WO2006068194A1

WO2006068194A1 - Pressure sensitive sensor and pressure sensitive element

Info

Publication number: WO2006068194A1
Application number: PCT/JP2005/023521
Authority: WO
Inventors: Sumiaki Ichikawa
Original assignee: Tokyo University Of Science Educational Foundation Administrative Organization
Priority date: 2004-12-24
Filing date: 2005-12-21
Publication date: 2006-06-29
Also published as: JP2008064458A

Abstract

[PROBLEMS] A pressure sensitive sensor capable of being installed on a section where deformation occurs and also capable of obtaining information on a state of deformation of an installation section in addition to information on pressure applied to the sensor from the outside. [MEANS FOR SOLVING PROBLEMS] In a pressure sensitive sensor (100), a pressure sensitive body, whose electric resistance value is varied depending on pressure applied, and pressure sensitive elements (101), each having a pair of electrodes joined to the pressure sensitive body, are embedded in a matrix-like grid pattern, in a plate-like member (104) made from an elastic material. One terminal of each of the pressure sensitive elements (101) in the longitudinal direction is connected to the next pressure sensitive element in the same direction by an elastic conductive wire (102), and the other terminal of each of the pressure sensitive elements (101) in the lateral direction is connected to the next pressure sensitive element in the same direction by an elastic conductive wire (103).

Description

Specification

Pressure-sensitive sensor and pressure-sensitive element

Technical field

TECHNICAL FIELD [0001] The present invention relates to a pressure sensor and a pressure sensor, and in particular, a pressure sensor suitable for detecting a pressure acting from the outside and detecting a deformation state of an attachment object, and the pressure sensor. The present invention relates to a pressure-sensitive element suitable for application to.

Background art

[0002] Conventionally, for example, a distributed tactile sensor as disclosed in Patent Document 1 is known.

In this contact sensor, a plurality of first conductive wires provided with a pressure-sensitive conductive coating and a second conductive wire having the same configuration as the first conductive wires are arranged in a woven pattern in two vertical and horizontal directions. According to the powerful configuration, when pressure acts on a part of the contact sensor, the resistance value of the pressure-sensitive conductive coating of the first conductor and the second conductor that intersect at that part decreases, so the resistance value between these conductors Will also change. Therefore, the position where the pressure is applied can be detected by measuring the resistance value between each first conductor and each second conductor in a time division manner.

Patent Document 1: JP-A-5-296709

Disclosure of the invention

Problems to be solved by the invention

[0003] By the way, in Patent Document 1, since the contact sensor is configured in combination in a woven shape, it is flexible, and even if there is a step or the like on the surface to be mounted, it can be arranged along the shape. Is described. However, Patent Document 1 does not describe at all that the conductive wire constituting the contact sensor is made of a stretchable material. For this reason, it is difficult to correctly arrange the contact sensor along the shape of the attachment target surface, and it is also difficult to apply the contact sensor to a part with deformation such as a joint part of a robot. In addition, when applied to a joint portion of a robot, it is desired to detect not only the pressure acting from the outside but also the deformation state. However, the contact sensor disclosed in Patent Document 1 detects such a deformation state. Cannot be done.

[0004] Therefore, the present invention can be attached to a part with deformation and acts from the outside. It is an object of the present invention to provide a pressure-sensitive sensor that can obtain information on not only the pressure but also the deformation state of the attachment site.

Means for solving the problem

In order to achieve the above object, a pressure-sensitive sensor according to a first invention of the present application is connected to a pressure-sensitive body that changes an electric characteristic value according to an applied pressure, and the pressure-sensitive body. A feature is that a plurality of pressure-sensitive elements each having a pair of electrodes are embedded in a plate-like member having a stretchable material force.

[0006] According to the present invention, since the pressure-sensitive element is configured by embedding the pressure-sensitive element in a plate-like member having a stretchable material force, the pressure-sensitive sensor is applied to a portion accompanied by deformation due to the stretchability of the plate-like member. Can be installed. In addition, if the mounting area of the pressure sensor is deformed, the plate-like member is elastically deformed and stress acts on the pressure-sensitive element. Therefore, when the pressure-sensitive element detects this stress, the deformation state of the mounting area is detected. You can get information about.

[0007] In addition, a pressure-sensitive sensor according to the second invention of the present application includes a pressure-sensitive body that changes an electric characteristic value according to an acting pressure, a pair of electrodes connected to the pressure-sensitive body, and the pair of electrodes. A plurality of pressure-sensitive elements having a diode connected to one of the electrodes is embedded in a plate-like member made of a stretchable material cover.

[0008] According to the present invention, the same action as in the first aspect of the invention can be obtained, a diode is connected to one of the electrodes, and the diodes are connected to each other by the first conductive wire. It is possible to prevent the detection result of the pressure by the element from being affected by the change in the electric characteristic value of another pressure sensitive element.

[0009] In the pressure-sensitive sensor according to the first invention, one electrode of the plurality of pressure-sensitive elements is connected to each other by a first conductor, and the other electrode is connected to each other by a second conductor. In the pressure sensor of the second invention, for example, the diodes connected to the one electrode of the plurality of pressure sensitive elements are connected to each other by a first conductor, and the other electrodes are connected to each other by a second conductor. Connecting. And the said conducting wire, Preferably it is comprised so that expansion-contraction is possible. As the expandable conductive wire, for example, a conductive wire configured in a coil shape or a conductive wire formed by knitting a plurality of thin conductive wires can be used.

[0010] Further, the conducting wire may be provided outside the plate-like member. [0011] Further, the pressure sensitive body is provided so as to enclose one of the electrodes, the other electrode is provided so as to enclose the pressure sensitive body, and a conductive wire connecting the other electrode has conductivity. A plurality of thin wires may be knitted into a cylindrical shape, and the pressure sensitive body may be provided so as to be wrapped inside the conducting wire.

[0012] Further, the pressure sensitive elements are arranged in a vertical and horizontal grid pattern, the first conductive wire connects pressure sensitive elements arranged in either vertical or horizontal direction, and the second conductive wire is vertical or horizontal. The pressure sensitive elements arranged in either one of the directions may be connected.

In the first and second inventions, the pressure sensitive body may be provided so as to enclose one of the electrodes, and the other electrode may be provided so as to enclose the pressure sensitive body. This makes it possible to detect the pressure regardless of the direction in which the pressure sensitive element is applied.

[0014] Alternatively, the pressure sensitive body may be provided so as to enclose one of the electrodes, and the other electrode may be provided at a specific position on the surface of the pressure sensitive body. In this way, the pressure in a specific direction acting on the pressure sensitive element can be detected. Therefore, by arranging a plurality of pressure sensitive elements so that their pressure detection directions are in various directions, the pressure of the acting pressure can be detected. It is possible to detect the direction.

[0015] Further, the one electrode may be formed in a spherical shape, and the pressure-sensitive body may be a pressure-sensitive material that changes an electric characteristic value according to an applied pressure.ヽ.

[0016] Further, the first pressure-sensitive element according to the present invention includes a pressure-sensitive body that changes an electric characteristic value according to an acting pressure, and a pair of electrodes connected to the pressure-sensitive body. The element is characterized in that the pressure sensitive body is provided so as to enclose one of the electrodes, and the other electrode is provided so as to enclose the pressure sensitive body.

[0017] The second pressure-sensitive element according to the present invention includes a plurality of pressure-sensitive bodies that change an electric characteristic value according to an acting pressure, and a pair of electrodes connected to the pressure-sensitive body. The pressure sensitive element is characterized in that the pressure sensitive body is provided so as to enclose one of the electrodes, and the other electrode is provided at a specific position on the surface of the pressure sensitive body.

[0018] <Cross-reference with related literature>

This application is based on Japanese Patent Application No. 2004-373510 filed on December 24, 2004. Insist on priority. This document is incorporated herein by reference.

Brief Description of Drawings

FIG. 1 is a perspective view showing an overall configuration of a pressure-sensitive sensor according to an embodiment of the present invention.

FIG. 2 is a diagram for explaining a method for evaluating the stretchability of a material. FIG. 2 (a) is a plan view and FIG. 2 (b) is a longitudinal sectional view.

[FIG. 3] FIGS. 3 (a) and 3 (b) are diagrams showing a configuration example of a conductive wire used in the pressure-sensitive sensor of the present embodiment.

[FIG. 4] FIGS. 4 (a), 4 (b), and 4 (c) are diagrams showing how the wiring material expands and contracts taking the flat knitted wiring material shown in FIG. 3 (a) as an example.

FIG. 5 is a view showing a pressure-sensitive element constituting the pressure-sensitive sensor of this embodiment, FIG. 5 (a) is an elevation view, and FIG. 5 (b) is a cross-sectional view.

FIG. 6 is a diagram showing a configuration example when the tubular knitting wiring material shown in FIG. 3 (b) is used as a conducting wire.

FIG. 7 is a view showing a configuration in which a conducting wire is arranged outside a plate-like member, FIG. 7 (a) is a perspective view, and FIG. 7 (b) is a cross-sectional view.

FIG. 8 is a schematic diagram showing the operating principle of a pressure sensitive body included in the pressure sensitive sensor of the present embodiment.

FIG. 9 is a graph showing the relationship between the pressure acting on the pressure-sensitive conductive rubber constituting the pressure-sensitive body and the electrical resistance in the present embodiment.

FIG. 10 is an equivalent circuit diagram of the pressure-sensitive sensor of the present embodiment.

FIG. 11 is a diagram showing a change in resistance value with respect to pressure when the embedding depth of the pressure sensitive element is changed.

FIG. 12 is a diagram showing the response of the pressure sensor at each bending angle when the pressure sensor is attached to the joint of the robot arm and the joint is bent.

[Fig.13] A diagram showing the response of the pressure sensor when the pressure sensor is attached to the joint of the robot arm and the joint of the member is deformed with multiple degrees of freedom, and when external pressure is applied. It is.

Explanation of symbols

[0020] 100 Pressure-sensitive sensor 101 Pressure sensitive element

102, 103 conductor

104 Plate member

201, 204 electrodes

202 Pressure-sensitive conductive rubber

203 Diode

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. As shown in FIG. 1, the pressure-sensitive sensor 100 includes pressure-sensitive elements 101 arranged vertically and horizontally in a plate-like member 104 having a stretchable material force such as foamed urethane, for example, in the vertical direction (FIG. 1). The left and right sides of the pressure-sensitive element 101 are connected to each other with an expandable conductor 102, and the other terminal of the pressure-sensitive element 101 aligned in the horizontal and vertical direction is connected to an expandable conductor 103. It is.

In this embodiment, foamed urethane is used as the stretchable material constituting the plate-like member 104. However, the present invention is not limited to this, and other stretchable members can be used. The elasticity of the material can be evaluated as shown in Fig. 2, for example. That is, as shown in FIGS. 2 (a) and 2 (b), a holding member 13 having a hole in the center of, for example, a ring is disposed on the back surface of the evaluation target material 12, so that the surface of the evaluation target material 12 is held. The center of the hole in the member 13 is pressed downward with a test rod 10 that is thinner than the diameter of the hole. At this time, the material 12 to be evaluated is expanded to bend so as to bend around the indentation position. The inclination angle (angle Θ shown in the figure) indicates the size of the material. That is, for example, an inclination angle of 0 = 5 ° corresponds to about 1% of material elongation, an inclination angle of Θ = 20 ° corresponds to about 5% of material elongation, and an inclination angle of Θ = 40 ° corresponds to about 30% of material elongation. Equivalent to%. Therefore, the maximum value of the inclination angle Θ is used as an evaluation parameter indicating the stretchability of the material. As the stretchable material constituting the plate-like member 104 of the present embodiment, for example, the evaluation parameter Θ is preferably 5 ° (elongation is about 1%) or more, more preferably Θ force is 20 ° or more. . However, the necessary stretchability varies depending on the application of the pressure-sensitive sensor 100, and the stretchable material in the present invention is not limited to the value of the evaluation parameter 0 described above.

[0023] In this embodiment, the conductive wires 102, 103 are formed in a coil shape, thereby providing stretchability. However, the present invention is not limited to this. For example, the conductive wires 102 and 103 may be formed of a conductive member whose material itself can expand and contract.

FIGS. 3 (a) and 3 (b) show examples of wiring materials having elasticity that can be applied as the conductive wires 102 and 103. The wiring material shown in (a) of the figure is formed by flat knitting thin conductive wires such as urethane wires into a long and flat plate shape. The wiring material shown in (b) of FIG. It is knitted to form a cylinder. Such a structure has a conventional force used for solder absorbing material, shielded wire, conductive tape, etc. In these applications, the elasticity inherent in the above knitting method is utilized. In contrast, the present invention is applied as a wiring material in the pressure-sensitive sensor of the present invention, focusing on this stretchability.

FIG. 4 shows how the wiring material expands and contracts taking the flat knitted wiring material shown in FIG. 3 (a) as an example.

As shown in Fig. (A), in the standard state, the wire braiding angle is about 45 °, but the wire material has an angle of approximately 65 ° (Fig. (B)) to 25 ° (Fig. ( c) It can be deformed in the range of), and in this case, the elongation is in the range of about 1.3 (Fig. (1))) to about 0.61 (Fig. (c)). However, the above angle range may vary depending on the wire braiding density and the wire thickness. Here, the force described with the flat knitted wiring material taken as an example is also deformed in the same manner even with a cylindrical knitted wiring material as shown in FIG. 3 (b).

As shown in FIG. 5, in the pressure-sensitive element 101 of the present embodiment, a spherical electrode 204 is attached to one terminal of a diode 203, and the surface thereof is covered with a pressure-sensitive conductive rubber 202. The electrode 201 is provided so as to wrap around the conductive rubber 202. Then, the conductive wire 102 is connected so as to connect the other terminals of the diodes 203 of the pressure sensitive elements 101, and the conductive wire 103 is connected so as to connect the electrodes 201 of the pressure sensitive elements 101. As will be described later, the configuration including the diode 203 is also included in the scope of the present invention.

FIG. 6 shows a configuration example when the tubular knitted wiring material shown in FIG. In the configuration shown in the figure, the pressure sensitive element 101 is wrapped inside a conductive wire 102 which is a tubular knitted wiring material. As a result, one of the two conductors 102 and 103 to be connected to the pressure sensitive element 101 can be made common to a plurality of pressure sensitive elements 101 arranged in the same row, which is reasonable. Wiring becomes possible. It is assumed that the other conductor 103 is insulated from the periphery and is taken out from the gap between the stitches of the conductor 102 and wired. Figure 6 In this configuration, the pressure-sensitive conductive rubber 202 of the pressure-sensitive element 101 shown in FIG. 5 can be directly wrapped with the conductive wire 102, so that the conductive wire 102 can have a function as the electrode 201.

FIG. 7 is a view showing a configuration in which the conductive wires 102 and 103 are arranged outside the plate-like member 104, where FIG. 7 (a) is a perspective view and FIG. 7 (b) is a cross-sectional view. . In the configuration shown in the figure, a lead-out portion is provided for pulling out the electrodes 201 and 204 of the pressure-sensitive element 101 to the outside of the plate-like member 104, and the lead-out portion is connected by the conductive wires 102 and 103 in a bent state. ing. According to such a configuration, the labor of wiring can be greatly reduced as compared with the case where the conductive wires 102 and 103 are embedded in the plate member 104, and the conductive wires 102 and 103 do not expand and contract integrally with the plate member 104. Therefore, the stretchability required for the conductors 102 and 103 can be relaxed.

Here, the pressure-sensitive conductive rubber will be described with reference to FIG. As shown in the figure, the pressure-sensitive conductive rubber is obtained by mixing a fine conductive substance 302 such as metal powder or powdered carbon into an elastic body 301 such as silicon rubber. As shown in FIG. 6, since the elastic body 301 is interposed between the conductive materials 302 when no external pressure is applied, the electric resistance value of the pressure-sensitive conductive rubber is very high. On the other hand, as shown in FIG. 5B, when pressure acts on the pressure-sensitive conductive rubber, the electrical resistance decreases due to the contact between the conductive substances 302 in the pressurized portion. The pressure-sensitive conductive rubber has the characteristic of changing the electric resistance value in accordance with the applied pressure according to such a principle.

[0030] As shown in the graph of FIG. 9, the electric resistance value is very high until the pressure (pressing force) exceeds a predetermined threshold value, but when the pressure exceeds the threshold value, the resistance value rapidly decreases. Using this property of pressure-sensitive conductive rubber, it is possible to detect which pressure-sensitive element 101 of pressure-sensitive sensor 100 has pressure by measuring the electrical resistance value of pressure-sensitive conductive rubber 202. I can do it.

[0031] It should be noted that the pressure-sensitive conductive rubber has different resistance change characteristics with respect to the applied pressure (pressing force) if the type and amount of mixed metal differ, so the type and amount of these metals can be adjusted. It is also possible to construct a pressure-sensitive conductive rubber having desired characteristics.

[0032] As described above, when pressure is applied to the pressure-sensitive conductive rubber 202 of the pressure-sensitive element 101, the electrical resistance value of the pressure-sensitive conductive rubber 202 decreases at that portion. And in this embodiment, spherical shape Since the pressure sensitive element 101 is configured by enclosing the electrode 204 with the pressure sensitive conductive rubber 202 and further enveloping the pressure sensitive conductive rubber 202 with the metal foil electrode, in which direction with respect to the pressure sensitive element 101 Even if stress is applied, the decrease in resistance value due to the stress can be detected. That is, the pressure-sensitive element 101 in the present embodiment is configured to be able to detect the pressure regardless of which direction the pressure is applied.

[0033] However, instead of providing the electrode 201 so as to wrap the pressure-sensitive conductive rubber 202, only the stress in a specific direction is detected by sticking only to a specific portion of the pressure-sensitive conductive rubber 202. It can also be given directivity. In this way, when the pressure sensitive element 101 is given directivity, the pressure direction can be detected by arranging a number of pressure sensitive elements 101 so that the directivity faces in various directions. The pressure sensor 100 can be realized.

[0034] Further, the pressure detection sensitivity of the pressure-sensitive element 101 can be adjusted according to the thickness of the pressure-sensitive conductive rubber 202, and the thickness of the pressure-sensitive conductive rubber 202 can be adjusted according to the position. It is possible to change the sensitivity of the resistance value change depending on the direction in which the pressure acts, that is, to give directivity to the pressure detection sensitivity.

In the present embodiment, the pressure-sensitive conductive rubber 202 is used as the pressure-sensitive body of the present invention.

1S Not limited to this, any material may be used as long as the electrical resistance value is changed according to the pressure. Alternatively, an element that changes the capacitance according to the pressure can be used as the pressure-sensitive body of the present invention. In short, any electrical characteristic value such as an electrical resistance value or a capacitance can be used as the pressure-sensitive body of the present invention as long as it changes depending on the applied pressure.

FIG. 10 is an equivalent circuit diagram of the pressure-sensitive sensor 100 of the present embodiment. As shown in the figure, the pressure-sensitive sensor 100 includes a plurality of conductors 102 (102A, 102B, 102C, 102D, ...) and a conductor 103 (103A, 103B, 103C, 103D, ...). Are arranged in a grid pattern, and at the crossing position, a pressure-sensitive conductive rubber 202 and a diode 203 are connected in series between the conductive wires 102 and 103. Then, as shown in the figure, for example, analog switches 110 and 111 are connected to the conductive wire 102 and the conductive wire 103, respectively, and a predetermined voltage V is sequentially switched and applied to any one conductive wire 102 by the switch 110, Any one by 11 off By detecting the current flowing through the conductor 103 with the current detector 112, the resistance value of each pressure-sensitive element 101 is obtained in a time-sharing manner, thereby detecting which position of the pressure-sensitive sensor 100 has been applied. can do.

[0037] Note that the diode 203 is provided in series with the pressure-sensitive conductive rubber 202, so that even when pressure is simultaneously applied to the plurality of pressure-sensitive sensors 100, their pressure application positions can be correctly detected. It is for doing so. That is, for example, when detecting the resistance value of the pressure sensitive element 101A in FIG. 6, by connecting the voltage V to the copper wire 103A by the switch 110 and connecting the current detector 112 to the wire 102A by the switch 111, The current flowing through the pressure sensitive element 101A is measured. At this time, it is assumed that pressure is also applied to the pressure sensitive elements 101B, 101C, and 101D. In this case, since the resistance values of these pressure sensitive elements 101B, 101C, 101D are reduced, unless each of the pressure sensitive elements 101 is provided with a diode 203, the conductive wire 103A → the pressure sensitive element 101D → the conductive wire 102 → the pressure sensitive element. Since current flows in the path of element 101C → conductor 1030 → pressure sensor 101B → conductor 102A → current detector 112, even if no pressure is applied to pressure sensor 101A, the measured resistance value decreases and If pressure is applied to the pressure element 101A, it will be erroneously detected. In contrast, in this embodiment, the diode 203 is provided in series with the pressure-sensitive conductive rubber 202 in the forward direction with respect to the voltage V, so that the current flowing through the pressure-sensitive element 101C in the above-described path is This prevents false detection as described above.

In this way, when the detection result of a certain pressure sensitive element 101 is obtained, if the resistance value of the other pressure sensitive element 101 decreases, the other pressure sensitive element 101 is moved in the reverse direction. The detection result may be affected by the formation of the path of the current flowing through the current flow. However, in this embodiment, by blocking this reverse current with the diode 203, the other pressure sensitive element 101 is affected. The influence by it can be prevented. However, instead of providing the diode 203, it is also possible to remove the influence of the other pressure-sensitive elements 101 by signal processing, and the present invention includes a configuration in which the diode 203 is not provided.

By the way, the inventor of the present application has found through experiments that the responsiveness to the external pressure of the pressure-sensitive sensor changes depending on the depth of embedding of the pressure-sensitive element 101 in the plate-like member 104. Fig. 11 shows the experimental results, showing the different depths (4mm, lmm) of the plate-like member 104. , −lmm, −4 mm), and the surface force of the plate member 104 shows a change in resistance value when the pressure sensitive element 101 is disposed. Negative values (−lmm, −4 mm) mean that the pressure-sensitive element 101 also protrudes the surface force of the plate-like member 104. As shown in the figure, except when the protruding amount is large (14 mm), the resistance value tends to change with small pressure, high pressure, and sensitivity by installing the pressure sensitive element 101 near the surface. I understand that.

[0040] As described above, when the pressure sensitive element 101 is installed in the vicinity of the surface of the plate-like member 104, it reacts even to a small external pressure. Therefore, it is suitable for the case where the pressure acting from the outside is detected with high sensitivity. ing. On the other hand, if the pressure sensitive element 101 is installed in the deep part of the plate-like member 104, it becomes difficult to react to a small external pressure, which is suitable for detecting a change in the shape of the attachment location. Furthermore, by embedding the pressure sensitive element 101 in the plate-like member 104 in multiple layers, it is possible to detect both the pressure acting from the outside and the shape change of the mounting object.

[0041] As described above, the pressure-sensitive sensor 100 of the present embodiment has a configuration in which the pressure-sensitive element 101 is embedded in the plate-like plate member 104 having elasticity, and thus the pressure-sensitive sensor 100 is used. It can follow deformations such as bending, twisting, and expansion / contraction of the attached part. Therefore, for example, it can be applied to a part with deformation such as a joint part of an industrial robot or the like.

In addition, since the pressure sensitive element 101 is embedded in the plate member 104, internal stress generated by the deformation of the plate member 104 acts on the pressure sensitive element 101. For this reason, by attaching the pressure-sensitive sensor 100 of the present invention to a place involving deformation, such as the joint portion of the robot described above, it is possible to obtain information regarding the deformation state.

Here, an example is shown in which the pressure-sensitive sensor 100 detects the deformation state of the joint of the articulated robot. Here, a pressure-sensitive sensor 100 is wound around the outer periphery of a member simulating an arm portion of an articulated robot, and the detection result is examined by the pressure-sensitive sensor 100 by driving the joint of the robot arm. The joint part of this robot arm has a structure with a degree of freedom of rotation in a universal joint. In this embodiment, the distance between the pressure-sensitive elements 101 of the pressure-sensitive sensor 100 is 9 mm, and the mouth bot arm is 114 mm in diameter.

[0044] Figure 12 performs a bending motion with one degree of freedom, increasing the joint angle every 20 degrees! Is a diagram showing the distribution of detection results by each pressure-sensitive element 101 of the pressure-sensitive sensor 100, This indicates that the resistance value of the pressure-sensitive element 101 at the position painted black is decreased. As shown in the figure, the response of the pressure-sensitive element 101 appears clearly when the bending angle exceeds 80 degrees. When the bending angle reaches 100 degrees, the pressure-sensitive sensor is compressed. The inner and outer pressure-sensitive elements that are subject to tension react greatly. As described above, in this embodiment, by embedding the pressure-sensitive element 101 in the plate-like member 104 that also has a stretchable material force, the shape change of the attached object that cannot be obtained with the conventional pressure-sensitive sensor is achieved. It is also possible to obtain information on

[0045] Next, the pressure sensor 100 is attached to the joint of the robot arm in the same manner as described above, and a bending motion with one degree of freedom (Condition 1), a bending motion with two degrees of freedom (Condition 2), and a state twisted 180 degrees One-degree-of-freedom bending motion (Condition 3), One-degree-of-freedom bending motion (Condition 4) with a 15 mm diameter round rod sandwiched between joints, and One-degree-of-freedom bending with a flat plate pressed The response of pressure sensor 100 was measured for movement (condition 5). The results are shown in FIG. In addition, in FIG. 13 as well as FIG. 12, the pressure-sensitive element 101 whose resistance value has changed is shown in black.

[0046] The above conditions 1 to 3 are responses when the joint is variously deformed in the state where no external force is applied, but as shown in FIG. 13, there are different responses depending on the deformed state of the joint. It has been obtained. Conditions 4 to 5 are conditions in which external force is applied under a bending motion with one degree of freedom (Condition 1). Comparing conditions 1 and 4 and 5, in condition 4 and condition 5, in addition to the almost same place as the reaction place of bending with one degree of freedom (condition 1), in condition 1, there is no reaction (change in resistance value). It can be seen that a reaction also appears in the pressure sensitive element 101. From these results, based on the distribution pattern of the detection result by each pressure sensitive element 101 of the pressure sensitive sensor 100 of this embodiment, the deformation of the mounting object and the pressure acting from the outside are distinguished from each other. I am sure that it can be detected properly.

Industrial applicability

[0047] According to the present invention, a pressure-sensitive sensor capable of being attached to a part with deformation and capable of obtaining information on not only the pressure acting from the outside but also the deformation state of the attachment part, and the A pressure sensitive element that can be suitably applied to a pressure sensitive sensor can be provided.

Claims

The scope of the claims

[1] A plurality of pressure-sensitive elements having a pressure-sensitive body that changes an electric characteristic value according to an acting pressure and a pair of electrodes connected to the pressure-sensitive body are formed into a plate-like member having a stretchable material force. A pressure-sensitive sensor characterized by being embedded.

[2] The sensation according to claim 1, wherein one electrode of the plurality of pressure-sensitive elements is connected by a first conductor, and the other electrode is connected by a second conductor. Pressure sensor.

[3] a pressure-sensitive body that changes an electric characteristic value according to an acting pressure, a pair of electrodes connected to the pressure-sensitive body, a diode connected to any one of the pair of electrodes, A pressure-sensitive sensor characterized by comprising a plurality of pressure-sensitive elements embedded in a plate-like member having a stretchable material force.

[4] The diode, wherein the diodes connected to the one electrode of the plurality of pressure-sensitive elements are connected by a first conductor, and the other electrodes are connected by a second conductor. The pressure-sensitive sensor according to claim 3.

[5] The conductor is configured to be extendable! The pressure-sensitive sensor according to claim 2, wherein the pressure-sensitive sensor is squeezed.

[6] The conductor is coiled! 6. The pressure-sensitive sensor according to claim 5,

7. The pressure-sensitive sensor according to claim 5, wherein the conductive wire is formed by weaving a plurality of thin conductive wires.

[8] The conductive wire is provided outside the plate-like member.

The pressure sensor according to any one of 5 to 7, wherein the force is any one.

[9] The pressure sensitive elements are arranged in a vertical and horizontal grid pattern, the first conductive wire connects pressure sensitive elements arranged in either vertical or horizontal direction, and the second conductive wire is either vertical or horizontal. 9. The pressure-sensitive sensor according to claim 1, wherein the pressure-sensitive elements arranged in the other direction are connected to each other.

[10] The pressure sensitive body according to any one of claims 1 to 8, wherein the pressure sensitive body is provided so as to enclose one of the electrodes, and the other electrode is provided so as to enclose the pressure sensitive body. The pressure sensor described.

[11] The pressure sensitive body according to any one of claims 1 to 8, wherein the pressure sensitive body is provided so as to enclose one of the electrodes, and the other electrode is provided at a specific position on the surface of the pressure sensitive body. Pressure sensor as described in item 1.

12. The pressure sensor according to any one of claims 1 to 11, wherein the one electrode is formed in a spherical shape.

[13] The pressure-sensitive sensor according to any one of claims 1 to 12, wherein the pressure-sensitive body is made of a pressure-sensitive material that changes an electric characteristic value according to an applied pressure.

[14] The pressure sensitive body is provided so as to enclose one of the electrodes, and the other electrode is provided so as to enclose the pressure sensitive body.

The conducting wire connecting the other electrode is formed by knitting a plurality of thin conductive wires into a cylindrical shape, and is provided so that the pressure sensitive body is wrapped inside the conducting wire. The pressure-sensitive sensor according to claim 2 or 4.

[15] A pressure-sensitive element having a pressure-sensitive body that changes an electric characteristic value according to an acting pressure, and a pair of electrodes connected to the pressure-sensitive body,

The pressure sensitive element is characterized in that the pressure sensitive element is provided so as to enclose one of the electrodes, and the other electrode is provided so as to enclose the pressure sensitive element.

[16] A plurality of pressure-sensitive elements having a pressure-sensitive body that changes an electric characteristic value according to an acting pressure, and a pair of electrodes connected to the pressure-sensitive body,

The pressure sensitive element is provided so as to enclose one of the electrodes, and the other electrode is provided at a specific position on the surface of the pressure sensitive element.