WO2005091619A1

WO2005091619A1 - Mechanism for adjusting image forming position and photographing apparatus

Info

Publication number: WO2005091619A1
Application number: PCT/JP2004/003595
Authority: WO
Inventors: Shinichi Masuda
Original assignee: Cmicro Corporation
Priority date: 2004-03-17
Filing date: 2004-03-17
Publication date: 2005-09-29
Also published as: JPWO2005091619A1; JP4372152B2

Abstract

A mechanism for adjusting an image forming position and a photographing apparatus in which an image forming position on an photographing element can be adjusted easily and with high accuracy and positional shift can be adjusted easily and finely. In the apparatus for photographing an image formed on an imaging body by an incident light, the mechanism for adjusting the image forming position of the incident light on the imaging body comprises a base adjusting member (21) movable relatively to the body of the photographing apparatus along the direction of the optical axis of the incident light while adjusting the inclination to the optical axis of the incident light, a fine adjusting member (30) movable relatively to the base adjusting member (21) along the direction intersecting the optical axis of the incident light and being fixed with the imaging body, and a mechanism for moving the fine adjusting member (30) relatively to the base adjusting member (21) along the direction intersecting the optical axis of the incident light.

Description

Description Imaging position adjustment mechanism and expansion device

The present invention relates to an imaging position adjustment mechanism and an imaging device. 2. Description of the Related Art In a photographing apparatus such as an inspection apparatus using a camera or light, an image of an object to be photographed is formed by forming an image on a photographing object such as a CCD film through a lens or a prism. Since the quality of the captured image is greatly affected by the relative position such as the distance between the lens and the image pickup body, the adjustment of the image forming position is very important in the expansion device.

The present invention relates to an imaging position adjustment mechanism for adjusting an imaging position of an imaging device, and an imaging device including the imaging position adjustment mechanism. Background art

2. Description of the Related Art Conventionally, as a method of adjusting an image forming position on an image pickup body, a lens or an image pickup body is moved along an optical axis direction of incident light (for example, Patent Document 1: Subordinate 1) )

The focus position adjusting mechanism of Conventional Example 1 is provided in a CCD camera unit of a microscope photographing apparatus, and moves the lens barrel having the CCD element mounted in the optical axis direction to move the CCD element and the lens. This is for adjusting the distance in the optical axis direction.

However, although the focal position adjusting mechanism of Conventional Example 1 can adjust the distance between the CCD element and the lens in the optical axis direction, that is, the focus can be adjusted, the inclination of the CCD element with respect to the optical axis and the focus on the CCD element The two-dimensional position of can not be adjusted. Therefore, the inclination of the CCD element with respect to the optical axis and the two-dimensional position of the focal point on the CCD element depend on the manufacturing error and mounting accuracy of the lens and other components that hold the CCD element, etc. Therefore, there is a problem in that the processing accuracy and the like must be extremely high, and it is difficult to manufacture each member.

As a technique for adjusting not only the focus but also the inclination of the CCD element with respect to the optical axis, there is a technique disclosed in Conventional Example 2 (Patent Document 2). As shown in FIG. 9, the technology of Conventional Example 2 includes a concave glass b having a spherically concave curved surface br and a convex glass a having a convex curved surface ar having the same curvature as the spherical surface of the concave glass. You. The concave glass b has the rear surface attached to the exit surface of the prism P, and the convex glass a has the CCD light receiving surface attached to the rear surface. For this reason, if the curved surface of the concave glass and the curved surface ar of the convex glass a are matched, it is possible to mount the concave glass a so that there is no gap between them, and the curved surface ar of the convex glass a follows the curved surface br of the concave glass b. Therefore, the inclination of the light receiving surface of the CCD with respect to the optical axis of the light incident through the prism P can be adjusted, and the optical axis and the light receiving surface can be adjusted to be perpendicular.

However, in the technology of the conventional example 2, since the light receiving surface of the CCD can only be inclined with respect to the exit surface of the prism P, if the inclination of the light receiving surface of the CCD with respect to the optical axis is changed, the focal point on the light receiving surface is changed. The formed position, that is, the two-dimensional position of the focal point also changes. For this reason, it is not possible to adjust the two-dimensional position of the focal point separately while maintaining the inclination of the light receiving surface of the CCD with respect to the optical axis. Then, it becomes very difficult to fine-tune the two-dimensional position of the focal point, and it is practically difficult to adjust the focal point in a line CCD in which the CCD elements are linearly arranged. This is because line CCDs can form an image on the light receiving surface even if the focus position is slightly shifted because the light receiving surface is long in the CCD element array direction, but the direction intersects the CCD element array direction. In other words, since the width of the CCD element is short in the width direction, the allowable range for the focus shift is narrow, and an image cannot be formed on the light receiving surface without fine adjustment of the focus position. Therefore, the technology of Conventional Example 2 is used for adjusting the imaging position of a device that uses an imaging body that has a wide range of tolerance for wide-focus defocus, such as a light receiving surface force with CCD elements arranged in a grid. Even if it can be done, it cannot be used to adjust the imaging position of an apparatus that uses an image pickup body that has a narrow light-receiving surface such as a line CCD and has a narrow tolerance for defocus. In other words, the technique of Conventional Example 2 is difficult to use in an apparatus that requires a fine adjustment of the position of the focal point where the tolerance for the focal point deviation is narrow.

In the technology of Conventional Example 2, all the members are fixed by the adhesive, but when the adhesive is solidified, the relative positions of the members may be shifted due to shrinkage of the adhesive itself. And high-precision position adjustment is difficult. In addition, since each member is fixed by an adhesive, there is a problem that it is very difficult to readjust the position between the members. In recent years, as the production of liquid crystal panels and battery films has increased and the precision has increased, the technology for performing these inspections at high speed and with high accuracy has been demanded. The color and scratches on the surface must be inspected with precision. When detecting color and flaws at the same time, a 3 CCD device equipped with three CCD elements that receive light of three wavelengths, red, green, and blue, is used. However, the color of the surface to be inspected cannot be accurately detected unless the areas photographed by the three CCD elements match exactly. If the inspection accuracy is to be performed on the order of m, the deviation of the area photographed by each CCD element must be smaller than the pixel size of the CCD element. For example, if one pixel of the CCD element is 7 m, the deviation must be 0.7 / xm or less. In other words, the position of the focal point on each CCD element within the focal plane must be adjusted with an accuracy of 0.7 or less. However, the technique of Conventional Example 2 cannot adjust the focal position with such precision as described above.

In addition, since the material holding the CCD element expands and contracts due to changes in the surrounding temperature, even if the material expands and contracts due to changes in the surrounding temperature, the deviation of the focal position within the focal plane is 0.7 zm. It is necessary to be as follows.

Furthermore, as the number of pixels of the CCD element within the range of the resolution of the lens increases, in other words, as the number of pixels of the CCD element existing in the imaging range increases, the resolution of the inspection target, that is, the inspection accuracy, can be improved. To improve this resolution, it is necessary to increase the aperture of the lens or shorten the distance between the lens and the CCD element. However, if the lens diameter is increased, the lens itself becomes very expensive.In order to reduce cost and improve accuracy, instead of using a lens with a small aperture, the CCD element must be placed close to the lens. No. Then, since the space between the CCD element and the lens is reduced, the member holding the CCD element must be configured more compactly. There is also a method of increasing the number of pixels per unit length of the CCD element, but if the number of pixels per unit length of the CCD element is increased, the size of the CCD element itself becomes smaller. Therefore, the lens In order to reduce the cost of the equipment, that is, the cost of the equipment and improve the inspection accuracy,

The part that holds the CCD element must be very small, and inevitably the focusing mechanism must be compact.

[Patent Document 1] Japanese Patent Application Laid-Open No. Hei 7-261067

[Patent Document 2] Japanese Patent Application Laid-Open No. 2003-259593 Disclosure of the Invention

In view of the above circumstances, the present invention can easily adjust the imaging position on the imaging element with high precision, and can easily make fine adjustments even if the position shifts, and focus on temperature changes in the surrounding environment. It is an object of the present invention to provide an imaging position adjusting mechanism and device capable of preventing a positional shift and having a very compact structure.

An imaging position adjusting mechanism according to a first aspect of the present invention is an imaging device that forms an image by imaging incident light on an imaging body, and adjusts an imaging position of the incident light on the imaging body. A mechanism, wherein the adjusting mechanism is provided so as to be movable with respect to a main body of the photographing device along an optical axis direction of the incident light so that an inclination of the incident light with respect to an optical axis can be adjusted. A base adjustment member, a fine adjustment member to which the imaging body is attached, the fine adjustment member being provided movably with respect to the base adjustment member along a direction intersecting the optical axis of the incident light; A moving mechanism for moving the base adjustment member along a direction intersecting the optical axis of the incident light is provided.

According to the first invention, the focus and the inclination of the image pickup body with respect to the optical axis can be adjusted by the base adjustment member of the adjustment mechanism, and the fine adjustment member can be adjusted by the moving mechanism without moving the base adjustment member. By moving it, it is possible to adjust the two-dimensional imaging position of the incident light on the imaging body. That is, the two-dimensional imaging position of the incident light on the imaging body can be adjusted independently of the focus and the inclination with respect to the optical axis. Thus, even if the imaging body has a narrow light receiving portion, it can be reliably and easily adjusted so that the incident light is imaged on the light receiving portion. In addition, since the fine adjustment member can be fixed to the base adjustment member by the posture holding means, it is possible to prevent the imaging position from being shifted during imaging.

In the imaging position adjusting mechanism according to a second aspect, in the first aspect, the base adjusting member may A reference surface intersecting the optical axis of the incident light, wherein the fine adjustment member slides along the reference surface of the base adjustment member when the fine adjustment member is moved by the movement mechanism. It is characterized by having.

According to the second aspect, if the fine adjustment member is moved along the reference plane of the base adjustment member, the relative position of the incident light with respect to the base adjustment member in the optical axis direction is kept constant. The fine adjustment member can be moved. For this reason, if the reference plane of the base adjustment member is adjusted so that the light receiving surface of the image pickup body is perpendicular to the optical axis of the incident light, focus can be maintained without changing the inclination of the incident light of the image pickup body with respect to the optical axis. Since the imaging position of the incident light on the imaging body can be adjusted, the imaging position can be adjusted accurately and easily.

In the imaging position adjusting mechanism according to a third aspect, in the second aspect, the moving mechanism includes a pressure receiving surface provided on the fine adjustment member, the pressure receiving surface being orthogonal to the sliding surface, and a pressure receiving surface of the fine adjustment member. A biasing means for biasing the fine adjustment member from the biasing means along the direction of the normal line, and a biasing force applied to the fine adjustment member from the biasing means along the direction of the biasing force. A position adjustment unit provided so as to be able to approach and separate.

According to the third aspect, since the fine adjustment member is constantly urged by the urging means, the position adjusting section supporting the urging force is connected to the urging means along the direction of the urging force. If it is made to approach and separate, the fine adjustment member can be made to approach and separate from the urging means in the direction of the urging force. Since the pressure receiving surface is also provided so as to be orthogonal to the sliding surface, the biasing force is applied to the fine adjustment member in parallel with the sliding surface. Therefore, if the sliding surface of the fine adjustment member is brought into surface contact with the reference surface of the base adjustment member, if the fine adjustment member is moved closer to or away from the biasing means by the position adjustment portion, the fine adjustment member becomes the base. The adjustment member can be moved in parallel with the reference plane. By providing pressure receiving surfaces orthogonal to each other on the fine adjustment member, and providing a biasing means for biasing each of them and a position adjusting section for supporting the biasing force from each of the biasing means, it is possible to provide other fine adjustment members. Irrespective of the amount of movement, the amount of movement of the fine adjustment member in the urging direction of each urging means can be adjusted independently, so that the image forming position on the imaging body can be accurately adjusted. .

In the imaging position adjusting mechanism according to a fourth aspect, in the third aspect, the fine adjustment member includes a support surface that intersects a direction of an urging force applied from the urging unit. A cylindrical body having a central axis parallel to a normal line of a reference surface of the base adjusting member, wherein the cylindrical body is parallel to the negative three central axes and is radial to the cylindrical body with respect to the central axis. When the fine adjustment member is urged by the urging means, the supporting surface of the fine adjustment member is always rotatable around the offset rotation axis. It is characterized in that it is arranged so as to be in a state in which it is set.

According to the fourth invention, since the center axis of the cylindrical body is offset in the radial direction with respect to the rotation axis thereof, when the cylindrical body is rotated, the urging force applied from the urging means to the fine adjustment member is adjusted. The length from the center axis of the cylinder to the edge on the support surface side in the direction (hereinafter simply referred to as the biasing direction) can be changed. Since the support surface of the fine adjustment member is always in contact with the side surface of the cylindrical body by the urging means.

By rotating the cylinder, the fine adjustment member can be moved along the biasing direction by the amount of change in the biasing direction length, and the imaging position in the biasing direction of the imaging body is finely adjusted. can do.

An imaging position adjusting mechanism according to a fifth aspect of the present invention is the image forming apparatus according to the first, second, third or fourth aspect, wherein the fine adjustment member includes the sliding surface and a mounting surface that is smooth on the sliding surface. A holding member to which the imaging body is attached, the holding member being movably provided along a mounting surface of the main body member, and a holding member moving unit for moving the holding member along the mounting surface of the main body member. It is characterized by having.

According to the fifth aspect, if the holding member is moved by the holding member moving section, the imaging body attached to the holding member together with the holding member can be moved along the mounting surface of the main body member. For this reason, the image formation position of the incident light on the imaging body can be adjusted without changing the focus or the inclination of the incident light with respect to the optical axis of the imaging body, so that the imaging position can be adjusted accurately and easily. it can.

In the imaging position adjusting mechanism according to a sixth aspect of the present invention, in the fifth aspect, the holding member is formed with an elongated hole extending along a direction parallel to a mounting surface of the main body member. A shaft member rotatably attached to the main body member around a rotation axis parallel to a normal to the mounting surface, and provided at one axial end of the shaft member; An operating shaft inserted into the elongated hole, wherein the operating shaft has a center axis parallel to the rotation axis of the shaft member and the shaft member relative to the rotation axis of the shaft member. Offset in the radial direction of In particular, it is installed so that it can be cut.

According to the sixth aspect, by rotating the shaft-like member around the rotation axis, the operating shaft can be moved around the rotation axis. For this reason, the holding member can be moved relative to the main body member by the moving amount in the width direction of the elongated hole out of the moving amount of the operating shaft. And if a plurality of shaft-shaped members and a long hole are provided and formed so that the axial directions of the long holes intersect, regardless of the rotation amount of the other shaft-shaped members, in the direction orthogonal to the axial direction of each long hole Since the amount of movement of the holding member can be adjusted independently of each other, it is possible to accurately adjust the imaging position on the imaging body.

An imaging position adjusting mechanism according to a seventh aspect, in the fifth or sixth aspect, wherein the holding member is attached to the mounting surface of the main body member so as to be able to approach and separate therefrom, and the holding member moving part is In particular, a mechanism is provided for moving the holding member toward and away from the mounting surface of the main body member.

According to the seventh aspect, the focus can be adjusted by moving only the holding member, so that the focus adjustment is easy, and when the focus adjustment is performed, another member moves, and the imaging position is shifted. Can be prevented.

An imaging position adjusting mechanism according to an eighth aspect of the present invention is the image forming apparatus according to the second, third or fourth aspect, wherein the fine adjustment member comprises: a main body member having the sliding surface; and the main body member fixed to the base adjustment member. A fine adjustment member fixing means, a holding member to which the image pickup body is attached, the holding member being movably provided in a direction parallel to the sliding surface with respect to the main body member; Holding member fixing means for fixing to the main body member, the holding member fixing means being orthogonal to the sliding surface, and the main body member by the fine adjustment member fixing means in the width direction of the imaging body. According to an eighth aspect of the present invention, the holding member fixing means is disposed at a position which is plane-symmetric with respect to a symmetry plane including a center line of a connection position with the base adjustment member. And holding member on the symmetry plane When the optical axis is arranged so as to be included in the plane of symmetry, even if the main body member and the holding member expand and contract due to changes in the temperature of the surrounding environment, the focal point on the imaged object will not change. The position can be prevented from shifting. Even if the optical axis deviates from the symmetry plane, if the optical axis and the symmetry plane are parallel, the holding When the center line of the imaging body is adjusted to be located on the optical axis plane by moving the imaging body with respect to the member, the deviation between the center line of the imaging body and the plane of symmetry can be reduced. In addition, it is possible to minimize the displacement of the focal point position on the imaging body due to the expansion and contraction of the holding member, and to include the light receiving center line of the imaging body (eg, line CCD) on the plane of symmetry. If this is set, the deviation of the focal position can be further reduced. This is particularly effective when a line CCD having a narrow light receiving surface is used as an imaging body.

A ninth aspect of the present invention is the imaging position adjusting mechanism according to the second, third or fourth aspect, wherein a base fixing means for fixing the base adjusting member to a main body of the photographing apparatus is provided. Fine adjustment member fixing means for fixing a member to the base adjustment member is provided, and the fine adjustment member fixing means is orthogonal to a sliding surface of the fine adjustment member, and is in a width direction of the imaging body. Wherein the base fixing means is disposed at a position which is plane-symmetric with respect to a symmetry plane including a center line of a connection position between the main body of the photographing apparatus and the base adjustment member by the base fixing means.

According to the ninth aspect, the fine adjustment member fixing means connects the fine adjustment member and the base adjustment member at positions symmetrical with respect to the base symmetry plane, so that the optical axis is included in the base symmetry plane. If this is done, it is possible to prevent the position of the focal point on the imaging body from shifting even if the fine adjustment member and the base adjustment member expand and contract due to a change in the temperature of the surrounding environment. Also, even when the optical axis is deviated from the base symmetry plane, if the optical axis and the base symmetry plane are parallel, the fine adjustment member is moved with respect to the base adjustment member so that the center line of the imaging object is moved. When adjusted to be located on the optical axis plane, the deviation between the center line of the imaging body and the base symmetry plane can be reduced, so that the deviation between the center line of the imaging body and the base symmetrical plane can be reduced. Since the size can be reduced, it is possible to minimize the deviation of the focal position on the imaging body due to the expansion and contraction of the fine adjustment member and the base adjustment member. If the center line of light reception of the imaging body (for example, line CCD) is included on the base symmetry plane, the deviation of the focal position can be further reduced. In particular, when a line CCD having a narrow light receiving surface is used as an imaging body, the imaging position adjusting mechanism of the tenth aspect of the present invention is effective in the case of the first, second, third or fourth aspect. A main body of the photographing device, comprising: a mounting surface to which the base adjustment member is mounted, which is orthogonal to an optical axis of the incident light;-between the base adjustment member and a mounting surface of the main body of the imaging device. Base urging means for urging the base adjustment member in a direction away from the main body of the imaging device along the optical axis direction of the incident light while maintaining the base adjustment member parallel to a mounting surface of the main body of the imaging device. It is characterized by having.

According to the tenth aspect, the base adjustment member can be moved along the optical axis of the incident light while keeping the base adjustment member parallel to the mounting surface of the main body of the imaging device. Focus adjustment can be performed without changing the dimensional imaging position. Therefore, the focus position and the focus can be adjusted independently, and the focus adjustment becomes easy.

An imaging device according to an eleventh aspect of the present invention includes: a spectral unit that splits incident light into light of a plurality of wavelengths; and a plurality of imaging bodies on which light of each wavelength split by the spectral unit is imaged. An imaging position adjustment mechanism that adjusts an imaging position of light of each wavelength on the plurality of imaging bodies, wherein the imaging position adjustment mechanism includes: According to the eleventh invention, which is the adjustment mechanism of the second, third, fourth, fifth, sixth, seventh, eighth, ninth or tenth invention, light of each wavelength is concatenated. Since the image position can be adjusted, it is easy to adjust the photographing device. Since the manufacturing error of the spectroscopic means can be absorbed by the imaging position adjusting mechanism, the manufacture of the spectroscopic means and the like can be facilitated, and the cost can be reduced.

According to a twelfth invention, in the twelfth invention, in the twelfth invention, the imaging device is a 3CCD camera.

According to the twelfth aspect, the image formation state of light incident on each CCD element can be made uniform, so that the quality of a reproduced image can be improved.

A photographing apparatus according to a thirteenth invention is the imaging device according to the first or the second invention, wherein the imaging body is a line CCD! [

According to the thirteenth aspect, it is possible to increase the processing speed of the observed image, that is, the signal detected by the CCD element, so that high-speed image shadowing can be performed. Brief Description of Drawings

FIG. 1 is a schematic side view of a 3 CCD camera to which the imaging position adjusting mechanism 10 of the present embodiment is applied.

FIG. 2 is a schematic front view of a 3 CCD camera to which the imaging position adjusting mechanism 10 of the present embodiment is applied.

FIG. 3 is a schematic plan view of a 3 CCD camera to which the imaging position adjusting mechanism 10 of the present embodiment is applied.

FIG. 4 is a sectional view taken along line IV-IV in FIG.

FIGS. 5A and 5B are explanatory diagrams each showing the image forming position adjusting mechanism 10 of the present embodiment alone, wherein FIG. 5A is a schematic plan view, FIG. 5B is a schematic front view, and FIG. FIG. 1 is a view on line C. 6 is (A) a sectional view taken along line VIA-VI in FIG. 5, and (B) is a sectional view taken along line VIB-VIB in FIG.

7A is an enlarged view of a main part of FIG. 6A, and FIGS. 7B and 7C are explanatory views of a state where the eccentric port 53 is rotated.

8A is a plan view of the base adjustment member 21 alone, FIG. 8B is a plan view of the main body member 31 of the fine adjustment member 30, and FIG. 8C is a plan view of the fine adjustment member 30. FIG. 4 is a plan view of the holding member 40 alone.

FIG. 9 is a schematic explanatory diagram of the second technique.

FIG. 10 is an enlarged explanatory view of a mounting portion between the adjustment mechanism main body 20 and the support frame 11.

FIG. 11 is a diagram showing a model in which the adjustment mechanism main body 20 is simplified.

FIG. 12 is a view for explaining the movement of the member B.

FIG. 13 is a view for explaining the movement of the member C. BEST MODE FOR CARRYING OUT THE INVENTION

Next, an embodiment of the present invention will be described with reference to the drawings.

The imaging position adjusting mechanism of the present invention is for adjusting an imaging position of incident light incident on a light receiving surface of an imaging body in an imaging apparatus having an imaging body such as a CCD or a film. Therefore, do not move an optical system such as a lens disposed between the object to be photographed and the imaging object. It is characterized in that the imaging position can be adjusted.

The imaging position adjusting mechanism of the present invention can be applied to a CCD camera, a scanner, and the like. Hereinafter, an example in which the imaging position adjusting mechanism is applied to a 3 CCD camera as a representative will be described.

FIG. 1 is a schematic side view of a 3 CCD camera to which the imaging position adjusting mechanism 10 of the present embodiment is applied. FIG. 2 is a schematic front view of a 3 CCD camera to which the imaging position adjusting mechanism 10 of the present embodiment is applied. FIG. 3 is a schematic plan view of a 3CCD camera to which the imaging position adjusting mechanism 10 of the present embodiment is applied. FIG. 4 is a sectional view taken along line IV-IV in FIG. In FIGS. 2 and 3, the adjustment mechanism main body 20 of the imaging position adjustment mechanism 10 located on the front surface and the rear surface is not shown for easy understanding of the structure.

First, before describing the imaging position adjusting mechanism 10 of the present embodiment, an outline of a 3 CCD camera to which the imaging position adjusting mechanism 10 of the present embodiment is applied will be described.

In FIGS. 1 to 4, reference numeral BF indicates a main body frame of the camera. The body frame BF has a through hole Fh penetrating the center thereof. A lens L is provided on the outer surface of the main frame BF, and a prism PR is provided on the inner surface of the main frame BF at a position sandwiching the through hole Fh of the main frame BF between the main frame BF and the lens L. ing. The prism PR has three emission surfaces ES, and is supported by the adjustment mechanism main body 20 of the imaging position adjustment mechanism 10 of the present embodiment at a position opposed to the three emission surfaces ES. CCDs are arranged respectively.

Therefore, when light enters the prism PR through the lens L, the incident light is split into light of three wavelengths by the prism PR, and the split light of three wavelengths is emitted from the emission surface ES. Then, since the image is formed on the light receiving surface of the CCD, the light of each wavelength can be detected by the CCD and photographed (Fig. 4).

Now, the imaging position adjusting mechanism 10 of the present embodiment will be described.

1 to 4, reference numeral 11 denotes a pair of support frames of the imaging position adjusting mechanism 10 of the present embodiment. The pair of support frames 11, 11 are erected on the inner surface of the main body frame BR of the 3C CD camera so as to sandwich the prism PR from the side. Each of the support frames 11 is substantially parallel to the three emission surfaces ES of the prism PR on its upper surface, front surface, and rear surface when attached to the main body frame BF, in other words, emitted from each emission surface ES. Directly to the optical axis direction of light It has three mounting surfaces lis that are formed to intersect.

Between the pair of corresponding mounting surfaces lis, lis of the pair of support frames 11, 11, three adjusting mechanism bodies 20 are provided, and the light receiving surface of the CCD held by each adjusting mechanism body 20 is It is arranged so as to face the emission surface ES of the prism PR (Figs. 2 and 4). The adjusting mechanism main body 20 has a pair of ports inserted through the through holes 21h (see FIG. 5 (A)) provided at the left and right ends of the base adjusting member 21 from the surface of the base adjusting member 21. 21b, 21b is attached to the mounting surface lis by screwing it into a screw hole (not shown) provided on the mounting surface lis.

As shown in FIGS. 2 and 10, panel members 14 are disposed between the pair of mounting surfaces lis, lis and both ends of the adjusting mechanism main body 20, respectively. The panel member 14 is formed in a substantially trapezoidal shape; the panel member 14 is disposed so that its longitudinal direction is the same as the width direction of the CCD (the left-right direction in FIG. 10A). The panel member 14 has a leg 14a in contact with the mounting surface lis and a head 14b in contact with the adjustment mechanism main body 20, and the leg 14a and the head 14b are parallel to each other. Are formed so that the distance between the leg 14a and the head 14b changes while keeping the distance parallel. In other words, the spring member 14 is configured such that its height BL changes while its head 14b is kept parallel to the mounting surface lis.

For this reason, the adjusting mechanism main body 20 can be held in a state separated from the pair of mounting surfaces lis, lis by the panel member 14, and the pair of ports 21b, 21b are provided on the mounting surface lis with a large force. If the screw is unscrewed from the screw hole (not shown), the adjusting mechanism main body 20 can be moved closer to or away from the pair of mounting surfaces lis, lis.

In addition, since the panel member 14 is disposed so that its longitudinal direction is parallel to the width direction of the CCD (the left-right direction in FIG. 10A), when the port 21b is tightened, the CCD Of the adjustment mechanism main body 20 in the width direction can be prevented. Then, by adjusting the tightening force of the pair of bolts 21b, 21b so that the height BL force S of the pair of nonet members 14 and 14 is the same, both ends of the adjustment mechanism body 20 and the pair of mounting surfaces Since the distance between lis and lis can be the same, the adjusting mechanism body 20 and the pair of mounting surfaces lis and lis can be maintained at TO. Then, the distance between the adjusting mechanism body 20 and the pair of mounting surfaces lis, lis, that is, the light receiving surface of the CCD and the emission surface E of the prism PR The distance to S can be adjusted while maintaining the adjustment mechanism body 20 and the pair of mounting surfaces lis and Us in parallel. In other words, since the adjustment mechanism main body 20 can be moved along the optical axis direction, the focus adjustment of the CCD can be performed without changing the imaging position on the light receiving surface of the CCD. Therefore, since the imaging position and the focus can be adjusted independently, focus adjustment can be facilitated.

The spring member 14 is a base biasing means described in the claims, and the pair of ports 21b, 21b is a base fixing means described in the claims.

In addition, if a difference is made in the tightening state of the pair of ports 21b, 21b, the lower surface of one end (the lower end in FIGS. 2 and 3) of the adjusting mechanism body 20 and the mounting surface lis of the support frame 11 are different. The distance between them can be longer or shorter than the distance between the lower surface of the other end (the upper end in FIGS. 2 and 3) and the mounting surface lis of the support frame 11. Then, the adjusting mechanism main body 20 can be tilted along the axial direction of the CCD (the vertical direction in FIGS. 2 and 3) with respect to the mounting surface 1 Is of the support frame 11, so that the emission surface ES of the prism PR. In contrast, the light receiving surface of the CCD can be inclined. Therefore, even if the optical axis of the light emitted from the emission surface ES of the prism PR is inclined with respect to the normal direction of the emission surface ES, the inclination of the light receiving surface of the CCD with respect to the emission surface ES of the prism PR can be adjusted. The force can be adjusted so that light is incident perpendicular to the light receiving surface of the CCD.

Furthermore, as shown in FIG. 2, grooves llg and 20g are provided along the front-rear direction on the lower surface of the mounting surface lis and the base adjustment member 21 of the adjusting mechanism body 20 facing the mounting surface lis, respectively. If the leg 14a and the head 14b of the spring 14 are attached to the grooves 11g and 20g, respectively, the panel member 14 will be oriented in the direction orthogonal to the axial direction, By tilting in the axial direction, the adjustment mechanism main body 20 can be prevented from moving in the axial direction of the CCD.

Furthermore, the base urging means is not limited to the panel member 14, but the adjusting mechanism main body 20 and the pair of mounting surfaces lis, lis are kept parallel, and the adjusting mechanism main body 20 is mounted along the optical axis direction. The surface lis force is not particularly limited as long as it can be urged in the separating direction. For example, as the base urging means, a plunger 15 may be used, which is disposed on the mounting surface l is such that its outer end protrudes from the mounting surface l is (FIG. 10 (B)). ). In this case, two plungers 15 and 15 are provided on one mounting surface lis, If a screw hole into which 2 lb of Porto is screwed is formed between the two plungers 15 and 15, when the Porto 21b is moved forward and backward, the adjusting mechanism main body 20 will have the CCD It can be prevented from leaning in the width direction.

In order to prevent the adjusting mechanism main body 20 from inclining in the width direction of the CCD, the upper end of the support frame 11 is parallel to the normal direction of the mounting surface lis, and the adjusting mechanism main body 20 If the guide plate 12 having an inner surface that comes into contact with the side surface of the adjusting mechanism main body 20 is provided when the pair of ports 21 b, 21 is moved forward and backward, the side surface of the adjusting mechanism main body 20 is guided by the inner surface of the guide plate 12. The adjusting mechanism main body 20 can be reliably moved in parallel along the normal direction of the mounting surface lis.

A notch 21c is formed on the side surface of the adjusting mechanism body 20 at right angles to the lower surface of the adjusting mechanism body 20, and a notch at right angles to the mounting surface lis is formed on the side surface of the support frame 11; If the pin P is installed between the notch and the notch, the adjustment mechanism body 20 can be moved more surely along the normal direction of the mounting surface lis.

Furthermore, when it is not necessary to adjust the inclination of the light receiving surface of the CCD with respect to the focus optical axis, the base urging means may not be provided, and the base adjustment member 21 of the adjustment mechanism body 20 may be provided. The lower surface of the adjusting mechanism main body 20 may be fixed to the supporting frame 11 by directly contacting the lower surface of the supporting frame 11 with the mounting surface lis of the supporting frame 11.

Furthermore, the imaging position adjusting mechanism 10 does not need to be provided with the support frame 11, and may have a configuration in which the adjusting mechanism main body 20 is directly mounted on the frame BR. Even in this case, if the base biasing means such as the panel member 14 is provided on the frame BF, the inclination of the light receiving surface of the CCD with respect to the focus and the optical axis can be adjusted.

Next, the adjustment mechanism main body 20 will be described in detail.

FIGS. 5A and 5B are explanatory views of the image forming position adjusting mechanism 10 of the present embodiment alone, wherein FIG. 5A is a schematic plan view, FIG. 5B is a schematic rear view, and FIG. FIG. 6A is a sectional view taken along the line VIA-VIA in FIG. 5, and FIG. 6B is a sectional view taken along the line VIB-VIB in FIG. 7A is an enlarged view of a main part of FIG. 6A, and FIGS. 7B and 7C are explanatory views of a state in which the eccentric bolt 53 is rotated. Fig. 8 (A) is a plan view of the base adjustment member 21 alone, (B) is a plan view of the main body member 31 of the fine adjustment member 30 and (C) is a holding of the fine adjustment member 30. FIG. 3 is a plan view of a single member 40. As shown in FIGS. 5 and 6, the adjusting mechanism main body 20 includes the above-described base adjusting member 21 and a fine adjusting member 30 attached to the base adjusting member 21. The adjusting member 30 is composed of a main body member 31 and a holding member 40. First, before describing the specific configuration of the adjusting mechanism main body 20, the structure of the adjusting mechanism main body 20 and The operation will be described using a simplified model.

In FIG. 11, members 8, B, and C are models in which the base adjustment member 21 of the adjustment mechanism main body 20, the main body member 31 of the fine adjustment member 30, and the holding member 40 are respectively simplified. The member B is provided so as to be movable along the upper surface of the member A with respect to the member A, and the member C is provided so as to be movable along the lower surface of the member B.

The symbol S is a spring, and corresponds to a panel of a moving mechanism described later. The panel S has an axial direction provided on the upper surface of the member A and on the right side of the member A, and a member separating the member B from the member A. (Rightward in Fig. 12).

Symbol E denotes an eccentric shaft, which corresponds to an eccentric shaft of a moving mechanism described later. The eccentric shaft E has a center axis perpendicular to the upper surface of the member A, and has a center portion E 2 rotatably mounted around the center axis. An eccentric portion E1 having a central axis is provided, and is disposed so as to sandwich the member B between the eccentric portion E1 and the spring S. Reference sign D is an eccentric shaft, which corresponds to a moving unit described later. The eccentric shaft D has a center axis perpendicular to the upper surface of the member B, and a shaft D2 rotatably mounted around the center axis. And an eccentric portion D1 having an eccentric central axis. The eccentric portion D1 is inserted into a long hole ch provided in the member C. Next, the operation will be described.

As shown in Fig. 12, the member B is sandwiched between the side (left and right directions in Fig. 12) force by the spring S and the eccentric shaft E, and the side BA of the eccentric shaft E is It is pressed against the eccentric E1. From this state, if the eccentric shaft E is rotated around the center axis of the shaft portion E2, the center axis of the eccentric portion E1 revolves around the center axis of the shaft portion E2 of the eccentric shaft E. The angle す between the center of the eccentric portion E1 and the line passing through the shaft portion E2 changes with respect to a reference plane CA parallel to the side surface BA of B and passing through the center axis of the shaft portion E2. Then, the eccentric part If the eccentric axis E is rotated so that the distance DL from the contact position between E1 and the side surface BA to the reference plane CA becomes longer, the member B moves to the left by the amount of change Ll, L2 of the distance DL. Pressed. Then, the panel S contracts, and the member B can be moved to the left by the amount of change Ll, L2 of the distance DL.

Conversely, if the eccentric shaft E is rotated so that the distance DL becomes shorter, the member B is pushed back to the right by the biasing force of the spring S by the amount of change L1 and L2 of the distance DL. The member B can be moved leftward by the amount of change L 1, L 2 of DL. In other words, by rotating the eccentric shaft E, the member B can be moved rightward and leftward along a direction perpendicular to the side surface BA.

Further, as shown in FIG. 13, if the eccentric shaft D is rotated around the center axis of the shaft portion D 2, the center axis of the eccentric portion D 1 revolves around the center axis of the shaft portion D 2. The angle formed by the line passing through the center of the eccentric portion D1 and the shaft portion D2 changes with respect to the axial direction of the elongated hole ch of the member C and the reference plane CB passing through the TO and the central axis of the shaft portion D2. Then, the eccentric portion D 1 moves the member C in a direction orthogonal to the axial direction of the long hole ch while moving along the long hole ch of the member C, so that the long hole ch of the member C is moved from the reference plane CB. The distance DL to the axis can be changed. And, since the shaft portion D 2 of the eccentric shaft D is attached to the member B, if the eccentric shaft D is rotated, the member C is perpendicular to the member B with respect to the member B. You can move it to the right or to the left along the direction you want to move. As described above, since the members B and C are configured to move with a very simple structure using the eccentric shaft, the adjusting mechanism body 20 of the present embodiment has a compact configuration. Thus, the overall configuration of the imaging position adjusting mechanism 10 can be made compact.

Now, details of each member constituting the adjustment mechanism main body 20 will be described.

First, the base adjustment member 21 will be described.

As shown in FIGS. 6 and 8, the base adjustment member 21 is a plate-shaped member formed in a substantially U shape in plan view. The base adjustment member 21 has a lower surface facing the mounting surface lis of the support frame 11 and an upper surface parallel to the lower surface (hereinafter, referred to as a reference surface 21a). A pair of through holes 21h and 21h penetrating between the lower surface and the reference surface 21a are formed at the left and right ends of the base adjustment member 21. Therefore, with the lower surface of the base adjusting member 21 facing the mounting surfaces lis, lis of the pair of support frames 11 1, 11, the pair of through holes 21 h 21 W and the pair of ports 21 b, 21b is passed through the reference surface 21a of the base adjustment member 21 and screwed into the screw holes of the pair of support frames 11 1 and 11 to tighten the base adjustment member 21. It can be fixed at 11 or 11 (see Figures 1-4). Next, the fine adjustment member 30 will be described.

5, FIG. 6, and FIG. 8, reference numeral 31 indicates a main body member of the fine adjustment member 30. As shown in FIGS. 5, 6, and 8, the main body member 31 is a plate-shaped member, and a holding member 40 for holding a CCD is attached to a substantially central portion of a lower surface thereof. It is. On the lower surface of the main body member 31, a peripheral portion (hereinafter, referred to as a sliding surface 31 a) of a portion to which the holding member 40 is attached is connected to a light receiving surface of the CCD held by the holding member 40. The sliding surface 31a is formed on a parallel flat surface, and the sliding surface 31a faces the reference surface 21a of the base adjustment member 21 in a state where the holding member 40 is arranged in the cutout portion 21g of the base adjustment member 21. It is installed in contact (see Figure 6).

As shown in FIGS. 5 and 8, a pair of left and right mounting portions 32, 32 are provided at both left and right end portions of the main body member 31, and the pair of mounting portions 32, 32 are provided on the pair of mounting portions 32, 32. A pair of through holes 32h, 32h penetrating in the thickness direction are respectively formed. The pair of through holes 32h, 32h are formed such that the hole diameter A is larger than the shaft diameter B of the screw portion of the fixed port 32a, which will be described later. The reason is as follows.

With the configuration as described above, a pair of the sliding surface 31a of the main body member 31 of the fine adjustment member 30 is brought into surface contact with the reference surface 21a of the base adjustment member 21. A pair of fixed ports 32a, 32a are passed through the through holes 32h, 32h of the fixed port 32a, and a screw portion of the fixed port 32a is screwed into a screw hole 22h (see FIG. 8) provided in the base adjustment member 21 and tightened. Then, the sliding surface 31a of the main body member 31 can be strongly pressed against the reference surface 21a of the base adjustment member 21. Then, the frictional force between the sliding surface 31a of the main body member 31 and the reference surface 21a of the base adjustment member 21 increases, so that the main body member 31 is not moved with respect to the base adjustment member 21. Can be fixed. Therefore, the CCD supported by the holding member 40 via the main body member 31 and the base adjusting member 21 is fixed to the pair of supporting frames 11 1 and 11. In addition, since the reference surface 21a of the base adjustment member 21 and the sliding surface 31a of the main body member 31 are both formed as flat surfaces, when the pair of fixed ports 32a, 32a are tightened, the main body member 3 1 The frictional force between the sliding surface 31a of the base member 2 and the reference surface 2la of the base adjustment member 21 increases, and both can be firmly fixed.

Also, if the tightening force of the pair of fixed ports 32a, 32a is weakened, the frictional force between the sliding surface 31a of the main body member 31 and the reference surface 21a of the base adjustment member 21 decreases, so that the main body member 3 1 is movable with respect to the base adjustment member 21. Here, since the through-hole 32h is formed so that the hole diameter A is larger than the shaft diameter B of the fixed port 32a, the screw portions of the pair of fixing bolts 32a, 32a are screwed into the screw holes 2211. The body member 31 can be moved with respect to the base adjustment member 21 as it is.

In addition, the sliding surface 31a of the main body member 31 is in contact with the reference surface 21a of the base adjustment member 21 while the tightening force of the pair of fixed ports 32a, 32a is in contact with the sliding surface 31a of the main body member 31. If the force pressing against the reference surface 21a of the base adjustment member 21 is loosened to the extent that the force is no longer applied, the main body member 31 can be moved even if the sliding surface 31a of the base adjustment member 21 is kept in contact with the reference surface 21a. Since the main body member 31 can be moved relative to the base adjustment member 21, the main body member 31 can be surely moved in parallel along the reference surface 21 a. By moving the main body member 31, the CCD supported by the holding member 40 can be moved together with the main body member 31, so that the CCD is moved along the reference surface 2 la of the base adjustment member 21. One and can be moved ⁵ Ri亍.

Therefore, by moving the main body member 31 with respect to the base adjustment member 21, the focus of the CCD and the inclination of the light receiving surface of the CCD with respect to the optical axis of the incident light are not changed. It is possible to adjust the imaging position of the two-dimensional incident light on the light receiving surface.

The pair of fixed ports 32a, 32a is a means for fixing the fine adjustment member as set forth in the claims.

In the main body member 31, an opening 30 h is formed at a position where the holding member 40 is attached, and penetrates the thickness direction of the holding member 40. The opening 301 l is used to connect a CCD wiring (not shown) to the outside. This is for derivation, and the CCD wiring led out from the opening 30h is connected to an external device such as an AZD variable. Next, a moving mechanism for moving the main body member 31 with respect to the base adjustment member 21 will be described in detail. The adjustment mechanism main body 20 of the present embodiment includes a front-rear movement mechanism for moving the main body member 31 in the front-rear direction of the base adjustment member 21 and a left-right movement for moving the main body member 31 in the left-right direction of the base adjustment member 21. Mechanism.

First, the longitudinal movement mechanism will be described.

As shown in FIGS. 5 and 8, a support portion 25 is provided on a reference surface 21a at a central portion of a rear end of the base adjustment member 21. On the other hand, the main body member 31 has a pressure receiving surface 35a orthogonal to the sliding surface 31a at a position facing the front surface of the support portion 25 of the base adjustment member 21 when attached to the base adjustment member 21. Is provided. A panel 52 (corresponding to panel S in FIG. 10) is provided between the pressure receiving surface 35a of the main body member 31 and the front surface of the support portion 25 of the base adjustment member 21. The spring 52 has a direction perpendicular to the normal line of the reference surface 21a of the base adjustment member 21 and a direction parallel to the front-rear direction (vertical direction in FIG. 5) of the base adjustment member 21 (hereinafter referred to as an urging direction). ) Is arranged to be able to expand and contract along.

As shown in FIGS. 5 and 7, on the front surfaces of the pair of mounting portions 32, 32 of the main body member 31, a support surface 32s (FIG. 10), which is directly connected to the pressure receiving surface 35a and the TO and sliding surface 31a. (Corresponding to the side surface BA). On the other hand, the base adjustment member 21 has an eccentric port 53 in front of each support surface 32s in a state where the main body member 31 is attached to the base adjustment member 21 (corresponding to the eccentric axis E in FIG. 1 +0). ) Are provided respectively. The eccentric port 53 includes a columnar port head 53a and a screw shaft 53b. The center axis TP of the screw shaft 53b is aligned with the center axis HP of the port head 53a by ffi ¹ and the port head. It is formed so as to be offset in the radial direction of 53a. The eccentric port 53 has its screw shaft 53b screwed into a screw hole 231ι provided on the base adjusting member 21 and having a central axis parallel to the normal line of the reference surface 21a. It is arranged so that the central axis HP of the V-shaped door 53a is 亍 with respect to the normal line of the reference surface 21a of the base adjustment member 21. In other words, the port head 53a is disposed such that its side surface is a cylindrical surface orthogonal to the reference surface 21a.

For this reason, when the main body member 31 is attached to the base adjustment member 21, the pressure receiving surface 35 a of the main body member 31 is urged forward by the panel 52, so that the pair of attachment portions 3 2, 3 2 support The holding surfaces 32s, 32s are pressed against the side surface of the pair of eccentric ports 53, 53 facing the supporting surface 32s of the bolt head 53a, in other words, the rear end of the port head 53a. Then, since the biasing force of the spring 52 is supported by the pair of eccentric ports 53, 53, the biasing force between the pair of eccentric ports 53, 53 and the support portion 25 of the base adjustment member 21 is provided. The body member 3 1 is held in force.

As shown in FIG. 7, the screw shaft 53b of the eccentric port 53 is disposed so that its central axis TP is offset in the radial direction with respect to the central axis HP of the bolt head 53a. Therefore, if the screw shaft 53b is rotated around its central axis TP, the length from the central axis TP of the screw shaft 53b of the eccentric port 53 in the biasing direction to the rear end of the port head 53a (hereinafter simply referred to as bias) The length L2 in the direction (corresponding to the distance DL in FIG. 10) changes according to the rotation angle of the screw shaft 53b.

As described above, the main body member 31 is constantly urged forward by the panel 52, and the support surfaces 32a, 32a of the pair of mounting portions 32, 32 always maintain the eccentric port 53 of the port head. Since the screw shaft 53b of the eccentric port 53 is rotated by rotating the screw shaft 53b of the eccentric port 53 to change the biasing direction length L2, the mounting portion 32 is biased in accordance with the change. Can be moved along.

For this reason, the pair of eccentric bolts 53 and 53 are arranged such that the inclinations 0 1 (FIGS. 7B and 7C) of the long diameter LD of the pair of eccentric bolts 53 and 53 become the same angle. If the amount of rotation of the screw shafts 53b, 53b is adjusted, the amount of movement of each mounting portion 32 in the biasing direction becomes the same, so that the main body member 31 is connected to the pair of eccentric ports 5 3, 5 3 The main body member 31 can be translated in the urging direction while being held between the base adjustment member 21 and the support portion 25.

When the port head 53a of the eccentric port 53 is rotated as shown in FIGS. 7B and 7C, the length L2 in the biasing direction changes, but the length L3 is the same as the change amount L3. Only the main body member 31 can be moved along the biasing direction, so that the imaging position on the light receiving surface of the CCD is eccentric in the direction opposite to the moving direction of the main body member 31 along the biasing direction. The port 53 can be moved by the same length as the change amount L 3 of the length L 2 in the biasing direction of the port 5 3. Next, the left-right moving mechanism will be described.

The left-right moving mechanism has substantially the same configuration as the front-rear moving mechanism. As shown in FIG. 8, on the left side of the rear end of the base adjustment member 21, a side support portion 26 is provided on the door surface 21a. On the other hand, when the main body member 31 is attached to the base adjustment member 21, the pressure receiving portion orthogonal to the sliding surface 31 a is located at a position facing the right side surface of the side support portion 26 of the base adjustment member 21. A surface (hereinafter referred to as a side pressure receiving surface 35b) is provided. A spring 56 (corresponding to the spring S in FIG. 10) is provided between the side pressure receiving surface 35b of the main body member 31 and the right side surface of the support portion 25 of the base adjustment member 21. . The spring 56 is perpendicular to the normal of the reference surface 2 la of the base adjustment member 21 and is parallel to the left-right direction (the left-right direction in FIG. 5) of the base adjustment member 21 (hereinafter referred to as lateral biasing). (Referred to as direction).

As shown in FIGS. 5 and 7, on the right side of the main body member 31, a side support surface 36s parallel to the side pressure receiving surface 35b and orthogonal to the sliding surface 31a (corresponding to the side surface BA in FIG. 10). ) Is provided. On the other hand, when the main body member 31 is attached to the base adjustment member 21, the base adjustment member 21 has an eccentric port 57 (to the eccentric shaft E in FIG. 10) to the right of the side support surface 36 s. (Applicable). The eccentric port 57 has substantially the same configuration as the eccentric port 53 of the front-rear moving mechanism, and has a screw shaft 57b provided on the base adjusting member 21 and a normal line to the reference surface 21a. It is screwed into a screw hole 27h having a central axis, and is disposed such that the side surface of the port head 57a is a cylindrical surface orthogonal to the reference surface 21a.

For this reason, when the main body member 31 is attached to the base adjustment member 21, the side pressure receiving surface 35 b of the main body member 31 is urged to the right by the panel 56, so that the side support surface is provided. Since the main body member 31 is held between the eccentric port 57 and the support portion 26 of the base adjustment member 21 with the 36b pressed against the left end of the port head 57a of the eccentric port 57, is there. If the screw shaft 57b of the eccentric port 57 is rotated around its center axis, the length from the center axis of the screw shaft 57b of the eccentric bolt 57 in the lateral biasing direction to the left end of the port head 57a (hereinafter referred to as “ The length in the side biasing direction (corresponding to the distance DL in FIG. 10)) changes according to the rotation angle of the screw shaft 57b, but the body member 31 is always rightward by the spring 56. Has been energized. Therefore, if the length of the side urging direction is changed by rotating the screw shaft 57b of the eccentric port 57, the body member 31 can be accurately moved in the side urging direction by the amount of the change. Can be moved. In other words, CCD light reception The imaging position on the surface is moved along the side urging direction in the direction opposite to the moving direction of the main body member 31 by the same amount as the amount of change in the length of the eccentric port 57 in the side urging direction. I can do it.

The left and right moving mechanism has only one eccentric port 57, but when the main body member 31 is moved in the lateral biasing direction by the left and right moving mechanism, the pair of mounting portions 3 2 and 3 2 Since the support surfaces 32s, 32s move while being in contact with the rear end of the port head 53a of the eccentric port 53 of the longitudinal movement mechanism 51, the main body member 31 is moved laterally even with one eccentric port 57. Able to move securely by ¥ 1 along the biasing direction.

As described above, the main body member 31 can be independently moved in the directions orthogonal to each other (the biasing direction and the lateral biasing direction) by the forward and backward moving mechanism and the left and right moving mechanism. Irrespective of the rotation of the eccentric ports 53, 57 in the moving mechanism, the amount of movement of the main body member 31 in the urging direction and the side urging direction can be adjusted accurately. Then, the two-dimensional imaging position on the light receiving surface of the CCD can be moved independently along the urging direction and the lateral energizing direction. The eccentric port 53 of the front-rear movement mechanism and the eccentric bolt 57 of the left-right movement mechanism are the position adjustment parts referred to in the claims, and The panel 52 of the mechanism and the panel 56 of the left-right moving mechanism are the urging means described in the claims.

The urging means is not limited to the panel, and is not particularly limited as long as it can urge the main body member 31 in the urging direction or the side urging direction. It may be.

Further, the position adjusting portion is not limited to the eccentric bolt 53, and is not particularly limited as long as the main body member 31 can be moved in the urging direction or the side urging direction in parallel. It may be a screw or the like.

Next, a method of adjusting the focus position and the focus on the light receiving surface of each CCD of the 3CCD camera by the imaging position adjusting mechanism 10 of the present embodiment will be described.

When adjusting the focal position and focus, 3 photograph a test pattern with a CCD camera, but when the test pattern is photographed, the light reflected by the test pattern Then, the light enters the prism PR through the lens L. Then, after the incident light is split by the prism PR, light of three wavelengths is respectively emitted from the emission surface ES, so that the test pattern is imaged on the light receiving surface of the CCD. The intensity of light corresponding to the test pattern detected by the CCD element constituting the light receiving surface of the CCD is transmitted as an electrical signal from the CCD element through wiring to an external device (not shown). A person can check the image formation state on the light receiving surface of the CCD, and can adjust the focus position and the focus on the light receiving surface of each CCD while watching the image formation state.

Now, a method of adjusting the focal position and the focus on the light receiving surface of each CCD will be described. First, in the adjustment mechanism body 20 attached to the pair of support frames 11, 11, a pair of fixed ports 32 a are respectively provided. , 32a so that the main body member 31 does not move with respect to the base adjustment member 21.

Next, the pair of ports 21b, 21b are rotated to adjust the tightening state, and the entire adjustment mechanism main body 20 is moved closer to and away from the emission surface ES of the prism PR, so as to be on the light receiving surface of each CCD. Focus on.

At this time, if the test pattern is distorted, adjust the tightening condition of the pair of Ports 21b and 2 lb to adjust the inclination of the light receiving surface of the CCD with respect to the emission surface ES of the prism PR. To correct the distortion.

When the focus adjustment is completed, the pair of fixed ports 32a, 32a are loosened so that the main body member 31 is movable with respect to the base adjustment member 21. At this time, the pair of fixed ports 32a J2a are moved in parallel along the reference surface 21a of the base adjustment member 21 without the sliding surface 31a of the main body member 31 being separated from the reference surface 21a of the base adjustment member 21. It is most suitable to loosen as much as possible.

Next, the pair of eccentric ports 53, 53 of the longitudinal movement mechanism 51 are rotated to move the main body member 31 in the biasing direction. Then, the test pattern formed on the light receiving surface of the CCD moves on the light receiving surface of the CCD in a direction opposite to the moving direction of the main body member 31. Then, when the imaging position of the test pattern moves to a desired position in the biasing direction, the rotation of the pair of eccentric ports 53 and 53 is stopped. Then, the main body member 31 is connected to the port head 53a of the pair of eccentric ports 53, 53 and the support portion of the base adjustment member 21. 25, and is held at the position where rotation of the pair of eccentric ports 53, 53 is stopped.

Similarly, by rotating the eccentric port 57 of the left and right moving mechanism 55, the main body member 31 is moved in the side urging direction, and the image forming position of the test pattern in the side urging direction is moved to a desired position. Then, the main body member 31 is held.

Finally, by tightening the pair of fixed ports 32a, 32a, the main body member 31 is fixed to the base adjustment member 21 with the test pattern arranged at a desired position on the light receiving surface of the CCD. The adjustment of the focal position and the focus is completed.

If the same operation is performed for the other two adjustment mechanism main bodies 20, the focal position and the focus of the CCD held by each adjustment mechanism main body 20 can be adjusted. If the image position adjustment mechanism 10 is used in a three-CCD camera, the imaging position of each CCD can be adjusted independently of the imaging position adjustment state of the other CCDs. Even so, the focus position and focus can be easily adjusted. Since the imaging state of light incident on each CCD can be finely adjusted independently, the difference in the imaging state between each CCD can be reduced. Therefore, the uniformity of the imaging state in all CCDs can be improved, and the quality of the reproduced image can be improved.

Since the focus position and focus can be individually adjusted for each CCD, manufacturing errors of the prism PR and other members can be absorbed by each adjusting mechanism body 20. Therefore, the tolerance of the manufacturing error required for the prism PR and the like is widened, so that the manufacturing of the prism PR and the like can be facilitated and the manufacturing cost can be reduced. However, when using a so-called line CCD, the width of the light receiving surface of the CCD becomes very narrow, so that the imaging position must be adjusted very precisely and finely. If 10 is used, it is possible to reliably form an image on the light receiving surface even for a line CCD with a very narrow light receiving surface. And, if the 3 CCD camera adopts the imaging position adjusting mechanism 10 of the present embodiment, the focus adjustment of each CCD can be performed easily and accurately. Therefore, it is possible to adopt a line CCD as an imaging body. Then, a 3 CCD camera equipped with a line CCD can be used for a device that captures images at a high speed, for example, a device that inspects for defects in a continuously conveyed sheet. Even for sheets, the accuracy of inspection for defects can be increased.

As described above, the eccentric bolts 53, 57 are used as the position adjusting parts, and the springs 52, 56 are used as the biasing means, so that the configuration of the moving mechanism can be made very simple. Since the adjustment mechanism main body 20 of the present embodiment can have a compact configuration, it is possible to arrange the light receiving surface of the CCD very close to the emission surface ES of the prism PR. Since the CCD light receiving surface can be placed close to the lens L, the number of pixels of the CCD element existing in the focal point on the CCD light receiving surface can be increased even if a small-diameter lens L is used. The resolution of the object, that is, the inspection accuracy, can be improved.

Further, if the holding member 40 of the fine adjustment member 30 is provided so as to be movable with respect to the main body member 31 as described below, the imaging state of light incident on the CCD can be adjusted more accurately. be able to.

As shown in FIG. 8, the main body member 31 of the fine adjustment member 30 has a pair of holding portion mounting members penetrating in the thickness direction between the opening 31h and the pair of through holes 32h, 32h. Holes 3111 and 31h are provided. A mounting surface 31s, which is a flat surface parallel to the sliding surface 31a, is provided in a substantially central portion of the lower surface of the main body member 31 and between the pair of holding portion mounting holes 3111 and 31h. (Fig. 6 (B)).

Below the mounting surface 3 Is of the main body member 31, a holding member 40 is provided. The holding member 40 has a flat upper surface 40s, that is, a surface facing the mounting surface 31s of the main body member 31. The holding member 40 is provided with a CCD mounting portion 40g at the center thereof. When the CCD is mounted on the CCD mounting portion 40g, the light receiving surface of the CCD is set to be the upper surface 40s and 亍. Is formed.

As shown in FIGS. 5, 6, and 8, a pair of screw holes 40h and 401ι are formed in the upper surface 40s of the holding member 40 at both left and right ends thereof. The pair of screw holes 40h, 40h are inserted into the pair of holding portion mounting holes 3111, 31h from the surface of the main body member 31. 一対 The pair of holding member fixing ports 41, 41 passed through are screwed together. The pair of holding member fixing ports 41, 41 have shaft diameters of a pair of holding portion mounting holes 3 lh, 3 lh. Those smaller than the L diameter are used.

For this reason, when the pair of holding member fixing ports 41, 41 are tightened, the holding member 40 is strongly pressed with its upper surface 40s against the mounting surface 31s of the main body member 31, and the frictional force between the two is reduced. Since it becomes larger, the holding member 40 can be fixed so as not to move with respect to the main body member 31. In addition, since the upper surface 40s of the holding member 40 and the mounting surface 31s of the main body member 31 are both formed as flat surfaces, when the pair of holding member fixing bolts 41, 41 are tightened, there is a gap between them. The generated friction force increases, and both can be firmly fixed.

Also, if the tightening force of the pair of holding member fixing ports 41, 41 is reduced, the frictional force between the upper surface 40s of the holding member 40 and the mounting surface 3Is of the main body member 31 is reduced. The holding member 40 can be moved with respect to the main body member 31. Here, since a pair of holding member fixing ports 41, 41 have a shaft diameter smaller than that of the pair of holding portion mounting holes 31h, 31h, a pair of holding members are used. If the fixing port 4 1, 4 1 is loosened to the extent that the upper surface 40 s of the holding member 40 is pressed against the mounting surface 3 Is of the main body member 31, the pair of screw holes 40 h, 401ι of the holding member 40 is loosened. The holding member 40 can be moved relative to the main body member 31 even when the pair of holding member fixing bolts 41 and 41 are screwed together.

Moreover, when the tightening force of the pair of holding member fixing ports 41, 41 is weakened, the holding member 40 can be moved while its upper surface 40s is in contact with the mounting surface 3Is of the main body member 31. Therefore, the holding member 40 can be surely moved in parallel along the mounting surface 31s. Since the mounting surface 31s of the main body member 31 is parallel to the sliding surface 31a, if the sliding surface 31a is brought into surface contact with the reference surface 2la of the base adjusting member 21, The holding member 40 can be moved in parallel along the reference surface 2la of the base adjustment member 21. Then, even if the holding member 40 is moved, the focus of the CCD held by the holding member 40 does not change the inclination of the light receiving surface with respect to the optical axis of the incident light. It is possible to adjust the image forming position of the incident light. By adjusting the amount of tightening of the pair of holding member fixing ports 41, 41, the holding member 40 can be moved toward or away from or inclined to the mounting surface 31s of the main body member 31. Yes, it is possible to adjust the inclination of the light receiving surface with respect to the optical axis of the CCD focus / incident light. Then, since the focus can be adjusted by moving only the holding member 40, the focus adjustment becomes easy, and when the focus adjustment is performed, the other members move and the image formation position shifts. Can be prevented.

Furthermore, if the holding member 40 is configured such that the CCD light receiving surface protrudes from the lower surface of the body member 31 when the CCD is mounted on the CCD mounting portion 40g of the CCD mounting portion, the light receiving surface of the CCD can be prism-shaped. The release surface of the PR can be placed very close to the ES. In other words, since the light receiving surface of the CCD can be arranged close to the lens L, the number of pixels of the CCD element existing in the focal point on the light receiving surface of the CCD can be increased even if a small-diameter lens is used. In addition, the resolution of the inspection target, that is, the inspection accuracy can be improved.

Next, a holding member moving unit that moves the holding member 40 with respect to the main body member 31 will be described.

As shown in FIG. 6 and FIG. 8, a pair of screw holes 3 lb, 3 lb penetrating the main body member 31 in the thickness direction are formed at both front ends of the main body member 31. The pair of screw holes 3 lb and 31b are disposed so that the central axis thereof is parallel to the normal line of the mounting surface 31s, and the forward and backward moving portions 42 of the holding member moving portion (the eccentric shaft in FIG. 10). (Corresponding to D) is screwed. An operating shaft 42b is provided at a lower end of the shaft-like member 42a of the front-rear moving part 42. The operating shaft 42b is arranged so that its central axis is parallel to the central axis of the shaft-like member 42a and offset in its radial direction.

On the other hand, in the holding member 40, a pair of long holes 40b, 40b (corresponding to the long holes ch in FIG. 10) are formed at both front ends thereof. The axial direction of the pair of elongated holes 40b, 40b is parallel to the left-right direction of the holding member 40, and the length in the width direction is equal to the shaft diameter of the operating shaft 42b of the front and rear moving part 42. It is formed so that it becomes. The operating shaft 42b of the front-rear moving part 42 is inserted into each of the pair of long holes 40b.

Therefore, if the shaft member 42a of the front-rear moving part 42 is rotated, the center axis of the screw hole 31b is The operating shaft 42b can be moved around, in other words, around the rotation axis of the shaft-shaped member 42a. Then, the operating shaft 42b moves in the width direction of the elongated hole 40b while moving in the elongated hole 40b along the axial direction thereof. By rotating the member 42a, the holding member 40 can be moved only in the width direction of the elongated hole 40b.

Accordingly, the holding member 40 can be moved in the front-rear direction of the main body member 31 by rotating the shaft-shaped member 42a of the front-rear moving part 42, so that the image-forming position on the light receiving surface of the CCD is changed. Along the longitudinal direction of the member 31, the operating shaft 42 b can be moved in the direction opposite to the moving direction of the holding member 40 by the amount of movement of the main body member 31 in the longitudinal direction.

As shown in FIGS. 6 and 8, a screw hole 31c is formed on the rear left side of the main body member 31 so as to penetrate the main body member 31 in the thickness direction. The screw hole 31c is disposed so that the center axis thereof is parallel to the normal line of the mounting surface 31s, and the side moving portion 43 of the holding member moving portion (corresponding to the eccentric shaft D in FIG. 10). An operating shaft 43b is provided at the lower end of the shaft member 43a of the side moving portion 43. The operating shaft 43b is provided at the center thereof. The shaft is arranged so as to be parallel to the central axis of the shaft-like member 42a and offset in the radial direction.

On the other hand, in the holding member 40, a long hole 40c (corresponding to the long hole ch in FIG. 10) is formed on the rear left side. The axial direction of the elongated hole 40c is parallel to the front-rear direction of the holding member 40, that is, the direction orthogonal to the axial direction of the elongated hole 40b, and the length in the width direction is the operation of the side moving portion 43. The shaft 43b is formed to have the same diameter as the shaft diameter. The operating shaft 43b of the side moving portion 43 is inserted into the elongated hole 40c. Therefore, if the shaft member 43a of the side moving portion 43 is rotated, the operating shaft 43b can be moved around the center axis of the screw hole 31c, in other words, around the rotation axis of the shaft member 43a. . Then, the operating shaft 42b moves in the width direction of the elongated hole 40c while moving along the axial direction of the elongated hole 40c, so that the operating shaft 42b moves, that is, the axial shape of the front-rear moving part 42. By rotating the member 42a, the holding member 40 can be moved only in the width direction of the elongated hole 40c.

Therefore, by rotating the shaft member 43a of the side moving portion 43, the holding member 40 can be moved in the left-right direction of the main body member 31, so that the imaging position on the light receiving surface of the CCD can be improved. The position of the holding member 40 can be moved along the left-right direction of the main body member 31 by the amount of the left-right movement of the main body member 31 of the operating shaft 43b.

As described above, the holding member 40 can be independently moved along the direction perpendicular to each other by the front-rear moving part 42 and the side moving part 43, so that the shaft-shaped part of the other moving part Regardless of the rotation of the members 42a and 43a, the amount of movement of the holding member 40 in the front-rear direction and the left-right direction can be adjusted accurately. Then, the two-dimensional imaging position on the light receiving surface of the CCD can be independently moved along the front-rear direction and the left-right direction of the holding member 40. It is possible to accurately adjust the two-dimensional imaging position at.

In addition, if the longitudinal direction of the holding member 40 and the above-described biasing direction are adjusted so as to be parallel, the moving direction of the body 材 β material 31 by the longitudinal movement mechanism 51 and the longitudinal movement part 4 2 The moving direction of the holding member 40 by the left and right moving mechanism 55 can be matched with the moving direction of the holding member 40 by the lateral moving portion 43. Therefore, the movement of the CCD held by the holding member 40 can be adjusted more accurately and easily.

The distance between the center axis of the shaft member 42a and the center axis of the operating shaft 42b in the radial direction of the shaft member 42a in the front-rear moving part 42 is determined by the long diameter LD of the eccentric port 53 (see FIG. 7). And the distance between the center axis of the shaft member 43a and the center axis of the operating shaft 43b in the radial direction of the shaft member 43a in the side moving portion 43 is defined as an eccentric port. If the length of the major axis is shorter than the length of the long axis, the amount of movement of the CCD due to the rotation of the shaft member 42a will be reduced even if the shaft member 42a and the eccentric port 53 are rotated by the same angle. The amount of movement of the CCD due to rotation can be made smaller than the amount of movement of the CCD due to rotation.Even if the power shaft member 43a and the eccentric port 57 are rotated by the same angle, the CCD movement amount due to the rotation of the shaft member 43a is 57 Make the amount of movement of the CCD smaller than the rotation of 7 ::

Then, after roughly adjusting the imaging position by the front-rear movement mechanism 51 and the left-right movement mechanism 55, the imaging position can be finely adjusted by the holding member moving section. Quick adjustment and accurate adjustment can both be achieved.

Further, the imaging position adjustment mechanism 10 of the present embodiment can be applied to imaging bodies of various devices. However, when applied to equipment that requires very high-precision inspection, for example, equipment that requires accuracy on the order of zm, the adjustment mechanism itself due to temperature changes in the place where the equipment is installed 2 Due to the expansion and contraction of 0, the focal position on the imaging body may be shifted. Therefore, the following configuration is preferable because the focal position shift due to expansion and contraction of the adjustment mechanism main body 20 can be minimized, and a line CCD with a narrow light receiving surface is used as the imaging body. Especially suitable for

As shown in FIG. 7, the base adjustment member 21 is provided with a pair of screw holes 22ίι 22h into which the screw portions of the pair of fixing ports 32a, 32a of the fine adjustment member fixing means are screwed. A pair of through-holes 32h, 32h through which a pair of fixing ports 32a, 32a penetrate, and a pair of holding member fixing ports 41, 41 are attached to both left and right end portions of the main body member 31. Holding holes 31h, 31h. The pair of holding portion mounting holes 3 Hi Jlh has a symmetrical surface RS in which a line connecting the central axes thereof passes through the center lines of the pair of through holes 32 h and 32 h and is directly perpendicular to the sliding surface 31 a. It is arranged so as to be located above.

For this reason, the center axis of the light receiving surface of the CCD passes through a line (hereinafter, referred to as a center line 40L) connecting the center axes of the pair of screw holes 40h, 40h of the holding member 40, and It is mounted so that it is located on a surface perpendicular to the upper surface 40s, in other words, a surface orthogonal to the sliding surface 31a, and a line connecting the central axes of the pair of screw holes 2211 22h (hereinafter referred to as a central line 20L). And the main body member 31 and the holding member 40 are fixed by the pair of fixing ports 32a, 32a and the pair of holding member fixing bolts 41, 41 so that the center line 40L is located on the symmetry plane RS. Both the main body member 31 and the holding member 40 can be connected at symmetrical positions on the symmetry plane RS.

Then, if the optical axis is arranged so as to be included in the symmetry plane RS, even if the main body member 31 and the holding member 40 expand and contract due to a temperature change in the surrounding environment, the central axis of the CCD light receiving surface is , Can be arranged on the symmetry plane RS. Therefore, it is possible to prevent the position of the focal point on the light receiving surface of the CCD from being shifted due to a temperature change in the surrounding environment.

Even when the optical axis is deviated from the symmetry plane RS, if the optical axis and the symmetry plane RS are parallel, the holding member 40 is moved with respect to the main body member 31 to receive the CCD. When adjusted so that the center line of the surface coincides with the optical axis, The deviation between the center line of the light receiving surface of the CCD and the symmetry plane RS is shifted only by the length of the movement of the holding member 40, and the amount can be reduced. Then, the length of the main member 31 and the holding member 40 is shifted only by the length obtained by multiplying the length by which the holding member 40 is moved by the temperature difference of the surrounding environment and the coefficient of thermal expansion of the material of the holding member 40. The displacement of the focal position on the light receiving surface of the CCD due to expansion and contraction can be minimized. When the base adjusting member 21 and the main body member 31 are fixed at two places at both ends of the main body member 31, in other words, a total of four fixing ports 32 a, two at each end, are used. When the main body member 31 and the holding member 40 are fixed at two places at both ends of the main body member 31 in other words, in other words, two holding members are fixed at each end, for a total of four holding members When fixing with the port 41, the main body member 31 has two through holes 32h and two holding portion mounting holes 3lh at both ends thereof. In this case, the symmetry plane RS is defined by the perpendicular bisector of the line connecting the central axes of the two through holes 32h at each end and the central axis of the two holding portion mounting holes 31h at each end. Since this is a plane including the perpendicular bisector of the connecting line, the perpendicular bisector of the line connecting the central axes of the two screw holes 401ι at each end of the holding member 40 on this plane of symmetry RS. If the perpendicular bisector of the line connecting the central axes of the two screw holes 22h at each end of the base adjustment member 21 is arranged, the same effect as the above configuration can be obtained. it can.

Also, when the base adjustment member 21 is mounted on the mounting surface lis by the pair of ports 21b, 21b, the plane including the center axis of the pair of ports 21b, 21b (base symmetry plane) coincides with the symmetry plane RS. Then, even if the base adjustment member 21 expands and contracts, the center axis of the light receiving surface of the CCD can be arranged on the symmetry plane RS, so that the focus on the light receiving surface of the CCD due to the temperature change of the surrounding environment. Position deviation can be further reduced.

Then, even when the optical axis is deviated from the symmetry plane RS, if the optical axis and the symmetry plane RS are parallel, the adjustment is made so that the center line of the light receiving surface of the CCD and the optical axis coincide. In addition, since the deviation between the center line of the light receiving surface of the CCD and the plane of symmetry in the width direction of the light receiving surface of the CCD can be reduced, the expansion of the base adjusting member 21, the main body member 31, and the holding member 40 can be achieved. The displacement of the focal position on the light receiving surface of the CCD due to contraction can be minimized. If the base adjustment member 21 and the support frame 11 are fixed at two places at both ends of the base adjustment member 21, in other words, a total of four Porto 2 lbs, two at each end. In the case of fixing by using, the perpendicular bisector of the line connecting the central axes of the two ports 21b at each end of the base adjustment member 21 is placed on the symmetry plane RS. The same effect as the above configuration can be obtained. Industrial applicability

The imaging position adjustment mechanism of the present invention is not only used for adjusting the position of a CCD in a CCD camera, but also for an imaging apparatus having an imaging body such as a film or a scanner, which adjusts incident light incident on a light receiving surface of the imaging body. It is possible to apply the imaging position to the adjustment.

Claims

The scope of the claims

(1) An imaging device for imaging an incident light on an imaging body to project an image, comprising: an adjusting mechanism for adjusting an imaging position of the incident light on the imaging body; A base adjustment member provided so as to be movable along the optical axis direction of the incident light with respect to the main body of the imaging device and to be capable of adjusting the inclination of the incident light with respect to the optical axis; On the other hand, a fine adjustment member to which the imaging body is attached, the fine adjustment member being provided movably along a direction intersecting the optical axis of the incident light; And a moving mechanism that moves along a direction that intersects the optical axis of the imaging position.

(2) The base adjustment member includes a reference plane that intersects with the optical axis of the incident light. When the fine adjustment member is moved by the moving mechanism, the fine adjustment member moves along the reference plane of the base adjustment member. 2. The imaging position adjusting mechanism according to claim 1, further comprising a sliding surface that slides.

3 The fine adjustment member has a pressure receiving surface orthogonal to the sliding surface, and the moving mechanism is

An urging means for urging the pressure-receiving surface of the fine adjustment member; and supporting an urging force applied from the urging means to the fine adjustment member in a direction of the urging force. 3. The imaging position adjusting mechanism according to claim 2, further comprising: a position adjusting section provided so as to be able to approach and separate along the image.

(4) The fine adjustment member has a support surface that intersects the direction of the urging force applied from the urging means, and the position adjustment unit has a central axis parallel to a normal to a reference surface of the base adjustment member. A cylindrical body, wherein the cylindrical body is rotatable around a rotational axis that is offset from the central axis by TO and the radial direction of the cylindrical body with respect to the central axis, and 4. The device according to claim 3, wherein, when the fine adjustment member is biased, the support surface of the fine adjustment member is always in contact with a side surface thereof. Imaging position adjustment mechanism.

(5) The fine adjustment member is provided with a main body member having the sliding surface and a mounting surface that is unique to the sliding surface, and the imaging body is provided movably along the mounting surface of the main body member. Holding member, and a holding member moving unit that moves the holding member along the mounting surface of the main body member. 5. The imaging position adjusting mechanism according to claim 1, wherein the imaging position adjusting mechanism comprises: -

6 The holding member is formed with an elongated hole extending along a direction perpendicular to a normal line of a mounting surface of the main body member, and the holding member moving section includes a normal thread of the mounting surface of the main body member. A shaft member rotatably mounted around a rotation axis parallel to the spring; and an operating shaft provided at one axial end of the shaft member and inserted into a long hole of the holding member. The operating shaft is arranged so that its central axis is parallel to the rotation axis of the shaft member and is offset in the radial direction of the shaft member with respect to the rotation axis of the shaft member. 6. The imaging position adjusting mechanism according to claim 5, wherein:

7 The holding member is attached so as to be capable of approaching and separating from the mounting surface of the main body member, and the holding member moving unit is provided with a mechanism for moving the holding member toward and away from the mounting surface of the main body member. 7. The imaging position adjusting mechanism according to claim 5, wherein:

8 The fine adjustment member comprises: a main body member 15 on which the sliding surface is formed; a fine adjustment member fixing means for fixing the main body sound material to the base adjustment member; A holding member provided to be movable along a direction parallel to the sliding surface, to which the imaging body is attached; and holding member fixing means for fixing the holding member to the main body member. The holding member fixing means includes a center line of a connection position of the main body member and the base adjustment member by the fine adjustment member fixing means in a width direction of the imaging body, which is orthogonal to the sliding surface. 5. The imaging position adjustment mechanism according to claim 2, wherein the imaging position adjustment mechanism is arranged at a position that is plane-symmetric with respect to the plane of symmetry.

9 A base fixing means for fixing the base adjustment member to the main body of the imaging device is provided, and a fine adjustment member fixing means for fixing the fine adjustment member to the base adjustment member is provided. Wherein the fine adjustment member fixing means is perpendicular to the sliding surface, and the connecting position between the main body of the photographing apparatus and the base adjustment member by the base fixing means in the width direction of the imaging body. 5. The imaging position adjusting mechanism according to claim 2, wherein the imaging position adjusting mechanism is disposed at a position symmetric with respect to a base symmetry plane including the center line.

10 The main body of the photographing device is orthogonal to the optical axis of the incident light, and the base adjustment member is A mounting surface to be mounted, wherein the base adjustment member is provided between the base adjustment member and the mounting surface of the main body of the imaging device, in parallel with the mounting surface of the main body of the imaging device, and 5. The image forming apparatus according to claim 1, further comprising a base urging means for urging the main body of the photographing apparatus in a direction away from the main body of the photographing apparatus along an optical axis direction of the incident light. Position adjustment mechanism.

11 An imaging apparatus comprising: a spectral unit that splits incident light into a plurality of wavelengths of light; and a plurality of imaging bodies on which light of each wavelength split by the spectral unit is formed. The apparatus further includes an imaging position adjustment mechanism that adjusts an imaging position of light of each wavelength on the plurality of imaging bodies, and the imaging position adjustment mechanism includes: An imaging device, which is the adjustment mechanism according to 5, 6, 7, 8, 9, or 10.

12. The imaging device according to claim 11, wherein the imaging device is a 3C CD camera.

13. The imaging apparatus according to claim 11, wherein the imaging body is a line CCD.