WO2006039682A1 - Absolute distance meter that measures a moving retroreflector - Google Patents

Absolute distance meter that measures a moving retroreflector Download PDF

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Publication number
WO2006039682A1
WO2006039682A1 PCT/US2005/035578 US2005035578W WO2006039682A1 WO 2006039682 A1 WO2006039682 A1 WO 2006039682A1 US 2005035578 W US2005035578 W US 2005035578W WO 2006039682 A1 WO2006039682 A1 WO 2006039682A1
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WO
WIPO (PCT)
Prior art keywords
moving
retroreflector
laser
laser light
measurement
Prior art date
Application number
PCT/US2005/035578
Other languages
French (fr)
Inventor
Robert E. Bridges
John M. Hoffer
Original Assignee
Faro Technologies, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Faro Technologies, Inc. filed Critical Faro Technologies, Inc.
Priority to CN2005800327173A priority Critical patent/CN101031817B/en
Priority to EP05804580.8A priority patent/EP1794620B1/en
Priority to JP2007534877A priority patent/JP5235412B2/en
Publication of WO2006039682A1 publication Critical patent/WO2006039682A1/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/32Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/36Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/42Simultaneous measurement of distance and other co-ordinates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50Systems of measurement based on relative movement of target
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50Systems of measurement based on relative movement of target
    • G01S17/58Velocity or trajectory determination systems; Sense-of-movement determination systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/66Tracking systems using electromagnetic waves other than radio waves

Definitions

  • the present disclosure relates to a coordinate measuring device.
  • One set of coordinate measurement devices belongs to a class of instruments that measure the coordinates of a point by sending a laser beam to the point.
  • the laser beam may impinge directly on the point or may impinge on a retroreflector target that is in contact with the point.
  • the instrument determines the coordinates of the point by measuring the distance and the two angles to the target.
  • the distance is measured with a distance-measuring device such as an absolute distance meter or an interferometer.
  • the angles are measured with an angle-measuring device such as an angular encoder.
  • a gimbaled beam-steering mechanism within the instrument directs the laser beam to the point of interest.
  • Exemplary systems for determining coordinates of a point are described by U.S. Patent No. 4,790,651 to Brown et al. and U.S. Patent No. 4,714,339 to Lau et al.
  • the laser tracker is a particular type of coordinate-measuring device that tracks the retroreflector target with one or more laser beams it emits.
  • a device that is closely related to the laser tracker is the laser scanner.
  • the laser scanner steps one or more laser beams to points on a diffuse surface.
  • the laser tracker and laser scanner are both coordinate- measuring devices. It is common practice today to use the term laser tracker to also refer to laser scanner devices having distance- and angle-measuring capability. This broad definition of laser tracker, which includes laser scanners, is used throughout this application.
  • One type of laser tracker contains only an interferometer without an absolute distance meter. If an object blocks the path of the laser beam from one of these trackers, the interferometer loses its distance reference. The operator must then track the retroreflector to a known location before continuing the measurement.
  • a way around this limitation is to put an absolute distance meter (ADM) in the tracker.
  • the ADM can measure distance in a point- and-shoot manner.
  • Some laser trackers contain only an ADM without an interferometer.
  • An exemplary laser tracker of this type is described in U.S. Patent Number 5,455,670 to Payne, et al.
  • Other laser trackers typically contain both an ADM and an interferometer.
  • An exemplary laser tracker of this type is described in U.S. Patent Number 5,764,360 to Meier, et al.
  • One of the main applications for laser trackers is to scan the surface features of objects to determine their geometrical characteristics. For example, an operator can determine the angle between two surfaces by scanning each of the surfaces and then fitting a geometrical plane to each. As another example, an operator can determine the center and radius of a sphere by scanning the sphere surface.
  • an interferometer rather than an ADM, has been required for the laser tracker to scan. The reason for this is that absolute distance measurements have only been possible on stationary targets. Consequently, to get full functionality with both scanning and point-and-shoot capability, laser trackers have required both an interferometer and an ADM. What is needed is an ADM that has the ability to accurately and quickly scan a moving target. This permits tracker cost to be reduced because the interferometer is no longer needed.
  • a laser device and method capable of one or more dimensional absolute distance measurements and/or surface scanning and/or coordinate measurements of a moving external retroreflector or other moving target surfaces without using an incremental interferometer depending upon what the application requires.
  • FIGURE 1 is a perspective view of an exemplary laser tracker sending a laser beam to an external retroreflector; and [0010]
  • FIGURE 2 is a block diagram of some of the main elements within the exemplary laser tracker of FIGURE 1; and
  • FIGURE 3 is a block diagram of the elements within the exemplary fiber- coupling network of FIGURE 2.
  • FIGURE 4 is a block diagram of the elements within the exemplary ADM electronics of FIGURE 2.
  • FIGURE 5 is a block diagram of the elements within an exemplary ADM data-processing system for computing the distance to a moving retroreflector.
  • An exemplary laser tracker 10 is illustrated in FIGURE 1.
  • An exemplary gimbaled beam-steering mechanism 12 of the laser tracker comprises zenith carriage 14 that is mounted on azimuth base 16.
  • the zenith and azimuth mechanical axes internal to the tracker are turned to point the laser beam 46 in the desired direction.
  • the laser beam may comprise one or more laser wavelengths, as will be described in the discussion that follows.
  • the zenith and azimuth angular encoders internal to the tracker (not shown) are attached to the zenith and azimuth mechanical axes and indicate, to high accuracy, the angles of rotation.
  • this sort of gimbal mechanism 12 is assumed in the following discussion. However, other types of gimbal mechanisms are possible, and the techniques described here are also applicable to these other types.
  • Laser beam 46 travels to external retroreflector 26.
  • the most common type of retroreflector is a spherically mounted retroreflector (SMR), which comprises a metal sphere into which a cube-corner retroreflector (not shown) is embedded.
  • the cube-corner retroreflector comprises three perpendicular mirrors that come together at a common apex point. The apex point is placed at the center of the metal sphere.
  • SMR spherically mounted retroreflector
  • a retrosphere or any other device that sends the return laser beam back on itself may be used as the external retroreflector 26.
  • ADM electronics 300 modulates the optical power of ADM laser 102, which sends light through fiber-optic cable 104 and fiber-coupling network 200. Some of the light from the fiber-coupling network 200 travels to ADM beam launch 140. Another part of the light travels through fiber loop 106 and then back into fiber-coupling network 200.
  • ADM beam launch 140 comprises stable ferrule 142 and positive lens 144. Collimated light 108 emerges from the fiber launch 140.
  • Visible-light laser 110 sends visible light into beam launch 150, which comprises stable ferrule 152 and positive lens 154.
  • the visible laser beam 112 that emerges to the beam launch 150 is collimated.
  • Dichroic beam splitter 114 transmits ADM beam 108 but reflects visible beam 112.
  • composite laser beam 116 comprises the visible laser beam and ADM laser beam, which are substantially collinear.
  • Laser beam 116 passes through beam splitter 118 and beam expander 160, emerging as a larger collimated laser beam 46.
  • the beam expander comprises negative lens 162 and positive lens 164.
  • the laser beam 46 travels to external retroreflector 26, as shown in FIGURE 1.
  • the beam reflects off retroreflector 26 and returns to the laser tracker. If the laser beam strikes the center of the retroreflector, the reflected laser beam retraces the path of the incident laser beam. If the laser beam strikes the retroreflector off the center, the reflected laser beam returns parallel to the incident beam but offset from it. The returning laser beam re-enters the tracker and retraces the path back through the optical system. Some of the returning laser light reflects off beam splitter 118. Reflected laser light 126 passes through optical filter 128 and strikes position detector 130. The optical filter 128 blocks either the ADM light or the visible light in the beam 126.
  • the position detector 130 responds to the light that passes through the optical filter 128 by indicating the position of the laser beam on its surface.
  • the retrace point of the position detector is defined as the point that the laser beam 126 strikes if the beam 46 strikes the center of retroreflector 26.
  • the laser beam 126 moves off the retrace point and causes the position detector 130 to generate an electrical error signal.
  • a servo system processes this error signal to activate motors that turn the laser tracker toward the center of the external retroreflector 26.
  • the dichroic beam splitter 114 reflects the returning visible laser beam but transmits the returning ADM laser beam.
  • the returning ADM laser beam travels through the beam launch and is coupled into the optical fiber within the stable ferrule 142. This light travels through the fiber-coupling network 200 and emerges from optical fiber 230. That portion of the laser light that traveled through fiber loop 106 emerges from optical fiber 232.
  • Both fibers 230 and 232 continue into the ADM electronics section 300, where their modulated powers are converted into electrical signals. These signals are processed by the ADM electronics to provide the result, which is the distance from the tracker to the retroreflector target.
  • Exemplary fiber-coupling network 200 of FIGURE 3 comprises first fiber ⁇ optic coupler 204, second fiber-optic coupler 206, and low-reflection terminations 208 and 210.
  • Light from ADM laser 102 travels through fiber-optic cable 104 and enters first fiber ⁇ optic coupler 204.
  • Fiber-optic coupler 204 sends 10% of the laser light through fiber-loop 106 and into optical fiber 232, which travels to ADM electronics 300.
  • Fiber-optic coupler 204 sends the other 90% of the laser light through fiber-optic coupler 206, which sends half of the laser light to low-reflection termination 208 and the other half of the laser light to stable ferrule 142.
  • ADM electronics 300 of FIGURE 4 comprises frequency reference 302, synthesizer 304, measure detector 306, reference detector 308, mixers 310, 312, amplifiers 314, 316, 318, 320, frequency divider 324, and analog-to-digital converter (ADC) 322.
  • Frequency reference 302 provides the time base for the ADM and should have low phase noise and low frequency drift.
  • the frequency reference may be an oven-controlled crystal oscillator (OCXO), rubidium oscillator, or any other highly stable frequency reference.
  • OXO oven-controlled crystal oscillator
  • rubidium oscillator or any other highly stable frequency reference.
  • the oscillator frequency should be accurate and stable to within a small fraction of a part per million.
  • the signal from the frequency reference is put into the synthesizer, which generates three signals.
  • the first signal is at and modulates the optical power of ADM laser 102.
  • This type of modulation is called intensity modulation (IM).
  • IM intensity modulation
  • AM amplitude modulation
  • Fiber-optic cables 230 and 232 carry laser light.
  • the light in these fiber-optic cables is converted into electrical signals by measure detector 306 and reference detector 308.
  • These optical detectors send the modulation frequency / RF to amplifiers 314, 316 and then to mixers 310, 312.
  • Each mixer produces two frequencies, one at ⁇ fw -/ KF
  • These signals travel to low-frequency amplifiers 318, 320.
  • These amplifiers block the high-frequency signals so that only the signals at the intermediate frequency (JF), / IF ⁇ fw - / RF I pass through to the analog-to-digital converter (ADC) 322.
  • JF intermediate frequency
  • / IF ⁇ fw - / RF I pass through to the analog-to-digital converter (ADC) 322.
  • ADC analog-to-digital converter
  • the frequency reference 302 sends a signal into frequency divider 324, which divides the frequency of the reference 302 by an integer N to produce a sampling clock.
  • the ADC may decimate the sampled signals by an integer factor M, so that the effective sampling rate is fap/ NM. This effective sampling rate should be an integer multiple of the intermediate frequency ⁇ .
  • the ADC sends the sampled data for the measure and reference channels to data processors 400 for analysis.
  • Data processors include digital signal processor (DSP) chips and general-purpose microprocessor chips. The processing performed by these processors is described below.
  • Data processor 400 of FIGURE 5 takes the digitized data from ADC 322 and derives from it the distance from the tracker to external retroreflector 26.
  • FIGURE 5 refers to this distance as the RESULT.
  • Data processor 400 comprises digital signal processor 410, microprocessor 450, and crystal oscillators 402, 404.
  • Analog-to-digital converter 322 sends sampled data to DSP 410. This data is routed to a program that runs within the DSP. This program contains three main functions: phase-extractor function 420, compensator function 422, and Kalman-filter function 424.
  • the purpose of the phase-extractor function is to determine the phases of the signals in the reference and measure channels, that is, the phases of the signals that pass through the measure detector 306 and reference detector 308. To determine these phases, the modulation range must first be calculated. Modulation range is defined as the round-trip distance traveled by the ADM laser light in air for the phase of the laser modulation to change by 2 pi radians.
  • the modulation range R MOD is given by
  • c is the speed of light in vacuum
  • n is the group index of refraction of the ADM laser light in air
  • / RP is the RF frequency generated by synthesizer 304 and applied to ADM laser 102.
  • the modulation range is approximately 52 millimeters.
  • Phase-extractor function 420 calculates the phase P M of the measure channel for moving external retroreflector 26 as follows:
  • Phase-extractor function 420 calculates the phases of the reference channel for moving external retroreflector 26 as follows:
  • phase-extractor function 420 is dependent on the speed or velocity v, for example the radial speed, of the target as show in equation (2), (3), (5), and (6).
  • the phase-extractor function 420 also delivers the measure phase P M and the reference phase P R to the compensator function, which uses these phases to calculate a distance value:
  • the quantity W is an integer that accounts for the number of whole modulation intervals to the target.
  • the method for finding this integer is discussed below.
  • some systems experience an error that varies with distance as a sinusoid with a period equal to the modulation range R MOD - TO remove this type of error, it is necessary to use the ADM to measure targets at accurately known distances and observe the sinusoidal error pattern.
  • the compensator 422 sends the distance values to Kalman filter 424.
  • the Kalman filter is a numerical algorithm applied to the distance data to give the best estimate of distance and speed of external retrorefiector 26 as a function of time and in the presence of noise.
  • the ADM distance data is collected at high speed and has some level of random noise in the distance readings. This small error is greatly amplified in calculating speed, since small differences in distance are divided by a small increment in time.
  • the Kalman filter can be thought of as an intelligent smoothing function that optimizes accuracy based on the noise of the system and the speed of the target.
  • the Kalman filter also serves to synchronize the ADM readings with the readings of the angular encoders and the position detector.
  • the angular encoders and position detector latch their readings whenever they receive the sync pulse, which occurs at frequency fsmc-
  • the frequency of the sync pulse is in general different than the frequency of calculation of the ADM.
  • the Kalman filter provides synchronization of the ADM with the angular encoders and position detector by extrapolating the position forward in time to the next sync pulse.
  • the subscript m represents an a priori estimate and the subscript ⁇ represents an. a posteriori estimate.
  • the quantity x is the state variable that may take a variety of forms. Because the exemplary ADM system measures at a high rate, a relatively simple state vector containing only two components - the position d and radial speed v — are needed:
  • the matrix Q is the process noise covariance.
  • the acceleration is not explicitly calculated. Instead the acceleration is assumed to have a dispersion characterized by the variance ⁇ A .
  • the process-noise variance ⁇ A is selected so as to minimize the error in the position of a moving target.
  • the resulting covariance for the process noise is
  • P m is the state covariance matrix at the present point in time. It is found from the state covariance matrix at the last point in time and the process noise covariance.
  • the state covariance matrix and the measurement noise covariance R are used to determine the filter gain K.
  • the measurement noise covariance is just the variance ⁇ u ' in readings caused by noise in the measurement device.
  • the measurement noise in the ADM system is determined by simply calculating the variance c ADM 2 in the distances reported while the ADM is measuring a stationary target.
  • H is the measurement matrix, which is defined such that H times the state estimate x is equal to the estimated output, against which measured output, is compared.
  • Equation (12) is interpreted as follows.
  • x m is the initial guess for the state vector (distance and radial speed) based on the distance and radial speed for the previous point in time.
  • the quantity z is the measured distance d and Hx m is the estimated distance.
  • the quantity z — Hx m is the difference between the measured and estimated distances. This difference is multiplied by the gain matrix K to provide an adjustment to the initial estimate x m for the state matrix.
  • the best estimate for the distance is a value between the measured distance and the estimated distance.
  • Equation (12) provides a mathematically sound method of selecting the best ⁇ a posteriori) estimate of the distance and radial speed.
  • Equation (13) provides a new estimate for the state covariance P p at the next point in time. Equations (9) - (13) are solved each time compensator function 422 sends a new measured value to the Kalman filter.
  • counter 414 determines the difference in time between the sync pulse and the last state distance. It does this in the following way.
  • Crystal oscillator 404 sends a low-frequency sine wave to frequency divider 452, located within microprocessor 450. This clock frequency is divided down to fsmc, me frequency of the sync pulse.
  • the sync pulse is sent over device bus 72 to DSP 410, angular encoder electronics 74, and position- detector electronics 76.
  • the sync pulse is sent to counter 414, which resides within DSP 410.
  • the counter is clocked by crystal 402, which drives a phase-locked loop (PLL) device 412 within the DSP.
  • PLL phase-locked loop
  • oscillator 402 has a frequency of 30 MHz and PLL 412 doubles this to produce a clock signal of 60 MHz to counter 414.
  • the phase- extractor function 420 sends a signal to the counter when the ADC 322 has sent all the samples for one cycle. This resets counter 414 and begins a new count.
  • the sync pulse stops the counting of counter 412. The total number of counts is divided by the frequency to determine the elapsed time. Since the time interval in the above equations was set to one, the normalized time interval t ⁇ om is the elapsed time divided by the time interval.
  • the state distance X EXT extrapolated to the sync pulse event is
  • the Kalman-f ⁇ ter function 424 provides the result, which is the distance from the tracker to external retroreflector 26.
  • the Kalman filter also provides the velocity to phase-extractor function 420 to apply in equations (2), (3), (5), and (6).
  • the quantity W was introduced in equation (8) as an integer that accounts for the number of whole modulation intervals to the target.
  • This integer value W is found by first measuring the distance to the external retroreflector 26. The frequencies/ tF and f w are changed by a fixed amount and the distances are again measured. If the RF frequencies before and after the change are/; and / 2 and the phase difference between the two measurements isp then the integer W is equal to the integer portion
  • This technique will work out to a range of (c/2 «)/(/ -/ / ). For example, if/ ⁇ and / 2 differ by 2.5 MHz, and if the/; is 2800 MHz, then the technique will work out to about 60 meters.
  • a third frequency can be added to assist in determining the value of the integer W. Once W has been determined, it is not necessary to switch the frequencies again unless the beam is broken. If the ADM continues to measure the external retroreflector 26 without interruption, then it can easily keep track of the changes in the integer W.

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Abstract

A laser device and method capable of one or more dimensional absolute distance measurements and/or surface scanning and/or coordinate measurements of a moving external retroreflector or other moving target surfaces without using an incremental interferometer.

Description

ABSOLUTE DISTANCE METER THAT MEASURES A MOVING
RETROREFLECTOR
BACKGROUND
[0001] The present disclosure relates to a coordinate measuring device. One set of coordinate measurement devices belongs to a class of instruments that measure the coordinates of a point by sending a laser beam to the point. The laser beam may impinge directly on the point or may impinge on a retroreflector target that is in contact with the point. In either case, the instrument determines the coordinates of the point by measuring the distance and the two angles to the target. The distance is measured with a distance-measuring device such as an absolute distance meter or an interferometer. The angles are measured with an angle-measuring device such as an angular encoder. A gimbaled beam-steering mechanism within the instrument directs the laser beam to the point of interest. Exemplary systems for determining coordinates of a point are described by U.S. Patent No. 4,790,651 to Brown et al. and U.S. Patent No. 4,714,339 to Lau et al.
[0002] The laser tracker is a particular type of coordinate-measuring device that tracks the retroreflector target with one or more laser beams it emits. A device that is closely related to the laser tracker is the laser scanner. The laser scanner steps one or more laser beams to points on a diffuse surface. The laser tracker and laser scanner are both coordinate- measuring devices. It is common practice today to use the term laser tracker to also refer to laser scanner devices having distance- and angle-measuring capability. This broad definition of laser tracker, which includes laser scanners, is used throughout this application.
[0003] One type of laser tracker contains only an interferometer without an absolute distance meter. If an object blocks the path of the laser beam from one of these trackers, the interferometer loses its distance reference. The operator must then track the retroreflector to a known location before continuing the measurement. A way around this limitation is to put an absolute distance meter (ADM) in the tracker. The ADM can measure distance in a point- and-shoot manner. Some laser trackers contain only an ADM without an interferometer. An exemplary laser tracker of this type is described in U.S. Patent Number 5,455,670 to Payne, et al. Other laser trackers typically contain both an ADM and an interferometer. An exemplary laser tracker of this type is described in U.S. Patent Number 5,764,360 to Meier, et al.
[0004] One of the main applications for laser trackers is to scan the surface features of objects to determine their geometrical characteristics. For example, an operator can determine the angle between two surfaces by scanning each of the surfaces and then fitting a geometrical plane to each. As another example, an operator can determine the center and radius of a sphere by scanning the sphere surface. Up until this time, an interferometer, rather than an ADM, has been required for the laser tracker to scan. The reason for this is that absolute distance measurements have only been possible on stationary targets. Consequently, to get full functionality with both scanning and point-and-shoot capability, laser trackers have required both an interferometer and an ADM. What is needed is an ADM that has the ability to accurately and quickly scan a moving target. This permits tracker cost to be reduced because the interferometer is no longer needed.
SUMMARY
[0005] The above and other problems and disadvantages of the prior art are overcome " and alleviated by embodiments the present laser device, which utilizes an absolute distance meter to determine the distance to a moving retroreflector.
[0006] A laser device and method is disclosed capable of one or more dimensional absolute distance measurements and/or surface scanning and/or coordinate measurements of a moving external retroreflector or other moving target surfaces without using an incremental interferometer depending upon what the application requires.
[0007] The above-discussed and other features and advantages of the present apparatus and method will be appreciated and understood by those skilled in the art from the following detailed description and drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] Referring now to the drawings, wherein like elements are numbered alike in the several FIGURES:
[0009] FIGURE 1 is a perspective view of an exemplary laser tracker sending a laser beam to an external retroreflector; and [0010] FIGURE 2 is a block diagram of some of the main elements within the exemplary laser tracker of FIGURE 1; and
[0011] FIGURE 3 is a block diagram of the elements within the exemplary fiber- coupling network of FIGURE 2; and
[0012] FIGURE 4 is a block diagram of the elements within the exemplary ADM electronics of FIGURE 2; and
[0013] FIGURE 5 is a block diagram of the elements within an exemplary ADM data-processing system for computing the distance to a moving retroreflector.
DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS
[0014] Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings.
[0015] An exemplary laser tracker 10 is illustrated in FIGURE 1. An exemplary gimbaled beam-steering mechanism 12 of the laser tracker comprises zenith carriage 14 that is mounted on azimuth base 16. The zenith and azimuth mechanical axes internal to the tracker (not shown) are turned to point the laser beam 46 in the desired direction. The laser beam may comprise one or more laser wavelengths, as will be described in the discussion that follows. The zenith and azimuth angular encoders internal to the tracker (not shown) are attached to the zenith and azimuth mechanical axes and indicate, to high accuracy, the angles of rotation. For the sake of clarity and simplicity, this sort of gimbal mechanism 12 is assumed in the following discussion. However, other types of gimbal mechanisms are possible, and the techniques described here are also applicable to these other types.
[0016] Laser beam 46 travels to external retroreflector 26. The most common type of retroreflector is a spherically mounted retroreflector (SMR), which comprises a metal sphere into which a cube-corner retroreflector (not shown) is embedded. The cube-corner retroreflector comprises three perpendicular mirrors that come together at a common apex point. The apex point is placed at the center of the metal sphere. Instead of an SMR, a retrosphere or any other device that sends the return laser beam back on itself may be used as the external retroreflector 26.
Elements of the laser tracker [0017] Some of the main elements within the laser tracker are shown in FIGURE 2. ADM electronics 300 modulates the optical power of ADM laser 102, which sends light through fiber-optic cable 104 and fiber-coupling network 200. Some of the light from the fiber-coupling network 200 travels to ADM beam launch 140. Another part of the light travels through fiber loop 106 and then back into fiber-coupling network 200. ADM beam launch 140 comprises stable ferrule 142 and positive lens 144. Collimated light 108 emerges from the fiber launch 140.
[0018] hi the event that the ADM laser operates at an infrared wavelength, it is convenient to provide a visible laser beam to help make the ADM beam easier to find. Visible-light laser 110 sends visible light into beam launch 150, which comprises stable ferrule 152 and positive lens 154. The visible laser beam 112 that emerges to the beam launch 150 is collimated. Dichroic beam splitter 114 transmits ADM beam 108 but reflects visible beam 112. To the right of beam splitter 114, composite laser beam 116 comprises the visible laser beam and ADM laser beam, which are substantially collinear. Laser beam 116 passes through beam splitter 118 and beam expander 160, emerging as a larger collimated laser beam 46. The beam expander comprises negative lens 162 and positive lens 164.
[0019] The laser beam 46 travels to external retroreflector 26, as shown in FIGURE 1. The beam reflects off retroreflector 26 and returns to the laser tracker. If the laser beam strikes the center of the retroreflector, the reflected laser beam retraces the path of the incident laser beam. If the laser beam strikes the retroreflector off the center, the reflected laser beam returns parallel to the incident beam but offset from it. The returning laser beam re-enters the tracker and retraces the path back through the optical system. Some of the returning laser light reflects off beam splitter 118. Reflected laser light 126 passes through optical filter 128 and strikes position detector 130. The optical filter 128 blocks either the ADM light or the visible light in the beam 126. The position detector 130 responds to the light that passes through the optical filter 128 by indicating the position of the laser beam on its surface. The retrace point of the position detector is defined as the point that the laser beam 126 strikes if the beam 46 strikes the center of retroreflector 26. When the laser beam 46 moves off the center of retroreflector 26, the laser beam 126 moves off the retrace point and causes the position detector 130 to generate an electrical error signal. A servo system processes this error signal to activate motors that turn the laser tracker toward the center of the external retroreflector 26.
[0020] The dichroic beam splitter 114 reflects the returning visible laser beam but transmits the returning ADM laser beam. The returning ADM laser beam travels through the beam launch and is coupled into the optical fiber within the stable ferrule 142. This light travels through the fiber-coupling network 200 and emerges from optical fiber 230. That portion of the laser light that traveled through fiber loop 106 emerges from optical fiber 232. Both fibers 230 and 232 continue into the ADM electronics section 300, where their modulated powers are converted into electrical signals. These signals are processed by the ADM electronics to provide the result, which is the distance from the tracker to the retroreflector target.
Fiber-coupling network
[0021] Exemplary fiber-coupling network 200 of FIGURE 3 comprises first fiber¬ optic coupler 204, second fiber-optic coupler 206, and low-reflection terminations 208 and 210. Light from ADM laser 102 travels through fiber-optic cable 104 and enters first fiber¬ optic coupler 204. Fiber-optic coupler 204 sends 10% of the laser light through fiber-loop 106 and into optical fiber 232, which travels to ADM electronics 300. Fiber-optic coupler 204 sends the other 90% of the laser light through fiber-optic coupler 206, which sends half of the laser light to low-reflection termination 208 and the other half of the laser light to stable ferrule 142. Light from stable ferrule 142 propagates to external retroreflector 26 and back into ferrule 142, as described above. Half of the laser light returning through ferrule 142 travels back through second fiber-optic coupler 206, through fiber-optic cable 230, and into ADM electronics 300. The other half of the laser light travels through second fiber-coupler 206, first fiber-optic coupler 204, and into ADM laser 102, where it is blocked by an internal Faraday isolator (not shown).
ADM electronics
[0022] ADM electronics 300 of FIGURE 4 comprises frequency reference 302, synthesizer 304, measure detector 306, reference detector 308, mixers 310, 312, amplifiers 314, 316, 318, 320, frequency divider 324, and analog-to-digital converter (ADC) 322. Frequency reference 302 provides the time base for the ADM and should have low phase noise and low frequency drift. The frequency reference may be an oven-controlled crystal oscillator (OCXO), rubidium oscillator, or any other highly stable frequency reference. Preferably the oscillator frequency should be accurate and stable to within a small fraction of a part per million. The signal from the frequency reference is put into the synthesizer, which generates three signals. The first signal is at
Figure imgf000007_0001
and modulates the optical power of ADM laser 102. This type of modulation is called intensity modulation (IM). Alternatively, it is possible for the first signal at
Figure imgf000007_0002
modulate the electric field amplitude, rather than the optical power, of the laser light from ADM laser 102. This type of modulation is called amplitude modulation (AM). The second and third signals, both at the frequency fw, go to the local-oscillator ports of mixers 310 and 312.
[0023] Fiber-optic cables 230 and 232 carry laser light. The light in these fiber-optic cables is converted into electrical signals by measure detector 306 and reference detector 308. These optical detectors send the modulation frequency /RF to amplifiers 314, 316 and then to mixers 310, 312. Each mixer produces two frequencies, one at \fw -/KF | and one at \f∑o + /RF |. These signals travel to low-frequency amplifiers 318, 320. These amplifiers block the high-frequency signals so that only the signals at the intermediate frequency (JF), /IF = \fw - /RF I pass through to the analog-to-digital converter (ADC) 322. The frequency reference 302 sends a signal into frequency divider 324, which divides the frequency of the reference 302 by an integer N to produce a sampling clock. In general, the ADC may decimate the sampled signals by an integer factor M, so that the effective sampling rate is fap/ NM. This effective sampling rate should be an integer multiple of the intermediate frequency^.
[0024] Here are frequencies for an exemplary ADM: The frequency reference is /REF = 20 MHz. The synthesizer RF frequency that drives the laser is fa = 2800 MHz. The synthesizer LO frequency that is applied to the mixers isfw = 2800.01 MHz. The difference between the LO and RF frequencies is the intermediate frequency of/o? = 10 kHz. The frequency reference is divided by N= 10, to produce a 2-MHz frequency that is applied to the ADC as a sampling clock. The ADC has a decimation factor of M= 8, which produces an effective sampling rate of 250 IcHz. Since the IF is 10 kHz, the ADC takes 25 samples per cycle.
[0025] The ADC sends the sampled data for the measure and reference channels to data processors 400 for analysis. Data processors include digital signal processor (DSP) chips and general-purpose microprocessor chips. The processing performed by these processors is described below.
Data processor
[0026] Data processor 400 of FIGURE 5 takes the digitized data from ADC 322 and derives from it the distance from the tracker to external retroreflector 26. FIGURE 5 refers to this distance as the RESULT. Data processor 400 comprises digital signal processor 410, microprocessor 450, and crystal oscillators 402, 404.
[0027] Analog-to-digital converter 322 sends sampled data to DSP 410. This data is routed to a program that runs within the DSP. This program contains three main functions: phase-extractor function 420, compensator function 422, and Kalman-filter function 424. The purpose of the phase-extractor function is to determine the phases of the signals in the reference and measure channels, that is, the phases of the signals that pass through the measure detector 306 and reference detector 308. To determine these phases, the modulation range must first be calculated. Modulation range is defined as the round-trip distance traveled by the ADM laser light in air for the phase of the laser modulation to change by 2 pi radians. The modulation range RMOD is given by
Figure imgf000008_0001
where c is the speed of light in vacuum, n is the group index of refraction of the ADM laser light in air, and /RP is the RF frequency generated by synthesizer 304 and applied to ADM laser 102. hi an exemplary ADM having an RF frequency of 2860 MHz, the modulation range is approximately 52 millimeters.
[0028] As discussed previously, the sample clock applied to ADC 322 has an effective frequency of '/SAMP -/REF I NM and the number of ADC samples per cycle is V= fsAMP I fiF- hi an exemplary tracker, /REF = 20 MHz, N= 10, M= 8, and^ = 10 kHz. The sample frequency is then 250 IcHz and the number of ADC samples per cycle is NADC = 25 samples per cycle.
[0029] Let Xk be the /cth sampled data value from the ADC for the measure channel and let v be the corresponding speed of external retroreflector 26 during the measurement. Phase-extractor function 420 calculates the phase PM of the measure channel for moving external retroreflector 26 as follows:
Figure imgf000009_0001
b = ∑xk ∞Ji 2πk fsr -v/RuOD \ (3) k=0 \ J SAMP J
Figure imgf000009_0002
Let yic be the kth sampled data values from the ADC for the reference channel. Phase-extractor function 420 calculates the phases of the reference channel for moving external retroreflector 26 as follows:
Figure imgf000009_0003
pR = tan l(g/h). (7)
[0030] Significantly, the phase-extractor function 420 is dependent on the speed or velocity v, for example the radial speed, of the target as show in equation (2), (3), (5), and (6). The phase-extractor function 420 also delivers the measure phase PM and the reference phase PR to the compensator function, which uses these phases to calculate a distance value:
d = do + RMOD [W+ (PM-PR)/2%]. (8)
The quantity W is an integer that accounts for the number of whole modulation intervals to the target. The method for finding this integer is discussed below. In some systems, there may be additional systematic errors that can be removed by appending additional terms to equation (8). For example, some systems experience an error that varies with distance as a sinusoid with a period equal to the modulation range RMOD- TO remove this type of error, it is necessary to use the ADM to measure targets at accurately known distances and observe the sinusoidal error pattern.
[0031] The compensator 422 sends the distance values to Kalman filter 424. The Kalman filter is a numerical algorithm applied to the distance data to give the best estimate of distance and speed of external retrorefiector 26 as a function of time and in the presence of noise. The ADM distance data is collected at high speed and has some level of random noise in the distance readings. This small error is greatly amplified in calculating speed, since small differences in distance are divided by a small increment in time. The Kalman filter can be thought of as an intelligent smoothing function that optimizes accuracy based on the noise of the system and the speed of the target.
[0032] The Kalman filter also serves to synchronize the ADM readings with the readings of the angular encoders and the position detector. The angular encoders and position detector latch their readings whenever they receive the sync pulse, which occurs at frequency fsmc- The frequency of the sync pulse is in general different than the frequency of calculation of the ADM. In an exemplary tracker, the ADM calculates at a rate of/ }p = 10 kHz, while the sync pulse has a frequency of 1.024 kHz. The Kalman filter provides synchronization of the ADM with the angular encoders and position detector by extrapolating the position forward in time to the next sync pulse.
[0033] There are five general equations that govern the behavior of the Kalman filter, hi general, the quantities in these equations are represented by matrices, whose dimensions are determined by the complexity of the implementation of the Kalman filter. The five general equations are
*« =* V (9)
Pm = Φ P Φ τ + Q , (10)
K (11) xp = xm +K(Z - Hx1n), (12)
Pp = (P1n '1 + H1R-1H)"1. (13)
[0034] In these equations, the subscript m represents an a priori estimate and the subscript^ represents an. a posteriori estimate. The quantity x is the state variable that may take a variety of forms. Because the exemplary ADM system measures at a high rate, a relatively simple state vector containing only two components - the position d and radial speed v — are needed:
Figure imgf000011_0001
The corresponding time propagation matrix, assuming unit time steps, is
Equation (9) then corresponds to the equations dm = dp + vp, which means that the estimated distance at the present point in time (dm) is equal to the estimated distance at the last point in time (dp) times the estimated speed at the last point in time (vp) times the time interval between the current and last points in time, which is assumed to equal one. The matrix Q is the process noise covariance. In the simple Kalman filter employed here, the acceleration is not explicitly calculated. Instead the acceleration is assumed to have a dispersion characterized by the variance σ A . The process-noise variance σ A is selected so as to minimize the error in the position of a moving target. The resulting covariance for the process noise is
Figure imgf000011_0002
Pm is the state covariance matrix at the present point in time. It is found from the state covariance matrix at the last point in time and the process noise covariance. The state covariance matrix and the measurement noise covariance R are used to determine the filter gain K. In the simple case considered here, the measurement noise covariance is just the variance σu ' in readings caused by noise in the measurement device. In this case, the measurement noise in the ADM system is determined by simply calculating the variance c ADM 2 in the distances reported while the ADM is measuring a stationary target. H is the measurement matrix, which is defined such that H times the state estimate x is equal to the estimated output, against which measured output, is compared. In the case considered here the measurements are of the distance d and so H = (1 0). [0035] Equation (12) is interpreted as follows. xm is the initial guess for the state vector (distance and radial speed) based on the distance and radial speed for the previous point in time. The quantity z is the measured distance d and Hxm is the estimated distance. The quantity z — Hxm is the difference between the measured and estimated distances. This difference is multiplied by the gain matrix K to provide an adjustment to the initial estimate xm for the state matrix. In other words, the best estimate for the distance is a value between the measured distance and the estimated distance. Equation (12) provides a mathematically sound method of selecting the best {a posteriori) estimate of the distance and radial speed. Equation (13) provides a new estimate for the state covariance Pp at the next point in time. Equations (9) - (13) are solved each time compensator function 422 sends a new measured value to the Kalman filter.
[0036] To synchronize the ADM measurement to the measurements of the angular encoders and position detector, counter 414 determines the difference in time between the sync pulse and the last state distance. It does this in the following way. Crystal oscillator 404 sends a low-frequency sine wave to frequency divider 452, located within microprocessor 450. This clock frequency is divided down to fsmc, me frequency of the sync pulse. The sync pulse is sent over device bus 72 to DSP 410, angular encoder electronics 74, and position- detector electronics 76. In an exemplary system, the oscillator sends a 32.768 kHz signal through frequency divider 452, which divides by 32 to produce a sync-pulse frequency fsmc = 1.024 kHz. The sync pulse is sent to counter 414, which resides within DSP 410. The counter is clocked by crystal 402, which drives a phase-locked loop (PLL) device 412 within the DSP. In the exemplary system, oscillator 402 has a frequency of 30 MHz and PLL 412 doubles this to produce a clock signal of 60 MHz to counter 414. The counter 414 determines the arrival of the sync pulse to a resolution of 1/60 MHz = 16.7 nanoseconds. The phase- extractor function 420 sends a signal to the counter when the ADC 322 has sent all the samples for one cycle. This resets counter 414 and begins a new count. The sync pulse stops the counting of counter 412. The total number of counts is divided by the frequency to determine the elapsed time. Since the time interval in the above equations was set to one, the normalized time interval t^om is the elapsed time divided by the time interval. The state distance XEXT extrapolated to the sync pulse event is
XEXT = Xk + Vk tNom. (17) The Kalman-fύter function 424 provides the result, which is the distance from the tracker to external retroreflector 26. The Kalman filter also provides the velocity to phase-extractor function 420 to apply in equations (2), (3), (5), and (6).
[0037] Previously the quantity W was introduced in equation (8) as an integer that accounts for the number of whole modulation intervals to the target. This integer value W is found by first measuring the distance to the external retroreflector 26. The frequencies/tF and fw are changed by a fixed amount and the distances are again measured. If the RF frequencies before and after the change are/; and /2 and the phase difference between the two measurements isp then the integer W is equal to the integer portion
Figure imgf000013_0001
This technique will work out to a range of (c/2«)/(/ -//). For example, if/} and /2 differ by 2.5 MHz, and if the/; is 2800 MHz, then the technique will work out to about 60 meters. If desired, a third frequency can be added to assist in determining the value of the integer W. Once W has been determined, it is not necessary to switch the frequencies again unless the beam is broken. If the ADM continues to measure the external retroreflector 26 without interruption, then it can easily keep track of the changes in the integer W.
[0038] It will be apparent to those skilled in the art that, while exemplary embodiments have been shown and described, various modifications and variations can be made to the apparatus and method of measuring a moving retroreflector with an absolute distance meter disclosed herein without departing from the spirit or scope of the invention. Accordingly, it is to be understood that the various embodiments have been described by way of illustration and not limitation.
What is claimed is:

Claims

1. A laser tracker device capable of absolute distance measurement without using an incremental interferometer and capable of scanning three dimensional coordinate positions of a moving external retroreflector or other moving target surfaces comprising: a source of laser light that is amplitude or intensity modulated and sent to and returned from the moving external retroreflector or other moving target surfaces to the laser tracker device along a measurement path; an opto-electronic component to convert the laser light returned from the retroflector or target surfaces along the measurement path into a first electrical signal; conditioning electronics for conditioning the first electrical signal to create a second electrical signal; digitizing electronics to produce digitized values of the second electrical signal; a digital signal processor for receiving the digitized values of the second electrical signal wherein the digital signal processor comprises at least a phase extractor module structured to execute a velocity dependant phase extractor function upon the digitized values and wherein the digital signal processor calculates an absolute distance d to the moving retroreflector or other target moving at a velocity v; and at least two angular encoders for determining coordinate angles to the retroreflector or other target surface wherein the data processor computes three dimensional coordinate positions of the retroreflector or other target based on at least the absolute distance d and the coordinate angles.
2. The laser tracker of claim 1 further comprising: a position detector for assisting in aiming the laser tracker by measuring the position of the returned laser light from the moving external retroreflector or other moving target surfaces.
3. The laser tracker of claim 1 further comprising: reference beam optical components for directing part of the laser light to the measurement path containing the moving external retroreflector or other moving target surfaces and part of the laser light to a separate reference path.
4. The laser tracker of claim 3 further comprising opto-electronic components to convert said laser light in said measurement path into an RF measurement signal and to convert said laser light in said reference path into an RF reference signal, where said RF measurement signal and said RF reference signal are electrical signals that retain modulation at a first frequency /RF , and further comprising additional conditioning electronics for conditioning the RF measurement signal to create an IF measurement signal and for conditioning the RF reference signal to create an IF reference signal.
5. The laser tracker of claim 4 further comprising additional and digitizing electronics to produce digitized values of said IF measurement signal and said IF reference signal at a third frequency /SAMP, which is a multiple of a second frequency fjp and wherein the data signal processor calculates the absolute distance d to the retroreflector or other moving target surface moving at velocity v in air having index of refraction n, speed in vacuum c, and integer ratio V =fsAMplfiF from said digitized values x/c of said IF measurement signal and said digitized values y^ of said IF reference signal using the following formulas,
RMOD = C Z(I rIfRp),
Figure imgf000015_0001
PM = tan"1 (a/b),
Figure imgf000015_0002
pR = tan"1 (g/h), d = do + RMOD [W+ (pM-piiyZπ], where do is a constant and W is an integer that accounts for the number of whole modulation lengths RMOD to said retroreflector.
6. The laser tracker of claim 1 further comprising: a beam-steering mechanism that directs the laser light sent out of the laser tracker; and a position detector that monitors the position of the laser light relative to a retrace point on the position detector and wherein the beam-steering mechanism adjusts the direction of the laser light according to position data from the position detector.
7. The laser tracker of claim 1 further comprising synchronization electronics which determine a timing of absolute distance measurements relative to an electrical synchronization signal.
8. The laser tracker of claim 7 wherein the digital signal processor processes a Kalman filter to synchronize the absolute distance measurements with position detector measurements from a position detector and angle measurements from the angular encoders and to provide an estimation of distance and speed of the moving external retrorefiector or other moving target surfaces as a function of time and in the presence of noise.
9. The laser tracker of claim 1 wherein the angular encoder, on each of two mechanical axes, measures an angle to the moving external retrorefiector or other moving target surfaces.
10. A laser device capable of one dimensional absolute distance measurement of a moving external retrorefiector or other moving target surfaces without using an incremental interferometer comprising: a source of laser light that is amplitude or intensity modulated and sent to and returned from the moving external retrorefiector or other moving target surfaces to the laser device along a measurement path; an opto-electronic component to convert the laser light returned from the retroflector or target surfaces along the measurement path into an electrical signal; digitizing electronics to produce digitized values of the electrical signal; a digital signal processor for receiving the digitized values of the electrical signal wherein the digital signal processor comprises at least a phase extractor module structured to execute a velocity dependant phase extractor function upon the digitized values and wherein the digital signal processor calculates an absolute distance d to the moving retroreflector or other target moving at a velocity v.
11. The laser device of claim 10 further comprising: a position detector for assisting in aiming the laser tracker by measuring the position of the returned laser light from the moving external retroreflector or other moving target surfaces.
12. The laser device of claim 11 further comprising: reference beam optical components for directing part of the laser light to the measurement path containing the moving external retroreflector or other moving target surfaces and part of the laser light to a separate reference path.
13. The laser device of claim 12 further comprising opto-electronic components to convert said laser light in said measurement path into an RF measurement signal and to convert said laser light in said reference path into an RF reference signal, where said RF measurement signal and said RF reference signal are electrical signals that retain modulation at a first frequency^ ; and further comprising additional conditioning electronics for conditioning the RF measurement signal to create an IF measurement signal and for conditioning the RF reference signal to create an IF reference signal.
14. The laser device of claim 13 further comprising additional digitizing electronics to produce digitized values of said IF measurement signal and IF reference signal at a third frequency /SAMP, which is a multiple of second frequency fjp and wherein the data processor calculates the absolute distance d to the retroreflector or other moving target surface moving at velocity v in air having index of refraction n, speed in vacuum c, and integer ratio V -fsAMplfw from said digitized values x/c of said IF measurement signal and said digitized values yu of said IF reference signal using the following formulas,
Figure imgf000018_0001
PM = tan l(a/b),
Figure imgf000018_0002
where do is a constant and W is an integer that accounts for the number of whole modulation lengths RMOD to said retroreflector.
15. The laser device of claim 10 further comprising: a beam-steering mechanism that directs the laser light sent out of the laser tracker; and a position detector that monitors the position of the laser light relative to a retrace point on the position detector and wherein the beam-steering mechanism adjusts the direction of the laser light according to position data from the position detector.
16. The laser device of claim 10 further comprising synchronization electronics which determine a timing of absolute distance measurements relative to an electrical synchronization signal.
17. The laser device of claim 16 wherein the digital signal processor processes a Kalman filter to synchronize the absolute distance measurements with position detector measurements from a position detector and to provide an estimation of distance and speed of the moving external retroreflector or other moving target surfaces as a function of time and in the presence of noise.
18. A laser tracker device capable of absolute distance measurement without using an incremental interferometer and capable of scanning three dimensional coordinate positions of a moving external retroreflector or other moving target surfaces comprising: a source of laser light that is amplitude or intensity modulated and sent to and returned from the moving external retroreflector or other moving target surfaces to the laser tracker device along a measurement path; an opto-electronic component to convert the laser light returned from the retroflector or target surfaces along the measurement path into a first electrical signal; conditioning electronics for conditioning the first electrical signal to create a second electrical signal; digitizing electronics to produce digitized values of the second electrical signal; a digital signal processor for receiving the digitized values of the second electrical signal wherein the digital signal processor wherein calculates an absolute distance d to the moving retroreflector or other target moving at a velocity v; at least two angular encoders for determining coordinate angles to the retroreflector or other target surface wherein the data processor computes three dimensional coordinate positions of the retroreflector or other target based on at least the absolute distance d and the coordinate angles; a position detector; and wherein the digital signal processor processes a Kalman filter to synchronize the absolute distance d measurements with position detector measurements from the position detector and to provide an estimation of distance and speed of the moving external retroreflector or other moving target surfaces as a function of time and in the presence of noise.
19. A laser device capable of one dimensional absolute distance measurement of a moving external retroreflector or other moving target surfaces without using an incremental interferometer comprising: a source of laser light that is amplitude or intensity modulated and sent to and returned from the moving external retroreflector or other moving target surfaces to the laser device along a measurement path; an opto-electronic component to convert the laser light returned from the retroflector or target surfaces along the measurement path into an electrical signal; digitizing electronics to produce digitized values of the electrical signal; a position detector; a digital signal processor for receiving the digitized values of the electrical signal wherein the digital signal processor calculates an absolute distance d to the moving retroreflector or other target moving at a velocity v and wherein the digital signal processor during the calculation also processes a Kalman filter to synchronize the absolute distance d measurements with position detector measurements from the position detector and to provide an estimation of distance and speed of the moving external retroreflector or other moving target surfaces as a function of time and in the presence of noise.
20. A method capable of one dimensional absolute distance measurement of a moving external retroreflector or other moving target surfaces without using an incremental interferometer comprising: sending and returning a source of laser light that is amplitude or intensity modulated and sent to and returned from the moving external retroreflector or other moving target surfaces to the laser device along a measurement path; converting the laser light returned from the retroflector or target surfaces along the measurement path into an electrical signal; digitizing values of the electrical signal; receiving the digitized values of the electrical signal; executing a velocity dependant phase extractor function upon the digitized values; and calculating an absolute distance d to the moving retroreflector or other target moving at a velocity v.
21. A laser tracker method capable of absolute distance measurement without using an incremental interferometer and capable of scanning three dimensional coordinate positions of a moving external retroreflector or other moving target surfaces comprising: sending and returning a source of laser light that is amplitude or intensity modulated and sent to and returned from the moving external retroreflector or other moving target surfaces to the laser tracker device along a measurement path; converting the laser light returned from the retroflector or target surfaces along the measurement path into a first electrical signal; conditioning the first electrical signal to create a second electrical signal; producing digitized values of the second electrical signal; receiving the digitized values of the second electrical signal and executing a velocity dependant phase extractor function upon the digitized values; calculating an absolute distance d to the moving retroreflector or other target moving at a velocity v; and determining coordinate angles to the retroreflector or other target surface; and computing three dimensional coordinate positions of the retroreflector or other target based on at least the absolute distance d and the coordinate angles.
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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007309677A (en) * 2006-05-16 2007-11-29 Mitsutoyo Corp Method of estimating absolute distance in tracking laser interferometer, and tracking laser interferometer
WO2008121919A1 (en) * 2007-03-30 2008-10-09 Faro Technologies, Inc. Absolute distance meter
US8902408B2 (en) 2011-02-14 2014-12-02 Faro Technologies Inc. Laser tracker used with six degree-of-freedom probe having separable spherical retroreflector
US9007601B2 (en) 2010-04-21 2015-04-14 Faro Technologies, Inc. Automatic measurement of dimensional data with a laser tracker
US9164173B2 (en) 2011-04-15 2015-10-20 Faro Technologies, Inc. Laser tracker that uses a fiber-optic coupler and an achromatic launch to align and collimate two wavelengths of light
US9377885B2 (en) 2010-04-21 2016-06-28 Faro Technologies, Inc. Method and apparatus for locking onto a retroreflector with a laser tracker
US9395174B2 (en) 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit
US9400170B2 (en) 2010-04-21 2016-07-26 Faro Technologies, Inc. Automatic measurement of dimensional data within an acceptance region by a laser tracker
US9448059B2 (en) 2011-04-15 2016-09-20 Faro Technologies, Inc. Three-dimensional scanner with external tactical probe and illuminated guidance
US9482755B2 (en) 2008-11-17 2016-11-01 Faro Technologies, Inc. Measurement system having air temperature compensation between a target and a laser tracker
US9638507B2 (en) 2012-01-27 2017-05-02 Faro Technologies, Inc. Measurement machine utilizing a barcode to identify an inspection plan for an object
US9686532B2 (en) 2011-04-15 2017-06-20 Faro Technologies, Inc. System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices
US9772394B2 (en) 2010-04-21 2017-09-26 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US10302413B2 (en) 2011-04-15 2019-05-28 Faro Technologies, Inc. Six degree-of-freedom laser tracker that cooperates with a remote sensor
DE102010038955B4 (en) 2009-08-07 2019-08-01 Faro Technologies, Inc. Absolute distance measuring device with optical switch

Families Citing this family (117)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7583375B2 (en) * 2003-09-05 2009-09-01 Faro Technologies, Inc. Self-compensating laser tracker
EP2405284B1 (en) * 2003-09-05 2014-03-05 Faro Technologies, Inc. Self-compensating laser tracker
DE202006005643U1 (en) * 2006-03-31 2006-07-06 Faro Technologies Inc., Lake Mary Device for three-dimensional detection of a spatial area
DE102006031580A1 (en) 2006-07-03 2008-01-17 Faro Technologies, Inc., Lake Mary Method and device for the three-dimensional detection of a spatial area
GB0706821D0 (en) * 2007-04-10 2007-05-16 Renishaw Plc Rotation detection kit
DE102007061384A1 (en) 2007-12-19 2009-06-25 Robert Bosch Gmbh Distance measuring device as well as system
KR20110009658A (en) * 2008-03-21 2011-01-28 배리에이션 리덕션 솔루션즈, 아이앤씨. External system for robotic accuracy enhancement
US7908757B2 (en) 2008-10-16 2011-03-22 Hexagon Metrology, Inc. Articulating measuring arm with laser scanner
DE112009005524B3 (en) * 2008-11-17 2018-01-25 Faro Technologies, Inc. Apparatus and method for measuring six degrees of freedom
US7895015B2 (en) * 2008-12-04 2011-02-22 Parker David H Method for measuring the structural health of a civil structure
US10203268B2 (en) 2008-12-04 2019-02-12 Laura P. Solliday Methods for measuring and modeling the process of prestressing concrete during tensioning/detensioning based on electronic distance measurements
US9354043B2 (en) 2008-12-04 2016-05-31 Laura P. Solliday Methods for measuring and modeling the structural health of pressure vessels based on electronic distance measurements
US7856334B2 (en) * 2008-12-06 2010-12-21 Parker David H Method for calibrating a laser-based spherical coordinate measurement system by a mechanical harmonic oscillator
DE102009010465B3 (en) * 2009-02-13 2010-05-27 Faro Technologies, Inc., Lake Mary laser scanner
DE102009015920B4 (en) 2009-03-25 2014-11-20 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US9551575B2 (en) 2009-03-25 2017-01-24 Faro Technologies, Inc. Laser scanner having a multi-color light source and real-time color receiver
DE102009035336B3 (en) 2009-07-22 2010-11-18 Faro Technologies, Inc., Lake Mary Device for optical scanning and measuring of environment, has optical measuring device for collection of ways as ensemble between different centers returning from laser scanner
DE102009035337A1 (en) 2009-07-22 2011-01-27 Faro Technologies, Inc., Lake Mary Method for optically scanning and measuring an object
US20110069322A1 (en) * 2009-09-21 2011-03-24 Faro Technologies, Inc. Laser pointing mechanism
US8112896B2 (en) * 2009-11-06 2012-02-14 Hexagon Metrology Ab Articulated arm
DE102009055989B4 (en) 2009-11-20 2017-02-16 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US9210288B2 (en) 2009-11-20 2015-12-08 Faro Technologies, Inc. Three-dimensional scanner with dichroic beam splitters to capture a variety of signals
DE102009057101A1 (en) 2009-11-20 2011-05-26 Faro Technologies, Inc., Lake Mary Device for optically scanning and measuring an environment
DE102009055988B3 (en) 2009-11-20 2011-03-17 Faro Technologies, Inc., Lake Mary Device, particularly laser scanner, for optical scanning and measuring surrounding area, has light transmitter that transmits transmission light ray by rotor mirror
US9529083B2 (en) 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
US9113023B2 (en) 2009-11-20 2015-08-18 Faro Technologies, Inc. Three-dimensional scanner with spectroscopic energy detector
US8630314B2 (en) 2010-01-11 2014-01-14 Faro Technologies, Inc. Method and apparatus for synchronizing measurements taken by multiple metrology devices
WO2011112277A1 (en) * 2010-01-18 2011-09-15 Faro Technologies, Inc. Retroreflector probe adaptor for tracking hidden points
US8875409B2 (en) 2010-01-20 2014-11-04 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US8898919B2 (en) 2010-01-20 2014-12-02 Faro Technologies, Inc. Coordinate measurement machine with distance meter used to establish frame of reference
US9163922B2 (en) 2010-01-20 2015-10-20 Faro Technologies, Inc. Coordinate measurement machine with distance meter and camera to determine dimensions within camera images
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US8615893B2 (en) 2010-01-20 2013-12-31 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine having integrated software controls
CN102771079A (en) 2010-01-20 2012-11-07 法罗技术股份有限公司 Portable articulated arm coordinate measuring machine with multiple communication channels
US8677643B2 (en) 2010-01-20 2014-03-25 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US9879976B2 (en) 2010-01-20 2018-01-30 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
WO2011090892A2 (en) 2010-01-20 2011-07-28 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US8284407B2 (en) 2010-01-20 2012-10-09 Faro Technologies, Inc. Coordinate measuring machine having an illuminated probe end and method of operation
US8832954B2 (en) 2010-01-20 2014-09-16 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US8537371B2 (en) * 2010-04-21 2013-09-17 Faro Technologies, Inc. Method and apparatus for using gestures to control a laser tracker
US8422034B2 (en) * 2010-04-21 2013-04-16 Faro Technologies, Inc. Method and apparatus for using gestures to control a laser tracker
US8724119B2 (en) 2010-04-21 2014-05-13 Faro Technologies, Inc. Method for using a handheld appliance to select, lock onto, and track a retroreflector with a laser tracker
DE102010020925B4 (en) 2010-05-10 2014-02-27 Faro Technologies, Inc. Method for optically scanning and measuring an environment
DE102010032725B4 (en) 2010-07-26 2012-04-26 Faro Technologies, Inc. Device for optically scanning and measuring an environment
DE102010032726B3 (en) 2010-07-26 2011-11-24 Faro Technologies, Inc. Device for optically scanning and measuring an environment
DE102010032723B3 (en) 2010-07-26 2011-11-24 Faro Technologies, Inc. Device for optically scanning and measuring an environment
DE102010033561B3 (en) 2010-07-29 2011-12-15 Faro Technologies, Inc. Device for optically scanning and measuring an environment
CN103003713B (en) 2010-09-08 2015-04-01 法罗技术股份有限公司 A laser scanner or laser tracker having a projector
US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
GB2518544A (en) 2011-03-03 2015-03-25 Faro Tech Inc Target apparatus and method
USD688577S1 (en) 2012-02-21 2013-08-27 Faro Technologies, Inc. Laser tracker
US9482529B2 (en) 2011-04-15 2016-11-01 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
US9121701B2 (en) 2011-08-23 2015-09-01 Bae Systems Information And Electronic Systems Integration Inc. Fiber optically coupled laser rangefinder for use in a gimbal systems
US9222771B2 (en) 2011-10-17 2015-12-29 Kla-Tencor Corp. Acquisition of information for a construction site
US9008999B2 (en) * 2011-10-27 2015-04-14 Toyota Motor Engineering & Manufacturing North America, Inc. Steering wheel airbag position detector
US9822956B2 (en) * 2012-01-05 2017-11-21 Cast Group Of Companies Inc. System and method for calibrating a fixture configured to rotate and/or translate
DE102012100609A1 (en) 2012-01-25 2013-07-25 Faro Technologies, Inc. Device for optically scanning and measuring an environment
JP5797346B2 (en) * 2012-01-30 2015-10-21 ファロ テクノロジーズ インコーポレーテッド Laser tracker shared with a 6-DOF probe having a separable spherical reflector
JP6198154B2 (en) * 2012-03-29 2017-09-20 ザ セクレタリー オブ ステイト フォー ビジネス イノベーション アンド スキルズ Measuring device, system and method
GB201205563D0 (en) * 2012-03-29 2012-05-09 Sec Dep For Business Innovation & Skills The Coordinate measurement system and method
US9482525B2 (en) 2012-05-16 2016-11-01 Faro Technologies, Inc. Apparatus to compensate bearing runout in a three-dimensional coordinate measuring system
US9423282B2 (en) 2014-06-12 2016-08-23 Faro Technologies, Inc. Metrology device and a method for compensating for bearing runout error
US9075025B2 (en) 2012-05-16 2015-07-07 Faro Technologies, Inc. Apparatus and method to compensate bearing runout in laser tracker
US9488476B2 (en) 2014-02-06 2016-11-08 Faro Technologies, Inc. Apparatus and method to compensate bearing runout in an articulated arm coordinate measurement machine
US9746304B2 (en) 2012-05-16 2017-08-29 Faro Technologies, Inc. Apparatus and method to compensate bearing runout in an articulated arm coordinate measurement machine
WO2013188025A1 (en) 2012-06-15 2013-12-19 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
DE102012107544B3 (en) 2012-08-17 2013-05-23 Faro Technologies, Inc. Optical scanning device i.e. laser scanner, for evaluating environment, has planetary gears driven by motor over vertical motor shaft and rotating measuring head relative to foot, where motor shaft is arranged coaxial to vertical axle
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
DE102012109481A1 (en) 2012-10-05 2014-04-10 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
EP2770339B1 (en) * 2013-02-26 2019-11-27 Hexagon Technology Center GmbH Sensor synchronisation method and corresponding sensor measuring system
EP2789972B1 (en) * 2013-04-12 2017-08-16 Hexagon Technology Center GmbH Measuring device with deformable optical element
US9234742B2 (en) 2013-05-01 2016-01-12 Faro Technologies, Inc. Method and apparatus for using gestures to control a laser tracker
US9772173B2 (en) 2013-06-27 2017-09-26 Faro Technologies, Inc. Method for measuring 3D coordinates of a surface with a portable articulated arm coordinate measuring machine having a camera
US9476695B2 (en) * 2013-07-03 2016-10-25 Faro Technologies, Inc. Laser tracker that cooperates with a remote camera bar and coordinate measurement device
GB201313751D0 (en) 2013-08-01 2013-09-18 Renishaw Plc Rotation Detection Apparatus
CN103591891B (en) * 2013-11-20 2015-04-29 天津大学 Fine control field precision source-tracing method for indoor space measuring and locating system
US9347767B2 (en) 2013-12-11 2016-05-24 Faro Technologies, Inc. Spherically mounted retroreflector and method to minimize measurement error
US9423492B2 (en) 2013-12-11 2016-08-23 Faro Technologies, Inc. Method for finding a home reference distance using a spherically mounted retroreflector
US9121689B2 (en) * 2013-12-11 2015-09-01 Faro Technologies, Inc. Method for correcting a spherically mounted retroreflector when resetting a distance meter
US8947678B2 (en) * 2013-12-11 2015-02-03 Faro Technologies, Inc. Method for correcting three-dimensional measurements of a spherically mounted retroreflector
US9074869B2 (en) 2013-12-11 2015-07-07 Faro Technologies, Inc. Method for measuring 3D coordinates of a spherically mounted retroreflector from multiple stations
US9239238B2 (en) 2013-12-11 2016-01-19 Faro Technologies, Inc. Method for correcting a 3D measurement of a spherically mounted retroreflector on a nest
US9329028B2 (en) 2013-12-11 2016-05-03 Faro Technologies, Inc. Spherically mounted retroreflector having an embedded temperature sensor and socket
JP6253973B2 (en) * 2013-12-27 2017-12-27 株式会社トプコン Surveying equipment
JP2015184279A (en) 2014-03-24 2015-10-22 ファロ テクノロジーズ インコーポレーテッド Coordinate measurement machine with distance meter used to establish frame of reference
US9402070B2 (en) 2014-06-12 2016-07-26 Faro Technologies, Inc. Coordinate measuring device with a six degree-of-freedom handheld probe and integrated camera for augmented reality
US10021379B2 (en) 2014-06-12 2018-07-10 Faro Technologies, Inc. Six degree-of-freedom triangulation scanner and camera for augmented reality
US20150377604A1 (en) 2014-06-27 2015-12-31 Faro Technologies, Inc. Zoom camera assembly having integrated illuminator
US9454818B2 (en) 2014-06-27 2016-09-27 Faro Technologies, Inc. Method for measuring three orientational degrees of freedom of a cube-corner retroreflector
US10036627B2 (en) 2014-09-19 2018-07-31 Hexagon Metrology, Inc. Multi-mode portable coordinate measuring machine
US10176625B2 (en) 2014-09-25 2019-01-08 Faro Technologies, Inc. Augmented reality camera for use with 3D metrology equipment in forming 3D images from 2D camera images
WO2016073208A1 (en) 2014-11-03 2016-05-12 Faro Technologies, Inc. Method and apparatus for locking onto a retroreflector with a laser tracker
WO2016081235A1 (en) 2014-11-20 2016-05-26 Faro Technologies, Inc. Coordinate measurement machine with distance meter and camera to determine dimensions within camera images
EP3032277B1 (en) 2014-12-12 2021-04-07 Leica Geosystems AG Laser tracker
US9506744B2 (en) 2014-12-16 2016-11-29 Faro Technologies, Inc. Triangulation scanner and camera for augmented reality
DE102016107312A1 (en) 2015-04-28 2016-11-03 Faro Technologies Inc. Combined scanner and tracker with a focusing mechanism
US20160356889A1 (en) * 2015-06-05 2016-12-08 Magenium Solutions LLC Laser Measuring System and Method
US9903934B2 (en) 2015-06-30 2018-02-27 Faro Technologies, Inc. Apparatus and method of measuring six degrees of freedom
US10082521B2 (en) 2015-06-30 2018-09-25 Faro Technologies, Inc. System for measuring six degrees of freedom
US20180283851A1 (en) * 2015-09-01 2018-10-04 The University Of Tokyo Motion detection device and three-dimensional shape measurement device using same
DE102015122844A1 (en) 2015-12-27 2017-06-29 Faro Technologies, Inc. 3D measuring device with battery pack
US10145671B2 (en) 2016-03-31 2018-12-04 Topcon Positioning Systems, Inc. Three dimensional laser measuring system and method
US10690756B2 (en) 2016-05-10 2020-06-23 Texas Instruments Incorporated Methods and apparatus for LIDAR operation with pulse position modulation
US10908287B2 (en) * 2016-05-10 2021-02-02 Texas Instruments Incorporated Methods and apparatus for LIDAR operation with narrowband intensity modulation
US10613204B2 (en) 2016-05-10 2020-04-07 Texas Instruments Incorporated Methods and apparatus for lidar operation with sequencing of pulses
US10107650B2 (en) 2016-06-15 2018-10-23 The Boeing Company Systems and methods for measuring angular position of a laser beam emitter
US11221411B2 (en) 2016-07-18 2022-01-11 Texas Instruments Incorporated Power efficient LIDAR
US20180095174A1 (en) 2016-09-30 2018-04-05 Faro Technologies, Inc. Three-dimensional coordinate measuring device
DE102017131102A1 (en) 2016-12-29 2018-07-05 Faro Technologies, Inc. SYSTEM FOR MEASURING SIX FREEDOM LEVELS
US10458783B2 (en) 2017-10-13 2019-10-29 Faro Technologies, Inc. Three-dimensional scanner having pixel memory
CN108801268B (en) * 2018-06-27 2021-03-05 广州视源电子科技股份有限公司 Target object positioning method and device and robot
US11054546B2 (en) 2018-07-16 2021-07-06 Faro Technologies, Inc. Laser scanner with enhanced dymanic range imaging
US11624606B2 (en) * 2020-02-20 2023-04-11 Cognex Corporation Methods and apparatus for using range data to predict object features
JP7483432B2 (en) * 2020-03-19 2024-05-15 京セラ株式会社 Scanning and ranging devices

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4714339A (en) * 1986-02-28 1987-12-22 The United States Of America As Represented By The Secretary Of Commerce Three and five axis laser tracking systems
EP0271188A1 (en) * 1986-10-20 1988-06-15 Charles P. Wang Laser doppler displacement measuring apparatus
US4790651A (en) * 1987-09-30 1988-12-13 Chesapeake Laser Systems, Inc. Tracking laser interferometer
US5455670A (en) * 1993-05-27 1995-10-03 Associated Universities, Inc. Optical electronic distance measuring apparatus with movable mirror
US5764360A (en) 1995-11-15 1998-06-09 Leica Ag Electro-optical measuring device for absolute distances
EP1298454A2 (en) * 2001-09-28 2003-04-02 IBEO Automobile Sensor GmbH Method for recognising and tracking objects
WO2003062744A1 (en) 2002-01-16 2003-07-31 Faro Technologies, Inc. Laser-based coordinate measuring device and laser-based method for measuring coordinates
US20040100626A1 (en) * 2000-08-11 2004-05-27 Peter Gulden Method and device for operating a pmd system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3690767A (en) * 1970-10-01 1972-09-12 Systron Donner Corp Optical tanker-docking system
US4168524A (en) * 1977-09-29 1979-09-18 The Charles Stark Draper Laboratory, Inc. Airborne surveying apparatus and method
AU6455880A (en) * 1979-12-07 1981-06-11 Hewlett-Packard Company Velocity corrected range system
JPS5681467A (en) * 1979-12-07 1981-07-03 Hiroshi Takasaki Measuring device for distance of two frequency- perpendicularly polarized lights
JP2954871B2 (en) * 1996-03-25 1999-09-27 株式会社先進材料利用ガスジェネレータ研究所 Optical fiber sensor
ATE491961T1 (en) * 2001-04-10 2011-01-15 Faro Tech Inc CHOPPER STABILIZED ABSOLUTE DISTANCE MEASUREMENT DEVICE

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4714339A (en) * 1986-02-28 1987-12-22 The United States Of America As Represented By The Secretary Of Commerce Three and five axis laser tracking systems
US4714339B1 (en) * 1986-02-28 1997-03-18 Us Army Three and five axis laser tracking systems
US4714339B2 (en) * 1986-02-28 2000-05-23 Us Commerce Three and five axis laser tracking systems
EP0271188A1 (en) * 1986-10-20 1988-06-15 Charles P. Wang Laser doppler displacement measuring apparatus
US4790651A (en) * 1987-09-30 1988-12-13 Chesapeake Laser Systems, Inc. Tracking laser interferometer
US5455670A (en) * 1993-05-27 1995-10-03 Associated Universities, Inc. Optical electronic distance measuring apparatus with movable mirror
US5764360A (en) 1995-11-15 1998-06-09 Leica Ag Electro-optical measuring device for absolute distances
US20040100626A1 (en) * 2000-08-11 2004-05-27 Peter Gulden Method and device for operating a pmd system
EP1298454A2 (en) * 2001-09-28 2003-04-02 IBEO Automobile Sensor GmbH Method for recognising and tracking objects
WO2003062744A1 (en) 2002-01-16 2003-07-31 Faro Technologies, Inc. Laser-based coordinate measuring device and laser-based method for measuring coordinates

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007309677A (en) * 2006-05-16 2007-11-29 Mitsutoyo Corp Method of estimating absolute distance in tracking laser interferometer, and tracking laser interferometer
WO2008121919A1 (en) * 2007-03-30 2008-10-09 Faro Technologies, Inc. Absolute distance meter
US9482755B2 (en) 2008-11-17 2016-11-01 Faro Technologies, Inc. Measurement system having air temperature compensation between a target and a laser tracker
DE102010038955B4 (en) 2009-08-07 2019-08-01 Faro Technologies, Inc. Absolute distance measuring device with optical switch
US9007601B2 (en) 2010-04-21 2015-04-14 Faro Technologies, Inc. Automatic measurement of dimensional data with a laser tracker
US9146094B2 (en) 2010-04-21 2015-09-29 Faro Technologies, Inc. Automatic measurement of dimensional data with a laser tracker
US10480929B2 (en) 2010-04-21 2019-11-19 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US9377885B2 (en) 2010-04-21 2016-06-28 Faro Technologies, Inc. Method and apparatus for locking onto a retroreflector with a laser tracker
US9400170B2 (en) 2010-04-21 2016-07-26 Faro Technologies, Inc. Automatic measurement of dimensional data within an acceptance region by a laser tracker
US10209059B2 (en) 2010-04-21 2019-02-19 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US9772394B2 (en) 2010-04-21 2017-09-26 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US8902408B2 (en) 2011-02-14 2014-12-02 Faro Technologies Inc. Laser tracker used with six degree-of-freedom probe having separable spherical retroreflector
US9453717B2 (en) 2011-04-15 2016-09-27 Faro Technologies, Inc. Diagnosing multipath interference and eliminating multipath interference in 3D scanners using projection patterns
US9494412B2 (en) 2011-04-15 2016-11-15 Faro Technologies, Inc. Diagnosing multipath interference and eliminating multipath interference in 3D scanners using automated repositioning
US9686532B2 (en) 2011-04-15 2017-06-20 Faro Technologies, Inc. System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices
US9448059B2 (en) 2011-04-15 2016-09-20 Faro Technologies, Inc. Three-dimensional scanner with external tactical probe and illuminated guidance
US10267619B2 (en) 2011-04-15 2019-04-23 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
US10302413B2 (en) 2011-04-15 2019-05-28 Faro Technologies, Inc. Six degree-of-freedom laser tracker that cooperates with a remote sensor
US9164173B2 (en) 2011-04-15 2015-10-20 Faro Technologies, Inc. Laser tracker that uses a fiber-optic coupler and an achromatic launch to align and collimate two wavelengths of light
US10578423B2 (en) 2011-04-15 2020-03-03 Faro Technologies, Inc. Diagnosing multipath interference and eliminating multipath interference in 3D scanners using projection patterns
US9638507B2 (en) 2012-01-27 2017-05-02 Faro Technologies, Inc. Measurement machine utilizing a barcode to identify an inspection plan for an object
US9482514B2 (en) 2013-03-15 2016-11-01 Faro Technologies, Inc. Diagnosing multipath interference and eliminating multipath interference in 3D scanners by directed probing
US9395174B2 (en) 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit

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US20090066932A1 (en) 2009-03-12

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