WO2006068021A1 - 回折格子装置 - Google Patents
回折格子装置 Download PDFInfo
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- WO2006068021A1 WO2006068021A1 PCT/JP2005/023014 JP2005023014W WO2006068021A1 WO 2006068021 A1 WO2006068021 A1 WO 2006068021A1 JP 2005023014 W JP2005023014 W JP 2005023014W WO 2006068021 A1 WO2006068021 A1 WO 2006068021A1
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- angle
- prism
- diffraction grating
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- angle prism
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J3/1804—Plane gratings
Definitions
- the present invention relates to a diffraction grating device, and more particularly, various observation devices such as astronomy, earth and planetary science, meteorology, environmental measurement, and environmental hygiene, and various types such as physics and chemistry, minerals, biology, and pathology.
- the present invention relates to a diffraction grating apparatus suitable for use in spectroscopic analyzers, food and biotechnology, pharmaceuticals, chemical product manufacturing equipment, quality control equipment, optical communications and other communications / information fields, inorganic materials, and organic materials.
- a grism is a transmissive dispersion element that combines a transmissive diffraction grating and a prism so that light of any order and wavelength can travel straight or in any direction.
- the applicant of the present invention is configured by combining a prism whose apex angle is variable and a volume 'phase' hologram (VPH), without using a plurality of grisms.
- VPH volume 'phase' hologram
- FIG. 1 shows a conceptual configuration explanatory diagram corresponding to an example of an embodiment of a grism described in Japanese Patent No. 3576538.
- the prisms 202 and 204 of the two prisms arranged with the volume 'phase' hologram 206 constituting the grism 200 sandwiching the apex angles ⁇ and ⁇ can change the apex angles ⁇ and ⁇ .
- the wavelength range can be arbitrarily selected while maintaining high diffraction efficiency.
- Reference numerals 208 and 210 are lenses disposed in the vicinity of the grism 200.
- the prisms 202 and 204 of the above-mentioned grism 200 are, for example, made of two external members formed of a transparent material and a liquid that is transparent in the operating wavelength region and sealed between the two external members.
- the prisms 202, 204 can be varied in the apex angles ⁇ , ⁇ to realize high-dispersion spectroscopic measurement of a wide wavelength. Since the internal member 300 that is a part of the configuration of 204 is a liquid, the manufacturing process may be complicated.
- Patent Document 1 Japanese Patent No. 3576538
- the present invention has been made in view of the problems of the conventional techniques as described above, and its object is to have a high dispersion efficiency, a high diffraction efficiency, and a simple force.
- the present invention provides a first right angle provided with a first surface that is disposed so as to be rotatable around an optical axis and forms a right angle and a vertex angle.
- the prism, the second surface forming a right angle and the apex angle, and the first surface of the first right angle prism face each other substantially in parallel so that they rotate around the optical axis.
- the second right-angle prism that rotates by a predetermined angle, and is disposed between the first right-angle prism and the second right-angle prism, and is substantially parallel to the first surface of the first right-angle prism. And a surface facing substantially parallel to the second surface of the second right-angle prism Is obtained so as to have a diffraction grating with.
- the present invention forms a right angle with a first right-angle prism that is arranged in a state of being rotatable around the optical axis and has a first surface that forms a right angle and forms an apex angle.
- the second surface forming the apex angle and the first surface of the first right-angle prism face each other substantially in parallel so that they can rotate around the optical axis.
- the predetermined angle in the direction opposite to the predetermined direction around the optical axis is The rotating second right angle prism is disposed between the first right angle prism and the second right angle prism, and faces substantially parallel to the first surface of the first right angle prism.
- a first diffraction grating having a surface and a surface facing substantially parallel to the second surface of the second right-angle prism
- the second rectangular prism is disposed in a stage that is rotatable around the optical axis, and has a third surface that forms a right angle and an apex angle.
- the fourth surface forming the apex angle and the third surface of the third right-angle prism are arranged so as to be rotatable around the optical axis so as to face each other substantially in parallel.
- the fourth right-angle prism rotates in the predetermined direction around the optical axis by the predetermined angle.
- a surface facing substantially parallel to the third surface of the third right-angle prism and a surface facing substantially parallel to the fourth surface of the fourth right-angle prism are formed.
- the present invention provides a first right-angle prism that is disposed so as to be rotatable around an optical axis and has a first surface that forms a right angle and an apex angle;
- the right angle prism has an apex angle approximately twice the apex angle and a side surface of an isosceles triangle shape including the apex angle, and one of the two surfaces forming the apex angle is
- the first right-angle prism is disposed so as to be rotatable about the optical axis so as to face the first surface, and the first right-angle prism is arranged in a predetermined direction around the optical axis.
- An isosceles triangular prism a surface disposed between the first right-angled prism and the isosceles triangular prism, and facing the first surface of the first right-angled prism substantially parallel to the first prism;
- a first diffraction grating having a surface facing the one surface of the equilateral triangular prism, and an apex angle that is equal to the apex angle of the first right-angle prism, forming a right angle
- the second surface forming the apex angle and the first surface of the first right-angle prism face each other substantially in parallel so that they rotate around the optical axis behind the isosceles triangle prism.
- the predetermined angle in the predetermined direction around the optical axis When the isosceles triangular prism is disposed in a movable state and rotates by the predetermined angle in the opposite direction around the optical axis, the predetermined angle in the predetermined direction around the optical axis.
- a second diffraction grating having a surface facing substantially parallel to the second surface.
- the present invention forms a right angle with a first right-angle prism that is disposed so as to be rotatable around the optical axis and has a first surface that forms a right angle and forms an apex angle.
- the second surface forming the apex angle and the first surface of the first right-angle prism are rotated around the optical axis so that they are positioned substantially orthogonally or at an arbitrary angle.
- the first right-angle prism is rotated in a predetermined direction around the optical axis by a predetermined angle, it is arranged in a direction opposite to the predetermined direction around the optical axis.
- the second right-angle prism that rotates by the predetermined angle, the first right-angle prism, and the second right-angle prism are disposed between the first right-angle prism and the first surface of the first right-angle prism. And the obliquely located surface and the oblique surface with respect to the second surface of the second right-angle prism. It is obtained so as to have a diffraction grating and a plane.
- the present invention forms a right angle with a first right-angle prism that is arranged in a state of being rotatable around the optical axis and has a first surface that forms a right angle and forms an apex angle.
- the second surface forming the apex angle and the first surface of the first right-angle prism are rotated around the optical axis so that they are positioned substantially orthogonally or at an arbitrary angle.
- the first right angle prism is rotated in a predetermined direction around the optical axis by a predetermined angle. Between the first right-angle prism and the second right-angle prism rotating around the optical axis in a direction opposite to the predetermined direction by the predetermined angle.
- a third right-angle prism that rotates by the predetermined angle in the opposite direction around the optical axis when the two right-angle prisms rotate in the opposite direction around the optical axis by the predetermined angle;
- a fourth surface forming a right angle and an apex angle, and the third right angle And the third surface of the optical axis is positioned so as to be substantially orthogonal or at an arbitrary angle so as to be rotatable around the optical axis.
- a fourth right-angle prism, a third right-angle prism, and a third angle prism that rotate by the predetermined angle around the optical axis when rotating around the opposite direction by the predetermined angle.
- the present invention provides a first right-angle prism that is arranged in a rotatable manner around the optical axis and has a first surface that forms a right angle and an apex angle, and the first right-angle prism.
- the apex angle is approximately twice the apex angle and the isosceles triangular side surface including the apex angle, and one of the two surfaces forming the apex angle is the first surface.
- the right-angle prism is disposed on the first surface side so as to be rotatable around the optical axis, and the first right-angle prism is arranged in a predetermined direction around the optical axis.
- An isosceles triangular prism that rotates by the predetermined angle in a direction opposite to the predetermined direction around the optical axis, the first right-angle prism, and the isosceles triangular prism when rotating by a predetermined angle; Between the first and right angle prisms, and obliquely with respect to the first surface of the first right angle prism.
- a first diffraction grating having a surface and a surface facing the one surface of the isosceles triangle prism, and an apex angle that is equal to the apex angle of the first right-angle prism.
- a second surface forming a right angle and an apex angle; and the first surface of the first right angle prism The isosceles triangle prism is arranged in a state of being rotatable around the optical axis at the subsequent stage of the isosceles triangle prism so that the first surface is positioned substantially parallel or at an arbitrary angle.
- a second right-angle prism that rotates the predetermined angle around the optical axis by the predetermined angle and the second right angle when the lens rotates by the predetermined angle around the optical axis.
- a second diffraction grating having a surface obliquely positioned with respect to the second surface.
- the present invention forms a right angle with a first right-angle prism that is arranged in a state of being rotatable around the optical axis and has a first surface that forms a right angle and an apex angle.
- the second surface forming the apex angle and the first surface of the first right-angle prism face each other substantially in parallel so that they can rotate around the optical axis.
- the predetermined angle in the direction opposite to the predetermined direction around the optical axis is The second right angle prism that is rotated, the first right angle prism and the second right angle prism sandwiched between the first right angle prism and the first surface of the first right angle prism in surface contact with the first right angle prism; A diffraction grating having a surface in contact with the second surface of the two right-angle prisms. It is intended.
- the diffraction grating is a volume 'phase' hologram.
- a lens through which light incident from the outside passes through the diffraction grating device and a lens through which light exiting from the diffraction grating device passes through is arranged and arranged.
- the diffraction grating device according to the present invention has excellent effects when it has high dispersion and high diffraction efficiency, and can be easily manufactured with a simple configuration.
- FIG. 1 is a conceptual configuration explanatory diagram corresponding to an example of an embodiment of a grism described in Patent Document 1.
- FIG. 2 is a conceptual structural perspective view showing a first embodiment of a diffraction grating device according to the present invention.
- FIGS. 3 (a) and 3 (b) are perspective views of the conceptual configuration showing the operation of the diffraction grating device shown in FIG.
- FIG. 4 is a graph showing the diffraction efficiency of various diffraction gratings.
- FIG. 5 is a conceptual structural explanatory view showing another example of the diffraction grating device shown in FIG. 2.
- FIG. 6 is an explanatory view showing a spectroscope using a conventional SR type diffraction grating.
- FIG. 7 is an explanatory perspective view of a conceptual configuration showing a second embodiment of a diffraction grating device according to the present invention.
- FIG. 8 is an explanatory perspective view of a conceptual configuration showing a third embodiment of a diffraction grating device according to the present invention.
- FIGS. 9 (a) and 9 (b) are conceptual configuration explanatory diagrams showing a fourth embodiment of the diffraction grating device according to the present invention.
- FIG. 10 is a conceptual structural explanatory view showing a fifth embodiment of a diffraction grating device according to the present invention.
- FIG. 11 is an explanatory diagram of a conceptual configuration showing another example of the diffraction grating device shown in FIG.
- FIG. 12 is a conceptual structural explanatory view showing a sixth embodiment of a diffraction grating device according to the present invention.
- 13 (a) and 13 (b) are perspective views of a conceptual configuration showing another embodiment of the diffraction grating device according to the present invention.
- FIGS. 14 (a) and 14 (b) are conceptual configuration explanatory views showing another embodiment of the diffraction grating device according to the present invention.
- 15 (a) and 15 (b) are conceptual configuration explanatory views showing another embodiment of the diffraction grating device according to the present invention.
- FIG. 16 (a) is a conceptual diagram illustrating another example of the diffraction grating of the diffraction grating device according to the present invention, and Fig. 16 (b) is a CC line in Fig. 16 (a).
- FIG. 16 (b) is a conceptual diagram illustrating another example of the diffraction grating of the diffraction grating device according to the present invention, and Fig. 16 (b) is a CC line in Fig. 16 (a).
- FIG. 16 (b) is a CC line in Fig. 16 (a).
- Fig. 17 (a) is an explanatory diagram showing the main part of the diffraction grating shown in Figs. 16 (a) and (b), and Fig. 17 (b) shows the diffraction shown in Figs. 16 (a) and (b).
- FIG. 18 is a schematic structural explanatory view showing another embodiment of the diffraction grating device according to the present invention.
- FIG. 2 is a conceptual perspective view illustrating the first embodiment of the diffraction grating device according to the present invention.
- the diffraction grating device 10 includes an optical axis of the diffraction grating device 10. (Refer to the alternate long and short dash line in Fig. 2.)
- a right-angle prism 12 arranged in a freely rotatable manner and a surface 14a facing substantially parallel to the surface 12a of the right-angle prism 12 and rotating around the optical axis
- a right-angle prism 14 disposed in a free state and a diffraction grating 16 disposed between the right-angle prism 12 and the right-angle prism 14 are configured.
- each of the right-angle prism 12 and the right-angle prism 14 is a solid block-like right-angle prism formed of a predetermined material.
- a material constituting the right-angle prism 12 and the right-angle prism 14 optical glass, crystal material, or the like can be used.
- the refractive index of these materials is about 1.3-4.
- the apex angle ⁇ formed by the surfaces 12a and 12b of the right-angle prism 12 and the apex angle ⁇ formed by the surfaces 14a and 14b of the right-angle prism 14 are perpendicular to the refractive index of the right-angle prism 12.
- the refractive indexes of the prisms 14 are the same, they have the same size.
- the side surface 14c and the side surface 14d that include the apex angle B of the right-angle prism 14 and face each other have a right triangle shape!
- the right side of the right angle prism 12 forms a right angle of the right triangle shape of the side faces 12c and 12d, and also forms the right angle of the right angle triangle shape of the right side of the right side prism 14 and the side face 14c and 14d of the right angle prism 14.
- the right-angle prism 12 and the right-angle prism 14 are spaced apart from each other so that the surface 14a forming the apex angle ⁇ faces substantially parallel to each other.
- the state shown in FIG. 2 and FIG. That is, in the initial state, the right angle prism 12 and the right angle prism 14 are positioned symmetrically with the diffraction grating 16 in between, and the surface 12e that forms the right angle of the right angle prism 12 together with the surface 12a is parallel to the optical axis.
- a surface 14e that forms a right angle of the right-angle prism 14 together with the surface 14a is positioned parallel to the optical axis, and the apex angle ⁇ of the right-angle prism 12 and the apex angle 13 of the right-angle prism 14 are opposed to each other. It is.
- the right-angle prism 12 and the right-angle prism 14 are both arranged so as to be rotatable around the optical axis of the diffraction grating device 10 (see the white arrow shown in FIG. 3 (a)).
- the first axis around the optical axis (see the direction of arrow A that matches the clockwise direction as seen from the light traveling direction shown in Fig. 3 (a)) It can be rotated in a second direction that is opposite to the direction (see the direction of arrow B, which coincides with the counterclockwise direction when viewed from the traveling direction of light shown in Fig. 3 (a)).
- a drive device such as a cam is driven by the control of a control device such as a microcomputer (not shown), and the right-angle prism 12 and the right-angle prism 14 are driven by the drive force, respectively. It can be rotated in the first direction or the second direction.
- the rotation direction and the magnitude of the rotation angle corresponding to the rotation amount are respectively the rotation directions of the right-angle prism 12 and the right-angle prism 14.
- the angle of rotation is set so that the right angle prism 12 and the right angle prism 14 coincide with each other.
- the right-angle prism 12 has a predetermined angle ⁇ in the first direction around the optical axis.
- the diffraction grating 16 is a transmission type diffraction grating, and is constituted by a volume phase hologram (VPH).
- VPH volume phase hologram
- This diffraction grating 16 volume phase hologram is the diffraction grating that exhibits the highest efficiency when the Bragg condition is satisfied, and is formed of, for example, heavy chromium gelatin or photosensitive resin.
- Volume 'phase' holograms have a high diffraction efficiency over a wide wavelength range by periodically modulating the refractive index of the medium to produce a phase difference and adjusting the incident and output angles to satisfy the Bragg condition. It is a high-dispersion and high-efficiency diffraction grating.
- Fig. 4 shows a graph showing the diffraction efficiency of various diffraction gratings.
- the volume phase 'hologram' is diffracted by adjusting the incident angle to satisfy the Bragg diffraction condition for each wavelength. It is possible to obtain high efficiency in a wide range with efficiency (a) as an envelope.
- the diffraction grating 16 composed of a volume 'phase' hologram is designed as a planar diffraction grating, and is entirely formed in a plate-like body.
- the diffraction grating entrance surface 16a and the diffraction grating entrance surface 16a are substantially rectangular.
- a substantially rectangular diffraction grating exit surface 16b having a predetermined interval and facing substantially in parallel.
- the diffraction grating 16 is fixedly disposed between the right-angle prism 12 and the right-angle prism 14 without rotating around the optical axis. Then, the diffraction grating incident surface 16a and the surface 12a of the right prism 12 face each other substantially in parallel, and the diffraction grating exit surface 16b and the surface 14a of the right angle prism 14 face each other substantially in parallel.
- the diffraction grating 16 is disposed so as to be substantially orthogonal to the side surfaces 12c, 12d, 14c, 14d including the apex angles a, j8 of the fourteen.
- the distance L2 along the optical axis is the same as the distance L2.
- This distance LI, L2 The shorter the distance LI, L2, the shorter the distance, the less vignetting, and the smaller the aperture / J.
- the diffraction grating device 10 in the diffraction grating device 10 (see FIGS. 2 and 3), light of an external force enters the right-angle prism 12 via the surface 12b of the right-angle prism 12.
- the light passing through the right-angle prism 12 exits from the surface 12a, and enters the volume 'phase' hologram as the diffraction grating 16 through the diffraction grating entrance surface 16a facing the surface 12a.
- the light transmitted through the volume 'phase' hologram exits from the diffraction grating exit surface 16b and enters the right-angle prism 14 through the surface 14a facing the diffraction grating exit surface 16b. Then, the light that has passed through the right-angle prism 14 is emitted to the outside from the surface 14b.
- the right-angle prism 12 is rotated by a predetermined angle 0 (see FIG. 3B) in the first direction (or the second direction) around the optical axis by the driving force of the driving means (not shown).
- the right angle prism 14 is rotated by a predetermined angle 0 in the second direction (or the first direction) around the optical axis.
- the apex angle can be effectively changed, and the wavelength in an arbitrary direction can be changed.
- the straight wavelength of the emitted light is 494 nm.
- the volume 'phase' holodalum which is a diffraction grating 16 with a periodically changing refractive index, exhibits the highest efficiency when the Bragg condition is satisfied, and the diffraction efficiency increases as the period of the grating approaches the wavelength. It is.
- this volume 'phase' hologram is designed as a transmission type diffraction grating like the one provided as the diffraction grating 16 in the diffraction grating device 10, the period of the grating is 0.7-3. It is a highly dispersed and highly efficient diffraction grating capable of achieving a diffraction efficiency close to 100% in the double range.
- the two right angle prisms 12 and 14 are rotated in the opposite direction by the same angle around the optical axis, and the effective apex angle is changed to satisfy the Bragg condition.
- the wavelength can be changed while maintaining high diffraction efficiency while always maintaining the Bragg condition.
- the volume 'phase' hologram as the diffraction grating 16 is arranged between the two right-angle prisms 12 and 14 arranged so as to be rotatable around the optical axis. Therefore, a diffraction grating device with high dispersion and high diffraction efficiency can be realized, and the force can be easily manufactured because of its simple structure.
- the diffraction grating device 10 uses the solid right-angle prisms 12 and 14, the diffraction grating device 10 has a simple structure, is easy to manufacture, and can be reduced in size and cost.
- the right-angle prisms 12 and 14 disposed in the diffraction grating device 10 of the present invention are solid, the reliability of the grism 200 (see FIG. 1) described in the “Background Art” section above is high.
- a material having a higher refractive index than the liquid used as the inner member 300 can be used. Further, in the diffraction grating device 10 according to the present invention, as shown in FIGS. 2 and 3, the optical system is not bent, and the right angle prisms 12 and 14 and the diffraction grating 16 constituting the diffraction grating device 10 are aligned. Therefore, it is suitable for use in combination with a microscope or a telescope.
- F value focal length fZ aperture D
- a lens 102 that transmits light incident on the surface 12b is disposed so as to be positioned on the surface 12b side, and in the vicinity of the right-angle prism 14
- a lens 104 through which light emitted from the surface 14b passes is disposed so as to be positioned on the surface 14b side.
- the right angle prisms 12 and 14 constituting the diffraction grating device 10 are disposed between the lens 102 through which light incident from the outside passes through the diffraction grating device 10 and the lens 104 through which light exiting from the diffraction grating device 10 passes through.
- the force that the lenses 102 and 104 are disposed as optical components in addition to the diffraction grating device 10 is not limited to this, and the lenses 102 and 104 are also included. It may be configured as a diffraction grating device according to the present invention! /.
- the diffraction grating device 10 is used in combination with a collimator or a camera (condensing) optical system, or includes a configuration such as a collimator or a camera (condensing) optical system.
- the diffraction grating device according to the present invention is used in a microscope, the objective lens or eyepiece lens of the microscope acts as a collimator, so that only the diffraction grating device 10 of the first embodiment described above is provided. There is no need to combine a collimator or a camera (condensing) optical system in addition to the diffraction grating device 10.
- the configuration used with the diffraction grating device 10 is not limited to a condensing lens such as the lenses 102 and 104 shown in FIG. 5, and various configurations can be provided.
- a condensing lens such as the lenses 102 and 104 shown in FIG. 5, and various configurations can be provided.
- an off-axis parabolic mirror can be combined.
- SR surface relief
- the transmission SR type diffraction grating is designed to be less than the reflection type SR diffraction grating as shown in Fig. 6, the transmission type is more affected by the anomaly than the reflection type, so a high dispersion spectrum can be obtained. Not suitable for bowls.
- a step-shaped transmission diffraction grating (relief grating) has an incident efficiency that does not reach 100% in principle even at a blaze wavelength. Even if the angle is adjusted, the diffraction efficiency cannot be changed greatly.
- the diffraction grating device 10 In contrast to such a conventional SR type diffraction grating, the diffraction grating device 10 according to the present invention, as described above, has a diffraction efficiency as the grating period approaches the wavelength.
- a high-dispersion and high-efficiency diffraction grating that can achieve a diffraction efficiency close to 100% when the period of the grating is in the range of 0.7 to 3 times the wavelength. Therefore, it is possible to realize a diffraction grating device with high dispersion, high diffraction efficiency, and a small size.
- the diffraction grating device 10 is inexpensive by combining a variable apex angle prism and a volume phase 'hologram', and the wavelength range can be arbitrarily selected. Dispersion spectroscopic measurement is possible and it is very versatile.
- the diffraction grating device 20 (see FIG. 7) according to the second embodiment has a right angle prism 22 and a right angle prism 24 compared to the diffraction grating device 10 according to the first embodiment (see FIG. 2). And the diffraction grating 26 are arranged differently.
- a diffraction grating device with high dispersion and high diffraction efficiency is realized by a two-stage optical system that goes straight on a straight line between the SI and the second set S2, and it can be easily manufactured because its structure is simple.
- two sets of the first set S1 and the second set S2 each having the same configuration are arranged, and the rotation directions of the prisms to be configured are mirror images of the first set S1 and the second set S2.
- the diffraction grating device 20 includes a right-angle prism 12 disposed so as to be rotatable around the optical axis of the diffraction grating device 20 (see a dashed line in FIG. 7), and a right-angle prism 12 A right angle prism 14 having a surface 14a facing substantially parallel to the surface 12a and being rotatable about the optical axis; and a diffraction grating disposed between the right angle prism 12 and the right angle prism 14 A prism 16, a right angle prism 22 disposed so as to be rotatable around the optical axis at the subsequent stage of the right angle prism 14, and a surface 24 a facing substantially parallel to the surface 22 a of the right angle prism 22 and provided around the optical axis. And a right angle prism 24 disposed in a freely rotatable state, and a diffraction grating 26 disposed between the right angle prism 22 and the right angle prism 24.
- the diffraction grating device 20 includes the first set S1 composed of the diffraction grating 16 disposed between the two right-angle prisms 12 and 14, and the diffraction disposed between the two right-angle prisms 22 and 24. It has a second set S2 consisting of a class 26 and has two sets each having the same configuration.
- the entire first set S1 of the diffraction grating device 20 corresponds to the diffraction grating device 10 (see FIG. 2) of the first embodiment described above.
- the right angle prisms 22 and 24 constituting the second set S 2 of the diffraction grating device 20 have the same structure as the right angle prisms 12 and 14, and the diffraction grating 26 has the same structure as the diffraction grating 16. Since it is provided, the above explanation is used and detailed explanation is omitted.
- the state shown in FIG. 7 is the initial state. That is, in the initial state, in the first set S1 of the diffraction grating device 20, the right-angle prism 12 and the right-angle prism 14 are positioned symmetrically across the diffraction grating 16, and the surface 12e of the right-angle prism 12 is The surface 14e of the right-angle prism 14 is positioned parallel to the optical axis, and the apex angle ⁇ of the right-angle prism 12 and the apex angle ⁇ of the right-angle prism 14 are opposed to each other.
- the right-angle prism 22 and the right-angle prism 24 are positioned symmetrically across the diffraction grating 26, and the right angle of the right-angle prism 22 is formed with the surface 22a.
- the surface 22e is located parallel to the optical axis, and the surface 24e forming the right angle of the right-angle prism 24 together with the surface 24a is located parallel to the optical axis so that the vertical angle ⁇ of the right-angle prism 22 and the right-angle prism 24 The apex angle ⁇ is opposed.
- both the right-angle prism 22 and the right-angle prism 24 are arranged so as to be rotatable around the optical axis of the diffraction grating device 20, and the rotation axis coincides with the optical axis.
- the second direction see arrow B direction, which coincides with the counterclockwise direction when viewed from the light traveling direction shown in FIG. 7).
- a driving device such as a cam is driven by the control of a control device such as a microcomputer (not shown), and the driving force causes the right angle prism 14 of the first set S1 to be second around the optical axis.
- the right-angle prism 22 of the second set S2 is set so as to rotate in the second direction around the optical axis by the predetermined angle ⁇ .
- the right-angle prism 24 of the second set S2 is similar to the right-angle prism 12 of the first set S1. It is set to rotate by a predetermined angle ⁇ in the surrounding first direction.
- the right-angle prism 22 of the second set S2 is predetermined in the first direction around the optical axis. Is set to rotate by an angle ⁇ .
- the right-angle prism 24 of the second set S2 becomes light like the right-angle prism 12 of the first set S1. It is set to rotate by a predetermined angle ⁇ in the second direction around the axis.
- the first set S1 light of an external force is reflected on the surface of the right-angle prism 12.
- the light enters the right-angle prism 12 through 12b.
- the light that has passed through the right-angle prism 12 exits from the surface 12a, and enters the volume phase hologram that is the diffraction grating 16 through the diffraction grating incident surface 16a that faces the surface 12a.
- the light transmitted through the volume phase hologram is emitted from the diffraction grating exit surface 16b and enters the right-angle prism 14 through the surface 14a facing the diffraction grating exit surface 16b.
- the light passing through the right-angle prism 14 is emitted from the surface 14b.
- the light emitted from the right-angle prism 14 of the first set S 1 is incident on the right-angle prism 22 via the surface 22b of the right-angle prism 22 in the second set S2.
- the light passing through the rectangular prism 22 is emitted from the surface 22a, and enters the volume phase hologram as the diffraction grating 26 through the diffraction grating incident surface 26a facing the surface 22a.
- the light transmitted through the volume 'phase' hologram is emitted from the diffraction grating exit surface 26b and is incident on the right-angle prism 24 through the surface 24a facing the diffraction grating exit surface 26b. Then, the light that has passed through the rectangular prism 24 is emitted to the outside from the surface 24b.
- the rectangular prism 12 is rotated by a predetermined angle ⁇ in the first direction (or the second direction) around the optical axis by the driving force of the driving means (not shown).
- the right-angle prism 14 is rotated by a predetermined angle ⁇ in the second direction (or the first direction) around the optical axis.
- the right-angle prism 22 is rotated by a predetermined angle ⁇ in the second direction (or the first direction) around the optical axis, and the right-angle prism 24 is moved to the optical axis.
- the two right-angle prisms 12 and 14 are rotated in the opposite directions around the optical axis, and the two right-angle prisms 22 and 24 are rotated in the opposite directions to connect the adjacent right-angle prisms 14 and the right-angle prism 22 to each other.
- the apex angle can be changed effectively, and the wavelength in any direction can be changed.
- the maximum of the first-order diffracted light (theoretical )
- the two right-angle prisms 12 and 14 and the two right-angle prisms 22 and 24 are rotated in opposite directions around the optical axis, so that the right-angle prism 12 and the right-angle prism 24 are rotated around the optical axis.
- Is rotated by an initial state force of 30 ° ( ⁇ 30 °) in the first direction (see arrow A in Fig. 7), and the right angle prism 14 and the right angle prism 22 are moved in the second direction around the optical axis
- the straight wavelength of the light emitted from the diffraction grating device 20 is 494 nm.
- the two right-angle prisms 12, 14 and the two right-angle prisms 22, 24 are rotated in the opposite direction about the optical axis in the opposite direction, and the effective apex angle is changed to satisfy the Bragg condition.
- the diffraction grating device 20 can change the wavelength while maintaining high diffraction efficiency while always maintaining the Bragg condition.
- the volume 'phase' hologram as the diffraction grating 16 is arranged between the two right-angle prisms 12 and 14 arranged so as to be rotatable around the optical axis.
- a volume 'phase' hologram which is a diffraction grating 26 is arranged between two right-angle prisms 22 and 24 that are arranged so as to be rotatable around the optical axis.
- the diffraction grating device 20 of the second embodiment also has the same operational effects as the diffraction grating device 10 of the first embodiment described above, and the above description of the operational effects is provided. Detailed description will be omitted with the aid of.
- a prism configured by arranging two sets of a first set S1 and a second set S2 each having the same configuration. By driving so that the rotation direction of the first set SI and the second set S2 are mirror images of each other, it is possible to cancel the aberration that causes the spectrum to be curved.
- the surface 12b side The lens 102 (see FIG. 5) through which light incident on the surface 12b passes is disposed so as to be positioned at the surface 24b, and the light emitted from the surface 24b so as to be positioned on the surface 24b side in the vicinity of the right-angle prism 24.
- a lens 104 (see FIG. 5) through which light is transmitted can be provided.
- the diffraction grating device 30 (see FIG. 8) of the third embodiment is different from the diffraction grating device 20 (see FIG. 7) of the second embodiment in the second embodiment.
- the difference is that an isosceles triangular prism 32 is provided in place of the right-angle prism 14 and the right-angle prism 22 of the diffraction grating device 20.
- the diffraction grating device 30 includes a right-angle prism 12 disposed in a state of being rotatable around the optical axis of the diffraction grating device 30 (see a dashed line in FIG. 8), and a right-angle prism 12 Diffraction disposed between the isosceles triangular prism 32 having a surface 32a facing the surface 12a and being rotatable around the optical axis, and between the right-angle prism 12 and the isosceles triangular prism 32.
- the right angle prisms 12 and 24 and the diffraction gratings 16 and 26 constituting the diffraction grating device 30 have the same configuration as that of the diffraction grating device 20 (see FIG. 7) of the second embodiment described above. A detailed description will be omitted.
- the prisms disposed in the diffraction grating device 30 are two right-angle prisms 12 and 24 and an isosceles triangle prism 32 that is not a right-angle prism.
- the isosceles triangle prism 32 is a solid block-like prism formed of a predetermined material, like the right-angle prisms 12 and 24.
- the isosceles triangle prism 32 As a constituent material, optical glass or a crystal material having a refractive index of about 1.3 to 4 can be used as in the case of the right-angle prisms 12 and 24.
- the side surface 32c and the side surface 32d that face each other and include the apex angle ⁇ of the isosceles triangle prism 32 have an isosceles triangle shape.
- the surface 32a which is one of the two surfaces forming the apex angle ⁇ of the isosceles prism 32, faces the surface 12a of the right-angle prism 12, and the other of the two surfaces forming the apex angle ⁇ .
- the isosceles triangular prism 32 and the right-angle prism 12 and the isosceles triangle prism 32 and the right-angle prism 24 are mutually spaced with a predetermined distance so that the surface 32b which is the surface of the right-angle prism 24 faces the surface 24a of the right-angle prism 24. It is arranged at a distance.
- the state shown in FIG. 8 is an initial state. That is, in the initial state, the surface 12e of the right-angle prism 12 is positioned parallel to the optical axis, the surface 24e of the right-angle prism 24 is positioned parallel to the optical axis, and is opposed to the apex angle ⁇ of the isosceles triangle prism 32.
- 32e is positioned parallel to the optical axis, the apex angle ⁇ of the right-angle prism 12 and the apex angle ⁇ of the isosceles triangle prism 32 are opposed, and the apex angle ⁇ of the right-angle prism 24 and the isosceles triangle prism
- the apex angle ⁇ of 32 is opposite.
- the isosceles triangular prism 32 is disposed so as to be rotatable around the optical axis of the diffraction grating device 30, and a first direction around the optical axis with a rotation axis coinciding with the optical axis as a rotation center. (See the arrow ⁇ direction that matches the clockwise direction when viewed from the direction of travel of light shown in Fig. 8) and the second direction (the direction of travel of light shown in Fig. 8) that is opposite to the first direction It can be rotated in the direction of arrow B that matches the counterclockwise direction when viewed from the direction).
- a driving device such as a cam is driven by the control of a control device such as a microcomputer (not shown), and the driving force causes the right-angle prism 12 and the right-angle prism 24 to move around the first optical axis.
- the isosceles triangle prism 32 is set to rotate in the second direction around the optical axis by a predetermined angle ⁇ when rotating in the direction by a predetermined angle ⁇ . It is.
- the isosceles triangle prism 32 changes by the predetermined angle ⁇ in the first direction around the optical axis. It is set to rotate.
- the diffraction grating device 30 With the above configuration, in the diffraction grating device 30 (see FIG. 8), light from the outside enters the right prism 12 through the surface 12b of the right prism 12.
- the light passing through the right angle prism 12 exits from the surface 12a, and enters the volume phase hologram as the diffraction grating 16 through the diffraction grating incident surface 16a facing the surface 12a.
- the light transmitted through the volume 'phase' hologram exits from the diffraction grating exit surface 16b and enters the isosceles triangle prism 32 via the surface 32a facing the diffraction grating exit surface 16b.
- the light that has passed through the isosceles triangular prism 32 exits from the surface 32b, and enters the volume phase hologram that is the diffraction grating 26 via the diffraction grating incident surface 26a that faces the surface 32b.
- the light transmitted through the volume 'phase' hologram exits from the diffraction grating exit surface 26b and enters the right-angle prism 24 via the surface 24a facing the diffraction grating exit surface 26b. Then, the light passing through the right-angle prism 24 is emitted from the surface 24b.
- the right-angle prism 12 is rotated by a predetermined angle ⁇ in the first direction (or the second direction) around the optical axis by the driving force of the driving means (not shown) and isosceles triangular prism 32. Is rotated by a predetermined angle ⁇ in the second direction around the optical axis (or in the first direction). At this time, the right-angle prism 24 rotates by a predetermined angle ⁇ in the first direction (or the second direction) around the optical axis.
- the right-angle prism 24 arranged at the rear stage of the equilateral triangular prism 32 is rotated in the reverse direction around the optical axis, the apex angle can be effectively changed, and the wavelength in any direction can be changed. be able to.
- the straight wavelength of the light emitted from the diffraction grating device 30 in the initial state shown in FIG. 8 is 570 nm.
- the right-angle prisms 12 and 24 and the isosceles triangle prism 32 are respectively rotated by 30 ° from the initial state (see the directions of arrow A and arrow B shown in FIG. 8), the light emitted from the diffraction grating device 30 is reflected.
- the straight wavelength is 494nm.
- the effective apex angle is changed so as to satisfy the Bragg condition.
- the wavelength can be changed while maintaining high diffraction efficiency while always maintaining the Bragg condition.
- the volume phase hologram disposed adjacent to each of the two right-angle prisms 12 and 24 disposed so as to be rotatable around the optical axis.
- An isosceles triangular prism 32 having an apex angle ⁇ that is approximately twice the apex angles ⁇ and ⁇ of the right-angle prisms 12 and 24 is disposed between the diffraction grating 16 and the diffraction grating 26. Therefore, a diffraction grating device with high dispersion and high diffraction efficiency can be realized, and the structure is simple so that it can be easily manufactured.
- the diffraction grating device 30 of the third embodiment also exhibits the same operational effects as the diffraction grating device 10 of the first embodiment described above, and the above description of the operational effects. Detailed description will be omitted with the aid of.
- the diffraction grating device 30 of the third embodiment an isosceles triangle is used instead of the right-angle prism 14 and the right-angle prism 22 of the diffraction grating device 20 (see FIG. 7) of the second embodiment described above. Since the prism 32 is disposed, the total number of prisms disposed in the diffraction grating device can be reduced by one compared to the configuration of the diffraction grating device 20 of the second embodiment described above. Further, the configuration can be further simplified, the size can be reduced and the cost can be reduced, and the force with which the spectrum is curved can be canceled out.
- the lenses 102 and 104 near the right-angle prisms 12 and 24 (see FIG. 5). Can be arranged.
- a fourth embodiment of the diffraction grating device according to the present invention will be described with reference to FIGS. 9 (a) and 9 (b).
- the diffraction grating device 40 (see FIG. 9A) of the fourth embodiment is perpendicular to the right-angle prism 42 as compared to the diffraction grating device 10 of the first embodiment described above (see FIG. 2). The difference is that the prism 44 and the diffraction grating 46 are arranged so that the optical path bends at 90 °. More specifically, the diffraction grating device 40 is a right-angle prism arranged in a rotatable manner around the optical axis of the diffraction grating device 40 (see the dashed line in FIGS. 9 (a) and 9 (b)).
- a right-angle prism 44 arranged in a free state, and a diffraction grating 46 arranged between the right-angle prism 42 and the right-angle prism 44 are configured.
- the right-angle prism 42, the right-angle prism 44, and the diffraction grating 46 constituting the diffraction grating device 40 are the same as the right-angle prisms 12, 14 and the diffraction grating 16 in the diffraction grating device 10 of the first embodiment, respectively. Since the configuration is provided, the above description is used and the detailed description is omitted.
- the state shown in FIG. 9 (a) is the initial state, and the right angle prism 42 and the right angle prism 44 are positioned symmetrically with the diffraction grating 46 interposed therebetween, so
- the surface 42e that forms the right angle of the prism 42 together with the surface 42a is located parallel to the optical axis, and the surface 44e that forms the right angle of the right angle prism 44 together with the surface 44a is located parallel to the optical axis.
- the apex angle a is opposite to the apex angle 13 of the right-angle prism 44.
- Both the right-angle prism 42 and the right-angle prism 44 are arranged so as to be rotatable around the optical axis of the diffraction grating device 40.
- the first direction around the optical axis with the rotation axis that matches the optical axis as the center of rotation (the direction of the arrow A that matches the clockwise direction as seen from the light traveling direction shown in Fig. 9 (a))
- a second direction that is opposite to the first direction Fig. 9 (a) It can be rotated in the direction of arrow B, which coincides with the counterclockwise direction when viewed from the direction of travel of light shown in Fig. 1.
- the predetermined direction is set in the second direction, which is the opposite direction. So that the right angle prism 42 rotates by a predetermined angle 0 in the second direction around the optical axis so that it rotates by a predetermined angle ⁇ in the first direction, which is the opposite direction.
- the rotation of the right-angle prism 44 is set.
- the diffraction grating 46 composed of a volume phase hologram is not rotated around the optical axis between the right angle prism 42 and the right angle prism 44, which are positioned substantially orthogonal to the surfaces 42a and 44a. It is fixedly arranged.
- the diffraction grating entrance surface 46a is located obliquely with respect to the surface 42a of the right-angle prism 42, and the diffraction grating exit surface 46b is located obliquely with respect to the surface 44a of the right-angle prism 44.
- the diffraction grating 46 is disposed so as to be substantially orthogonal to the side surfaces 42c, 42d, 44c, 44d including the angles a, j8.
- the diffraction grating device 40 in the diffraction grating device 40 (see FIG. 9A), light from the outside enters the rectangular prism 42 through the surface 42b of the rectangular prism 42. Then, the light passing through the right angle prism 42 is emitted from the surface 42a, and enters the volume phase hologram as the diffraction grating 46 through the diffraction grating incident surface 46a located on the surface 42a side. The light transmitted through the volume 'phase' hologram is emitted from the diffraction grating exit surface 46b and enters the right-angle prism 44 through the surface 44a located on the diffraction grating exit surface 46b side. The light that has passed through the right-angle prism 44 is emitted to the outside from the surface 44b.
- the right-angle prism 42 is rotated by a predetermined angle ⁇ in the first direction (or the second direction) around the optical axis by the driving force of the driving means (not shown), and the right-angle prism 44 is rotated by the optical axis.
- the apex angle can be effectively changed, and the wavelength in an arbitrary direction can be changed.
- the volume of the diffraction grating 46 'phase' hologram is lOOmm X 141mm and the grating period is 1 ⁇ m
- the external force is also incident through the surface 42b of the right-angle prism 42, passes through the diffraction grating device 40, and is emitted to the outside from the surface 44b of the right-angle prism 44.
- the straight wavelength of light traveling straight along the axis coincides with 1,760 nm.
- the two right-angle prisms 42 and 44 are rotated in the opposite directions around the optical axis, and the right-angle prism 42 is moved in the first direction around the optical axis (the arrow shown in FIG. 9 (a)).
- Rotate by 180 ° ( ⁇ 180 °) from the initial state in the initial direction (see A direction), and the initial state force in the second direction around the optical axis (see arrow B direction in Fig. 9 (a))
- the two right angle prisms 42 and 44 are rotated in the opposite direction by the same angle around the optical axis, and the effective apex angle is changed to satisfy the Bragg condition.
- the wavelength can be changed while maintaining high diffraction efficiency while always maintaining the Bragg condition.
- the volume 'phase' hologram as the diffraction grating 46 is arranged between the two right-angle prisms 42 and 44 arranged so as to be rotatable around the optical axis. Therefore, a diffraction grating device with high dispersion and high diffraction efficiency can be realized.
- the diffraction grating device 40 according to the fourth embodiment also exhibits the same operational effects as the diffraction grating device 10 according to the first embodiment described above, and the above description of the operational effects. Detailed description will be omitted with the aid of.
- the right angle prism 42 and the right angle prism 44 are respectively set with the rotation axis coincident with the optical axis as the rotation center. It can be rotated up to 180 °, and it has a wide adjustment range as a vertical angle variable prism in which the rotation angle of the right-angle prisms 42 and 44 is large.
- the diffraction grating device 40 is configured to bend the optical path at 90 °, it is possible to replace the diffraction grating device 40 with a reflective diffraction grating of various devices, thereby achieving high dispersion and miniaturization of measuring instruments. Can do. This Such a diffraction grating device 40 has higher versatility.
- the surface 42b side The lens 102 (see FIG. 5) through which the light incident on the surface 42b is transmitted is disposed so as to be positioned at the surface 44b, and the light emitted from the surface 44b so as to be positioned on the surface 44b side in the vicinity of the right-angle prism 44.
- a lens 104 (see FIG. 5) through which light is transmitted can be provided.
- the diffraction grating device 50 (see FIG. 10) of the fifth embodiment is perpendicular to the right-angle prism 52 as compared to the diffraction grating device 40 of the fourth embodiment (see FIG. 9 (a)). The difference is that a prism 54 and a diffraction grating 56 are arranged and the optical path is bent at 180 °.
- the diffraction grating device 50 includes a right-angle prism 42 disposed in a state of being rotatable around the optical axis of the diffraction grating device 50 (refer to a one-dot chain line in FIG. 10), and a right-angle prism 42.
- a right-angle prism 44 provided with a face 44a positioned substantially orthogonal to the face 42a and being rotatable around the optical axis, and a diffraction grating 46 disposed between the right-angle prism 42 and the right-angle prism 44
- a right-angle prism 52 disposed in a state of being rotatable around the optical axis at the subsequent stage of the right-angle prism 44, and a surface 52a that forms a right angle of the right-angle prism 52 and forms an apex angle ⁇ .
- a right angle prism 54 that is provided with a surface 54a that forms a right angle and a vertex angle ⁇ , and is disposed so as to be rotatable around the optical axis, and is disposed between the right angle prism 52 and the right angle prism 54. And a diffraction grating 56 formed.
- the diffraction grating device 50 includes the first set S1 composed of the diffraction grating 46 disposed between the two right-angle prisms 42 and 44, and the diffraction disposed between the two right-angle prisms 52 and 54. It has a second set S2 consisting of a class 56 and has two sets each having the same configuration.
- the entire first set S1 of the diffraction grating device 50 corresponds to the diffraction grating device 40 (see FIG. 9 (a)) described above.
- the right-angle prisms 52 and 54 constituting the second set S2 of the diffraction grating device 50 have the same structure as the right-angle prisms 12 and 14. Since the diffraction grating 56 has the same configuration as that of the diffraction grating 16, the above description is used and the detailed description is omitted.
- the state shown in FIG. 10 is the initial state. That is, in the initial state, in the first set S1 of the diffraction grating device 50, the right-angle prism 42 and the right-angle prism 44 are positioned symmetrically across the diffraction grating 46, and the surfaces 42e of the right-angle prisms 42 and 44 are located. 44e are positioned parallel to the optical axis, and the apex angle ⁇ of the right-angle prism 42 and the apex angle ⁇ of the rectangular prism 44 are opposed to each other.
- the right-angle prism 52 and the right-angle prism 54 are positioned symmetrically with the diffraction grating 56 interposed therebetween, and the right-angle prisms 52 and 54 face the right angle.
- Surfaces 52e and 54e formed together with 52a and 54a are positioned parallel to the optical axis, and the apex angle ⁇ of the right-angle prism 52 and the apex angle ⁇ of the right-angle prism 54 face each other.
- both the right-angle prism 52 and the right-angle prism 54 are arranged so as to be rotatable around the optical axis of the diffraction grating device 50, and the rotation axis coincides with the optical axis.
- the rotation direction is the first direction around the optical axis (see the arrow ⁇ direction that matches the clockwise direction when viewed from the direction of travel of light shown in Fig. 10) and the opposite direction to the first direction It can rotate in the second direction (see arrow B direction, which matches the counterclockwise direction when viewed from the direction of light travel shown in Fig. 10).
- a drive device such as a cam is driven by the control of a control device such as a microcomputer (not shown), and the right angle prism 44 of the first set S1 is moved around the optical axis by the drive force.
- a control device such as a microcomputer (not shown)
- the right angle prism 52 of the second set S2 is rotated in the second direction (or the first direction) around the optical axis when rotated by a predetermined angle ⁇ in the direction (or the first direction) Is set to rotate by an angle ⁇ .
- the second prism 52 in the first set S1 is similar to the second prism 42 in the first set S1.
- the right angle prism 54 of the set S2 is set to rotate by a predetermined angle ⁇ in the first direction (or the second direction) around the optical axis.
- the diffraction grating 56 composed of a volume phase hologram is rotated around the optical axis between the right-angle prism 52 and the right-angle prism 54 which are positioned substantially orthogonal to the surfaces 52a and 54a. It is fixedly arranged without such.
- the diffraction grating entrance surface 56a is located obliquely with respect to the surface 52a of the right-angle prism 52, and the diffraction grating exit surface 56b is located obliquely with respect to the surface 54a of the right-angle prism 54.
- the diffraction grating 46 is disposed so as to be substantially orthogonal to the side surfaces 52c and 54c including the angles ⁇ and ⁇ .
- the volume “phase” passes through the hologram, passes through the right-angle prism 44, and exits from the surface 44b.
- the light emitted from the right-angle prism 44 of the first set S 1 enters the right-angle prism 52 via the surface 52b of the right-angle prism 52 and passes through the right-angle prism 52 in the second set S2. Then, the light passes through the volume 'phase' hologram as the diffraction grating 56, passes through the right-angle prism 54, and is emitted from the surface 54b to the outside.
- the rectangular prism 42 is rotated in the first direction (or the second direction) around the optical axis by a predetermined angle ⁇ by the driving force of the driving means (not shown).
- the right-angle prism 44 is rotated by a predetermined angle ⁇ in the second direction (or the first direction) around the optical axis.
- the right-angle prism 52 is rotated by a predetermined angle ⁇ in the second direction (or the first direction) around the optical axis, and the right-angle prism 54 is moved to the optical axis. Rotate by a predetermined angle ⁇ in the surrounding first direction (or second direction).
- the two right-angle prisms 42 and 44 are rotated in the opposite directions around the optical axis, and the two right-angle prisms 52 and 54 are rotated in the opposite directions, and the adjacent right-angle prism 44 and the right-angle prism 52 are rotated.
- the apex angle can be effectively changed, and the wavelength in any direction can be changed.
- the two right-angle prisms 42 and 44 and the two right-angle prisms 52 and 54 are rotated in opposite directions around the optical axis, so that the right-angle prism 42 and the right-angle prism 54 are rotated around the optical axis.
- the straight wavelength of the light emitted from the diffraction grating device 50 becomes 953 nm.
- the two right-angle prisms 42 and 44 and the two right-angle prisms 52 and 54 are rotated about the optical axis by the same angle in the opposite direction, and the effective apex angle is changed to satisfy the Bragg condition.
- the wavelength can be changed while maintaining high diffraction efficiency while always maintaining the Bragg condition.
- the volume 'phase' hologram which is the diffraction grating 46
- a volume 'phase' hologram which is a diffraction grating 56
- two right-angle prisms 52 and 54 that are arranged so as to be rotatable around the optical axis.
- the diffraction grating device 50 of the fifth embodiment also has the same operational effects as the diffraction grating device 10 of the first embodiment and the diffraction grating device 40 of the fourth embodiment described above. Therefore, the detailed description will be omitted by using the above description for the function and effect.
- the diffraction grating device 50 in the diffraction grating device 50 according to the fifth embodiment, four right-angle prisms 42, Each of 44, 52, and 54 can be rotated up to 180 ° around the rotation axis that coincides with the optical axis (see Fig. 9 (b)), and the rotation angle of the right-angle prisms 42, 44, 52, and 54 can be It has a wide adjustment range as a large variable apex angle prism.
- the diffraction grating device 50 is configured to bend the optical path at 180 °, it is possible to replace the diffraction grating device 50 with a reflection type diffraction grating of various devices, and to achieve high dispersion and miniaturization of measuring instruments. I can plan.
- Such a diffraction grating device 50 has much higher versatility.
- R ⁇ ⁇
- the typical size is about 1200 x 500 x 350.
- the diffraction grating device 50 according to the present invention using a VPH grating can realize a spectrometer having the same resolution with a size of about 300 X 200 XI 50, Higher efficiency can be obtained.
- the diffraction grating device 50 in the diffraction grating device 50 according to the fifth embodiment, two sets of the first set S1 and the second set S2 each having the same configuration are arranged, and the rotation direction of the configured prisms is determined.
- the first set S1 and the second set S2 so as to have a mirror image relationship, it is possible to cancel the aberration that causes the spectrum to be curved.
- the surface 42b side The lens 102 through which the light incident on the surface 42b is transmitted is disposed so as to be positioned at the surface 54b, and the lens 104 through which the light emitted from the surface 54b is transmitted near the right-angle prism 54 so as to be positioned on the surface 54b side. It can be arranged (see Fig. 11).
- the diffraction grating device 60 (see FIG. 12) of the sixth embodiment is different from the diffraction grating device 50 (see FIG. 10) of the fifth embodiment described above in the diffraction of the fifth embodiment.
- An isosceles triangular prism 62 is provided in place of the right-angle prism 44 and the right-angle prism 52 of the grating device 50, and the difference is that.
- the diffraction grating device 60 includes a right-angle prism 42 disposed in a state of being rotatable around the optical axis of the diffraction grating device 60 (see a dashed line in FIG. 12), and a right-angle prism 42.
- a diffraction grating 56 disposed between the prism 54 and the isosceles triangle prism 62 is provided.
- the right-angle prisms 42 and 54 and the diffraction gratings 46 and 56 constituting the diffraction grating device 60 are the same as the diffraction grating device 50 (see FIG. 10) of the fifth embodiment described above. A detailed description will be omitted.
- the prisms disposed in the diffraction grating device 60 are two right-angle prisms 42 and 54 and an isosceles triangle prism 62 that is not a right-angle prism.
- the isosceles triangle prism 62 has the same configuration as the isosceles triangle prism 32 of the diffraction grating device 30 (see FIG. 8) of the third embodiment described above. Detailed explanation will be omitted.
- the state shown in FIG. That is, in the initial state, the surface 42e of the right-angle prism 42 is positioned parallel to the optical axis, the surface 54e of the right-angle prism 54 is positioned parallel to the optical axis, and the apex angle ⁇ of the isosceles triangle prism 62 is
- the opposing surface 62e is positioned parallel to the optical axis, the apex angle ⁇ of the right-angle prism 42 and the apex angle ⁇ of the isosceles triangle prism 62 are opposed, and the apex angle ⁇ of the right-angle prism 24 and the isosceles triangle prism 62 Is the opposite of the apex angle ⁇ .
- the right-angle prism 42 is moved around the optical axis by the driving force of the driving means (not shown). Is rotated by a predetermined angle ⁇ in the first direction (or the second direction) and the isosceles triangular prism 62 is rotated in the second direction (or the first direction) around the optical axis by a predetermined angle. Rotate by ⁇ . At this time, the right-angle prism 54 rotates by a predetermined angle ⁇ in the first direction (or the second direction) around the optical axis.
- the right-angle prism 54 arranged at the rear stage of the equilateral triangular prism 62 is rotated in the reverse direction around the optical axis, the apex angle can be effectively changed, and the wavelength in any direction can be changed. be able to.
- the straight wavelength is 1,760 nm in the initial state shown in FIG.
- the right-angle prisms 42 and 54 and the isosceles triangle prism 62 are respectively rotated by 180 ° from the initial state (see the arrow A direction and the arrow B direction shown in FIG. 12)
- the light emitted from the diffraction grating device 60 The straight wavelength is 953 nm.
- the effective apex angle is changed so as to satisfy the Bragg condition.
- the wavelength can be changed while maintaining high diffraction efficiency while always maintaining the Bragg condition.
- the volume phase hologram disposed adjacent to each of the two right-angle prisms 42 and 54 disposed rotatably around the optical axis.
- An isosceles triangular prism 62 having an apex angle ⁇ that is approximately twice the apex angles ⁇ and ⁇ of the right-angle prisms 42 and 54 is disposed between the diffraction grating 46 and the diffraction grating 56. Therefore, a diffraction grating device with high dispersion and high diffraction efficiency can be realized, and since the structure is simple, it can be easily manufactured.
- the diffraction grating device 60 of the sixth embodiment also has the same operational effects as the diffraction grating device 10 of the first embodiment and the diffraction grating device 40 of the fourth embodiment described above. Therefore, the detailed description will be omitted by using the above description for the function and effect.
- the diffraction grating device 60 of the sixth embodiment an isosceles triangle is used instead of the right-angle prism 44 and the right-angle prism 52 of the diffraction grating device 50 (see FIG. 10) of the fifth embodiment described above. Since the prism 62 is arranged, the total number of prisms arranged in the diffraction grating device can be reduced by one compared to the configuration of the diffraction grating device 50 of the fifth embodiment described above. Further, the configuration can be further simplified, the size can be reduced and the cost can be reduced, and the force and the aberration that the spectrum is curved can be canceled out.
- the right prisms 42 and 54 near the lens 102, 104 similarly to the diffraction grating device 50 of the fifth embodiment described above. Can be arranged.
- the diffraction grating 16 and the right-angle prisms 12 and 14 are spaced apart with the distances LI and L2.
- the present invention is not limited to this.
- the diffraction grating entrance surface 16a of the diffraction grating 16 and the surface 12a of the right-angle prism 12 are in contact with each other.
- the right-angle prisms 12 and 14 rotate around the optical axis in a state where the two rectangular prisms 12 and 14 are closely attached to both surfaces of the diffraction grating 16. Therefore, for example, if lubrication is performed with a transparent liquid having a refractive index close to that of glass, such as matching oil, it is advantageous in terms of loss due to reflection, and a good operating state can be maintained. This change is not limited to the first embodiment, but can be applied to each embodiment as appropriate. In the diffraction grating device 20 (see FIG.
- the distance along the optical axis that is the distance between the diffraction grating incident surface 26a of the diffraction grating 26 and the surface 22a of the right-angle prism 22 is The distance along the optical axis, which is the distance between the diffraction grating exit surface 26b of the diffraction grating 26 and the surface 24a of the right-angle prism 24, may be matched, and may be made equal to the distances LI and L2 (see FIG. 2). Alternatively, the distance along the optical axis between the diffraction grating and the prism may be different.
- the diffraction grating device 10 In the diffraction grating device 10 (see FIG. 2) of the first embodiment described above, light from the outside is incident on the diffraction grating device 10 via the surface 12b of the right-angle prism 12.
- the present invention is not limited to this.
- external light incident on the diffraction grating device 10 is incident on the right-angle prism 14 via the surface 14b of the right-angle prism 14, and thereafter
- the light may pass through the diffraction grating device 10 and be emitted from the surface 12 b of the right-angle prism 12 to the outside of the diffraction grating device 10.
- the change is not limited to the first embodiment, but can be applied to each embodiment as appropriate.
- the vertical angles ⁇ , ⁇ , ⁇ , ⁇ , right angle prisms 12, 14, 22, 24, 42, 44, 52, 54 and isosceles prisms 32, 62 ⁇ , rotation angle ⁇ , or material forming the prism can be appropriately selected according to the wavelength used.
- ZnS zinc oxide
- LiNbO lithium niobate
- the right-angle prisms 12 and 14 may be formed of a material having a high refractive index such as an electric body or a semiconductor, and the right-angle prisms 12 and 14 may be high-refractive index prisms.
- the refractive index of all the prisms constituting the diffraction grating device according to the present invention is 2, even when the prism is rotated, the Bragg condition can be almost satisfied at all times, so that the wavelength can be adjusted while maintaining high efficiency. Can be changed.
- right angle prisms 12, 14, 22, 24, 42, 44, 52, 54 are not limited to having the same apex angle, but prisms having different apex angles are arranged. May be.
- the force that the right-angle prisms 42 and 44 are disposed is not limited to this.
- other prisms may be provided.
- side surfaces 72c including apex angles a and j8 are used.
- 74c may be provided with prisms 72 and 74 having an isosceles triangle shape. At this time, the rotation axis around which the prisms 72 and 74 rotate coincides with the optical axis.
- the rotation axis about which the prism rotates may be made to have a predetermined angle with respect to the optical axis without matching the optical axis depending on the type of prism used.
- the apex angle of the prism can be set according to the inclination of the rotation axis with respect to the optical axis.
- the right angle prism 42 and the right angle prism 44 are such that the surface 42a is the diffraction grating incident surface of the diffraction grating 46.
- the force is not limited to this, and is not limited to this, for example, the diffraction grating shown in FIGS. 15 (a) and 15 (b).
- the surface 42b of the right-angle prism 42 faces the diffraction grating entrance surface 46a of the diffraction grating 46
- the surface 44b of the right-angle prism 44 faces the diffraction grating exit surface 46b.
- the top of the isosceles triangular prism 62 shown in FIG. 12 is better than the arrangement shown in FIGS. 9 (a) and 9 (b).
- the arrangement is symmetric with the case where the angle is divided in half so as to bisect the angle, and aberrations can be further canceled.
- FIGS. 14 (a) and 14 (b) described above are the cases of the minimum declination angle in which the incident angle and the outgoing angle of the prism are equally arranged, and the angle of the outgoing light with respect to the incident light is maximized.
- Figs. 14 (a) and (b) are similar to the arrangements in Figs. 9 (a) and (b). Therefore, in the arrangement shown in Figs. 9 (a) and (b), Fig. 15 (a) The angle of the outgoing light with respect to the incident light is larger than in the arrangement shown in (b).
- the size of the volume 'phase' hologram, which is a diffraction grating is a) (b) is the largest, and then FIGS. 15 (a) and (b) and FIGS. 14 (a) and (b) are the smallest.
- the size of the prism used is the largest in Figs. 9 (a) and (b), and then in Figs. 15 (a) and (b).
- Figures 14 (a) and 14 (b) are the smallest.
- the surface 12b of the right-angle prism 12 faces the diffraction-grating entrance surface 16a of the diffraction grating 16
- the surface 24b of the right-angle prism 24 is the diffraction grating 26.
- the arrangement of the rectangular prisms 12 and 24 may be changed so as to face the diffraction grating exit surface 26b.
- the size of the apex angle ⁇ of the isosceles triangular prism 32 is just twice the apex angle of the right angle prisms 12 and 24, and the apex angle ⁇ , and the aberration can be further reduced by changing the arrangement. .
- the right-angle prism 42 and the right-angle prism 44 are substantially perpendicular to each other.
- surface 42a and The right angle prism 42 and the right angle prism 44 may be disposed so that the surface 44a is positioned at an arbitrary angle (for example, 60 °).
- the right-angle prism 42 and the right-angle prism 44 can be arranged so that the face 42a and the face 44a are positioned substantially perpendicularly or at an arbitrary angle.
- the change is not limited to the fourth embodiment, but can be applied to the fifth and sixth embodiments as appropriate.
- the right-angle prisms 42 and 44 are disposed so that the surface 42a and the surface 44a are positioned at an arbitrary angle, and the surface 52a
- the right-angle prisms 52 and 54 may be arranged so that the surface 54a is positioned at an arbitrary angle.
- the right angle prisms 42 and 54 may be arranged so that the surface 42a and the surface 54a are positioned at an arbitrary angle. Good.
- the force used to use a volume 'phase' hologram as the diffraction grating 16, 26, 46, 56 is not limited to this.
- the grating may be arranged in a diffraction grating device according to the present invention.
- the diffraction grating disclosed in the international application PCTZJP2004Z008430 by the present applicant can be used.
- This diffraction grating is the same as that of the diffraction grating 76 shown in FIGS.
- the entire plate is formed into a plate-like body, a substantially rectangular diffraction grating entrance surface, a substantially rectangular diffraction grating exit surface facing the diffraction grating entrance surface, a diffraction grating entrance surface, and a diffraction grating exit. And a plurality of reflective surfaces formed between the surfaces.
- This diffraction grating 76 is a transmissive diffraction grating and is designed as a planar diffraction grating! Speak.
- each of the diffraction grating entrance surface and the diffraction grating exit surface substantially coincides with a plane extending along the XY plane located at different heights in the Z-axis direction.
- the light exit surfaces face each other in a substantially parallel manner with a predetermined distance.
- the reflecting surface is formed at predetermined intervals in the X-axis direction and substantially coincides with the plane extending along the Z-axis direction, and in the Y-axis direction of the diffraction grating entrance surface and the diffraction grating exit surface. It is extended over the entire length.
- the extending direction of the reflecting surface is substantially orthogonal to the extending direction of the diffraction grating entrance surface and the diffraction grating exit surface. Therefore, the diffraction grating 76 includes a plurality of reflection surfaces formed at equal intervals substantially perpendicular to the diffraction grating entrance surface and the diffraction grating exit surface.
- the diffraction grating 76 In the above-described configuration, in the diffraction grating 76, light is incident from the diffraction grating incident surface of the diffraction grating 76, and the light incident on the diffraction grating 76 passes through the diffraction grating 76, so that the diffraction grating exit surface force is increased. Emitted.
- the refractive index of the diffraction grating 76 is ⁇ n '' and the diffraction order is ⁇ m ''.
- the wavelength is “e”
- the grating interval is “d”
- the angle formed by the incident light from the diffraction grating incident surface 10a, that is, the light incident on the reflecting surface 10c and the reflecting surface 10c is “ ⁇ ”.
- the angle ⁇ formed by the light incident on the reflecting surface and the reflecting surface is determined by the reflecting surface.
- the grating interval d indicates the interval between grooves formed in the diffraction grating in the conventional diffraction grating. However, in the diffraction grating 76 according to the present invention, no groove is formed. This shows the interval between the reflection surfaces formed on the surface.
- equation (1) is expressed by the same equation as the Bragg diffraction equation, and ⁇ is the Bragg angle.
- the thickness of the reflecting surface (the length of the reflecting surface along the X-axis direction of the coordinate system shown in FIG. 17 (a)) is “w”, and the height of the reflecting surface (see FIG. 17 (a) of the reflecting surface).
- the length along the Z-axis direction of the coordinate system shown) is ⁇ t ''.
- the following formula (3) is referred to as the aspect ratio of the diffraction grating 76.
- the light beam incident from the diffraction grating entrance surface of the diffraction grating 76 and reflected by the reflection surface spreads with a diffraction distribution defined by the wavelength ⁇ and the grating interval d.
- high-order diffracted light when used, it has the highest diffraction efficiency and has the highest diffraction efficiency for a light beam of each order wavelength that satisfies the interference condition in the direction of regular reflection with respect to the reflecting surface.
- the luminous flux with wavelengths before and after the efficiency wavelength shows an efficiency proportional to the diffraction intensity distribution in the direction that satisfies the interference condition. Therefore, according to this diffraction grating 76, it is possible to realize high diffraction efficiency with high dispersion, and it is possible to increase diffraction efficiency even with a high order such as high-order diffracted light. It is suitable for use in a lattice device.
- Each diffraction grating device of the above-described embodiment is suitable for use in various devices.
- a diffraction grating device 10 (see FIG. 2) according to the present invention can be incorporated in a laser resonator as a wavelength tunable device as shown in FIG. 18 in place of the birefringence filter 500.
- the diffraction grating device according to the present invention disposed in such a laser resonator is not limited to the diffraction grating device 10 of the first embodiment.
- slits are disposed before and after the diffraction grating device, and the beam diameter of the laser beam is adjusted to adjust the dispersion according to the performance of the etalon.
- the reflective SR diffraction grating and the transmission SR diffraction grating can achieve high efficiency.
- the diffraction grating device according to the present invention is a reflection type / transmission type, which is extremely efficient, and is a ring type resonator that is difficult to achieve with a conventional reflective SR type diffraction grating.
- the present invention can be used in a wide variety of apparatuses such as microscopes, telescopes, various observation apparatuses, various spectroscopic analyzers, manufacturing apparatuses for chemical products, and quality control apparatuses.
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- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
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- Diffracting Gratings Or Hologram Optical Elements (AREA)
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Abstract
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JP2004372061A JP4727981B2 (ja) | 2004-12-22 | 2004-12-22 | 回折格子装置 |
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JP2013070029A (ja) * | 2011-09-08 | 2013-04-18 | Gigaphoton Inc | マスタオシレータシステムおよびレーザ装置 |
US8530824B2 (en) | 2010-06-09 | 2013-09-10 | Olympus Corporation | Scanning microscope |
US11313723B2 (en) * | 2020-03-05 | 2022-04-26 | Electronics And Telecommunications Research Institute | Hyperspectral sensor |
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TWI425203B (zh) * | 2008-09-03 | 2014-02-01 | Univ Nat Central | 高頻譜掃描裝置及其方法 |
RU2584182C1 (ru) * | 2014-11-05 | 2016-05-20 | федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) | Акустооптический измеритель параметров радиосигналов с повышенным разрешением |
WO2018176274A1 (en) | 2017-03-29 | 2018-10-04 | SZ DJI Technology Co., Ltd. | A lidar sensor system with small form factor |
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JP2002014209A (ja) * | 2000-06-29 | 2002-01-18 | Inst Of Physical & Chemical Res | グリズム |
JP2004013080A (ja) * | 2002-06-11 | 2004-01-15 | Inst Of Physical & Chemical Res | グリズム |
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JP3151770B2 (ja) * | 1993-03-26 | 2001-04-03 | キヤノン株式会社 | 複眼式画像表示装置 |
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JP2002014209A (ja) * | 2000-06-29 | 2002-01-18 | Inst Of Physical & Chemical Res | グリズム |
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Cited By (3)
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US8530824B2 (en) | 2010-06-09 | 2013-09-10 | Olympus Corporation | Scanning microscope |
JP2013070029A (ja) * | 2011-09-08 | 2013-04-18 | Gigaphoton Inc | マスタオシレータシステムおよびレーザ装置 |
US11313723B2 (en) * | 2020-03-05 | 2022-04-26 | Electronics And Telecommunications Research Institute | Hyperspectral sensor |
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