WO2005063444A1 - Geinder - Google Patents

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Publication number
WO2005063444A1
WO2005063444A1 PCT/JP2003/016719 JP0316719W WO2005063444A1 WO 2005063444 A1 WO2005063444 A1 WO 2005063444A1 JP 0316719 W JP0316719 W JP 0316719W WO 2005063444 A1 WO2005063444 A1 WO 2005063444A1
Authority
WO
WIPO (PCT)
Prior art keywords
polishing
polishing machine
cloth
polished
grooves
Prior art date
Application number
PCT/JP2003/016719
Other languages
French (fr)
Japanese (ja)
Inventor
Jun Ujike
Original Assignee
Ujike Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ujike Co., Ltd. filed Critical Ujike Co., Ltd.
Priority to PCT/JP2003/016719 priority Critical patent/WO2005063444A1/en
Priority to EP03782894A priority patent/EP1698434A4/en
Priority to CNA2003801109088A priority patent/CN1886233A/en
Priority to AU2003292618A priority patent/AU2003292618A1/en
Publication of WO2005063444A1 publication Critical patent/WO2005063444A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/26Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D9/00Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
    • B24D9/08Circular back-plates for carrying flexible material

Definitions

  • the present invention relates to a polishing machine which is used by being attached to a rotating shaft of a rotary polishing machine when polishing or polishing a metal or other processed surface or painted surface.
  • a polishing machine used by being attached to a rotating shaft of a rotary polishing device conventionally, a back surface of a polishing cloth is fixed to one surface of an elastic plate, and a rotating shaft of the rotary polishing device is fixed to the other surface of the elastic plate.
  • a polishing machine which is provided with a fixing means, and which makes the surface of the polishing cloth abut against an object to be polished for polishing.
  • the outer peripheral portion can be brought into contact with the surface of the polished material, the outer peripheral portion having the highest linear velocity can be effectively used for polishing, and replacement can be easily performed when it becomes dirty.
  • paper polishing is performed using a suitable compound, liquid agent and paper such as water-resistant paper, and then cloth polishing is performed using a fiber such as wool buff, and then using a sponge buff.
  • final polishing may be performed by sponge polishing.
  • the sponge polishing performed using a sponge buff is a finish polishing that erases the left-hand edge of the cloth when polishing the cloth.
  • the polishing plate having a configuration in which the back surface of the polishing cloth is fixed to one surface side of the elastic plate and the surface of the polishing cloth is brought into contact with the surface of the object to be polished may be used for the above-described cloth polishing. After this cloth polishing, the puff left on the surface (polishing surface) of the object to be polished is finally finished by sponge polishing.
  • the present invention overcomes the above-mentioned problems that existed in a conventional polishing machine, fixes the back surface of a polishing cloth to one surface of an elastic plate, and connects a rotating shaft of a rotary polishing device to the other surface of the elastic plate.
  • a polishing means for polishing the polishing cloth by bringing the surface of the polishing cloth into contact with the polishing surface of the object to be polished.
  • the polishing disk is used for polishing a cloth, the polishing surface is hardly buffed.
  • the purpose is to provide a polishing board.
  • a plurality of rows of grooves extending in a predetermined direction for example, a longitudinal direction at predetermined intervals, are provided on the surface of the polishing machine in contact with an object to be polished.
  • a predetermined direction for example, a longitudinal direction at predetermined intervals.
  • the inventor of the present application proposed that the vertical grooves and the horizontal grooves intersect in a grid pattern so that the “escape” of the liquid agent / compound is always formed in four directions during rotation of the polishing machine. did .
  • the liquid agent compound to escape in both the vertical and horizontal grooves during rotation of the polishing machine, puffs generated when the polishing machine of the above-described embodiment is used for cloth polishing are reduced.
  • the time required for subsequent polishing, such as sponge polishing has been reduced.
  • the polishing machine of the present invention is a polishing machine comprising: a back surface of a polishing cloth fixed to one surface of an elastic plate; and a fixing means to a rotating shaft of a rotary polishing device provided on the other surface of the elastic plate. Further, vertical grooves and horizontal grooves are provided in a grid pattern on the surface of the polishing cloth which is in contact with the object to be polished.
  • the elastic plate that constitutes the polishing board of the present invention reduces the influence of irregularities on the surface of the polishing object by reducing the force of the polishing operator, operating the polishing device (rotary polishing machine), and reducing the surface of the polishing cloth. It is desirable that the material be brought into contact with the polishing surface with a uniform pressure. Therefore, is the elastic plate made of a conventionally known elastic material such as sponge or rubber material? )be able to. The thickness and shape can also be determined as appropriate. However, since the surface (polished surface) of the object to be polished is polished by rotating motion, a disk shape is generally used.
  • a cloth material suitable for polishing can be appropriately selected according to the purpose of polishing and the purpose of use, such as the degree of finishing.
  • a brushed material or the like is adopted, and vertical grooves and horizontal grooves are formed on the surface of the cloth. It can be provided in a shape.
  • fibers can be implanted in a portion of the surface of the polishing cloth surrounded by the vertical grooves and the horizontal grooves.
  • the material of the fiber for example, fiber such as wool
  • the length of the fiber can be selected according to the purpose and application of polishing.
  • the planting density and the widths of the vertical grooves and the horizontal grooves can be appropriately changed.
  • the provision of vertical and horizontal grooves in a lattice pattern on the surface of the polishing cloth that is in contact with the object to be polished is because grooves in a direction substantially coincident with the rotational direction (tangential direction) in each part of the polishing machine that rotates during polishing.
  • the purpose is to provide. If grooves are formed in the direction of rotation (tangential direction) on the surface of the polishing cloth of the polishing machine in this way, the liquid agent accumulated in the grooves will flow properly along the grooves, and the pressure applied at the grooves will be reduced. It is moderately relaxed and can be polished without making puffs on the surface (polished surface) of the object to be polished.
  • the polishing machine of the present invention is mounted on the tip of the rotating shaft of a rotary polishing machine.
  • the polishing work is performed by rotating the polishing machine while the surface side of the polishing machine (the surface side of the polishing cloth) is in contact with the object to be polished. It is necessary that it does not easily come off the tip of the rotating shaft of the motor. Also, it is convenient if the polishing machine can be easily attached to and detached from the tip of the rotating shaft of the rotary polishing machine so that it can be replaced according to the purpose and application of polishing. From such a viewpoint, a velvet fastener material can be used as a means for fixing to the rotating shaft of the rotary polishing device provided on the other surface side of the elastic plate.
  • the velvet fastener material is a pair of male and female fitting with each other, one of the velvet fastener materials is attached to the other surface of the elastic plate, and the other is attached to the tip of the rotating shaft of the rotary polishing device.
  • the polishing machine of the present invention may be provided with a concave portion at the center thereof, which is depressed from the surface contacting the object to be polished toward the side attached to the tip of the rotating shaft of the rotary polishing machine.
  • the concave portion escapes so that the liquid material and the compound gathered near the center do not become thick. It is stored near the center.
  • the distribution of these compounds becomes uneven, and the degree of polishing differs between the center and the outer periphery of the polishing machine, resulting in uneven polishing.
  • a recess is provided in the vicinity of the center of the polishing machine for storing the liquid agent and the compound gathered.
  • a vertical groove and a horizontal groove are formed on the surface of the polishing cloth provided on the polishing object surface side of the polishing board, which is in contact with the polishing object surface (polishing surface), that is, on the polishing cloth surface. Since the polishing liquid is used, there is an effect that the polishing liquid / compound goes around the vertical groove or the horizontal groove and escapes when the polishing disk is rotated. Thereby, there is an effect that a puff is hardly formed in a cloth polishing process performed using the polishing machine of the present invention.
  • the fixing means to the polishing apparatus is made of a velvet fastener material, the polishing machines for coarse and fine can be easily replaced according to the application.
  • FIG. 1 is a plan view of a surface of a polishing machine according to the present invention, which is in contact with an object to be polished.
  • FIG. 2 is a front cross-sectional view showing a surface of the polishing machine shown in FIG.
  • FIG. 3 is a plan view of a surface of the polishing machine shown in FIG. 1 which is fixed to a rotary polishing apparatus.
  • FIG. 4 is an explanatory view for explaining the relationship between the grooves provided in the polishing cloth and the rotating direction of the polishing board.
  • FIG. 4 (a) is an explanatory view of a conventional polishing board having only vertical grooves
  • FIG. 4 (b) is an explanatory view of the embodiment shown in FIG. 1 having a vertical groove and a horizontal groove.
  • FIG. 2 is a front cross-sectional view of the polishing machine of the present invention in a state in which a polishing cloth 3 for polishing in contact with the polishing surface (that is, the surface of the object to be polished) is arranged on the upper side
  • FIG. FIG. 2 is a plan view of the polishing board of the present invention in a state where a polishing pad 3 that performs polishing while being in contact with a polishing surface (that is, the surface of an object to be polished) is arranged on the upper side.
  • the polishing disc 1 of the present invention is configured such that a polishing cloth 3 is fixed on one side (an upper side in FIG. 2) of an elastic plate 2 and a velvet fastener 5 is fixed on an other side (a lower side in FIG. 2) with an adhesive. Have been.
  • the elastic plate 2 has a thickness of about 2 cm and is a disc made of sponge having a trapezoidal cross section as shown in FIG.
  • a through hole 6 having a diameter of about 3 cm is provided at the center.
  • the polishing cloth 3 has a base cloth 4 on which wool fibers 8 having a length of about 4 to 6 mm are planted.
  • the polishing cloth 3 has the same flat surface as the lower bottom side (the upper side in FIG. 2) of the elastic plate 2 having a trapezoidal cross section.
  • the planted wool fibers 8, 8 form wool fiber groups 9, 9 defined by vertical grooves 7a and vertical grooves 7b provided in a lattice (FIG. 1).
  • the width of the vertical groove 7a and the horizontal groove 7b is 1.5 mn!
  • the distance between the centers of the adjacent vertical grooves 7a and 7a and the distance between the adjacent horizontal grooves 7b and 7b is about 5mm to 8mm. .
  • the velvet fastener 5 has the same planar shape as the upper surface side (the lower side in FIG. 2) of the elastic plate 2 having a trapezoidal cross section.
  • a rotating plate equipped with one of the velvet fasteners 5 to be paired with the velvet fasteners 5 of the polishing machine 1 is connected to the lower end of the rotating shaft of the rotary polishing device (not shown), and the velvet fasteners 5 are bonded and rotated. Attach the polishing machine 1 to the polishing machine.
  • polishing liquid or a compound is applied to the polishing cloth 3, and the polishing plate 1 is rotated to polish the polishing surface.
  • FIG. 4 (a) illustrates, for comparison, the rotation of a conventional polishing machine 10 having only the vertical grooves 15 and no horizontal grooves. Arrows 11 and 12 indicate the rotation direction of the polishing machine 10.
  • the vertical groove 15 is substantially parallel to the arrow 11 indicating the rotation direction of the polishing machine 10. For this reason, the polishing liquid / compound flows appropriately along the vertical grooves 15.
  • the vertical groove 15 is substantially perpendicular to the arrow 12 indicating the rotation direction of the polishing machine. For this reason, the polishing liquid or the compound accumulated in the vertical groove 15 may be slightly dragged at the edge of the vertical groove 15, and the polishing surface may be slightly puffed. As described above, in the case of only the flutes 15, puffs remaining on the polished surface increase.
  • a vertical groove 7a substantially parallel to the arrow 13 indicating the rotation direction of the polishing machine 1 is formed in a portion C surrounded by an ellipse.
  • a transverse groove 7b which is substantially parallel to the arrow 14 indicating the direction of rotation of the polishing machine 1 in the portion D surrounded by the ellipse. Therefore, there is a groove that is substantially parallel to the rotation direction of the polishing platen 1 on the entire surface of the polishing cloth 3, and the polishing agent or the liquid compound is formed along the vertical groove 7a or the horizontal groove 7b on the entire surface of the polishing cloth 3. Flows moderately.
  • FIG. 4 (a) In the conventional polishing machine 10 shown in the figure, as described above, the polishing liquid material and the compound are stored in the vertical grooves 15 which are substantially perpendicular to the rotation direction of the polishing machine 10, and the vertical grooves 1 It is thought that it is slightly dragged at the edge of 5, slightly buffing the polished surface.
  • the grooves are provided in a grid pattern, and the polishing liquid compound stored in the grooves substantially perpendicular to the rotation direction of the polishing machine 1 is: Immediately, it goes around the groove that is almost parallel to the rotation direction of the polishing machine 1 and escapes. For this reason, it is considered that the polishing liquid / compound is less likely to be dragged at the edge of the groove.
  • finish polishing is performed using a polishing machine with a finer polishing cloth or a polishing machine made of a sponge material, but the polishing machine 1 is used. Since very few puffs are left in Kenning, the time required for finish polishing can be reduced. As a result, it was possible to shorten the work time of the daughter and reduce the labor.
  • the polishing machine 1 is provided with the through-holes 6, the liquid agent and the compound gathered in the center of the polishing machine 1 can be stored in the through-holes 6, so that the distribution of the compound is not uneven and the central portion is not uneven. There is no danger of excessive polishing due to the liquid material and compound collected in the area.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A grinder (1) comprising a resilient plate (2) having one side bonded with the back side of an abrasive cloth (3) and the other side provided with a means (5) being secured to the rotary shaft of a rotary grinder, characterized in that longitudinal grooves (7a) and lateral grooves (7b) are made in a lattice from in the surface of the abrasive cloth (3) on the side abutting against an object to be ground.

Description

明細書  Specification
研磨盤 技術分野 Polishing machine technical field
この発明は、 金属その他の加工表面や塗装面の研磨、 艷出しの際に回転研磨装 置の回転軸に取り付けて使用する研磨盤に関する。  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing machine which is used by being attached to a rotating shaft of a rotary polishing machine when polishing or polishing a metal or other processed surface or painted surface.
背景技術 Background art
回転研磨装置の回転軸に取り付けて使用する研磨盤に関しては、 従来から、 弾 性板の一面側に研磨布の背面を固着し、 前記弾性板の他面側に回転研磨装置の回 転軸との固定手段を設け、 前記研磨布の表面を研磨対象物に当接させて研磨する 研磨盤が提案されている。 このような研磨盤は、 外周部を研磨物表面に当接でき 、 線速度の最も速い外周部を研磨に有効に利用でき、 かつ汚れた際に交換が容易 である。  With respect to a polishing machine used by being attached to a rotating shaft of a rotary polishing device, conventionally, a back surface of a polishing cloth is fixed to one surface of an elastic plate, and a rotating shaft of the rotary polishing device is fixed to the other surface of the elastic plate. There has been proposed a polishing machine which is provided with a fixing means, and which makes the surface of the polishing cloth abut against an object to be polished for polishing. In such a polishing machine, the outer peripheral portion can be brought into contact with the surface of the polished material, the outer peripheral portion having the highest linear velocity can be effectively used for polishing, and replacement can be easily performed when it becomes dirty.
従来から知られているこのような研磨盤では、 研磨対象物に当接する研磨布の 表面を、 ベース布に所定長さの繊維を植設して構成する形態が提案されている ( 日本国 実用新案登録出願 平成 4年出願公開第 9 2 7 6 9号公報) 。 この従来 技術においては、 前記研磨布の研磨対象物に当接する表面に、 所定幅毎に一定の 方向、 例えば、 縦方向に延びる複数列の溝条が形成されていた。  In such a conventionally known polishing machine, there has been proposed a form in which a surface of a polishing cloth in contact with an object to be polished is formed by implanting a fiber of a predetermined length on a base cloth. Application for new model registration (1992 application publication No. 927669). In this conventional technique, a plurality of rows of grooves extending in a predetermined direction, for example, a vertical direction, are formed at predetermined intervals on a surface of the polishing cloth that comes into contact with an object to be polished.
研磨作業においては、 適当なコンパウンド、 液剤と、 耐水ペーパー等のぺーパ 一とを用いてペーパー研磨を行った後、 ウールバフ等の繊維を用いて布研磨を行 い、 次に、 スポンジバフを用いてスポンジ研磨を行って最終仕上げとすることが ある。 ここで、 スポンジバフを用いて行われるスポンジ研磨は、 布研磨の際に残 つた Λフ目を消し去る仕上げ研磨になる。  In the polishing operation, paper polishing is performed using a suitable compound, liquid agent and paper such as water-resistant paper, and then cloth polishing is performed using a fiber such as wool buff, and then using a sponge buff. In some cases, final polishing may be performed by sponge polishing. Here, the sponge polishing performed using a sponge buff is a finish polishing that erases the left-hand edge of the cloth when polishing the cloth.
弾性板の一面側に研磨布の背面を固着し、 当該研磨布の表面を研磨対象物の表 面に当接させる構成の前記研磨盤は、 前述した布研磨に用いられることがある。 この布研磨の後に研磨対象物の表面 (研磨面) に残ったパフ目をスポンジ研磨に よつて最終仕上げするのである。  The polishing plate having a configuration in which the back surface of the polishing cloth is fixed to one surface side of the elastic plate and the surface of the polishing cloth is brought into contact with the surface of the object to be polished may be used for the above-described cloth polishing. After this cloth polishing, the puff left on the surface (polishing surface) of the object to be polished is finally finished by sponge polishing.
しかし、 前記のように所定幅毎に一定の方向、 例えば、 縦方向に延びる複数列 の溝条を有する従来の形態の研磨盤については、 この複数列の溝条が研磨時に研 磨面に及ぼすであろう影響を考慮すると、 更なる改良の余地があった。 However, as described above, in a conventional polishing machine having a plurality of rows of grooves extending in a predetermined direction at a predetermined width, for example, a vertical direction, the plurality of rows of grooves are ground during polishing. Considering the possible effects on the polished surface, there was room for further improvement.
前述した従来の研磨盤を用いた布研磨の工程の後にスポンジ研磨を行って研磨 面からパフ目を完全に消し去る作業は簡単なものとはいえなかった。 そこで、 研 磨盤を用いた布研磨を行ったときに研磨面にパフ目が付きにくい研磨盤を提供す ることができれば、 その後のスポンジ研磨の工程によって十分な仕上がりを得る ことが容易になる。  After the above-described cloth polishing process using a conventional polishing machine, sponge polishing is not easily performed to completely remove puffs from the polished surface. Therefore, if it is possible to provide a polishing machine that is less likely to have a puff on the polished surface when the cloth is polished using the polishing machine, a sufficient finish can be easily obtained by the subsequent sponge polishing process.
発明の開示 Disclosure of the invention
この発明は、 従来の研磨盤に存在していた前述した問題点を克服し、 弾性板の 一面側に研磨布の背面を固着し、 前記弾性板の他面側に回転研磨装置の回転軸と の固定手段を設け、 前記研磨布の表面を研磨対象物の研磨面に当接させて研磨す る研磨盤であって、 布研磨に用いられた場合に、 研磨面にバフ目が付きにくい研 磨盤を提供することを目的としている。  The present invention overcomes the above-mentioned problems that existed in a conventional polishing machine, fixes the back surface of a polishing cloth to one surface of an elastic plate, and connects a rotating shaft of a rotary polishing device to the other surface of the elastic plate. A polishing means for polishing the polishing cloth by bringing the surface of the polishing cloth into contact with the polishing surface of the object to be polished. When the polishing disk is used for polishing a cloth, the polishing surface is hardly buffed. The purpose is to provide a polishing board.
このような研磨盤が前述した布研磨に用いられるときに、 研磨対象物に当接す る研磨盤の表面に、 所定幅毎に一定の方向、 例えば、 縦方向に延びる複数列の溝 条が形成されている形態の従来の研磨盤では、 前記複数列の溝条が、 研磨盤の回 転方向に対して略直角をなす箇所が生じる。 この箇所では研磨時に用いる液剤や コンパウンドの 「逃げ」 がー方向にしか形成されないことになる。 本願の発明者 は、 この点に着目し、 研磨盤の回転時に、 液剤ゃコンパウンドの 「逃げ」 が常に 四方向に形成されるように、 縦溝と横溝とを格子状に交差させることを発案した 。 すなわち、 研磨盤の回転時に、 液剤ゃコンパウンドが縦溝、 横溝のどちらの方 向にも逃げられるようにすることにより、 前述した形態の研磨盤が布研磨に用い られる際に生じるパフ目を少なくし、 引き続くスポンジ研磨等の仕上げ研磨に要 する時間の短縮化等を可能にしたのである。  When such a polishing machine is used for the above-described cloth polishing, a plurality of rows of grooves extending in a predetermined direction, for example, a longitudinal direction at predetermined intervals, are provided on the surface of the polishing machine in contact with an object to be polished. In the conventional polishing machine in a form in which the grooves are formed, there are places where the plurality of rows of grooves are substantially perpendicular to the rotation direction of the polishing machine. At this point, the “escape” of the liquid or compound used during polishing is formed only in the negative direction. Focusing on this point, the inventor of the present application proposed that the vertical grooves and the horizontal grooves intersect in a grid pattern so that the “escape” of the liquid agent / compound is always formed in four directions during rotation of the polishing machine. did . In other words, by allowing the liquid agent compound to escape in both the vertical and horizontal grooves during rotation of the polishing machine, puffs generated when the polishing machine of the above-described embodiment is used for cloth polishing are reduced. In addition, the time required for subsequent polishing, such as sponge polishing, has been reduced.
す ¾わち、 この発明の研磨盤は、 弾性板の一面側に研磨布の背面側を固着し、 弾性板の他面側に回転研磨装置の回転軸への固定手段を設けてなる研磨盤であつ て、 前記研磨布の研磨対象物に当接する側である表面に縦溝及び横溝を格子状に 設けたものである。  In other words, the polishing machine of the present invention is a polishing machine comprising: a back surface of a polishing cloth fixed to one surface of an elastic plate; and a fixing means to a rotating shaft of a rotary polishing device provided on the other surface of the elastic plate. Further, vertical grooves and horizontal grooves are provided in a grid pattern on the surface of the polishing cloth which is in contact with the object to be polished.
この発明の研磨盤を構成する前記弾性板は、 研磨施工者の力加減、 研磨装置 ( 回転研磨機) の操作、 研磨対象物表面の凹凸の影響を緩和して、 研磨布の表面を 均一の圧力で研磨面に当接させるものであることが望ましい。 そこで、 弾性板の 材質は、 スポンジやゴム材等従来公知の弾性材料を採用す?)ことができる。 また 、 その厚さ、 形状も適宜決定できるが、 回転運動によって'研磨対象物の表面 (研 磨面) を研磨するものであるから円盤形状とすることが一般的である。 The elastic plate that constitutes the polishing board of the present invention reduces the influence of irregularities on the surface of the polishing object by reducing the force of the polishing operator, operating the polishing device (rotary polishing machine), and reducing the surface of the polishing cloth. It is desirable that the material be brought into contact with the polishing surface with a uniform pressure. Therefore, is the elastic plate made of a conventionally known elastic material such as sponge or rubber material? )be able to. The thickness and shape can also be determined as appropriate. However, since the surface (polished surface) of the object to be polished is polished by rotating motion, a disk shape is generally used.
前記研磨布は、 仕上げの程度等、 研磨の目的、 用途に応じて研磨に適した布材 を適宜選択することができ、 例えば、 起毛素材等を採用し、 その表面に縦溝及び 横溝を格子状に設けることができる。  For the polishing cloth, a cloth material suitable for polishing can be appropriately selected according to the purpose of polishing and the purpose of use, such as the degree of finishing.For example, a brushed material or the like is adopted, and vertical grooves and horizontal grooves are formed on the surface of the cloth. It can be provided in a shape.
また、 前記研磨布の表面の縦溝及び横溝に囲まれた部分に繊維を植設すること ができる。 縦溝及び横溝に囲まれた部分に繊維を植設する場合には、 当該繊維、 例えばウール等の繊維の材質、 繊維の長さも研磨の目的、 用途に応じて選択でき る。 また、 前記繊維を植設する場合の植設する密度、 前記縦溝及び横溝の幅も適 宜変更できる。  Further, fibers can be implanted in a portion of the surface of the polishing cloth surrounded by the vertical grooves and the horizontal grooves. When a fiber is implanted in a portion surrounded by the vertical groove and the horizontal groove, the material of the fiber, for example, fiber such as wool, and the length of the fiber can be selected according to the purpose and application of polishing. In addition, when the fibers are planted, the planting density and the widths of the vertical grooves and the horizontal grooves can be appropriately changed.
研磨布の研磨対象物に当接する側である表面に格子状に縦溝、 横溝を設けるの は、 研磨時に回転運動する研磨盤の各部において、 回転方向 (接線方向) とほぼ 一致する方向の溝を設ける趣旨である。 このように研磨盤の研磨布の表面に回転 方向 (接線方向) とほぼ一致する方向の溝を設けると、 溝に溜まった液剤ゃコン パウンドが溝に沿って適度に流れるので溝部で加わる圧力が適度に緩和され、 研 磨対象物の表面 (研磨面) にパフ目をあまり付けることなく研磨を行うことがで きる。  The provision of vertical and horizontal grooves in a lattice pattern on the surface of the polishing cloth that is in contact with the object to be polished is because grooves in a direction substantially coincident with the rotational direction (tangential direction) in each part of the polishing machine that rotates during polishing. The purpose is to provide. If grooves are formed in the direction of rotation (tangential direction) on the surface of the polishing cloth of the polishing machine in this way, the liquid agent accumulated in the grooves will flow properly along the grooves, and the pressure applied at the grooves will be reduced. It is moderately relaxed and can be polished without making puffs on the surface (polished surface) of the object to be polished.
本願発明の研磨盤は回転研磨装置の回転軸の先端に取り付けられるものである 。 そして、 研磨盤の表面側 (研磨布の表面側) を研磨対象物に当接させつつ、 研 磨盤を回転させて研磨作業を行うものであるから、 研磨作業中に研磨盤が回転研 磨装置の回転軸の先端から容易に外れないことが必要である。 また、 研磨盤は、 研磨の目的、 用途に応じて取り替えることができるように回転研磨装置の回転軸 の先端に容易に着脱できれば便利である。 このような観点から、 前述した弾性板 の他面側に設けられている回転研磨装置の回転軸への固定手段としてベルべット ファスナー材を用いることができる。 なお、 ベルベットファスナー材は互いに嵌 合する雌雄一対となるので、 弾性板の他面側にベルべットファスナー材の一方を 取り付けておき、 他方を回転研磨装置の回転軸の先端に取り付ける。 前記本発明の研磨盤は中心部に、 研磨対象物に当接する表面側から、 回転研磨 装置の回転軸の先端に取り付けられている側に向かって窪む凹部を設けておくこ とができる。 The polishing machine of the present invention is mounted on the tip of the rotating shaft of a rotary polishing machine. The polishing work is performed by rotating the polishing machine while the surface side of the polishing machine (the surface side of the polishing cloth) is in contact with the object to be polished. It is necessary that it does not easily come off the tip of the rotating shaft of the motor. Also, it is convenient if the polishing machine can be easily attached to and detached from the tip of the rotating shaft of the rotary polishing machine so that it can be replaced according to the purpose and application of polishing. From such a viewpoint, a velvet fastener material can be used as a means for fixing to the rotating shaft of the rotary polishing device provided on the other surface side of the elastic plate. Since the velvet fastener material is a pair of male and female fitting with each other, one of the velvet fastener materials is attached to the other surface of the elastic plate, and the other is attached to the tip of the rotating shaft of the rotary polishing device. The polishing machine of the present invention may be provided with a concave portion at the center thereof, which is depressed from the surface contacting the object to be polished toward the side attached to the tip of the rotating shaft of the rotary polishing machine.
当該凹部は、 研磨に用いる液剤ゃコンパウンドが、 研磨盤の回転運動により回 転盤の中心付近に集まる現象が生じた際に、 中心付近に集まってきた液剤、 コン パウンドが厚くならないように逃がし、 中心付近で貯留するものである。 液剤や コンパウンドが研磨盤の中心付近に集まってくるとこれらのコンパウンド等の分 布が不均一となり、 研磨盤の中心付近と外周付近とで研磨の程度が異なって、 研 磨ムラが生じることにがある。 これを回避すべく、 研磨盤の中心付近に集まって きた液剤、 コンパゥンドを貯留できる凹部を設けておくものである。  When the phenomenon in which the liquid material used for polishing and the compound gather near the center of the rotating plate due to the rotation of the polishing machine occurs, the concave portion escapes so that the liquid material and the compound gathered near the center do not become thick. It is stored near the center. When liquids and compounds gather near the center of the polishing machine, the distribution of these compounds becomes uneven, and the degree of polishing differs between the center and the outer periphery of the polishing machine, resulting in uneven polishing. There is. In order to avoid this, a recess is provided in the vicinity of the center of the polishing machine for storing the liquid agent and the compound gathered.
この発明によれば、 研磨盤の研磨対象物表面側に配備されている研磨布の研磨 対象物表面 (研磨面) に当接する面、 すなわち、 研磨布の表面に、 縦溝及び横溝 を格子状に設けたので、 研磨盤の回転時に研磨用の液剤ゃコンパウンドが縦溝又 は横溝に回り込んで逃げることができる効果がある。 これにより、 本発明の研磨 盤を用いて行う布研磨の工程でパフ目が付きにくくなる効果がある。  According to the present invention, a vertical groove and a horizontal groove are formed on the surface of the polishing cloth provided on the polishing object surface side of the polishing board, which is in contact with the polishing object surface (polishing surface), that is, on the polishing cloth surface. Since the polishing liquid is used, there is an effect that the polishing liquid / compound goes around the vertical groove or the horizontal groove and escapes when the polishing disk is rotated. Thereby, there is an effect that a puff is hardly formed in a cloth polishing process performed using the polishing machine of the present invention.
また、 研磨装置との固定手段を、 ベルべヅトファスナー材としたので、 用途に 合わせて粗目用、 細目用等の研磨盤を容易に取り替えることができる。  Also, since the fixing means to the polishing apparatus is made of a velvet fastener material, the polishing machines for coarse and fine can be easily replaced according to the application.
さらに、 研磨盤の中心部に液剤ゃコンパゥンドを収容できる凹部を設けたので 、 液剤ゃコンパウンドによって中心付近に集まることによる研磨ムラ等を防止す ることができる。 図面の簡単な説明 '  Further, since a concave portion capable of accommodating the liquid agent compound is provided in the central portion of the polishing machine, it is possible to prevent polishing unevenness or the like caused by the liquid agent compound gathering near the center. Brief description of the drawings ''
第 1図はこの発明の研磨盤の研磨対象物に当接する面の平面図である。  FIG. 1 is a plan view of a surface of a polishing machine according to the present invention, which is in contact with an object to be polished.
第 2図は第 1図図示の研磨盤の研磨対象物に当接する面を図中上側に向けて表 した正面断面図である。  FIG. 2 is a front cross-sectional view showing a surface of the polishing machine shown in FIG.
1  1
第 3図は第 1図図示の研磨盤の回転研磨装置に固定される面の平面図である。 第 4図は研磨布に設けた溝と、 研磨盤の回転方向との関係を説明する説明図で あって、 第 4図 (a ) は、 従来の縦溝のみを備えた研磨盤の説明図、 第 4図 (b ) は、 縦溝及び横溝を備えた第 1図図示の実施例の説明図である。 発明を実施するための最良の形態 FIG. 3 is a plan view of a surface of the polishing machine shown in FIG. 1 which is fixed to a rotary polishing apparatus. FIG. 4 is an explanatory view for explaining the relationship between the grooves provided in the polishing cloth and the rotating direction of the polishing board. FIG. 4 (a) is an explanatory view of a conventional polishing board having only vertical grooves FIG. 4 (b) is an explanatory view of the embodiment shown in FIG. 1 having a vertical groove and a horizontal groove. BEST MODE FOR CARRYING OUT THE INVENTION
以下、 この発明を実施するための最良の形態を添付図面を参照して説明する。 なお 第 2図は、 研磨面 (すなわち、 研磨対象物の表面) に接して研磨を行う研 磨布 3を上側に配置した状態の本発明の研磨盤の正面断面図で、 第 1図は、 研磨 面 (すなわち、 研磨対象物の表面) に接して研磨を行う研磨布 3を上側に配置し た状態の本発明の研磨盤の平面図である。  Hereinafter, the best mode for carrying out the present invention will be described with reference to the accompanying drawings. FIG. 2 is a front cross-sectional view of the polishing machine of the present invention in a state in which a polishing cloth 3 for polishing in contact with the polishing surface (that is, the surface of the object to be polished) is arranged on the upper side, and FIG. FIG. 2 is a plan view of the polishing board of the present invention in a state where a polishing pad 3 that performs polishing while being in contact with a polishing surface (that is, the surface of an object to be polished) is arranged on the upper side.
この発明の研磨盤 1は、 弾性板 2の一面側 (第 2図において上側) に研磨布 3 、 他面側 (第 2図において下側) にベルベットファスナー 5をそれぞれ接着剤で 固着して構成されている。  The polishing disc 1 of the present invention is configured such that a polishing cloth 3 is fixed on one side (an upper side in FIG. 2) of an elastic plate 2 and a velvet fastener 5 is fixed on an other side (a lower side in FIG. 2) with an adhesive. Have been.
弾性板 2は、 厚さが 2 c m程度で、 第 2図図示のように、 断面台形のスポンジ 製の円盤体である。 また、 中心に直径 3 c m程度の透孔 6を有している。  The elastic plate 2 has a thickness of about 2 cm and is a disc made of sponge having a trapezoidal cross section as shown in FIG. In addition, a through hole 6 having a diameter of about 3 cm is provided at the center.
研磨布 3は、 ベ一ス布 4に 4〜 6 mm程度の長さのウール繊維 8、 8を植設し てある。 研磨布 3は、 断面台形の弾性板 2の下底側 (第 2図において上側) と平 面同一形状である。 植設された前記ウール繊維 8、 8は、 格子状に設けた縦溝 7 aと镡溝 7 bとによって区画されたウール繊維群 9、 9を形成している (第 1図 ) 。 縦溝 7 a、 横溝 7 bの幅は 1 . 5 mn!〜 3 . 5 mm程度であり、 隣り合う縦 溝 7 a、 7 aの間、 隣り合う横溝 7 b、 7 bの間は、 それそれ溝の中心間の距離 が 5 mm〜 8 mm程度である。  The polishing cloth 3 has a base cloth 4 on which wool fibers 8 having a length of about 4 to 6 mm are planted. The polishing cloth 3 has the same flat surface as the lower bottom side (the upper side in FIG. 2) of the elastic plate 2 having a trapezoidal cross section. The planted wool fibers 8, 8 form wool fiber groups 9, 9 defined by vertical grooves 7a and vertical grooves 7b provided in a lattice (FIG. 1). The width of the vertical groove 7a and the horizontal groove 7b is 1.5 mn! The distance between the centers of the adjacent vertical grooves 7a and 7a and the distance between the adjacent horizontal grooves 7b and 7b is about 5mm to 8mm. .
また、 ベルベットファスナー 5は、 断面台形の弾性板 2の上面側 (第 2図にお いて下側) と平面同一形状である。  The velvet fastener 5 has the same planar shape as the upper surface side (the lower side in FIG. 2) of the elastic plate 2 having a trapezoidal cross section.
このように構成された研磨盤 1の使用について説明する。  The use of the polishing machine 1 configured as described above will be described.
研磨盤 1のベルべヅトファスナー 5と対となる一方のベルべヅトファスナーを 装着した回転板を、 回転研磨装置の回転軸の下端に連結し (不図示) 、 当該ベル ベットファスナー 5を貼り合わせて回転研磨装置に研磨盤 1を装着する。  A rotating plate equipped with one of the velvet fasteners 5 to be paired with the velvet fasteners 5 of the polishing machine 1 is connected to the lower end of the rotating shaft of the rotary polishing device (not shown), and the velvet fasteners 5 are bonded and rotated. Attach the polishing machine 1 to the polishing machine.
次に、 研磨布 3に研磨用の液剤又はコンパウンドを付け、 研磨盤 1を回転させ て研磨面を研磨する。  Next, a polishing liquid or a compound is applied to the polishing cloth 3, and the polishing plate 1 is rotated to polish the polishing surface.
ここで、 研磨布 3の表面に設けた縦溝 7 a、 横溝 7 bと研磨盤 1の回転方向と の関係を、 第 4図 (b ) を用いて、 従来の縦溝のみを備えた研磨盤を説明する第 4図 (a ) と対比しつつ説明する。 第 4図 (a ) は、 比較のために、 縦溝 1 5のみで横溝を備えていない従来の研 磨盤 1 0の回転を説明するものである。 矢示 1 1、 1 2は、 研磨盤 1 0の回転方 向を示している。 Here, the relationship between the vertical grooves 7a and the horizontal grooves 7b provided on the surface of the polishing cloth 3 and the rotation direction of the polishing machine 1 will be described with reference to FIG. 4 (b). This will be described in comparison with FIG. 4 (a) for explaining the board. FIG. 4 (a) illustrates, for comparison, the rotation of a conventional polishing machine 10 having only the vertical grooves 15 and no horizontal grooves. Arrows 11 and 12 indicate the rotation direction of the polishing machine 10.
楕円で囲んだ A部では、 縦溝 1 5は研磨盤 1 0の回転方向を示す矢示 1 1と略 平行となる。 このため、 研磨用の液剤ゃコンパウンドは縦溝 1 5に沿って適度に 流れる。 一方、 楕円で囲んだ B部では、 縦溝 1 5は研磨盤の回転方向を示す矢示 1 2と略直角となる。 このため、 縦溝 1 5に溜まった研磨用の液剤やコンパゥン ドは、 縦溝 1 5の縁部で多少引きずられ、 研磨面にわずかにパフ目を付けてしま うことが考えられる。 以上より、 縦溝 1 5のみの場合は、 研磨面に残るパフ目が 多くなる。  In the portion A surrounded by the ellipse, the vertical groove 15 is substantially parallel to the arrow 11 indicating the rotation direction of the polishing machine 10. For this reason, the polishing liquid / compound flows appropriately along the vertical grooves 15. On the other hand, in the part B surrounded by the ellipse, the vertical groove 15 is substantially perpendicular to the arrow 12 indicating the rotation direction of the polishing machine. For this reason, the polishing liquid or the compound accumulated in the vertical groove 15 may be slightly dragged at the edge of the vertical groove 15, and the polishing surface may be slightly puffed. As described above, in the case of only the flutes 15, puffs remaining on the polished surface increase.
これに対し、 第 4図 (b ) 図示の本発明の研磨盤 1では、 楕円で囲んだ C部で は研磨盤 1の回転方向を示す矢示 1 3と略平行となる縦溝 7 aが存在し、 楕円で 囲んだ D部にも研磨盤 1の回転方向を示す矢示 1 4と略平行となる横溝 7 bが存 在する。 従って、 研磨布 3の全面において研磨盤 1の回転方向と略平行となる溝 が存在することとなり、 研磨ほの液剤ゃコンパゥンドは研磨布 3の全面において 縦溝† aまたは横溝 7 bに沿って適度に流れる。  On the other hand, in the polishing machine 1 of the present invention shown in FIG. 4 (b), a vertical groove 7a substantially parallel to the arrow 13 indicating the rotation direction of the polishing machine 1 is formed in a portion C surrounded by an ellipse. There is also a transverse groove 7b which is substantially parallel to the arrow 14 indicating the direction of rotation of the polishing machine 1 in the portion D surrounded by the ellipse. Therefore, there is a groove that is substantially parallel to the rotation direction of the polishing platen 1 on the entire surface of the polishing cloth 3, and the polishing agent or the liquid compound is formed along the vertical groove 7a or the horizontal groove 7b on the entire surface of the polishing cloth 3. Flows moderately.
な 、 研磨布 3の全面では、 例えば、 楕円で囲まれた C部、 D部のように、 研 磨盤 1の回転方向と略平行となる溝が存在すると同時に、 研磨盤 1の回転方向と 略直角となる溝が存在することになる。 第 4図 (a ) 図示の従来の研磨盤 1 0で は、 前記のように研磨盤 1 0の回転方向と略直角となる縦溝 1 5に研磨用の液剤 ゃコンパウンドが溜まり、 縦溝 1 5の縁部で多少引きずられ、 研磨面にわずかに バフ目を付けてしまうと考えられている。  Note that, on the entire surface of the polishing cloth 3, for example, there are grooves substantially parallel to the rotation direction of the polishing machine 1, such as portions C and D surrounded by ellipses, and at the same time, substantially parallel to the rotation direction of the polishing machine 1. There will be grooves at right angles. FIG. 4 (a) In the conventional polishing machine 10 shown in the figure, as described above, the polishing liquid material and the compound are stored in the vertical grooves 15 which are substantially perpendicular to the rotation direction of the polishing machine 10, and the vertical grooves 1 It is thought that it is slightly dragged at the edge of 5, slightly buffing the polished surface.
しかし、 第 4図 (b ) 図示の本発明の研磨盤 1では、 溝は格子状に設けてあり 、 研磨盤 1の回転方向と略直角となる溝に溜まった研磨用の液剤ゃコンパウンド は、 即座に研磨盤 1の回転方向と略平行となる溝へ回り込んで逃がされる。 この ため、 研磨用の液剤ゃコンパウンドが溝の縁部で引きずられることは少なくなる と考えられる。  However, in the polishing machine 1 of the present invention shown in FIG. 4 (b), the grooves are provided in a grid pattern, and the polishing liquid compound stored in the grooves substantially perpendicular to the rotation direction of the polishing machine 1 is: Immediately, it goes around the groove that is almost parallel to the rotation direction of the polishing machine 1 and escapes. For this reason, it is considered that the polishing liquid / compound is less likely to be dragged at the edge of the groove.
実際に、 第 4図 (b ) 図示の本発明の研磨盤 1を使用して布研磨を行った研磨 面と、 第 4図 (a ) 図示の従来の研磨盤 1 0を使用して布研磨を行った研磨面と を比較すると、 研磨盤 1を使用して研磨を行ったときの方が、 研磨面に残された バフ目は少ないことが確認できた。 Actually, a polished surface on which cloth polishing was performed using the polishing table 1 of the present invention shown in FIG. 4 (b) and a cloth polishing table using the conventional polishing table 10 shown in FIG. With the polished surface When it was compared, it was confirmed that less buffing was left on the polished surface when polishing was performed using the polishing machine 1.
研磨盤 1を使用して研磨を行った後は、 更に細目用の研磨布を貼った研磨盤や 、 スポンジ素材の研磨盤などを使用して仕上げ研磨を行うが、 研磨盤 1を使用し た研寧において残されるパフ目が非常に少なくできていることから、 仕上げ研磨 に要 る時間を短縮することができる。 これによつて、 ドータルの作業時間の短 縮、 労力の軽減を図ることができた。  After polishing using the polishing machine 1, finish polishing is performed using a polishing machine with a finer polishing cloth or a polishing machine made of a sponge material, but the polishing machine 1 is used. Since very few puffs are left in Kenning, the time required for finish polishing can be reduced. As a result, it was possible to shorten the work time of the daughter and reduce the labor.
また、 研磨盤 1は、 透孔 6を備えているので、 研磨盤 1の中心部に集まってく る液剤やコンパゥンドを透孔 6に貯留でき、 コンパウンドの分布が不均一となる ことがなく中心部に集まってきた液剤ゃコンパウンドによって過度の研磨をする おそれがない。  In addition, since the polishing machine 1 is provided with the through-holes 6, the liquid agent and the compound gathered in the center of the polishing machine 1 can be stored in the through-holes 6, so that the distribution of the compound is not uneven and the central portion is not uneven. There is no danger of excessive polishing due to the liquid material and compound collected in the area.
以上、 本発明の好ましい実施例を添付図面を参照して説明したが、 本発明はか かる実施例に限定されるものではなく、 特許請求の範囲の記載から把握される技 術的範囲において種々な形態に変更可能である。  As described above, the preferred embodiments of the present invention have been described with reference to the accompanying drawings. However, the present invention is not limited to such embodiments, and various modifications may be made within the technical scope understood from the appended claims. It can be changed to a different form.

Claims

請求の範囲 The scope of the claims
1 . 弾性板の一面側に研磨布の背面側を固着し、 前記弾性板の他面側に回転研磨 装置の回転軸への固定手段を設けてなる研磨盤であって、 前記研磨布の研磨対象 物に当接する側である表面に縦溝及び横溝を格子状に設けたことを特徴とする研 磨盤。  1. A polishing plate having a back surface side of a polishing cloth fixed to one surface side of an elastic plate and a fixing means to a rotating shaft of a rotary polishing device provided on the other surface side of the elastic plate, wherein the polishing cloth is polished. A polishing machine characterized in that vertical and horizontal grooves are provided in a lattice pattern on the surface which is in contact with an object.
2 . 表面の縦溝及び横溝に囲まれた部分に繊維を植設したことを特徴とする請求 の範囲第 1項記載の研磨盤。  2. The polishing machine according to claim 1, wherein fibers are implanted in a portion of the surface surrounded by the vertical and horizontal grooves.
3 . 固定手段は、 ベルベットファスナー材としたことを特徴とする請求の範囲第 1項又は第 2項記載の研磨盤。  3. The polishing machine according to claim 1, wherein the fixing means is a velvet fastener material.
4 . 研磨盤の中心部に、 研磨対象物に当接する側から回転研磨装置の回転軸に固 定されている側に向けて窪む凹部が形成されていることを特徴とする請求の範囲 第 1項乃至第 3項のいずれかに記載の研磨盤。  4. A concave portion is formed in a central portion of the polishing machine, the concave portion being recessed from a side in contact with an object to be polished to a side fixed to a rotating shaft of a rotary polishing apparatus. 4. The polishing machine according to any one of items 1 to 3.
PCT/JP2003/016719 2003-12-25 2003-12-25 Geinder WO2005063444A1 (en)

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PCT/JP2003/016719 WO2005063444A1 (en) 2003-12-25 2003-12-25 Geinder
EP03782894A EP1698434A4 (en) 2003-12-25 2003-12-25 Geinder
CNA2003801109088A CN1886233A (en) 2003-12-25 2003-12-25 Grinder
AU2003292618A AU2003292618A1 (en) 2003-12-25 2003-12-25 Geinder

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JP2017042848A (en) * 2015-08-24 2017-03-02 アイシン・エーアイ株式会社 Gear polishing tool and polishing sheet used therefor
CN107127674B (en) * 2017-07-08 2021-01-08 上海致领半导体科技发展有限公司 Ceramic carrier disc for polishing semiconductor wafer

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JPH08216029A (en) * 1995-02-07 1996-08-27 Daiki:Kk Precision-polishing sheet
JP2002239920A (en) * 2001-02-09 2002-08-28 Ujike:Kk Abrasive disc for rotary polishing machine

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US6044512A (en) * 1997-05-19 2000-04-04 Lake Country Manufacturing, Inc. Foam buffing pad and method of manufacture thereof
US5888121A (en) * 1997-09-23 1999-03-30 Lsi Logic Corporation Controlling groove dimensions for enhanced slurry flow
US6783448B2 (en) * 2002-05-31 2004-08-31 Gary L. Sabo Foam buffing/polishing pad

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JPH08216029A (en) * 1995-02-07 1996-08-27 Daiki:Kk Precision-polishing sheet
JP2002239920A (en) * 2001-02-09 2002-08-28 Ujike:Kk Abrasive disc for rotary polishing machine

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Title
See also references of EP1698434A4 *

Also Published As

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CN1886233A (en) 2006-12-27
EP1698434A4 (en) 2008-10-15
EP1698434A1 (en) 2006-09-06
AU2003292618A1 (en) 2005-07-21

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