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WO2006020702A3 - Micro-discharge sensor system - Google Patents

Micro-discharge sensor system

Info

Publication number
WO2006020702A3
WO2006020702A3 PCT/US2005/028406 US2005028406W WO2006020702A3 WO 2006020702 A3 WO2006020702 A3 WO 2006020702A3 US 2005028406 W US2005028406 W US 2005028406W WO 2006020702 A3 WO2006020702 A3 WO 2006020702A3
Authority
WO
Grant status
Application
Patent type
Prior art keywords
discharge
gap
waveguide
optical
electrodes
Prior art date
Application number
PCT/US2005/028406
Other languages
French (fr)
Other versions
WO2006020702A2 (en )
Inventor
Ulrich Bonne
Brian C Krafthefer
Stephen R Shiffer
Original Assignee
Honeywell Int Inc
Ulrich Bonne
Brian C Krafthefer
Stephen R Shiffer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/67Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by the preceding groups
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036Specially adapted to detect a particular component
    • G01N33/0037Specially adapted to detect a particular component for NOx
    • Y02A50/245

Abstract

A micro plasma sensor system having a glow discharge gap formed by electrodes (53). A fluid to be sensed may be brought into the vicinity of a discharge (56) at the gap. Light from the discharge may be coupled to a spectrum analyzer and/or processor (24) for determining properties of the fluid. A coupling may include a waveguide (63) proximate to the discharge gap. Window cleanliness and electrode electrical isolation may be maintained by the discharge. The optical analyzer may have filters (22) for one or more optical channels to detectors (23). The detectors may output electrical signals to be processed. The electrodes (53) have the ligth waveguide (63) between them. Or the electrodes (53) is formed concentrically around the light waveguide (63) forming an annular discharge gap whit the other electrode. The waveguide (63) may be one or more optical fibers.
PCT/US2005/028406 2003-12-31 2005-08-10 Micro-discharge sensor system WO2006020702A3 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US10915577 US20050142035A1 (en) 2003-12-31 2004-08-10 Micro-discharge sensor system
US10/915,577 2004-08-10

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007525759A JP2008510143A (en) 2004-08-10 2005-08-10 Micro discharge sensor system
EP20050784981 EP1776579A2 (en) 2004-08-10 2005-08-10 Micro-discharge sensor system

Publications (2)

Publication Number Publication Date
WO2006020702A2 true WO2006020702A2 (en) 2006-02-23
WO2006020702A3 true true WO2006020702A3 (en) 2006-06-29

Family

ID=35355415

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/028406 WO2006020702A3 (en) 2003-12-31 2005-08-10 Micro-discharge sensor system

Country Status (3)

Country Link
EP (1) EP1776579A2 (en)
JP (1) JP2008510143A (en)
WO (1) WO2006020702A3 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006047047B4 (en) * 2006-10-05 2009-04-16 Gesellschaft zur Förderung der Analytischen Wissenschaften e.V. Plasma generator for spectroscopic gas analysis
US7733482B2 (en) * 2007-03-26 2010-06-08 Ruda Harry E System and method for determining at least one constituent in an ambient gas using a microsystem gas sensor
KR101388539B1 (en) 2008-02-12 2014-04-23 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. Color detector
US8319969B2 (en) 2008-02-13 2012-11-27 Hewlett-Packard Development Company, L.P. Color detector having area scaled photodetectors
DE102009057130A1 (en) 2009-12-08 2011-06-09 Heinrich-Heine-Universität Düsseldorf A method for analyzing the composition of gas mixtures
JPWO2017033708A1 (en) * 2015-08-27 2017-08-24 オリンパス株式会社 Inspection apparatus and inspection system
DE102016200517A1 (en) * 2016-01-18 2017-07-20 Robert Bosch Gmbh Microelectronic component arrangement and corresponding method of manufacturing a microelectronic device assembly

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5085499A (en) * 1988-09-02 1992-02-04 Battelle Memorial Institute Fiber optics spectrochemical emission sensors
US5333487A (en) * 1991-11-15 1994-08-02 Hughes Aircraft Company Spark-excited fluorescence sensor
US5353113A (en) * 1993-07-15 1994-10-04 Cetac Technologies Incorporated Single and multiple radiation transparent afterglow electric discharge detector systems
US20030103205A1 (en) * 2001-11-30 2003-06-05 Gianchandani Yogesh B. Method and apparatus for glow discharges with liquid microelectrodes
US20050142035A1 (en) * 2003-12-31 2005-06-30 Ulrich Bonne Micro-discharge sensor system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5085499A (en) * 1988-09-02 1992-02-04 Battelle Memorial Institute Fiber optics spectrochemical emission sensors
US5333487A (en) * 1991-11-15 1994-08-02 Hughes Aircraft Company Spark-excited fluorescence sensor
US5353113A (en) * 1993-07-15 1994-10-04 Cetac Technologies Incorporated Single and multiple radiation transparent afterglow electric discharge detector systems
US20030103205A1 (en) * 2001-11-30 2003-06-05 Gianchandani Yogesh B. Method and apparatus for glow discharges with liquid microelectrodes
US20050142035A1 (en) * 2003-12-31 2005-06-30 Ulrich Bonne Micro-discharge sensor system

Also Published As

Publication number Publication date Type
EP1776579A2 (en) 2007-04-25 application
WO2006020702A2 (en) 2006-02-23 application
JP2008510143A (en) 2008-04-03 application

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