WO2006040913A1

WO2006040913A1 - Linear motor cooling device

Info

Publication number: WO2006040913A1
Application number: PCT/JP2005/017366
Authority: WO
Inventors: Keiji Nagasaka; Jianming Ye; Takayoshi Kawai
Original assignee: Fuji Machine Mfg. Co., Ltd.
Priority date: 2004-10-14
Filing date: 2005-09-21
Publication date: 2006-04-20
Also published as: CN101036280B; JP5401532B2; JP4963966B2; JP2012044867A; CN101036280A; JPWO2006040913A1

Abstract

Cooling performance of a device for cooling a linear motor in which a movable section has a coil is improved. A circular tube-like coil (32) is covered with a heat collection section (66) of each of two heat radiation plates (64) and with a resin mold (40). Heat radiation sections (68) that are extended from the heat collection sections (66) in the direction departing away from the center line of the coil (32) are projected to the outside of the resin mold section (40). Fins (78) are arranged on both upper and lower surfaces (80, 82) of projection sections (74). A duct (86) is stationarily provided along a stator (14) so as to cover a movement space for the heat radiation sections (68) and the fins (78), and fans are arranged on both end sections of the duct (86). Heat generated in the coil (32) while a moving element (16) moves is collected by the heat collection sections (66) and radiated from the heat radiation sections (68) and the fins (78). Transmission of heat to peripheral members is prevented by the duct (86), the fins (78) are cooled by cooling wind produced in the duct (86) by the fans, and high-temperature air in the duct (86) is forcibly discharged. The moving element may have a duct and a fan.

Description

Specification

Linear motor cooling device

Technical field

TECHNICAL FIELD [0001] The present invention relates to a linear motor cooling device, and more particularly to cooling of a linear motor having a movable part provided with a coil.

Background art

In a linear motor, a force that generates a moving thrust force that moves a movable part based on current supply to the coil causes the coil to generate heat, and the temperature of the movable part rises. For this reason, the linear motor described in Patent Document 1 below is provided with fins and fans in the movable part so as to be cooled. The movable part is formed of a coil and an electromagnetic steel plate formed in a rectangular parallelepiped shape by a resin mold, and a plurality of fins are provided in parallel to the moving direction of the movable part on the upper surface and the lower surface, respectively, and the fan is movable part. It is provided so as to be rotatable about an axis perpendicular to the moving direction of the air and blows air to the movable part. As a result, the heat generated in the coil is transmitted from the resin mold to the fins, dissipated, and the movable part is cooled. Moreover, a movable part is cooled by the ventilation of a fan.

Patent Document 1: Japanese Patent Laid-Open No. 2003-309963

Disclosure of the invention

Problems to be solved by the invention

[0003] However, the linear motor cooling device described in Patent Document 1 has a problem that cooling cannot be said to be sufficient. Since the fins are provided on the upper surface and the lower surface, which are the outer surfaces of the movable part, the heat of the coil is difficult to be transmitted and heat is not sufficiently dissipated. The present invention has been made against the background of the above circumstances, and an object of the present invention is to improve the cooling performance of an apparatus for cooling a linear motor having a movable part provided with a coil.

Means for solving the problem

[0004] The problem described above is that a linear motor cooling device including a linear fixed portion and a movable portion that includes a coil and is movable along the fixed portion is (A) a heat collecting unit close to the coil. And the heat collecting part to the outside of the movable part, and the heat collected by the heat collecting part is moved out of the movable part. It is solved by including a heat dissipating member having a heat dissipating part to be discharged, and (B) a fin provided in the heat dissipating part of the heat dissipating member extending in a direction parallel to the moving direction of the movable part. .

[0005] The above-described problem also includes a linear motor cooling device including a linear fixed portion and a movable portion that includes a coil and is movable along the fixed portion. (A) A heat collecting portion adjacent to the coil And a heat dissipating member that extends from the heat collecting part to the outside of the movable part and releases the heat collected by the heat collecting part to the outside of the movable part, and (b) along the fixed part It is also solved by including a duct that extends and covers a space in which the heat dissipating part moves as the movable part moves, and (c) a ventilation device that ventilates the air in the duct.

The invention's effect

[0006] "Outside of the movable part" means not only outside the coil but also outside the coil protection member when the coil is covered with a coil protection member such as a resin mold. For example, the heat release part may extend along the outer surface of the movable part, or may be extended away from the movable part.

As the heat radiating member, for example, a member made of a material having a high thermal conductivity is used. For example, a member made of a metal material having a high thermal conductivity can be a heat pipe.

In a linear motor cooling device including a heat radiating member and fins, most of the heat generated by supplying current to the coil is collected by a heat collecting part close to the coil and released to the outside of the movable part by the heat radiating part. The The heat transferred to the heat radiating part is also released from the fins, and the heat radiating area is large enough to radiate heat, effectively cooling the movable part. The fin is provided in a state extending in a direction parallel to the moving direction of the movable part, and resistance to movement of the movable part is not given as in the case where the fin is provided in a direction intersecting with the moving direction of the movable part. As for the combing force, the fin force heat is effectively deprived by the air flow around the movable part generated by the movement of the movable part, so that the cooling is performed better.

In addition, since the cooling is sufficiently performed, the supply current to the coil can be increased while suppressing the temperature rise of the moving part, the thrust can be increased, and the distortion caused by the thermal expansion of the member driven by the linear motor The necessary thrust can be obtained for the linear motor while suppressing control and ensuring the control accuracy, and the volume force can be reduced. In a linear motor cooling device including a heat radiating member, a duct and a ventilation device, the ventilation device may be an air pushing device for pushing air into the duct or an air suction device for sucking air in the duct, or both. However, it is desirable to install at least an air suction device from the viewpoint of avoiding the warm air in the duct from leaking outside through the gap in the duct wall. For example, a compressor, a blower, or a fan can be used as an air pushing device. For example, a vacuum pump, an aspirator (which uses a liquid or a gas as a fluid), a blower, or the like can be used as an air suction device. , Fan can be used.

In this linear motor cooling device, the movable part is sufficiently cooled by the heat collection and heat radiation action of the heat radiating member, and the air force around the heat radiating part warmed by heat radiation is diffused around the linear motor, Raising the temperature of the member is prevented by the duct. Also, the air inside the duct is ventilated by a ventilator, and air is also taken into the duct external force, and the air heated by heat radiation passes through the duct, outside the machine where the linear motor is installed, and the machine If the work environment is bad, such as where it is far away from the machine, the machine will not be affected, and hot air will be discharged. The thermal deformation etc. can be suppressed. Furthermore, when the air in the duct is ventilated by the ventilator, the effect of cooling the heat radiating portion by the flow of air generated in the duct is also obtained.

Furthermore, since the duct and the ventilation device are provided on the fixed part side, the movable part can be lightened compared to the case where it is provided on the movable part, and the vibration during addition and deceleration of the movable part can be reduced. It is done. In addition, the thrust for moving the movable part can be small, the current supplied to the coil can be reduced, and the power consumption and heat generation can be reduced. Combined with the small size of the linear motor due to improved cooling performance, the linear motor can be made smaller and cheaper.

Note that the duct covers the space where the heat radiating part moves, but the part corresponding to the part between the part of the heat radiating part that moves inside the duct and the part that moves outside the duct is vacated, allowing the movement of the heat radiating part. To be done. The duct has an opening that opens to the outside in the entire moving direction of the heat radiating portion, but this opening is not closed except when passing through the heat radiating portion. For example, a shielding member that can be opened and closed is provided outside the door, and when the heat dissipating part is passed, the opening is opened to allow the heat dissipating part to move. Hope to prevent leakage.

Aspects of the Invention

[0008] In the following, the invention recognized as being claimable in the present application (hereinafter referred to as “claimable invention”. The claimable invention is at least the invention described in the claims. This invention includes "the present invention" or "the invention of the present application, but may include a subordinate concept invention of the present invention, a superordinate concept of the present invention, or an invention of another concept"). To do. Like the claims, each aspect is divided into sections, each section is given a number, and the other sections are numbered as necessary. This is for the purpose of facilitating understanding of the claimable invention, and is not intended to limit the combination of the constituent elements constituting the claimable invention to those described in the following sections. In other words, the claimable invention should be construed in consideration of the description accompanying each section, the description of examples, etc., and as long as the interpretation is followed, other components are added to the mode of each section. Aspects and aspects in which constituent elements are deleted from the aspects of each section can also be an aspect of the claimable invention.

[0009] In each of the following paragraphs, (1) corresponds to claim 1, (2) corresponds to claim 2, (3) claims to claim 3, and (6) claims. In claim 4, claim (7) is claimed in claim 5, claim (8) and (9) are combined in claim 6, claim (12) is claimed in claim 7, claim (14) is claimed In claim 8, (16) corresponds to claim 9, and (17) corresponds to claim 10.

[0010] (1) A linear motor cooling device including a linear fixed portion and a movable portion including a coil and movable along the fixed portion,

A heat-dissipating member having a heat-collecting part adjacent to the coil and a heat-collecting part force extending to the outside of the movable part, and a heat-dissipating part that releases heat collected by the heat-collecting part to the outside of the movable part; A fin provided on the heat dissipating part of the heat dissipating member extending in a direction parallel to the moving direction of the movable part;

Including linear motor cooling device.

The linear motor has a movable part in a cylindrical shape and is placed in a state surrounding the fixed part. The movable part may be a flat plate type linear motor that moves along the fixed part and is arranged so as to face the fixed part. In addition, a linear motor including a linear fixed part and a movable part having a coil and movable along the fixed part may be claimed as a linear synchronous motor, a linear induction motor, a linear stepping motor. It can be applied to various linear motor cooling devices such as linear DC motors. The same applies to the linear motor cooling device described in item (14).

(2) The movable part includes a resin mold that covers the outside of the coil, the heat collecting part of the heat radiating member is disposed between the coil and the resin mold, and the heat radiating part is a resin resin. The linear motor cooling device according to the item (1), which is extended to the outside through a part of the mold. The coil is not filled even if the gap between the wires is filled with grease. It may be. In the former case, it is desirable that the heat collecting portion is disposed in close contact with the surface of the filled resin, and in the latter case, the heat collecting portion is disposed in close contact with the outer surface of the coil. When the resin is filled in the gaps between the coil wires, heat transfer from the inner periphery to the outer periphery of the coil is promoted because the heat conductivity is higher than that of air. If the linear motor is a coreless linear motor that does not hold the coil by the core and does not have a core, the heat collecting part is placed on the surface of the filled resin! The If the linear motor is a motor with a core in which the coil is held by the core and has a core, the heat collecting part cannot be brought into close contact with the surface of the filling resin or the outer surface of the coil. What is necessary is just to adhere | attach to a core directly.

The coil is covered and protected by a resin mold, but the heat collecting part is directly in contact with the coil without going through the resin mold, or is directly in contact (in the gap between the wires). It can be dissipated from the heat-dissipating part by being sufficiently heated and disposed close to the coil through the core. In the case of the resin mold, the heat collected by the heat radiating member is lower than that of the heat radiating member, so that the heat transferred to the resin mold is effectively released outside the movable part.

(3) The linear motor according to (1) or (2), wherein the coil has a cylindrical shape and the heat collecting portion is disposed in a state of covering 80% or more of the outer periphery of the cylindrical coil. Cooling system. The heat dissipating member can collect almost the entire force of the coil and release it to the outside. When the coil has a cylindrical shape and a stator is arranged on the inner circumference side to form a magnetic field, the entire outer circumference of the coil can be covered by the heat collecting part without interrupting the magnetic circuit, and the heat collecting part can be covered. Can be carried out effectively.

For example, the coil may have a cylindrical shape, or a polygonal shape such as a rectangle having a cross section perpendicular to the center line, such as a rectangle or a square such as a square.

(4) The linear motor cooling device according to (3), wherein the heat radiating portion extends in opposite directions with respect to two position forces that are substantially symmetrical with respect to the center line of the cylindrical coil.

The heat collected from almost the entire coil is released to both sides of the coil, and the heat is uniformly and effectively discharged.

The “substantially symmetrical” includes a case where two positions are symmetric and a case where it can be said to be symmetric even if the position is slightly deviated from the symmetry.

(5) Heat radiating member force A semi-cylindrical heat collecting part covering almost half of the cylindrical coil in the circumferential direction, and one end force of the heat collecting part. Cylindrical coil center line force. The linear motor cooling device according to the item (4), including two heat radiating plates each having a heat radiating portion that is provided, the heat radiating portions extending in opposite directions.

It becomes easy to form a heat radiating member having a heat collecting part and a heat radiating part from a plate material and attach it to a cylindrical coil.

(6) The heat dissipating part is projected in a cantilevered manner from the outer surface of the movable part, and the fin is provided on the projecting part. (1) None (5) Linear motor cooling device.

The heat dissipating part can be extended along the outer side surface of the movable part. The fins can be provided on both sides of the projecting part if the heat radiating part protrudes in a cantilevered manner from the outer side surface. Further, as described in the next section, if fins are provided in the portions other than the base end of the protrusion, the space in which the heat radiating portion and the fin move can be covered almost completely by the duct.

(7) The fin is provided in a portion excluding the base end portion of the projecting portion, and the outside of the cover that covers the fin and the portion excluding the base end portion of the heat radiating portion extends along the fixed portion, and the movable portion As the heat sink moves, the heat dissipating part and the fins are provided stationary so as to cover the space in which they move. The linear motor cooling device according to item (6).

Fin force The air heated by the released heat is diffused to the surroundings and the temperature of the peripheral members and equipment is prevented by the duct. The duct is provided stationary so as to cover the space in which the heat dissipating part moves, and the effect of preventing the heated air from spreading over the entire moving area of the moving part can be obtained. Also, the relative movement between the fins and the surrounding air that occurs as the movable part moves is secured by the duct, so that the fins are reliably cooled.

(8) Includes a fan that is supported by the movable part and moves together with the movable part to generate cooling air in the direction along the fins. (1) None (6) The linear motor cooling device described.

The fins are cooled by the relative movement of the air generated by the movement of the movable part, and are also cooled by the wind that is forcibly generated by the fan, so that sufficient heat dissipation is achieved.

(9) The fin includes a first fin and a second fin extending from an intermediate portion in the moving direction of the movable portion toward each of both ends, and the fan includes the first fin and the second fin. (2) The linear motor cooling device according to item (8), including a first fan and a second fan provided for each of the fins.

With the first and second fans, the cooling air can be generated in each of the first and second fins in a direction parallel to the moving direction of the movable part and in a forward or reverse direction. If the fin includes the first and second fins, a space is provided between the first fin and the second fin, which can be used as an air intake or exhaust port. The cooling can be performed in various modes based on the air blowing.

(10) The linear motor cooling device according to (9), wherein the first fan and the second fan are provided in proximity to an end of the first fin and the second fin on the intermediate portion side.

(11) The linear fan according to (9), wherein the first fan and the second fan are provided close to an end of the first fin and the second fin opposite to the intermediate portion side. Motor cooling device

(12) The first fan and the second fan generate cooling air that flows toward the intermediate portion, and the cooling air that flows from the first fan side to the intermediate portion and the second air flow in the intermediate portion. The cooling air flowing from the fan side to the middle part is designed to flow away from the moving part force. The linear motor cooling device according to any one of (9) and (11), wherein an internal air guide member is provided.

The cooling air generated by the first and second fans is forced to flow toward the intermediate part in the moving direction of the movable part. Thus, it is possible to avoid a decrease in the flow velocity in the vicinity of the intermediate portion due to collision in the intermediate portion.

(13) Includes a duct that covers the fin and extends in parallel with the moving direction of the movable part (1) No !, (6) and (8) No, or (12) The linear motor cooling device described. The duct moves with the moving part, and the wind generated by the movement of the moving part flows along the fins to promote cooling.

Further, in a linear motor cooling device equipped with a fan, cooling air is generated in the duct by the fan, and the fins are surely exposed to the cooling air so that cooling is performed efficiently.

(14) A linear motor cooling device including a linear fixed portion and a movable portion including a coil and movable along the fixed portion,

A heat-dissipating member comprising a heat-collecting part adjacent to the coil and its heat-collecting part force, extending to the outside of the movable part, and releasing the heat collected by the heat-collecting part to the outside of the movable part; A duct that extends along the fixed part and covers a space in which the heat dissipating part moves as the movable part moves;

A ventilator that ventilates the air in the duct;

Including linear motor cooling device.

(15) The linear motor cooling device according to (14), including fins provided in the heat radiating portion of the heat radiating member so as to extend in a direction parallel to a moving direction of the movable portion.

The heat generated in the coil is released from the heat radiating section, and the fin force is also released, so that the coil is cooled well.

(16) The linear motor cooling device according to (14) or (15), wherein the ventilation device includes a blower provided at least at one end in the longitudinal direction of the duct.

For example, a fan or a blower is used as the blower.

When a ventilation device is installed at one end in the longitudinal direction of the duct, the blower sends air to the duct. It is good also as an intake air blower which sucks air out of a duct as a feed air blower. When the blower is provided at both ends of the duct in the longitudinal direction, one is a feeding fan and the other is an intake fan, so that air in the duct is reliably ventilated.

(17) The ventilation device includes a connection duct connected to one end of the duct as a main duct, and a blower provided at the tip of the connection duct. (14) or (15) Linear motor cooling device.

It is possible to use a blower provided at the tip of the connection duct as a feed fan. If an intake blower is used, it is sufficient to provide a connection duct only at one end of the main duct. Air can be easily prevented from leaking to the surroundings. The blower provided at the tip of the connection duct can be provided in common for a plurality of heat generating parts. For example, in many cases, a single machine is provided with heat generating parts such as a plurality of electric motors (including linear motors). In that case, each machine is connected to the main dart provided on each of the heat generating parts. The ducts are connected and the connecting ducts are joined together, and a blower or other blower is provided downstream of the joining part. According to this aspect, it becomes easy to exhaust the warm air completely out of the machine.

A connection duct may be further connected and joined to the junction of at least one connection duct in each of the plurality of machines constituting the work line, and a blower may be provided downstream of the junction.

Further, for a plurality of work lines, a connection duct may be connected to and merged with the most downstream connection duct junction of each line, and a blower may be provided on the downstream side of the junction. Brief Description of Drawings

FIG. 1 is a front sectional view showing a linear motor cooling device and a linear motor that are embodiments of the claimable invention.

FIG. 2 is a plan view schematically showing the linear motor cooling device and the linear motor except for a table and the like that are moved by the linear motor.

FIG. 3 is a side view (partial cross section) showing a shielding curtain covering the opening of the duct of the linear motor cooling device together with the heat radiating portion of the heat radiating plate.

[Fig.4] An electronic circuit component mounting machine equipped with the above linear motor cooling device and linear motor. It is a top view shown roughly.

[5] FIG. 5 is a front view showing a Y-axis moving device of the electronic circuit component mounting machine.

6] A front sectional view showing a linear motor cooling device and a linear motor as another embodiment.

7 is a plan view schematically showing the linear motor cooling device and the linear motor shown in FIG. 6 except for a table and the like.

FIG. 8 is a side view schematically showing fins, fans and ducts of the linear motor cooling device shown in FIG. 6.

FIG. 9 is a plan view schematically showing a linear motor cooling device according to still another embodiment, excluding a tape and the like showing the linear motor.

FIG. 10 is a side view schematically showing fins, fans, ducts, etc. of the linear motor cooling device shown in FIG.

FIG. 11 is a plan view schematically showing a linear motor cooling device according to still another embodiment, excluding a tape and the like showing the linear motor.

FIG. 12 is a side view schematically showing fins, fans, ducts and the like of the linear motor cooling device shown in FIG. 11.

13] FIG. 13 is a plan view schematically showing a linear motor cooling device according to still another embodiment. 14] FIG. 14 is a plan view schematically showing a linear motor cooling device according to still another embodiment. Explanation of symbols

10: Linear motor cooling device 12: Linear motor 14: Stator 16: Mover 32: Coil 40: Grease mold 64: Heat sink 66: Heat collector 68: Heat sink 74: Projection 76: Base end 78: Fin 86: Duct 100: Fan 110: Linear motor cooling device 112: Heat sink 114: Heat collector 116: Heat sink 120: Projection 122: Base end 130, 132: Fin 136, 138: Duct 140, 142: Fan 160: Linear motor cooling device 164: Air guide plate 166: Heat sink plate 172: Heat sink 200: Linear motor cooling device 202, 204: Fan 220: Linear motor cooling device 222: Main duct 224: Connection duct 226: Blower 228: Ventilator 238: Main duct 240: Connection duct 242: Ventilator 260: Connection duct 262: Blower BEST MODE FOR CARRYING OUT THE INVENTION

[0013] Hereinafter, some embodiments of the claimable invention will be described in detail with reference to the drawings. In addition to the following examples, the claimable invention can be implemented in various modifications based on the knowledge of those skilled in the art, including the aspects described in the above [Aspect of the Invention] section. wear.

FIG. 1 shows a linear motor cooling device 10 and a linear motor 12 cooled by the linear motor cooling device 10 according to an embodiment of the claimable invention. The linear motor cooling device 10 and the linear motor 12 of the present embodiment are provided in an electronic circuit component mounting machine. The electronic circuit component mounting machine is a type of work machine, and is a type of anti-circuit board working machine that performs work on the circuit board, and mounts the electronic circuit component on the circuit board. A circuit board is a type of component mounting board, and a printed board is an example. For example, as schematically shown in FIGS. 4 and 5, the electronic circuit component mounting machine includes a component supply device 300 for supplying an electronic circuit component, a substrate holding device 302 for holding a circuit board, and a component supply device 300. A mounting head 306 as a working head that receives electronic circuit components and mounts them on the circuit board 304, a relative movement device 308 that relatively moves the component supply device 300, the substrate holding device 302, and the mounting head 306, and at least the substrate. A holding device 302, a mounting head 306, and a control device 310 that controls the relative movement device 308. The control device 310 is mainly composed of a computer, and the component supply device 300 and the like are provided on a bed 312 provided with a fixed position. The bed 312 constitutes the main body of the electronic circuit component mounting machine. In addition, the electronic circuit component mounting machine includes a mark imaging device that images a reference mark provided on the circuit board 304 and a component imaging device that images an electronic circuit component held by the mounting head 306.

For example, as described in Japanese Patent Application Laid-Open No. 6-291490, the relative movement device 308 includes a mounting head 306 parallel to the component mounting surface of the circuit board 304 held by the board holding device 302. A mounting head horizontal movement device 316 and a mounting head 306, which are mounting head parallel movement devices that move in the X axis direction and the horizontal axis direction, which are two directions orthogonal to each other in a horizontal plane as a plane, A mounting head lifting / lowering device 318 that is a mounting head orthogonal direction moving device that moves in a vertical direction (Z-axis direction) that is a direction orthogonal to the two directions. The relative movement device 308 is a component supply device in which the mounting head 306 is fixed in position. Then, the electronic circuit component is received from the component supply device 300 and moved to the substrate holding device 302, and the electronic circuit component is mounted on the circuit board 304 held by the substrate holding device 302.

The substrate holding device 302 is, for example, a device that supports the circuit board 304 carried by the substrate transfer device 320 with a downward force and clamps the edge portion. The mounting head horizontal movement device 316 includes an X-axis movement device 322 that moves the mounting head 306 in the X-axis direction, and a Y-axis movement device 324 that moves the mounting head 306 in the Y-axis direction. It is used as a drive source for the axis moving device 322 and the Y axis moving device 324, and moves the X axis moving member 326 and the Y axis moving member 328 in the X axis direction and the Y axis direction, respectively. The X-axis moving device 322 of the electronic circuit component mounting machine includes a pair of linear motors 12 as shown in FIG. 4, and these linear motors 12 are controlled in common by the control device 310 at the same time. Move. A linear motor cooling device 10 is provided for each of the two linear motors 12 of the X-axis moving device 322 and the one linear motor 12 of the Y-axis moving device 324. The electronic circuit component mounting machine also includes a head rotating device that rotates the electronic circuit components held by the component holder 330 by rotating the mounting head 306 about its axis. The head rotating device and the mounting head lifting / lowering device 318 are configured in the same manner as the device described in, for example, Japanese Patent Laid-Open No. 4-372199. Electronic circuit components are mounted on the circuit board 304 by mounting devices including the mounting head 306, the relative movement device 308, and the rotating device. Each of the linear motor 12 and the linear motor cooling device 10 of the X-axis moving device 322 and the Y-axis moving device 324 has the same configuration, and hereinafter, a pair of the linear motor 12 and the linear motor of the X-axis moving device 322 respectively. Each one of the cooling devices 10 will be taken out and will be described representatively with reference to FIGS.

[0017] The linear motor 12 is a cylindrical linear motor in this embodiment, and is a three-phase coreless linear motor. As shown in FIG. 1, the stator 14 as a fixed portion and the mover as a movable portion. The table 18 as a moving member that is a driven member is moved along a preset route. The table 18 is provided with the X-axis moving member 326. In this embodiment, the stator 14 includes a plurality of permanent magnets 22 and a rod 24 as a magnet holding member made of a magnetic material. Rod 24 has a circular cross-sectional shape and is straight. Is made. Each of the plurality of permanent magnets 22 has, for example, a ring shape, the outer peripheral side being an N pole, the inner peripheral side being an S pole, the outer peripheral side being an S pole, and the inner peripheral side being an N pole A spacer (not shown) made of non-magnetic material is sandwiched between the adjacent permanent magnets 22 at the same pitch on the surface of the rod 24 so that the magnetic poles are alternately changed in the axial direction. It is provided in. The stator 14 has a length necessary for the movement of the mover 16, and is horizontally disposed on the base 26 with both ends in the axial direction supported by support members 28 (see FIG. 2). The base 26 is provided on the bed 312 and the stator 14 is provided such that the longitudinal direction thereof is parallel to the X-axis direction.

[0018] The mover 16 includes a plurality of coils 32 (only one is shown in FIG. 1). In these linear motors 12, these coils 32 are each wound into a cylindrical shape by winding the wire, and the gap 34 between the wires is filled with the resin 34, and the outer peripheral side is also covered with the resin. However, the ring-shaped spacers (not shown) made of a non-magnetic material are provided concentrically and integrally at equal intervals. The mover 16 is fitted on the outside of the stator 14 with a gap 36 in the radial direction, and is movable along the axial direction of the stator 14. It is covered and fixed to the rear surface of the table 18 or the lower surface which is the surface of the base 26 or the stator 14 side. The resin of the resin mold 40 is the same resin as the filled resin 34 in this embodiment.

The table 18 is guided on the base 26 by a linear guide 48 and is provided so as to be movable in a straight line in a direction parallel to the longitudinal direction of the stator 14. The linear guide 48 is composed of a guide rail 50 as a pair of guide members provided on the base 26 and a pair of sliders 52 which are provided on the table 18 and fitted to the guide rail 50 so as to be relatively movable. And rolling elements (for example, balls, not shown) that are held by the slider 52 in a circulatory manner. Further, a linear encoder 54 is provided so that the position of the table 18 in the moving direction or the position of the X-axis moving member 326 can be detected. The linear encoder 54 is a kind of position detection device.The linear scale 56 is provided on the base 26 in parallel with the moving direction of the table 18, and the movement detection is provided on the table 18 and is moved along the linear scale 56. And 58. The linear encoder 54 is provided for one of the two linear motors 12 in the X-axis moving device 322. About two linear motors 12 Each of the linear scales 56 may be provided, and the two linear motors 12 may be controlled based on the position detection result by the linear scales 56, and the movement of the X-axis moving member 326 may be controlled. The X-axis moving device may be a device including one linear motor and one linear motor cooling device.

[0020] The linear motor cooling device 10 will be described. The heat generated in the coil 32 by supplying current is dissipated by at least one heat sink 64 in this embodiment. Each of these heat sinks 64 is a kind of metal material having excellent heat conductivity in the present embodiment, and is made of a material having excellent heat dissipation characteristics per unit mass (heat dissipation Z mass), for example, an aluminum alloy. The heat collecting part 66 that forms a semi-cylindrical shape and covers almost half of the plurality of cylindrical coils 32, and the one end force of the heat collecting part 66 and the center line force of the coil 32 extend in a direction away from each other. And a plate-like heat radiation portion 68. Each heat collecting portion 66 of the two heat radiating plates 64 is covered with the resin mold 40 together with the plurality of coils 32 while being in close contact with the surface of the resin 34. The heat collecting part 66 is disposed between the plurality of coils 32 and the resin mold 40, and is provided in the state of being close to the coil 32 and being in direct contact with the two heat collecting parts. Portion 66 covers almost the entire outer periphery of coil 32. The filling of the resin 34 into the gap between the wires of the coil 32 and the molding of the coil 32 and the heat collecting part 66 by the resin may be performed simultaneously.

[0021] As shown in Fig. 1, each of the heat radiating portions 68 of the two heat radiating plates 64 is two portions separated from each other in the diameter direction of the coil 32, and two positions symmetrical to the center line of the coil 32. In the direction perpendicular to the plate surface of the table 18 or the moving plane of the table 18 or in the vertical direction that is the direction in which the table 18 and the base 26 are separated from each other, It extends in a direction parallel to the plate surface, horizontally and in a direction opposite to each other, and extends through the part of the resin mold 40 to the outside. The projecting end of the heat dissipating part 68 is free, and the heat dissipating part 68 is projected from the outer surface of the resin mold 40 (in this embodiment, the outer surface of the resin). It extends to the outside of the child 16. As shown in FIG. 3, both end portions of the heat dissipating portion 68 separated in the moving direction of the mover 16 are each provided with a guide portion 72 that is made thinner toward the end side. The tip of the guide 72 is rounded. The reason for providing the guide 72 will be explained later. A plurality of fins 78 are provided on a portion excluding the base end portion 76 of the protruding portion 74 protruding outside from the coil 32 of the heat radiating portion 68. In the present linear motor cooling device 10, the fin 78 is an aluminum alloy that is a kind of metal material having excellent heat transfer properties and a kind of metal material having excellent heat dissipation characteristics per unit mass, like the heat sink 64. A thin plate made of metal is bent into an uneven shape, and fins are formed on the upper surface 80, which is the surface on the table 18 side, which is the first surface of the protrusion 74, and the lower surface 82, which is the surface on the base 26 side, which is the second surface. A plurality of 78 are fixed in a state extending in a direction parallel to the moving direction of the mover 16!

[0023] As described above, the heat dissipating portions 68 of the two heat dissipating plates 64 have different vertical positions, and the fin 78 fixed to the upper surface 80 and the fin 78 fixed to the lower surface 82 are different. The height (projection length from the heat radiation part 68) is different. The fin 78 fixed to the upper surface 80 of the lower heat radiating part 68 and the fin 78 fixed to the lower surface 82 of the lower heat radiating part 68 have the same height in the vertical direction. The fins 78 fixed to the lower surface 82 of the heat dissipating part 68 and the fins 78 fixed to the upper surface 80 of the lower heat dissipating part 68 have the same height, and the latter is higher than the former. Yes. Therefore, for each of the two heat sinks 64, the distance from the tip of the fin 78 fixed to the upper surface 80 to the tip of the fin 78 fixed to the lower surface 82 is the same, and each upper surface 80 of the two heat sinks 64 The front end surface of the fixed fin 78 is positioned in the same horizontal plane, and the lower end surface 82 of the fixed fin 78 is positioned in the same horizontal plane. The fins may be formed integrally with the heat radiating plate 64.

The base 26 is provided with a pair of ducts 86 along the stator 14 as shown in FIG. Each of these ducts 86 is provided on both sides of the stator 14, and each of the two fins 64 has fins fixed to the portions excluding the base end portion 76 of the heat radiating portions 68 of the two heat radiating plates 64 and the upper surface 80 and the lower surface 82, respectively. 78, and is provided stationary in a state of covering the space in which the heat dissipating portion 68 and the fin 78 move as the mover 16 moves. The duct 86 is in the longitudinal direction, and both ends separated in the moving direction of the mover 16 are each formed in a tubular shape opened to the outside of the linear motor 12, as shown in FIGS. 1 and 3. On the side wall of the stator 14, an opening 88 is formed in a portion adjacent to the base end portion 76 of the projecting portion 74 and corresponding to the movement path of the portion where the fin 78 is not provided. Provided along the heat dissipation A portion excluding the base end portion 76 of the portion 68 and the fin 78 are allowed to move in the duct 86 in accordance with the movement of the mover 16 in a state where the fin 78 is covered with the duct 86. FIG. 2 is a diagram schematically showing the linear motor cooling device 10 and the linear motor 12, in which components such as the duct 86 are schematically illustrated. The upper wall of the duct 86 is omitted and the mover 16 is omitted. It is shown in a state where it can be seen.

As shown in FIG. 3, the opening 88 is closed by a shielding curtain 90 as a shielding member provided in the duct 86. The shielding curtain 90 is made of a flexible material, for example, a thin sheet made of synthetic resin, forms a belt-like shape, and has an opening 88 of the dust 86 on one side edge parallel to the longitudinal direction. It is fixed to the upper part of the opening and closes the entire opening 88. The other side edge of the shielding curtain 90 and its lower end are free, and the opening 88 can be opened.

[0026] As shown in FIG. 2, a fan 100 as a blower, which is a type of ventilation device, is provided in each longitudinal opening at both ends of the pair of ducts 86, respectively. In the present linear motor cooling device 10, the duct 86 and the fan 100 are provided on the stator 14 side. As shown in FIG. 2, these fans 100 are provided so as to be rotatable about an axis parallel to the longitudinal direction of the duct 86 and parallel to the moving direction of the mover 16. Each of the pair of ducts 86 is provided so as to cover the fixed fins 78 on the upper surface 80 and the lower surface 82 of the protrusion 74 of the heat sink 64, respectively, and the fan 100 is opposed to the fins 78 fixed to the upper surface 80. However, the wind is also applied to the fin 78 fixed to the lower surface 80.

Note that the Y-axis moving device 324 is provided on an X-axis moving member 326 as shown in FIG. In the Y-axis moving device 324, the linear motor 12 and the linear motor cooling device 10 are such that the plate surface or moving plane of the table 18 is vertical and is perpendicular to the component mounting surface of the circuit board 304 held by the board holding device 302. The heat radiating portion 68 of the heat radiating plate 64 is provided in a state of extending in the vertical (vertical) direction of the heat collecting portion 66 force. In the Y-axis moving device 324, the Y-axis moving member 328 constitutes the table 18, or the Y-axis moving member 328 is provided on the table 18. Further, the X-axis moving member 326 constitutes the base 26, or the base 26 force S is provided on the X-axis moving member 326. A pair of ducts 86 of the linear motor cooling device 10 that cools the linear motor 12 of the Y-axis moving device 324 are provided along the stator 14 provided in parallel in the Y-axis direction on the X-axis moving member 326. Yes. In the linear motor 12 configured as described above, the supply of the drive current to the coil 32 generates a moving magnetic field in the coil 32 and the field magnetic flux generated by the permanent magnet 22. Due to this interaction, axial movement thrust is generated, the mover 16 is moved in a direction parallel to the axis of the stator 14, and the table 18 is moved while being guided by the linear guide 48. At this time, the coil 32 generates heat, but the heat is collected by the heat collecting part 66 covering the coil 32 of the heat radiating plate 64, radiated from the heat radiating part 68 and the fin 78, and released to the outside of the mover 16.

[0029] At least when the mover 16 is moved, the fan 100 is rotated. At this time, as indicated by an arrow in FIG. 2, the fan 100 provided at one end portion in the longitudinal direction of the duct 86 is rotated so as to send air into the duct 86, and the fan provided at the other end portion. 100 is rotated so that the air in the duct 86 is sucked out, and a flow of air flowing in one direction in the longitudinal direction is generated in the duct 86. Although the mover 16 is reciprocated along the stator 14, in this embodiment, the direction of the air flow generated by the fan 100 related to the moving direction of the mover 16 is constant.

Both ends of the duct 86 are opened to the outside of the linear motor 12, and air is sent into the duct 86 from the outside of the linear motor 12 by one fan 100, and the other fan 100 Air force in the duct 86 The air is exhausted outside the duct 86 and out of the linear motor 12, and the air in the duct 86 is forcibly ventilated. The temperature of the air fed into the duct 86 is lower than the temperature of the fin 78. The fin 78 provided in a state extending in a direction parallel to the moving direction of the mover 16 is cooled by the fan 100 in the duct 86. Cooled well by wind. Since the heat dissipating section 68 and the fin 78 are covered with the duct 86, the heat dissipating section 68 and the fin 78 are surely positioned in the cooling air, and the cooling is surely performed. The air is exhausted outside the linear motor 12 without increasing the temperature of the peripheral members and equipment of the linear motor 12. The fins 78 are cooled by the relative movement of the air generated as the mover 16 moves, and are also cooled by the wind that is forcibly generated by the fan 100, so that the heat radiation is sufficiently performed. The relative movement of the air accompanying the movement of the mover 16 is secured by the duct 86, and the fins 78 are reliably cooled.

When the mover 16 moves, the heat dissipating unit 68 moves while turning up the shielding curtain 90. Above As shown in the figure, both ends of the heat dissipating section 68 separated in the moving direction of the mover 16 are provided with a plan interior 72, and the shielding curtain 90 can be easily turned up by the guide section 72. . After passing through the heat dissipating section 68, the shielding curtain 90 returns to the state in close contact with the duct 86 by the negative pressure generated by the air flow in the duct 86, and closes the opening 88. As a result, the opening 88 is kept almost entirely closed, and the air in the duct 86 is well avoided from leaking partial forces other than the openings at both ends in the longitudinal direction, and ventilation by air inflow and intake air is prevented. Done well.

[0032] Thus, the heat generated from the coil 32 is radiated well, and the linear motor 12 is cooled well. This linear motor 12 is a coreless linear motor. Compared to a linear motor with a core, the supply current required for obtaining the same torque is large and the heat generation is large, but it is cooled well. The two heat sinks 64 and the plurality of fins 78 provided on them are made of an aluminum alloy and have a large amount of heat dissipation with respect to the mass. Heat dissipation can be obtained.

[0033] By properly cooling the linear motor 12, heat transfer to the table 18 and the base 26 is suppressed, the thermal deformation thereof is reduced, and the deformation of the linear encoder 54 is also reduced. The position of the table 18 is detected with high accuracy, and the table 18 is moved to a predetermined position with high accuracy.

Further, the linear motor 12 is used as a drive source, and the position of the table 18 is controlled based on the position detection of the linear encoder 54, so that high control accuracy can be obtained. When a rotary motor is used as a drive source, a movement mechanism including a screw shaft and nut is provided between the driven member and the moving member. Therefore, the moving amount of the moving member is strictly equal to the operating amount of the rotary motor. It does not correspond and includes an uncertain fluctuation component due to elastic deformation of the kinematics. Therefore, even if the position of the moving member is detected by the linear encoder and the operation of the rotary motor is controlled based on the detection result, it is inevitable that the position of the moving member is affected by the change in the fluctuation component. There is a limit to the improvement of positioning accuracy. On the other hand, in the case of a linear motor, the moving member that passes through the screw shaft is directly driven. Therefore, if the linear motor is controlled based on the position detection result by the linear encoder, there is a problem caused by the elastic deformation. The definite fluctuation component is eliminated, and the position of the moving member is It is controlled well.

In this way, the linear motor 12 is cooled well and thermal deformation of each part is reduced, and the position control of the moving member is performed by the combination of the linear motor 12 and the linear encoder 54. Both the X-axis moving member 326 and the Y-axis moving member 328 are accurately moved to predetermined positions, and the mounting head 306 is moved from the component supply device 300, both by eliminating the influence of deformation. The electronic circuit component is taken out and moved to a work position such as a component mounting position where the electronic circuit component is mounted on the circuit board 304 with high accuracy, and the mounting operation is performed with high accuracy.

In addition, the duct 86 and the fan 100 are provided with fixed positions, and the mass of the mover 16 is smaller than when the mover 16 is provided, and cooling is performed efficiently. As a result, the current supplied to the coil 32 can be increased and the thrust required for driving the mover 16 can be obtained, while the linear motor 12 has a small capacity and can be made inexpensive. Since the coreless linear motor does not have a core, it is light and can suppress an increase in the mass of the mover 16. Note that the linear motor 12 may be used as a drive source for the mounting head lifting device 318, and the linear motor cooling device 10 may be provided for cooling.

Another embodiment will be described based on FIG. 6 and FIG.

In the linear motor cooling device 110 of this embodiment, a plurality of fans are supported by the mover and moved together with the mover to generate cooling air in the direction along the fins. Therefore, in this embodiment, the outer surface force of the mover 16 of the heat dissipating part 116 extended from the respective heat collecting parts 114 of the two heat dissipating plates 112 is protruded in a cantilevered manner. As shown schematically in FIG. 7 and FIG. 8, the intermediate portion in the moving direction of the mover 16 is notched and a notch 124 is provided, and the portion of the protrusion 120 excluding the base end 122 is A plurality of fins 130 are parallel to the moving direction of the mover 16 on each of the upper surface 126 as the first surface and the lower surface 128 as the second surface on one side in the moving direction of the mover 16 with respect to the notch 124. Provided in a state that extends in the direction! / Similarly, a plurality of fins 132 are provided on the upper surface 126 and the lower surface 128 on the other side of the cutout portion 124 of the protrusion 120. Each of the fins 130 and 132 also has an intermediate force in the moving direction of the mover 16 extending toward each of both ends. A space 134 is provided in the corresponding part.

[0036] The above-mentioned fins 130 and 132ί are covered with ducts 136 and 138, respectively. Duct 13 6 ί, Fig. 6 [Showing J], Heat sink 16 Upper and lower surfaces 126, 128 [Heat radiating plate covering the fixed fins 1 30 and extending parallel to the moving direction of the mover 16 Fixed to 112. The upper and lower surfaces of the heat sink 126, 128 are covered with the fixed fins 132 and fixed to the heat sink 112. These ducts 136, 138 are respectively connected to the space 134 and the space 134. It is on the opposite side from the fins 132 and 130 and is open outside. The openings on the side opposite to the space 134 of the ducts 136 and 138 correspond to the fan 140 and 142 force fins 130 and 132, respectively, and the intermediate side in the moving direction of the mover 16 between the fin 130 and the fin 132 is It is provided so as to be rotatable around an axis parallel to the moving direction of the mover 16 in a state close to the opposite end. The fans 140 and 142 are supported by the movable element 16 via the ducts 136 and 138 and the heat radiating plate 112, and move together with the movable element 16.

In this linear motor cooling device 110, the heat generated in the coil 32 by the current supply is collected by the heat collecting unit 114 of the heat radiating plate 112 and transmitted to the heat radiating unit 116, and the heat radiating rod 16 and the fin 130. , 132 heat is dissipated. The ducts 136 and 138 and the fans 140 and 142 are moved together with the mover 16. At this time, the fans 140 and 142 are rotated in the direction in which air is sucked out from the ducts 136 and 138 as indicated by arrows in FIGS. Therefore, the space between the two ducts 136 and 138 and the space 134 are sucked into the external air force S ducts 136 and 138, and the fins 130 and 132 are deprived of heat! The opening force of the ducts 136 and 138 opposite to the space 134 side and opposite to each other is discharged.

Another embodiment will be described with reference to FIGS. 9 and 10.

In the linear motor cooling device 160 of the present embodiment, as schematically shown in FIGS. 9 and 10, fins 130, 132, ducts 136, 138 and fans 140, 142 force S is provided, and the force that is moved together with the mover 16 is removed from the space 134 between the fin 130 and the fin 132 by removing the heat from the fins 130 and 132. The mover 16 is exhausted from the middle of the moving direction. It is.

Therefore, an air guide plate 164 as an air guide member is provided in the space 134. In this embodiment, the air guide plate 164 is made of an aluminum alloy, which is a kind of metal material having high heat conductivity and excellent heat dissipation characteristics per unit mass, as in the case of the heat sink 166, as shown in FIG. In addition, it is provided with guide portions or air guide portions 168 and 170 which are inclined upward (in a direction approaching the table 180) as they move away from the fins 130 and 132, and are fixed to the heat sink 166. Similarly to the heat sink 112, the heat sink 166 is provided with a notch 174 at the intermediate portion in the moving direction of the mover 16 of the heat sink 172, and a wind guide plate at the mounting portion 176 provided at the notch 174. 164 is fixed. The air guide plate 164 is opposed to the fins 130 and 132 fixed to the upper surface, which is the first surface of the heat radiating portion 172, and to the fins 130, 132 fixed to the lower surface, which is the second surface of the heat radiating portion 172. It is provided to do. Further, as shown in FIG. 10, a portion corresponding to the air guide plate 164 of the table 180 is provided so as to penetrate the opening 182 force table 180 in the vertical direction which is the thickness direction.

[0040] This linear motor cooling P device 160 [This is a fan 140, 142ί, ducts 136, 138, and the opening force of the outer side, which is the opposite side to the intermediate side in the moving direction of the movable element 16, The air is rotated so as to send outside air into the ducts 136 and 138, and cooling air flowing toward the intermediate portion in the moving direction of the mover 16 is generated. The cooling air takes heat from the fins 130 and 132 while flowing in the ducts 136 and 138 toward the middle side in the moving direction of the mover 16, and at the same time, the air guide portion 168 of the air guide plate 164. , 170 is guided upward, leaves the mover 16, passes through the opening 182 of the table 180, and is discharged upward or outward. The air guide plate 164 is made of a metal having high heat conductivity, and also has a function of releasing heat transferred from the heat radiating portion 172.

[0041] As in the linear motor cooling device 110 shown in FIGS. 6 to 8, outside air is taken into the ducts 136 and 138, and the opening force on the intermediate side in the moving direction of the mover 16 is taken in, and the outer opening rocker is also discharged. In this case, with respect to the duct that opens downstream in the moving direction of the mover 16, the wind generated by the movement of the mover 16 becomes a counterwind and the discharge of the air in the duct to the outside of the duct tends to be hindered. On the other hand, as in the linear motor cooling device 160 shown in FIGS. 9 and 10, outside air is sucked into the ducts 136 and 138 from the outer opening, and the mover 16 If the opening force on the intermediate side in the moving direction is discharged, air can be easily taken in and discharged into the ducts 136 and 138 regardless of the moving direction of the mover 16, and the fins 130 and 132 are also forced. The air whose temperature has risen due to heat removal can be reliably discharged out of the ducts 136 and 138.

Still another embodiment will be described with reference to FIGS. 11 and 12.

In the linear motor cooling device 200 of the present embodiment, as schematically shown in FIGS. 11 and 12, fins 130 and 132, ducts 136 and 138, and an air guide plate 164 are provided as in the linear motor cooling device 160. A force fan 202, 204 force fins 130, 132 that are provided and moved together with the mover 16 are provided close to the end on the intermediate side in the moving direction of the mover 16. Fans 202 and 204 are provided in the openings of the ducts 136 and 138 on the middle side in the moving direction of the mover 16, and are positioned between the air guide plate 164 and the fins 130 and 132, respectively. . Further, as shown in FIG. 12, the fans 202 and 204 have their rotational axes moving in a vertical plane parallel to the moving direction of the moving element 16 (in a direction perpendicular to the plate surface of the table 180). The direction is inclined in the direction toward the upper side (toward the side of the table 180), that is, in the exhaust direction, as the distance from the fins 130 and 132 increases. Furthermore, the opening of the ducts 136, 138 on the side opposite to the intermediate portion side in the moving direction of the mover 16 is increased in cross-sectional area as the intermediate force is increased, and the tapered guide portion is increased. Or introduction 咅 208 powers are provided. In FIG. 11, the illustration of the introduction rod 208 is omitted.

[0043] This linear motor cooling P device 200 [Koo! Fans 202, 204ί, ducts 136, 138, the opening force on the opposite side of the intermediate part in the moving direction of the movable element 16 is also the ducts 136, 138. Force that is rotated so as to suck in outside air. Because the axis of rotation is inclined, the air taken into the ducts 136 and 138 is cooled by the fins 130 and 132, and the duct The air is discharged obliquely upward from 13 6 and 138 to the table 18 side, and is smoothly discharged upward along the air guide portions 168 and 170 of the air guide plate 164. Further, the outside air is satisfactorily sucked into the ducts 136 and 138 by the guidance of the introduction parts 206 and 208, and the fins 130 and 132 are efficiently cooled.

Still another embodiment will be described with reference to FIG. As schematically shown in FIG. 13, the linear motor cooling device 220 of the present embodiment extends along the stator, covers the space where the heat radiating portion moves as the mover moves, and is fixed to the base. The ventilator 228 includes a connecting duct 224 connected to one end of the main duct 222 and a blower 226 which is a type of blower provided at the tip of the connecting duct 224. For example, similar to the linear motor cooling device 10, the linear motor cooling device 220 is provided in the electronic circuit component mounting machine, and cools the linear motor that is the drive source of the X-axis moving device. The linear motor cooling device 220 is provided with two ducts that cover the heat radiation portions and fins of the two heat radiation plates, and each of these ducts constitutes a main duct 222, and each of the two main ducts 222 has an end portion. Connection duct 224 is connected. In FIG. 13, two main ducts 222 as main ducts and connection ducts 224 connected to them are collectively shown as one.

In addition to the linear motor cooling device 220, the blower 226 is common to other linear motor cooling devices 230 and motor cooling devices 232, 234, 236, for example. The linear motor cooling device 230 is configured in the same manner as the linear motor cooling device 220, and the connecting duct 240 is connected to the main duct 238, and the force that forms the ventilation device 242 together with the blower 226. For example, in the electronic circuit component mounting machine This is a device that cools the linear motor that is the drive source of the Y-axis moving device provided on the X-axis moving member that moves in the X-axis direction of the mounting head moving device. The connection duct 240 has flexibility. The movement of the main duct 238 provided for the linear motor of the Y-axis moving device that moves with the X-axis moving member is assumed to follow. Further, the motor cooling devices 232, 234, 236 are motors other than the linear motor, and some of them are used for cooling the rotary motor, for example, a main duct 244 provided for the rotary motor, and a main data 244. And a connecting duct 246 connected to one end of the connecting duct. The main duct 244 is provided in at least one of the inside and the outside of the rotary motor. When the main duct 244 is provided in the rotary motor, it is attached to the motor housing, and when it is provided outside, it is provided so as to surround the outer periphery of the motor housing. If the main duct 244 is installed in the rotary motor, use the motor housing as the main duct. When the rotary motor is a drive source for a head rotating device that rotates the mounting head, the connection duct 246 is flexible and follows the movement of the mounting head. Connect the connection duct 246 to the connection duct of the Y-axis moving device, A part may be shared. In addition, another part of the motor cooling devices 232, 234, and 236 is, for example, a device that cools a motor that is a drive source of a substrate transfer device that transfers a circuit board.

[0046] The connection ducts 224, 240, 246 of these motor cooling devices 220, 230 to 236 are joined together, and a blower 226 is provided downstream of the joining portion. The blower 226 is shared by the motor cooling devices 220 and 230 to 236. The blower 226 is located away from the electronic circuit component mounting machine, for example, at the corner of the factory where the electronic circuit component mounting machine is installed, etc. It is installed in a place where there is no problem even if the heat is discharged. At least during operation of the motor, the profiler 226 is rotated, and the air in each of the main ducts 222, 238, 244 of the plurality of motor cooling devices 220, etc. is sucked through the connection ducts 224, 240, 246 to generate an air flow. The heat dissipation part and fin force also take heat, take heat from the rotary motor, cool it, and discharge the heated warm air out of the electronic circuit component mounting machine. The blower 226 functions as an intake air blower. The linear motor cooling device is effective in preventing the temperature rise of members around the linear motor even if hot air is exhausted out of the linear motor through the duct as in the above embodiments. If the connection ducts 224 and 240 are provided as in the embodiment, the heat of the electronic circuit component mounting machine can be exhausted to the outside, and the temperature rise of components, devices, etc. of the electronic circuit component mounting machine is more effective. Is prevented. The same applies to the motor cooling devices 232 to 236.

In the embodiment shown in FIG. 13, the force shown in the example in which the connection ducts of the five motor cooling devices are joined and a blower is provided on the downstream side of the joining portion. This is an example, and the motor cooling device Is not limited to five. When a plurality of motor cooling devices are provided, all of them may be linear motor cooling devices.

[0048] As schematically shown in FIG. 14, when a work line is constituted by a plurality of work machines 250, 252, 254, 256, the air heated for each work machine is transferred to the outside of the main unit and the connection duct. A further connection duct 260 is connected to the junction of at least one connection duct of each work machine, and all the work machines 25 0, 252 are connected downstream of the junction of the connection ducts 260. , 254, 256 may be provided with a common blower 262 so that the air in the duct is discharged out of the duct and the hot air is discharged out of the work line. Main data provided for each work machine It can be considered that the connecting duct directly connected to the tato and the main duct constitutes the main duct, and the connecting duct 260 is connected to the main duct. The blower 262 is provided, for example, in a place away from the work line and where there is no problem even if hot air is discharged, such as a corner of a factory where the work line is installed.

[0049] The work line is, for example, an electronic circuit assembly line or an electronic circuit production line, and the plurality of work machines are, for example, an adhesive applicator for applying an adhesive to a circuit board, or screen printing for printing cream solder. Machine and electronic circuit component mounting machine. Adhesive applicators and screen printers are highly viscous fluid applicators. In the adhesive applicator, for example, a linear motor is used as a drive source of a head moving device that moves the adhesive applicator head, and the head is cooled by a linear motor cooling device having a ventilation device including a connection duct and a blower. In a screen printing machine, for example, a linear motor is used as a drive source of a head moving device that moves a squeegee head, which is a print head, and is cooled by a linear motor cooling device. As other working machines, for example, there are a mounting inspection machine for inspecting the mounting state of electronic circuit components on a circuit board and a coating inspection machine for inspecting the application state of a highly viscous fluid. A linear motor can be used as a drive source for the head moving device that moves the motor, and a linear motor cooling device is provided. These adhesive applicators and the like are anti-circuit board working machines, a board holding device, a working head for working on a circuit board, a relative movement device for relatively moving the board holding device and the working head, And a control device for controlling at least the substrate holding device, the work head, and the relative movement device. The adhesive application head or the like is a work head.

[0050] The electronic circuit component mounting machine is not limited to a mounting machine in which the mounting head is moved in the X-axis and Y-axis directions, and is described in, for example, JP-A-6-342998 and JP-A-9237997. And at least one rotating body held rotatably around a vertical rotation axis, and a mounting head held by each of a plurality of head holding portions of the at least one rotating body, A mounting machine including a body rotation device may be used. In this mounting machine, for example, a relative movement device that relatively moves the mounting head, the substrate holding device, and the component supply device includes a substrate holding device moving device that moves the substrate holding device in the X-axis direction and the Y-axis direction, and Includes a component feeder moving device that moves the component feeder in the X-axis direction A linear motor can be used as a drive source for these moving devices, and a linear motor cooling device is provided.

The electronic circuit component mounting machine may be a mounting machine that mounts an electronic circuit component on a glass substrate constituting a liquid crystal panel, a plasma display panel, or the like. A glass substrate is a type of component mounting substrate, similar to a circuit substrate.

[0051] In addition, work lines that use work machines other than the circuit board work machine may be a work line other than the circuit board work line. The linear motor cooling device according to the claimable invention can be used for cooling the motor. For work machines and actuators other than circuit board work machines! Even when a linear motor is used as a drive source of a moving device that linearly moves the moving member, the linear motor cooling device according to the claimable invention can be used for cooling. This work machine includes, for example, a work head, a holding device that holds a work target member, a relative movement device that relatively moves the work head and the holding device, and a control device that controls the relative movement device and the like. Configured as follows. The actuator is similar.

[0052] When the duct is provided along the stator, air outside the duct may be sucked and discharged through the duct by a fan or a blower. For example, when a linear motor and a linear motor cooling device are accommodated in the housing, one end of the duct is opened in the housing, the other end is opened outside the nosing, and a blower is provided in the opening to the outside. And rotate to suck out the air in the duct. As a result, the air inside the housing outside the duct is sucked into the duct, and the fins are discharged while being cooled. The air in the duct is heated by the heat radiation from the fins, and the temperature of the duct rises, thereby heating the air around the duct.The fins that are lower than the temperature of the air in the duct are cooled. The air in the housing is ventilated by sucking and discharging the air in the housing, and the temperature rise around the duct is suppressed.

[0053] When the fan and duct are supported by the movable part and moved together with the movable part, only one fan may be provided. In this case, one fin is provided in the direction parallel to the moving direction of the movable part, and the fan is provided at one end of the duct to send air into the duct. It can be rotated in the direction of getting in or sucking out air from the duct. Even in such a case, the fins are covered with a duct in a direction parallel to the moving direction of the movable part, and fans are provided at both ends of the fin to move together with the movable part.

The two fans are rotated in the direction of sending air into the duct or sucking out air from the duct.

In these cases, the direction of the cooling air generated by the rotation of the fan may or may not be changed according to the moving direction of the movable part. For example, when the time required for continuous movement in one direction of the movable part is long, the fan is rotated so as to generate an air flow directed from the downstream side to the upstream side in the movement direction of the movable part.

[0054] Even when the duct is provided along the stator, the direction of the wind generated by the fan may be changed according to the moving direction of the mover.

Furthermore, when the heat radiating member includes two heat radiating plates, the heights of the heat radiating portions of the heat radiating plates (positions perpendicular to the plate surface of the table) may be the same. Also, when fins are provided on the upper surface (first surface) and the lower surface (second surface) of each heat radiation part of the two heat sinks, the height of all fins (projection length of the heat radiation part force) is It may be the same.

Furthermore, the heat dissipating member, the fin and the air guide member may be made of a metal material having a high thermal conductivity, such as a copper alloy or steel, in addition to the aluminum alloy.

In addition, when the air guide member is provided to guide the cooling air in the direction away from the movable part force, the air guide member is provided so as to guide the cooling air in the direction away from the movable part force at the side of the movable part or below. Well, ...

[0055] Further, in the coreless linear motor, an annular, for example, annular heat collecting member may be provided between the plurality of coils instead of the spacer. The heat collecting member is made of a non-magnetic material having excellent heat conductivity, such as aluminum, for example, and is connected to the heat collecting portion of the heat radiating member so as to transmit heat so that the heat radiating member can also be radiated. In this way, the heat generated by the coil is collected by the heat collection part of the heat release member, and is also collected by the heat collection member, so that heat collection, and hence heat dissipation and cooling are performed better. .

Spacers and heat collecting members may be omitted. The linear motor can also be a linear motor with a core whose coil is held by the core! / ヽ.

Claims

The scope of the claims

[1] A linear motor cooling device including a linear fixed portion and a movable portion including a coil and movable along the fixed portion,

Including linear motor cooling device.

[2] The movable part includes a resin mold that covers the outside of the coil, the heat collecting part of the heat radiating member is disposed between the coil and the resin mold, and the heat radiating part is a resin mold. 2. The linear motor cooling device according to claim 1, wherein the linear motor cooling device extends through the portion to the outside.

[3] The linear motor cooling device according to claim 1 or 2, wherein the coil has a cylindrical shape, and the heat collecting portion is arranged in a state of covering 80% or more of an outer periphery of the cylindrical coil. .

[4] The linear motor cooling device according to any one of claims 1 to 3, wherein the heat dissipating part is projected in a cantilever manner on an outer surface force of the movable part, and the fin is provided on the projecting part. .

[5] The fin is provided in a portion excluding the base end portion of the projecting portion, and the outside of the cover that covers the fin and the portion excluding the base end portion of the heat radiating portion extends along the fixed portion, and the movable portion 5. The linear motor cooling device according to claim 4, wherein the linear motor cooling device is provided so as to cover the space in which the heat dissipating part and the fin move as the air moves.

[6] The fin includes a first fin and a second fin extending from an intermediate portion in the moving direction of the movable portion toward both ends, and each of the first fin and the second fin. And a first fan and a second fan that are supported by the movable part and move together with the movable part to generate cooling air in a direction along the first fin and the second fin, respectively. The linear motor cooling device according to any one of claims 1 to 4.

[7] The first fan and the second fan generate cooling air that flows toward the intermediate portion, and the cooling air that flows from the first fan side to the intermediate portion and the second air flow in the intermediate portion. Fah 7. The linear motor cooling device according to claim 6, further comprising an air guide member that guides the cooling air flowing from the inner side to the intermediate portion so as to flow away from the movable portion.

[8] A linear motor cooling device including a linear fixed portion and a movable portion including a coil and movable along the fixed portion,

A ventilator that ventilates the air in the duct;

Including linear motor cooling device.

9. The linear motor cooling device according to claim 8, wherein the ventilation device includes a blower provided at least at one end in the longitudinal direction of the duct.

10. The linear motor according to claim 8, wherein the ventilation device includes a connection duct connected to one end of the duct as a main duct, and a blower provided at the tip of the connection duct. Cooling system.