WO2006013387A3 - The use of surface measurement probes - Google Patents

The use of surface measurement probes Download PDF

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Publication number
WO2006013387A3
WO2006013387A3 PCT/GB2005/003095 GB2005003095W WO2006013387A3 WO 2006013387 A3 WO2006013387 A3 WO 2006013387A3 GB 2005003095 W GB2005003095 W GB 2005003095W WO 2006013387 A3 WO2006013387 A3 WO 2006013387A3
Authority
WO
WIPO (PCT)
Prior art keywords
artefact
probe
measurements
surface measurement
measurement probes
Prior art date
Application number
PCT/GB2005/003095
Other languages
French (fr)
Other versions
WO2006013387A9 (en
WO2006013387A2 (en
Inventor
Kevyn Barry Jonas
Geoffrey Mcfarland
Original Assignee
Renishaw Plc
Kevyn Barry Jonas
Geoffrey Mcfarland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32982635&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2006013387(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Renishaw Plc, Kevyn Barry Jonas, Geoffrey Mcfarland filed Critical Renishaw Plc
Priority to DE602005005839.7T priority Critical patent/DE602005005839T3/en
Priority to EP05772904.8A priority patent/EP1792139B2/en
Priority to US11/658,162 priority patent/US7526873B2/en
Priority to JP2007524401A priority patent/JP2008509386A/en
Publication of WO2006013387A2 publication Critical patent/WO2006013387A2/en
Publication of WO2006013387A3 publication Critical patent/WO2006013387A3/en
Publication of WO2006013387A9 publication Critical patent/WO2006013387A9/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045Correction of measurements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pens And Brushes (AREA)
  • Prostheses (AREA)
  • Dental Preparations (AREA)

Abstract

A method of measuring an artefact using a machine on which a measuring probe is mounted. The method has the following steps: determining the approximate position of one or more points on the surface of the artefact; using this approximate position to drive at least one of the probe and artefact to one or more desired relative positions of the probe and the surface and taking one or more surface measurements of said point on the surface of the artefact at said location, wherein there is no relative movement between the probe and the artefact whilst the one or more surface measurements are taken; and using data from the measurements to determine a position of the one or more points on the surface in which dynamic error is substantially reduced.
PCT/GB2005/003095 2004-08-06 2005-08-05 The use of surface measurement probes WO2006013387A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE602005005839.7T DE602005005839T3 (en) 2004-08-06 2005-08-05 USE OF SURFACE TESTS
EP05772904.8A EP1792139B2 (en) 2004-08-06 2005-08-05 The use of surface measurement probes
US11/658,162 US7526873B2 (en) 2004-08-06 2005-08-05 Use of surface measurement probes
JP2007524401A JP2008509386A (en) 2004-08-06 2005-08-05 Usage of probe for surface measurement

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0417536.0 2004-08-06
GBGB0417536.0A GB0417536D0 (en) 2004-08-06 2004-08-06 The use of surface measurement probes

Publications (3)

Publication Number Publication Date
WO2006013387A2 WO2006013387A2 (en) 2006-02-09
WO2006013387A3 true WO2006013387A3 (en) 2006-03-23
WO2006013387A9 WO2006013387A9 (en) 2007-03-15

Family

ID=32982635

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2005/003095 WO2006013387A2 (en) 2004-08-06 2005-08-05 The use of surface measurement probes

Country Status (8)

Country Link
US (1) US7526873B2 (en)
EP (1) EP1792139B2 (en)
JP (1) JP2008509386A (en)
CN (1) CN100460814C (en)
AT (1) ATE391284T1 (en)
DE (1) DE602005005839T3 (en)
GB (1) GB0417536D0 (en)
WO (1) WO2006013387A2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0608235D0 (en) * 2006-04-26 2006-06-07 Renishaw Plc Differential calibration
GB0703423D0 (en) 2007-02-22 2007-04-04 Renishaw Plc Calibration method and apparatus
JP2008304332A (en) * 2007-06-07 2008-12-18 Tokyo Seimitsu Co Ltd Apparatus and method for measuring surface roughness and shape
WO2009001385A1 (en) * 2007-06-28 2008-12-31 Hexagon Metrology S.P.A. Method for determining dynamic errors in a measuring machine
DE102009004982A1 (en) * 2009-01-14 2010-07-22 Höfler Maschinenbau GmbH Measuring method and measuring device
GB0900878D0 (en) 2009-01-20 2009-03-04 Renishaw Plc Method for optimising a measurement cycle
CN102072701A (en) * 2010-11-23 2011-05-25 苏州江城数控精密机械有限公司 Method for detecting size of part and device
US10037017B2 (en) 2012-04-18 2018-07-31 Renishaw Plc Method of measurement on a machine tool and corresponding machine tool apparatus
JP6346167B2 (en) 2012-04-18 2018-06-20 レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company Analog measurement scanning method in machine tools and corresponding machine tool apparatus
JP6242856B2 (en) 2012-04-18 2017-12-06 レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company How to find features using machine tools
GB201316329D0 (en) * 2013-09-13 2013-10-30 Renishaw Plc A Method of Using a scanning probe
WO2015085316A1 (en) * 2013-12-07 2015-06-11 Bruker Nano, Inc. Force measurement with real-time baseline determination
DE102015006636A1 (en) * 2015-05-22 2016-11-24 Blum-Novotest Gmbh Method and system for detecting a workpiece contour and for correcting a desired path for machining a workpiece in a machine tool
JP6608726B2 (en) * 2016-02-18 2019-11-20 株式会社東京精密 Positioning measurement system
DE102019122650A1 (en) * 2019-08-22 2021-02-25 M & H Inprocess Messtechnik Gmbh Measuring system
US11644299B2 (en) * 2020-12-31 2023-05-09 Mitutoyo Corporation Inductive position sensor signal gain control for coordinate measuring machine probe

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4991304A (en) * 1987-06-11 1991-02-12 Renishaw Workpiece inspection method
EP0599513A1 (en) * 1992-11-20 1994-06-01 RENISHAW plc A method of measuring workpieces using a surface contacting measuring probe
US20020029119A1 (en) * 2000-05-23 2002-03-07 Werner Lotze Correction method for a coordinate measuring apparatus
WO2004005849A1 (en) * 2002-07-04 2004-01-15 Renishaw Plc Method of calibrating a scannig system
US20040055170A1 (en) * 1999-04-08 2004-03-25 Renishaw Plc Use of surface measuring probes

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2242355C2 (en) 1972-08-29 1974-10-17 Fa. Carl Zeiss, 7920 Heidenheim Electronic multi-coordinate probe
US4118871A (en) * 1978-06-13 1978-10-10 Kearney & Trecker Corporation Binary inspection probe for numerically controlled machine tools
GB8624191D0 (en) * 1986-10-08 1986-11-12 Renishaw Plc Datuming of analogue measurement probes
US5390424A (en) 1990-01-25 1995-02-21 Renishaw Metrology Limited Analogue probe
GB9110818D0 (en) 1991-05-21 1991-07-10 Renishaw Metrology Ltd A method of measuring workpieces using a surface contacting measuring probe
DE4134371A1 (en) * 1991-10-17 1993-04-22 Zeiss Carl Fa METHOD FOR MEASURING THE EFFECTIVE CURRENT POSITION OF A KEY ELEMENT OR BEARED BY A SLIDE. TOOL
EP0729005B1 (en) * 1995-02-23 1998-08-05 Institut Für Fertigungstechnik Der Tu Graz Measuring device for checking the geometrie and dynamic precision of NC machining tools and industrial robots
DE29612861U1 (en) 1996-07-24 1996-09-12 Fa. Carl Zeiss, 89518 Heidenheim Coordinate measuring device with measurement time optimization
GB9907868D0 (en) * 1999-04-08 1999-06-02 Renishaw Plc Method of calibrating a scanning system
JP2002039743A (en) * 2000-07-28 2002-02-06 Mori Seiki Co Ltd Measuring instrument
GB0228371D0 (en) * 2002-12-05 2003-01-08 Leland E C E Workpiece inspection method
GB0329098D0 (en) * 2003-12-16 2004-01-21 Renishaw Plc Method of calibrating a scanning system
DE102004007968B4 (en) * 2004-02-18 2006-02-09 Carl Zeiss Industrielle Messtechnik Gmbh Method for probing a workpiece with a coordinate measuring machine
DE102005003321A1 (en) * 2005-01-18 2006-07-27 Carl Zeiss Industrielle Messtechnik Gmbh Method for determining a spatial coordinate of a measuring point on a measuring object and corresponding coordinate measuring machine

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4991304A (en) * 1987-06-11 1991-02-12 Renishaw Workpiece inspection method
EP0599513A1 (en) * 1992-11-20 1994-06-01 RENISHAW plc A method of measuring workpieces using a surface contacting measuring probe
US20040055170A1 (en) * 1999-04-08 2004-03-25 Renishaw Plc Use of surface measuring probes
US20020029119A1 (en) * 2000-05-23 2002-03-07 Werner Lotze Correction method for a coordinate measuring apparatus
WO2004005849A1 (en) * 2002-07-04 2004-01-15 Renishaw Plc Method of calibrating a scannig system

Also Published As

Publication number Publication date
JP2008509386A (en) 2008-03-27
CN100460814C (en) 2009-02-11
EP1792139B1 (en) 2008-04-02
CN1993600A (en) 2007-07-04
GB0417536D0 (en) 2004-09-08
WO2006013387A9 (en) 2007-03-15
DE602005005839T2 (en) 2009-04-02
EP1792139A2 (en) 2007-06-06
WO2006013387A2 (en) 2006-02-09
DE602005005839D1 (en) 2008-05-15
US20080028626A1 (en) 2008-02-07
DE602005005839T3 (en) 2014-04-10
US7526873B2 (en) 2009-05-05
EP1792139B2 (en) 2014-02-19
ATE391284T1 (en) 2008-04-15

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