WO2005106386A3 - Vibration resistant interferometry - Google Patents
Vibration resistant interferometry Download PDFInfo
- Publication number
- WO2005106386A3 WO2005106386A3 PCT/US2005/013741 US2005013741W WO2005106386A3 WO 2005106386 A3 WO2005106386 A3 WO 2005106386A3 US 2005013741 W US2005013741 W US 2005013741W WO 2005106386 A3 WO2005106386 A3 WO 2005106386A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- scan
- values
- test object
- data
- typically
- Prior art date
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02083—Interferometers characterised by particular signal processing and presentation
- G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007509660A JP2007534942A (en) | 2004-04-22 | 2005-04-22 | Vibration-resistant interferometry |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US56447704P | 2004-04-22 | 2004-04-22 | |
US60/564,477 | 2004-04-22 | ||
TW94112683A TW200538702A (en) | 2004-04-22 | 2005-04-21 | Vibration resistant interferometry |
TW94112683 | 2005-04-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005106386A2 WO2005106386A2 (en) | 2005-11-10 |
WO2005106386A3 true WO2005106386A3 (en) | 2006-11-23 |
Family
ID=35242290
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/013741 WO2005106386A2 (en) | 2004-04-22 | 2005-04-22 | Vibration resistant interferometry |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2007534942A (en) |
WO (1) | WO2005106386A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2232195B1 (en) * | 2007-12-14 | 2015-03-18 | Zygo Corporation | Analyzing surface structure using scanning interferometry |
JP2010112865A (en) * | 2008-11-07 | 2010-05-20 | Ryoka Systems Inc | White interference measuring device and method |
JP5477183B2 (en) * | 2010-06-14 | 2014-04-23 | オムロン株式会社 | Measuring device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5323012A (en) * | 1991-08-16 | 1994-06-21 | The Regents Of The University Of California | Apparatus for positioning a stage |
US5589938A (en) * | 1995-07-10 | 1996-12-31 | Zygo Corporation | Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration |
US6624894B2 (en) * | 2001-06-25 | 2003-09-23 | Veeco Instruments Inc. | Scanning interferometry with reference signal |
-
2005
- 2005-04-22 JP JP2007509660A patent/JP2007534942A/en active Pending
- 2005-04-22 WO PCT/US2005/013741 patent/WO2005106386A2/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5323012A (en) * | 1991-08-16 | 1994-06-21 | The Regents Of The University Of California | Apparatus for positioning a stage |
US5589938A (en) * | 1995-07-10 | 1996-12-31 | Zygo Corporation | Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration |
US5777741A (en) * | 1995-07-10 | 1998-07-07 | Zygo Corporation | Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration |
US6624894B2 (en) * | 2001-06-25 | 2003-09-23 | Veeco Instruments Inc. | Scanning interferometry with reference signal |
Also Published As
Publication number | Publication date |
---|---|
WO2005106386A2 (en) | 2005-11-10 |
JP2007534942A (en) | 2007-11-29 |
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