WO2005101430A1 - High-voltage generator - Google Patents
High-voltage generator Download PDFInfo
- Publication number
- WO2005101430A1 WO2005101430A1 PCT/FR2005/000642 FR2005000642W WO2005101430A1 WO 2005101430 A1 WO2005101430 A1 WO 2005101430A1 FR 2005000642 W FR2005000642 W FR 2005000642W WO 2005101430 A1 WO2005101430 A1 WO 2005101430A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electric generator
- generator according
- voltage
- power supply
- frequency
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/4815—Resonant converters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
- H05H2242/22—DC, AC or pulsed generators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
Definitions
- the present invention relates to a high frequency high voltage electrical generator with low internal resistance and high energy efficiency.
- the industrial applications of high voltage high frequency electric generators are manifold in all fields. There exists for these electric generators a particular and interesting field of application constituted by all the possibilities of treatment by the plasma effect. In this field, numerous electric generators for plasma treatment have been imagined described and published in the scientific literature or by making the descriptions of the patents of the invention known to the public.
- a high frequency high voltage electric generator which may be suitable for generating a plasma used in particular for surface treatment. These are generators whose high voltage and high frequency generates a plasma under atmospheric pressure, that is to say at ambient free pressure and allowing plasma treatment carried out on a surface.
- one or more interior or exterior surface (s) of a body, an object or a product can be treated with plasma.
- current electric generators use last stage a high frequency transformer with inductive coupling.
- These are special transformers with a ferrite core, the cost of which is already high.
- these transformers have a particularly handicapping frequency limit due to the early saturation of the ferrites. These become saturated at a so-called cut-off frequency beyond which, the energy transmission deteriorates significantly. This drawback condemns the use of this type of transformers beyond the cut-off frequency.
- the latter is located only at the upper limit of a lower range of high-frequencies of the entire exploitable area of interest, for example for atmospheric plasma applications.
- the object of the invention is to provide an electrical generator of reduced size, high energy efficiency and competitive cost, having the electrical performance necessary for the establishment of a plasma for treating a surface of a body, an object or a product.
- the electric generator according to the invention with low internal resistance and high energy efficiency has an electrical supply and a resonant voltage multiplier circuit, the two being each controlled by a pilot and characterized by. a switching power supply from the electrical distribution sector controlled at a fixed switching frequency,.
- the electric generator according to the invention has a very competitive cost price and a lower incidence of the assembly cost for this kind of product. . Due to its attractive energy efficiency, the electric generator according to 1 invention can remove heat by simple conventional means. for example static by dissipation radiators or others with or without the possible assistance of a fan. Its performance can therefore go beyond that of previous generators.
- FIG. 1 is a general block diagram showing the general composition in main functions of the electric generator according to the invention
- FIG. 2 is a block diagram of the DECALIM switching power supply showing the loop for regulating its output voltage
- FIG. 3 is a block diagram of the resonant system SYRES voltage multiplier
- the FIG. 4 is a block diagram of the PIOSYRES pilot for controlling the SYRES resonant system
- FIG. 5 is a more detailed diagram of the resonant voltage multiplier system SYRES
- FIG. 6 is a schematic perspective view of the capacitive coupling voltage converter CCTT.
- the electric generator according to the invention is represented in its basic general functions in FIG. 1. The main functions can be distributed as follows: a DECALIM switching power supply and its regulation circuit, a SYSRES resonant system on the output stage and its pilot or control circuit, and a microcontroller for management, command and control MICROGER.
- the DECALIM switching power supply delivers an adjustable and regulated DC voltage to a SYRES resonant system tuned to a resonant frequency
- the generator consists first of all of the DECALIM switching power supply from the distribution voltage of the electrical network, for example the domestic alternating current network at 220 volts at 50Hz. This network is called REASEC in the drawing of Figure 1.
- the switching power supply
- DECALIM aims to deliver output from the AC alternating voltage of the sector or of the network a continuous electrical voltage DC of value adjustable according to the application for example between 100 and 600 volts DC, but stable and regulated to keep constant the high electrical voltage output of the electric generator and this with another regulation loop known as self-piloting acting from the output voltage on the excitation of the resonant circuit which will be explained below.
- This DECALIM power supply is made up of the different blocks shown in FIG. 2.
- REDFIL rectifier and filtering block with diode bridge for example with Graetz bridge
- the filtering part of this REDF- ⁇ L block includes chemical capacities to ensure the production of direct voltage as well as the energy reserve and protection against possible high frequency returns from the switching block which follows it.
- the cutting block is the intermediate stage of this switching power supply. Is it a CHOE chopper or chopper? formed of four transistors, for example IGBTs arranged in an H-shaped bridge and controlled by a switching signal with switching frequency Fd.
- the output voltage is increased by a TRAFO power transformer then rectified and filtered by a REDEF high frequency rectifier to arrive at SE output at a DC voltage at regulated level, between 100 and 600 volts which will feed the SYRES resonant system.
- a TRAFO power transformer then rectified and filtered by a REDEF high frequency rectifier to arrive at SE output at a DC voltage at regulated level, between 100 and 600 volts which will feed the SYRES resonant system.
- Three additional functions are associated with the DECALIM decoi-ipage power supply, namely the stabilization and regulation of the output voltage and the power control by the pilot of the PIOLIM switching power supply as well as the safety control which is carried out in MICROGER by measuring and limiting the current at the level of the CHOP chopping bridge.
- the PIOLIM pilot of the switching power supply is a rectangular pulse generator circuit with the switching frequency Fd for example equal to 100 Khz and of variable width coming from a pulse generator-modulator according to a width modulation known as PM from an external control allowing the dimming of the energy brought to the resonant SYRES circuit.
- Galvanic isolation for example by transformer, is provided between the PIOLIM pilot and the CHOP chopper or chopper.
- the energy provided by this supply can be modified by manual modification of the PWM modulation depth of these pulses, for example in width. In the context of an industrial application, this modification is carried out through the regulation loop provided between the output of this supply and the control.
- the energy provided by this supply constitutes the incident energy of the system taken by it from the sector for the intended application, for example of plasma surface treatment.
- Stabilization and regulation of the voltage at point SE is a feedback loop acting on the PIOLIM pilot through the MICROGER microcontroller to ensure a stabilized and constant voltage at point SE, i.e. a constant supply voltage from the SYRES resonant system.
- This regulation can for example function according to the principle of comparison with a reference voltage.
- the difference automatically generates an adjustment of the power by the PV7M pulse modulation in width in order to readjust the tension to the desired value.
- the output voltage of the electric generator according to the invention is generated by the resonant system SYRES which is a stage in high frequency oscillator of High Voltage OHT intended to deliver under low impedance to one or more body or object (s) or product (s) ) to treat individually or simultaneously, a high sinusoidal voltage of large amplitude and high frequency ixed or stabilized previously chosen.
- the working frequency is the resonance frequency Fr of this oscillator under load. This is known for each particular industrial application targeted since it has been determined beforehand experimentally or when the industrial processing line is put into service. In the industrial process, there may also be several successive treatments which may each require a specific frequency.
- the general principle consists in determining the frequency linked to the desired treatment, to build and adjust the OHT resonant circuit with its load and its capacity of adjustment so that the resonant frequency of it corresponds to the frequency determined for the treatment. referred. It suffices then to excite the circuit resonating at this frequency which is also by construction its frequency of resonance under load so that the generator functions optimally and that the treatment is successful in all its characteristics.
- the OHT circuit as shown in FIG. 5 is of the LC type, namely formed of a inductance and capacity.
- the point SM is also the input of the CAT circuit for driving or excitation of OHT mounted between SM and M.
- This CAT circuit consists essentially of IGBT or MOSFET transistors controlled on their respective gate j by a pulse signal at the frequency of resonance Fr of the OHT oscillator under load.
- This excitation pulse signal is supplied at this frequency Fr and according to a variable energy by the pilot circuit PIOSY-RES of the resonant system SYRES obtained in the manner described below.
- the resonance frequency Fr is a radiofrequency between 1 and 5 MHz. As indicated, it is fixed and self-stabilized for a given application or for a given effect. It is generated as follows in the example described below by the PIOSYRES circuit for controlling the resonant system (FIG. 4). This is entirely digital. Using a DDS Digital Frequency Synthesizer, a sinusoidal signal of precise frequency is used directly and which, after conversion using a Digital Analog Converter DAC becomes a DC voltage of high precision. As shown in FIG.
- the passage of the two signals through a comparator makes it possible to obtain variabZLes rectangular pulses in cyclic relationship but at fixed frequency, that is to say a periodic signal at fixed frequency of rectangular pulses of adjustable width as a function of the DC voltage level.
- This possibility of variation is used to autopilot the resonant system from its output voltage at the point ST in order to keep a constant voltage at this point independently of the various variations and fluctuations and in particular capacitive of the load.
- This consistency in operation makes it possible to guarantee uniform treatment for each object or product and from one object or product to another.
- An adjustment of the excitation frequency is also provided to restore the optimal conditions following various fluctuations, in particular capacitive and load.
- the capacitive tubular voltage converter CCTT is a hollow tubular body CT made of electrically insulating material, for example of material known under the name TEFLON for frequencies below 1 MHz or ceramic for frequencies above 1 MHz shown more particularly in FIG. 6.
- this tubular body of electrically insulating material is covered with a silver layer E interrupted by an interval or rectangular slot F a few millimeters in width, parallel to the generator of the tubular body CT constituting the primary with a single large turn width of this CCTT capacitive coupling voltage converter.
- Its external lateral surface is furnished with a winding, for example in Litz yarn to constitute the secondary.
- the number of turns S of this external winding constituting the secondary gives the voltage multiplier coefficient.
- the series capacitor C1 can be placed inside the tubular body CT of the tubular voltage converter CCTT. This resonant system does not have a magnetic coupling like the generators of the prior art. The energy transfer takes place simply and only by capacitive effect.
- the silver layer E constituting the primary plays the role of first electrode while the turns S of the external winding constitute as many electrodes forming with this first electrode as many second electrodes to constitute as many individual capacitors in series.
- the capacitive tubular voltage converter CCTT ensures voltage multiplication in the desired ratio and a only capacitive transfer of high voltage and high frequency energy with the least possible loss.
- the use of capacitive coupling makes it possible to significantly reduce the dimensions without encountering problems linked to electrical isolation.
- This generator has a low internal resistance thanks to the low internal resistance of its switching power supply. Its output current can thus rise to fairly high values, for example a few hundred amperes useful in applications by plasma surface treatment. atmospheric.
- the operation of the electric generator according to the invention is controlled by a general control by MICROGER microcontroller ensuring on the one hand the operation control and on the other hand the safety controls such as for example the measurement of the current and its limitation in the power supply and the measurement of the voltage delivered by the switching power supply for its regulation.
- the electric generator according to the invention is also distinguished by the following two characteristics of autopilot and regulation. The first concerns the so-called self-control loop between the output of the oscillator and the general control by the MICROGER microprocessor. According to this loop, the output voltage is measured to maintain the resonance and readjust the high output voltage. Another loop between the switching power supply and the microcontroller ensures stabilization and regulation of the voltage delivered by this power supply to the resonant system.
- the electric generator according to the invention can find numerous industry-related applications.
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Plasma Technology (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05739690A EP1726022A1 (en) | 2004-03-17 | 2005-03-16 | High-voltage generator |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0402760A FR2867916B1 (en) | 2004-03-17 | 2004-03-17 | HIGH VOLTAGE HIGH VOLTAGE ELECTRIC GENERATOR WITH LOW INTERNAL RESISTANCE AND HIGH ENERGY EFFICIENCY |
FR0402760 | 2004-03-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005101430A1 true WO2005101430A1 (en) | 2005-10-27 |
Family
ID=34896598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2005/000642 WO2005101430A1 (en) | 2004-03-17 | 2005-03-16 | High-voltage generator |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1726022A1 (en) |
FR (1) | FR2867916B1 (en) |
WO (1) | WO2005101430A1 (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1133764A (en) * | 1954-10-29 | 1957-04-02 | Ferranti Ltd | Windings improvements for transformers, reactors or other electromagnetic induction devices |
US2860312A (en) * | 1953-12-23 | 1958-11-11 | Sarkes Tarzian | Antenna input transformer |
US4748430A (en) * | 1985-11-19 | 1988-05-31 | Thomson-Cgr | Air-cooled high-frequency current transformer |
US5585920A (en) * | 1988-04-06 | 1996-12-17 | Bodenseewerk Perkin-Elmer Gmbh | Device for generating a magnetic field in an atomic absorption spectrometer |
WO2003052882A2 (en) * | 2001-12-15 | 2003-06-26 | Hüttinger Elektronik GmbH & Co. KG | High frequency excitation system |
-
2004
- 2004-03-17 FR FR0402760A patent/FR2867916B1/en not_active Expired - Fee Related
-
2005
- 2005-03-16 EP EP05739690A patent/EP1726022A1/en not_active Withdrawn
- 2005-03-16 WO PCT/FR2005/000642 patent/WO2005101430A1/en not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2860312A (en) * | 1953-12-23 | 1958-11-11 | Sarkes Tarzian | Antenna input transformer |
FR1133764A (en) * | 1954-10-29 | 1957-04-02 | Ferranti Ltd | Windings improvements for transformers, reactors or other electromagnetic induction devices |
US4748430A (en) * | 1985-11-19 | 1988-05-31 | Thomson-Cgr | Air-cooled high-frequency current transformer |
US5585920A (en) * | 1988-04-06 | 1996-12-17 | Bodenseewerk Perkin-Elmer Gmbh | Device for generating a magnetic field in an atomic absorption spectrometer |
WO2003052882A2 (en) * | 2001-12-15 | 2003-06-26 | Hüttinger Elektronik GmbH & Co. KG | High frequency excitation system |
Also Published As
Publication number | Publication date |
---|---|
EP1726022A1 (en) | 2006-11-29 |
FR2867916A1 (en) | 2005-09-23 |
FR2867916B1 (en) | 2006-08-11 |
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