TW200723980A - Differential comparison inspection method and apparatus thereof - Google Patents

Differential comparison inspection method and apparatus thereof

Info

Publication number
TW200723980A
TW200723980A TW095136657A TW95136657A TW200723980A TW 200723980 A TW200723980 A TW 200723980A TW 095136657 A TW095136657 A TW 095136657A TW 95136657 A TW95136657 A TW 95136657A TW 200723980 A TW200723980 A TW 200723980A
Authority
TW
Taiwan
Prior art keywords
region
master image
pattern
horn
fillet
Prior art date
Application number
TW095136657A
Other languages
Chinese (zh)
Other versions
TWI303540B (en
Inventor
Norio Asai
Yuji Akagi
Jun Onishi
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200723980A publication Critical patent/TW200723980A/en
Application granted granted Critical
Publication of TWI303540B publication Critical patent/TWI303540B/zh

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach

Landscapes

  • Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A fillet formed in a concave shaped corner on a pattern and a horn formed in a convex shaped edge are respectively detected from a master image. Then a range of the fillet region which is a region of the vicinity of the detected fillet is determined. At the same time a range of the horn region which is a region of the vicinity of the detected horn is determined. A comparison inspection according to the difference between the master image and the object image is performed. When such a comparison inspection is performed, the difference with respect to an excess region which is a region of the pattern of the object image formed in excess of the region of the pattern displayed by the master image in the fillet region of the master image is excluded. In contrast, the difference with respect to the region of the pattern of the object image formed short of the region of pattern displayed by the master image in the horn region of the master image is excluded.
TW095136657A 2005-12-13 2006-10-03 Differential comparison inspection method and apparatus thereof TW200723980A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005358962A JP2007163259A (en) 2005-12-13 2005-12-13 Difference comparison inspection method and difference comparison inspection device

Publications (2)

Publication Number Publication Date
TW200723980A true TW200723980A (en) 2007-06-16
TWI303540B TWI303540B (en) 2008-11-21

Family

ID=38165559

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095136657A TW200723980A (en) 2005-12-13 2006-10-03 Differential comparison inspection method and apparatus thereof

Country Status (4)

Country Link
JP (1) JP2007163259A (en)
KR (1) KR100821038B1 (en)
CN (1) CN1982880A (en)
TW (1) TW200723980A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010128795A (en) * 2008-11-27 2010-06-10 Aisin Seiki Co Ltd Obstacle detector
JP5169907B2 (en) * 2009-02-27 2013-03-27 ブラザー工業株式会社 Head mounted display
CN103674959A (en) * 2012-09-21 2014-03-26 英业达科技有限公司 System and method for detecting electronic element on circuit board
JP6675831B2 (en) * 2015-03-27 2020-04-08 株式会社日立産機システム Print inspection method, print inspection apparatus using the same, and print inspection apparatus main body
US9646191B2 (en) * 2015-09-23 2017-05-09 Intermec Technologies Corporation Evaluating images
JP7293046B2 (en) * 2019-08-23 2023-06-19 東レエンジニアリング株式会社 Wafer visual inspection apparatus and method
CN111739020B (en) * 2020-07-31 2020-12-01 成都数之联科技有限公司 Automatic labeling method, device, equipment and medium for periodic texture background defect label
CN113340909B (en) * 2021-08-05 2021-11-16 常州铭赛机器人科技股份有限公司 Glue line defect detection method based on machine vision

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4648053A (en) 1984-10-30 1987-03-03 Kollmorgen Technologies, Corp. High speed optical inspection system
JPH06185999A (en) * 1992-12-21 1994-07-08 Toshiba Corp Method and device for inspecting pattern
GB2389178B (en) 2001-12-31 2004-10-27 Orbotech Ltd Method for inspecting patterns

Also Published As

Publication number Publication date
KR100821038B1 (en) 2008-04-08
JP2007163259A (en) 2007-06-28
CN1982880A (en) 2007-06-20
TWI303540B (en) 2008-11-21
KR20070062905A (en) 2007-06-18

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees