WO2005121697A1 - Optical fiber strain sensor - Google Patents

Optical fiber strain sensor Download PDF

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Publication number
WO2005121697A1
WO2005121697A1 PCT/CA2005/000884 CA2005000884W WO2005121697A1 WO 2005121697 A1 WO2005121697 A1 WO 2005121697A1 CA 2005000884 W CA2005000884 W CA 2005000884W WO 2005121697 A1 WO2005121697 A1 WO 2005121697A1
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WO
WIPO (PCT)
Prior art keywords
fiber
cavity
sensor
optical
optical fiber
Prior art date
Application number
PCT/CA2005/000884
Other languages
French (fr)
Inventor
Edvard Cibula
Denis Donlagic
Original Assignee
Fiso Technologies Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fiso Technologies Inc. filed Critical Fiso Technologies Inc.
Publication of WO2005121697A1 publication Critical patent/WO2005121697A1/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/16Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/18Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge using photoelastic elements

Definitions

  • the current invention applies to manufacturing and calibration process of strain sensor based on optical fiber that can be used to measure static or dynamic strain and deformations of different materials and systems.
  • the technical problems that are solved by this invention relate to manufacturing of strain sensors with outer diameter that do not exceed the diameter of standard optical fiber, e.g. 125 ⁇ m and to a calibration procedure and setting of the sensor operating point.
  • the sensor is exclusively designed from optical fibers (that base on pure or composite Si02+Ge02 glass) and can withstands broad temperature range (-270 C to 650 C).
  • the sensor is based on air cavity Fabry-Perot that allows achieving high strain sensitivity while providing low temperature dependence.
  • the use of standard optical fibers and commercially available manufacturing tools the invention allows for cost effective manufacturing of the sensor.
  • the strain sensor is created with splicing of two optical fibers where at least at one tip of the fiber a cavity is created before the splicing.
  • the thin air gap that forms between the fibers by this procedure functions as an optical resonator with partially reflective mirrors.
  • the applied strain causes the cavity length change and this can be detected by high resolution in two ways. In the first way, the sensor is illuminated by broadband source and the spectrum of input and reflected optical power is compared to determine the cavity length. In the second, a narrow line width laser is used to directly observe the reflectivity of the sensor at particular wavelength. The calibration and tuning of the sensor operating point is achieved by controlled elongation of the sensor (section of splice with the air cavity) at the temperature that allows for plastic deformation of the optical fibers.
  • the calibration of the optical resonator length is necessary in case of application of signal processing system that relies on narrow line width laser source and in case when these types of sensor are used to build quasi distributed network that is compatible with signal processing that uses optical time domain reflectometer (OTDR) to determine stress applied at each individual sensor.
  • OTDR optical time domain reflectometer
  • Fig.1 illustrates a standard singlemode fiber with a spliced segment of a multimode optical fiber.
  • Fig.2 illustrates an etched tip of the optical fiber shown in Fig. 1.
  • Fig.3 illustrates an optical fiber with the cavity, spliced to another section of single mode fiber.
  • Fig.4 illustrates an arrangement for performing calibration or fine-tuning of the sensor length with heating and sensor elongation.
  • FIG. 1 shows a single mode optical fiber (SMF) 1 on which a section of multimode optical fiber (MMF) 2 is spliced and cleaved at desired distance 3 from the splice. This distance preferably ranges from 0 to 200 ⁇ m.
  • the splicing is advantageously accomplished by the use of standard fusion splicer for optical fibers and the calving is performed by standard fiber cleaver.
  • the outer diameter of fiber used in this example is preferably 125 ⁇ m.
  • the diameter of SMF is approximately 9 ⁇ m 5.
  • MMF has step or graded index profile with the core diameter of approximately 60 ⁇ m 6.
  • the fiber tip prepared in accordance with previous paragraph is then dipped into HF acid that causes decomposition/etching of the MMF core.
  • the etching is stopped at the interface of both fibers.
  • the reflectivity at the fiber-air interfaces is then approximately 2%. This reflectivity is needed to achieve proper sensor operation. It is important to terminate the etching when the etching process reaches the interface between MMF and SMF, otherwise the SMF is damaged by HF that is reflected by drop for the cavity reflectivity.
  • the reflected optical power is advantageously monitored during the etching and when the reflectivity reaches the maximum the etching is terminated.
  • FIG. 1 shows etched cavity 7 at the tip of the fiber.
  • Figure 3 is showing the spliced and etched fiber section after this section is spliced with another section of SMF 8. This creates an in-fiber cavity 9 at the position of the splice. In cases when longer air cavity is desired, it is possible to splice two etched fiber sections obtained by previously described procedure.
  • the splicing procedure requires appropriate modification of fusion splicing parameters, e.g. modification of fusion temperature and fusion times.
  • the fusion temperature is around 1800 C and the air that is trapped within the cavity expands if temperature increases after fibers come in contact. Under normal fusion conditions the cavity pressure rise and this leads to deformation of the cavity walls that results in decrease cavity reactivity or total destruction of the splice.
  • the problem of splicing is solved in a way to perform the splicing in two steps. In the first step the fiber are preheated at higher temperature and when fibers come into the contact the temperature is slightly reduced until fusion is completed. This prevents deformation of the fibers during splicing.
  • Figure 4 demonstrates the calibration principle of the in-fiber air cavity.
  • the section of the fiber with in fiber cavity is heated by resistive wire coil 10 and then pulled apart.
  • the fiber is fixed 11 at one side of the heating coil, while it is attached 12 at the moving linear stage 13 at the other.
  • the temperature that allows for the plastic (permanent) elongation of the optical fiber is approximately 850-1000 C for Si02 fiber.
  • the calibration procedure requires on line monitoring of the cavity length, for example by application of broadband source and spectrum analyzer.
  • Figure 5 demonstrates typical reflectivity of the optical fiber strain sensors as a function of a strain.
  • the sensor was calibrated in the vicinity of quadrature point and it was produced for the strain ranger of +- 5000 ⁇ m/m with approximately linear static characteristics.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

This invention presents manufacturing and tuning procedure of optical fiber sensor with diameter that equals to the diameter of optical fiber, e.g. of 125 µm or less. The sensor uses principle of Fabry-Perot interferometer with the optical resonator formed within the fiber in the form of an air cavity. The manufacturing procedure comprises etching of the fiber tip with the purpose of creating the cavity at the fiber tip (7), followed by the splicing of another fiber (8) to form and air cavity resonator (9). The calibration of the cavity length is achieved by controlled elongation of the segment of the optical fiber in the vicinity of the cavity by heating the vicinity of the cavity to the temperature that allows for plastic deformation of the fiber. The sensor is of small size, it has high sensitivity, low temperature dependence and it can be integrated in quasi distributed sensor networks.

Description

OPTICAL FIBER STRAIN SENSOR
FIELD OF THE INVENTION The current invention applies to manufacturing and calibration process of strain sensor based on optical fiber that can be used to measure static or dynamic strain and deformations of different materials and systems.
The technical problems that are solved by this invention relate to manufacturing of strain sensors with outer diameter that do not exceed the diameter of standard optical fiber, e.g. 125 μm and to a calibration procedure and setting of the sensor operating point. The sensor is exclusively designed from optical fibers (that base on pure or composite Si02+Ge02 glass) and can withstands broad temperature range (-270 C to 650 C). The sensor is based on air cavity Fabry-Perot that allows achieving high strain sensitivity while providing low temperature dependence. The use of standard optical fibers and commercially available manufacturing tools the invention allows for cost effective manufacturing of the sensor.
BACKGROUND OF THE INVENTION
Different fiber optic strain sensors are known in the art. The oldest presented solution is described in US patent 4,295,738. The special double core fiber is used and the optical power bounces between the two cores under applied strain. Solutions according to WO8901614, US patent 5,694,497 and US patent 6,003,340 base on bend loss phenomena in the fiber and the applied strain modulates the intensity at the sensor output. For those solutions relatively simple detection scheme can be applied, but with low sensitivity. The Brag grating fiber optic sensors, such as described in US patent 5,319,435, require more complex signal processing. In addition Bragg grating sensor usually exhibit high temperature dependence. The application of Fabry-Perot interferometer for strain measurements was presented in US patent 5,301,001. Two perpendicularly cleaved optical fibers were placed in thin capillary in a way to form the short air cavity between the fiber ends. This creates an optical resonator. The drawback of this approach is in use of adhesive and not well-defined point where fiber is adhered to the capillary as the adhesive randomly penetrates the capillary. The outer diameter of such sensor is also always larger than the fiber diameter. In the invention presented by US patent 6,056,435 hollow core optical fiber is used to create the spacer between two perpendicularly cleaved fibers. The sensor has the same diameter as optical fiber but it relies on manufacturing and splicing of the hollow core fiber. Other solutions of the optical fiber strain sensors rely on polarization effects in optical fibers (JP 62085805) and measurements of light pulse propagation time in the fiber that is exposed to the measured stress (US patents 5,649,035 and 4,928,004).
SUMMARY OF THE INVENTION
In this invention the strain sensor is created with splicing of two optical fibers where at least at one tip of the fiber a cavity is created before the splicing. The thin air gap that forms between the fibers by this procedure functions as an optical resonator with partially reflective mirrors. The applied strain causes the cavity length change and this can be detected by high resolution in two ways. In the first way, the sensor is illuminated by broadband source and the spectrum of input and reflected optical power is compared to determine the cavity length. In the second, a narrow line width laser is used to directly observe the reflectivity of the sensor at particular wavelength. The calibration and tuning of the sensor operating point is achieved by controlled elongation of the sensor (section of splice with the air cavity) at the temperature that allows for plastic deformation of the optical fibers. The calibration of the optical resonator length is necessary in case of application of signal processing system that relies on narrow line width laser source and in case when these types of sensor are used to build quasi distributed network that is compatible with signal processing that uses optical time domain reflectometer (OTDR) to determine stress applied at each individual sensor.
BRIEF DESCRIPTION OF THE DRAWINGS
These and other objects and advantages of the invention will become apparent upon reading the detailed description and upon referring to the drawings in which :
Fig.1 illustrates a standard singlemode fiber with a spliced segment of a multimode optical fiber.
Fig.2 illustrates an etched tip of the optical fiber shown in Fig. 1. Fig.3 illustrates an optical fiber with the cavity, spliced to another section of single mode fiber.
Fig.4 illustrates an arrangement for performing calibration or fine-tuning of the sensor length with heating and sensor elongation.
While the invention will be described in conjunction with example embodiments, it will be understood that it is not intended to limit the scope of the invention to such embodiments. On the contrary, it is intended to cover all alternatives, modifications and equivalents as may be included as defined by the appended claims. DESCRIPTION OF PREFERRED EMBODIMENTS
In the following description, similar features in the drawings have been given similar reference numerals and, in order to weight down the figures, some elements are not referred to in some figures if they were already identified in a precedent figure.
. Figure 1 shows a single mode optical fiber (SMF) 1 on which a section of multimode optical fiber (MMF) 2 is spliced and cleaved at desired distance 3 from the splice. This distance preferably ranges from 0 to 200 μm. The splicing is advantageously accomplished by the use of standard fusion splicer for optical fibers and the calving is performed by standard fiber cleaver. The outer diameter of fiber used in this example is preferably 125 μm. Preferably, the diameter of SMF is approximately 9 μm 5. MMF has step or graded index profile with the core diameter of approximately 60 μm 6.
The fiber tip prepared in accordance with previous paragraph is then dipped into HF acid that causes decomposition/etching of the MMF core. The etching is stopped at the interface of both fibers. The reflectivity at the fiber-air interfaces is then approximately 2%. This reflectivity is needed to achieve proper sensor operation. It is important to terminate the etching when the etching process reaches the interface between MMF and SMF, otherwise the SMF is damaged by HF that is reflected by drop for the cavity reflectivity. To achieve proper etching termination moment, the reflected optical power is advantageously monitored during the etching and when the reflectivity reaches the maximum the etching is terminated. After the etching the fiber tip is cleaned, for example in ultrasonic cleaner, in order to remove reminiscences of the HF and other impurities. Figure 2 shows etched cavity 7 at the tip of the fiber. Figure 3 is showing the spliced and etched fiber section after this section is spliced with another section of SMF 8. This creates an in-fiber cavity 9 at the position of the splice. In cases when longer air cavity is desired, it is possible to splice two etched fiber sections obtained by previously described procedure. The splicing procedure requires appropriate modification of fusion splicing parameters, e.g. modification of fusion temperature and fusion times. The fusion temperature is around 1800 C and the air that is trapped within the cavity expands if temperature increases after fibers come in contact. Under normal fusion conditions the cavity pressure rise and this leads to deformation of the cavity walls that results in decrease cavity reactivity or total destruction of the splice. In this invention the problem of splicing is solved in a way to perform the splicing in two steps. In the first step the fiber are preheated at higher temperature and when fibers come into the contact the temperature is slightly reduced until fusion is completed. This prevents deformation of the fibers during splicing.
Figure 4 demonstrates the calibration principle of the in-fiber air cavity. The section of the fiber with in fiber cavity is heated by resistive wire coil 10 and then pulled apart. The fiber is fixed 11 at one side of the heating coil, while it is attached 12 at the moving linear stage 13 at the other. The temperature that allows for the plastic (permanent) elongation of the optical fiber is approximately 850-1000 C for Si02 fiber. The calibration procedure requires on line monitoring of the cavity length, for example by application of broadband source and spectrum analyzer.
Figure 5 demonstrates typical reflectivity of the optical fiber strain sensors as a function of a strain. The sensor was calibrated in the vicinity of quadrature point and it was produced for the strain ranger of +- 5000 μm/m with approximately linear static characteristics.
Although preferred embodiments of the present invention have been described in detail herein and illustrated in the accompanying drawings, it is to be understood that the invention is not limited to these precise embodiments and that various changes and modifications may be effected therein without departing from the scope or spirit of the present invention.

Claims

WHAT IS CLAIMED IS:
1. An optical fiber strain sensor comprising: a two single mode fibers that are separated by segment of optical fiber with the cavity of step or concave shape that acts as an optical resonator
2. The sensor of claim 1 that is produced by: splicing of a multimode fiber segment (2) to the single mode fiber (1) that is followed by etching in HF acid
3. The sensor of claim 1 that is produced by: splicing of etched fiber with cleaved single mode fiber or another etched fiber (8).
4. An optical fiber strain sensor comprising: lead single mode fiber (1) spliced to spacer , followed by second single mode fiber (8) in a way to form an optical resonator between both single-mode fibers.
5. The sensor of claim 4 where spacer is produced by etching process
6. A calibration of the strain sensor cavity length obtained by heating of the short section of fiber surrounding the cavity with the step or concave shape (7) to the temperature that allows for plastic elongation of heated section and thereby allows fine tuning of the cavity length.
7. A calibration of the strain sensor cavity length obtained by heating of the short section of fiber surrounding the cavity created by between two optical fibers, separated by spacer to the temperature that allows for plastic elongation of heated section and thereby allows fine tuning of the cavity length.
PCT/CA2005/000884 2004-06-07 2005-06-07 Optical fiber strain sensor WO2005121697A1 (en)

Applications Claiming Priority (2)

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SIP-200400159 2004-06-07
SI200400159A SI21816A (en) 2004-06-07 2004-06-07 Optical fibre elongation sensor

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Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1929249A1 (en) * 2005-08-12 2008-06-11 Fiso Technologies Inc. Single piece fabry-perot optical sensor and method of manufacturing the same
WO2008092372A1 (en) * 2007-01-24 2008-08-07 University Of Electronic Science And Technology Of China An optical fiber febry-perot sensor and the manufacture method thereof
CN102494702A (en) * 2011-12-05 2012-06-13 重庆大学 Long period fiber grating sensor and remote-sensing demodulating system
CN102645175A (en) * 2012-03-31 2012-08-22 无锡成电光纤传感科技有限公司 Optical fiber Fabry-Perot strain sensor structure
US8655117B2 (en) 2011-03-11 2014-02-18 University of Maribor Optical fiber sensors having long active lengths, systems, and methods
US8655123B2 (en) 2011-03-11 2014-02-18 University of Maribor In-line optical fiber devices, optical systems, and methods
CN103676142A (en) * 2012-09-13 2014-03-26 福州高意通讯有限公司 Scanning etalon
CN103697921A (en) * 2013-12-30 2014-04-02 哈尔滨工业大学 Optical fiber sensing head and optical fiber sensing system and method for measuring strain, stress and pressure based on sensing head
EP2720020A1 (en) 2012-10-15 2014-04-16 HIDRIA AET Druzba za proizvodnjo vzignih sistemov in elektronike d.o.o. Pressure sensing plug with integrated optical pressure sensor
CN103940355A (en) * 2014-02-26 2014-07-23 深圳大学 Intensity-modulating-type optical-fiber Michelson strain sensor and manufacturing method thereof
CN104596435A (en) * 2014-12-04 2015-05-06 中国科学院上海微系统与信息技术研究所 MEMS process based cavity length adjustable optical fiber F-P strain gauge and forming method
CN105607188A (en) * 2016-03-09 2016-05-25 南京吉隆光纤通信股份有限公司 Double-electrode fiber Fabry-Perot cavity welding device
WO2018010701A1 (en) * 2016-07-13 2018-01-18 上海交通大学 Optical fibre sensor and sound wave detection application method therefor
CN107817043A (en) * 2017-09-22 2018-03-20 暨南大学 A kind of air micro chamber fibre optic hydrophone and preparation method and signal detecting method
CN108572047A (en) * 2017-03-10 2018-09-25 中国计量大学 A kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro chambers
CN110044288A (en) * 2019-04-03 2019-07-23 西北工业大学 High temperature resistant strain transducer based on FBG
CN110174068A (en) * 2019-05-23 2019-08-27 西安工业大学 A kind of sensitizing type Fabry-perot optical fiber microcavity strain transducer and preparation method thereof
CN110470328A (en) * 2019-07-29 2019-11-19 东北大学 A kind of optical fiber FP sensor and preparation method thereof that can be filled with Low Drift Temperature
CN110726374A (en) * 2019-09-17 2020-01-24 天津大学 Optical fiber Fabry-Perot strain sensor based on single-mode optical fiber, manufacturing method and measuring method
CN110823359A (en) * 2019-11-14 2020-02-21 北京遥测技术研究所 Low-temperature optical fiber sound sensing system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5528367A (en) * 1994-09-09 1996-06-18 The United States Of America As Represented By The Secretary Of The Navy In-line fiber etalon strain sensor
CA2267976A1 (en) * 1996-10-09 1998-04-16 John H. Belk Strain sensor and system
JP2001280922A (en) * 2000-03-29 2001-10-10 Tokyo Sokki Kenkyusho Co Ltd Optical fiber type strain sensor, and manufacturing method therefor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5528367A (en) * 1994-09-09 1996-06-18 The United States Of America As Represented By The Secretary Of The Navy In-line fiber etalon strain sensor
CA2267976A1 (en) * 1996-10-09 1998-04-16 John H. Belk Strain sensor and system
JP2001280922A (en) * 2000-03-29 2001-10-10 Tokyo Sokki Kenkyusho Co Ltd Optical fiber type strain sensor, and manufacturing method therefor

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1929249A4 (en) * 2005-08-12 2012-10-17 Fiso Technologies Inc Single piece fabry-perot optical sensor and method of manufacturing the same
EP1929249A1 (en) * 2005-08-12 2008-06-11 Fiso Technologies Inc. Single piece fabry-perot optical sensor and method of manufacturing the same
WO2008092372A1 (en) * 2007-01-24 2008-08-07 University Of Electronic Science And Technology Of China An optical fiber febry-perot sensor and the manufacture method thereof
US9139468B2 (en) 2011-03-11 2015-09-22 University of Maribor Optical fiber sensors having long active lengths, systems, and methods
US8655117B2 (en) 2011-03-11 2014-02-18 University of Maribor Optical fiber sensors having long active lengths, systems, and methods
US8655123B2 (en) 2011-03-11 2014-02-18 University of Maribor In-line optical fiber devices, optical systems, and methods
CN102494702A (en) * 2011-12-05 2012-06-13 重庆大学 Long period fiber grating sensor and remote-sensing demodulating system
CN102645175A (en) * 2012-03-31 2012-08-22 无锡成电光纤传感科技有限公司 Optical fiber Fabry-Perot strain sensor structure
CN103676142A (en) * 2012-09-13 2014-03-26 福州高意通讯有限公司 Scanning etalon
EP2720020A1 (en) 2012-10-15 2014-04-16 HIDRIA AET Druzba za proizvodnjo vzignih sistemov in elektronike d.o.o. Pressure sensing plug with integrated optical pressure sensor
CN103697921A (en) * 2013-12-30 2014-04-02 哈尔滨工业大学 Optical fiber sensing head and optical fiber sensing system and method for measuring strain, stress and pressure based on sensing head
CN103940355A (en) * 2014-02-26 2014-07-23 深圳大学 Intensity-modulating-type optical-fiber Michelson strain sensor and manufacturing method thereof
CN104596435B (en) * 2014-12-04 2017-09-19 中国科学院上海微系统与信息技术研究所 A kind of long adjustable optic fibre F P strain gauges of chamber based on MEMS technology and forming method
CN104596435A (en) * 2014-12-04 2015-05-06 中国科学院上海微系统与信息技术研究所 MEMS process based cavity length adjustable optical fiber F-P strain gauge and forming method
CN105607188B (en) * 2016-03-09 2019-03-22 南京吉隆光纤通信股份有限公司 A kind of bipolar electrode fiber Fabry-Pérot cavity fusion splicing devices
CN105607188A (en) * 2016-03-09 2016-05-25 南京吉隆光纤通信股份有限公司 Double-electrode fiber Fabry-Perot cavity welding device
WO2018010701A1 (en) * 2016-07-13 2018-01-18 上海交通大学 Optical fibre sensor and sound wave detection application method therefor
CN108572047B (en) * 2017-03-10 2024-04-05 中国计量大学 Optical fiber air pressure sensing device based on multiple Fabry-Perot microcavities
CN108572047A (en) * 2017-03-10 2018-09-25 中国计量大学 A kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro chambers
CN107817043A (en) * 2017-09-22 2018-03-20 暨南大学 A kind of air micro chamber fibre optic hydrophone and preparation method and signal detecting method
CN110044288A (en) * 2019-04-03 2019-07-23 西北工业大学 High temperature resistant strain transducer based on FBG
CN110174068A (en) * 2019-05-23 2019-08-27 西安工业大学 A kind of sensitizing type Fabry-perot optical fiber microcavity strain transducer and preparation method thereof
CN110470328A (en) * 2019-07-29 2019-11-19 东北大学 A kind of optical fiber FP sensor and preparation method thereof that can be filled with Low Drift Temperature
CN110470328B (en) * 2019-07-29 2021-07-09 东北大学 Optical fiber FP sensor with low temperature drift and filling function and preparation method thereof
CN110726374A (en) * 2019-09-17 2020-01-24 天津大学 Optical fiber Fabry-Perot strain sensor based on single-mode optical fiber, manufacturing method and measuring method
CN110726374B (en) * 2019-09-17 2021-12-07 天津大学 Optical fiber Fabry-Perot strain sensor based on single-mode optical fiber, manufacturing method and measuring method
CN110823359A (en) * 2019-11-14 2020-02-21 北京遥测技术研究所 Low-temperature optical fiber sound sensing system

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