive the three-dimensional molded polymeric article from the outside and transfer it to the pre-processing chamber.

[43] Next, the pre-processing chamber 20 is provided in the vicinity of the loading chamber 10 and receives the three-dimensional molded polymeric article M from the loading chamber 10. The pre-processing chamber is an element for pre-processing the three-dimensional molded polymeric article M by using plasma. Plasma is applied to the three-dimensional molded polymeric article M in the pre-processing chamber 20, so that moisture (H O) and gas present in the three-dimensional molded polymeric article can be removed and the surface conductivity of the three-dimensional molded polymeric article can be maintained in a range of 10 to 10 Ω/cm . Therefore, the preprocessing chamber is formed with equipment for generating plasma therein. That is, the pre-processing chamber is provided with a radio frequency power supply unit 22 including a radio frequency power supply 22a, a matching box 22b and an antenna 22c; and a process gas supply unit 24 including a process gas source 24a, a process gas supply passage 24b and a flow rate control means 24c. Further, in order to generate plasma conforming to the shape of the three-dimensional molded polymeric article, the pre-processing chamber is provided with a grid unit 26 including a negative voltage generator 26a and a grid 26b.

[44] Here, the radio frequency power supply 22a preferably supplies RF power of 100 to l,000W to the pre-processing chamber 20. Usually, RF power of l,000W shows the highest ion density. It is preferred that the antenna 22c and the grid 26b be formed to conform to the shape of the three-dimensional molded polymeric article M, and the distance between the antenna 22c and the grid 26b be 250 to 350mm. This is to secure an ion motion radius so that generated ions can be smoothly supplied to the three- dimensional molded polymeric article.

[45] As for the grid 26b in this embodiment, a plurality of grids is consecutively connected to one another, as shown in Fig. 1. At this time, the respective grids are connected to one another while being spaced apart by a predetermined distance from one another. The predetermined distance L is preferably 15 to 140mm so that a plasma sheath can be bent and introduced into spaces between the adjacent grids. When the plasma sheath is bent and introduced into the spaces, it is possible to cause the plasma sheath to conform to the contour of the three-dimensional molded polymeric article. Thus, there is an advantage in that the entire surface of the three-dimensional molded polymeric article can be uniformly treated. [46] The grid 26b in this embodiment has a structure in which a front portion and a rear portion are connected to each other, as shown in Fig. 2. Fig. 2 is a side view of the grid in this embodiment, showing the structure in which the front and rear portions of the grid are connected to each other while being spaced apart by a predetermined distance from each other. Therefore, the three-dimensional molded polymeric article passes through a space between the front and rear portions of the grid 26b. At this time, the distance D between the front and rear portions is preferably 30 to 90mm to prevent plasma from being generated again within previously generated plasma. If plasma is generated again within previously generated plasma, there is a problem in that ions cannot be focused, resulting in deformation of the three-dimensional molded polymeric article. Since three-dimensional molded polymeric articles can continuously pass through the space between the front and rear portions of the grid in this embodiment, there is an advantage in that the three-dimensional molded polymeric articles can be continuously processed.

[47] Negative- voltage pulse power is applied to the grid 26b in order to inject cations for use in processing the three-dimensional molded polymeric article.

[48] In this embodiment, the process gas source supplies a multi-component process gas com ^rprising ° C 2 H 2 , CH 4 , Ar⁺, N 2 ⁺ and H 2. This is to increase the content of CH 4 in the generated plasma. At this time, the preferable composition ratio of the multi- component process gases is: C H :H = 80:20, CH :H = 70:30, and Ar⁺:H = 90:10.

[49] Similarly to the loading chamber 10, a feeding means 70b is provided at an upper portion of the pre-processing chamber 20 to receive and transfer the three-dimensional molded polymeric article M. Therefore, the three-dimensional molded polymeric article M can be received from the loading chamber 10 and then transferred to the processing chamber 30.

[50] The processing chamber 30 is an element for treating the three-dimensional molded polymeric article received from the pre-processing chamber. That is, the processing chamber 30 has the same configuration as the aforementioned pre-processing chamber 20, and treats the surface of the three-dimensional molded polymeric article by generating plasma therein. However, the processing chamber treats the three-dimensional molded polymeric article using RF power higher than that used in the preprocessing chamber 20. The surface conductivity of the three-dimensional molded polymeric article treated in the processing chamber 30 becomes 10 to 10 Ω/cm .

[51] It is preferred that the processing chamber 30 according to this embodiment be further provided with a carbon chain polymer producing unit. The carbon chain polymer generating unit functions to supply a specific organic material into the processing chamber so that the material can be ionized within the plasma, thereby producing ions generated from inert gas, and a polymer having a stable carbon chain. The carbon chain polymer thus produced is subjected to ion implantation into the three-dimensional molded polymeric article to improve the surface properties of the three-dimensional molded polymeric article.

[52] In this embodiment, two types of carbon chain polymer producing units will be described.

[53] In a first type of carbon chain polymer producing unit, the carbon chain polymer producing unit comprises an inert gas source, an organic material source, and a sprayer, as shown in Fig. 3. An inert gas and an organic material are supplied into the processing chamber to produce a carbon chain polymer.

[54] Here, the organic material source comprises a bubbler 31b and a vaporizer 31c. The bubbler 31b functions to perform bubbling of a polyhydric organic material filled therein. The vaporizer 31c is connected to a rear end of the bubbler 31b and functions to vaporize the organic material that has been subjected to the bubbling in the bubbler 31b.

[55] The polyhydric organic material thus vaporized is supplied into the processing chamber 30 by means of movement of the inert gas supplied by the inert gas source 31a. Therefore, the inert gas also serves as a carrier gas. Accordingly, the inert gas source 31a is connected to a front end of the bubbler 31b and supplies the inert gas to the bubbler and the vaporizer.

[56] The polyhydric organic material thus vaporized is sprayed into the processing chamber 30, which is maintained under a high vacuum condition (10 Torr), by a pa rticular sprayer (not shown in the figure). The introduced polyhydric organic material and inert gas are ionized by plasma in the processing chamber 30 to produce a polymer with a stable carbon chain. At this time, the supplied organic material is preferably polyhydric alcohol such as methanol (CH OH) and ethanol (C H OH), hexane, or heptane.

[57] The three-dimensional molded polymeric article to be treated in this manner may be a module tray, an LCD panel tray, a PCB tray, an FPCB tray, a liquid crystal tray, a semiconductor tray, or an IC tray.

[58] In a second type of carbon chain polymer producing unit, the carbon chain polymer producing unit comprises an inert gas source 33a and an organic metal compound source 33b, as shown in Fig. 4. An inert gas and an organic metal compound are supplied into the processing chamber 30 to produce a stable carbon chain polymer.

[59] Here, the organic metal compound source 33b is provided as a chiller for cooling an organic metal compound to -20° to 0°C, vaporizing the organic metal compound by vapor pressure, and supplying the vaporized compound into the processing chamber. The inert gas source 33a is provided in front of the chiller 33b and supplies the inert gas to the chiller. Therefore, the organic metal compound vaporized in the chiller is supplied to the processing chamber by mean of the inert gas.

[60] The organic metal compound and inert gas supplied to the processing chamber 30 are sprayed into the processing chamber 30 by a particular sprayer (not shown in the figure). The introduced polyhydric organic material and inert gas are ionized by plasma in the processing chamber 30 to produce a polymer with a stable carbon chain. At this time, the supplied organic metal compound may be Cu(acac) , tetra methyl tin, Cu(hfac) , triethyl aluminum, silver nitrate, nickel(II) acetyl acetonate, indium oxide, iron(II) acetyl acetonate, lithium cobalt(III) oxide, magnesium oxide, methyl silane, polyanilinesulfonic acid, polypyrrole, 1,2,5-triethylpyrrole, triisobuthylsilane, ferrocene, or the like.

[61] The three-dimensional molded polymeric article to be treated in this manner may be an LCD module tray, an IC tray, a module tray, a backlight tray, a cellular phone case, a television back cover, a television front cover, or the like.

[62] Next, the unloading chamber 40 is an element for receiving the three-dimensional molded polymeric article from the processing chamber 30 and delivering it to the outside. That is, the unloading chamber receives the three-dimensional molded polymeric article from the processing chamber 30 in a state where the interior of the unloading chamber is maintained under a vacuum condition. Thereafter, a stable inert gas or the like is injected into the unloading chamber so that pressure in the unloading chamber can be increased to atmospheric pressure, and the three-dimensional molded polymeric article is then delivered from the unloading chamber to the outside. Similarly to the loading chamber 10, a feeding means 7Od is also provided at an upper portion of the unloading chamber 40 to transfer the three-dimensional molded polymeric article.

[63] Hereinafter, a method for treating a three-dimensional molded polymeric article using the aforementioned the apparatus 1 in accordance with an embodiment of the present invention will be described.

[64] A step of introducing a three-dimensional molded polymeric article M into the loading chamber 10 under an atmospheric pressure condition is performed (Sl 10). This step is a starting step of the method for treating the three-dimensional molded polymeric article according to this embodiment, wherein the three-dimensional molded polymeric article M is introduced into the loading chamber 10 maintained under an atmospheric pressure condition. In this step, the three-dimensional molded polymeric article M is coupled to the feeding means 70a and then transferred to the loading chamber 10. When the three-dimensional molded polymeric article M has been introduced into the loading chamber, an opening 12 of the loading chamber, which is in an opened state, is closed by a gate 14 so that the interior of the loading chamber can be isolated from the outside. [65] Next, a step of introducing the three-dimensional molded polymeric article into the pre-processing chamber 20 is performed (S 120). In this step, the three-dimensional molded polymeric article is to be introduced into the pre-processing chamber 20 that is always maintained under a vacuum condition. Therefore, the interior of the loading chamber 10 should be made to be under a vacuum condition. Thus, the vacuum pump 60 installed at the loading chamber 10 is operated to exhaust gas present in the loading chamber 10 so that the interior of the loading chamber can be maintained under a vacuum condition. When the pressure in the loading chamber becomes identical with that in the pre-processing chamber in this manner, the gate valve 50a for isolating the loading chamber and the pre-processing chamber from each other is opened, and the feeding means 70a is operated to transfer the three-dimensional molded polymeric article M to the pre-processing chamber 20.

[66] The reason why this embodiment does not employ direct introduction of the three- dimensional molded polymeric article M into the pre-processing chamber 20 but uses the loading chamber 10 is as follows. In the pre-processing chamber 20, plasma is generated to perform predetermined pre-treatment for the three-dimensional molded polymeric article. In this regard, to generate plasma in the pre-processing chamber, the interior of the pre-processing chamber should be under a vacuum condition. In order to introduce the three-dimensional molded polymeric article M into the pre-processing chamber from the outside under an atmospheric pressure condition, it is advantageous to perform the pre-treatment after the pre-processing chamber is made to be under the same atmospheric pressure condition as the outside and then again placed under a vacuum condition. However, it takes a great deal of time to reciprocate between an atmospheric pressure condition and a vacuum condition. Thus, in order to shorten this process time, the pre-processing chamber 20 is caused to be always under a vacuum condition, and the loading chamber 10 is placed in the vicinity of the pre-processing chamber 20. That is, while the three-dimensional molded polymeric article M is subjected to the predetermined pre-treatment in the pre-processing chamber 20, the loading chamber 10 receives a new three-dimensional molded polymeric article from the outside and is then placed under a vacuum condition. Accordingly, a three- dimensional molded polymeric article can be more efficiently introduced into the preprocessing chamber.

[67] Next, a pre-treatment step (S 130) is performed. This step is a step of performing predetermined pre-treatment for the three-dimensional molded polymeric article by generating plasma. In this step, moisture (H O) and gas present in the three-dimensional molded polymeric article are removed. The gas present in the three- dimensional molded polymeric article will be produced with potential energy in a subsequent treatment step performed in the processing chamber. Therefore, the gas should be completely removed in this step. In this embodiment, it is preferred that the surface conductivity of the three-dimensional molded polymeric article be maintained in a range of 10 to 10 Ω/cm in this step so as to shorten subsequent process time.

[68] Then, a step of introducing the three-dimensional molded polymeric article into the processing chamber 30 is performed (S 140). In this step, the gate valve 50b provided between the pre-processing chamber 20 and the processing chamber 30 is opened and the feeding means 70b of the pre-processing chamber is operated to transfer the three- dimensional molded polymeric article to the processing chamber. When the transfer of the three-dimensional molded polymeric article is completed, the gate valve 50b is closed again to isolate the interior of the processing chamber 30.

[69] Next, a step of treating the surface of the three-dimensional molded polymeric article using plasma in the processing chamber is performed (S 150). In this step, plasma is generated using RF power higher than that used in the pre-treatment step, thereby treating the three-dimensional molded polymeric article using stronger plasma. This step is performed by supplying a multi-component process gas comprising C H , CH , Ar⁺, N and H . At this time, the treatment is carried out to maintain the surface

-6 conductivity of the three-dimensional molded polymeric article in a range of 10 to 10- Ω/cm .

[70] Then, a step of delivering the three-dimensional molded polymeric article to the outside is performed (S 160). In this step, the gate valve 50c provided between the processing chamber and the unloading chamber is opened and the feeding means 70c of the processing chamber is operated to deliver the three-dimensional molded polymeric article M to the unloading chamber 40 under a vacuum condition. Subsequently, the gate valve 50c is closed and a venting process in which a specific gas is injected into the unloading chamber 40 to increase pressure is performed. When the pressure in the unloading chamber 40 is identical with the atmospheric pressure, an opening 42 communicating the unloading chamber with the outside is opened and the three-dimensional molded polymeric article M is delivered to the outside. Accordingly, the three-dimensional molded polymeric article is completely treated.

[71] Several results obtained from treatment of three-dimensional molded polymeric articles using the apparatus and method for treating a three-dimensional molded polymeric article according to the embodiments of the present invention are shown in the following table.

[72] Table 1

[73] From above Table, it can be seen that the apparatus and method for treating a three- dimensional molded polymeric article according to the embodiments of the present invention enables effective treatment of polymers, and particularly, has superior treatment effects in view of surface conductivity. Industrial Applicability

[74] Industrial Applicability

[75] With the apparatus for treating a three-dimensional molded polymeric article according to the present invention, a plasma sheath is generated to conform to the surface contours of a three-dimensional molded polymeric article and a proper ion motion distance is secured. Thus, there is an advantage in that the entire surface of a three-dimensional molded polymeric article can be treated uniformly.

[76] Particularly, since ions are deeply implanted into the surface of the three-dimensional molded polymeric article, there is an advantage in that it is possible to obtain a three-dimensional molded polymeric article with superior surface conductivity.

Claims

[1] An apparatus for treating a three-dimensional molded polymeric article, comprising: a processing chamber capable of defining a hermetic space therein; a radio frequency power supply unit including a radio frequency power supply, a matching box and an antenna, so as to supply radio frequency power for generation of plasma within the processing chamber; a process gas supply unit including a process gas source, a process gas supply passage and a flow rate control means, so as to supply a process gas for constituting the plasma generated within the processing chamber; a pumping unit for reducing pressure in the processing chamber so that the interior of the processing chamber is under a vacuum condition; and a grid unit including a negative voltage generator and a grid so as to focus ions, wherein the antenna and the grid are provided to be spaced apart by a distance of 250 to 350mm from each other.

[2] The apparatus as claimed in claim 1, wherein the grid is provided to have a st ructure with a plurality of grids connected to one another, and a distance between adjacent grids is 15 to 140mm.

[3] The apparatus as claimed in claim 2, wherein the grid is " D "-shaped with front and rear portions thereof connected to each other, and the front and rear portions are connected to each other while being spaced apart by a distance of 30 to 90mm from each other.

[4] The apparatus as claimed in claim 1, wherein the process gas is a multi- component process gas comprising C 2 H 2 , CH 4 , Ar⁺, N 2 ⁺ and H 2.

[5] The apparatus as claimed in claim 1, wherein a composition ratio of the multi- component process gas is C H :H = 80:20, CH :H = 70:30, and Ar⁺:H₂ = 90:10.

[6] The apparatus as claimed in claim 3, further comprising a carbon chain polymer producing unit including an inert gas source, an organic material source and a sprayer, so as to produce a stable carbon chain polymer by supplying an inert gas and an organic material into the processing chamber.

[7] The apparatus as claimed in claim 6, wherein the organic material source includes a bubbler and a vaporizer.

[8] The apparatus as claimed in claim 7, wherein the organic material is any one selected from the group consisting of polyhydric alcohol, hexane, and heptane.

[9] The apparatus as claimed in claim 8, wherein the three-dimensional molded polymeric article is any one selected from the group consisting of a module tray, an LCD panel tray, a PCB tray, an FPCB tray, a liquid crystal tray, a semi- conductor tray, and an IC tray.

[10] The apparatus as claimed in claim 3, further comprising a carbon chain polymer producing unit including an inert gas source and an organic metal compound source, so as to produce a stable carbon chain polymer by supplying an inert gas and an organic metal compound into the processing chamber.

[11] The apparatus as claimed in claim 10, wherein the organic metal compound source is a chiller for cooling the organic metal compound, vaporizing the organic metal compound by vapor pressure, and supplying the vaporized compound.

[12] The apparatus as claimed in claim 11, wherein the organic metal compound is any one selected from the group consisting of Cu(acac) , tetra methyl tin, Cu(hfac) , triethyl aluminum, silver nitrate, nickel(II) acetyl acetonate, indium oxide, iron(II) acetyl acetonate, lithium cobalt(III) oxide, magnesium oxide, methyl silane, polyanilinesulfonic acid, polypyrrole, 1,2,5-triethylpyrrole, tri- isobuthylsilane, and ferrocene.

[13] The apparatus as claimed in claim 12, wherein the three-dimensional molded polymeric article is any one selected from the group consisting of an LCD module tray, an IC tray, a module tray, a backlight tray, a cellular phone case, a television back cover, and a television front cover.

[14] The apparatus as claimed in claim 3, wherein a pre-processing chamber is further provided to be connected to the processing chamber, and the pre-processing chamber has the same configuration as the processing chamber but performs plasma treatment for the three-dimensional molded polymeric article using a voltage lower than that used in the processing chamber.

[15] The apparatus as claimed in claim 14, further comprising: a loading chamber provided to be connected to the pre-processing chamber so as to receive the three-dimensional molded polymeric article from the outside and supply it to the pre-processing chamber; and an unloading chamber provided to be connected to the processing chamber so as to receive the three-dimensional molded polymeric article treated in the processing chamber and deliver it to the outside, wherein gate valves are further provided between adjacent ones of the loading chamber, the pre-processing chamber, the processing chamber and the unloading chamber, so as to open the respective chambers.

[16] A method for treating a three-dimensional molded polymeric article, comprising the steps of:

1) introducing the three-dimensional molded polymeric article with a polymer existing on a surface thereof into a loading chamber that is under an atmospheric pressure condition;

2) reducing pressure in the loading chamber to be under a vacuum condition, and introducing the three-dimensional molded polymeric article into a pre-processing chamber that is always under a vacuum condition;

3) removing moisture (H O) and gas present in the three-dimensional molded polymeric article by using plasma in the pre-processing chamber;

4) introducing the three-dimensional molded polymeric article into a processing chamber that is always under a vacuum condition; three-dimensional molded polymeric article by using plasma in the processing chamber; and

6) transferring the three-dimensional molded polymeric article to an unloading chamber that is under a vacuum condition, increasing pressure in the unloading chamber to an atmospheric pressure condition, and delivering the three- dimensional molded polymeric article to the outside.

[17] The method as claimed in claim 16, wherein step 3) performs treatment such that surface conductivity of the three-dimensional molded polymeric article is maintained in a range of 10 to 10 /cm .

[18] The method as claimed in claim 16, wherein step 3) and step 5) perform plasma treatment by supplying a process gas consisting of a multi-component process gas comprising C H , CH , Ar⁺, N ⁺ and H .

[19] The method as claimed in claim 16, wherein step 5) performs treatment such that surface conductivity of the three-dimensional molded polymeric article is maintained in a range of 10 to 10 /cm .