WO2006060360A3 - Module de retrecissement de ligne - Google Patents
Module de retrecissement de ligne Download PDFInfo
- Publication number
- WO2006060360A3 WO2006060360A3 PCT/US2005/043056 US2005043056W WO2006060360A3 WO 2006060360 A3 WO2006060360 A3 WO 2006060360A3 US 2005043056 W US2005043056 W US 2005043056W WO 2006060360 A3 WO2006060360 A3 WO 2006060360A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- center wavelength
- laser light
- dispersive
- wavelength selection
- light pulse
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
- H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70041—Production of exposure light, i.e. light sources by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08059—Constructional details of the reflector, e.g. shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
- H01S3/2251—ArF, i.e. argon fluoride is comprised for lasing around 193 nm
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007544429A JP5030786B2 (ja) | 2004-11-30 | 2005-11-28 | 線狭帯域化モジュール |
EP13179720.1A EP2665141B1 (fr) | 2004-11-30 | 2005-11-28 | Module de rétrécissement de ligne |
KR1020077012317A KR101147316B1 (ko) | 2004-11-30 | 2005-11-28 | 라인 내로우잉 모듈 |
KR1020127002413A KR101235047B1 (ko) | 2004-11-30 | 2005-11-28 | 라인 내로우잉 모듈 |
EP05826233.8A EP1831974B1 (fr) | 2004-11-30 | 2005-11-28 | Module de retrecissement de ligne |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/000,684 | 2004-11-30 | ||
US11/000,684 US7366219B2 (en) | 2004-11-30 | 2004-11-30 | Line narrowing module |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006060360A2 WO2006060360A2 (fr) | 2006-06-08 |
WO2006060360A3 true WO2006060360A3 (fr) | 2006-10-26 |
Family
ID=36565613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/043056 WO2006060360A2 (fr) | 2004-11-30 | 2005-11-28 | Module de retrecissement de ligne |
Country Status (6)
Country | Link |
---|---|
US (4) | US7366219B2 (fr) |
EP (2) | EP2665141B1 (fr) |
JP (1) | JP5030786B2 (fr) |
KR (2) | KR101235047B1 (fr) |
TW (1) | TWI281296B (fr) |
WO (1) | WO2006060360A2 (fr) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8379687B2 (en) * | 2005-06-30 | 2013-02-19 | Cymer, Inc. | Gas discharge laser line narrowing module |
US8259764B2 (en) * | 2006-06-21 | 2012-09-04 | Cymer, Inc. | Bandwidth control device |
US7659529B2 (en) * | 2007-04-13 | 2010-02-09 | Cymer, Inc. | Method and apparatus for vibration reduction in laser system line narrowing unit wavelength selection optical element |
US8144739B2 (en) * | 2008-10-24 | 2012-03-27 | Cymer, Inc. | System method and apparatus for selecting and controlling light source bandwidth |
USRE45957E1 (en) | 2009-03-27 | 2016-03-29 | Cymer, Llc | Regenerative ring resonator |
US8014432B2 (en) * | 2009-03-27 | 2011-09-06 | Cymer, Inc. | Regenerative ring resonator |
US8520186B2 (en) * | 2009-08-25 | 2013-08-27 | Cymer, Llc | Active spectral control of optical source |
US8254420B2 (en) * | 2009-11-18 | 2012-08-28 | Cymer, Inc. | Advanced laser wavelength control |
US8837536B2 (en) | 2010-04-07 | 2014-09-16 | Cymer, Llc | Method and apparatus for controlling light bandwidth |
JP2013070029A (ja) * | 2011-09-08 | 2013-04-18 | Gigaphoton Inc | マスタオシレータシステムおよびレーザ装置 |
US9207119B2 (en) | 2012-04-27 | 2015-12-08 | Cymer, Llc | Active spectral control during spectrum synthesis |
CN103091860B (zh) | 2012-12-28 | 2014-12-17 | 中国科学院上海光学精密机械研究所 | 棱镜扩束器装调仪及装调方法 |
US9147995B2 (en) * | 2013-03-15 | 2015-09-29 | Daylight Solutions, Inc. | Rapidly tunable laser source assembly with long stroke grating mover |
US9715180B2 (en) | 2013-06-11 | 2017-07-25 | Cymer, Llc | Wafer-based light source parameter control |
US9599510B2 (en) | 2014-06-04 | 2017-03-21 | Cymer, Llc | Estimation of spectral feature of pulsed light beam |
WO2016075806A1 (fr) * | 2014-11-14 | 2016-05-19 | ギガフォトン株式会社 | Module à rétrécissement de bande, dispositif laser à rétrécissement de bande, et procédé de positionnement d'un module à rétrécissement de bande |
WO2016189722A1 (fr) | 2015-05-28 | 2016-12-01 | ギガフォトン株式会社 | Dispositif laser, et système optique de rétrécissement de bande |
US9785050B2 (en) | 2015-06-26 | 2017-10-10 | Cymer, Llc | Pulsed light beam spectral feature control |
CN105186277B (zh) * | 2015-07-16 | 2018-05-22 | 中国科学院光电研究院 | 一种光谱控制装置 |
US9835959B1 (en) | 2016-10-17 | 2017-12-05 | Cymer, Llc | Controlling for wafer stage vibration |
US10416471B2 (en) * | 2016-10-17 | 2019-09-17 | Cymer, Llc | Spectral feature control apparatus |
US9997888B2 (en) | 2016-10-17 | 2018-06-12 | Cymer, Llc | Control of a spectral feature of a pulsed light beam |
US9989866B2 (en) | 2016-10-17 | 2018-06-05 | Cymer, Llc | Wafer-based light source parameter control |
WO2018198215A1 (fr) * | 2017-04-26 | 2018-11-01 | ギガフォトン株式会社 | Module de rétrécissement de bande |
WO2018229854A1 (fr) | 2017-06-13 | 2018-12-20 | ギガフォトン株式会社 | Appareil laser et procédé de fabrication d'un élément optique |
US10585215B2 (en) | 2017-06-29 | 2020-03-10 | Cymer, Llc | Reducing optical damage on an optical element |
WO2020183644A1 (fr) * | 2019-03-13 | 2020-09-17 | ギガフォトン株式会社 | Dispositif laser et procédé de fabrication de dispositif électronique |
CN114868312A (zh) | 2019-12-20 | 2022-08-05 | 西默有限公司 | 用于减少准分子放电室窗口积尘的定向气体吹扫 |
WO2021133556A1 (fr) | 2019-12-23 | 2021-07-01 | Cymer, Llc | Métrologie pour améliorer l'alignement du laser duv |
WO2021133568A1 (fr) | 2019-12-23 | 2021-07-01 | Cymer, Llc | Filtre à lit tassé pour piégeage de poussière de fluorure métallique dans des chambres de décharge laser |
US11329722B2 (en) | 2020-03-27 | 2022-05-10 | Relative Dynamics Incorporated | Optical terminals |
CN115699482A (zh) * | 2020-06-09 | 2023-02-03 | 西默有限公司 | 用于控制中心波长的系统和方法 |
US20240006838A1 (en) | 2020-12-16 | 2024-01-04 | Cymer, Llc | Apparatus for and method of modulating a wavelength of an excimer laser as a function of its repetition frequency |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6028879A (en) * | 1997-06-04 | 2000-02-22 | Cymer, Inc. | Narrow band laser with etalon based output coupler |
US20030107317A1 (en) * | 2001-12-11 | 2003-06-12 | Honeywell International Inc. | Restricted getter |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2631554B2 (ja) * | 1989-05-23 | 1997-07-16 | 株式会社小松製作所 | レーザの波長制御装置 |
US5095492A (en) * | 1990-07-17 | 1992-03-10 | Cymer Laser Technologies | Spectral narrowing technique |
JPH05167163A (ja) * | 1991-12-12 | 1993-07-02 | Mitsubishi Electric Corp | 狭帯域化レーザ装置 |
US5898725A (en) * | 1997-01-21 | 1999-04-27 | Cymer, Inc. | Excimer laser with greater spectral bandwidth and beam stability |
US6128323A (en) * | 1997-04-23 | 2000-10-03 | Cymer, Inc. | Reliable modular production quality narrow-band high REP rate excimer laser |
US5852627A (en) * | 1997-09-10 | 1998-12-22 | Cymer, Inc. | Laser with line narrowing output coupler |
US6094448A (en) * | 1997-07-01 | 2000-07-25 | Cymer, Inc. | Grating assembly with bi-directional bandwidth control |
US6212217B1 (en) * | 1997-07-01 | 2001-04-03 | Cymer, Inc. | Smart laser with automated beam quality control |
US6192064B1 (en) * | 1997-07-01 | 2001-02-20 | Cymer, Inc. | Narrow band laser with fine wavelength control |
USRE38054E1 (en) * | 1997-07-18 | 2003-04-01 | Cymer, Inc. | Reliable, modular, production quality narrow-band high rep rate F2 laser |
US5978409A (en) * | 1998-09-28 | 1999-11-02 | Cymer, Inc. | Line narrowing apparatus with high transparency prism beam expander |
US6671294B2 (en) * | 1997-07-22 | 2003-12-30 | Cymer, Inc. | Laser spectral engineering for lithographic process |
US6529531B1 (en) * | 1997-07-22 | 2003-03-04 | Cymer, Inc. | Fast wavelength correction technique for a laser |
US6721340B1 (en) * | 1997-07-22 | 2004-04-13 | Cymer, Inc. | Bandwidth control technique for a laser |
US6853653B2 (en) * | 1997-07-22 | 2005-02-08 | Cymer, Inc. | Laser spectral engineering for lithographic process |
US6393037B1 (en) * | 1999-02-03 | 2002-05-21 | Lambda Physik Ag | Wavelength selector for laser with adjustable angular dispersion |
US6163559A (en) * | 1998-06-22 | 2000-12-19 | Cymer, Inc. | Beam expander for ultraviolet lasers |
US6493374B1 (en) * | 1999-09-03 | 2002-12-10 | Cymer, Inc. | Smart laser with fast deformable grating |
US6243406B1 (en) * | 1999-03-12 | 2001-06-05 | Peter Heist | Gas performance control system for gas discharge lasers |
US6496528B2 (en) * | 1999-09-03 | 2002-12-17 | Cymer, Inc. | Line narrowing unit with flexural grating mount |
US6532247B2 (en) * | 2000-02-09 | 2003-03-11 | Cymer, Inc. | Laser wavelength control unit with piezoelectric driver |
EP1240694B1 (fr) * | 1999-12-22 | 2006-11-22 | Cymer, Inc. | Laser a raie retrecie avec dilatation bidirectionnelle de faisceau |
US7075963B2 (en) * | 2000-01-27 | 2006-07-11 | Lambda Physik Ag | Tunable laser with stabilized grating |
US6650666B2 (en) * | 2000-02-09 | 2003-11-18 | Cymer, Inc. | Laser wavelength control unit with piezoelectric driver |
US6856638B2 (en) * | 2000-10-23 | 2005-02-15 | Lambda Physik Ag | Resonator arrangement for bandwidth control |
US6760358B1 (en) * | 2001-06-07 | 2004-07-06 | Lambda Physik Ag | Line-narrowing optics module having improved mechanical performance |
KR20030036254A (ko) * | 2001-06-13 | 2003-05-09 | 가부시키가이샤 니콘 | 주사노광방법 및 주사형 노광장치 그리고 디바이스 제조방법 |
DE60216158T2 (de) * | 2002-08-30 | 2007-02-22 | Agilent Technologies, Inc., Palo Alto | Bezüglich wellenlänge abstimmbarer resonator mit einem prisma |
-
2004
- 2004-11-30 US US11/000,684 patent/US7366219B2/en active Active
-
2005
- 2005-11-25 TW TW094141498A patent/TWI281296B/zh active
- 2005-11-28 EP EP13179720.1A patent/EP2665141B1/fr active Active
- 2005-11-28 KR KR1020127002413A patent/KR101235047B1/ko active IP Right Grant
- 2005-11-28 JP JP2007544429A patent/JP5030786B2/ja active Active
- 2005-11-28 WO PCT/US2005/043056 patent/WO2006060360A2/fr active Application Filing
- 2005-11-28 KR KR1020077012317A patent/KR101147316B1/ko active IP Right Grant
- 2005-11-28 EP EP05826233.8A patent/EP1831974B1/fr active Active
-
2008
- 2008-02-28 US US12/074,079 patent/US7653112B2/en active Active
-
2009
- 2009-12-14 US US12/653,584 patent/US20100097704A1/en not_active Abandoned
-
2011
- 2011-04-14 US US13/086,858 patent/US8126027B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6028879A (en) * | 1997-06-04 | 2000-02-22 | Cymer, Inc. | Narrow band laser with etalon based output coupler |
US20030107317A1 (en) * | 2001-12-11 | 2003-06-12 | Honeywell International Inc. | Restricted getter |
Also Published As
Publication number | Publication date |
---|---|
US20110194580A1 (en) | 2011-08-11 |
JP2008522439A (ja) | 2008-06-26 |
EP1831974A4 (fr) | 2010-11-24 |
KR20120025004A (ko) | 2012-03-14 |
JP5030786B2 (ja) | 2012-09-19 |
US20100097704A1 (en) | 2010-04-22 |
EP2665141B1 (fr) | 2019-04-03 |
KR20070084624A (ko) | 2007-08-24 |
KR101147316B1 (ko) | 2012-05-18 |
US20060114957A1 (en) | 2006-06-01 |
US7653112B2 (en) | 2010-01-26 |
US8126027B2 (en) | 2012-02-28 |
WO2006060360A2 (fr) | 2006-06-08 |
TW200627736A (en) | 2006-08-01 |
TWI281296B (en) | 2007-05-11 |
KR101235047B1 (ko) | 2013-02-21 |
US7366219B2 (en) | 2008-04-29 |
EP1831974A2 (fr) | 2007-09-12 |
EP1831974B1 (fr) | 2017-02-08 |
EP2665141A1 (fr) | 2013-11-20 |
US20080151944A1 (en) | 2008-06-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2006060360A3 (fr) | Module de retrecissement de ligne | |
TW200601732A (en) | Laser output beam wavefront splitter for bandwidth spectrum control | |
TW200520334A (en) | Relax gas discharge laser lithography light source | |
JP2008522439A5 (fr) | ||
US6389045B1 (en) | Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers | |
US5329398A (en) | Single grating laser pulse stretcher and compressor | |
US20060050750A1 (en) | Hyper dispersion pulse compressor for chirped pulse amplification systems | |
WO2006012062A3 (fr) | Procede et dispositif de reduction de coherence pour la lumiere emise par un laser a decharge gazeuse | |
WO2006060361A3 (fr) | Procede et dispositif de commande de largeur de bande et de longueur d'onde centrale dans un systeme laser a decharge gazeuse | |
CA2468723A1 (fr) | Procede et appareil permettant d'accelerer la vitesse d'enlevement de matiere lors d'un usinage au laser | |
AUPR301401A0 (en) | Lidar system and method | |
WO2004031741A3 (fr) | Systeme d'eclairage pour inspection optique | |
WO2007035667A3 (fr) | Compresseur d'impulsions ultracourtes | |
WO2006058754A3 (fr) | Systeme d'exposition par projection, systeme de distribution de faisceau et procede de generation d'un faisceau de lumiere | |
US20120187860A1 (en) | Circuit assembly for controlling an optical system to generate optical pulses and pulse bursts | |
WO2006116477A3 (fr) | Melangeur de faisceaux a longueurs d'ondes multiples | |
KR20190087468A (ko) | 재료 가공 레이저 시스템 및 방법 | |
EP3046720A2 (fr) | Perçage d'un trou d'interconnexion dans une carte de circuit imprimé au moyen d'un laser au monoxyde de carbone | |
EP1480358A4 (fr) | Module de transmission optique a reglage numerique, et procede de reglage | |
US8798108B2 (en) | Device for generating a short duration laser pulse | |
WO2020074827A3 (fr) | Systeme et procede de compression d'impulsions lumineuses breves ou ultrabreves et systeme laser a impulsions lumineuses associe | |
CN100504566C (zh) | 一种啁啾脉冲压缩方法及装置 | |
US9374883B2 (en) | Plasma light source apparatus and plasma light generating method | |
WO2005001399A3 (fr) | Procede et appareil servant a mesurer la largeur de bande d'un spectre optique emis par un laser de forte puissance a largeur de bande tres etroite et a tres petite longueur d'onde | |
CN210281096U (zh) | 用于晶圆划片的双光路激光加工装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KN KP KR KZ LC LK LR LS LT LU LV LY MA MD MG MK MN MW MX MZ NA NG NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU LV MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2007544429 Country of ref document: JP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020077012317 Country of ref document: KR |
|
REEP | Request for entry into the european phase |
Ref document number: 2005826233 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2005826233 Country of ref document: EP |
|
WWP | Wipo information: published in national office |
Ref document number: 2005826233 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020127002413 Country of ref document: KR |