WO2005109488A3 - Procedes de production de geometries de lames complexes a partir de plaquettes en silicium et de renforcement des geometries de lames - Google Patents

Procedes de production de geometries de lames complexes a partir de plaquettes en silicium et de renforcement des geometries de lames Download PDF

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Publication number
WO2005109488A3
WO2005109488A3 PCT/US2005/015016 US2005015016W WO2005109488A3 WO 2005109488 A3 WO2005109488 A3 WO 2005109488A3 US 2005015016 W US2005015016 W US 2005015016W WO 2005109488 A3 WO2005109488 A3 WO 2005109488A3
Authority
WO
WIPO (PCT)
Prior art keywords
etching
blade
wafers
blades
poly
Prior art date
Application number
PCT/US2005/015016
Other languages
English (en)
Other versions
WO2005109488A2 (fr
Inventor
James Hughes
Vadim Daskal
Joseph Keenan
Attila Kiss
Susan Chavez
Original Assignee
Becton Dickinson Co
James Hughes
Vadim Daskal
Joseph Keenan
Attila Kiss
Susan Chavez
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Becton Dickinson Co, James Hughes, Vadim Daskal, Joseph Keenan, Attila Kiss, Susan Chavez filed Critical Becton Dickinson Co
Priority to JP2007511053A priority Critical patent/JP2007535384A/ja
Priority to BRPI0510488-2A priority patent/BRPI0510488A/pt
Priority to AU2005241946A priority patent/AU2005241946B2/en
Priority to EP05758045A priority patent/EP1751790A4/fr
Priority to CA002564196A priority patent/CA2564196A1/fr
Priority to NZ551031A priority patent/NZ551031A/en
Priority to MXPA06012320A priority patent/MXPA06012320A/es
Publication of WO2005109488A2 publication Critical patent/WO2005109488A2/fr
Publication of WO2005109488A3 publication Critical patent/WO2005109488A3/fr

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B17/00—Surgical instruments, devices or methods, e.g. tourniquets
    • A61B17/32—Surgical cutting instruments
    • A61B17/3209—Incision instruments
    • A61B17/3211—Surgical scalpels, knives; Accessories therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B17/00—Surgical instruments, devices or methods, e.g. tourniquets
    • A61B2017/00526—Methods of manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Surgery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Veterinary Medicine (AREA)
  • Physics & Mathematics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biomedical Technology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

L'invention concerne des lames chirurgicales ophtalmiques fabriquées à partir d'un matériau monocristallin ou polycristallin, de préférence sous forme d'une plaquette. Le procédé consiste à préparer les plaquettes monocristallines ou polycristallines par montage de celles-ci et par gravure de tranchées dans ces plaquettes au moyen d'un ou de plusieurs procédés. L'invention concerne des procédés d'usinage des tranchées formant les surfaces des lames en biseau, avec utilisation d'une scie à lame diamantée, d'un système laser, d'un dispositif à ultrasons, d'une presse de forgeage à chaud et d'un routeur. D'autres procédés comprennent la gravure au mouillé (isotropique ou anisotropique) et la gravure à sec (isotropique et anisotropique, y compris la gravure ionique réactive), ainsi que la combinaison de ces opérations de gravure. Les plaquettes sont ensuite placées dans une solution d'attaque qui les grave isotropiquement de manière uniforme, afin d'éliminer uniformément les couches de matériau cristallin ou polycristallin et de produire des lames en biseau simples, doubles ou multiples. Un angle quelconque de biseau peut pratiquement être usiné dans la plaquette, et l'angle usiné demeure après gravure. Les rayons obtenus des arêtes des lames sont compris entre 5 et 500 nm, ce qui est le même calibre qu'une lame à arête de diamant, tout en n'étant qu'une fraction du coût. On peut obtenir une gamme de rayons de 30 à 60 nm, avec une application spécifique d'environ 40 nm. Le profil de la lame peut présenter un angle, par exemple, d'environ 60°. Les lames chirurgicales ophtalmiques peuvent être utilisées pour des opérations de cataracte et de chirurgie réfractive, ainsi que dans des applications microchirurgicales, biologiques et non-médicales et non-biologiques. Les lames chirurgicales et non-chirurgicales et les dispositifs mécaniques fabriqués comme précédemment décrit peuvent en outre présenter des surfaces sensiblement plus lisses que les lame métalliques.
PCT/US2005/015016 2004-04-30 2005-04-29 Procedes de production de geometries de lames complexes a partir de plaquettes en silicium et de renforcement des geometries de lames WO2005109488A2 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2007511053A JP2007535384A (ja) 2004-04-30 2005-04-29 シリコンウェーハで複雑なブレード形状を製作する方法およびブレード形状を強化する方法
BRPI0510488-2A BRPI0510488A (pt) 2004-04-30 2005-04-29 métodos de fabricação de geometrias complexas de lámina a partir de pastilhas de silìcio e reforço de geometria de lámina
AU2005241946A AU2005241946B2 (en) 2004-04-30 2005-04-29 Methods of fabricating complex blade geometries from silicon wafers and strengthening blade geometries
EP05758045A EP1751790A4 (fr) 2004-04-30 2005-04-29 Procedes de production de geometries de lames complexes a partir de plaquettes en silicium et de renforcement des geometries de lames
CA002564196A CA2564196A1 (fr) 2004-04-30 2005-04-29 Procedes de production de geometries de lames complexes a partir de plaquettes en silicium et de renforcement des geometries de lames
NZ551031A NZ551031A (en) 2004-04-30 2005-04-29 Methods of fabricating surgical blades from silicon wafers by etching
MXPA06012320A MXPA06012320A (es) 2004-04-30 2005-04-29 Metodos para fabricar geometrias de hoja complejas a partir de obleas de silicio y para reforzar geometrias de hoja.

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US56639704P 2004-04-30 2004-04-30
US60/566,397 2004-04-30
US58485004P 2004-07-02 2004-07-02
US60/584,850 2004-07-02

Publications (2)

Publication Number Publication Date
WO2005109488A2 WO2005109488A2 (fr) 2005-11-17
WO2005109488A3 true WO2005109488A3 (fr) 2006-11-16

Family

ID=35320912

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/015016 WO2005109488A2 (fr) 2004-04-30 2005-04-29 Procedes de production de geometries de lames complexes a partir de plaquettes en silicium et de renforcement des geometries de lames

Country Status (10)

Country Link
EP (1) EP1751790A4 (fr)
JP (1) JP2007535384A (fr)
KR (1) KR20070005725A (fr)
AU (1) AU2005241946B2 (fr)
BR (1) BRPI0510488A (fr)
CA (1) CA2564196A1 (fr)
MX (1) MXPA06012320A (fr)
NZ (1) NZ551031A (fr)
RU (1) RU2006137478A (fr)
WO (1) WO2005109488A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011169784A (ja) * 2010-02-19 2011-09-01 Disco Corp 検査用試料作製方法
DK2688485T3 (en) * 2011-03-22 2016-09-26 Chang He Bio-Medical Science (Yangzhou) Co Ltd Medical instruments and methods of preparation thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6099543A (en) * 1998-03-18 2000-08-08 Smith; Thomas C. Ophthalmic surgical blade
US20030199165A1 (en) * 2002-03-11 2003-10-23 Becton, Dickinson And Company System and method for the manufacture of surgical blades

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19859905C2 (de) * 1998-01-27 2002-05-23 Gfd Ges Fuer Diamantprodukte M Diamantschneidwerkzeug
US20020078576A1 (en) * 2000-11-10 2002-06-27 Carr William N. Micromachined surgical scalpel

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6099543A (en) * 1998-03-18 2000-08-08 Smith; Thomas C. Ophthalmic surgical blade
US20030199165A1 (en) * 2002-03-11 2003-10-23 Becton, Dickinson And Company System and method for the manufacture of surgical blades

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1751790A4 *

Also Published As

Publication number Publication date
CA2564196A1 (fr) 2005-11-17
EP1751790A2 (fr) 2007-02-14
RU2006137478A (ru) 2008-06-10
BRPI0510488A (pt) 2007-11-13
NZ551031A (en) 2010-08-27
WO2005109488A2 (fr) 2005-11-17
JP2007535384A (ja) 2007-12-06
KR20070005725A (ko) 2007-01-10
MXPA06012320A (es) 2007-01-31
EP1751790A4 (fr) 2011-03-23
AU2005241946B2 (en) 2010-06-03
AU2005241946A1 (en) 2005-11-17

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