WO2005077855A1 - Method for manufacturing glass panel, and glass panel manufactured by the method - Google Patents

Method for manufacturing glass panel, and glass panel manufactured by the method Download PDF

Info

Publication number
WO2005077855A1
WO2005077855A1 PCT/JP2005/002517 JP2005002517W WO2005077855A1 WO 2005077855 A1 WO2005077855 A1 WO 2005077855A1 JP 2005002517 W JP2005002517 W JP 2005002517W WO 2005077855 A1 WO2005077855 A1 WO 2005077855A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass panel
glass
pair
cleaning
manufacturing
Prior art date
Application number
PCT/JP2005/002517
Other languages
French (fr)
Japanese (ja)
Inventor
Toru Futagami
Original Assignee
Nippon Sheet Glass Company, Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Company, Limited filed Critical Nippon Sheet Glass Company, Limited
Publication of WO2005077855A1 publication Critical patent/WO2005077855A1/en

Links

Classifications

    • EFIXED CONSTRUCTIONS
    • E06DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06BFIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B3/00Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
    • E06B3/66Units comprising two or more parallel glass or like panes permanently secured together
    • E06B3/677Evacuating or filling the gap between the panes ; Equilibration of inside and outside pressure; Preventing condensation in the gap between the panes; Cleaning the gap between the panes
    • E06B3/6775Evacuating or filling the gap during assembly
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075Cleaning of glass
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06Joining glass to glass by processes other than fusing
    • EFIXED CONSTRUCTIONS
    • E06DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06BFIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B3/00Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
    • E06B3/66Units comprising two or more parallel glass or like panes permanently secured together
    • E06B3/663Elements for spacing panes
    • E06B3/66304Discrete spacing elements, e.g. for evacuated glazing units

Definitions

  • the present invention relates to a method for producing a glass panel, and a glass panel produced by the method, and particularly to a hollow formed by interposing a spacer between a pair of glass sheets.
  • the present invention relates to a method for manufacturing a glass panel having a layer, and a glass panel manufactured by the method. Background art
  • a pair of opposed glass sheets a hollow layer formed by interposing a plurality of columnar spacers between the pair of glass sheets, and a peripheral sealing material that seals the peripheral edge of the hollow layer;
  • An exhaust pipe having one end embedded in a hole penetrating one of the pair of plate glasses and the other end sealed, and an accommodation hole arranged in the middle layer for accommodating a getter material for adsorbing various gas molecules in the hollow layer.
  • a glass panel provided with is known. This glass panel has a function such as heat insulation when the hollow layer is depressurized to almost a vacuum.
  • a pair of plate glasses constituting a glass panel may adsorb various gas molecules on an inner main surface in contact with the hollow layer when constituting a glass panel. These adsorbed various gas molecules are excited by heat energy and the like received from the outside after the facing glass forms the glass nonel, and are scattered to the hollow layer, thereby deteriorating the degree of decompression of the hollow layer. Glass) May reduce the heat insulation of the gnole. In addition, this glass panel has a small amount of gas molecules that seal around the edges after prolonged use. Insulation may decrease due to the permeation of the material and the incorporation of gas molecules into the hollow layer. In order to solve such a problem, the following glass panel manufacturing method is used.
  • FIG. 6 is a flowchart showing a conventional method for manufacturing a glass panel.
  • Step S61 a pair of glass sheets having the same shape and the same size are prepared (Step S61), and one of the four corners is placed on one of the pair of glass sheets. Drill a through hole in the vicinity (Step S6
  • the plate glass with the holes was supported almost horizontally, spacers were arranged at predetermined intervals, and the evaporative gas was stored in the holes (step).
  • a plate glass having a through hole formed thereon is placed on the plate glass to perform pairing of a pair of plate glasses (step S65), and further, an exhaust pipe is formed in the through hole. Insert a tubular M tube to form
  • the paired pair of glass sheets 11 and 12 are housed in a heating furnace to heat the entire pair of glass sheets (step S66), and ⁇ firing by inn wind circulation or the like.
  • the peripheral sealing material is melted, and the outer peripheral edges of the pair of plate glasses are sealed with the melted peripheral sealing material (Step S67) o
  • the gas molecules in the hollow layer should be exhausted to the outside (step S688).
  • the outside air side end of the communication pipe is heated to a high temperature, and the outside air side end of the communication pipe is melted and sealed to form an exhaust pipe (step S69).
  • step S70 by heating the evaporative gas housed in the housing hole, The gate material is flushed (step S70), and the getter material is vapor-deposited on the inner main surface of the plate glass in which the through holes are formed, and the process is completed.
  • the entire pair of glass sheets is heated, and baking is performed to discharge gas molecules in the hollow layer to the outside so as to reduce the pressure in the hollow layer. It can actively decompose or scatter various gas molecules, organic components, and other contaminants adsorbed on the surface, and discharge it together with the middle layer of air.Furthermore, the peripheral edge material melted by high-temperature heat treatment By sealing the outer peripheral edges of the pair of glass sheets, the hollow layer can be shielded from gas molecules such as moisture and oxygen from the outside (see, for example, JP 0 2-1 8 7 7 4 5).
  • An object of the present invention is to provide a glass panel manufacturing method capable of reducing the manufacturing cost of a glass panel and improving the quality of the glass panel, and a glass panel manufactured by the manufacturing method.
  • a pair of sheet glasses facing each other each having an outer peripheral edge, and a glass layer is interposed between the sheet glasses to form a hollow layer.
  • a method for producing a glass panel comprising: a sealing step for sealing a glass.
  • the cleaning step comprises at least one selected from the group consisting of a liquid cleaning method, a super cleaning method, a UV cleaning method, an ozone cleaning method, and a plasma cleaning method. It is preferable to use a method to wash a pair of glass sheets, 0
  • the cleaning liquid used in the liquid cleaning method preferably contains an alkaline detergent or ozone water.
  • the cleaning liquid preferably contains an abrasive o
  • the abrasive is preferably fine particles mainly composed of cerium oxide.
  • the sealing material is preferably made of solder or resin.
  • a perforation step for perforating an adsorbent accommodating hole for accommodating an adsorbent for adsorbing a molecule in the hollow layer is provided in one of the sealing steps. It is preferable that the apparatus further comprises a storage space for storing the adsorbent in the adsorbent storage hole.
  • the pressure of the hollow layer is increased after the sealing step.
  • the cleaning step, the sealing step, and the depressurizing step each further include a depressurizing step for depressurizing, and each of the cleaning step, the sealing step, and the depressurizing step is performed in a space in which the state of contamination of air can be controlled chemically or physically. It is preferable to be done.
  • a glass panel manufactured by the method for manufacturing a glass panel according to the first aspect of the present invention.
  • FIG. 1A is a perspective view showing a schematic configuration of a guff spa according to an embodiment of the present invention.
  • FIG. 1B is a cross-sectional view taken along line 1 B 1 B in FIG. 1A.
  • FIG. 2 is a partial cross-sectional view showing a schematic configuration of the accommodation hole and its vicinity in the glass panel of FIG.
  • FIG. 3 is a flowchart showing a method of manufacturing the glass panel of FIG.
  • FIG. 4 is a diagram illustrating the sealing step in FIG.
  • FIG. 5A is a partial cross-sectional view of the pair of plate glasses in FIG. 1A at the time of evacuation and formation of the exhaust pipe
  • FIG. 5B is a partial cross-sectional view of the pair of plate glasses after the exhaust pipe is formed. It is.
  • FIG. 6 is a flow chart showing a conventional method for manufacturing a glass panel.
  • FIG. 1A is a perspective view showing a schematic configuration of a glass panel according to an embodiment of the present invention
  • FIG. 1B is a cross-sectional view taken along line 1B-1B in FIG. 1A.
  • a glass panel 10 is a pair of opposing glass sheets 11
  • a peripheral sealing material 14 for sealing the peripheral portion, and an exhaust pipe 17 having one end embedded in a through hole 16 penetrating the plate glass 11 and the other end sealed.
  • An adsorbent-accommodating hole 18 that is disposed in the hollow layer and accommodates an evaporative gas-gas 70 (adsorbent) that adsorbs gas molecules in the hollow layer is formed in the sheet glass 12.
  • the two glass sheets 111 are transparent float glass having a thickness of about 2.6 to 3.2 mm, and the hollow layer 13 has a thickness of 1.33 Pa (1.0 mm).
  • X 1 0 - 2 T orr is depressurized below.
  • the pressure in the hollow layer 13 is reduced by discharging the air inside the hollow layer 13 through the through hole 16 and the exhaust pipe 17, and the exhaust pipe 17 maintains the reduced pressure state of the hollow layer 13.
  • the other end is sealed by melting.
  • the spacer 15 has a cylindrical shape, a diameter of about 0.31 • 0 mm, a height of about 0.151.0 mm, and an atmospheric pressure acting on the sheet glass 1 1 1 2. due material not buckling be loaded with compressive stress, for example, the compressive strength is 4. 9 X 1 0 8 P a (5 X 1 0 3 kgf / cm 2) on the following materials, and rather the preferred And stainless steel (SUS304).
  • FIG. 2 is a partial cross-sectional view showing a schematic configuration near the accommodation hole 18 in the glass panel 10 of FIG.
  • the accommodating hole 1 $ is formed in the sheet glass 12 as an annular groove at a position facing the page through hole 16.
  • the mold ring 70 accommodated in the accommodation hole 18 is a stainless steel ring having a thickness of 0.1 mm. It has a container 72 and a gutter member 71 contained in an annular container 72 and having a thickness of 0.45 mm.
  • FIG. 3 is a flow chart showing a method of manufacturing the glass panel 10 of FIG. 1.
  • two glass base plates made of float glass and having a predetermined thickness are cut into predetermined dimensions, for example, 1200 mm x 900 mm, and have the same shape and the same shape.
  • Prepare glass sheets 11 and 12 of the size step S31), and insert through holes 16 in the vicinity of any one of the four corners of the glass sheet 11 with a drill or the like.
  • Step S32 (drilling step), and a groove-shaped accommodation hole 18 is drilled in the sheet glass 12 at a position facing the through hole 16 with a drill or the like.
  • wash step S34 (washing step).
  • the cleaning liquid used in this liquid cleaning method contains, for example, an alkaline detergent or ozone water.
  • the cleaning liquid contains an abrasive.
  • the abrasive for example, fine particles mainly containing cerium oxide are used.
  • step S3 the plate glass 12 was supported almost horizontally, spacers 15 were arranged at predetermined intervals, and the evaporable getter 70 was accommodated in the accommodation hole 18 (step S3). 5)
  • step S36 the glass sheet 11 is placed on the glass sheet 12 from above, and the glass sheets 11 and 12 are paired (step S36), and the glass penetrates.
  • a communication pipe 17 a which forms the exhaust pipe 17, is inserted.
  • solder for example, solder a having a composition of 91.2 Sn-8.8 Z ⁇ ( ⁇ not crystal temperature: ⁇ 98 ° C.) is used.
  • FIG. 4 is a diagram illustrating the sealing step in FIG.
  • the sealing device A has a stepped platen 52 formed in a stepped shape having a high portion and a low portion lower than the high portion, and a mounting hole 5 at the high portion.
  • the supply tower 51 is a rail member.
  • the supply tower 51 has a crucible part 55 having a rectangular cross section for storing the liquid or solid phase solder a, a crucible part built in the side wall part of the crucible part 55 and a crucible part.
  • An introduction section 58 having a long cross section that communicates with the bottom of 55 and opens toward the outer peripheral edge of the pair of glass sheets 11 and 12, and is arranged horizontally at the middle of the introduction section 58
  • An introduction plate 59 is provided.
  • the introduction plate 59 extends from the introduction portion 58 and fits on the outer peripheral edge of the pair of glass plates 11 and 12, whereby the solder a is combined with its surface tension.
  • the voltage is applied to a and a, thereby forming a pair of glass sheets.
  • the movement mechanism.54 moves at a constant speed on the rail member 53 along the outer peripheral edge of the pair of plate glasses 11 and 12, so that the binder a becomes the introduction plate 59. Through the entire periphery of the pair of plate glasses 11 and 12 Then, a perimeter sealing material 14 that seals the perimeter of the hollow layer 13 formed between the pair of plate glasses 11 15 12 is formed.
  • an exhaust force pipe 61 is provided near the communication pipe 17a so as to cover the communication pipe 17a so as to cover the communication pipe 17a.
  • the hollow layer 1 is attached to the main surface and suctioned by a low-pressure pump or turbo-molecular pump (not shown) connected to the exhaust cap 61.
  • Step 3 The pressure in Step 3 is reduced to 1.33 Pa or less.
  • a vacuum is drawn to discharge the gas molecules in the hollow layer 13 to the outside (Step S38) (Step in decompression).
  • a voltage is applied to a heat source 62 such as a light source attached to the exhaust power 61 to heat the outside air end of the communication pipe 17a to a high tnn.
  • the exhaust pipe 17 is formed by melting and sealing the end of the outside air side of 7a (step S39) (FIG. 5B). As a result, a pair of glass sheets 11 1,
  • the hollow layer 13 formed between the two plates 12 is sealed.
  • the main surfaces of the pair of plate glasses 11 and 12 are washed (step S 3 4).
  • step S38 To vacuuming to discharge the gas molecules in the hollow layer 13 to the outside (step S38), respectively, the space in which the state of air pollution can be controlled chemically or physically. Will be implemented within.
  • the evaporable getter 70 housed in the housing hole 18 is locally heated using a high-frequency device (not shown), and the state of about 100 ° C. is maintained for about 15 seconds.
  • the glass evening material 71 is flashed (step S40), and the glass evening material 71 is vapor-deposited on the inner main surface of the sheet glass '11.
  • Getter material 7 adhered to the main surface of Itaga lath 1 1 of the inner surface 1 is in contact with the scattered various vapor molecules, the gas molecules or et consisting of water, CO, C 0 2, N 2, H 2 , 0 2, etc. of the gas is removed by suction, and the process ends.
  • the main surfaces of the pair of plate glasses 11 and 12 are cleaned, and the melting temperature at the outer peripheral edges of the pair of plate glasses 11 and 12 is 250 ° C. or lower. Since the pair of plate glasses 11 and 12 are sealed using the lower solder, generation of gas molecules from the main surfaces of the pair of plate glasses 11 and 12 can be suppressed. Further, since it is not necessary to heat the entire pair of plate glasses 11 and 12 with a heating device or the like, deformation of the pair of plate glasses 11 and 12 is suppressed. Thus, the manufacturing cost of the glass panel 10 can be reduced, and the quality of the glass panel 10 can be improved.
  • the glass panel 10 can be manufactured without deteriorating these performances.
  • the pair of plate glasses 11 and 12 are cleaned by using the liquid cleaning method, gas molecules that can be decomposed or scattered from the main surfaces of the pair of plate glasses 11 and 12 are cleaned. Generation can be further suppressed, so that the initial performance of the glass panel 10 can be exhibited over a long period of time.
  • the cleaning liquid used in the liquid cleaning method contains an alkaline detergent or ozone water, the initial performance of the glass panel 10 can be exhibited for a longer time.
  • the cleaning liquid contains the abrasive
  • the main surfaces of the pair of glass plates 11 and 12 can be physically polished, and thus the initial performance of the glass panel 10 can be improved. Can be exerted over a longer period of time.
  • the abrasive is fine particles mainly composed of cerium oxide
  • the main surfaces of the pair of plate glasses 11 and 12 can be chemically and physically polished. Therefore, the initial performance of the glass panel 10 can be exhibited for a longer time.
  • step S37 Before stopping (step S37), an adsorbent accommodating hole 18 for accommodating the mold 70 for adsorbing gas molecules in the hollow layer 13 is formed (step S37).
  • the gas molecules scattered in the hollow layer 13 can be adsorbed, and the degree of decompression of the hollow layer 13 can be maintained for a long time. Even if the pair of plate glasses 11 and 12 is not sufficiently washed, the d-form molecules can be adsorbed, and the degree of vacuum in the hollow layer 13 can be maintained for a long time.
  • the main surfaces of the pair of plate glasses 1 1 1 2 are cleaned.
  • Step S34 the evaporable getter 70 is accommodated in the accommodating hole 18 (Step S35), and the pair of plate glasses 11 and 12 is paired to form a pair of plate glass 11 , 12 are sealed (step S37), and a vacuum is applied to discharge the gas molecules in the hollow layer 13 to the outside (step S3).
  • the pair of glass plates 11 and 12 are cleaned using the liquid cleaning method, but the present invention is not limited to this, and the ultrasonic cleaning method, the UV cleaning method, the ozone cleaning method, and the plasma cleaning method may be used.
  • a pair of glass sheets may be cleaned using at least one of the cleaning methods.
  • solder having a melting temperature of 250 ° C. or less, for example,
  • the outer peripheral edge of the second may be sealed.
  • the metal material may include at least one material selected from the group consisting of Ti, A 1, and Cr.
  • the above-mentioned metal material is substantially composed of In and Sn and has a liquidus temperature of 150 ° C. or lower.
  • the adhesion between the D ⁇ substrate 10 and the metal material is further improved, and it is possible to realize sealing bonding at a low temperature.
  • the metal material substantially consists of I ⁇ and Sn, In / (In + Sn) is in the range of 50 to 65%, and the liquidus temperature is 1%. More preferably, it is below 25 ° C.
  • the adhesiveness between the substrate 10 and the metal material is further improved, and the microstructure after solidification is fine and rich in flexibility, has excellent mechanical properties, and achieves sealing joining at a lower temperature. You can do it.
  • the metal material substantially consists of I n, S n, z n, ⁇ i, and I n
  • the liquidus temperature is preferably 150 ° C or less, and the Zn is preferably 0. 1-5.0%,
  • T i is 0.001 to 0.05% and the liquidus temperature is 125 ° C. or less.
  • T i can be contained more uniformly, and the weather resistance at the interface between the substrate 10 and the metal material can be improved.
  • a vacuum is drawn to discharge the gas molecules in the hollow layer 13 to the outside, and the outside air side end of the communication pipe 17a is melted, melted and sealed off, so that the exhaust pipe 1 7 is formed, but the invention is not limited to this.
  • a predetermined gas is filled in the hollow layer 13, and then the outside air end of the communication pipe 17 a is melted and sealed.
  • the exhaust pipe 17 may be formed by cutting.
  • the pressure of the hollow layer 13 is reduced to 1.33 Pa or less.
  • the pressure is not limited to this, and the pressure of the hollow layer 13 may be reduced to almost a vacuum. Good. Thereby, the heat insulation performance of the glass panel 10 can be further enhanced.
  • the main surfaces of the pair of plate glasses 11 and 12 are cleaned, the evaporating type glass 70 is accommodated in the storage hole 18, and the pair of plate glasses 11 and 12 is paired. Is performed, the outer peripheral edges of the pair of plate glasses 11 and 12 are sealed, and a vacuum is evacuated to discharge the gas molecules in the hollow layer 13 to the outside. This is performed within a period that can be controlled chemically or physically, but is not limited to this. At least the main surfaces of the pair of plate glasses 11 and 12 are cleaned before the hollow layer 1 is cleaned. Each step up to the evacuation to discharge the gas molecules to the outside in Step 3 should be performed in a space where the air pollution state can be controlled chemically or physically. This can further prevent the pair of washed plate glasses 11 and 12 from being recontaminated.
  • Glass panels 10 are used for various purposes such as windows of buildings, automobiles, ships, etc., and various doors and walls of refrigerators and heat insulators. can do.
  • the pair of glass sheets 11, 1, 1 and 2 are flat glass.
  • the present invention is not limited to this.
  • Glass with light diffusion function by surface treatment netted glass, wire-coated glass, tempered glass, double-strengthened glass ⁇ low reflection glass, high transmission glass, ceramic glass, heat ray
  • Various types of glass such as a special glass having a UV absorption function or a combination thereof, can be appropriately selected and used.
  • composition of the pair of plate glasses 11 and 12 may be selected from soda silicate glass, soda lime glass, borosilicate glass, aluminosilicate glass, and various types of crystallized glass. . Also twin sheet glass
  • the thicknesses of 1 1 and 1 2 are also freely selectable.
  • spacer 15 is formed of stainless steel, but is not limited to this.
  • It may be formed of an alloy or a material having high rigidity such as ceramic or glass.
  • the spacer 15 is not limited to a columnar shape, and may be various shapes such as a polygonal shape and a spherical shape.
  • the evaporable getter 70 for absorbing gas molecules in the hollow layer 13 is used.
  • the present invention is not limited to this.
  • a non-evaporable getter that adsorbs and removes gas molecules may be used, a non-evaporable getter and an evaporative getter may be used in combination, and a getter (adsorbent) may be used.
  • the number of the adsorbent holes may be two or more, and the getter (adsorbent) may not be used.
  • the peripheral sealing material 1 ′ 4 is formed by using the welding device A, but is not limited to this, and may be a friction bonding method, an anodic bonding method, an ultrasonic bonding method, a multi-step bonding. It may be formed by using any one of a bonding method and a pressure bonding method. As a result, it is possible to improve the adhesion of the circumferential sealing material 14 to the pair of plate glasses 11 and 12.
  • a sealing material having a solubility of 250 ° C. or less at the outer peripheral edges of the pair of plate glasses is used. Since the pair of glass sheets is sealed by the heat treatment, generation of gas molecules from the main surfaces of the pair of glass sheets can be suppressed, and the entire pair of glass sheets does not need to be heated by a heating device or the like. By suppressing the deformation of the glass sheet, the cost of manufacturing the glass panel can be reduced, and the quality of the glass panel can be improved.
  • the method for manufacturing a glass panel of the present invention at least one method selected from the group consisting of a liquid cleaning method, an ultrasonic cleaning method, a UV cleaning method, an ozone cleaning method, and a plasma cleaning method is used. Since the pair of glass sheets is cleaned, generation of gas molecules that can be decomposed or scattered from the main surfaces of the pair of glass sheets can be further suppressed, and thus the initial performance of the glass glass can be exhibited for a long time. can do.
  • Glass panel cleaning liquid that is used in the liquid cleaning method according to the manufacturing method of the present invention because it contains Al force re detergent or Ozon water is exerted healed more prolonged the initial performance of Garasuno 1?, Channel be able to.
  • the cleaning liquid contains the abrasive, so that the main surfaces of the pair of plate glasses can be physically polished.
  • the initial performance of the glass panel can be exhibited for a longer time.
  • the abrasive is fine particles mainly composed of ceramic oxide, the main surfaces of the pair of plate glasses can be chemically and physically polished.
  • the initial performance of the glass tunnel can be exhibited for a longer time.
  • an adsorbent accommodation hole for accommodating an adsorbent for adsorbing gas molecules in the middle layer is formed, and the adsorbent is accommodated in the adsorbent accommodation hole. Gas molecules scattered in the hollow layer can be adsorbed, and the degree of decompression of the hollow layer can be maintained for a long time.
  • the method further includes a decompression step for reducing the pressure of the interlayer after the sealing step, wherein the cleaning step, the sealing step, and the decompression step Each of them is performed in a space where the state of air pollution can be controlled chemically or physically, so that a pair of washed glass sheets can be prevented from being re-contaminated, so that the life of the glass panel can be reduced. Can be extended.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

A method for manufacturing a glass panel, which comprises providing glass sheets (11, 12) having the same shape and the same size, cleaning a pair of sheet glasses (11, 12) by the use of a cleaning fluid containing a polishing material comprising fine particles, for example, containing cerium oxide as a primary component, and then, sealing a pair of glass sheets (11, 12) by the use of a sealing material having a melting point of 250˚C or lower at the outer edges of the circumferences of a pair of glass sheets (11, 12) having been paired. The above method can reduce the production cost for a glass panel, and simultaneously can improve the quality of the glass panel.

Description

明 細 書 ガラスパネルの製造方法、 及びその製造方法によ り製造された ガラスパネル 技術分野  Description Glass panel manufacturing method, and glass panel manufactured by the manufacturing method
本発明は 、 ガラスパ 不ルの製造方法、 及びその製造方法によ り 造 されたガラスノ ネルに関 し 、 特に、 一対の板ガラス間にスぺーサを介 在させる こ とによ り形成される中空層を有するガラスパネルの製造方 法 、 及びその製造方法によ り製造されたガラスパネルに関する。 背景技術  The present invention relates to a method for producing a glass panel, and a glass panel produced by the method, and particularly to a hollow formed by interposing a spacer between a pair of glass sheets. The present invention relates to a method for manufacturing a glass panel having a layer, and a glass panel manufactured by the method. Background art
従来 、 対向する一対の板ガラス と 、 一対の板ガラス間に複数の柱状 のスぺーサを介在させる こ と によ り 形成される 中空層と、 該中空層の 周縁をシ ルする周縁シール材と、 一対の板ガラス の一方を貫通する 孔に 端が埋め込まれ 他端が封止されている排気管と、 中 層に配 設され 、 中空層の各種気体分子を吸着するゲッタ材を収容する収容孔 とを備えるガラスパネルが知 られている。 こ のガラスパネルは 、 中空 層がほぼ真空まで減圧される こ とに < り 断熱性等の機能を有する。  Conventionally, a pair of opposed glass sheets, a hollow layer formed by interposing a plurality of columnar spacers between the pair of glass sheets, and a peripheral sealing material that seals the peripheral edge of the hollow layer; An exhaust pipe having one end embedded in a hole penetrating one of the pair of plate glasses and the other end sealed, and an accommodation hole arranged in the middle layer for accommodating a getter material for adsorbing various gas molecules in the hollow layer. A glass panel provided with is known. This glass panel has a function such as heat insulation when the hollow layer is depressurized to almost a vacuum.
で、 ガラス Λネルを構成する一対の板ガラスは、 ガラスノ ネ レ を構成する刖に、 その中空層 と接する内側の主面において各種気体分 子を吸着するこ とがある 。 こ の吸着された各種気体分子は、 対め板 ガラスがガラスノ ネルを構成 した後に外部から受ける熱エネルギ一等 によ て励起されて中空層に飛散するため 、 中空層の減圧度を悪化さ せ ガラス ) ネノレの断熱性を低下させる場合がある。 加えて このガ ラスパネルは、 長時間の使用によつて、 微量の気体分子が周縁シール 材を透過し、 中空層内に気体分子が混入する こ とによ り 断熱性が低下 する場合がある。 このよ う な問題を解消するべ く 、 以下のよ う なガラ スパネルの製造方法が行われている。 A pair of plate glasses constituting a glass panel may adsorb various gas molecules on an inner main surface in contact with the hollow layer when constituting a glass panel. These adsorbed various gas molecules are excited by heat energy and the like received from the outside after the facing glass forms the glass nonel, and are scattered to the hollow layer, thereby deteriorating the degree of decompression of the hollow layer. Glass) May reduce the heat insulation of the gnole. In addition, this glass panel has a small amount of gas molecules that seal around the edges after prolonged use. Insulation may decrease due to the permeation of the material and the incorporation of gas molecules into the hollow layer. In order to solve such a problem, the following glass panel manufacturing method is used.
図 6 は 、 従来のガラスパネルの製造方法を示すフ ロ チャ トであ FIG. 6 is a flowchart showing a conventional method for manufacturing a glass panel.
-o) ο -o) ο
図 6 において、 まず、 同一形状且つ同一サイ ズである一対の板ガラ スを準備 し (ステ ヅ プ S 6 1 ) 、 一対の板ガラスの一方に、 その四隅 の •5 ち いずれか 1 つ >の近傍において貫通孔を穿設 し (ステ ヅ プ S 6 In FIG. 6, first, a pair of glass sheets having the same shape and the same size are prepared (Step S61), and one of the four corners is placed on one of the pair of glass sheets. Drill a through hole in the vicinity (Step S6
2 ) ヽ 一対の板ガラスの他方に、 貫通孔に対向する位置において溝状 の収容孔を穿設する (ステップ S 6 3 ) 。 2) 溝 A groove-shaped accommodation hole is formed in the other of the pair of plate glasses at a position facing the through hole (step S63).
次にヽ 収容孔を穿設 した板ガラス をほぼ水平に支持し 、 スぺーサを 所定の間隔で配設 して、 収容孔に蒸発型ゲッ夕 を収容した (ステ ッ プ Next, the plate glass with the holes was supported almost horizontally, spacers were arranged at predetermined intervals, and the evaporative gas was stored in the holes (step).
S 6 4 ) 後、 該板ガラスにその上方から貫通孔を穿設した板ガラスを 載置 して 、 一対の板ガラスのペア リ ングを行い (ステヅ プ S 6 5 ) 、 さ ら に 貫通孔において排気管を形成するべ く 管状の M管を差し込 ォ( ο After S64), a plate glass having a through hole formed thereon is placed on the plate glass to perform pairing of a pair of plate glasses (step S65), and further, an exhaust pipe is formed in the through hole. Insert a tubular M tube to form
次いで 、 ペア リ ングされた一対の板ガラス 1 1 , 1 2 を加熱炉内に 収納 して一対の板ガラス全体を加熱 し (ステッ プ S 6 6 ) 、 ■inn風循環 等によ る焼成によ つて周縁シール材を溶融し、 該溶融した周縁シ一ル 材によつて一対の板ガラスの外周縁部を封止する (ステ Vプ S 6 7 ) o 次に、 中空層の圧力を減圧するべく 、 約 1 5 0 °Cに加熱した状態で、 中空層 の気体分子を外部へ排出するべ一キングを行う (ステ ッ プ S 6 8 ) 。 次いで、 連通管の外気側端部を高温に加熱し、 連通管の外気側 端部を溶解して封 じ切る こ と によ り排気管を形成する (ステ ッ プ S 6 9 ) o  Next, the paired pair of glass sheets 11 and 12 are housed in a heating furnace to heat the entire pair of glass sheets (step S66), and ■ firing by inn wind circulation or the like. The peripheral sealing material is melted, and the outer peripheral edges of the pair of plate glasses are sealed with the melted peripheral sealing material (Step S67) o Next, in order to reduce the pressure of the hollow layer, While heating to about 150 ° C, the gas molecules in the hollow layer should be exhausted to the outside (step S688). Next, the outside air side end of the communication pipe is heated to a high temperature, and the outside air side end of the communication pipe is melted and sealed to form an exhaust pipe (step S69).
さ ら に、 収容孔に収容された蒸発型ゲヅ 夕 加熱する こ とによって ゲヅ夕材をフラ ッ シュ し (ステッ プ S 7 0 ) 、 貫通孔を穿設した板ガ ラスの内側の主面にゲッタ材を蒸着させて、 本処理を終了する。 Further, by heating the evaporative gas housed in the housing hole, The gate material is flushed (step S70), and the getter material is vapor-deposited on the inner main surface of the plate glass in which the through holes are formed, and the process is completed.
このガラスパネルの製造方法によれば、 一対の板ガラス全体を加熱 し、 中空層の圧力 を減圧するべ く 中空層の気体分子を外部へ排出する ベーキングを行 う こ と によ り 、 一対の板ガラス に吸着した各種気体分 子や有機成分等 汚れを積極的に分解又は飛散させて中 層の空気と 共に排出するこ とができ、 更に、 高温の加熱処理によ り溶融 した周縁 シ一 レ材によつ て一対の板ガラス .の外周縁部を封止する とによ り、 中空層を外部か ら の水分や酸素等の気体分子か ら遮断する とができ る (例えば、 特開 2 0 0 2 - 1 8 7 7 4 5号公報参照) 。  According to this method of manufacturing a glass panel, the entire pair of glass sheets is heated, and baking is performed to discharge gas molecules in the hollow layer to the outside so as to reduce the pressure in the hollow layer. It can actively decompose or scatter various gas molecules, organic components, and other contaminants adsorbed on the surface, and discharge it together with the middle layer of air.Furthermore, the peripheral edge material melted by high-temperature heat treatment By sealing the outer peripheral edges of the pair of glass sheets, the hollow layer can be shielded from gas molecules such as moisture and oxygen from the outside (see, for example, JP 0 2-1 8 7 7 4 5).
しか しながら 中空層を減圧する際に一対の板ガラス全体を加熱す る加熱装置が必要 となるので、 加熱装置を配置する ためのスペースを 要する と共に、 設備費が増大 し、 ひいてはガラスパネルの製造コス ト が増大する とい 問題がある。 加えて、 一対の板ガラス全体を加熱す る際に、 加熱装撢の内部空間全体を均一な温度分布とする とが困難 である こ とによ る一対の板ガラスの熱変形や、 一対の板ガラスの熱膨 張の違いによる ガラスノ ネルの反 り 等によって、 該ガラスパネルの品 質が低下すると L う 問題がある。 さ ら には、 熱線反射、 線吸収、 低 放射率等の性能 を有する膜が貼付された高性能ガラスを用いた場合、 加熱によ り膜性能が劣化する という 問題がある。  However, when depressurizing the hollow layer, a heating device for heating the entire pair of glass sheets is required, so that a space for disposing the heating device is required, equipment costs are increased, and the production cost of the glass panel is increased. There is a problem with the increase in In addition, when the entire pair of glass sheets is heated, it is difficult to make the entire internal space of the heating device have a uniform temperature distribution. There is a problem that the quality of the glass panel deteriorates due to the warpage of the glass panel due to the difference in thermal expansion. Furthermore, when high performance glass to which a film having performances such as heat ray reflection, line absorption, and low emissivity is used is used, there is a problem that the film performance is deteriorated by heating.
本発明の目的は 、 ガラスパネルの製造コス ト を低減する とができ る と共にガラス ネルの品質を向上させる こ とができるガラスパネル の製造方法、 及びその製造方法によ り製造されたガラス ネルを提供 する こ とにある  An object of the present invention is to provide a glass panel manufacturing method capable of reducing the manufacturing cost of a glass panel and improving the quality of the glass panel, and a glass panel manufactured by the manufacturing method. To provide
発明の開示 上記目的を達成する ために、 本発明の第 1 の態様によればヽ 外周縁 部を有する、 互いに対向する一対の板ガラス と、 該板ガラスの間に、 中空層を形成する よ う に介在された少な く と も 1 つのスぺ ―サとを備 え 、 記外周縁部が封止される と共に、 前記中空層が減圧されたガラ スパネルの製造方法であつて、 前記一対の板ガラスの主面の少な く と も ―方を洗浄する洗浄ステ ツ プと、 前 Ϊ3—対の板ガラスの外周縁部に おいて溶解温度が 2 5 0 °C以下である封着材を用いて 刖 B6 一対の板ガ ラスを封止する封止ステ ッ プとを有する こ とを特徴とするガラ スノ ネ ルの製造方法が提供される。 Disclosure of the invention In order to achieve the above object, according to a first aspect of the present invention, there is provided a pair of sheet glasses facing each other, each having an outer peripheral edge, and a glass layer is interposed between the sheet glasses to form a hollow layer. A method of manufacturing a glass panel having at least one spacer, wherein the outer peripheral edge portion is sealed, and the hollow layer is depressurized, and wherein a main surface of the pair of plate glasses is provided. A cleaning step of cleaning at least one side and a sealing material having a melting temperature of 250 ° C. or less at the outer peripheral edge of the pair of glass sheets. A method for producing a glass panel, comprising: a sealing step for sealing a glass.
 ,
第 1 の態様において 、 刖記洗浄ステ ッ プは 、 液体洗浄法、 超 曰波洗 浄法 、 U V洗浄法 、 ォゾン洗浄法、 及びプラズマ洗浄法から成る群か ら選択された少な く と ¾ 1 つの方法を用いて刖 ΘΙ3一対の板ガラスを洗 浄する こ とが好ま しい , 0  In the first embodiment, the cleaning step comprises at least one selected from the group consisting of a liquid cleaning method, a super cleaning method, a UV cleaning method, an ozone cleaning method, and a plasma cleaning method. It is preferable to use a method to wash a pair of glass sheets, 0
1 の態様において 、 刖記液体洗浄法で用い られる洗浄液は 、 ァル カ リ洗剤又はオゾン水を含有する こ とが好ま しい。  In one embodiment, the cleaning liquid used in the liquid cleaning method preferably contains an alkaline detergent or ozone water.
の能椋において、 前記洗浄液は研磨材を含有する こ とが好ま し い o  In Nohgura, the cleaning liquid preferably contains an abrasive o
の態様において、 前記研磨材は酸化セ リ ウムを主成分とする微 粒子である こ とが好ま しい, 0  In one embodiment, the abrasive is preferably fine particles mainly composed of cerium oxide.
第 1 の態様において、 前記封着材はハンダ又は樹脂から成る とが 好ま しい o  In the first embodiment, the sealing material is preferably made of solder or resin.
第 1 の態様において、 前記封止ステ ヅ プの刖に、 目 IJ記中空層内のメ 体分子を吸着する吸着材を収容する吸着材収容孔を穿設する穿設ステ ヅ プと 言 3吸着材を前記吸着材収容孔に収容する収容スァ ヅ プとを 更に備える こ とが好ま しい,  In the first embodiment, a perforation step for perforating an adsorbent accommodating hole for accommodating an adsorbent for adsorbing a molecule in the hollow layer is provided in one of the sealing steps. It is preferable that the apparatus further comprises a storage space for storing the adsorbent in the adsorbent storage hole.
第 1 の 様において、 前記封止ステ ップの後に前記中空層の圧力を 減圧する減圧ステ ッ プを更に備え、 前記洗浄ステ ッ プ、 前記封止ステ ッ プ、 及び前記減圧ステッ プは、 各々、 空気の汚染状態を化学的又は 物理的に制御可能な空間内で実施される こ とが好ま しい。 In the first aspect, the pressure of the hollow layer is increased after the sealing step. The cleaning step, the sealing step, and the depressurizing step each further include a depressurizing step for depressurizing, and each of the cleaning step, the sealing step, and the depressurizing step is performed in a space in which the state of contamination of air can be controlled chemically or physically. It is preferable to be done.
ま た、 上記目的を達成するために、 本発明の第 2 の態様によれば、 本発明の第 1 の態様における ガラスパネルの製造方法によ り製造され るガラスパネルが提供される。 図面の簡単な説明  According to a second aspect of the present invention, there is provided a glass panel manufactured by the method for manufacturing a glass panel according to the first aspect of the present invention. Brief Description of Drawings
図 1 Aは 本 明の実施の形態に係るガフスパ不 の概略構成を示 す斜視図であ り ヽ 図 1 Bはヽ 図 1 Aにおける線 1 B 1 B に沿う 断面 図である。  FIG. 1A is a perspective view showing a schematic configuration of a guff spa according to an embodiment of the present invention. FIG. 1B is a cross-sectional view taken along line 1 B 1 B in FIG. 1A.
図 2 は、 図 1 のガラスパネルにおける収容孔とそ 近傍の概略構成 を示す部分断面図であ 。  FIG. 2 is a partial cross-sectional view showing a schematic configuration of the accommodation hole and its vicinity in the glass panel of FIG.
図 3 は、 図 1 のガラスパネルの製造方法を示すフ —チヤ一ト であ る  FIG. 3 is a flowchart showing a method of manufacturing the glass panel of FIG.
図 4は、 図 3 における封止ステ ッ プを説明する図である。  FIG. 4 is a diagram illustrating the sealing step in FIG.
図 5 Aは、 真空引き時及び排気管形成時の図 1 Aにおける一対の板 ガラ スの部分断面図であ り 、 図 5 B は、 排気管形成後の一対の板ガラ スの部分断面図である。  FIG. 5A is a partial cross-sectional view of the pair of plate glasses in FIG. 1A at the time of evacuation and formation of the exhaust pipe, and FIG. 5B is a partial cross-sectional view of the pair of plate glasses after the exhaust pipe is formed. It is.
図 6 は、 従来のガラスパネルの製造方法を示すフ ローチヤ一 ト であ る 発明を実施するための最良の形態  FIG. 6 is a flow chart showing a conventional method for manufacturing a glass panel.
以下、 本発明の実施の形態を図面を参照 しながら説明する。  Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図 1 Aは、 本発明の実施の形態に係るガラスパネルの概略構成を示 す斜視図であ り 、 図 1 Bは、 図 1 Aにおける線 1 B — 1 B に沿う 断面 図である o FIG. 1A is a perspective view showing a schematic configuration of a glass panel according to an embodiment of the present invention, and FIG. 1B is a cross-sectional view taken along line 1B-1B in FIG. 1A. O
図 1 に おいて、 ガラスパネル 1 0は、 対向する一対の板ガラス 1 1 In FIG. 1, a glass panel 10 is a pair of opposing glass sheets 11
1 2 と 一対の板ガラス 1 1 , 1 2間に中空層 1 3 を形成する よ う に 介在された複数の柱状のスぺ一サ 1 5 と、 板ガラス 1 1 , 1 2 の中空 層 1 3 の周縁部をシールする周縁シール材 1 4 (封着材) と 板ガラ ス 1 1 を貫通する貫通孔 1 6 に一端が埋め込まれ、 他端が封止されて いる排気管 1 7 と を備え、 中空層に配設され、 中空層内の気体分子を 吸着する蒸発型ゲ ッ夕 7 0 (吸着材) を収容する吸着材収容孔 1 8が 板ガラス 1 2 に形成されている。 1 and a plurality of columnar spacers 15 interposed to form a hollow layer 13 between the pair of plate glasses 11 1 and 12, and a hollow layer 13 of the plate glasses 11 and 12. A peripheral sealing material 14 (sealing material) for sealing the peripheral portion, and an exhaust pipe 17 having one end embedded in a through hole 16 penetrating the plate glass 11 and the other end sealed. An adsorbent-accommodating hole 18 that is disposed in the hollow layer and accommodates an evaporative gas-gas 70 (adsorbent) that adsorbs gas molecules in the hollow layer is formed in the sheet glass 12.
2枚の板ガラス 1 1 1 2はその厚みが 2 . 6 5 ~ 3 . 2 m m程度 の透明な フ ロー ト ガラスであ り、 中空層 1 3が 1 . 3 3 P a ( 1 . 0 The two glass sheets 111 are transparent float glass having a thickness of about 2.6 to 3.2 mm, and the hollow layer 13 has a thickness of 1.33 Pa (1.0 mm).
X 1 0 - 2 T o r r ) 以下に減圧されている。 ま た 、 中空層 1 3 はそ の内部の空気を貫通孔 1 6及び排気管 1 7 を介 して排出する とによ つて減圧され、 排気管 1 7が中空層 1 3 の減圧状態を維持する ために その他端において溶融等によって封止される。 X 1 0 - 2 T orr) is depressurized below. The pressure in the hollow layer 13 is reduced by discharging the air inside the hollow layer 13 through the through hole 16 and the exhaust pipe 17, and the exhaust pipe 17 maintains the reduced pressure state of the hollow layer 13. The other end is sealed by melting.
スぺーサ 1 5は円柱状であ り、 その直径が 0 . 3 1 • 0 m m程度、 高さが 0 . 1 5 1 . 0 mm程度であ り 、 板ガラス 1 1 1 2 に作用 する大気圧に起因する圧縮応力を負荷されても坐屈 しない材料、 例え ば 、 圧縮強度が 4 . 9 X 1 0 8 P a ( 5 X 1 0 3 k g f / c m 2 ) 以 上の材料、 好ま し く は、 ステ ン レス鋼 ( S U S 3 0 4 ) 等によ り形成 されている。 The spacer 15 has a cylindrical shape, a diameter of about 0.31 • 0 mm, a height of about 0.151.0 mm, and an atmospheric pressure acting on the sheet glass 1 1 1 2. due material not buckling be loaded with compressive stress, for example, the compressive strength is 4. 9 X 1 0 8 P a (5 X 1 0 3 kgf / cm 2) on the following materials, and rather the preferred And stainless steel (SUS304).
図 2は 図 1 のガラスパネル 1 0 における収容孔 1 8の近傍の概略 構成を示す部分断面図である。  FIG. 2 is a partial cross-sectional view showing a schematic configuration near the accommodation hole 18 in the glass panel 10 of FIG.
図 2 において、 収容孔 1 $ は、 板ガラス 1 2 に頁通孔 1 6 に対向す る位置において環状の溝と して穿設される。 収容孔 1 8 に収容される 発型ゲヅ夕 7 0 は、 その厚みが 0 . 1 m mであるステン レス製の環 状容 7 2 と、 環状容器 7 2 に内包され、 その厚みが 0 . 4 5 m mで あるゲヅタ材 7 1 とを有する。 In FIG. 2, the accommodating hole 1 $ is formed in the sheet glass 12 as an annular groove at a position facing the page through hole 16. The mold ring 70 accommodated in the accommodation hole 18 is a stainless steel ring having a thickness of 0.1 mm. It has a container 72 and a gutter member 71 contained in an annular container 72 and having a thickness of 0.45 mm.
図 3 は 、 図 1 のガラスノ ネル 1 0 の製造方法を示すフ ローチャ一ト でめる o  FIG. 3 is a flow chart showing a method of manufacturing the glass panel 10 of FIG. 1.
まずヽ フ ロー ト ガラスか ら成る所定の厚さの 2枚のガラス素板 (不 図示 ) を所定の寸法、 例えば、 1 2 0 0 m m X 9 0 0 m mに夫 切断 しヽ 同一形状且つ同一サイ ズである板ガラス 1 1 , 1 2 を準備 し (ス テ ヅ プ S 3 1 ) 、 板ガラス 1 1 に、 その四隅のう ちいずれか 1 の近 傍において貫通孔 1 6 を ド リ ル等によつて穿設し (ステヅプ S 3 2 ) (穿設ステツ プ) 、 板ガラス 1 2 に、 貫通孔 1 6 に対向する位置にお いて溝状の収容孔 1 8 を ド リ ル等に よって穿設する (ステ ヅ プ S 3 First, two glass base plates (not shown) made of float glass and having a predetermined thickness are cut into predetermined dimensions, for example, 1200 mm x 900 mm, and have the same shape and the same shape. Prepare glass sheets 11 and 12 of the size (step S31), and insert through holes 16 in the vicinity of any one of the four corners of the glass sheet 11 with a drill or the like. (Step S32) (drilling step), and a groove-shaped accommodation hole 18 is drilled in the sheet glass 12 at a position facing the through hole 16 with a drill or the like. (Step S 3
3 ) o 3) o
次に、 ク リ ーンルームやケ ミ カルク リ ーンルーム等の空気の汚染状 態を化学的又は物理的に制御可能な空間内において、 液体洗浄法を用 いて一対の板ガラ ス 1 1 , 1 2 を洗浄する (ステ ッ プ S 3 4 ) (洗浄 ステ ッ プ) 。 この液体洗浄法で用い られる洗浄液は、 例えば、 アル力 リ 洗剤又はオゾン水を含有する。 また、 該洗浄液には、 研磨材が含有 されている。 研磨材と しては、 例えば酸化セ リ ウムを主成分とする微 粒子が用いられる。  Next, in a space where the state of air contamination, such as a clean room or a chemical clean room, can be controlled chemically or physically, a pair of glass plates 11 and 12 are formed using a liquid cleaning method. Wash (step S34) (washing step). The cleaning liquid used in this liquid cleaning method contains, for example, an alkaline detergent or ozone water. The cleaning liquid contains an abrasive. As the abrasive, for example, fine particles mainly containing cerium oxide are used.
次いで、 板ガラ ス 1 2 をほぼ水平に支持し、 スぺーサ 1 5 を所定の 間隔で配設して、 収容孔 1 8 に蒸発型ゲ ッタ 7 0 を収容した (ステ ヅ プ S 3 5 ) (収容ステ ッ プ) 後、 板ガラス 1 2 にその上方から板ガラ ス 1 1 を載置 して、 板ガラス 1 1 , 1 2 のペア リ ングを行い (ステ ヅ プ S 3 6 ) 、 貫通孔 1 6 において排気管 1 7 を形成するべ く 状の連 通管 1 7 aを差 し込む。  Next, the plate glass 12 was supported almost horizontally, spacers 15 were arranged at predetermined intervals, and the evaporable getter 70 was accommodated in the accommodation hole 18 (step S3). 5) After the (accommodation step), the glass sheet 11 is placed on the glass sheet 12 from above, and the glass sheets 11 and 12 are paired (step S36), and the glass penetrates. At the hole 16, a communication pipe 17 a, which forms the exhaust pipe 17, is inserted.
さ ら に、 ペア リ ングされた一対の板ガラス 1 1 , 1 2 をほぼ水平に 保ち、 溶解温度が 2 5 0 °C以下でめるハンダを用いて、 一対の板ガフ ス 1 1 , 1 2 の外周縁部を封止する (ステ ヅ プ S 3 7 ) (封止ステ ヅ プ) 。 上記ハンダと しては、 例えば 9 1 . 2 S n - 8 . 8 Z η ( ±ノtヽ晶 点温度 : ί 9 8 °C ) の組成を有するハンダ aが用い られる。 In addition, the pair of paired glass sheets 11 and 12 are placed almost horizontally. Using a solder that maintains the melting temperature at 250 ° C or less, seal the outer peripheral edges of the pair of plate guffs 11 and 12 (step S37) (sealing step). B). As the solder, for example, solder a having a composition of 91.2 Sn-8.8 Zη (± not crystal temperature: ί98 ° C.) is used.
図 4は、 図 3 における封止ステ ップを説明する図である。  FIG. 4 is a diagram illustrating the sealing step in FIG.
図 4 において、 封止装置 Aは、 高部と、 高部よ り 低い低部と を有 し て段差状に形成された段差状定盤 5 2 を有 し、 高部において載置ム 口 5 In FIG. 4, the sealing device A has a stepped platen 52 formed in a stepped shape having a high portion and a low portion lower than the high portion, and a mounting hole 5 at the high portion.
0 を介 して一対の板ガラス 1 1 , 1 2 を保持する と共に、 低'部におい て一対の板ガラ ス 1 1 , 1 2 にハンダ a を供給する供給塔 5 1 を保持 する ο 段差状定盤 5 2 の底部には、 上記一対の板ガラス 1 1 , 1 2 に 沿つて 2本のレール部材 5 3 が配され、 上記供給塔 5 1 はレール部材0 and a pair of plate glasses 11 and 12 and a supply tower 51 for supplying solder a to the pair of plate glasses 11 and 12 at the lower end. At the bottom of the panel 52, two rail members 53 are arranged along the pair of plate glasses 11 and 12. The supply tower 51 is a rail member.
5 3上を走行する移動機構 5 4の上に載置されている。 It is mounted on a moving mechanism 54 running on 53.
供給塔 5 1 は、 液相又は固相のハンダ a を貯留する横断面長方形の る ぼ部 5 5 と、 るつぼ部 5 5 の側壁部に内蔵される と共にるつぼ部 The supply tower 51 has a crucible part 55 having a rectangular cross section for storing the liquid or solid phase solder a, a crucible part built in the side wall part of the crucible part 55 and a crucible part.
5 5 内に貯留されたハンダ a を加熱する電熱ヒータ 5 6 と、 るつぼ部5 An electric heater 5 6 for heating the solder a stored in 5 and a crucible part
5 5 の底部に連通する と共に一対の板ガラス 1 1 , 1 2 の外周縁部に 向かつて開口する断面長尺状の導入部 5 8 と、 導入部 5 8 の中位に水 平に配された導入板 5 9 とを備える。 導入板 5 9 は、 導入部 5 8 から 延伸 して一対の板ガラ ス 1 1 , 1 2 の外周縁部に嵌入 してお り 、 これ によ り、 ハンダ aは、 その表面張力と相俟って間隙部 5 7 に侵入する。 加えて、 るっぽ部 5 5 内で液位 Δ Hにあるノヽ ンダ aの重力が導入板 5An introduction section 58 having a long cross section that communicates with the bottom of 55 and opens toward the outer peripheral edge of the pair of glass sheets 11 and 12, and is arranged horizontally at the middle of the introduction section 58 An introduction plate 59 is provided. The introduction plate 59 extends from the introduction portion 58 and fits on the outer peripheral edge of the pair of glass plates 11 and 12, whereby the solder a is combined with its surface tension. Into the gap 57. In addition, the gravity of the nozzle a at the liquid level ΔH in the loop portion 5 5
9 の部位においてノ、ンダ a に印加され、 これによ り 、 一対の板ガラスAt the portion 9, the voltage is applied to a and a, thereby forming a pair of glass sheets.
1 1 , 1 2 の外周縁部へのハンダ aの侵入を促進する。 It promotes the penetration of solder a into the outer peripheral edge of 1 1 and 1 2.
―方、 移動機構.5 4 が、 一対の板ガラス 1 1 , 1 2 の外周縁部に沿 て レール部材 5 3 上を一定速度で移動する こ とによ り 、 ノヽンダ aは 導入板 5 9 を介 して一対の板ガラス 1 1 , 1 2 の外周縁部全体に亘っ て•K入" 9 。 しれによ り 、 一対の板ガラス 1 1 5 1 2間に形成された 中空層 1 3の周縁をシ'ールする周縁シール材 : 1 4が形成される。 The movement mechanism.54 moves at a constant speed on the rail member 53 along the outer peripheral edge of the pair of plate glasses 11 and 12, so that the binder a becomes the introduction plate 59. Through the entire periphery of the pair of plate glasses 11 and 12 Then, a perimeter sealing material 14 that seals the perimeter of the hollow layer 13 formed between the pair of plate glasses 11 15 12 is formed.
続 く ステ ッ プ S 3 8 において、 図 5 Aに示すよ う に、 連通管 1 7 a の近傍において排気力 ヅ プ 6 1 を連通管 1 7 aを覆う よ う に板ガラス 1 1 の外側の主面に取付け、 こ の排気カ ッ プ 6 1 に接続された不図示 のロー夕 リ ーポンプやターボ分子ポンプによる吸引によ り、 中空層 1 In the following step S38, as shown in FIG. 5A, an exhaust force pipe 61 is provided near the communication pipe 17a so as to cover the communication pipe 17a so as to cover the communication pipe 17a. The hollow layer 1 is attached to the main surface and suctioned by a low-pressure pump or turbo-molecular pump (not shown) connected to the exhaust cap 61.
3 の圧力を 1 . 3 3 P a以下にまで減圧するベ < 中空層 1 3の気体分 子を外部へ排出する真空引きを行う (ステ ツプ S 3 8 ) (減圧ステ ツ プ) 。 次いで、 排気力 ップ 6 1 に取付け られたヒ一夕等の熱源 6 2 に 電圧を印加 して連通管 1 7 aの外気側端部を高 tnn.に加熱し、 連通管 1The pressure in Step 3 is reduced to 1.33 Pa or less. A vacuum is drawn to discharge the gas molecules in the hollow layer 13 to the outside (Step S38) (Step in decompression). Next, a voltage is applied to a heat source 62 such as a light source attached to the exhaust power 61 to heat the outside air end of the communication pipe 17a to a high tnn.
7 aの外気側端部を溶解して封 じ切る こ とによ り排気管 1 7 を形成す る (ステップ S 3 9 ) (図 5 B ) 。 これによ りヽ 一対の板ガラス 1 1 ,The exhaust pipe 17 is formed by melting and sealing the end of the outside air side of 7a (step S39) (FIG. 5B). As a result, a pair of glass sheets 11 1,
1 2間に形成された中空層 1 3が密閉される ο 尚 、 上述した各行程の う ち、 一対の板ガラス 1 1 , 1 2の主面を洗浄して (ス.テ ヅ プ S 3 4 ) か ら 中空層 1 3 の気体分子を外部へ排出する真空引きを行う (ステ ツ プ S 3 8 ) までの各行程は、 夫々、 空気の汚染状態を化学的又は物理 的に制御可能な空間内で実施される。 The hollow layer 13 formed between the two plates 12 is sealed. Ο In addition, in each of the above-described steps, the main surfaces of the pair of plate glasses 11 and 12 are washed (step S 3 4). ) To vacuuming to discharge the gas molecules in the hollow layer 13 to the outside (step S38), respectively, the space in which the state of air pollution can be controlled chemically or physically. Will be implemented within.
次いで、 収容孔 1 8 に収容された蒸発型ゲッタ 7 0を、 不図示の高 周波装置を用いて局部的に加熱 し、 約 1 0 0 0 °Cの状態をほぼ 1 5秒 維持する こ と に よ っ てゲヅ 夕材 7 1 を フ ラ ッ シュ し (ステ ッ プ S 4 0 ) 、 板ガラス ' 1 1 の内側の主面にゲヅ 夕材 7 1 を蒸着させる。 板ガ ラス 1 1 の内面側の主面に付着したゲッタ材 7 1 は、 飛散した各種気 体分子と接触 して、 その気体分子か ら なる水、 C O、 C 02、 N 2、 H 2、 02等のガスを吸着して除去し、 本処理を終了する。 Next, the evaporable getter 70 housed in the housing hole 18 is locally heated using a high-frequency device (not shown), and the state of about 100 ° C. is maintained for about 15 seconds. Thus, the glass evening material 71 is flashed (step S40), and the glass evening material 71 is vapor-deposited on the inner main surface of the sheet glass '11. Getter material 7 adhered to the main surface of Itaga lath 1 1 of the inner surface 1 is in contact with the scattered various vapor molecules, the gas molecules or et consisting of water, CO, C 0 2, N 2, H 2 , 0 2, etc. of the gas is removed by suction, and the process ends.
本実施の形態によれば、 一対の板ガラス 1 1 ,1 2の主面を洗浄し、 一対の板ガラ ス 1 1, 1 2 の外周縁部において溶解温度が 2 5 0 °C以 下であるハ ンダを用いて一対の板ガラス 1 1 , 1 2 を封止する ので、 一対の板ガラ ス 1 1 , 1 2 の主面か らの気体分子の発生を抑制する こ とがで き、 また、 一対の板ガラス 1 1 , 1 2 全体を加熱装置等によ つ て加熱する必要がない こ と によ って一対の板ガラ ス 1 1, 1 2 が変形 するのを抑制する こ とができ、 も ってガラスパネル 1 0 の製造コス ト を低減する こ とができる と共にガラスパネル 1 0 の品質を向上させる こ とができる。 ま た、 一対の板ガラ ス 1 1 , 1 2 全体を加熱する必要 がないので、 一対の板ガラ ス 1 1, 1 2 のう ち少な く と も 一方に、 例 えば熱線反射、 熱線吸収、 低放射率等の性能を有する膜が貼付された 高性能ガラスを用いた場合でも、 これらの性能を劣化させる こ とな く ガラスパネル 1 0 を製造する こ とができる。 According to the present embodiment, the main surfaces of the pair of plate glasses 11 and 12 are cleaned, and the melting temperature at the outer peripheral edges of the pair of plate glasses 11 and 12 is 250 ° C. or lower. Since the pair of plate glasses 11 and 12 are sealed using the lower solder, generation of gas molecules from the main surfaces of the pair of plate glasses 11 and 12 can be suppressed. Further, since it is not necessary to heat the entire pair of plate glasses 11 and 12 with a heating device or the like, deformation of the pair of plate glasses 11 and 12 is suppressed. Thus, the manufacturing cost of the glass panel 10 can be reduced, and the quality of the glass panel 10 can be improved. Also, since it is not necessary to heat the entire pair of plate glass 11, 12, at least one of the pair of plate glass 11, 12, for example, heat ray reflection, heat ray absorption, Even when high-performance glass to which a film having performance such as low emissivity is attached is used, the glass panel 10 can be manufactured without deteriorating these performances.
本実施の形態によれば、 液体洗浄法を用いて一対の板ガラス 1 1, 1 2 を洗浄するので、 一対の板ガラ ス 1 1 , 1 2 の主面か ら分解又は 飛散し得る気体分子の発生を更に抑制する こ とがで き、 も ってガラス パネル 1 0 の初期性能を長時間に亘つて発揮するこ とができる。  According to the present embodiment, since the pair of plate glasses 11 and 12 are cleaned by using the liquid cleaning method, gas molecules that can be decomposed or scattered from the main surfaces of the pair of plate glasses 11 and 12 are cleaned. Generation can be further suppressed, so that the initial performance of the glass panel 10 can be exhibited over a long period of time.
本実施の形態によれば、 液体洗浄法で用い られる洗浄液は、 アル力 リ 洗剤又はオゾン水を含有するので、 ガラスパネル 1 0 の初期性能を 更に長時間に亘つて発揮する こ とができる。  According to the present embodiment, since the cleaning liquid used in the liquid cleaning method contains an alkaline detergent or ozone water, the initial performance of the glass panel 10 can be exhibited for a longer time.
本実施の形態によれば、 洗浄液は研磨材を含有するので、 一対の板 ガラ ス 1 1, 1 2 の主面を物理研磨する こ とがで き、 も ってガラスパ ネル 1 0 の初期性能を更に長時間に亘つて発揮する こ とができる。  According to the present embodiment, since the cleaning liquid contains the abrasive, the main surfaces of the pair of glass plates 11 and 12 can be physically polished, and thus the initial performance of the glass panel 10 can be improved. Can be exerted over a longer period of time.
本実施の形態によれば、 研磨材は酸化セ リ ゥムを主成分とする微粒 子であるので、 一対の板ガラス 1 1 , 1 2 の主面を化学研磨且つ物理 研磨するこ とがで き、 もってガラスパネル 1 0 の初期性能を更に長時 間に亘つて発揮する こ とができる。  According to the present embodiment, since the abrasive is fine particles mainly composed of cerium oxide, the main surfaces of the pair of plate glasses 11 and 12 can be chemically and physically polished. Therefore, the initial performance of the glass panel 10 can be exhibited for a longer time.
本実施の形態によれば、 一対の板ガラス 1 1, 1 2 の外周縁部を封 止する (ステ ツ プ S 3 7 ) 前に、 中空層 1 3 の気体分子を吸着する 発型ゲ ヅ夕 7 0 を収容する吸着材収容孔 1 8 を穿設 し (ステツ プ S 3According to the present embodiment, the outer peripheral edges of the pair of plate glasses 11 and 12 are sealed. Before stopping (step S37), an adsorbent accommodating hole 18 for accommodating the mold 70 for adsorbing gas molecules in the hollow layer 13 is formed (step S37).
3 ) 蒸発型ゲ ヅ 夕 7 0 を吸着材収容孔 1 8 に収容する (ステ ヅ プ S3) Store the evaporator 70 in the adsorbent storage hole 18 (Step S
3 5 ) ので 、 中空層 1 3 に飛散した気体分子を吸着する こ とができ 中空層 1 3 の減圧度を長時間に亘つて維持する こ とができる。 また 仮に一対の板ガラス 1 1 , 1 2 の洗浄が不十分である場合でも d体 分子を吸着する こ とができ、 中空層 1 3 の減圧度を長時間に亘つて維 持する とができる , Since 35), the gas molecules scattered in the hollow layer 13 can be adsorbed, and the degree of decompression of the hollow layer 13 can be maintained for a long time. Even if the pair of plate glasses 11 and 12 is not sufficiently washed, the d-form molecules can be adsorbed, and the degree of vacuum in the hollow layer 13 can be maintained for a long time.
本実施の形態によれば、 一対の板ガラス 1 1 1 2 の主面を洗浄 し  According to the present embodiment, the main surfaces of the pair of plate glasses 1 1 1 2 are cleaned.
(ステ ヅプ S 3 4 ) 、 収容孔 1 8 に蒸発型ゲッタ 7 0 を収容し (ステ ヅ プ S 3 5 ) 、 一対の板ガラス 1 1 , 1 2 のペア リ ングを行い 対 の板ガラス 1 1 , 1 2 の外周縁部を封止 し (ステヅ プ S 3 7 ) 、 中空 層 1 3 の気体分子を外部へ排出する真空引きを行う が (ステ ツ プ S 3(Step S34), the evaporable getter 70 is accommodated in the accommodating hole 18 (Step S35), and the pair of plate glasses 11 and 12 is paired to form a pair of plate glass 11 , 12 are sealed (step S37), and a vacuum is applied to discharge the gas molecules in the hollow layer 13 to the outside (step S3).
8 ) れらの各行程は、 夫々、 空気の汚染状態を化学的又は物理的 に制御可能な空間内で実施されるので、 洗浄された一対の板ガラス 18) Each of these steps is performed in a space where the state of air pollution can be controlled chemically or physically, so a pair of cleaned glass sheets 1
1 , 1 2 が再汚染されるのを防止する こ とができ、 も ってガラ スパネ ル 1 0 の寿命を延ばすこ とができる。 1, 12 can be prevented from being re-contaminated, and the life of the glass panel 10 can be prolonged.
本実施の形態では、 液体洗浄法を用いて一対の板ガラ ス 1 1 , 1 2 を洗浄するが、 これに限る ものではな く 、 超音波洗浄法、 U V洗浄法、 オゾン洗浄法、 及びプラズマ洗浄法の少な く と も 1 つを用いて一対の 板ガラスを洗浄 して も よい。 これに よ り 、 一対の板ガラス 1 1 1 2 の主面から分解又は飛散し得る気体分子の発生を抑制する こ とができ、 も ってガラスパネル 1 0 の初期性能を長時間に亘つて発揮する こ とが できる。  In the present embodiment, the pair of glass plates 11 and 12 are cleaned using the liquid cleaning method, but the present invention is not limited to this, and the ultrasonic cleaning method, the UV cleaning method, the ozone cleaning method, and the plasma cleaning method may be used. A pair of glass sheets may be cleaned using at least one of the cleaning methods. As a result, generation of gas molecules that can be decomposed or scattered from the main surfaces of the pair of plate glasses 1 1 1 2 can be suppressed, and thus the initial performance of the glass panel 10 can be exhibited for a long time. can do.
本実施の形態では、 溶解温度が 2 5 0 °C以下であるハンダ、 例えば In the present embodiment, a solder having a melting temperature of 250 ° C. or less, for example,
9 1 . 2 S n — 8 . 8 Z n (共晶点温度 : 1 9 8 V ) の組成を有する ハンダ aを用いて一対の板ガラス 1 1 , , 1 2の外周縁部を封止するが、 これに限る ものではな く 、 S n、 C uヽ I n、 B i 、 z n、 P b 、 s b、 G a、 及び A gから成る群から選択された少な く と も 1 の材料 を含む金属材料であって溶解温度が 2 5 0 °C以下となる封着材ヽ 又は 常温で固化する樹脂から成る封着材を用いて一対の板ガラス 1 1 , 19 1.2 Sn-8.8 Zn (eutectic point temperature: 198 V) The outer peripheral edges of the pair of plate glasses 11,, 12 are sealed with solder a, but not limited to these, and Sn, Cu ヽ In, Bi, zn, Pb, sb A metal material containing at least one material selected from the group consisting of, G a, and Ag and having a melting temperature of 250 ° C or less or a resin which solidifies at room temperature. A pair of glass sheets 1 1, 1
2の外周縁部を封止しても よい。 The outer peripheral edge of the second may be sealed.
また、 上記金属材料は、 T i、 A 1 、 及び C rから成る群から選択 された少な く とも 1つの材料を含んでいても よい。 これによ り ヽ 周縁 シール材 1 4 と一対の板ガラス 1 1 1 2 のガラス成分との接着性を 向上させる こ とがで  Further, the metal material may include at least one material selected from the group consisting of Ti, A 1, and Cr. As a result, it is possible to improve the adhesiveness between the peripheral sealing material 14 and the glass components of the pair of plate glasses 1 1 1 2.
また、 上記金属材料は、 実質的に I nと S nから成り 、 液相線温度 が 1 5 0 °C以下であるのが好ま しい。 これによ Dヽ 基板 1 0 と金属材 料との接着性が更に向上 し、 且つ低い温度での封止接合を実現する こ とができる。  Further, it is preferable that the above-mentioned metal material is substantially composed of In and Sn and has a liquidus temperature of 150 ° C. or lower. As a result, the adhesion between the D 基板 substrate 10 and the metal material is further improved, and it is possible to realize sealing bonding at a low temperature.
さ らに、 上記金属材料は、 実質的に I ηと S nから成り、 I n/ ( I n + S n ) が 5 0 ~ 6 5 %の範囲であ り 、 且 液相線温度が 1 2 5 °C 以下であるのがよ り好ま しい。 これによ り、 基板 1 0 と金属材料との 接着性が更に向上する と共に凝固後の組織が微細で柔軟性に富み、 機 械的特性に優れ、 且つ更に低い温度での封止接合を実現する こ とがで さ る。  Further, the metal material substantially consists of Iη and Sn, In / (In + Sn) is in the range of 50 to 65%, and the liquidus temperature is 1%. More preferably, it is below 25 ° C. As a result, the adhesiveness between the substrate 10 and the metal material is further improved, and the microstructure after solidification is fine and rich in flexibility, has excellent mechanical properties, and achieves sealing joining at a lower temperature. You can do it.
上記金属材料は、 実質的に I n、 S n 、 z n 、 τ iから成り 、 I n The metal material substantially consists of I n, S n, z n, τ i, and I n
/ ( I n + S n ) の重量配分率が 5 0〜 6 5 %の範囲であ り、 Z nが/ (I n + S n) weight distribution ratio is in the range of 50 to 65%, and Z n is
0 . 1 ~ 7 . 0 %、 T O . 0 0 0 1 〜 0 • 1 % 、 かつ液相線温度 が 1 5 0 °C以下であるのが好ま し く 、 さ らに、 Z nが 0 . 1 ~ 5 . 0 %、0.1 to 7.0%, TO.000 1 to 0 • 1%, and the liquidus temperature is preferably 150 ° C or less, and the Zn is preferably 0. 1-5.0%,
T iが 0 . 0 0 0 1 ~ 0 . 0 5 %であ り 、 かつ液相線温度が 1 2 5 °C 以下であるのがよ り好ま しい。 これによ 、 基板 1 0 と金属材料との 着性が更に向上する と共に、 T i と Z n とを共存させる こ と によMore preferably, T i is 0.001 to 0.05% and the liquidus temperature is 125 ° C. or less. As a result, the substrate 10 and the metal material Adhesion is further improved, and coexistence of Ti and Zn
T i をよ り均質に含有させる こ とができ、 も つて基板 1 0 と金属材料 との界面における耐候性を向上させるこ とができる。 T i can be contained more uniformly, and the weather resistance at the interface between the substrate 10 and the metal material can be improved.
本実施の形態では、 中空層 1 3 の気体分子を外部へ排出する真空引 さを行い、 連通管 1 7 aの外気側端部を溶解して溶解して封じ切る とによ り排気管 1 7 を形成するが、 これに限る ものではな く 、 真空引 ぎを行った後、 中空層 1 3 に所定の気体を封入し、 その後連通管 1 7 aの外気側端部を溶解して封じ切る こ とによ り排気管 1 7 を形成 して よい。  In the present embodiment, a vacuum is drawn to discharge the gas molecules in the hollow layer 13 to the outside, and the outside air side end of the communication pipe 17a is melted, melted and sealed off, so that the exhaust pipe 1 7 is formed, but the invention is not limited to this.After vacuuming, a predetermined gas is filled in the hollow layer 13, and then the outside air end of the communication pipe 17 a is melted and sealed. The exhaust pipe 17 may be formed by cutting.
本実施の形態では、 中空層 1 3 の圧力を 1 . 3 3 P a以下にまで減 圧するが、 これに限る ものではな く 、 ほぼ真空になるまで中空層 1 3 の圧力を減圧 して も よい。 これによ り、 ガラスパネル 1 0 の断熱性能 を更に高める こ とができる。  In the present embodiment, the pressure of the hollow layer 13 is reduced to 1.33 Pa or less. However, the pressure is not limited to this, and the pressure of the hollow layer 13 may be reduced to almost a vacuum. Good. Thereby, the heat insulation performance of the glass panel 10 can be further enhanced.
本実施の形態では、 一対の板ガラス 1 1 , 1 2 の主面を洗浄 し 、 収 容孔 1 8 に蒸発型ゲッ夕 7 0 を収容し、 一対の板ガラス 1 1 , 1 2 の ぺア リ ングを行い、 一対の板ガラス 1 1 , 1 2 の外周縁部を封止 しヽ 中空層 1 3 の気体分子を外部へ排出する真空引きを行い、 これらの各 行程は、 夫々、 空気の汚染状態を化学的又は物理的に制御可能な 間 内で実施されるが、 これに限る ものではな く 、 少な く とも一対の板ガ ラス 1 1 , 1 2 の主面を洗浄 してか ら 中空層 1 3 の気体分子を外部へ 排出する真空引きを行う までの各行程が、 空気の汚染状態を化学的又 は物理的に制御可能な空間内で実施されればよい。 これによ り 、 洗浄 された一対の板ガラス 1 1 , 1 2 が再汚染されるのを更に防止する こ とができる。  In the present embodiment, the main surfaces of the pair of plate glasses 11 and 12 are cleaned, the evaporating type glass 70 is accommodated in the storage hole 18, and the pair of plate glasses 11 and 12 is paired. Is performed, the outer peripheral edges of the pair of plate glasses 11 and 12 are sealed, and a vacuum is evacuated to discharge the gas molecules in the hollow layer 13 to the outside. This is performed within a period that can be controlled chemically or physically, but is not limited to this. At least the main surfaces of the pair of plate glasses 11 and 12 are cleaned before the hollow layer 1 is cleaned. Each step up to the evacuation to discharge the gas molecules to the outside in Step 3 should be performed in a space where the air pollution state can be controlled chemically or physically. This can further prevent the pair of washed plate glasses 11 and 12 from being recontaminated.
また、 ガラスパネル 1 0 は、 建築物、 自動車、 船舶等の窓ガラス、 又は冷蔵庫や保温装置等の各種.装置の扉や壁部等、 種々の用途で使用 する こ とができる。 Glass panels 10 are used for various purposes such as windows of buildings, automobiles, ships, etc., and various doors and walls of refrigerators and heat insulators. can do.
本実施の形態では、 一対の板ガラ ス 1 1 , 1 , 2 はフ 口一 ト ガラスで あるが、 これに限る ものではな く 、 上記のよ う な用途に じて、 例え ば、 型板ガラス、 表面処理によ り 光拡散機能を備えたす ガラ ス、 網 入 り ガラス、 線入板ガラス、 強化ガラス、 倍強化ガラスヽ 低反射ガラ ス、 高透過板ガラス、 セラ ミ ッ ク板ガラ ス、 熱線や紫外線吸収機能を 備えた特殊ガラス、 又は、 これらの組み合わせ等、 種々のガラ スを適 宜'選択して使用する こ とができる。  In the present embodiment, the pair of glass sheets 11, 1, 1 and 2 are flat glass. However, the present invention is not limited to this. For example, in accordance with the above-mentioned application, for example, , Glass with light diffusion function by surface treatment, netted glass, wire-coated glass, tempered glass, double-strengthened glass ヽ low reflection glass, high transmission glass, ceramic glass, heat ray Various types of glass, such as a special glass having a UV absorption function or a combination thereof, can be appropriately selected and used.
さ ら に、 一対の板ガラス 1 1 , 1 2 の組成についてもヽ ソ一ダ珪酸 ガラス、 ソーダ石灰ガラス、 ホウ珪酸ガラス、 アル ミ ノ珪酸ガラス、 各種結晶化ガラス等を使用する こ とがで きる。 また 対の板ガラス Further, the composition of the pair of plate glasses 11 and 12 may be selected from soda silicate glass, soda lime glass, borosilicate glass, aluminosilicate glass, and various types of crystallized glass. . Also twin sheet glass
1 1 , 1 2 の厚みについても適宜選択自由である。 The thicknesses of 1 1 and 1 2 are also freely selectable.
本実施の形態では、 スぺーサ 1 5 はステン レス鋼によ り形成されて いるが、 これに限る ものではな く 、 例えば、 イ ンコネルヽ 鉄、 アルミ 二ゥム、 タ ングステン、 ニッケル、 クロム、 チタ ン等の金属 、 炭素鋼、 ク ロ ム鋼、 ニッケル鋼、 ニッケルク ロム鋼、 マンガン鋼ヽ ク ロ ムマン ガン鋼、 ク ロムモ リ ブデン鋼、 珪素鋼、 真鍮、 ハンダ、 ジユラ レ ミ ン 等の合金、 又は、 セラ ミ ッ クやガラス等、 高剛性を有する もので形成 されて も よい。 また、 スぺ一サ 1 5 も、 円柱状に限らずヽ 角形状や球 状等の各種形状であっても よい。  In the present embodiment, spacer 15 is formed of stainless steel, but is not limited to this. For example, inconel iron, aluminum, tungsten, nickel, chromium , Titanium and other metals, carbon steel, chrome steel, nickel steel, nickel chrome steel, manganese steel ヽ chrome mangan steel, chrome molybdenum steel, silicon steel, brass, solder, jyuraremin, etc. It may be formed of an alloy or a material having high rigidity such as ceramic or glass. Further, the spacer 15 is not limited to a columnar shape, and may be various shapes such as a polygonal shape and a spherical shape.
本実施の形態では、 中空層 1 3 内の気体分子を吸着するベ く 蒸発型 ゲッ タ 7 0 を用いているが、 これに限る ものではな く、 加熱されて活 性化する こ とによ り気体分子を吸着して除去する非蒸発型ゲッ タ を用 いて も よ く 、 また、 非蒸発型ゲッ 夕 と蒸発型ゲッ夕 とを併用 しても よ く 、 また、 ゲッ夕 (吸着剤) 及び吸着剤収容孔は 2 ケ所以上でも よ く、 さ らには、 ゲッタ (吸着剤) を用いな く ても よい。 本実施の形態では、 周縁シール材 1 '4 は、 溶着装置 Aを用いて形成 されたが、 これに限定される ものではな く 、 摩擦接合法、 陽極接合法、 超音波接合法、 多段接合法、 及び圧着接合法のいずれか 1 つの 合方 法を用いて形成されても よい。 これによ り 、 周緣シール材 1 4 の一対 の板ガラス 1 1 , 1 2への付着性を向上させる とができる, In the present embodiment, the evaporable getter 70 for absorbing gas molecules in the hollow layer 13 is used. However, the present invention is not limited to this. A non-evaporable getter that adsorbs and removes gas molecules may be used, a non-evaporable getter and an evaporative getter may be used in combination, and a getter (adsorbent) may be used. The number of the adsorbent holes may be two or more, and the getter (adsorbent) may not be used. In the present embodiment, the peripheral sealing material 1 ′ 4 is formed by using the welding device A, but is not limited to this, and may be a friction bonding method, an anodic bonding method, an ultrasonic bonding method, a multi-step bonding. It may be formed by using any one of a bonding method and a pressure bonding method. As a result, it is possible to improve the adhesion of the circumferential sealing material 14 to the pair of plate glasses 11 and 12.
産業上の利用可能性 Industrial applicability
本発明のガラスパネルの製造方法によれば 一対の板ガラスの主面 の少な く とも一方を洗浄し、 一対の板ガラスの外周縁部において溶解 度が 2 5 0 °C以下である封着材を用いて一対の板ガラスを封止する ので、 一対の板ガラスの主面からの気体分子の発生を抑制する とが でき、 また、 一対の板ガラス全体を加熱装置等によって加熱する必要 がないこ とによって一対の板ガラスが変形するのを抑制する とがで ぎ 、 も ってガラスパネルの製造コス ト を低減する こ とができる と共に ガラスパネルの品質を向上させるこ とができる。  According to the method for manufacturing a glass panel of the present invention, at least one of the main surfaces of the pair of plate glasses is washed, and a sealing material having a solubility of 250 ° C. or less at the outer peripheral edges of the pair of plate glasses is used. Since the pair of glass sheets is sealed by the heat treatment, generation of gas molecules from the main surfaces of the pair of glass sheets can be suppressed, and the entire pair of glass sheets does not need to be heated by a heating device or the like. By suppressing the deformation of the glass sheet, the cost of manufacturing the glass panel can be reduced, and the quality of the glass panel can be improved.
本発明のガラスパネ ルの製造方法によれば 液体洗浄法 、 超 波洗 浄法、 U V洗浄法、 オゾン洗浄法、 及びブラズマ洗浄法から成る群か ら選択された少な く と も 1 つの方法を用いて一対の板ガラスを洗浄す るので、 一対の板ガラスの主面から分解又は飛散し得る気体分子の発 生を更に抑制する こ とができ、 もってガラスノ ネ ルの初期性能を長時 間に亘つて発揮する こ とができる。  According to the method for manufacturing a glass panel of the present invention, at least one method selected from the group consisting of a liquid cleaning method, an ultrasonic cleaning method, a UV cleaning method, an ozone cleaning method, and a plasma cleaning method is used. Since the pair of glass sheets is cleaned, generation of gas molecules that can be decomposed or scattered from the main surfaces of the pair of glass sheets can be further suppressed, and thus the initial performance of the glass glass can be exhibited for a long time. can do.
本発明のガラスパネルの製造方法によれば 液体洗浄法で用い られ る洗浄液は、 アル力 リ洗剤又はォゾン水を含有するので、 ガラスノ1?ネ ルの初期性能を更に長時間に直って発揮する こ とができる。 Glass panel cleaning liquid that is used in the liquid cleaning method according to the manufacturing method of the present invention, because it contains Al force re detergent or Ozon water is exerted healed more prolonged the initial performance of Garasuno 1?, Channel be able to.
本発明のガラスパネルの製造方法によれば、 洗浄液は研磨材を含有 するので、 一対の板ガラスの主面を物理研磨する こ とができ、 も って ガラスパネルの初期性能を更に長時間に亘つて発揮するこ とができる。 本発明のガラスパネルの製造方法によれば 研磨材は酸化セ リ ゥム を主成分とする微粒子である ので、 一対の板ガラスの主面を化学研磨 且つ物理研磨する こ とができ、 も ってガラス ネルの初期性能を更に 長時間に亘つて発揮する こ とができる。 According to the method for manufacturing a glass panel of the present invention, the cleaning liquid contains the abrasive, so that the main surfaces of the pair of plate glasses can be physically polished. The initial performance of the glass panel can be exhibited for a longer time. According to the method for manufacturing a glass panel of the present invention, since the abrasive is fine particles mainly composed of ceramic oxide, the main surfaces of the pair of plate glasses can be chemically and physically polished. The initial performance of the glass tunnel can be exhibited for a longer time.
本発明のガラスパネルの製造方法によれば 封止ステ ッ プの前に、 中 層の気体分子を吸着する吸着材を収容する吸着材収容孔を穿設 し 吸着材を吸着材収容孔に収容するので、 中空層に飛散した気体分子を 吸着するこ とがで き、 中空層の減圧度を長時間に亘つて維持する こ と がでぎる  According to the method for manufacturing a glass panel of the present invention, before the sealing step, an adsorbent accommodation hole for accommodating an adsorbent for adsorbing gas molecules in the middle layer is formed, and the adsorbent is accommodated in the adsorbent accommodation hole. Gas molecules scattered in the hollow layer can be adsorbed, and the degree of decompression of the hollow layer can be maintained for a long time.
本発明のガラスパネルの製造方法によれば 封止ステッ プの後に中 空層の圧力を減圧する減圧ステ ッ プを更に備え 、 洗浄ステ ッ プ、 封止 ステ ヅ プ、 及び減圧ステ ップは、 各々、 空気の汚染状態を化学的又は 物理的に制御可能な空間内で実施されるので 洗浄された一対の板ガ ラスが再汚染されるのを防止する こ とができ もってガラスノ ネルの 命を延ばすこ とができる。  According to the method of manufacturing a glass panel of the present invention, the method further includes a decompression step for reducing the pressure of the interlayer after the sealing step, wherein the cleaning step, the sealing step, and the decompression step Each of them is performed in a space where the state of air pollution can be controlled chemically or physically, so that a pair of washed glass sheets can be prevented from being re-contaminated, so that the life of the glass panel can be reduced. Can be extended.

Claims

請 求 の 範 囲 The scope of the claims
1 . 外周縁部を有する、 互いに対向する一対の板ガラス と 、 該板 ガラスの間に 、 中空層を形成する よう に介在された少な < と も 1 つの スぺ一サとを備え、 前記外周縁部が封止される と共に、 刖'記中空層が 減圧されたガラスパネルの製造方法であって、 1. A pair of sheet glass facing each other having an outer peripheral edge, and at least one spacer interposed between the sheet glass to form a hollow layer, A method for manufacturing a glass panel in which a hollow portion is sealed and the pressure of the hollow layer is reduced.
前記一対の板ガラスの主面の少な く と も一方を洗浄する洗浄ステ ツ プと、  A cleaning step of cleaning at least one of the main surfaces of the pair of plate glasses;
lu記一対の板ガラスの外周縁部において溶解 度が 2 5 0 °C以下で ある封着材を用いて前記一対の板ガラス を封止する封止ステ ヅ プとを 有する こ とを特徴とするガラスパネルの製造方法。  lu A sealing step for sealing the pair of plate glasses using a sealing material having a solubility of 250 ° C. or less at the outer periphery of the pair of plate glasses. Panel manufacturing method.
2 . 前記洗浄ステ ップは、 液体洗浄法、 超音波洗浄法、 U V洗浄 、 オゾン洗浄法、 及びプラズマ洗浄法から成る群から選択された少 く と も 1 つの方法を用いて前記一対の板ガラスを洗浄する こ とを特 とする請求の範囲第 1項記載のガラスパネルの製造方法。  2. The cleaning step is performed using at least one method selected from the group consisting of a liquid cleaning method, an ultrasonic cleaning method, a UV cleaning method, an ozone cleaning method, and a plasma cleaning method. 2. The method for producing a glass panel according to claim 1, wherein the glass panel is washed.
3 . 前記液体洗浄法で用い られる洗浄液は、 アルカ リ洗剤又はォ ン氷を含有する こ とを特徴とする請求の範囲第 2 項記載のガラスパ ルの製造^法。  3. The method according to claim 2, wherein the cleaning liquid used in the liquid cleaning method contains an alkaline detergent or on ice.
4 . 前記洗浄液は研磨材を含有する こ とを特徴とする請求の範囲 3項記載のガラスパネルの製造方法。  4. The method for manufacturing a glass panel according to claim 3, wherein the cleaning liquid contains an abrasive.
5 . 前記研磨材は、 酸化セ リ ウムを主成分とする微粒子である こ を特徴とする請求の範囲第 4項記載のガラスパネルの製造方法。  5. The method for manufacturing a glass panel according to claim 4, wherein the abrasive is fine particles containing cerium oxide as a main component.
6 . 前記封着材はハンダから成る こ とを特徴とする請求の範囲第 項記載のガラスパネルの製造方法。 6. The method for manufacturing a glass panel according to claim 1, wherein the sealing material is made of solder.
7 . 前記封着材は樹脂から成る こ とを特徴とする請求の範囲第 1 記載のガラスパネルの製造方法。 8 • 刖記封止ステ ップの に 刖記中空層内の気体分子を吸着す る吸着材を収容する吸着材収容孔を穿設する穿設ステ ッ プと、 目 IJ記吸 着材を刖記吸着材収容孔に収容する収容ステッ プとを更に備える こ と を特徴とする 求の範囲第 1 項記載のガラスパネルの製造方法。 7. The method for manufacturing a glass panel according to claim 1, wherein the sealing material is made of a resin. 8 • At the end of the sealing step, a perforation step for perforating an adsorbent containing hole for accommodating an adsorbent for adsorbing gas molecules in the hollow layer and an adsorbent for IJ 4. The method for producing a glass panel according to claim 1, further comprising: a housing step for housing in the adsorbent housing hole.
9 • 刖記封止ステップの後に目 iJ BO中空層の圧力を減圧する減压ス テヅプを更に備え  9 • After the sealing step, a reduction step is also provided to reduce the pressure in the iJBO hollow layer.
記洗浄ステ ヅ プ、 HU S3封止ステ ヅ プ、 及び前記減圧ステツ プは 各々 空 Ιιの汚染状態を化学的又は物理的に制御可能な空間内で実施 される とを特徴とする請求の範囲第 1 項記載のガラスノ ネルの製造 方法  The cleaning step, the HUS3 sealing step, and the decompression step are each performed in a space where the contamination state of the air can be controlled chemically or physically. Method for producing glass nonel described in paragraph 1
1 0 m求の範囲第 1 項記載のガラスパネルの製造方法によ 製 造されるこ とを特徴とするガラスパネル。  A glass panel manufactured by the method for manufacturing a glass panel according to claim 1, wherein the glass panel has a range of 10 m.
PCT/JP2005/002517 2004-02-18 2005-02-10 Method for manufacturing glass panel, and glass panel manufactured by the method WO2005077855A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004-41811 2004-02-18
JP2004041811A JP2005231930A (en) 2004-02-18 2004-02-18 Method of producing glass panel and glass panel produced by the same

Publications (1)

Publication Number Publication Date
WO2005077855A1 true WO2005077855A1 (en) 2005-08-25

Family

ID=34857948

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2005/002517 WO2005077855A1 (en) 2004-02-18 2005-02-10 Method for manufacturing glass panel, and glass panel manufactured by the method

Country Status (2)

Country Link
JP (1) JP2005231930A (en)
WO (1) WO2005077855A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104411909A (en) * 2012-05-03 2015-03-11 葛迪恩实业公司 Method and apparatus for making vacuum insulated glass (vig) window unit including cleaning cavity thereof
CN104961359A (en) * 2015-06-12 2015-10-07 洛阳兰迪玻璃机器股份有限公司 Method and device for removing gas in vacuum glass
CN105439476A (en) * 2015-12-28 2016-03-30 太仓耀华玻璃有限公司 Device and method for efficiently degassing for vacuum glass
EP3521255A4 (en) * 2016-09-30 2019-09-25 Panasonic Intellectual Property Management Co., Ltd. Method for producing glass panel unit, and method for producing glass window
EP3647291A4 (en) * 2017-06-30 2020-07-01 Panasonic Intellectual Property Management Co., Ltd. Production method for glass panel unit

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5714892B2 (en) * 2010-12-28 2015-05-07 Hoya株式会社 Manufacturing method of glass substrate
US9290984B2 (en) * 2012-07-31 2016-03-22 Guardian Industries Corp. Method of making vacuum insulated glass (VIG) window unit including activating getter
KR101402552B1 (en) 2012-09-18 2014-06-02 주식회사 에피온 Vacuum glass panel and method for manufacturing the same
KR101425308B1 (en) * 2013-01-24 2014-08-01 주식회사 야스 Vacuum encapsulation method of vacuum glasses or semiconductor devices therein
CN105008302A (en) * 2013-03-04 2015-10-28 松下知识产权经营株式会社 Multiple pane glass and method for producing multiple pane glass
WO2016195316A1 (en) * 2015-06-02 2016-12-08 주식회사 에피온 Vacuum glass panel and method for manufacturing same
CN107337358B (en) * 2017-01-26 2018-12-14 连玉琦 A kind of vacuum glass and preparation method thereof
WO2018221213A1 (en) 2017-05-31 2018-12-06 パナソニックIpマネジメント株式会社 Pillar mounting method, method for manufacturing glass panel unit, and pillar mounting device
JP6827222B2 (en) * 2017-05-31 2021-02-10 パナソニックIpマネジメント株式会社 Manufacturing method of glass panel unit and manufacturing method of glass window
JP6902724B2 (en) 2017-05-31 2021-07-14 パナソニックIpマネジメント株式会社 Pillar mounting method and pillar mounting device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000233950A (en) * 1999-02-16 2000-08-29 Nippon Sheet Glass Co Ltd Method for arranging space of glass panel and apparatus for producing glass panel
WO2001028952A1 (en) * 1999-10-22 2001-04-26 Nippon Sheet Glass Co., Ltd. Glass panel and production method therefor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000233950A (en) * 1999-02-16 2000-08-29 Nippon Sheet Glass Co Ltd Method for arranging space of glass panel and apparatus for producing glass panel
WO2001028952A1 (en) * 1999-10-22 2001-04-26 Nippon Sheet Glass Co., Ltd. Glass panel and production method therefor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104411909A (en) * 2012-05-03 2015-03-11 葛迪恩实业公司 Method and apparatus for making vacuum insulated glass (vig) window unit including cleaning cavity thereof
CN104961359A (en) * 2015-06-12 2015-10-07 洛阳兰迪玻璃机器股份有限公司 Method and device for removing gas in vacuum glass
CN104961359B (en) * 2015-06-12 2017-11-21 洛阳兰迪玻璃机器股份有限公司 The degasification method and device of a kind of vacuum glass
CN105439476A (en) * 2015-12-28 2016-03-30 太仓耀华玻璃有限公司 Device and method for efficiently degassing for vacuum glass
EP3521255A4 (en) * 2016-09-30 2019-09-25 Panasonic Intellectual Property Management Co., Ltd. Method for producing glass panel unit, and method for producing glass window
US11299422B2 (en) 2016-09-30 2022-04-12 Panasonic Intellectual Property Management Co., Ltd. Method for producing insulating glass unit and method for producing glass window
EP3647291A4 (en) * 2017-06-30 2020-07-01 Panasonic Intellectual Property Management Co., Ltd. Production method for glass panel unit

Also Published As

Publication number Publication date
JP2005231930A (en) 2005-09-02

Similar Documents

Publication Publication Date Title
WO2005077855A1 (en) Method for manufacturing glass panel, and glass panel manufactured by the method
WO2019093322A1 (en) Glass panel and glass window
JP2003137612A (en) Glass panel and method of manufacturing the same
US10458176B2 (en) Vacuum insulated glass (VIG) window unit with getter structure and method of making same
JP4049607B2 (en) Glass panel manufacturing method and glass panel manufactured by the method
CN1649803A (en) Light-transmitting glass panel
JP2003192400A (en) Glass panel
CN112282593A (en) Multiple glazing unit and method for producing multiple glazing unit
JP2005320229A (en) Pressure reduced glass lined panel and method of manufacturing the same
JPWO2019093321A1 (en) Glass panel
JP2005139055A (en) Method of manufacturing glass panel and glass panel manufactured by the manufacturing method
CN100387538C (en) Glass panel
JP4439907B2 (en) Manufacturing method of glass panel
WO2004039742A1 (en) Glass panel manufacturing method and glass panel manufactured by the method
JP7041163B2 (en) Glass panel
JP2002255591A (en) Method for manufacturing glass panel
JP2000044291A (en) Low pressure double glazing and its production
WO2004016564A1 (en) Method of producing glass panels

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
NENP Non-entry into the national phase

Ref country code: DE

WWW Wipo information: withdrawn in national office

Country of ref document: DE

122 Ep: pct application non-entry in european phase