WO2005101115A1 - Optical switch - Google Patents

Optical switch Download PDF

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Publication number
WO2005101115A1
WO2005101115A1 PCT/SE2005/000539 SE2005000539W WO2005101115A1 WO 2005101115 A1 WO2005101115 A1 WO 2005101115A1 SE 2005000539 W SE2005000539 W SE 2005000539W WO 2005101115 A1 WO2005101115 A1 WO 2005101115A1
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WO
WIPO (PCT)
Prior art keywords
membrane
optical switch
waveguide
waveguides
switch according
Prior art date
Application number
PCT/SE2005/000539
Other languages
French (fr)
Inventor
Marcin Swillo
Lars Thylén
Original Assignee
Phoxtal Communications Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Phoxtal Communications Ab filed Critical Phoxtal Communications Ab
Publication of WO2005101115A1 publication Critical patent/WO2005101115A1/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3536Optical coupling means having switching means involving evanescent coupling variation, e.g. by a moving element such as a membrane which changes the effective refractive index
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/356Switching arrangements, i.e. number of input/output ports and interconnection types in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576Temperature or heat actuation

Definitions

  • the present invention refers to an optical swit.-h.
  • An optical switch is a basic element in recon igurable optical network systems. Typical solutions to realize light switching in present systems are based on: - specular reflection by mirror adjusting, where light can be reflected at variable angle or variabl-- posi- tion, - Mach-Zehnder interferometer (light can be switched between two output ports by applying phase shift of light propagated in one arm of " an interferometer) - directional coupler, where coupling strength between waveguides is defined by distance between waveguides ( light switching between two output ports is realized by moving one- of coupled waveguides) .
  • the present invention of optical switch is based on a directional coupler.
  • the distance between the two coupled waveguides is fixed.
  • the light switching between output ports is obtained by a movable membrane suspended just above one of waveguides (fig.2) . If the distance between membrane and waveguide is large enouch the propagation constant of guided light is almost the same as without the membrane . In this position of the membrane, the waveguides are creating a symmetrical coupler ( fig.l). if light is launched only to the first waveguide (fig.2), the splitting ratio between the out ⁇ put ports depends on length of the coupler. The length of the coupler corresponds to the maximum transmission of light from an input waveguide (IA) to a second waveguide (I 2 ). In this way a cross-state is realized.
  • the coupler becomes asymmetric.
  • the propagation constant is increasing because the refractive index of the membrane is higher than air.
  • the maximum increase of the propagation con- stant is obtained when the membrane is touching the waveguide core.
  • the difference m refractive index between the waveguides results m a phase mismatch between guided modes and the light will not be coupled to the second waveguide. This means that the light launched to one of the input waveguides remains in the same waveguide at the output .
  • the coupler is then m a bar state.
  • the bar state and the cross state the light can be launched to any of the input ports.
  • the bar state the light will remain in the same waveguides in the output ports.
  • the cross state the light will be coupled to the opposite waveguides in the output ports .
  • the switch utilizes a metal membrane, and the switch is in the bar state of the coupler, the light propagated m the waveguide touched by membrane is strongly attenuated. For this reason an optical switch with a metal membrane can not use both input ports when the coupler s in the bar state.
  • the present invention solves this problem.
  • the present invention thus refers to an optical switch for coupling light between two adjacent and parallel waveguides, which waveguides are formed in a dielectric material, where a membrane is provided adjacent a first of said waveguides, which membrane is movable between a position away from the said first waveguide and a position close to or abutting the said waveguide, thereby changing the refractive index of the said first waveguide, and is characterised in, that the mer ⁇ - brane is made of a dielectric material.
  • FIG. 4 an optical switch for a pre-defined wavelength with movable membrane is shown -
  • Figure 5 shows the crosssection of an optical switch for pre-defined wavelength movable membrane in the center of the M-Z interferometer, with the membrane state far from waveguides -
  • Figure 6 The cross-section of the optical switch for ' pre-defined wavelength with movable membrane in the center of the M-Z interferometer (membrane state: close to waveguides)
  • FIG 7 shows a top view of the optical switch for pre-defined wavelength with movable membrane -
  • Figure 8 illustrates a simulation of the Bragg grating transmission for: statel- the membrane touching the waveguide, state2- the membrane far from the waveguide -
  • Figure 9 shows a switchable add-drop filter with 2x2 switch
  • Figure 10 shows a switchable add-drop filter from fig.7 with optical switch with movable membrane.
  • an optical switch 1 for coupling light between two adjacent and parallel waveguides 2, 3 is shown.
  • the waveguides 2, 3 are formed in a dielectric material.
  • the switch comprises a membrane 4, that is provided adjacent a first 3 of said waveguides.
  • the membrane 4 is movable between a position away from the said first waveguide 3, as shown in Fig 1, and a position close to or abutting the said waveguide 3, as shown in figure 3, thereby changing the refractive index of the said first waveguide 3.
  • the membrane 4 is made of a di- electric material.
  • the membrane 4 is made of the same or similar material as the core of the waveguides or cladding 5 in which the waveguides 2, 3 are formed.
  • a support 6 on which the membrane rests between the side of the membrane 4 facing the substrate 5 and the substrate 5, giving a distance between the membrane and the substrate -when the membrane 4 is in a stressless state.
  • the thickness and refractive index of the dielectric membrane has to be defined in a state when the membrane is touching the waveguide, i.e. the bar state of the coupler .
  • the light guided in a waveguide which is touched by the dielectric membrane can be easy coupled to the membrane. This will results in significant loss of transmitted light to the output port.
  • the propagation constants of guided modes in waveguide and membrane, when the membrane is touching the waveguide should be separated as much as possible. The stronger the phase mismatch between modes in waveguide and membrane, the lower the loss of the light transmitted to output port will be. The phase mismatch between those modes depends on the thickness and refractive index of the membrane.
  • the coupler switch presented in fig.l can have the following parameters.
  • the thickness of the membrane is 1 micron
  • the refractive index is 1.46
  • the distance between the membrane and the waveguide is 1 micron for the cross state of the coupler
  • the refractive index of the cladding is 1.445 microns
  • the for the core is 1.45588 microns.
  • the waveguide dimension are a ⁇ width of 5 microns and a height of 6 microns.
  • the distance between the waveguides is 6 microns.
  • the only moving element in tb-is optical switch is the membrane.
  • the membrane -Ls touching the core of a waveguide it is altering the propagations constants of the guided modes. It is important that all the propagation constants of the modes of a waveguide with touched membrane are enough different from the propaga- tion constant of the mode of the waveguide without the membrane .
  • the guided light in a waveguide touched by the membrane is not coupled to the modes of the membrane, but it is only partially guided in the membrane region. This will ensure a minimum propagation loss caused by light leal- ing to the membrane.
  • the membrane is moving up and down by any means of electrostatic force, or thermal induced stress in the membrane.
  • the position of the membrane can be bistable, monostable or adjusted continuously with respect to the waveguide core.
  • the membrane 7 is located adjacent a wave guide 8, 9 provided with a Bragg grating 10, 11, where the Bragg grating is arranged to reflect incoming ligth when the membrane 7 is at a distance from the wave guide 8, 9 and arranged to pass the light when the membrane 7 is close to or abutting the wave guide at the Bragg grating, please see fig. 4.
  • the membrane 7 is positioned adjacent the two wave guides 8, 9, each having a Bragg grating 10, 11, m an optical switch at the center of a mach- zender interferometer, please see fig.7.
  • numeral 12 indicates the aforementioned electrode to operaste the membrane and numeral 13 indicates a wire bonding pad.
  • Fig. 4 an optical switch consisting of a M-Z interferometer (based on two 50/50 couplers) and two identical Bragg gratings (one m each arm of interferometer) i5 is shown.
  • the optical signal is coming to input port.
  • the light, where the wavelength doesn't satisfy the Bragg condition is transmitted through the grating to the output ⁇ port. If the Bragg condition is satisfied the light is reflected from the grating and then transmitted to the drop port. In the same way, light coming to Add port and which is reflected by the Bragg grating is transmitted to the output port.
  • the switching process is controlled by the position of a membrane placed above both waveguides, creating a M-Z interferometer.
  • a top view of the optical switch for predefined wavelength with movable membrane is presented.
  • the electrode on the top layer is used in order to apply an electrostatic force between the top electrode and silicone substrate.
  • the silicon substrate acts as a second electrode.
  • the electrostatic force is
  • 5 length of light reflected by the Bragg grating is defined by the propagation constant of guided mode in the waveguide and the grating period. If the membrane is moved closer to the waveguide core, as shown in fig.6, the propagation constant of guided mode is higher. Then o the wavelength which is satisfying the Bragg condition increases. The maximum change of wavelength satisfying the Bragg condition is obtained when the membrane is touching the waveguide core.
  • the two position of the membrane namely far from waveguide and close to the waveguide, corresponds to two different wavelengths which are reflected by the Bragg grating.
  • the refractive index of the dielectric membrane is higher than air. This means that, the membrane can guide light as a slab waveguide. It s important that the propagation constants for all modes existing in the memorane are far enough from propagation constant of the guided mode m waveguide. In this way, tne light guided through the waveguide is not coupled to the membrane due to phase mismatch of modes. The membrane is only modifying the propagation constant of guided mode in waveguide.
  • the membrane is far from both waveguides and the light is incoming to input and/or add port and its wavelength satisfy the Bragg condition of both gratings, then the light is reflecting by the gratings and is transmitted to the output port or the drop port respectively. If for the same wavelength the membrane is moved close to both waveguides, this will change the
  • the strength of the gratings defines crosstalk to drop port .
  • fig.8 there is presented a simulation of transmission through a 10mm long Bragg grating with sinus appo- d zation and maximum refractive index modulation 1.4-10 "3 .
  • the solid and dash line represents trans is- sion when the membrane is touching, please see fig.6 and far, fig. 9, from the waveguides respectively.
  • the change of effective refractive index caused by the membrane is ⁇ n e fect ⁇ ve-0 - 0007 , for a refractive index of the membrane of 1.46, a refractive index of the core of 1.45588, of the cladding of 1.445.
  • the waveguide dimensions are : 5 microns wide and 6 microns high.
  • the isolation between add and drop port for the grating presented in fig. 10 is ca . -60dB.
  • the shift in operating wavelength of the Bragg grating caused by the membrane corresponds to approximately one ITU channel, in this example.
  • the optical switch with movable membrane can be directly applied in switchable add-drop filter presented in fig . 9.
  • numerals 14 - 17 indicates wave guides, 18 a 2X2 switch, 19, 20 Bragg gratings and 21 - 24 reflectors.
  • the typical solution for a 2x2 switch used in a device presented in fig. 9 is a thermal switch based on a Mach-Zehnder interferometer.
  • the isolation between the add and the drop port is limited by the quality of two couplers used in this interferometer.
  • a typical isolation is -20dB for a single thermal switch and about -40dB for two cascaded switches.
  • the optical switch with a movable membrane can be applied in a switchable add-drop filter as 2x2 switch, please see fig. 10.
  • the referens numerals 14 - 24 indicates the same thing as in figure 11.
  • the switch 18 according to the present invention includes a membrane 25.
  • the additional phase shift is added after one of the Bragg gratings, in order to exchange the output port for the add port.
  • the isolation between the add and the drop port can be improved up to -60dB if using the grating presented above.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

An optical switch for coupling light between two adjacent and parallel waveguides (2,3), which waveguides are formed in a dielectric material, where a membrane (4;7;25) is provided adjacent a first (3) of said waveguides, which membrane (4;7;25) is movable between a position away from the said first waveguide (3) and a position close to or abutting the said waveguide, thereby changing the refractive index of the said first waveguide (3), c h a r a c t e r i s e d i n, that the membrane (4;7;25) is made of a dielectric material.

Description

Optical switch
The present invention refers to an optical swit.-h. An optical switch is a basic element in recon igurable optical network systems. Typical solutions to realize light switching in present systems are based on: - specular reflection by mirror adjusting, where light can be reflected at variable angle or variabl-- posi- tion, - Mach-Zehnder interferometer (light can be switched between two output ports by applying phase shift of light propagated in one arm of" an interferometer) - directional coupler, where coupling strength between waveguides is defined by distance between waveguides (light switching between two output ports is realized by moving one- of coupled waveguides) .
The present invention of optical switch is based on a directional coupler. However, the distance between the two coupled waveguides is fixed. The light switching between output ports is obtained by a movable membrane suspended just above one of waveguides (fig.2) . If the distance between membrane and waveguide is large enouch the propagation constant of guided light is almost the same as without the membrane . In this position of the membrane, the waveguides are creating a symmetrical coupler (fig.l). if light is launched only to the first waveguide (fig.2), the splitting ratio between the out¬ put ports depends on length of the coupler. The length of the coupler corresponds to the maximum transmission of light from an input waveguide (IA) to a second waveguide (I2). In this way a cross-state is realized.
If the membrane is pushed down and it touches or nearly touches the waveguide (fig.3), the coupler becomes asymmetric. When the membrane is closer to the waveguide, the propagation constant is increasing because the refractive index of the membrane is higher than air. The maximum increase of the propagation con- stant is obtained when the membrane is touching the waveguide core. The difference m refractive index between the waveguides results m a phase mismatch between guided modes and the light will not be coupled to the second waveguide. This means that the light launched to one of the input waveguides remains in the same waveguide at the output . The coupler is then m a bar state.
In both states, the bar state and the cross state, the light can be launched to any of the input ports. In the bar state the light will remain in the same waveguides in the output ports. In the cross state the light will be coupled to the opposite waveguides in the output ports .
If the switch utilizes a metal membrane, and the switch is in the bar state of the coupler, the light propagated m the waveguide touched by membrane is strongly attenuated. For this reason an optical switch with a metal membrane can not use both input ports when the coupler s in the bar state.
The present invention solves this problem. The present invention thus refers to an optical switch for coupling light between two adjacent and parallel waveguides, which waveguides are formed in a dielectric material, where a membrane is provided adjacent a first of said waveguides, which membrane is movable between a position away from the said first waveguide and a position close to or abutting the said waveguide, thereby changing the refractive index of the said first waveguide, and is characterised in, that the merα- brane is made of a dielectric material.
In the following, the invention will be described in more detail, partly in connection with exemplifying embodiments of the invention, where - Figure 1 shows a cross-section of the optical switch in the center of the coupler for cross-state - Figure 2 shows a top view of the optical switch - Figure 3 shows a cross-section in the center of the coupler of the optical switch, for bar state. - Figure 4 an optical switch for a pre-defined wavelength with movable membrane is shown - Figure 5 shows the crosssection of an optical switch for pre-defined wavelength movable membrane in the center of the M-Z interferometer, with the membrane state far from waveguides - Figure 6 The cross-section of the optical switch for' pre-defined wavelength with movable membrane in the center of the M-Z interferometer (membrane state: close to waveguides) - Figure 7 shows a top view of the optical switch for pre-defined wavelength with movable membrane - Figure 8 illustrates a simulation of the Bragg grating transmission for: statel- the membrane touching the waveguide, state2- the membrane far from the waveguide - Figure 9 shows a switchable add-drop filter with 2x2 switch - Figure 10 shows a switchable add-drop filter from fig.7 with optical switch with movable membrane. -
In figure 1 and 2 an optical switch 1 for coupling light between two adjacent and parallel waveguides 2, 3 is shown. The waveguides 2, 3 are formed in a dielectric material. The switch comprises a membrane 4, that is provided adjacent a first 3 of said waveguides. The membrane 4 is movable between a position away from the said first waveguide 3, as shown in Fig 1, and a position close to or abutting the said waveguide 3, as shown in figure 3, thereby changing the refractive index of the said first waveguide 3.
According to the invention the membrane 4 is made of a di- electric material.
According to a preferred embodiment of the invention, the membrane 4 is made of the same or similar material as the core of the waveguides or cladding 5 in which the waveguides 2, 3 are formed.
According to another preferred embodiment of the invention there is provided a support 6 on which the membrane rests between the side of the membrane 4 facing the substrate 5 and the substrate 5, giving a distance between the membrane and the substrate -when the membrane 4 is in a stressless state. The thickness and refractive index of the dielectric membrane has to be defined in a state when the membrane is touching the waveguide, i.e. the bar state of the coupler .
The light guided in a waveguide which is touched by the dielectric membrane can be easy coupled to the membrane. This will results in significant loss of transmitted light to the output port. In order to avoid this loss the propagation constants of guided modes in waveguide and membrane, when the membrane is touching the waveguide, should be separated as much as possible. The stronger the phase mismatch between modes in waveguide and membrane, the lower the loss of the light transmitted to output port will be. The phase mismatch between those modes depends on the thickness and refractive index of the membrane.
As an example the coupler switch presented in fig.l can have the following parameters. The thickness of the membrane is 1 micron, the refractive index is 1.46, the distance between the membrane and the waveguide is 1 micron for the cross state of the coupler, the refractive index of the cladding is 1.445 microns and the for the core is 1.45588 microns.
The waveguide dimension are aι width of 5 microns and a height of 6 microns. The distance between the waveguides is 6 microns.
The only moving element in tb-is optical switch is the membrane. When the membrane -Ls touching the core of a waveguide, it is altering the propagations constants of the guided modes. It is important that all the propagation constants of the modes of a waveguide with touched membrane are enough different from the propaga- tion constant of the mode of the waveguide without the membrane .
In the presented example, when the membrane is touching the waveguide, i.e. the bar state of the coupler the overlap between modes is negligible because of the phase mismatch between modes - The larger the difference between the propagation constants of those modes, the lower the coupling between the waveguides i.e. lower crosstalk between the output ports will occur.
The guided light in a waveguide touched by the membrane is not coupled to the modes of the membrane, but it is only partially guided in the membrane region. This will ensure a minimum propagation loss caused by light leal- ing to the membrane.
The membrane is moving up and down by any means of electrostatic force, or thermal induced stress in the membrane. The position of the membrane can be bistable, monostable or adjusted continuously with respect to the waveguide core.
According to another preferred embodiment of the invention the membrane 7 is located adjacent a wave guide 8, 9 provided with a Bragg grating 10, 11, where the Bragg grating is arranged to reflect incoming ligth when the membrane 7 is at a distance from the wave guide 8, 9 and arranged to pass the light when the membrane 7 is close to or abutting the wave guide at the Bragg grating, please see fig. 4.
According to yet another embodiment the membrane 7 is positioned adjacent the two wave guides 8, 9, each having a Bragg grating 10, 11, m an optical switch at the center of a mach- zender interferometer, please see fig.7. In fig. 7 referens numeral 12 indicates the aforementioned electrode to operaste the membrane and numeral 13 indicates a wire bonding pad.
10
In Fig. 4 an optical switch consisting of a M-Z interferometer (based on two 50/50 couplers) and two identical Bragg gratings (one m each arm of interferometer) i5 is shown.
The optical signal is coming to input port. The light, where the wavelength doesn't satisfy the Bragg condition is transmitted through the grating to the output Ό port. If the Bragg condition is satisfied the light is reflected from the grating and then transmitted to the drop port. In the same way, light coming to Add port and which is reflected by the Bragg grating is transmitted to the output port.
>5 The switching process is controlled by the position of a membrane placed above both waveguides, creating a M-Z interferometer.
10 In fig. 7 a top view of the optical switch for predefined wavelength with movable membrane is presented. As an example the electrode on the top layer is used in order to apply an electrostatic force between the top electrode and silicone substrate. The silicon substrate acts as a second electrode. The electrostatic force is
5 pushing the membrane down until it will touch the waveguide. When the electrostatic field is off, the strain generated in membrane is pulling the membrane back to the previous position, which is far from waveguide . o If the distance between the membrane and the waveguide is large enough, as shown in fig. 5, the propagation constant of guided light is the same as without the membrane. In this position of the membrane, the wave-
5 length of light reflected by the Bragg grating is defined by the propagation constant of guided mode in the waveguide and the grating period. If the membrane is moved closer to the waveguide core, as shown in fig.6, the propagation constant of guided mode is higher. Then o the wavelength which is satisfying the Bragg condition increases. The maximum change of wavelength satisfying the Bragg condition is obtained when the membrane is touching the waveguide core.
5 In this way, the two position of the membrane, namely far from waveguide and close to the waveguide, corresponds to two different wavelengths which are reflected by the Bragg grating.
Ό As mentioned above, the refractive index of the dielectric membrane is higher than air. This means that, the membrane can guide light as a slab waveguide. It s important that the propagation constants for all modes existing in the memorane are far enough from propagation constant of the guided mode m waveguide. In this way, tne light guided through the waveguide is not coupled to the membrane due to phase mismatch of modes. The membrane is only modifying the propagation constant of guided mode in waveguide.
If the membrane is far from both waveguides and the light is incoming to input and/or add port and its wavelength satisfy the Bragg condition of both gratings, then the light is reflecting by the gratings and is transmitted to the output port or the drop port respectively. If for the same wavelength the membrane is moved close to both waveguides, this will change the
Bragg condition of both gratings, and light w ll come to the input port and/or the add port, then the light will pass through the gratings and be transmitted to the drop port and the output port respectively.
If the light with pre-defined wavelength which satisfy the Bragg condition is reflected to drop port, then the strength of the gratings defines crosstalk to drop port .
In fig.8 there is presented a simulation of transmission through a 10mm long Bragg grating with sinus appo- d zation and maximum refractive index modulation 1.4-10"3. The solid and dash line represents trans is- sion when the membrane is touching, please see fig.6 and far, fig. 9, from the waveguides respectively. The change of effective refractive index caused by the membrane is ~nefectιve-0 - 0007 , for a refractive index of the membrane of 1.46, a refractive index of the core of 1.45588, of the cladding of 1.445. The waveguide dimensions are : 5 microns wide and 6 microns high.
As one can see, the isolation between add and drop port for the grating presented in fig. 10 is ca . -60dB. The shift in operating wavelength of the Bragg grating caused by the membrane corresponds to approximately one ITU channel, in this example.
Due to the high isolation between add and drop port, the optical switch with movable membrane can be directly applied in switchable add-drop filter presented in fig . 9.
In fig.9 referens numerals 14 - 17 indicates wave guides, 18 a 2X2 switch, 19, 20 Bragg gratings and 21 - 24 reflectors.
A device as shown in Fig 9 is described in detail in applicants Swedish patent No 0301286-1.
The typical solution for a 2x2 switch used in a device presented in fig. 9 is a thermal switch based on a Mach-Zehnder interferometer. However, the isolation between the add and the drop port is limited by the quality of two couplers used in this interferometer.
A typical isolation is -20dB for a single thermal switch and about -40dB for two cascaded switches. The optical switch with a movable membrane can be applied in a switchable add-drop filter as 2x2 switch, please see fig. 10. In fig. 10 the referens numerals 14 - 24 indicates the same thing as in figure 11. However, the switch 18 according to the present invention includes a membrane 25.
The additional phase shift is added after one of the Bragg gratings, in order to exchange the output port for the add port. The isolation between the add and the drop port can be improved up to -60dB if using the grating presented above.
Many embodiments have been described above as well as different applications for the inventive coupler.
However it is apparent that the man skilled in the art can modify the coupler to fit with other implementations and applications .
Therefore the invention shall not be restricted to the above described embodiments, but can be varied within the scope of the attached claims.

Claims

Claims .
1. An optical switch for coupling light between two adjacent and parallel waveguides (2,3), which waveguides are formed in 5 a dielectric material, where a membrane (4; 7; 25) is provided adjacent a first (3) of said waveguides, which membrane (4;7;25) is movable between a position away from the said first waveguide (3) and a position close to or abutting the said waveguide, thereby changing the refractive index of the w said first waveguide (3) , c h a r a c t e r i s e d i n, that the membrane (4;7;25) is made of a dielectric material.
2. Optical switch according to claim 1, c h a r a c t e r - i s e d i n, that the membrane (4; 7; 25) is made of the same
15 or similar material as the core of the waveguides or cladding (5) in which the waveguides (2,3) are formed.
3. Optical switch according to claims 1 or 2, c h a r a c t e r i s e d i n, that the thickness of the 0 membrane (4;7;25) is in the order of 1 micron.
4. Optical switch according to claims 1 or 2, c h a r a c t e r i s e d i n, that the propagation constants, for different modes, of the membrane (4;7;25) differs
25 from the propagation constant of the said first waveguide (3) to such extent that substantially no light is coupled from said first waveguide (3) to the membrane (4;7;25).
5. Optical switch according to claims 1, 2 or 3,
30 c h a r a c t e r i s e d i n, that the refractive indexes of the membrane (4;7;25), the cladding (5) and the core of said waveguides have (2,3) the following ratio : 1.46, 1.445 and 1.45588 respectively.
6. Optical switch according to claims 1, 2, 3, 4 or 5, c h a r a c t e r i s e d i n, that the membrane (4; 7; 25) is moved between said two positions by an electrostatic force 5 created by an electric voltage applied between the membrane (4;7;25) and the substrate (5).
7. Optical switch according to claims 1, 2, 3, 4, 5 or 6, c h a r a c t e r i s e d i n, that between the side of the w membrane (4;7;25) facing the substrate (5) and the substrate (5) there is provided a support (-6) on which the membrane (4;7;25) rests, giving a distance between the membrane (4; 7; 25) and the substrate (5) when the membrane is in a stressless state.
15 8. Optical switch according to any of the preceeding claims, c h a r a c t e r i s e d i n, that the membrane (7) is located adjacent a wave guide (8,9) provided with a Bragg grating (10,11), where the Bragg grating (10,11) is arranged 0 to reflect incoming ligth when the membrane (7) is at a distance from the wave guide (8,9) and arranged to pass the light when the membrane (7) is close to or abutting the wave guide at the Bragg grating (10,11) . 5 9. Optical switch according to claim 8, characterized in, that the membrane (25) is positioned adjacent two wave guides (16,17), each having a Bragg grating (26,27), in an optical switch (18) at the center of a mach-zender interferrometer .
30
PCT/SE2005/000539 2004-04-19 2005-04-14 Optical switch WO2005101115A1 (en)

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EP3467556A4 (en) * 2016-08-01 2019-08-07 Huawei Technologies Co., Ltd. Optical switch and optical switching system
US10976493B2 (en) 2014-04-30 2021-04-13 Hewlett Packard Enterprise Development Lp Controllable diamond waveguide tuner
US20210108978A1 (en) * 2018-04-16 2021-04-15 Ams International Ag Photonic device, method for operating a photonic device and method for manufacturing a photonic device
US20230055779A1 (en) * 2021-08-20 2023-02-23 The Government Of The United States, As Represented By The Secretary Of The Navy Methods and apparatuses for optical mode conversion

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US5091983A (en) * 1987-06-04 1992-02-25 Walter Lukosz Optical modulation apparatus and measurement method
US5278925A (en) * 1991-03-28 1994-01-11 Texas Instruments Incorporated Integrated-optic waveguide devices and method
EP0653665A1 (en) * 1993-11-17 1995-05-17 AT&T Corp. Thermally activated optical switch
DE4445835A1 (en) * 1994-12-22 1996-06-27 Bosch Gmbh Robert Thermooptical path selection switch for optical communications

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US5091983A (en) * 1987-06-04 1992-02-25 Walter Lukosz Optical modulation apparatus and measurement method
US5278925A (en) * 1991-03-28 1994-01-11 Texas Instruments Incorporated Integrated-optic waveguide devices and method
EP0653665A1 (en) * 1993-11-17 1995-05-17 AT&T Corp. Thermally activated optical switch
DE4445835A1 (en) * 1994-12-22 1996-06-27 Bosch Gmbh Robert Thermooptical path selection switch for optical communications

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10976493B2 (en) 2014-04-30 2021-04-13 Hewlett Packard Enterprise Development Lp Controllable diamond waveguide tuner
EP3467556A4 (en) * 2016-08-01 2019-08-07 Huawei Technologies Co., Ltd. Optical switch and optical switching system
US10422960B2 (en) 2016-08-01 2019-09-24 Huawei Technologies Co., Ltd. Optical switch and optical switching system
US20210108978A1 (en) * 2018-04-16 2021-04-15 Ams International Ag Photonic device, method for operating a photonic device and method for manufacturing a photonic device
US11906385B2 (en) * 2018-04-16 2024-02-20 Ams International Ag Photonic device, method for operating a photonic device and method for manufacturing a photonic device
US20230055779A1 (en) * 2021-08-20 2023-02-23 The Government Of The United States, As Represented By The Secretary Of The Navy Methods and apparatuses for optical mode conversion
US11754785B2 (en) * 2021-08-20 2023-09-12 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Methods and apparatuses for optical mode conversion

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