WO2005033521A1 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- WO2005033521A1 WO2005033521A1 PCT/GB2004/004114 GB2004004114W WO2005033521A1 WO 2005033521 A1 WO2005033521 A1 WO 2005033521A1 GB 2004004114 W GB2004004114 W GB 2004004114W WO 2005033521 A1 WO2005033521 A1 WO 2005033521A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pump
- pumping
- pump according
- rotor
- pumping section
- Prior art date
Links
- 238000005086 pumping Methods 0.000 claims abstract description 105
- 239000012530 fluid Substances 0.000 claims abstract description 32
- 230000007423 decrease Effects 0.000 claims 4
- 150000001875 compounds Chemical class 0.000 description 6
- 230000003068 static effect Effects 0.000 description 6
- 230000003993 interaction Effects 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 230000004323 axial length Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Definitions
- This invention relates to a vacuum pump and in particular a compound vacuum pump with multiple ports suitable for differential pumping of multiple chambers.
- a sample and carrier gas are introduced to a mass analyser for analysis.
- a mass analyser for analysis.
- FIG 1 In such a system there exists a high vacuum chamber 10 immediately following first and second evacuated interface chambers 12, 14.
- the first interface chamber 12 is the highest-pressure chamber in the evacuated spectrometer system and may contain an orifice or capillary through which ions are drawn from the ion source into the first interface chamber 12.
- the second, interface chamber 14 may include ion optics for guiding ions from the first interface chamber 12 into the high vacuum chamber 10.
- the first interface chamber 12 is at a pressure of around 1 mbar
- the second interface chamber 14 is at a pressure of around 10 "3 mbar
- the high vacuum chamber 10 is at a pressure of around 10 "5 rnbar.
- the high vacuum chamber 10 and second interface chamber 14 can be evacuated by means of a compound vacuum pump 16.
- the vacuum pump has a first pumping section 18 and a second pumping section 20 each in the form of a set of turbo-molecular stages, and a third pumping section in the form of a Holweck drag mechanism 22; an alternative form of drag mechanism, such as a Siegbahn or Gaede mechanism, could be used instead.
- Each set of turbo- molecular stages comprises a number (three shown in Figure 1 , although any suitable number could be provided) of rotor 19a, 21a and stator 19b, 21 b blade pairs of known angled construction.
- the Holweck mechanism 22 includes a number (two shown in Figure 1 although any suitable number could be provided) of rotating cylinders 23a and corresponding annular stators 23b and helical channels in a manner known per se.
- a first pump inlet 24 is connected to the high vacuum chamber 10, and fluid pumped through the inlet 24 passes through both sets of turbo-molecular stages in sequence and the Holweck mechanism 22 and exits the pump via outlet 30.
- a second pump inlet 26 is connected to the second interface chamber 14, and fluid pumped through the inlet 26 passes through one set of turbo-molecular stages and the Holweck mechanism 22 and exits the pump via outlet 30.
- the first interface chamber 12 may be connected to a backing pump (not shown), which may also pump fluid from the outlet 30 of the compound vacuum pump 16. As fluid entering each pump inlet passes through a respective different number of stages before exiting from the pump, the pump 16 is able to provide the required vacuum levels in the chambers 10, 14.
- the present invention provides a vacuum pump comprising a first pumping section, a second pumping section downstream from the first pumping section, a third pumping section downstream from the second pumping section, a first pump inlet through which fluid can enter the pump and pass through each of the pumping sections towards a pump outlet, and a second pump inlet through which fluid can enter the pump and pass through only the second and the third pumping sections towards the outlet, wherein the third pumping section comprises a helical groove formed in a stator thereof, and at least one of the first and second pumping sections comprises a helical groove formed in a rotor thereof.
- the second, turbo-molecular pumping section 20, for example, of the known pump described with reference to Figure 1 can be effectively replaced by a pumping section having an externally threaded, or helical, rotor.
- the inlet of the helix will behave in use like a rotor of a turbomolecular stage, and thus provide a pumping action through both axial and radial interactions.
- a Holweck mechanism with a static thread such as that indicated at 22 in Figure 1 , pumps fluid by nominally radial interactions between the thread and cylinder.
- the capacity of an externally threaded, deep grooved helical rotor can be comparable to that of an equivalent diameter turbomolecular stage when operating at low inlet pressures, for example below 10 '3 mbar.
- the advantage of the use of such a deep groove helical rotor in place of a turbomolecular stage is that it can offer a higher capacity at higher inlet pressures (above 10 "3 mbar) with lower levels of power consumption / heat generation - a limiting factor of the operational window of turbomolecular pumps.
- Minimising the increase in pump size/length whilst increasing the system performance where required can make the pump particularly suitable for use as a compound pump for use in differentially pumping multiple chambers of a bench- top mass spectrometer system requiring a greater mass flow rate at, for example, the middle chamber to increase the sample flow rate into the analyser with a minimal or no increase in pump size.
- offering static surfaces adjacent to the outlet of the helical rotor stage by providing a third pumping section having a helical groove formed in a stator thereof , can further optimise pump performance.
- the helical rotor preferably has a tapering thread depth from inlet to outlet (preferably deeper at the inlet side than at the outlet side). Furthermore, the helical rotor preferably has a different helix angle at the inlet side than at the outlet side; both the thread depth and helix angle are preferably reduced smoothly along the axial length of the pumping section from the inlet side towards the outlet side.
- the first pumping section comprises at least one turbomolecular stage, preferably at least three turbo-molecular stages.
- the first and second pumping sections may be of a different size/diameter. This can offer selective pumping performance.
- the helical rotor is located downstream from said at least one turbo-molecular stage.
- the turbo-molecular stage is preferably arranged such that the molecules of fluid entering the helical rotor have been emitted from the surface of a stator of the turbomolecular stage by placing a stator stage as the final stage of the turbomolecular section adjacent the inlet side of the helical rotor.
- the second pumping section may further comprise at least one turbomolecular pumping stage downstream from the helical rotor.
- the present invention provides a vacuum pump comprising a first pumping section and, downstream therefrom, a second pumping section, a first pump inlet through which fluid can enter the pump and pass through both the first pumping section and the second pumping section towards a pump outlet, and a second pump inlet through which fluid can enter the pump and pass through, of said sections, only the second pumping section towards the outlet, wherein one of the first and second pumping sections comprises an externally threaded rotor and one of the first and second pump inlets extends at least partially about the externally threaded rotor.
- the invention also provides a differentially pumped vacuum system comprising two chambers and a pump as aforementioned for evacuating each of the chambers.
- One of the pumping sections arranged to pump fluid from a chamber in which a pressure above 10 "3 mbar, more preferably above 5x10 "3 mbar, is to be generated preferably comprises an externally threaded rotor.
- Figure 2 is a simplified cross-section through a first embodiment of a multi port vacuum pump suitable for evacuating the differentially pumped mass spectrometer system of Figure 1 ;
- Figure 3 illustrates an externally threaded rotor of the pump of Figure 2;
- Figure 4(a) is a simplified cross-section through a second embodiment of a multi port vacuum pump suitable for evacuating the differentially pumped mass spectrometer system of Figure 1 ;
- Figure 4(b) is a plan view of the pump of Figure 4(a);
- Figure 5 illustrates the configuration of a pump inlet of the pump of Figure 4(a);
- Figure 6(a) is a simplified cross-section through a third embodiment of a multi port vacuum pump suitable for evacuating the differentially pumped mass spectrometer system of Figure 1 ;
- Figure 6(b) is a plan view of the pump of Figure 6(a).
- a first embodiment of a vacuum pump 100 suitable for evacuating at the least the high vacuum chamber 10 and intermediate chamber 14 of the differentially pumped mass spectrometer system described above with reference to Figure 1 comprises a multi-component body 102 within which is mounted a shaft 104. Rotation of the shaft is effected by a motor (not shown), for example, a brushless dc motor, positioned about the shaft 104.
- the shaft 104 is mounted on opposite bearings (not shown).
- the drive shaft 104 may be supported by a hybrid permanent magnet bearing and oil lubricated bearing system.
- the pump includes three pumping sections 106, 108 and 112.
- the first pumping section 106 comprises a set of turbo-molecular stages.
- the set of turbo-molecular stages 106 comprises three rotor blades and three stator blades of known angled construction.
- a rotor blade is indicated at 107a and a stator blade is indicated at 107b.
- the rotor blades 107a are mounted on the drive shaft 104.
- the second pumping section 108 comprises an externally threaded rotor 109, as shown in more detail in Figure 3.
- the rotor 109 comprises a bore 110 through which passes the drive shaft 104, and an external thread 111a defining a helical groove 111 b.
- the depth of the thread 111 a, and thus the depth of the groove 111b, can be designed to taper from the inlet side 111 c of the rotor 109 towards the outlet side 111 d.
- the thread 111 a is deeper at the inlet side than at the outlet side, although this is not essential.
- the helix angle namely the angle of inclination of the thread to a plane perpendicular to the axis of the shaft 104, of the rotor can also vary from the inlet side to the outlet side; in this embodiment, the helix angle is shallower at the outlet side than at the inlet side, although again this is not essential.
- the Holweck mechanism comprises two rotating cylinders 113a, 113b and corresponding annular stators 114a, 114b having helical channels formed therein in a manner known per se.
- the rotating cylinders 113a, 113b are preferably formed from a carbon fibre material, and are mounted on a disc 115, which is located on the drive shaft 104.
- the disc 115 is also mounted on the drive shaft 104.
- Downstream of the Holweck mechanism 112 is a pump outlet 116.
- one or more these elements may be located on, preferably integral with, a common impeller mounted on the drive shaft 104, with the carbon fibre rotating cylinders 113a, 113b of the Holweck mechanism 112 being mounted on the rotating disc 115 following machining of these integral rotary elements.
- the pump 100 has two inlets; although only two inlets are used in this embodiment, the pump may have three or more inlets, which can be selectively opened and closed and can, for example, make the use of internal baffles to guide different flow streams to particular portions of a mechanism.
- the first, low fluid pressure inlet 120 is located upstream of all of the pumping sections.
- the second, high fluid pressure inlet 122 is located interstage the first pumping section 106 and the second pumping section 108.
- each inlet is connected to a respective chamber of the differentially pumped mass spectrometer system. Fluid passing through the first inlet 120 from the low pressure chamber 10 passes through each of the pumping sections 106, 108, 112 and exits the pump 100 via pump outlet 116.
- the first pumping section 106 is preferably arranged such that the molecules of fluid entering the helical rotor 109 have been emitted from the surface of the final stator 107c of that section 106, and the subsequent stage of the Holweck mechanism 112 is also preferably stationary to offer static surfaces at the outlet side 111 d of the rotor 109.
- Fluid passing through the second inlet 122 from the middle pressure chamber 14 enters the pump 100 and passes through pumping sections 108, 112 only and exits the pump via outlet 116. Fluid passing through a third inlet 124 from the high pressure chamber 12 may be pumped by a backing pump (not shown) which also backs the pump 100 via outlet 116.
- the first interface chamber 12 is at a pressure of around 1 mbar
- the second interface chamber 14 is at a pressure of around 10 "2 - 10 "3 mbar
- the high vacuum chamber 10 is at a pressure of around 10 "5 mbar.
- the pressure in the second interface chamber 14 can be increased in the embodiment shown in Figure 2.
- a turbo-molecular pumping section such as that indicated at 20 in Figure 1 would not be as effective as the pumping section 108 in Figure 2 at maintaining a pressure of around 10 "2 mbar in the second interface chamber 14, and would in use consume more power, generating more heat than pumping section 108 and potentially have less performance due to operating further outside its effective performance range.
- a particular advantage of the embodiment described above is that the mass flow rate of fluid entering the pump from the middle chamber 14 can be at least doubled in comparison to the known arrangement shown in Figure 1 without any increase in the size of the pump.
- the flow rate of the sample entering the high vacuum chamber 10 from the middle chamber can also be increased, increasing the performance of the differentially pumped mass spectrometer system.
- FIGS 4(a) and 4(b) illustrate a second embodiment of a vacuum pump 200 suitable for evacuating at the least the high vacuum chamber 10 and intermediate chamber 14 of the differentially pumped mass spectrometer system described above with reference to Figure 1.
- the second embodiment is similar to the first embodiment, with the exception that the second pumping section 108 has been extended towards the first pumping section 106.
- the capture rate of molecules from the chamber 14 can be improved in comparison to the first embodiment, thereby further lowering the pressure in the middle chamber 14 and further increasing the performance of the differentially pumped mass spectrometer system.
- FIGS 6(a) and 6(b) illustrate a third embodiment of a vacuum pump 300 suitable for evacuating at the least the high vacuum chamber 10 and intermediate chamber 14 of the differentially pumped mass spectrometer system described above with reference to Figure 1.
- This third embodiment is similar to the prior art pump 16 shown in Figure 1 , with the exception that the second pumping section 20 now includes a helical rotor 302 located between the turbomolecular stages of the second pumping section 20 and the first pumping section 18.
- part of the second pumping section 20 is now axially adjacent the second inlet 26, such that the second inlet 26 now extends partially around a helical rotor 302 of the second pumping section 20.
- the capture rate of molecules from the middle chamber 14 can be increased in comparison to the prior art, thereby lowering the pressure in the middle chamber 14 and increasing the performance of the differentially pumped mass spectrometer system.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04768657.1A EP1668256B1 (en) | 2003-09-30 | 2004-09-23 | Vacuum pump |
US10/572,889 US8393854B2 (en) | 2003-09-30 | 2004-09-23 | Vacuum pump |
JP2006530558A JP2007507658A (en) | 2003-09-30 | 2004-09-23 | Vacuum pump |
CA2563241A CA2563241C (en) | 2003-09-30 | 2004-09-23 | Vacuum pump |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0322883.0A GB0322883D0 (en) | 2003-09-30 | 2003-09-30 | Vacuum pump |
GB0322883.0 | 2003-09-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005033521A1 true WO2005033521A1 (en) | 2005-04-14 |
Family
ID=29287129
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB2004/004114 WO2005033521A1 (en) | 2003-09-30 | 2004-09-23 | Vacuum pump |
Country Status (7)
Country | Link |
---|---|
US (1) | US8393854B2 (en) |
EP (1) | EP1668256B1 (en) |
JP (1) | JP2007507658A (en) |
CN (1) | CN100429405C (en) |
CA (2) | CA2737136C (en) |
GB (1) | GB0322883D0 (en) |
WO (1) | WO2005033521A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010089579A1 (en) * | 2009-02-06 | 2010-08-12 | Edwards Limited | Multiple inlet vacuum pumps |
US8105013B2 (en) | 2005-02-25 | 2012-01-31 | Edwards Limited | Vacuum pump |
EP3032106A1 (en) * | 2014-12-08 | 2016-06-15 | Pfeiffer Vacuum Gmbh | Vacuum pump |
WO2019178128A1 (en) * | 2018-03-15 | 2019-09-19 | Lam Research Corporation | Turbomolecular pump deposition control and particle management |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102009011082A1 (en) * | 2009-02-28 | 2010-09-02 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
TWI586893B (en) * | 2011-11-30 | 2017-06-11 | Edwards Japan Ltd | Vacuum pump |
CN105370587A (en) * | 2015-12-07 | 2016-03-02 | 东北大学 | Compound molecular pump capable of reducing traction-level gap backflow |
DE202016001950U1 (en) * | 2016-03-30 | 2017-07-03 | Leybold Gmbh | vacuum pump |
CN108105121B (en) * | 2017-12-29 | 2020-03-24 | 东北大学 | Multistage composite high-vacuum dry pump |
GB2581382B (en) * | 2019-02-15 | 2021-08-18 | Edwards Ltd | A pump and a method of pumping a gas |
JP7361640B2 (en) * | 2020-03-09 | 2023-10-16 | エドワーズ株式会社 | Vacuum pump |
CN112160919A (en) * | 2020-09-28 | 2021-01-01 | 东北大学 | Turbo molecular pump and composite molecular pump comprising same |
EP4227538A1 (en) * | 2023-05-30 | 2023-08-16 | Pfeiffer Vacuum Technology AG | Vacuum pump with an inlet opening extending axially over a pump element |
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GB2360066A (en) * | 2000-03-06 | 2001-09-12 | Boc Group Plc | Vacuum pump |
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-
2003
- 2003-09-30 GB GBGB0322883.0A patent/GB0322883D0/en not_active Ceased
-
2004
- 2004-09-23 CA CA2737136A patent/CA2737136C/en not_active Expired - Fee Related
- 2004-09-23 WO PCT/GB2004/004114 patent/WO2005033521A1/en active Application Filing
- 2004-09-23 CA CA2563241A patent/CA2563241C/en not_active Expired - Fee Related
- 2004-09-23 JP JP2006530558A patent/JP2007507658A/en active Pending
- 2004-09-23 US US10/572,889 patent/US8393854B2/en not_active Expired - Fee Related
- 2004-09-23 CN CNB2004800280859A patent/CN100429405C/en not_active Expired - Fee Related
- 2004-09-23 EP EP04768657.1A patent/EP1668256B1/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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EP0919726A1 (en) * | 1997-11-27 | 1999-06-02 | The BOC Group plc | Vacuum pumps |
GB2360066A (en) * | 2000-03-06 | 2001-09-12 | Boc Group Plc | Vacuum pump |
EP1302667A1 (en) * | 2001-10-15 | 2003-04-16 | The BOC Group plc | Vacuum pumps |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8105013B2 (en) | 2005-02-25 | 2012-01-31 | Edwards Limited | Vacuum pump |
WO2010089579A1 (en) * | 2009-02-06 | 2010-08-12 | Edwards Limited | Multiple inlet vacuum pumps |
US20110286864A1 (en) * | 2009-02-06 | 2011-11-24 | Edwards Limited | Multiple inlet vacuum pumps |
US8740588B2 (en) | 2009-02-06 | 2014-06-03 | Edwards Limited | Multiple inlet vacuum pumps |
EP3032106A1 (en) * | 2014-12-08 | 2016-06-15 | Pfeiffer Vacuum Gmbh | Vacuum pump |
WO2019178128A1 (en) * | 2018-03-15 | 2019-09-19 | Lam Research Corporation | Turbomolecular pump deposition control and particle management |
US10655638B2 (en) | 2018-03-15 | 2020-05-19 | Lam Research Corporation | Turbomolecular pump deposition control and particle management |
Also Published As
Publication number | Publication date |
---|---|
GB0322883D0 (en) | 2003-10-29 |
CN1860299A (en) | 2006-11-08 |
CA2563241C (en) | 2011-08-02 |
CA2563241A1 (en) | 2005-04-14 |
CA2737136A1 (en) | 2005-04-14 |
US20070031263A1 (en) | 2007-02-08 |
CA2737136C (en) | 2011-11-15 |
JP2007507658A (en) | 2007-03-29 |
CN100429405C (en) | 2008-10-29 |
US8393854B2 (en) | 2013-03-12 |
EP1668256B1 (en) | 2016-08-17 |
EP1668256A1 (en) | 2006-06-14 |
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