WO2005069702A2 - Electrode pour la generation de plasma de decharge a barriere dielectrique - Google Patents
Electrode pour la generation de plasma de decharge a barriere dielectrique Download PDFInfo
- Publication number
- WO2005069702A2 WO2005069702A2 PCT/FR2004/003341 FR2004003341W WO2005069702A2 WO 2005069702 A2 WO2005069702 A2 WO 2005069702A2 FR 2004003341 W FR2004003341 W FR 2004003341W WO 2005069702 A2 WO2005069702 A2 WO 2005069702A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- conductive wire
- support
- electrode
- opening
- sheathed
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
Definitions
- the present invention relates to an electrode for the generation of dielectric barrier discharge plasma. It also relates to a dielectric barrier discharge plasma generator using the electrodes according to the invention, as well as a device for treating a gas flow using such a plasma generator.
- the present invention relates to the treatment of a gas flow by means of a dielectric barrier discharge plasma (DBD or Dielectric Barrier Discharge).
- DBD dielectric Barrier Discharge
- the electrodes are generally produced by metal plates arranged in parallel and between which a dielectric barrier discharge plasma is generated.
- a non-conductive material is interposed between the electrodes to form the dielectric barrier.
- the electrodes are then arranged transversely to the gas flow.
- Perforated plates forming electrodes are thus known, arranged facing one another so that the plasma is generated between these electrodes and that the gas flow can pass through these same electrodes thanks to the perforations.
- a perforated dielectric material is also added transversely to the gas flow to allow the production of the dielectric barrier discharge plasma.
- the present invention aims to solve the aforementioned drawbacks and to propose a new type of electrode allowing complete isolation of the electrode and thus eliminating any risk of generation of electric arcs.
- the present invention relates according to a first aspect to an electrode for the generation of a dielectric barrier discharge plasma comprising a portion of electrically conductive wire coated with a sheath of dielectric material.
- the electrode is entirely coated with a dielectric material. No preferential path can thus exist between the electrodes whatever the geometry used.
- the electrode comprises a support and a portion of electrically conductive wire coated with a sheath of dielectric material fixed to the support.
- Electrodes that are easily manipulated and that can be fixed in a plasma generation device are thus available, the electrode supports being arranged opposite one another in order to form plasma generation zones between them.
- the support comprises an opening, the portion of sheathed conductive wire extending through the opening. Thanks to its opening, such an electrode can be traversed by a gas flow to be treated with plasma, the portion of sheathed conductive wire extending through the opening making it possible to generate a plasma zone in line with this opening.
- the electrode comprises a support extending substantially in a plane, this support comprising an opening and the portion of sheathed conductive wire extending in the plane of the support through the opening . This type of embodiment is particularly simple to implement.
- the electrode is thus in the form of a substantially planar part.
- the portion of sheathed conductive wire forms several segments of sheathed conductive wire extending through the opening.
- the homogeneity of the plasma is also ensured when the sheathed conductive wire segments passing through the opening are regularly spaced from one another. So that the spacing remains constant, the electrode preferably comprises tensioning means adapted to exert a tensile force at two ends of the portion of sheathed conductive wire.
- a dielectric barrier discharge plasma generator comprising at least two electrodes according to the invention, arranged opposite one another.
- a dielectric barrier discharge plasma generator is thus obtained in which the electrode is entirely coated with a dielectric material, thus avoiding any risk of electric arc formation from one electrode to another.
- these electrodes respectively have openings arranged opposite one another.
- a dielectric barrier discharge plasma generator is thus obtained in which a gas flow to be treated by the plasma can pass through the electrodes.
- the present invention also relates to a device for treating a gas flow comprising a dielectric barrier discharge plasma generator according to the invention, a catalytic support. comprising means for passing a gas flow being disposed between said electrodes.
- FIG. 1A illustrates a top view of an electrode according to a first embodiment of the invention
- - Figure 1 B is a cross-sectional view of a sheathed conductive wire
- - Figure 2 illustrates a top view of an electrode according to a second embodiment of the invention
- - Figure 3 illustrates in perspective a dielectric barrier discharge plasma generator according to an embodiment of the invention
- - Figure 4 illustrates in cutaway perspective a gas treatment device according to an embodiment of the invention.
- this electrode comprises a portion 10 of electrically conductive wire coated with a sheath of dielectric material.
- a sheathed conductive wire comprises a core constituting an electrical conductive wire 11 surrounded by a sheath 12 made of dielectric material.
- the electric conducting wire 11 is a solid strand.
- the sheath of dielectric material 12 can be made of any type of dielectric material suitable for being brought into contact with the elements present in the plasma generated.
- the constituent elements of this plasma are ultraviolet and ozone.
- Dielectric materials suitable for this type of plasma can be fluorocarbon coatings such as polytetrafluoroethylene (PTFE) sold under the brand Teflon or else silicone, or possibly a Teflon coating itself covered with a layer of silicone.
- PTFE polytetrafluoroethylene
- the electrode comprises a support 13, the portion 10 of sheathed conductive wire being fixed on this support.
- This support 13 can be made of glass-filled resin to ensure its mechanical rigidity.
- the support 13 has an opening 14 and the portion 10 of sheathed conductive wire extends through this opening 14.
- the support has a substantially square shape and has a circular opening 14 of diameter slightly smaller than the dimensions of the square support.
- the portion 10 of sheathed conductive wire thus extends in the plane of the support, through the opening 14.
- the sheathed conductive wire travels on the support by repeatedly crossing the opening 14 in order to crisscross as much as possible the surface, in the form of a disc here, of this opening 14.
- this portion 10 of sheathed conductive wire forms several segments of sheathed conductive wire which extend through opening 14.
- the sheathed conductive wire winds along a reciprocating path between an edge 13a and an opposite edge 13b of the support 13.
- the segments of sheathed conductive wire extending through the opening 14 are thus parallel, regularly spaced from each other.
- the portion 10 of sheathed conductive wire has its two ends 10a, 10b fixed to the support 13 in a substantially adjacent manner.
- the portion 10 of sheathed conductive wire travels in duplicate on the support 13.
- the support 13 has grooves 15 for the path sheathed wire. These routing grooves 15 are formed on the surface of the solid part of the support 13. These routing grooves 15 thus open out opposite one another in the opening 14 so that the portion
- these routing grooves 15 may include lugs 16 of various shapes intended in particular to hold the wire in the curved portions of the routing grooves 15.
- these wires In order to obtain a homogeneous plasma between the wires of two electrodes placed opposite, these wires must be correctly tensioned so that the spacing between these wires remains constant. It is therefore advantageous to provide a tension system 17 as illustrated in FIG. 3 which is adapted to exert a tensile force at the two ends 10a, 10b of the portion 10 of sheathed conductive wire.
- This tensioning system 17 can be produced from jaws whose adjustment of the tensile force exerted on the wire can for example be carried out by means of a screw. It may also include a compensation system, such as a spring, ensuring a sufficient tensile force even in the event of a possible elongation of the wire. If this tensioning system 17 comprises metal parts, the latter will preferably be connected to the core of the electric conducting wire 11 which they maintain in tension. Thus, one of the jaws of the tension system 17 punctures the sheath 12 to bring the metallic assembly of the tension system 17 to the potential of the electric conductive wire 11.
- FIG. 2 illustrates another embodiment of an electrode according to the invention.
- the support 13 comprises two opening portions 14a, 14b separated by a crosspiece 18 on which segments of sheathed conductive wire can be fixed.
- the sheathed conductive wire is in this example fixed by forming two sinusoidal curves on either side of the crosspiece 18, joined on the side of an edge 13c of the support 13, opposite the edge 13d carrying the two ends 10a, 10b of the sheathed conductive wire.
- routing grooves can be made in the solid portions of the support 13 and a tension system can be fixed at the ends 10a, 10b of the sheathed conductive wire in order to exert traction and to keep this sheathed conductive wire taut. .
- FIG. 3 an example of a generator of a dielectric barrier discharge plasma according to an embodiment of the invention.
- the generator of a dielectric barrier discharge plasma uses two electrodes as described above with reference to FIGS. 1A and 1B. These electrodes 1, l 'are fixed one against the other so that the faces of each support 13, 13', opposite the faces carrying the portion 10 of sheathed conductive wire, are in contact with one another. other. A plasma zone can thus be generated at the openings 14 placed opposite, between the portions 10, 10 ′ of sheathed conductive wire mounted opposite each other.
- each electrode 1, l' the ends 10a, 10b and 10'a, 10'b of the portions 10, 10 'of sheathed conductive wire of each electrode 1, l' are arranged at the opposite one another in the generator assembly.
- These electrodes 1, l ′ are identical and fit one against the other, the supports 13, 13 ′ being arranged at 180 ° relative to each other.
- This type of generator is particularly well suited to the treatment of a gas flow passing through a plasma generated by the electrodes placed transversely to this flow.
- the use of a sheathed conductive wire has the advantage of limiting the pressure drops during the transfer of the gas flow through these electrodes.
- a catalytic support 20 comprising means for passing a gas flow is disposed between two electrodes 1, l 'according to the invention.
- the catalytic support 20 may comprise channels (not shown) extending in the direction F of circulation of the gas flow.
- this device for treating a gas flow can be adapted to equip a pipe 21 for circulating gases of traditionally cylindrical shape.
- the opening 14, 14 ′ of each electrode 1, l ′ has a passage surface corresponding to the transverse surface of the pipe 21.
- each opening 14, 14 ′ is traversed by a network of sheathed conductive wire segments extending regularly in the plane of each electrode and also disposed at regular distance from one electrode 1 to the other electrode 1 ′.
- the plasma is generated between the electrodes 1, l '; directly in the catalytic support 20.
- several devices for treating a gas flow as illustrated in FIG. 4 can be successively mounted one behind the other in a cylindrical pipe for treating a gas flow.
- an electrode produced from a portion 10 of sheathed conductive wire could also be used on a solid support, having no opening for the passage of gas.
- electrodes can be produced with a sheathed conducting wire snaking on two opposite walls of a ceramic tube through which the plasma will be generated, the gases to be treated circulating inside the tube. In this case, the electrodes are arranged in planes not transverse to the gas flow but on the contrary parallel to this flow.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Treatment Of Fiber Materials (AREA)
- Glass Compositions (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE602004011830T DE602004011830T2 (de) | 2003-12-29 | 2004-12-22 | Elektrode zum erzeugen eines dielektrische-barriere-entladungsplasmas |
EP04816469A EP1700515B1 (fr) | 2003-12-29 | 2004-12-22 | Electrode pour la generation de plasma de decharge a barriere dielectrique |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0315525A FR2864746B1 (fr) | 2003-12-29 | 2003-12-29 | Electrode pour la generation de plasma de decharge a barriere dielectrique |
FR0315525 | 2003-12-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005069702A2 true WO2005069702A2 (fr) | 2005-07-28 |
WO2005069702A3 WO2005069702A3 (fr) | 2006-02-02 |
Family
ID=34639675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2004/003341 WO2005069702A2 (fr) | 2003-12-29 | 2004-12-22 | Electrode pour la generation de plasma de decharge a barriere dielectrique |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1700515B1 (fr) |
AT (1) | ATE386417T1 (fr) |
DE (1) | DE602004011830T2 (fr) |
ES (1) | ES2302073T3 (fr) |
FR (1) | FR2864746B1 (fr) |
WO (1) | WO2005069702A2 (fr) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4057723A (en) * | 1976-01-23 | 1977-11-08 | Xerox Corporation | Compact corona charging device |
US6049086A (en) * | 1998-02-12 | 2000-04-11 | Quester Technology, Inc. | Large area silent discharge excitation radiator |
US6455014B1 (en) * | 1999-05-14 | 2002-09-24 | Mesosystems Technology, Inc. | Decontamination of fluids or objects contaminated with chemical or biological agents using a distributed plasma reactor |
US20020153241A1 (en) * | 2001-04-04 | 2002-10-24 | Dror Niv | Dielectric barrier discharge fluid purification system |
-
2003
- 2003-12-29 FR FR0315525A patent/FR2864746B1/fr not_active Expired - Fee Related
-
2004
- 2004-12-22 AT AT04816469T patent/ATE386417T1/de not_active IP Right Cessation
- 2004-12-22 EP EP04816469A patent/EP1700515B1/fr not_active Not-in-force
- 2004-12-22 ES ES04816469T patent/ES2302073T3/es active Active
- 2004-12-22 DE DE602004011830T patent/DE602004011830T2/de active Active
- 2004-12-22 WO PCT/FR2004/003341 patent/WO2005069702A2/fr active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4057723A (en) * | 1976-01-23 | 1977-11-08 | Xerox Corporation | Compact corona charging device |
US6049086A (en) * | 1998-02-12 | 2000-04-11 | Quester Technology, Inc. | Large area silent discharge excitation radiator |
US6455014B1 (en) * | 1999-05-14 | 2002-09-24 | Mesosystems Technology, Inc. | Decontamination of fluids or objects contaminated with chemical or biological agents using a distributed plasma reactor |
US20020153241A1 (en) * | 2001-04-04 | 2002-10-24 | Dror Niv | Dielectric barrier discharge fluid purification system |
Also Published As
Publication number | Publication date |
---|---|
DE602004011830T2 (de) | 2009-02-12 |
FR2864746B1 (fr) | 2006-05-19 |
ES2302073T3 (es) | 2008-07-01 |
ATE386417T1 (de) | 2008-03-15 |
EP1700515A2 (fr) | 2006-09-13 |
WO2005069702A3 (fr) | 2006-02-02 |
FR2864746A1 (fr) | 2005-07-01 |
DE602004011830D1 (de) | 2008-03-27 |
EP1700515B1 (fr) | 2008-02-13 |
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